Deep ultraviolet wavefront correction mirror device with high-precision quick-release actuator

Abstract

The invention provides a deep ultraviolet wavefront correction mirror device with high-precision quick-release actuators, and belongs to the technical field of deep ultraviolet wavefront correction mirror devices, the deep ultraviolet wavefront correction mirror device comprises a mirror body, a mirror chamber, a plurality of actuators and a connecting assembly, and the connecting assembly comprises a connector, a supporting piece, a plate spring, an adapter and an electromagnetic adsorption module which are sequentially arranged in the direction from the mirror body to the actuators. And a mounting seat is arranged between the actuator and the mirror chamber. According to the deep ultraviolet wavefront correction mirror device with the high-precision quick-release actuator, the adapter is adsorbed or released by controlling the on-off of an electromagnetic adsorption module circuit, so that the connection and separation of the actuator and the mirror body are quickly completed through the butt joint unit, and the butt joint unit provides a stable and reliable installation environment for the installation of the actuator; the convenience of disassembly, maintenance and installation of the actuator and the precision and efficiency of repeatable installation are integrally and effectively improved, and then the stability and reliability of long-term operation of an optical system are effectively improved.

Description

Technical Field

[0001] The present invention relates to the technical field of deep ultraviolet wavefront correction mirror devices, and particularly to a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator. Background Art

[0002] The deep ultraviolet (DUV, Deep Ultraviolet) band generally refers to light with a wavelength range between 200 - 300 nanometers. Deep ultraviolet light has wide applications in scientific research, microelectronics manufacturing, material detection, and high-precision imaging, etc. In these applications, the wavefront quality is crucial for the imaging quality and system performance. Therefore, the problem of objective wave aberration correction in deep ultraviolet optical systems has become a technical challenge. Especially under the requirements of extremely high resolution and precise alignment, the precise adjustment of wave aberration has a direct impact on the imaging accuracy.

[0003] In the prior art, some deep ultraviolet wavefront correction solutions use actuators to control the deformation of the mirror surface to achieve fast and precise optical adjustment. These actuators are usually designed to be detachable and reassembled for handling when the actuator fails or needs maintenance. However, when the existing actuators fail or malfunction, they still face problems such as low disassembly convenience, long time consumption, and high manual intervention. During the disassembly process, it is usually necessary to manually disconnect the adhesive fixation state between the actuator and the mirror body and the connection state between the actuator and the mirror chamber. The process is cumbersome, with low convenience, and the connection method of directly adhesively fixing the actuator to the mirror body has high requirements for installation accuracy. Installation errors are likely to occur during repeated disassembly and assembly, reducing the calibration accuracy, and further reducing the stability and reliability of the long-term operation of the optical system. Summary of the Invention

[0004] The present invention provides a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator to solve the problems in the related art that the maintenance, replacement, and installation process of the actuator are cumbersome, with low convenience, high requirements for installation accuracy, and errors are likely to occur during repeated disassembly and assembly, affecting the correction accuracy and reducing the stability and reliability of the long-term operation of the optical system.

[0005] The present invention provides a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator. The deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator includes a mirror body, a mirror chamber, and a plurality of actuators, and further includes: a connection assembly for mounting the actuator on the mirror chamber and stably connecting it to the mirror body. The connection assembly includes a connection head, a support member, a leaf spring, a adapter, and an electromagnetic adsorption module arranged in sequence from the mirror body towards the actuator direction. The connection head is connected to the back of the mirror body, the support member is mounted on the mirror chamber and has the ability of elastic deformation in the axial direction, the leaf spring has flexibility in two directions perpendicular to its axial direction, the connection head, the support member, the leaf spring, and the adapter are connected together to form a stable docking unit. The electromagnetic adsorption module is mounted on the actuator, and when the electromagnetic adsorption module is energized, it adsorbs the adapter, so that the actuator is connected to the docking unit and stably connected to the mirror body through the docking unit. When the electromagnetic adsorption module is de-energized, it releases the adapter, and the actuator is disconnected from the docking unit; a mounting seat connected between the actuator and the mirror chamber, and the actuator can be quickly disassembled by releasing the connection between the mounting seat and the mirror chamber and cutting off the power supply of the electromagnetic adsorption module.

[0006] In a possible implementation manner, the electromagnetic adsorption module includes an electromagnet and a connecting member. The connecting member is fixedly connected to the actuator and between the mounting seat and the actuator in a bonding manner, and the connecting member is connected to the electromagnet in a threaded connection manner.

[0007] In a possible implementation manner, the mounting seat includes a locking pressure block and a washer. The washer is located between the locking pressure block and the mirror chamber, and the locking pressure block is fixedly connected to the actuator in a bonding manner.

[0008] In a possible implementation manner, both ends of the leaf spring are fixedly connected to a transfer body and an adapter respectively. An axial fastener is connected between the transfer body and the connection head, and the axial fastener passes through the support member to connect the connection head, the support member, and the transfer body together.

[0009] In a possible implementation manner, the support member is a leaf spring with a circular structure, and a plurality of circumferential fasteners are distributed along the circumference of the support member. The support member is fixedly mounted on the end face of the mirror chamber through the circumferential fasteners.

[0010] In a possible implementation manner, the adapter includes a connection body, and a circular connection groove is formed on the connection body. The leaf spring includes a spring body and a circular connection end, and the connection end is inserted into the connection groove.

[0011] One or more of the above technical solutions in the embodiments of the present invention have the following technical effects: According to a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention, by controlling the on / off of the electromagnetic adsorption module circuit, the adapter is adsorbed or released, so as to quickly complete the connection and separation of the actuator and the mirror body through the docking unit, effectively improving the speed and convenience of disassembly, replacement and installation of the actuator. Moreover, the docking unit provides a stable and reliable installation environment for the installation of the actuator. On the one hand, it provides a stable lateral support force for the mirror body and ensures axial flexibility. On the other hand, it fully reduces the influence of the torque generated in the connection state of the connector, the support member and the adapter body and the fixed connection state of the actuator and the mirror chamber on the mirror surface, and improves the installation tolerance of the actuator installation, reduces the influence of the eccentric moment during the operation of the actuator on the mirror surface, ensures the accuracy of mirror surface adjustment and the convenience of actuator installation, and effectively improves the convenience of disassembly, maintenance and installation of the actuator, as well as the accuracy and efficiency of repeatable installation, thereby effectively improving the stability and reliability of the long-term operation of the optical system. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 FIG. is a schematic structural diagram of a mirror chamber and a mirror body of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0013] Figure 2 FIG. is a schematic structural diagram of a connector of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0014] Figure 3 FIG. is a schematic structural diagram of a connection assembly and an actuator of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0015] Figure 4 FIG. is a schematic structural diagram of a partial cross-section of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0016] Figure 5 FIG. is an exploded structural diagram of a connector, a support member and an adapter body of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0017] Figure 6 FIG. is a schematic structural diagram of a mounting seat of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0018] Figure 7 FIG. is a schematic structural diagram of a leaf spring of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0019] In the figure: 1, mirror body; 2, mirror chamber; 3, actuator; 4, connection assembly; 41, connector; 42, support member; 43, adapter body; 44, leaf spring; 441, spring body; 442, connection end; 45, adapter; 451, connection body; 452, connection groove; 46, electromagnetic adsorption module; 461, electromagnet; 462, connecting member; 47, axial fastener; 48, mounting seat; 481, locking block; 482, washer; 49, circumferential fastener. Specific embodiments

[0020] In order to make the above objects, features, and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description in order to fully understand the present invention. However, the present invention can be implemented in many other ways different from those described below, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

[0021] Please refer to Figure 1 、 Figure 2 and Figure 3 , a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator, including a mirror body 1, a mirror chamber 2, an actuator 3, and a connection assembly 4 that mounts the actuator 3 on the mirror chamber 2 and stably connects to the mirror body 1. The number of actuators 3 is several and is distributed in a regular hexagon axisymmetric shape, and is connected to the back of the mirror body 1 through the connection assembly 4 to form a correction system that can adjust the shape of the mirror body 1 in real time and accurately correct the wavefront error.

[0022] Refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4The connecting assembly 4 includes a connector 41, a support 42, an adapter 43, a leaf spring 44, an adapter 45 and an electromagnetic adsorption module 46 which are sequentially arranged from the mirror body 1 to the actuator 3. The connector 41 is fixedly connected to the back of the mirror body 1 by bonding. The support 42 is installed on the mirror chamber 2 and has elastic deformation ability in the axial direction. An axial fastener 47 is connected between the adapter 43 and the connector 41. The leaf spring 44 is flexible in two directions perpendicular to its axial direction, and one end of the leaf spring 44 is fixedly connected to the adapter 43, and the other end is fixedly connected to the adapter 45. The axial fastener 47 passes through the support 42 to connect the connector 41, the support 42 and the adapter 43 together. On the one hand, the support 42 provides lateral support for the mirror body 1 and ensures axial flexibility. On the other hand, it fully reduces The influence of the torque on the mirror surface generated when the connector 41, the support 42 and the adapter 43 are connected and the actuator 3 is fixedly connected to the mirror chamber 2 is reduced, thereby ensuring the stability of the position state of the mirror body 1. At the same time, a stable docking unit is formed in combination with the leaf spring 44 and the adapter 45, providing a stable and reliable installation environment for the installation of the actuator 3. Within a certain range, the leaf spring 44 is used to provide the mirror body 1 with rotational freedom in two directions perpendicular to the axial direction, effectively reducing the eccentric torque during actuation caused by the installation error of the actuator 3, improving the tolerance capacity of the installation of the actuator 3, and correspondingly improving the convenience of repeated disassembly of the actuator, and reducing the influence of the installation error on the correction accuracy, thereby improving the stability and reliability of the long-term operation of the optical system. Among them, the leaf spring 44 is a two-dimensional X-flexible leaf spring, and the actuator 3 is a piezoelectric ceramic motor.

[0023] See 3 and Figure 4 The electromagnetic adsorption module 46 is installed on the actuator 3, and the adapter 45 is indium steel or a material that can be adsorbed by a magnet. When the actuator 3 is replaced or repaired, the electromagnetic adsorption module 46 adsorbs and releases the adapter 45 by turning on and off the circuit, so as to quickly complete the connection and separation of the actuator 3 and the mirror body 1 through the docking unit, thereby facilitating the rapid disassembly and assembly of the actuator 3, and effectively reducing the degree of manual intervention, improving the convenience and speed of disassembly and assembly of the actuator 3, and providing a stable and reliable installation environment in combination with the docking unit. On the basis of achieving high-precision wavefront adjustment, when the actuator 3 fails or malfunctions, it can be quickly disassembled and replaced, which effectively improves the maintainability and work efficiency of the optical system, and fully improves the stability and reliability of the long-term operation of the optical system.

[0024] See also Figure 1 , Figure 3 , Figure 4 and Figure 6, a mounting base 48 is connected between the actuator 3 and the mirror chamber 2. The mounting base 48 includes a locking press block 481 and a washer 482. The washer 482 is located between the locking press block 481 and the mirror chamber 2. The locking press block 481 is installed on the back of the mirror chamber 2 by screws. The locking press block 481 stably connects the actuator 3 and the mirror chamber 2 together, and the locking press block 481 located on the back is convenient for disassembly and installation.

[0025] Refer to Figure 3 and Figure 4 , the electromagnetic adsorption module 46 includes an electromagnet 461 and a connecting member 462. The connecting member 462 is connected to the electromagnet 461 in a threaded connection manner. The connecting member 462 is fixedly connected to the actuator 3 and the locking press block 481 and the actuator 3 by bonding, and the bonding fixation reduces the influence of local stress concentration on the wavefront correction accuracy.

[0026] Refer to 3 and Figure 5 , the support member 42 is a leaf spring with a circular structure, which is a lightweight overall structure, and a plurality of circumferential fasteners 49 are distributed along the circumference of the support member 42. The support member 42 is fixedly installed on the end face of the mirror chamber 2 through the circumferential fasteners 49, which is convenient for the disassembly and assembly of the docking unit.

[0027] Refer to Figure 3 , Figure 4 and Figure 7 , the adapter 45 includes a connecting body 451. A circular connecting groove 452 is formed on the connecting body 451. The leaf spring 44 includes a spring body 441 and a connecting end 442 with a circular structure. The connecting end 442 is inserted into the connecting groove 452. Through the limitation of the connecting end 442 by the connecting groove 452, the leaf spring 44 and the adapter 45 are stably and precisely connected together.

[0028] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0029] In the description of the present invention, it should also be noted that, unless otherwise clearly specified and defined, the terms "arranged", "connected", "installed", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, an integral connection, or a sliding connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0030] The embodiments of this specific implementation mode are all preferred embodiments of the present invention, and do not limit the protection scope of the present invention accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present invention should be covered within the protection scope of the present invention.

Claims

1. A deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator, comprising a mirror body, a mirror chamber and a plurality of actuators, characterized in that: Also included is a connection assembly for mounting the actuator on the mirror chamber and stably connecting the actuator to the mirror body, wherein the connection assembly includes a connection head, a support, an adapter, a leaf spring, an adapter, and an electromagnetic adsorption module, which are sequentially arranged from the mirror body to the actuator. The connector is connected to the back of the mirror body, and the support is installed on the mirror chamber and has elastic deformation capability in the axial direction; An axial fastener is connected between the adapter and the connector, and the axial fastener passes through the support to connect the connector, the support and the adapter together; The two ends of the leaf spring are fixedly connected to the adapter body and the adapter respectively, and the leaf spring is flexible in two directions perpendicular to its axial direction; The connector, the support, the adapter, the leaf spring and the adapter are connected together to form a stable docking unit; The electromagnetic adsorption module is installed on the actuator, and the electromagnetic adsorption module is powered on to adsorb the adapter, so that the actuator is connected to the docking unit and stably connected to the mirror body through the docking unit. The electromagnetic adsorption module is powered off to release the adapter, and the actuator is disconnected from the docking unit; A mounting seat is provided between the actuator and the mirror chamber. The actuator can be quickly disassembled by releasing the connection between the mounting seat and the mirror chamber and cutting off the power supply of the electromagnetic adsorption module.

2. A deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator according to claim 1, characterized in that: The electromagnetic adsorption module comprises an electromagnet and a connecting piece. The connecting piece and the actuator, as well as the mounting seat and the actuator, are fixedly connected by bonding. The connecting piece and the electromagnet are connected by threading.

3. A deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator according to claim 1 or 2, characterized in that: The mounting seat comprises a locking block and a gasket, wherein the gasket is located between the locking block and the mirror chamber, and the locking block is fixedly connected to the actuator in an adhesive manner and is located on the end surface of the mirror chamber.

4. The deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator according to claim 1, characterized in that: The support member is a leaf spring with a circular structure, and a plurality of circumferential fasteners are distributed along the circumference of the support member. The support member is fixedly mounted on the end surface of the mirror chamber through the circumferential fasteners.

5. The deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator according to claim 1, characterized in that: The adapter comprises a connecting body, a circular connecting groove is formed on the connecting body, and the leaf spring comprises a spring body and a connecting end of a circular structure, and the connecting end is inserted into the connecting groove.

6. A deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator according to claim 1 or 5, characterized in that: The leaf spring is a two-dimensional X-flexible leaf spring.

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