Plasma generating device

Abstract

A plasma generation device is provided with: a main body cover that defines a reaction chamber, functions as a housing, and has an engagement part; and a base which is detachably attached to the main body cover and has an engaged portion, the engaging portion of the main body cover being attached to the engaged portion of the base.

Description

Technical Field

[0001] The present invention relates to a plasma generating device in which a reaction chamber is defined by a main body cover that functions as a housing. Background Art

[0002] In the following patent documents, a plasma generating device in which a reaction chamber is defined by a main body cover that functions as a housing is described.

[0003] Prior Art Documents Patent Documents Patent Document 1: Japanese Patent Application Laid-Open No. 2019-501505 Summary of the Invention

[0004] Technical Problem to be Solved by the Invention The technical problem of this specification is to easily mount the main body cover on the base.

[0005] Technical Solution for Solving the Technical Problem To solve the above technical problem, this specification discloses a plasma generating device including: a main body cover that defines a reaction chamber and functions as a housing, and has a engaging portion; and a base that detachably mounts the main body cover and has a engaged portion, wherein the engaging portion of the main body cover is mounted on the engaged portion of the base.

[0006] Advantages of the Invention According to the present invention, the main body cover can be easily mounted on the base. Brief Description of the Drawings

[0007] Figure 1 is a view showing a plasma device.

[0008] Figure 2 is a perspective view showing a plasma nozzle.

[0009] Figure 3 is Figure 2 a cross-sectional view of the plasma nozzle.

[0010] Figure 4 is an enlarged cross-sectional view of the plasma nozzle.

[0011] Figure 5 is an enlarged cross-sectional view of the plasma nozzle.

[0012] Figure 6 is a cross-sectional view showing a conventional plasma nozzle.

[0013] Figure 7 is a perspective view showing a conventional plasma nozzle.

[0014] Figure 8It is a perspective view of an existing plasma nozzle showing the state where the main body cover and the support cover are removed.

[0015] Figure 9 It is a perspective view of an existing plasma nozzle showing the state where the main body cover and the support cover are removed.

[0016] Figure 10 It is a perspective view of a plasma nozzle showing the state where the main body cover is removed.

[0017] Figure 11 It is a perspective view of the support cover.

[0018] Figure 12 It is a perspective view of a plasma nozzle showing the state where the support cover is removed. Detailed implementation mode

[0019] Hereinafter, as a mode for implementing the present invention, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0020] As Figure 1 As shown, the plasma device 10 includes a plasma nozzle 11, a robot 13, and a control box 15. The plasma nozzle 11 is mounted on the robot 13. The robot 13 is, for example, a serial link type robot (which can also be called a multi-joint type robot), and the plasma nozzle 11 is mounted on the front end of the robot 13 via a bracket 12. Moreover, the plasma nozzle 11 can irradiate plasma gas in a state of being mounted on the front end of the robot 13. The plasma nozzle 11 can move three-dimensionally according to the drive of the robot 13.

[0021] The control box 15 is mainly composed of a computer and uniformly controls the plasma device 10. The control box 15 has a power supply unit 15A that supplies power to the plasma nozzle 11 and a gas supply unit 15B that supplies gas to the plasma nozzle 11. The power supply unit 15A is connected to the plasma nozzle 11 via a power cable (not shown). The power supply unit 15A changes the voltage applied to the electrode 30 (refer to Figures 3 to 5 ) of the plasma nozzle 11 based on the control of the control box 15.

[0022] In addition, the gas supply unit 15B is connected to the plasma nozzle 11 via a gas pipe 19. The gas supply unit 15B supplies a reaction gas (described later) to the plasma nozzle 11 based on the control of the control box 15. The control box 15 controls the gas supply unit 15B and controls the amount of gas supplied from the gas supply unit 15B to the plasma nozzle 11 and the like. Thus, the robot 13 operates based on the control of the control box 15, and plasma gas is irradiated from the plasma nozzle 11 to the workpiece W placed on the worktable 17.

[0023] In addition, the control box 15 is provided with an operation unit 15C, which has a touch panel and various switches. The control box 15 displays various setting screens, operation states (such as gas supply state, etc.) on the touch panel of the operation unit 15C. In addition, the control box 15 accepts various information through operation inputs to the operation unit 15C.

[0024] As Figure 2 and Figure 3 shown, the plasma spray head 11 includes a main body cover 20, an internal cable 22, a cable support 24, a collar 25, a support mounting member 26, an electrode support 28, an electrode 30, a support cover 31, etc. The main body cover 20 functions as a frame and is formed of a metal material. In addition, the main body cover 20 is generally cylindrical in shape. Among them, the main body cover 20 is shaped such that the front end becomes thinner toward the lower part, and the lower end portion of the main body cover 20 is conical in shape. Therefore, the lower end portion of the main body cover 20 serves as the nozzle 32 of the plasma spray head 11. In addition, the upper end portion of the main body cover 20 is fixed to the lower end of the cable support 24.

[0025] As Figure 4 and Figure 5 shown, the internal cable 22 is disposed inside the main body cover 20 so as to extend along the axial direction of the main body cover 20, and is fixed to the inside of the main body cover 20 by the cable support 24. The cable support 24 is generally cylindrical and is fixedly fitted inside the main body cover 20. Moreover, the internal cable 22 is fixedly fitted to the upper end portion inside the cable support 24. Thus, the internal cable 22 is fixed to the inside of the main body cover 20 by the cable support 24. It should be noted that a gap 35 is formed between the inner peripheral surface of the cable support 24 and the outer peripheral surface of the internal cable 22 at the lower end portion of the cable support 24.

[0026] In addition, the collar 25 is a stepped cylindrical shape, including a small-diameter portion 36, a large-diameter portion 37, and a step surface 38. The outer diameter of the small-diameter portion 36 is smaller than the inner diameter of the cable support 24. And, the small-diameter portion 36 is inserted into the inside of the cable support 24, and the lower end of the small-diameter portion 36 extends slightly downward from the lower end of the cable support 24. The step surface 38 connects the small-diameter portion 36 and the large-diameter portion 37 and is located below the cable support 24. And, an O-ring 39 is disposed along the outer peripheral surface of the small-diameter portion 36 between the lower end surface of the cable support 24 and the step surface 38. In addition, the outer diameter of the large-diameter portion 37 is smaller than the inner diameter of the main body cover 20 and is located inside the main body cover 20.

[0027] In addition, the bracket mounting member 26 is in the shape of a ring, and the outer diameter of the bracket mounting member 26 is the same as the outer diameter of the large-diameter portion 37 of the collar 25. Also, the bracket mounting member 26 is disposed below the large-diameter portion 37 of the collar 25. A threaded groove is formed on the inner peripheral surface of the ring-shaped bracket mounting member 26, and the inner peripheral surface of the bracket mounting member 26 functions as a threaded hole. In addition, a plurality of through holes 40 penetrating in the vertical direction are formed in the outer edge portion of the bracket mounting member 26. These plurality of through holes 40 are inclined at a given angle.

[0028] In addition, the electrode bracket 28 is formed from a raw material made of metal and is generally cylindrical in shape. However, the electrode bracket 28 is shaped such that the tip becomes thinner toward the lower side, and a convex portion 46 is formed at the center of the upper end surface of the electrode bracket 28. Moreover, a thread tooth is formed on the outer peripheral surface of the convex portion 46. Therefore, by inserting and screwing the convex portion 46 of the electrode bracket 28 into the inner peripheral surface of the bracket mounting member 26 that functions as a threaded hole, the bracket fitting 26 can be detachably mounted to the electrode bracket 28.

[0029] In addition, the inner peripheral surface of the electrode bracket 28 has a stepped shape. The upper part of the inner peripheral surface of the electrode bracket 28 is a small-diameter first inner peripheral surface 50, and the lower part of the inner peripheral surface of the electrode bracket 28 continuous from the first inner peripheral surface 50 is a second inner peripheral surface 52 having a diameter larger than that of the first inner peripheral surface 50. The lower end portion of the crimp terminal 56 is inserted into the first inner peripheral surface 50. The outer diameter of the lower end portion of the crimp terminal 56 is slightly smaller than the inner diameter of the first inner peripheral surface 50 of the electrode bracket 28. Therefore, the crimp terminal 56 is fixed to the first inner peripheral surface 50 of the electrode bracket 28 by the hollow bolt 58. Specifically, a horizontal hole 60 extending in the radial direction is formed on the upper end portion side of the electrode bracket 28, and the horizontal hole 60 communicates with the first inner peripheral surface 50. Moreover, by screwing the hollow bolt 58 into the horizontal hole 60, the crimp terminal 56 is fixed to the first inner peripheral surface 50 of the electrode bracket 28. It should be noted that the depth dimension of the horizontal hole 60 is longer than the length dimension of the hollow bolt 58. Therefore, the hollow bolt 58 is buried in the horizontal hole 60 in a state where it is screwed into the horizontal hole 60 and does not protrude to the outside from the surface of the electrode bracket 28. In addition, the crimp terminal 56 extends upward from the upper end of the first inner peripheral surface 50 of the electrode bracket 28. Moreover, the crimp terminal 56 extending upward from the first inner peripheral surface 50 of the electrode bracket 28 is connected to the internal cable 22 by the conductor 62.

[0030] In addition, the electrode 30 has a round bar shape, and the outer diameter of the electrode 30 is slightly smaller than the inner diameter of the second inner peripheral surface 52 of the electrode holder 28. Further, the electrode 30 is inserted into the second inner peripheral surface 52 of the electrode holder 28, and the electrode 30 is fixed to the second inner peripheral surface 52 of the electrode holder 28 by a hollow bolt 66. Specifically, a horizontal hole 68 extending in the radial direction is formed on the lower end side of the electrode holder 28, and the horizontal hole 68 communicates with the second inner peripheral surface 52. Then, by screwing the hollow bolt 66 into the horizontal hole 68, the electrode 30 is fixed to the second inner peripheral surface 52 of the electrode holder 28. It should be noted that the depth dimension of the horizontal hole 68 is longer than the length dimension of the hollow bolt 66. Therefore, the hollow bolt 66 is buried in the horizontal hole 68 in a state where it is screwed into the horizontal hole 68 and does not protrude from the surface of the electrode holder 28 to the outside. In addition, the electrode 30 is fixed to the second inner peripheral surface 52 in a state where the lower end, that is, the front end of the electrode 30 extends from the lower end of the electrode holder 28 by a given amount (for example, 3 mm to 5 mm).

[0031] In addition, the support cover 31 has a substantially cylindrical shape, and the inner diameter of the support cover 31 is set to be slightly larger than the outer diameter of the large diameter portion 37 of the collar 25 and the outer diameter of the support mounting member 26. Further, the large diameter portion 37 of the collar 25 and the support mounting member 26 are inserted into the support cover 31. In addition, the support cover 31 is fixed to the cable support 24 at the upper end portion. On the other hand, a flange 70 extending inward is formed at the lower end portion of the support cover 31. With such a structure, the large diameter portion 37 of the collar 25 and the support mounting member 26 are clamped by the lower end surface of the cable support 24 and the flange 70 of the support cover 31. In this way, the large diameter portion 37 of the collar 25 and the support mounting member 26 are clamped by the lower end surface of the cable support 24 and the flange 70 of the support cover 31, so that the electrode holder 28 is held by the support cover 31. It should be noted that the large diameter portion 37 of the collar 25 and the support mounting member 26 are urged toward the flange 70 of the support cover 31 by the elastic force of the O-ring 39. Accordingly, the support cover 31 fixed to the support mounting member 26 is urged downward by the elastic force of the O-ring 39. In addition, the outer diameter of the support cover 31 is set to be smaller than the inner diameter of the main body cover 20, and the support cover 31 is located inside the main body cover 20.

[0032] In addition, the gas supply unit 15B is connected via a gas pipe 19 (refer to Figure 1The gap 35 between the inner peripheral surface of the cable support 24 and the outer peripheral surface of the internal cable 22 is connected. The reaction gas supplied from the gas supply unit 15B flows into the gap 35 between the inner peripheral surface of the cable support 24 and the outer peripheral surface of the internal cable 22. Then, the reaction gas flows downward and flows into the periphery of the electrode support 28 through the plurality of through holes 40 of the support mounting member 26. It should be noted that, as described above, the plurality of through holes 40 are inclined at a given angle, so when the reaction gas passes through the plurality of through holes 40, it is rectified to a given angle. The reaction gas rectified by the plurality of through holes 40 further flows downward and also flows into the periphery of the electrode 30 extending from the lower end of the electrode support 28, and reaches the nozzle 32 of the main body cover 20. That is, inside the main body cover 20, the reaction gas flows from the gap 35 between the inner peripheral surface of the cable support 24 and the outer peripheral surface of the internal cable 22, through the plurality of through holes 40 of the support mounting member 26, into the periphery of the electrode support 28 and the electrode 30 extending from the lower end of the electrode support 28, and reaches the nozzle 32 of the main body cover 20.

[0033] As the reaction gas (source gas), oxygen (O 2 ). The gas supply unit 15B, for example, via a gas pipe 19 (see Figure 1 ), causes a mixed gas of oxygen and nitrogen (N 2 ) (for example, dry air (Air)) to flow into the gap 35 between the inner peripheral surface of the cable support 24 and the outer peripheral surface of the internal cable 22. Hereinafter, for convenience, this mixed gas is sometimes referred to as the reaction gas, and oxygen is referred to as the source gas.

[0034] In addition, a voltage is applied from the power supply unit 15A of the control box 15 to the electrode 30 extending from the lower end of the electrode support 28. Specifically, power is supplied from the power supply unit 15A of the control box 15 to the internal cable 22 of the plasma spray head 11 via a power cable, and power is supplied to the conductor 62 and the crimp terminal 56. Then, the power supplied to the crimp terminal 56 flows through the electrode support 28 to the electrode 30. In this way, by supplying power to the electrode 30, a voltage is applied to the electrode 30. At this time, by applying a voltage to the electrode 30, as Figure 5 shown, an analog arc A is generated from the front end of the electrode 30. The analog arc A is generated along the flow of the reaction gas, so it is generated downward from the front end of the electrode 30 and reaches the front end of the nozzle 32. Therefore, an analog arc A is generated between the front end of the electrode 30 and the front end of the nozzle 32. Moreover, when the reaction gas passes through the analog arc A generated between the front end of the electrode 30 and the front end of the nozzle 32, the reaction gas is plasmaized. Therefore, a discharge of the analog arc A occurs between the front end of the electrode 30 and the front end of the nozzle 32, plasmaizing the reaction gas to generate plasma gas. That is, inside the reaction chamber 76 divided by the main body cover 20, the reaction gas is plasmaized to generate plasma gas.

[0035] With such a structure, in the plasma nozzle 11, plasma gas is generated by discharge between the front end of the electrode 30 and the front end of the nozzle 32, and the plasma gas is ejected from the opening 32A formed at the front end of the nozzle 32. Then, by ejecting the plasma gas from the opening 32A of the nozzle 32, the object to be processed W is subjected to plasma treatment. In this way, in the plasma nozzle 11, plasma gas is generated by discharge between the front end of the electrode 30 and the front end of the nozzle 32, and the front end of the electrode 30 wears out. Therefore, in the plasma nozzle 11, the extension amount of the front end of the electrode 30 extending from the electrode holder 28 can be adjusted by the hollow bolt 66, and the electrode 30 can also be replaced.

[0036] Specifically, before performing plasma treatment by the plasma nozzle 11, the extension amount of the front end of the electrode 30 extending from the lower end of the electrode holder 28 is adjusted so that the front end of the electrode 30 extends by a given amount (for example, 3 mm to 5 mm) from the electrode holder 28. That is, the hollow bolt 66 is loosened by screwing it into the transverse hole 68 so that the extension amount of the front end of the electrode 30 extending from the electrode holder 28 becomes a given amount (for example, 3 mm to 5 mm). Then, after the hollow bolt 66 is screwed into the transverse hole 68 to fix the electrode 30 inside the electrode holder 28, a reaction gas is supplied to the plasma nozzle 11 and a voltage is applied to the electrode 30 to perform plasma treatment using the plasma nozzle 11. By performing plasma treatment in this way, the front end of the electrode 30 gradually wears out, and the extension amount of the front end of the electrode 30 extending from the electrode holder 28 becomes smaller.

[0037] In this way, when the extension amount of the front end of the electrode 30 extending from the electrode holder 28 is less than the given amount, the extension amount of the front end of the electrode 30 extending from the electrode holder 28 is adjusted. That is, the hollow bolt 66 is loosened by screwing it into the transverse hole 68, and the electrode 30 descends so that the extension amount of the front end of the electrode 30 extending from the electrode holder 28 becomes a given amount. Then, after the extension amount of the front end of the electrode 30 extending from the electrode holder 28 becomes a given amount, the hollow bolt 66 is screwed into the transverse hole 68 to fix the electrode 30 inside the electrode holder 28. Thus, when the extension amount of the front end of the electrode 30 becomes less than the given amount, the extension amount of the front end of the electrode 30 can be made to be the given amount again.

[0038] In addition, if the adjustment of the extension amount of the tip of the electrode 30 is repeatedly performed, the electrode 30 will become shorter and it will be impossible to fix the electrode 30 with the hollow bolt 66. That is, for example, if the length dimension of the electrode 30 becomes the same as the length dimension between the lower end surface of the electrode holder 28 and the formation position of the transverse hole 68, in a state where the tip of the electrode 30 extends from the lower end of the electrode holder 28, it becomes impossible to fix the electrode 30 with the hollow bolt 66. Thus, when it becomes impossible to fix the electrode 30 with the hollow bolt 66, the electrode 30 is replaced. That is, the screwing of the hollow bolt 66 into the transverse hole 68 is loosened, and the used electrode 30 is pulled out from the second inner peripheral surface 52 of the electrode holder 28. Then, a new electrode 30 is inserted into the second inner peripheral surface 52 of the electrode holder 28, and the new electrode 30 is fixed inside the electrode holder 28 with the hollow bolt 66.

[0039] In addition, as described above, the plurality of through holes 40 formed in the bracket mounting member 26 are inclined to rectify the reaction gas. Therefore, a plurality of bracket mounting members 26 with different inclination angles of the through holes 40 are prepared, and the bracket mounting member 26 is replaced to adjust the rectification angle of the reaction gas and the like. That is, as described above, the bracket mounting member 26 is detachably screwed into the convex portion 46 of the electrode holder 28. Therefore, by removing the bracket mounting member 26 from the convex portion 46 and installing a bracket mounting member 26 different from the removed bracket mounting member 26 on the convex portion 46, the replacement of the bracket mounting member 26 is performed.

[0040] Thus, in the plasma nozzle 11, the adjustment of the extension amount of the electrode 30, and the replacement of the electrode 30 and the bracket mounting member 26 are performed. Moreover, when the adjustment of the extension amount of the electrode 30, and the replacement of the electrode 30 and the bracket mounting member 26 are performed, although the main body cover 20 and the bracket cover 31 are removed from the cable bracket 24, in the plasma nozzle 11, compared with the existing plasma nozzle, the adjustment of the extension amount of the electrode 30, and the replacement of the electrode 30 and the bracket mounting member 26 can be appropriately performed.

[0041] Specifically, as Figure 6 shown, the existing plasma nozzle 100 includes a main body cover 110, an internal cable 112, a cable bracket 114, a collar 115, a bracket mounting member 116, an electrode holder 118, an electrode 120, a bracket cover 122, a crimp terminal 124, a conductor 126, etc. The main body cover 110 functions as a frame and is formed of a metal material. The main body cover 110 has the same shape as the main body cover 20 of the plasma nozzle 11, and the lower end portion of the main body cover 20 functions as a nozzle 128. In addition, as Figure 7 shown, the main body cover 110 is fixed to the lower surface of the cable bracket 114 by six bolts (only four are shown in the figure) 132 at the flange portion 130 at the upper end.

[0042] In addition, the internal cable 112, cable bracket 114, collar 115, bracket mount 116, electrode bracket 118, electrode 120, bracket cover 122, crimp terminal 124, and conductor 126 have substantially the same structure as the internal cable 22, cable bracket 24, collar 25, bracket mount 26, electrode bracket 28, electrode 30, bracket cover 31, crimp terminal 56, and conductor 62 of the plasma spray head 11, and thus their descriptions are omitted. It should be noted that in the electrode 120, crimp terminal 124, and electrode bracket 118 of the existing plasma spray head 100, the electrode 120 is also fixed inside the electrode bracket 118 by a hollow bolt 136, and the crimp terminal 124 is also fixed inside the electrode bracket 118 by a hollow bolt 138. In addition, although the bracket cover 31 of the plasma spray head 11 is fixed to the cable bracket 24, the bracket cover 122 of the existing plasma spray head 100 is not fixed to the cable bracket 114.

[0043] In the existing plasma spray head 100 with such a structure, when adjusting the extension amount of the electrode 120 or replacing the electrode 120 and the bracket mount 116, the operator Figure 8 as shown, removes six bolts (only four are shown in the figure) 132 with a tool such as a screwdriver. Thereby, the main body cover 110 is removed from the cable bracket 114, and the electrode bracket 118 is exposed. Therefore, the operator can adjust the extension amount of the electrode 120 and replace the electrode 120 by operating the hollow bolt 136. In addition, in the existing plasma spray head 100, since the bracket cover 122 is not fixed to the cable bracket 114, if the main body cover 110 is removed from the cable bracket 114, the bracket cover 122 will separate from the cable bracket 114 due to its own weight. In this way, if the bracket cover 122 separates from the cable bracket 114, the electrode bracket 118 will be in a state where it is not held by the bracket cover 122. Therefore, the operator removes the electrode bracket 118 from the plasma spray head 100 by operating the hollow bolt 138. In this way, by removing the electrode bracket 118 from the plasma spray head 100, the bracket mount 116 installed on the electrode bracket 118 is replaced.

[0044] In this way, in the existing plasma spray head 100, the operator removes the six bolts 132 with a tool to remove the main body cover 110 from the cable bracket 114, and adjusts the extension amount of the electrode 120 and replaces the electrode 120 and the electrode bracket 118. However, if the main body cover 110 is removed from the cable bracket 114, the bracket cover 122 will separate, and the electrode bracket 118 will be in a state where it is not held by the bracket cover 122. In such a state, as Figure 9As shown, the electrode support 118 is in a suspended state supported by the conductor 126. It should be noted that the collar 115 is clamped by the lower surface of the cable support 114 and the support mounting member 116. In this way, when the electrode support 118 is in a suspended state supported by the conductor 126 and a load is applied to the conductor 126, the conductor 126 may break. That is, in the existing plasma nozzle 100, every time the extension amount of the electrode 120 is adjusted, or the electrode 120 and the electrode support 118 are replaced, a load is applied to the conductor 126, and the conductor 126 may break. In addition, in order to adjust the extension amount of the electrode 120, or replace the electrode 120 and the electrode support 118, the operator needs to remove six bolts 132 with tools, which is a burden on the operator and the operation time becomes longer. Furthermore, since the bolts 132 are small, they are easily lost.

[0045] In view of such a situation, in the plasma nozzle 11, the main body cover 20 is attached to the cable support 24 without using tools. Specifically, as Figure 10 shown, an external thread 150 is formed on the outer peripheral surface of the lower end portion of the cable support 24. On the other hand, an internal thread 152 is formed on the inner peripheral surface of the upper end portion of the main body cover 20. Then, the operator rotates the main body cover 20 in the direction of arrow 154 (right-handed direction) to thread-fasten the external thread 150 and the internal thread 152, thereby attaching the main body cover 20 to the cable support 24. Thus, the operator can easily attach the main body cover 20 to the cable support 24 without using tools. On the other hand, the operator rotates the main body cover 20 in the direction of arrow 156 (left-handed direction) to release the thread-fastening between the external thread 150 and the internal thread 152, thereby detaching the main body cover 20 from the cable support 24. Thus, the operator can easily detach the main body cover 20 from the cable support 24 without using tools. In this way, in the plasma nozzle 11, the operator can attach and detach the main body cover 20 with respect to the cable support 24 without using tools and only by rotating the main body cover 20.

[0046] In addition, the support cover 31 is also attached to the cable support 24 without using tools. Specifically, as Figure 11 shown, a recess 160 cut in an L-shape is formed at the upper end of the support cover 31 at the trisected positions. The recess 160 includes a first cut portion 162 extending in the vertical direction and a second cut portion 164 extending in a direction orthogonal to the first cut portion 162. It should be noted that a minute depression 166 facing upward is formed at the front end of the second cut portion 164. On the other hand, as Figure 12 shown, on the outer peripheral surface of the lower end portion of the cable support 24, three pins 168 are erected at the trisected positions below the external thread 150 (in Figure 12The figure shows two pins 168). Therefore, the operator moves the bracket cover 31 in the direction of arrow 170 (upward direction), so that the pin 168 is inserted into the first cutout portion 162 of the recess 160. Then, the operator rotates the bracket cover 31 in the direction of arrow 172 (right-handed rotation direction), so that the pin 168 is inserted into and fixed to the second cutout portion 164 of the recess 160. Thus, the operator can easily install the bracket cover 31 on the cable bracket 24 without using tools. In addition, the operator rotates the bracket cover 31 in the direction of arrow 174 (left-handed rotation direction), and the engagement of the pin 168 with the second cutout portion 164 is released. Then, the operator moves the bracket cover 31 in the direction of arrow 176 (downward direction), and pulls out the pin 168 from the first cutout portion 162. Thus, the operator can easily remove the bracket cover 31 from the cable bracket 24 without using tools. In this way, the operator can attach and detach the bracket cover 31 with respect to the cable bracket 24 without using tools. It should be noted that, as described above, the bracket cover 31 is biased downward by the elastic force of the O-ring 39. That is, the bracket cover 31 is biased in the direction opposite to the insertion direction of the bracket cover 31 by the elastic force of the O-ring 39. Therefore, when the bracket cover 31 is installed on the cable bracket 24, that is, when the pin 168 is fixed to the second cutout portion 164, the pin 168 is biased toward the recess 166 of the second cutout portion 194 by the elastic force of the O-ring 39. Thereby, it is prevented that the pin 168 comes off from the second cutout portion 194 when the bracket cover 31 is installed on the cable bracket 24.

[0047] As described above, in the plasma spray head 11, since the main body cover 20 and the bracket cover 31 are installed on the cable bracket 24 without using tools, the adjustment of the extension amount of the electrode 30 and the replacement of the electrode 30 and the bracket mounting member 26 can be appropriately performed. Specifically, as Figure 10 shown, the operator rotates the main body cover 20 in the direction of arrow 156 (left-handed rotation direction), thereby removing the main body cover 20 from the cable bracket 24. At this time, the bracket cover 31 is fixed to the cable bracket 24 by the pin 168 and the recess 160. Therefore, as Figure 10As shown, in a state where the main body cover 20 is removed from the cable bracket 24, the electrode bracket 28 is exposed together with the bracket mounting member 26 in a state held by the bracket cover 31. Therefore, the operator can adjust the extension amount of the electrode 30 and replace the electrode 30 by operating the hollow bolt 66 on the electrode bracket 28 held by the bracket cover 31. Thus, in the plasma spray head 11, the extension amount of the electrode 30 can be adjusted and the electrode 30 can be replaced without applying a load to the conductor 62. In addition, since the operator can remove the main body cover 20 from the cable bracket 24 without using tools to expose the electrode bracket 28, the burden on the operator when adjusting the extension amount of the electrode 30 and when replacing the electrode 30 can be reduced, and the operation time can be shortened. Furthermore, since there are no small parts such as the bolt 132, loss of parts can also be prevented.

[0048] Furthermore, the main body cover 20 is attached to the cable bracket 24 by a screwing mechanism, and the bracket cover 31 is attached to the cable bracket 24 by a mechanism that engages the pin 168 with the recess 160. Therefore, when the operator rotates the main body cover 20 to remove it from the cable bracket 24, it is possible to prevent the bracket cover 31 from rotating together with the main body cover 20. That is, for example, when the bracket cover 31 is attached to the cable bracket 24 by a screwing mechanism, when the operator rotates the main body cover 20 to remove it from the cable bracket 24, the bracket cover 31 may also rotate together with the main body cover 20. If the bracket cover 31 rotates in this way, inside the bracket cover 31, the crimp terminal 56 may rotate together with the bracket mounting member 26, and the conductor 62 may be twisted and disconnected. In view of such a situation, the bracket cover 31 is attached to the cable bracket 24 by a mechanism different from the screwing mechanism. Thereby, it is possible to prevent the bracket cover 31 from rotating together with the main body cover 20 when the operator rotates the main body cover 20 to remove it from the cable bracket 24, and to prevent disconnection of the conductor 62.

[0049] In addition, since the electrode bracket 28 and the bracket mounting member 26 are held together by the bracket cover 31, when replacing the bracket mounting member 26, it is necessary to remove the bracket cover 31 from the cable bracket 24. Therefore, when replacing the bracket mounting member 26, after the operator removes the main body cover 20 from the cable bracket 24, as Figure 12As shown, by rotating the bracket cover 31 in the direction of arrow 174 and moving it in the direction of arrow 176, the bracket cover 31 is removed from the cable bracket 24. Thus, the electrode bracket 28 becomes a state not held by the bracket cover 31. Then, the operator removes the electrode bracket 28 from the plasma spray head 11 by operating the hollow bolt 58 and replaces the bracket mounting member 26. In this way, when replacing the bracket mounting member 26, the operator can remove the main body cover 20 and the bracket cover 31 from the cable bracket 24 without using tools, so the burden on the operator can be reduced and the operation time can be shortened. Furthermore, since there are no small parts such as the bolt 132, the loss of parts can also be prevented.

[0050] In addition, the plasma spray head 11 is an example of a plasma generating device. The main body cover 20 is an example of a main body cover. The cable bracket 24 is an example of a base. The electrode bracket 28 is an example of a bracket. The electrode 30 is an example of an electrode. The bracket cover 31 is an example of a bracket cover. The O-ring 39 is an example of an elastomer. The reaction chamber 76 is an example of a reaction chamber. The external thread 150 is an example of an engaged portion and an external thread. The internal thread 152 is an example of an engaging portion and an internal thread. The concave portion 160 is an example of a locking portion and a concave portion. The first cut portion 162 is an example of a first cut portion. The second cut portion 164 is an example of a second cut portion. The pin 168 is an example of an engaged portion and a convex portion.

[0051] As described above, the above-described embodiment has the following effects.

[0052] The plasma spray head 11 includes: a main body cover 20 that defines a reaction chamber 76 and functions as a frame; and a cable bracket 24 that is detachably mounted on the main body cover 20. And, the engaging portion of the main body cover 20 is mounted on the engaged portion of the cable bracket 24. Thus, the main body cover 20 can be easily attached and detached with respect to the cable bracket 24.

[0053] In addition, an external thread 150 is formed on the cable bracket 24 as an engaged portion, and an internal thread 152 is formed on the main body cover 20 as an engaging portion. And, by screwing the external thread 150 and the internal thread 152, the main body cover 20 is mounted on the cable bracket 24. Thus, the operator can attach and detach the main body cover 20 with respect to the cable bracket 24 only by rotating the main body cover 20.

[0054] In addition, the plasma spray head 11 includes: an electrode 30 that generates discharge inside the reaction chamber 76; an electrode bracket 28 that detachably holds the electrode 30; and a bracket cover 31 that is used to fix the electrode bracket 28 inside the main body cover 20. And, the locking portion of the bracket cover 31 is mounted on the engaged portion of the cable bracket 24. Thus, the electrode bracket 28 can be easily held by the bracket cover 31.

[0055] In addition, a recess 160 is formed in the bracket cover 31 as a locking portion, and a pin 168 is formed in the cable bracket 24 as a locked portion. Then, by engaging the pin 168 with the recess 160, the bracket cover 31 is attached to the cable bracket 24. Thus, the bracket cover 31 can be attached to the cable bracket 24 with a simple structure.

[0056] In addition, the recess 160 includes a first cutout portion 162 extending in the insertion direction of the bracket cover 31 and a second cutout portion 164 extending in a direction intersecting the insertion direction. Moreover, by engaging the pin 168 with the second cutout portion 164 of the recess 160, the bracket cover 31 is attached to the cable bracket 24. In addition, the plasma spray head 11 includes an O-ring 39 that biases the bracket cover 31 in a direction opposite to the insertion direction of the bracket cover 31. Therefore, the pin 168 in a state of being engaged with the second cutout portion 164 is biased toward the wall surface defining the second cutout portion 164 by the elastic force of the O-ring 39. Thus, it is possible to ensure the state in which the pin 168 is engaged with the second cutout portion 164, that is, the state in which the bracket cover 31 is attached to the cable bracket 24.

[0057] It should be noted that the present invention is not limited to the above-described embodiments, and can be implemented in various ways with various changes and improvements based on the knowledge of those skilled in the art. Specifically, for example, in the above-described embodiments, the main body cover 20 is attached to the cable bracket 24 by a screwing mechanism, and the bracket cover 31 is attached to the cable bracket 24 by a locking mechanism that engages the pin 168 with the recess 160. On the other hand, it may be that the bracket cover 31 is attached to the cable bracket 24 by a screwing mechanism, and the main body cover 20 is attached to the cable bracket 24 by a locking mechanism. In addition, it may be that the main body cover 20 and the bracket cover 31 are attached to the cable bracket 24 by a screwing mechanism, and the main body cover 20 and the bracket cover 31 are attached to the cable bracket 24 by a locking mechanism. In addition, not limited to the screwing mechanism and the locking mechanism, various mechanisms can be adopted as long as the main body cover 20 and the bracket cover 31 can be attached to the cable bracket 24 without using tools. For example, a quick connector, a mechanism having a structure using a so-called coupler (registered trademark in Japanese), a push-lock mechanism, a cam-lock mechanism, etc. can be adopted.

[0058] In addition, in the above-described embodiment, the bracket cover 31 is urged in a direction opposite to the insertion direction of the bracket cover 31 by the elastic force of the O-ring 39. However, the bracket cover 31 may also be urged in the insertion direction of the bracket cover 31. That is, for example, a tension spring or the like may be disposed between the bracket cover 31 and the cable bracket 24 to urge the bracket cover 31 in the insertion direction of the bracket cover 31. In this way, even when the bracket cover 31 is urged in the insertion direction of the bracket cover 31, the same effect as when the bracket cover 31 is urged in a direction opposite to the insertion direction of the bracket cover 31 can be obtained.

[0059] In addition, in the above-described embodiment, discharge is generated between the front end of the electrode 30 and the front end of the main body cover 20 to plasmaize the processing gas. That is, discharge is generated by one electrode 30. On the other hand, discharge may be generated between a plurality of electrodes. And, the electrode bracket 28 that holds at least one of these plurality of electrodes is held by the bracket cover 31.

[0060] Reference Signs 11: Plasma nozzle (plasma generating device), 20: Main body cover, 24: Cable bracket (base), 28: Electrode bracket (bracket), 30: Electrode, 31: Bracket cover, 39: O-ring (elastic body), 76: Reaction chamber, 150: External thread (engaged portion), 152: Internal thread (engaging portion), 160: Concave portion (locking portion), 162: First cut portion, 164: Second cut portion, 168: Pin (locked portion) (protrusion).

Claims

1. A plasma generating device, comprising: A main body cover that defines a reaction chamber, functions as a housing, and has a engaging portion; and A base that is detachably mounted to the main body cover and has a engaged portion, The engaging portion of the main body cover is mounted to the engaged portion of the base.

2. The plasma generating device according to claim 1, Wherein, One of an external thread and an internal thread is formed on the main body cover as the engaging portion, The other of the external thread and the internal thread is formed on the base as the engaged portion, The main body cover is mounted to the base by threadedly fastening the external thread and the internal thread.

3. The plasma generating device according to claim 1 or 2, Wherein, The plasma generating device comprises: An electrode that generates discharge inside the reaction chamber; A bracket that detachably holds the electrode; and A bracket cover that has a locking portion for fixing the bracket inside the main body cover, The locking portion of the bracket cover is mounted to the locked portion of the base.

4. The plasma generating device according to claim 3, Wherein, One of a convex portion and a concave portion is formed on the bracket cover as the locking portion, The other of the convex portion and the concave portion is formed on the base as the locked portion, The bracket cover is mounted to the base by locking the convex portion and the concave portion.

5. The plasma generating device according to claim 4, Wherein, The concave portion includes a first cutout portion extending in the insertion direction of the bracket cover and a second cutout portion extending in a direction intersecting the insertion direction, The bracket cover is mounted to the base by locking the convex portion to the second cutout portion of the concave portion, The plasma generating device includes an elastic body that applies a force to the bracket cover in one of the insertion direction and the opposite direction of the insertion direction.

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