Automatic evaporation adjustment method, evaporation system, and display panel

Abstract

The present invention provides an automatic evaporation adjustment method, an evaporation system, and a display panel. The automatic evaporation adjustment method includes: preparing a first light-emitting device on a substrate; measuring the actual optical parameters of the first light-emitting device; calculating the optimal optical parameters and optimal evaporation parameters of a second light-emitting device based on the actual optical parameters of the first light-emitting device; obtaining the actual evaporation parameters of the second light-emitting device based on the optimal evaporation parameters of the second light-emitting device; and preparing a second light-emitting device on the substrate based on the actual evaporation parameters of the second light-emitting device. The present invention measures the optical parameters of the prepared light-emitting device and uses the measurement results to simulate, calculate, and compensate for the evaporation parameters of subsequently prepared light-emitting devices, thereby improving the optical compensation effect and the overall display effect of the display panel.

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to an automatic evaporation adjustment method, an evaporation system, and a display panel. Background Art

[0002] Organic Light-Emitting Diode (OLED) is an organic thin-film electroluminescent device. It has attracted great attention and is widely used in electronic display products due to its advantages such as low power consumption, high brightness, wide viewing angle, high contrast and flexible display.

[0003] In traditional display panel manufacturing, pixel patterning is typically achieved using a fine metal mask (FMM). FMM technology is mature and boasts extensive mass production experience. However, FMM also presents challenges such as limited precision, high development costs, and long development cycles. FMM-free technology eliminates the limitations of traditional OLED processes on display size, resolution, and other performance characteristics, offering the advantages of high performance, full-area scalability, and agile delivery. Patents CN118251982A, CN116648095A, CN117062489A, CN118742138A, CN118678783A, CN118660598A, CN118675450A, CN118824188A, and CN118781966A describe FMM-free technology for reference.

[0004] However, the display effect of current OLED display panels is still not ideal. Summary of the Invention

[0005] The purpose of the present invention is to provide an automatic evaporation adjustment method, an evaporation system, and a display panel to solve the problem that the display effect of the display panel in related display technologies is still not ideal.

[0006] To achieve the above object, the present invention provides an automatic evaporation adjustment method, which comprises:

[0007] A first light-emitting device is prepared on a substrate; actual optical parameters of the first light-emitting device are measured; optimal optical parameters and optimal evaporation parameters of a second light-emitting device are calculated based on the actual optical parameters of the first light-emitting device; actual evaporation parameters of the second light-emitting device are obtained based on the optimal evaporation parameters of the second light-emitting device; and the second light-emitting device is prepared on the substrate based on the actual evaporation parameters of the second light-emitting device.

[0008] Furthermore, before the step of calculating the actual evaporation parameters of the second light-emitting device based on the optimal evaporation parameters of the second light-emitting device, the step further includes: transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device via a data transmission device. Preferably, the step of transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device via the data transmission device includes: transcoding the optimal evaporation parameters of the second light-emitting device, and transmitting the transcoded optimal evaporation parameters of the second light-emitting device to the evaporation device.

[0009] Furthermore, the step of measuring the actual optical parameters of the first light-emitting device includes: lighting the first light-emitting device; and obtaining the actual optical parameters of the first light-emitting device after lighting. Preferably, the step of obtaining the actual optical parameters of the first light-emitting device after lighting includes: obtaining the actual optical parameters of the first light-emitting device after lighting using a measuring device.

[0010] Furthermore, the step of calculating the optimal optical parameters and optimal evaporation parameters of the second light-emitting device based on the actual optical parameters of the first light-emitting device includes: calculating the optimal optical parameters of the second light-emitting device based on the actual optical parameters of the first light-emitting device; and calculating the optimal evaporation parameters of the second light-emitting device based on the optimal optical parameters of the second light-emitting device.

[0011] Furthermore, the step of calculating the actual evaporation parameters of the second light-emitting device based on the optimal evaporation parameters of the second light-emitting device includes: obtaining preset evaporation parameters of the second light-emitting device; and correcting the preset evaporation parameters of the second light-emitting device based on the optimal evaporation parameters of the second light-emitting device to obtain the actual evaporation parameters of the second light-emitting device. Preferably, the optimal evaporation parameters include the evaporated film thickness.

[0012] Furthermore, after the step of preparing the second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device, the method further includes: measuring the actual optical parameters of the second light-emitting device; calculating the optimal optical parameters and optimal evaporation parameters of the third light-emitting device according to the actual optical parameters of the second light-emitting device; calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device; and preparing the third light-emitting device on the substrate according to the actual evaporation parameters of the third light-emitting device.

[0013] Furthermore, before the step of calculating the actual evaporation parameters of the third light-emitting device based on the optimal evaporation parameters of the third light-emitting device, the step also includes: transcoding the optimal evaporation parameters of the third light-emitting device; and transmitting the transcoded optimal evaporation parameters of the third light-emitting device to an evaporation device.

[0014] Furthermore, the step of measuring the actual optical parameters of the second light-emitting device includes: lighting the second light-emitting device; and obtaining the actual optical parameters of the second light-emitting device after lighting. Preferably, the step of obtaining the actual optical parameters of the second light-emitting device after lighting includes: obtaining the actual optical parameters of the second light-emitting device after lighting using a measuring device.

[0015] Furthermore, the step of calculating the optimal optical parameters and optimal evaporation parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device includes: calculating the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device; and calculating the optimal evaporation parameters of the third light-emitting device based on the optimal optical parameters of the third light-emitting device. Preferably, the step of calculating the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device includes: calculating the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device and in combination with the actual optical parameters of the first light-emitting device.

[0016] Furthermore, the step of calculating the actual evaporation parameters of the third light-emitting device based on the optimal evaporation parameters of the third light-emitting device includes: obtaining the preset evaporation parameters of the third light-emitting device; correcting the preset evaporation parameters of the third light-emitting device based on the optimal evaporation parameters of the third light-emitting device to obtain the actual evaporation parameters of the third light-emitting device.

[0017] The present invention also provides an evaporation system comprising a measurement device and an evaporation device. The measurement device is used to obtain actual optical parameters of a fabricated light-emitting device and, based on the actual optical parameters, calculate optimal optical parameters and optimal evaporation parameters for an unfabricated light-emitting device. The evaporation device is data-connected to the measurement device and, based on the optimal evaporation parameters, calculates actual evaporation parameters for the light-emitting device and fabricates the light-emitting device on a substrate using the actual evaporation parameters.

[0018] The measuring device includes an acquisition module and a calculation module. The acquisition module is used to acquire actual optical parameters of the prepared light-emitting device. The calculation module is used to calculate the optimal optical parameters and optimal evaporation parameters of the unprepared light-emitting device.

[0019] Furthermore, the evaporation equipment includes an evaporation module and a control module. The evaporation module is used to prepare the light-emitting device. The control module is data-connected to the measurement equipment. The control module calculates the actual evaporation parameters based on the optimal evaporation parameters and the preset evaporation parameters, and controls the evaporation module based on the actual evaporation parameters. Preferably, the control module includes a memory and a processor, the memory is used to store the preset evaporation parameters and the actual evaporation parameters, and the processor is used to calculate the actual evaporation parameters. Preferably, the acquisition module of the measurement equipment includes an image sensor.

[0020] Furthermore, the evaporation system further includes a data transmission device, which is data-connected to the evaporation device and the measurement device. The data transmission device is used to transcode the parameters calculated by the measurement device and transmit the transcoded parameters to the evaporation device. Preferably, the evaporation system further includes a transport device, which is used to transport the substrate between the evaporation device and the measurement device.

[0021] The present invention also includes a display panel comprising a substrate and a plurality of light-emitting devices, wherein the light-emitting devices are disposed on one side of the substrate. The light-emitting devices are fabricated using the above-described automatic evaporation adjustment method; or alternatively, the light-emitting devices are fabricated using the above-described evaporation system.

[0022] Furthermore, the substrate includes an array substrate and an isolation structure. The isolation structure is provided on one side of the array substrate, and the isolation structure encloses a plurality of isolation openings, wherein at least a portion of the light-emitting device is located in the isolation opening. Preferably, the isolation structure includes a supporting portion and a blocking portion. The supporting portion is provided on one side of the array substrate. The blocking portion is provided on a side of the supporting portion facing away from the substrate, and the orthographic projection of the blocking portion on the substrate covers the orthographic projection of the supporting portion on the substrate. Preferably, the display panel further includes an encapsulation layer, and the encapsulation layer is provided on a side of the light-emitting device facing away from the substrate.

[0023] The advantages of the present invention are: in an automatic evaporation adjustment method, an evaporation system, and a display panel provided by the present invention, the optical parameters of the prepared light-emitting device are measured, and the optimal evaporation parameters of the subsequently prepared light-emitting device are simulated and calculated based on the measurement structure to compensate for the actual evaporation parameters of the light-emitting device, thereby achieving separate optical compensation for light-emitting devices of different luminous colors to improve the effect of optical compensation, thereby reducing the deviation between the coordination between different light-emitting devices during preset design and actual production, improving the optical coordination between different light-emitting devices, and thereby improving the overall display effect of the display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 This is a structural block diagram of an evaporation system according to an embodiment of the present invention;

[0026] Figure 2 Schematic diagram of the process of the automatic adjustment method for evaporation in an embodiment of the present invention;

[0027] Figure 3 Schematic diagram of the layered structure of a substrate in an embodiment of the present invention;

[0028] Figure 4 Schematic diagram of the layered structure of the display panel after the first light-emitting device is prepared in an embodiment of the present invention;

[0029] Figure 5 Schematic diagram of the layered structure of the display panel after step S10 in an embodiment of the present invention;

[0030] Figure 6 Schematic diagram of the layered structure of the display panel after the second light-emitting device is prepared in an embodiment of the present invention;

[0031] Figure 7 Schematic diagram of the layered structure of the display panel after step S70 in an embodiment of the present invention;

[0032] Figure 8 Schematic diagram of the layered structure of the display panel after the third light-emitting device is prepared in an embodiment of the present invention;

[0033] Figure 9 Schematic diagram of the layered structure of the display panel after step S110 in an embodiment of the present invention.

[0034] The components in the figure are shown as follows:

[0035] Display panel 1; Substrate 10;

[0036] Array substrate 11; Pixel definition layer 12;

[0037] Pixel opening 13; Isolation structure 14;

[0038] Isolation opening 15; First opening 15R;

[0039] Second opening 15G; Third opening 15B;

[0040] Support portion 16; Blocking portion 17;

[0041] A first light emitting device 20R; a second light emitting device 20G;

[0042] A third light emitting device 20B; a first electrode 21;

[0043] Light-emitting functional layer 22; Second electrode 23;

[0044] Encapsulation layer 30; First encapsulation portion 31;

[0045] a second encapsulation portion 32 and a third encapsulation portion 33 . DETAILED DESCRIPTION

[0046] The following describes preferred embodiments of the present invention with reference to the accompanying drawings to demonstrate that the present invention can be implemented. These embodiments will fully introduce the present invention to those skilled in the art, making the technical content clearer and easier to understand. The present invention can be embodied in many different forms of embodiments, and the scope of protection of the present invention is not limited to the embodiments described herein.

[0047] In the drawings, components with identical structures are denoted by the same reference numerals, and components with similar structures or functions are denoted by similar reference numerals. The size and thickness of each component shown in the drawings are arbitrary and are not limited by the present invention. For clarity, the thickness of components in some places in the drawings is appropriately exaggerated.

[0048] In addition, the following descriptions of the various embodiments of the invention are made with reference to the attached diagrams to illustrate specific embodiments of the invention in which the present invention may be implemented. The directional terms mentioned in the present invention, such as "upper", "lower", "front", "back", "left", "right", "inner", "outer", "side", etc., are only with reference to the directions of the attached drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the present invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0049] When some components are described as being "on" another component, the component may be directly placed on the other component; there may also be an intermediate component with the component placed on the intermediate component, and the intermediate component placed on the other component. When a component is described as being "mounted to" or "connected to" another component, the two can be understood to be directly "mounted" or "connected" or indirectly "mounted to" or "connected to" the other component through an intermediate component.

[0050] In related display technologies, isolation structures have been introduced to achieve high resolution and colorization in OLEDs (Organic Light-Emitting Diodes), and to better address issues such as low resolution of OLED electrode films and low device yields. Rather than using a metal mask during device fabrication, an isolation structure is fabricated on a substrate before the organic thin film and metal electrodes are evaporated. This isolation structure separates the different pixels of the device, creating a pixel array. However, the inventors discovered that display panels employing isolation structures exhibit discrepancies between actual production and pre-designed designs, resulting in poor coordination between the luminous effects of the different light-emitting devices, and consequently, unsatisfactory display performance.

[0051] Based on the problems found in the above-mentioned related display technologies, on the one hand, an embodiment of the present invention provides an evaporation system for preparing a display panel. Figure 1 As shown in , the evaporation system includes a measurement device and an evaporation device connected to the measurement device. The measurement device includes an acquisition module and a calculation module, which can obtain the optical parameters of the completed light-emitting device and calculate the optimal optical parameters and optimal evaporation parameters of the unfabricated light-emitting device based on the acquired optical data. The evaporation device can then prepare subsequent light-emitting devices based on the optimal evaporation parameters calculated by the measurement device, thereby adjusting the deviation between actual production and pre-designed, improving the optical coordination between different light-emitting devices, and thus enhancing the overall display effect of the display panel.

[0052] Specifically, the measurement equipment includes an acquisition module and a calculation module. The acquisition module includes an image sensor, such as a CCD (Charge Coupled Device) camera or a CMOS (Complementary Metal Oxide Semiconductor) camera, which can acquire the actual optical parameters of the light-emitting devices fabricated on the substrate when illuminated. Furthermore, the acquisition module of the measurement equipment also includes an illuminating device. After the substrate enters the measurement equipment, the illuminating device can be electrically connected to an external power source to illuminate at least a portion of the fabricated light-emitting devices on the substrate. The image sensor can then photograph the illuminated substrate to acquire the actual optical parameters of the light-emitting devices on the substrate when emitting light. The calculation module is data-connected to the acquisition module. The actual optical parameters acquired by the acquisition module are transmitted to the calculation module. The calculation module calculates the optimal optical parameters of unfabricated light-emitting devices based on the actual optical parameters of the fabricated light-emitting devices when illuminated. The optimal evaporation parameters for the unfabricated light-emitting devices are then calculated using these optimal optical parameters. The actual and optimal optical parameters of the light-emitting devices include optical parameters such as brightness and contrast, respectively. The optimal evaporation parameters for the light-emitting devices include film thickness, etc. That is, the measuring device can calculate the optimal optical parameters such as brightness and contrast of the unprepared light-emitting device when achieving the best display effect based on the actual optical parameters such as brightness and contrast of the prepared light-emitting device when it is lit, and calculate the optimal evaporation parameters such as the film thickness that the unprepared light-emitting device needs to achieve during preparation (the film thickness can be the film thickness of the light-emitting functional layer in the light-emitting device, that is, the thickness of the film layer containing the light-emitting material in the light-emitting device) based on the optimal optical parameters, so as to adjust the preparation of the unprepared light-emitting device according to the actual light-emitting condition of the prepared light-emitting device, thereby enabling the subsequently prepared light-emitting device to adjust its own parameters according to the actual effect of the prepared light-emitting device to achieve the best display effect.

[0053] The evaporation equipment includes an evaporation module and a control module. The evaporation module includes an evaporation source, which can evaporate the material evenly onto the surface of the substrate, thereby forming a plurality of light-emitting devices on one side of the substrate. The control module is connected to the measuring device and the evaporation module respectively, and the control module includes a memory and a processor. The memory is used to store the preset evaporation parameters and actual evaporation parameters of all light-emitting devices. The processor is data-connected to the memory and the measuring device respectively. The measuring device sends the optimal evaporation parameters of the unprepared light-emitting device to the processor. At the same time, the processor obtains the preset evaporation parameters of the corresponding light-emitting device from the memory, and corrects its preset evaporation parameters according to the optimal evaporation parameters of the unprepared light-emitting device, thereby obtaining the actual evaporation parameters of the unprepared light-emitting device. The control module controls the evaporation module according to the actual evaporation parameters. Among them, the preset evaporation parameters and actual evaporation parameters of the light-emitting device include evaporation rate, evaporation time, etc. That is, the evaporation equipment can adjust the preset evaporation parameters of the light-emitting device, such as the evaporation rate and evaporation time, by using the optimal optical parameters such as the film thickness that can achieve the best display effect of the unprepared light-emitting device, so as to obtain the actual evaporation parameters such as the evaporation rate and evaporation time that need to be executed during the actual preparation process of the light-emitting device, and prepare the light-emitting device according to the actual evaporation parameters, so that the subsequently prepared light-emitting device can cooperate with the previously prepared light-emitting device to achieve the best display effect.

[0054] Furthermore, the evaporation system also includes data transmission equipment and transportation equipment.

[0055] The data transmission device has an input and an output. The input is connected to the measurement device, and the output is connected to the evaporation device. The optimal evaporation parameters sent by the measurement device enter the data transmission device through the input. The data transmission device transcodes the received parameters, converting the data format of the measurement device into a data format that can be recognized and processed by the evaporation device processor. The data transmission device then transmits the transcoded optimal evaporation parameters to the evaporation device through its output. Optionally, the data transmission device can be a computer integrated manufacturing (CIM) device, which can integrate all product design, manufacturing, management, quality management, and other data information to improve production efficiency and quality, reduce costs, and achieve automation and intelligence.

[0056] The transport equipment may be at least one of a robotic arm, a conveyor belt, and the like, and is used to transport the substrate between the evaporation equipment and the measurement equipment to save manpower and improve the automation of the production line.

[0057] Based on the problems found in the above-mentioned related display technologies, on the other hand, an embodiment of the present invention also provides an automatic evaporation adjustment method. The above-mentioned evaporation system can use the automatic evaporation adjustment method to prepare a display panel containing an isolation structure. When preparing different light-emitting devices, the automatic evaporation adjustment method adjusts the preparation data of the subsequent light-emitting devices to be prepared by measuring the relevant data of the prepared light-emitting devices, thereby adjusting the deviation between actual production and pre-design, improving the optical coordination between different light-emitting devices, and thereby improving the overall display effect of the display panel.

[0058] Specifically, Figure 2 The process of the automatic evaporation adjustment method is shown in FIG. , and the automatic evaporation adjustment method includes steps S10 - S110 .

[0059] Step S10) preparing a first light-emitting device on a substrate:

[0060] Prepare a substrate, such as Figure 3 As shown in FIG, the substrate 10 is an array substrate 11 provided with an isolation structure 14. The array substrate 11 is provided with a plurality of thin film transistors (TFTs) arranged in an array and signal traces. The isolation structure 14 encloses a plurality of isolation openings 15. The isolation structure 14 includes a support portion 16 and a blocking portion 17. The support portion 16 is provided on one side of the substrate 10, and the blocking portion 17 is stacked on the side of the support portion 16 facing away from the substrate 10. The isolation openings 15 sequentially penetrate the support portion 16 and the blocking portion 17. The isolation openings 15 include a first opening 15R for accommodating a first light-emitting device, a second opening 15G for accommodating a second light-emitting device, and a third opening 15B for accommodating a third light-emitting device.

[0061] In the evaporation device, the memory of the control module stores the preset evaporation parameters of the first light-emitting device. The control module calls the preset evaporation parameters of the first light-emitting device stored in the memory and controls the evaporation module according to the preset evaporation parameters, prompting the evaporation module to uniformly deposit the material of the first light-emitting device on the side surface of the substrate 10 provided with the isolation structure 14 according to the parameters such as the evaporation rate and the evaporation time in the preset evaporation parameters. Part of the material of the first light-emitting device is deposited in the isolation opening 15, and the connection between the first light-emitting device materials in adjacent isolation openings 15 is interrupted by the isolation structure 14, forming a plurality of first light-emitting device materials. Figure 4 The independent first light emitting device 20R shown in FIG.

[0062] Furthermore, the step S10 further includes: depositing an encapsulation material on the side of the first light emitting device 20R away from the substrate 10 to form a first encapsulation portion 31; removing the first light emitting device 20R and the first encapsulation portion 31 outside the first opening 15R region by an etching process, and only retaining the first light emitting device 20R and the first encapsulation portion 31 corresponding to the first opening 15R, to form a Figure 5 The panel layer structure shown in .

[0063] Step S20) measuring the actual optical parameters of the first light emitting device:

[0064] The substrate prepared with the first light-emitting device is transferred from the evaporation device to the measurement device via a transportation device; in the measurement device, the first light-emitting device on the substrate is illuminated by the lighting device in its acquisition module, and the actual optical parameters of the first light-emitting device after lighting are obtained by the image sensor in its acquisition module, such as the actual optical parameters of the first light-emitting device after lighting, such as brightness, contrast, etc.

[0065] Step S30) Calculate the optimal optical parameters and optimal evaporation parameters of the second light-emitting device based on the actual optical parameters of the first light-emitting device:

[0066] The acquisition module transmits the actual optical parameters of the first light-emitting device to the calculation module of the measurement equipment. The calculation module calculates the optimal optical parameters of the second light-emitting device based on the actual optical parameters of the first light-emitting device, and calculates the optimal evaporation parameters of the second light-emitting device based on the optimal optical parameters of the second light-emitting device.

[0067] For example, the calculation module can calculate the optimal optical parameters of the second light-emitting device such as brightness and contrast that enable the final product to present the best display effect based on the actual optical parameters of the first light-emitting device after lighting, and further calculate the optimal evaporation parameters such as film thickness that the second light-emitting device can achieve the best display effect based on the optimal optical parameters.

[0068] Step S40) The optimal evaporation parameters of the second light-emitting device are transmitted to the evaporation device via the data transmission device:

[0069] The data transmission device receives the optimal evaporation parameters of the second light-emitting device sent by the calculation module of the measurement device through its input end, and the data transmission device transcodes the received optimal evaporation parameters of the second light-emitting device, converts the optimal evaporation parameters into a data format that can be recognized and processed by the evaporation device, and sends the transcoded optimal evaporation parameters of the second light-emitting device to the evaporation device through its output end.

[0070] Step S50) Obtaining actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device:

[0071] The evaporation equipment obtains the optimal evaporation parameters for the second light-emitting device calculated by the measurement equipment through the data transmission equipment. Simultaneously, the transport equipment transfers the substrate from the measurement equipment back to the evaporation equipment. In the evaporation equipment, a processor in a control module retrieves the preset evaporation parameters for the second light-emitting device from a memory and modifies them based on the optimal evaporation parameters for the second light-emitting device, thereby obtaining the actual evaporation parameters for the second light-emitting device.

[0072] For example: the control module can adjust the preset evaporation parameters of the second light-emitting device, such as the evaporation rate and evaporation time, through the optimal evaporation parameters such as the film thickness that the second light-emitting device can achieve the best display effect, thereby obtaining the actual evaporation parameters such as the evaporation rate and evaporation time that the evaporation module needs to actually execute, and according to the actual evaporation parameters, a second light-emitting device that can achieve the best display effect can be produced.

[0073] Step S60) preparing a second light-emitting device on the substrate according to the actual evaporation parameters of the second light-emitting device:

[0074] The control module of the evaporation equipment controls the evaporation module according to the actual evaporation parameters of the second light-emitting device, so that the evaporation module can evenly deposit the material of the second light-emitting device on the side surface of the substrate 10 provided with the isolation structure 14 according to the parameters such as the evaporation rate and the evaporation time in the actual evaporation parameters. Part of the material of the second light-emitting device 20G is deposited in the isolation opening 15, and the connection of the second light-emitting device 20G material in the adjacent isolation openings 15 is interrupted by the isolation structure 14, forming a Figure 6 The independent second light emitting device 20G is shown in FIG.

[0075] Furthermore, the step S60 further includes: depositing an encapsulation material on the side of the second light-emitting device 20G away from the substrate 10 to form a second encapsulation portion 32; removing the second light-emitting device 20G and the second encapsulation portion 32 outside the second opening 15G region by an etching process, and only retaining the second light-emitting device 20G and the second encapsulation portion 32 corresponding to the second opening 15G, to form the second light-emitting device 20G and the second encapsulation portion 32. Figure 7 The panel layer structure shown in .

[0076] Step S70) Measure the actual optical parameters of the second light-emitting device:

[0077] The substrate prepared with the first light-emitting device and the second light-emitting device is transferred from the evaporation device to the measurement device through the transportation equipment; in the measurement device, the second light-emitting device on the substrate is illuminated by the lighting device in its acquisition module, and the actual optical parameters of the second light-emitting device after lighting are obtained by the image sensor in its acquisition module, such as the actual optical parameters of the second light-emitting device after lighting, such as the brightness, contrast, etc.

[0078] Step S80) Calculate the optimal optical parameters and optimal evaporation parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device:

[0079] The acquisition module transmits the actual optical parameters of the second light-emitting device to the calculation module of the measurement equipment. The calculation module calculates the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device, and calculates the optimal evaporation parameters of the third light-emitting device based on the optimal optical parameters of the third light-emitting device.

[0080] For example, the calculation module can calculate the optimal optical parameters of the third light-emitting device, such as brightness and contrast, which enable the final product to present the best display effect based on the actual optical parameters of the second light-emitting device after lighting, and further calculate the optimal evaporation parameters, such as film thickness, which enable the third light-emitting device to achieve the best display effect based on the optimal optical parameters.

[0081] Furthermore, in the step of calculating the optimal optical parameters of the third light-emitting device based on the actual optical parameters of the second light-emitting device, the actual optical parameters of the first light-emitting device can be added to calculate the optimal optical parameters of the third light-emitting device, that is, the optimal optical parameters of the third light-emitting device are calculated by combining the actual optical parameters of the first light-emitting device and the actual optical parameters of the second light-emitting device. By integrating the actual light-emitting conditions of all light-emitting devices prepared in the previous process to calculate, the coordination between the third light-emitting device and other light-emitting devices can be better improved, thereby further improving the overall display effect of the display panel.

[0082] Step S90) The optimal evaporation parameters of the third light-emitting device are transmitted to the evaporation device via the data transmission device:

[0083] The data transmission device receives the optimal evaporation parameters of the third light-emitting device sent by the calculation module of the measurement device through its input end, and the data transmission device transcodes the received optimal evaporation parameters of the third light-emitting device, converts the optimal evaporation parameters into a data format that can be recognized and processed by the evaporation device, and sends the transcoded optimal evaporation parameters of the third light-emitting device to the evaporation device through its output end.

[0084] Step S100) Calculating actual evaporation parameters of the third light-emitting device based on the optimal evaporation parameters of the third light-emitting device:

[0085] The evaporation equipment obtains the optimal evaporation parameters for the third light-emitting device calculated by the measurement equipment through the data transmission equipment. Simultaneously, the transport equipment transfers the substrate from the measurement equipment back to the evaporation equipment. In the evaporation equipment, a processor in a control module retrieves the preset evaporation parameters for the third light-emitting device from a memory and modifies them based on the optimal evaporation parameters for the third light-emitting device, thereby obtaining the actual evaporation parameters for the third light-emitting device.

[0086] For example: the control module can adjust the preset evaporation parameters of the third light-emitting device, such as the evaporation rate and evaporation time, by using the optimal evaporation parameters such as the film thickness that the third light-emitting device can achieve the best display effect, thereby obtaining the actual evaporation parameters such as the evaporation rate and evaporation time that the evaporation module needs to actually execute, and the actual evaporation parameters can produce a third light-emitting device that can achieve the best display effect.

[0087] Step S110) preparing a third light-emitting device on a substrate according to actual evaporation parameters of the third light-emitting device:

[0088] The control module of the evaporation equipment controls the evaporation module according to the actual evaporation parameters of the third light-emitting device, so that the evaporation module can evenly deposit the material of the third light-emitting device on the side surface of the substrate 10 provided with the isolation structure 14 according to the parameters such as the evaporation rate and the evaporation time in the actual evaporation parameters. Part of the material of the third light-emitting device is deposited in the isolation opening 15, and the connection between the third light-emitting device materials in adjacent isolation openings 15 is interrupted by the isolation structure 14, forming a Figure 8 The independent third light emitting device 20B is shown in FIG.

[0089] Furthermore, the step S110 further includes: depositing an encapsulation material on the side of the third light-emitting device 20B facing away from the substrate 10 to form a third encapsulation portion 33; removing the third light-emitting device 20B and the third encapsulation portion 33 outside the third opening 15B region by an etching process, and only retaining the third light-emitting device 20B and the third encapsulation portion 33 corresponding to the third opening 15B, thereby finally forming the following. Figure 9 The panel layer structure shown in .

[0090] In the automatic evaporation adjustment method and evaporation system provided in the embodiments of the present invention, the optical parameters of the prepared light-emitting device are measured, and the optimal evaporation parameters of the subsequently prepared light-emitting device are simulated and calculated based on the optical parameters of the prepared light-emitting device. The actual evaporation parameters of the light-emitting device are compensated according to the calculation structure, thereby achieving separate optical compensation for light-emitting devices of different luminous colors to improve the effect of optical compensation, thereby reducing the deviation between the coordination between different light-emitting devices during preset design and actual production, improving the optical coordination between different light-emitting devices, and thereby improving the overall display effect of the display panel.

[0091] The automatic evaporation adjustment method and evaporation system provided in the embodiments of the present invention can be used for the production of a display panel 1 having an isolation structure 14. Specifically, Figure 9 The layered structure of the display panel 1 is shown in FIG. The display panel 1 comprises a substrate 10, which includes an array substrate 11, a pixel definition layer 12, and an isolation structure 14 disposed on one side of the array substrate 11. The pixel definition layer 12 includes a plurality of pixel openings 13, and the isolation structure 14 encloses a plurality of isolation openings 15. The isolation openings 15 accommodate at least some of the light-emitting devices, so that adjacent light-emitting devices are separated by the isolation structure 14. The isolation structure 14 comprises a supporting portion 16 and a blocking portion 17. The blocking portion 17 is located on the side of the supporting portion 16 away from the array substrate 11, and the orthographic projection of the supporting portion 16 on the array substrate 11 is located within the orthographic projection of the blocking portion 17 on the array substrate 11. The light-emitting devices may include a first light-emitting device 20R, a second light-emitting device 20G, and a third light-emitting device 20B for emitting light of different colors. Accordingly, the isolation openings 15 also include a first opening 15R, a second opening 15G, and a third opening 15B for accommodating different light-emitting devices, respectively. Along the thickness of the display panel 1, the light-emitting device includes a first electrode 21, a light-emitting functional layer 22, and a second electrode 23, which are stacked in sequence. The first electrode 21 is disposed between the array substrate 11 and the pixel definition layer 12, with at least a portion of the first electrode 21 exposed in the corresponding pixel opening 13. The light-emitting functional layer 22 is located on the side of the first electrode 21 facing away from the array substrate 11, covering the exposed surface of the first electrode 21 in the pixel opening 13 and extending from the surface of the first electrode 21 to the side of the pixel definition layer 12 facing away from the array substrate 11. The second electrode 23 is stacked on the side of the light-emitting functional layer 22 facing away from the array substrate 11 and extends from the side of the light-emitting functional layer 22 facing away from the array substrate 11 to the surface of the isolation structure 14 facing the isolation opening 15, thereby electrically connecting the second electrode 23 to the isolation structure 14 and allowing the second electrode 23 to receive a power signal through the isolation structure 14. The first electrode 21 is an anode, and the second electrode 23 is a cathode.

[0092] Furthermore, an encapsulation layer 30 is provided on the light-emitting device. This encapsulation layer 30 includes a first encapsulation portion 31, a second encapsulation portion 32, and a third encapsulation portion 33. The first encapsulation portion 31 is located on the side of the first light-emitting device 20R facing away from the substrate 10, the second encapsulation portion 32 is located on the side of the second light-emitting device 20G facing away from the substrate 10, and the third encapsulation portion 33 is located on the side of the third light-emitting device 20B facing away from the substrate 10. Each encapsulation portion covers the surface of the corresponding light-emitting device facing away from the substrate 10, and extends from the light-emitting device to cover the sidewalls of the isolation structure 14 and a portion of the surface of the isolation structure 14 facing away from the substrate 10, overlapping the side of the barrier portion 17 facing away from the substrate 10. The first encapsulation portion 31, the second encapsulation portion 32, and the third encapsulation portion 33 are made of the same material, at least one of an inorganic material and a metal oxide material. For example, the material of the encapsulation layer 30 includes at least one of silicon nitride, silicon oxide, silicon oxynitride, and aluminum oxide. The encapsulation layer 30 is used to encapsulate and protect the light-emitting device and other electronic components in the display panel, preventing water and oxygen from invading and corroding the light-emitting device.

[0093] In the display panel provided in the embodiment of the present invention, it can be prepared by the above-mentioned automatic evaporation adjustment method and evaporation system, and the above-mentioned automatic evaporation adjustment method and evaporation system can realize separate optical compensation of light-emitting devices of different luminous colors, so as to improve the effect of optical compensation of different light-emitting devices, thereby improving the optical coordination between different light-emitting devices, and further improving the overall display effect of the display panel.

[0094] Although the present invention is described herein with reference to specific embodiments, it should be understood that these embodiments are merely illustrative of the principles and applications of the invention. It should be understood that many modifications may be made to the illustrative embodiments, and that other arrangements may be devised, without departing from the spirit and scope of the invention as defined by the appended claims. It should be understood that the various dependent claims and features described herein may be combined in ways other than those described in the original claims. It should also be understood that features described in conjunction with individual embodiments may be employed in conjunction with other described embodiments.

Claims

1. A method for automatic adjustment of evaporation, characterized in that: include: preparing a first light-emitting device on a substrate; measuring actual optical parameters of the first light-emitting device; Calculating optimal optical parameters and optimal evaporation parameters of the second light-emitting device according to actual optical parameters of the first light-emitting device; obtaining actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device; The second light-emitting device is prepared on the substrate according to actual evaporation parameters of the second light-emitting device.

2. The automatic vapor deposition adjustment method according to claim 1, wherein: Before the step of calculating the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device, the method further includes: transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device through the data transmission device; The step of transmitting the optimal evaporation parameters of the second light-emitting device to the evaporation device through the data transmission device includes: transcoding the optimal evaporation parameters of the second light-emitting device, and transmitting the transcoded optimal evaporation parameters of the second light-emitting device to the evaporation device.

3. The automatic vapor deposition adjustment method according to claim 1, wherein: The step of measuring the actual optical parameters of the first light-emitting device comprises: lighting up the first light-emitting device; Acquiring actual optical parameters of the first light-emitting device after lighting; The step of obtaining actual optical parameters of the first light-emitting device after lighting includes: obtaining actual optical parameters of the first light-emitting device after lighting by using a measuring device.

4. The automatic adjustment method for vapor deposition according to claim 1, wherein: The step of calculating the optimal optical parameters and optimal evaporation parameters of the second light-emitting device according to the actual optical parameters of the first light-emitting device comprises: Calculating optimal optical parameters of the second light-emitting device according to actual optical parameters of the first light-emitting device; Optimal evaporation parameters of the second light-emitting device are calculated according to the optimal optical parameters of the second light-emitting device.

5. The automatic vapor deposition adjustment method according to claim 1, wherein: The step of calculating the actual evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device comprises: Obtaining preset evaporation parameters of the second light-emitting device; Correcting preset evaporation parameters of the second light-emitting device according to the optimal evaporation parameters of the second light-emitting device to obtain actual evaporation parameters of the second light-emitting device; The optimal evaporation parameters include the evaporation film thickness.

6. The automatic adjustment method for vapor deposition according to claim 1, wherein: After the step of preparing the second light-emitting device on the substrate according to actual evaporation parameters of the second light-emitting device, the method further includes: measuring actual optical parameters of the second light-emitting device; Calculating optimal optical parameters and optimal evaporation parameters of the third light-emitting device according to actual optical parameters of the second light-emitting device; Calculating actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device; The third light-emitting device is prepared on the substrate according to actual evaporation parameters of the third light-emitting device.

7. The automatic vapor deposition adjustment method according to claim 6, wherein: Before the step of calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device, the method further includes: transcoding the optimal evaporation parameters of the third light-emitting device; The transcoded optimal evaporation parameters of the third light-emitting device are transmitted to the evaporation equipment.

8. The automatic adjustment method for vapor deposition according to claim 6, wherein: The step of measuring the actual optical parameters of the second light-emitting device comprises: lighting up the second light emitting device; Acquiring actual optical parameters of the second light-emitting device after lighting; The step of obtaining actual optical parameters of the second light-emitting device after lighting includes: obtaining the actual optical parameters of the second light-emitting device after lighting by using a measuring device.

9. The automatic adjustment method for vapor deposition according to claim 6, wherein: The step of calculating the optimal optical parameters and optimal evaporation parameters of the third light-emitting device according to the actual optical parameters of the second light-emitting device comprises: Calculating the optimal optical parameters of the third light emitting device according to the actual optical parameters of the second light emitting device; Calculate optimal evaporation parameters of the third light-emitting device according to the optimal optical parameters of the third light-emitting device.

10. The automatic adjustment method for vapor deposition according to claim 9, wherein: The step of calculating the optimal optical parameters of the third light emitting device according to the actual optical parameters of the second light emitting device includes: calculating the optimal optical parameters of the third light emitting device according to the actual optical parameters of the second light emitting device and combining the actual optical parameters of the first light emitting device.

11. The automatic adjustment method for vapor deposition according to claim 6, wherein: The step of calculating the actual evaporation parameters of the third light-emitting device according to the optimal evaporation parameters of the third light-emitting device comprises: Obtaining preset evaporation parameters of the third light-emitting device; The preset evaporation parameters of the third light-emitting device are corrected according to the optimal evaporation parameters of the third light-emitting device to obtain actual evaporation parameters of the third light-emitting device.

12. A vapor deposition system, characterized in that: include: A measurement device for obtaining actual optical parameters of a fabricated light-emitting device and calculating optimal optical parameters and optimal evaporation parameters of an unfabricated light-emitting device based on the actual optical parameters; an evaporation device, connected to the measurement device, and calculating actual evaporation parameters of the light-emitting device according to the optimal evaporation parameters, and preparing the light-emitting device on the substrate according to the actual evaporation parameters; The measuring equipment includes: An acquisition module, configured to acquire actual optical parameters of the prepared light-emitting device; The calculation module is used to calculate the optimal optical parameters and optimal evaporation parameters of the unfabricated light-emitting device.

13. The evaporation system according to claim 12, wherein: The evaporation equipment includes: an evaporation module, used for preparing the light-emitting device; a control module, connected to the measurement device by data transmission, the control module calculating the actual evaporation parameters according to the optimal evaporation parameters and the preset evaporation parameters, and controlling the evaporation module according to the actual evaporation parameters; The control module includes a memory and a processor, the memory is used to store the preset evaporation parameters and the actual evaporation parameters, and the processor is used to calculate the actual evaporation parameters; The acquisition module of the measurement device includes an image sensor.

14. The evaporation system according to claim 12, wherein: Also includes: A data transmission device is data-connected to the evaporation device and the measuring device, and is used to transcode the parameters calculated by the measuring device and transmit the transcoded parameters to the evaporation device.

15. The evaporation system according to claim 12, wherein: Also includes: A transport device is used to transport the substrate between the evaporation device and the measurement device.

16. A display panel, characterized in that: include: substrate; A plurality of light-emitting devices are provided on one side of the substrate; The light-emitting device is prepared by the evaporation automatic adjustment method according to any one of claims 1 to 11; or The light-emitting device is prepared by the evaporation system according to any one of claims 12 to 15.

17. The display panel according to claim 16, wherein: The substrate comprises: array substrate; an isolation structure, disposed on one side of the array substrate, the isolation structure enclosing a plurality of isolation openings, at least a portion of the light-emitting device being located in the isolation openings; The isolation structure includes: A supporting portion, provided on one side of the array substrate; a blocking portion, provided on a side of the supporting portion facing away from the array substrate, wherein the orthographic projection of the blocking portion on the array substrate covers the orthographic projection of the supporting portion on the array substrate; The display panel further includes an encapsulation layer, which is provided on a side of the light emitting device facing away from the substrate.

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