Steel sheet type flexible connection gantry motion platform

Abstract

The invention discloses a steel sheet type flexible connection gantry motion platform, and relates to the field of precision mechanical structures. The motion platform comprises a first Y-axis gantry, a second Y-axis gantry, an X-axis cross beam, a floating end connecting assembly and a fixed end connecting assembly, the first Y-axis gantry and the second Y-axis gantry are fixedly arranged on two parallel supporting legs respectively, the floating end connecting assembly is in sliding connection with the first Y-axis gantry, and the fixed end connecting assembly is in sliding connection with the second Y-axis gantry. One end of the X-axis cross beam is connected with the floating end connecting assembly through the cross beam floating end connecting position, and the other end of the X-axis cross beam is connected with the fixed end connecting assembly through the cross beam fixed end connecting position. According to the steel sheet type flexible connection gantry motion platform adopting the structure, the axial flexible telescopic cross beam is combined with the multidirectional flexible connection structure, so that the problems of thermal stress accumulation, error transfer rigidness and insufficient dynamic performance of a traditional gantry are solved.

Description

Technical Field

[0001] The present invention relates to the field of precision mechanical structures, and more particularly to a steel sheet type flexible connection gantry motion platform. Background Art

[0002] In the field of high-end precision manufacturing (such as semiconductor packaging, OLED panel inspection, power battery welding, etc.), the gantry is used as the core motion mechanism, and its thermal stability, motion accuracy and dynamic rigidity directly determine the performance of the equipment. Traditional gantries mostly adopt rigid welding or bolt-fixed structures, with a rigid connection between the cross beam and the column. Such designs have the following significant defects under temperature changes or high-speed motion conditions:

[0003] 1. Thermal stress accumulation: When the cross beam expands due to heat, internal stress is generated under the constraint of the column due to the difference in the thermal expansion coefficients of metal materials. Long-term action causes guide rail deformation and bearing wear, shortening the service life;

[0004] 2. Error transfer rigidification: Minor misalignments in machining and assembly (such as column parallelism > 0.01 mm / m) will be amplified to millimeter-level offsets at the end through rigid connections, requiring frequent shutdowns for calibration;

[0005] 3. Dynamic performance bottleneck: Traditional slide rail compensation mechanisms rely on contact sliding, generating recoil and vibration during high-frequency motion, and it is difficult to meet the accuracy requirements (ISO 230-4 standard) of high-acceleration motion above 20 Hz.

[0006] In recent years, flexible connection technology (Remote Compliance Center, RCC) has shown advantages in the end effectors of robots. By designing a "compliance center", the joint has controllable flexibility in a specific direction while maintaining high rigidity in other directions. However, such technology has not been deeply integrated with the gantry structure, and there are still technical gaps, especially in solving multi-physical field coupling errors such as thermal-mechanical-electrical, frictionless compensation, and multi-axis collaborative control.

[0007] Therefore, there is an urgent need for an innovative design that organically combines an axially flexible telescopic cross beam with a multi-directional compliant connection structure to achieve thermal expansion self-compensation and external force interference isolation while ensuring the radial rigidity and dynamic response speed of the gantry, thereby breaking through the performance bottleneck of precision manufacturing equipment. Summary of the Invention

[0008] The object of the present invention is to provide a steel sheet type flexible connection gantry motion platform, which solves the problems of thermal stress accumulation, error transfer rigidification and insufficient dynamic performance of traditional gantries through the combination of an axially flexible telescopic cross beam and a multi-directional compliant connection structure.

[0009] To achieve the above object, the present invention provides a steel sheet type flexible connection gantry motion platform, which includes a first Y-axis gantry, a second Y-axis gantry, an X-axis cross beam, a floating end connection component and a fixed end connection component. The first Y-axis gantry and the second Y-axis gantry are respectively fixedly arranged on two parallel supporting feet. The floating end connection component is slidably connected to the first Y-axis gantry, and the fixed end connection component is slidably connected to the second Y-axis gantry. One end of the X-axis cross beam is connected to the floating end connection component through a cross beam floating end connection, and the other end of the X-axis cross beam is connected to the fixed end connection component through a cross beam fixed end connection.

[0010] Preferably, the floating end connection component includes two floating end sliders, two floating end steel sheets, a first cross beam connecting plate and a linear motor mover. Both of the two floating end sliders are slidably connected to the linear guide rails on the supporting feet. The first cross beam connecting plate is connected to the sliding guide rails on the first Y-axis gantry through the linear motor mover. The two floating end sliders are respectively fixedly connected to both ends of the first cross beam connecting plate through the two floating end steel sheets.

[0011] Preferably, the fixed end connection component includes two fixed end sliders, a second cross beam connecting plate, a slider connecting plate and two fixed end steel sheets. Both of the two fixed end sliders are slidably connected to the linear guide rails. The second cross beam connecting plate is connected to the sliding guide rails on the second Y-axis gantry through the linear motor mover. The two fixed end sliders are fixedly connected through the slider connecting plate. The two fixed end sliders are respectively fixedly connected to both ends of the second cross beam connecting plate through the two fixed end steel sheets.

[0012] Preferably, the materials of the floating end steel sheet and the fixed end steel sheet are both 65Mn spring steel.

[0013] Preferably, the thickness of the floating end steel sheet is 0.5 mm - 1 mm, the width of the floating end steel sheet ≥ 60 mm, and the connection height of the floating end steel sheet is 20 mm - 30 mm.

[0014] Preferably, the thickness of the fixed end steel sheet is 0.5 mm - 1 mm, the width of the fixed end steel sheet ≥ 60 mm, and the connection height of the fixed end steel sheet is 20 mm - 30 mm.

[0015] Preferably, the thickness of the floating end steel sheet and the fixed end steel sheet allows the X-axis cross beam to elastically deform in its length direction, and the width of the floating end steel sheet and the fixed end steel sheet inhibits the X-axis cross beam from deforming in its vertical direction and width direction.

[0016] Preferably, the linear guide is fixedly arranged on the side surface of the support leg, and a workbench and a counterweight are slidably connected to both side surfaces of the X-axis crossbeam, and the workbench and the counterweight move in opposite directions on the X-axis crossbeam.

[0017] Advantages of the present invention:

[0018] (1) Thermal expansion self-compensation and stress elimination: Through the combined design of the floating-end connection component and the fixed-end connection component, when the X-axis crossbeam expands due to heat, it can freely expand and contract along its length direction through the elastic deformation of the steel sheet, completely releasing the thermal stress and reducing the frequency of shutdown maintenance caused by thermal stress;

[0019] (2) High-precision error isolation and stability enhancement: The symmetrically arranged steel sheets in the floating-end connection component and the fixed-end connection component achieve axial flexibility and high rigidity in other directions through specific dimensions;

[0020] (3) Through the reverse movement design of the workbench and the counterweight and the synergistic effect of the flexible connection of the steel sheet, the dual technical effects of dynamic cancellation of inertial force and flexible release of structural stress are achieved. When the workbench moves at high speed along the X-axis crossbeam and generates an inertial force, the counterweight moves in the opposite direction to generate an equal and opposite inertial force, and based on the principle of conservation of momentum, the vector cancellation of the two is realized, reducing system vibration; at the same time, the torsion generated by the reverse movement of the counterweight on the X-axis crossbeam is dispersed and absorbed through the elastic deformation of the steel sheet, improving the long-term precision stability of the gantry structure; the reverse movement design and the flexible anti-torsion structure complement each other. The former reduces the inertial force impact from the force source end, and the latter inhibits stress concentration from the transmission path, enabling the gantry system to still maintain a stable operating state with low vibration and low deformation under high-speed motion conditions, breaking through the technical bottleneck of "it is difficult to balance inertial force cancellation and structural stress control" in traditional counterweight designs.

[0021] The technical solution of the present invention will be further described in detail below through the drawings and embodiments. Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of a steel sheet type flexible connection gantry motion platform of the present invention;

[0023] Figure 2 It is a schematic structural diagram of the floating-end connection component;

[0024] Figure 3 It is a schematic structural diagram of the fixed-end connection component;

[0025] Figure 4 It is a schematic structural diagram of the X-axis crossbeam;

[0026] Figure 5 It is a schematic diagram when the floating-end steel sheet in the floating-end connection component is elastically deformed under force.

[0027] Among them, 1 is the supporting leg; 2 is the first Y-axis gantry; 3 is the floating-end connection assembly; 301 is the floating-end steel sheet; 302 is the first crossbeam connection plate; 303 is the floating-end slider; 4 is the X-axis crossbeam; 5 is the fixed-end connection assembly; 501 is the slider connection plate; 502 is the fixed-end slider; 503 is the fixed-end steel sheet; 504 is the second crossbeam connection plate; 6 is the sliding guide rail; 7 is the second Y-axis gantry; 8 is the linear guide rail; 9 is the linear motor mover; 10 is the counterweight; 11 is the workbench. Specific embodiments

[0028] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0029] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] The following will describe in detail some embodiments of the present invention with reference to the drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0031] Embodiment

[0032] As Figures 1-5 shown, a steel-sheet flexible connection gantry motion platform includes a first Y-axis gantry 2, a second Y-axis gantry 7, an X-axis crossbeam 4, a floating-end connection assembly 3, and a fixed-end connection assembly 5. The first Y-axis gantry 2 and the second Y-axis gantry 7 are respectively fixedly arranged on two parallel supporting legs 1. The floating-end connection assembly 3 is slidably connected to the first Y-axis gantry 2, and the fixed-end connection assembly 5 is slidably connected to the second Y-axis gantry 7. One end of the X-axis crossbeam 4 is connected to the floating-end connection assembly 3 through the crossbeam floating-end connection, and the other end of the X-axis crossbeam 4 is connected to the fixed-end connection assembly 5 through the crossbeam fixed-end connection.

[0033] The floating end connection assembly 3 includes two floating end sliders 303, two floating end steel sheets 301, a first crossbeam connecting plate 302, and a linear motor mover 9. Both floating end sliders 303 are slidably connected to the linear guide 8 on the support leg 1. The first crossbeam connecting plate 302 is connected to the sliding guide 6 on the first Y-axis gantry 2 through the linear motor mover 9. The two floating end sliders 303 are respectively fixedly connected to both ends of the first crossbeam connecting plate 302 through two floating end steel sheets 301. The upper end of the X-axis crossbeam 4 is fixedly connected to the first crossbeam connecting plate 302.

[0034] The fixed end connection assembly 5 includes two fixed end sliders 502, a second crossbeam connecting plate 504, a slider connecting plate 501, and two fixed end steel sheets 503. Both fixed end sliders 502 are slidably connected to the linear guide 8. The second crossbeam connecting plate 504 is connected to the sliding guide 6 on the second Y-axis gantry 7 through the linear motor mover 9. The two fixed end sliders 502 are fixedly connected through the slider connecting plate 501. The two fixed end sliders 502 are respectively fixedly connected to both ends of the second crossbeam connecting plate 504 through two fixed end steel sheets 503. The upper end of the X-axis crossbeam 4 is fixedly connected to the second crossbeam connecting plate 504, and the lower end of the X-axis crossbeam 4 is fixedly connected to the slider connecting plate 501.

[0035] The materials of the floating end steel sheet 301 and the fixed end steel sheet 503 are both 65Mn spring steel. 65Mn has the material advantages of high elastic modulus (E = 210 GPa) and high yield strength (σy≥750 MPa), and the fatigue resistance can be further improved by oil quenching at 850°C + tempering at 480°C. The thickness of the floating end steel sheet 301 is 0.5 mm - 1 mm, the width of the floating end steel sheet 301 ≥ 60 mm, and the connection height of the floating end steel sheet 301 is 20 mm - 30 mm. The thickness of the fixed end steel sheet 503 is 0.5 mm - 1 mm, the width of the fixed end steel sheet 503 ≥ 60 mm, and the connection height of the fixed end steel sheet 503 is 20 mm - 30 mm. The connection height refers to the length between the upper end face of the slider and the lower end face of the crossbeam connecting plate. If the connection height is too long, it will affect the support rigidity of the steel sheet, and if it is too short, it will affect the elastic deformation of the steel sheet.

[0036] The thickness of the floating end steel sheet 301 and the fixed end steel sheet 503 allows the X-axis cross beam 4 to elastically deform in its length direction, and the width of the floating end steel sheet 301 and the fixed end steel sheet 503 inhibits the deformation of the X-axis cross beam 4 in its vertical direction and width direction; the linear guide rail 8 is laterally fixedly arranged on the side surface of the support leg 1, and the workbench 11 and the counterweight 10 are slidably connected to both side surfaces of the X-axis cross beam 4, and the moving directions of the workbench 11 and the counterweight 10 on the X-axis cross beam 4 are opposite. When the workbench 11 moves at high speed, its inertial force will impact the gantry structure, and the reverse movement of the counterweight 10 will generate an inertial force in the opposite direction, which offsets this impact through the law of conservation of momentum and reduces system vibration. However, it will generate a torsional force on the X-axis cross beam 4. If the two ends of the X-axis cross beam 4 are fixedly connected at this time, then the connection between the X-axis cross beam 4 and the Y-axis gantry will bear this torsional force. Over time, the overall structure will deform and the accuracy will deteriorate. The steel sheet can absorb the torsional force through the deformation of the material itself, thereby avoiding stress concentration, and the lateral installation of the linear guide rail 8 increases the force-bearing area, enabling it to withstand a large force couple and not easily twist and deform.

[0037] Working principle:

[0038] The two floating end sliders 303 are not connected to each other, and the X-axis cross beam 4 is only fixedly connected to the first cross beam connecting plate 302. Due to the existence of the two floating end steel sheets 301, after the X-axis cross beam 4 expands and deforms due to heat, it can perform a small amount of deformation floating along the length direction of the X-axis cross beam 4. In other directions, the floating end steel sheet 301 can maintain high rigidity, thus ensuring the high rigidity of the X-axis cross beam 4 in other directions. Therefore, it can ensure that the linear guide rail 8 will not deform and will not affect the accuracy of the overall motion platform due to thermal effects.

[0039] The two fixed end sliders 502 are fixedly connected by the slider connecting plate 501. The upper end of the X-axis cross beam 4 is fixedly connected to the second cross beam connecting plate 504, and the lower end of the X-axis cross beam 4 is fixedly connected to the slider connecting plate 501, ensuring that the fixed end of the X-axis cross beam 4 is a rigid connection in all directions and ensuring the position accuracy of the fixed end cross beam, which can be used as an origin reference.

[0040] The structure of this gantry motion platform is not limited to one end being fixed and the other end being floating. It can also be set to both ends being floating. The structural form of the X-axis cross beam 4 can be X-shaped or other cross-sectional shapes, and the material and size of the steel sheet can be changed according to different actual working conditions.

[0041] Therefore, the present invention adopts a steel sheet type flexible connection gantry motion platform with the above structure. By combining the axially flexible telescopic cross beam with the multi-directional compliant connection structure, it solves the problems of thermal stress accumulation, error transfer rigidification, and insufficient dynamic performance of the traditional gantry.

[0042] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions of the present invention or make equivalent replacements, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A steel sheet type flexible connection gantry motion platform, characterized in that: The invention comprises a first Y-axis gantry, a second Y-axis gantry, an X-axis beam, a floating end connection assembly and a fixed end connection assembly, wherein the first Y-axis gantry and the second Y-axis gantry are respectively fixedly arranged on two parallel supporting legs, the floating end connection assembly is slidably connected to the first Y-axis gantry, the fixed end connection assembly is slidably connected to the second Y-axis gantry, one end of the X-axis beam is connected to the floating end connection assembly through a beam floating end connection, and the other end of the X-axis beam is connected to the fixed end connection assembly through a beam fixed end connection.

2. The steel sheet type flexible connection gantry motion platform according to claim 1, characterized in that: The floating end connection assembly includes two floating end sliders, two floating end steel sheets, a first crossbeam connecting plate and a linear motor mover. The two floating end sliders are both slidably connected to the linear guide rails on the support legs. The first crossbeam connecting plate is connected to the sliding guide rails on the first Y-axis gantry through the linear motor mover. The two floating end sliders are fixedly connected to the two ends of the first crossbeam connecting plate through the two floating end steel sheets.

3. The steel sheet type flexible connection gantry motion platform according to claim 2, characterized in that: The fixed end connection assembly includes two fixed end sliders, a second crossbeam connecting plate, a slider connecting plate and two fixed end steel sheets. The two fixed end sliders are both slidably connected to the linear guide rail. The second crossbeam connecting plate is connected to the sliding guide rail on the second Y-axis gantry through the linear motor mover. The two fixed end sliders are fixedly connected through the slider connecting plate. The two fixed end sliders are fixedly connected to the two ends of the second crossbeam connecting plate through the two fixed end steel sheets.

4. The steel sheet type flexible connection gantry motion platform according to claim 3, characterized in that: The floating end steel sheet and the fixed end steel sheet are both made of 65Mn spring steel.

5. The steel sheet type flexible connection gantry motion platform according to claim 4, characterized in that: The thickness of the floating end steel sheet is 0.5 mm-1 mm, the width of the floating end steel sheet is ≥60 mm, and the connection height of the floating end steel sheet is 20 mm-30 mm.

6. The steel sheet type flexible connection gantry motion platform according to claim 5, characterized in that: The thickness of the fixed end steel sheet is 0.5 mm-1 mm, the width of the fixed end steel sheet is ≥60 mm, and the connection height of the fixed end steel sheet is 20 mm-30 mm.

7. The steel sheet type flexible connection gantry motion platform according to claim 6, characterized in that: The thickness of the floating end steel sheet and the fixed end steel sheet allows the X-axis beam to be elastically deformed in its length direction, and the width of the floating end steel sheet and the fixed end steel sheet inhibits the X-axis beam from being deformed in its vertical direction and width direction.

8. The steel sheet type flexible connection gantry motion platform according to claim 7, characterized in that: The linear guide rail is laterally fixed on the side of the support leg, and a workbench and a counterweight block are slidably connected on both side surfaces of the X-axis beam, and the moving directions of the workbench and the counterweight block on the X-axis beam are opposite.

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