High-vacuum multi-source thermal evaporation coating equipment

Abstract

The invention discloses high-vacuum multi-source thermal evaporation coating equipment, and relates to the technical field of vacuum evaporation coating, the high-vacuum multi-source thermal evaporation coating equipment comprises a coating cylinder, the right side of the coating cylinder is provided with a vacuum pump, the upper side of the coating cylinder is fixedly connected with a plurality of electric heaters, and a rolling conveyor is arranged below the coating cylinder; a glass substrate is arranged on the upper side of the rolling conveyor, a feeding unit is arranged on the left side of the coating barrel, a fixing shell and a supporting frame are fixedly connected to the inner side of the coating barrel, and a supporting block is fixedly connected to the inner side of the supporting frame. According to the high-vacuum multi-source thermal evaporation coating equipment, the coating barrel, the vacuum pump, the electric heater, the conveying pipeline and the coating holes are arranged, heating evaporation is conveniently conducted on materials for coating, vibration dispersion is conveniently conducted on the materials when the materials are fed through a feeding box, a side block, a rotating rod, a dispersion plate, a second control rod and a stirring plate, feeding is more uniform, and the coating efficiency is improved. And subsequent uniform coating is facilitated.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation coating, and specifically to a high-vacuum multi-source thermal evaporation coating device. Background Art

[0002] Pressurized Gas Transport and Controlled Directed Deposition (PGTVD) is a new technology developed by the technical team of Fanfeng Company on the basis of the Gas Transport Deposition (VTD) technology of First Solar in the United States, by optimizing the entire physical and chemical process. It opens up a new idea for the process implementation in materials science and engineering, and is a new technology that can deposit substances that cannot be deposited at high speed by a variety of existing technologies at high speed and uniformly on the surface of another material.

[0003] When performing evaporation coating, it is necessary to put materials into the equipment. When feeding, the materials are poured instead of evenly spread, resulting in uneven distribution of materials in the coating equipment, uneven feeding of materials, inconsistent evaporation rates during the coating process, and thus uneven film thickness. Summary of the Invention

[0004] Aiming at the deficiencies of the prior art, the present invention provides a high-vacuum multi-source thermal evaporation coating device, which solves the problem of uneven coating caused by uneven feeding of materials.

[0005] To achieve the above objectives, the present invention is realized through the following technical solutions:

[0006] A high-vacuum multi-source thermal evaporation coating device includes a coating cylinder. A vacuum pump is provided on the right side of the coating cylinder. A plurality of electric heaters are fixedly connected to the upper side of the coating cylinder. A rolling conveyor is provided below the coating cylinder. A glass substrate is provided on the upper side of the rolling conveyor. A feeding unit is provided on the left side of the coating cylinder. A fixed shell and a support frame are fixedly connected to the inner side of the coating cylinder. A support block is fixedly connected to the inner side of the support frame. A crucible is fixedly connected to the outer side of the support block. A coating hole is opened on the lower side of the coating cylinder. The feeding unit includes a conveying pipeline. The conveying pipeline is fixedly connected to the left side of the coating cylinder. A pressurizing pipe is fixedly connected to the left side of the conveying pipeline. A fixed pipe is fixedly connected to the upper side of the conveying pipeline. A screw conveyor is fixedly connected to the upper end of the fixed pipe. A feeding assembly is provided on the upper side of the screw conveyor. A sealing assembly is provided on the left side of the coating cylinder.

[0007] Preferably, the feeding assembly includes a feeding frame fixedly connected to the upper side of the screw conveyor. A funnel is fixedly connected to the upper side of the feeding frame, and a feeding box is fixedly connected to the upper side of the funnel. Two feeding frames are fixedly connected to the upper side of the feeding box. Two side blocks are fixedly connected to the left and right inner walls of the feeding box. A rotating rod is rotatably connected to the outer side of the side block, a swinging block is fixedly connected to the outer side of the rotating rod, and a dispersion plate is fixedly connected to the outer side of the swinging blocks on both sides. A limiting frame is fixedly connected to the upper side of the dispersion plate. A control rod two is rotatably connected to the inner side of the feeding box and below the dispersion plate. A rotating roller is fixedly connected to the outer side of the control rod two, and a plurality of stirring plates are fixedly connected to the outer side of the rotating roller. A motor is fixedly connected to the rear side of the feeding box.

[0008] Preferably, the front ends of the rotating rods on both sides pass through the front side of the feeding box and are fixedly connected with turntables. Rotating blocks are fixedly connected to the outer sides of the turntables on both sides. A rotating shaft and a control rod one are rotatably connected to the front side of the feeding box. A rocker is fixedly connected to the front end of the rotating shaft. Diagonal plates are rotatably connected to the front sides of the left and right ends of the rocker. The diagonal plates are rotatably connected with the rotating blocks. A large gear is fixedly connected to the outer side of the control rod one, and a small gear meshing with the large gear is fixedly connected to the outer side of the rotating shaft. A reciprocating plate is fixedly connected to the front end of the control rod one. A linkage plate is rotatably connected to the front side of the reciprocating plate. The front end of the control rod two passes through the front side of the feeding box and is fixedly connected with a rotating plate. The rotating plate is rotatably connected with the linkage plate.

[0009] Preferably, a contact plate is fixedly connected to the outer side of the control rod two. A rectangular groove is opened on the lower side of the contact plate, and a contact wheel is arranged inside the rectangular groove. The reciprocating plate, the linkage plate and the rotating plate are all arranged in an inclined structure.

[0010] Preferably, the sealing assembly includes a sealing airbag fixedly connected to the left side of the coating cylinder. The sealing airbag is located outside the conveying pipeline. An air box is fixedly connected to the front side of the feeding box. A piston plate is arranged inside the air box. A push rod is fixedly connected to the left side of the piston plate, and a pressing plate is fixedly connected to the left end of the push rod. A connecting pipe is fixedly connected between the air box and the sealing airbag. The contact wheel is located on the left side of the pressing plate.

[0011] Preferably, a spring is fixedly connected between the pressing plate and the air box. The piston plate and the push rod are both slidably connected to the air box. An electromagnet is fixedly connected to the outer side of the air box. The pressing plate is made of a metal material.

[0012] Preferably, a fixed cover is fixedly connected to the front side of the feeding box, and the connecting pipe passes through the outer side of the fixed cover.

[0013] Beneficial effects

[0014] The present invention provides a high-vacuum multi-source thermal evaporation coating device. Compared with the prior art, it has the following beneficial effects:

[0015] (1) In this high-vacuum multi-source thermal evaporation coating device, by providing a coating cylinder, a vacuum pump, an electric heater, a conveying pipeline and a coating hole, it is convenient to heat and evaporate the material for coating. And through the feeding box, side blocks, rotating rods, dispersion plates, control rod two and stirring plates, it is convenient to vibrate and disperse the material when feeding the material, making the feeding more uniform and facilitating the subsequent uniform coating.

[0016] (2) In this high-vacuum multi-source thermal evaporation coating device, by providing a sealing airbag, a connecting pipe, an air box, a piston plate, a push rod, a pressing plate and a contact wheel, when feeding the material, it is convenient to expand the sealing airbag, which is convenient for sealing the connection between the conveying pipeline and the coating cylinder, avoiding affecting the coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is the overall three-dimensional structure diagram of the present invention;

[0018] Figure 2 is the internal three-dimensional structure diagram of the present invention;

[0019] Figure 3 is the three-dimensional structure diagram of the feeding unit in the present invention;

[0020] Figure 4 is the three-dimensional structure diagram of the dispersion component in the present invention;

[0021] Figure 5 is the internal three-dimensional structure diagram of the feeding box in the present invention;

[0022] Figure 6 is the partial three-dimensional structure diagram of the feeding box in the present invention;

[0023] Figure 7 is Figure 6 the enlarged view of part A in;

[0024] Figure 8 is the sectional three-dimensional structure diagram of the dispersion component in the present invention;

[0025] Figure 9 is the sectional three-dimensional structure diagram of the sealing component in the present invention;

[0026] Figure 10 is Figure 9 the enlarged view of part B in.

[0027] In the figure: 1, coating cylinder; 2, electric heater; 3, vacuum pump; 4, rolling conveyor; 5, glass substrate; 6, feeding unit; 7, fixed shell; 8, coating hole; 9, support frame; 10, crucible; 11, support block; 601, conveying pipeline; 602, pressure pipe; 603, screw conveyor; 604, fixed pipe; 605, sealing assembly; 607, feeding assembly; 6051, sealing airbag; 6052, connecting pipe; 6053, air box; 6054, piston plate; 6055, push rod; 6056, abutting plate; 6057, spring; 6058, electromagnet; 6071, feeding box; 6072, funnel; 6073, feeding frame; 6074, fixed cover; 6075, feeding frame; 6076, side block; 6077, rotating rod; 6078, swinging block; 6079, dispersion plate; 60710, limiting frame; 60711, turntable; 60712, rotating block; 60713, inclined plate; 60714, rotating shaft; 60715, tipping plate; 60716, small gear; 60717, control rod 1; 60718, large gear; 60719, reciprocating plate; 60720, linkage plate; 60721, rotating plate; 60722, control rod 2; 60723, contact plate; 60724, contact wheel; 60725, rotating roller; 60726, stirring plate; 60727, motor. Detailed implementation manners

[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0029] Embodiment 1

[0030] Please refer to Figure 1 - Figure 8, the present invention provides a technical solution: a high-vacuum multi-source thermal evaporation coating device, including a coating cylinder 1, a vacuum pump 3 is arranged on the right side of the coating cylinder 1, a plurality of electric heaters 2 are fixedly connected to the upper side of the coating cylinder 1, a rolling conveyor 4 is arranged below the coating cylinder 1, a glass substrate 5 is arranged on the upper side of the rolling conveyor 4, a feeding unit 6 is arranged on the left side of the coating cylinder 1, a fixed shell 7 and a support frame 9 are fixedly connected to the inner side of the coating cylinder 1, a support block 11 is fixedly connected to the inner side of the support frame 9, a crucible 10 is fixedly connected to the outer side of the support block 11, a coating hole 8 is opened on the lower side of the coating cylinder 1, the feeding unit 6 includes a conveying pipe 601, the conveying pipe 601 is fixedly connected to the left side of the coating cylinder 1, a pressurizing pipe 602 is fixedly connected to the left side of the conveying pipe 601, a fixed pipe 604 is fixedly connected to the upper side of the conveying pipe 601, a screw conveyor 603 is fixedly connected to the upper end of the fixed pipe 604, a feeding assembly 607 is arranged on the upper side of the screw conveyor 603, a sealing assembly 605 is arranged on the left side of the coating cylinder 1. When coating on the glass substrate 5, start the electric heater 2 and, through the feeding unit 6, put the material at the crucible 10, heat the material through the electric heater 2, and start the vacuum pump 3 to make the inner side of the coating cylinder 1 in a high-vacuum environment, evaporate the material, and discharge it through the coating hole 8 onto the glass substrate 5 below for coating.

[0031] The feeding component 607 includes a feeding frame 6073, the feeding frame 6073 is fixedly connected to the upper side of the screw conveyor 603, a funnel 6072 is fixedly connected to the upper side of the feeding frame 6073, a feeding box 6071 is fixedly connected to the upper side of the funnel 6072, two feeding frames 6075 are fixedly connected to the upper side of the feeding box 6071, two side blocks 6076 are fixedly connected to the left and right inner walls of the feeding box 6071 respectively, a rotating rod 6077 is rotatably connected to the outer side of the side block 6076, a swinging block 6078 is fixedly connected to the outer side of the rotating rod 6077, a dispersion plate 6079 is fixedly connected to the outer sides of the swinging blocks 6078 on both the left and right sides, a limiting frame 60710 is fixedly connected to the upper side of the dispersion plate 6079, a second control rod 60722 is rotatably connected to the inner side of the feeding box 6071 and below the dispersion plate 6079, a rotating roller 60725 is fixedly connected to the outer side of the second control rod 60722, a plurality of stirring plates 60726 are fixedly connected to the outer side of the rotating roller 60725, a motor 60727 is fixedly connected to the rear side of the feeding box 6071, the front ends of the rotating rods 6077 on both the left and right sides pass through the front side of the feeding box 6071 and are fixedly connected with turntables 60711 respectively, a rotating block 60712 is fixedly connected to the outer sides of the turntables 60711 on both the left and right sides, a rotating shaft 60714 and a first control rod 60717 are rotatably connected to the front side of the feeding box 6071, a seesaw 60715 is fixedly connected to the front end of the rotating shaft 60714, inclined plates 60713 are rotatably connected to the front sides of the left and right ends of the seesaw 60715, the inclined plates 60713 are rotatably connected with the rotating blocks 60712, a large gear 60718 is fixedly connected to the outer side of the first control rod 60717, a small gear 60716 which is meshed with the large gear 60718 is fixedly connected to the outer side of the rotating shaft 60714, a reciprocating plate 60719 is fixedly connected to the front end of the first control rod 60717, a linkage plate 60720 is rotatably connected to the front side of the reciprocating plate 60719, the front end of the second control rod 60722 passes through the front side of the feeding box 6071 and is fixedly connected with a rotating plate 60721, the rotating plate 60721 is rotatably connected with the linkage plate 60720, a contact plate 60723 is fixedly connected to the outer side of the second control rod 60722, a rectangular groove is formed in the lower side of the contact plate 60723, a contact wheel 60724 is arranged inside the rectangular groove, and the reciprocating plate 60719, the linkage plate 60720 and the rotating plate 60721 are all arranged in an inclined structure.

[0032] Before coating, the materials are first put into the feeding frames 6075 on both sides, so that the materials are put into the dispersion plate 6079. At this time, the motor 60727 is started. The motor 60727 drives the second control rod 60722 to rotate. The second control rod 60722 drives the rotating plate 60721 to rotate. The rotating plate 60721 drives the linkage plate 60720 to rotate. The linkage plate 60720 drives the reciprocating plate 60719 to swing forward and backward. The reciprocating plate 60719 drives the first control rod 60717 to rotate. The first control rod 60717 drives the large gear 60718 to rotate. The large gear 60718 drives the small gear 60716 to rotate, which plays an accelerating role. The small gear 60716 drives the rotating shaft 60714 to swing forward and backward. The rotating shaft 60714 drives the tipping plate 60715 to swing. The tipping plate 60715 drives the inclined plate 60713 to swing. The inclined plate 60713 drives the rotating block 60712 to rotate. The rotating block 60712 drives the turntable 60711 to rotate. The turntable 60711 drives the rotating rod 6077 to swing. The rotating rod 6077 drives the swinging block 6078 to rotate. The swinging block 6078 drives the dispersion plate 6079 to swing repeatedly, so that the dispersion plates 6079 on both sides rotate in opposite directions and swing, making it convenient for the materials to be evenly put into the screw conveyor 603 under the vibration effect. At the same time, the second control rod 60722 drives the rotating roller 60725 to rotate. The rotating roller 60725 drives the stirring plate 60726 to rotate, so that the stirring plate 60726 disperses the materials again, facilitating the uniform distribution of the materials.

[0033] Embodiment 2

[0034] Such as Figure 1 - Figure 10As shown in the figure, a high-vacuum multi-source thermal evaporation coating equipment includes a coating cylinder 1. A vacuum pump 3 is arranged on the right side of the coating cylinder 1. A plurality of electric heaters 2 are fixedly connected to the upper side of the coating cylinder 1. A rolling conveyor 4 is arranged below the coating cylinder 1. A glass substrate 5 is arranged on the upper side of the rolling conveyor 4. A feeding unit 6 is arranged on the left side of the coating cylinder 1. A fixed shell 7 and a support frame 9 are fixedly connected to the inner side of the coating cylinder 1. A support block 11 is fixedly connected to the inner side of the support frame 9. A crucible 10 is fixedly connected to the outer side of the support block 11. A coating hole 8 is opened on the lower side of the coating cylinder 1. The feeding unit 6 includes a conveying pipe 601. The conveying pipe 601 is fixedly connected to the left side of the coating cylinder 1. A pressurizing pipe 602 is fixedly connected to the left side of the conveying pipe 601. A fixed pipe 604 is fixedly connected to the upper side of the conveying pipe 601. A screw conveyor 603 is fixedly connected to the upper end of the fixed pipe 604. A feeding assembly 607 is arranged on the upper side of the screw conveyor 603. A sealing assembly 605 is arranged on the left side of the coating cylinder 1. When coating on the glass substrate 5, start the electric heater 2 and, through the feeding unit 6, put the material at the crucible 10. Heat the material through the electric heater 2, and start the vacuum pump 3 to make the inner side of the coating cylinder 1 in a high-vacuum environment, so that the material evaporates and is discharged through the coating hole 8 to coat on the glass substrate 5 below.

[0035] The sealing assembly 605 includes a sealing airbag 6051. The sealing airbag 6051 is fixedly connected to the left side of the coating cylinder 1. The sealing airbag 6051 is located outside the conveying pipeline 601. A gas box 6053 is fixedly connected to the front side of the feeding box 6071. A piston plate 6054 is arranged inside the gas box 6053. A push rod 6055 is fixedly connected to the left side of the piston plate 6054. A pressing plate 6056 is fixedly connected to the left end of the push rod 6055. A connecting pipe 6052 is fixedly connected between the gas box 6053 and the sealing airbag 6051. The contact wheel 60724 is located on the left side of the pressing plate 6056. A spring 6057 is fixedly connected between the pressing plate 6056 and the gas box 6053. The piston plate 6054 and the push rod 6055 are both slidably connected to the gas box 6053. An electromagnet 6058 is fixedly connected to the outside of the gas box 6053. The pressing plate 6056 is made of a metal material. A fixing cover 6074 is fixedly connected to the front side of the feeding box 6071. The connecting pipe 6052 passes through the outside of the fixing cover 6074. When the material is being fed, the control rod two 60722 drives the contact plate 60723 to rotate. The contact plate 60723 drives the contact wheel 60724 to rotate. Since the contact wheel 60724 is slidably connected to the pressing plate 6056, the contact wheel 60724 squeezes the pressing plate 6056 to move rightward. The pressing plate 6056 drives the push rod 6055 to move. The push rod 6055 drives the piston plate 6054 to move, causing the gas in the gas box 6053 to be discharged and the gas to be flushed into the sealing airbag 6051 through the connecting pipe 6052, causing the sealing airbag 6051 to expand, facilitating the sealing operation of the connection between the conveying pipeline 601 and the coating cylinder 1 and facilitating coating. At this time, the electromagnet 6058 is activated, causing the electromagnet 6058 to contact the pressing plate 6056, and the electromagnet 6058 limits the pressing plate 6056, facilitating the sealing operation.

[0036] Working principle: Before coating, materials are put into the feeding box 6071 through the feeding frame 6075. Then, the motor 60727 is started. The motor 60727 drives the second control rod 60722 to rotate. Under the action of the rotating plate 60721, the linkage plate 60720, the reciprocating plate 60719, the first control rod 60717, the rotating shaft 60714, the tipping plate 60715, the inclined plate 60713 and the rotating block 60712, the control turntable 60711 rotates, causing the rotating rods 6077 on both left and right sides to swing. Under the action of the swinging blocks 6078, the dispersion plates 6079 on both left and right sides swing and vibrate, facilitating the uniform distribution of materials when they fall. Meanwhile, the second control rod 60722 drives the stirring plate 60726 to rotate, enabling the stirring plate 60726 to disperse the materials again, making the distributed materials more uniform. Then, under the action of the screw conveyor 603, the fixed pipe 604 and the conveying pipeline 601, the materials are transported to the inside of the crucible 10. Subsequently, the electric heater 2 and the vacuum pump 3 are started, facilitating the coating of the glass substrate 5 through the coating holes 8. During feeding, the second control rod 60722 drives the contact wheel 60724 to rotate. Under the action of the abutting plate 6056, the push rod 6055 and the connecting pipe 6052, the sealing airbag 6051 expands, facilitating the sealing operation between the conveying pipeline 601 and the coating cylinder 1.

[0037] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or sequence between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or device.

[0038] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high vacuum multi-source thermal evaporation coating device, comprising a coating cylinder (1), characterized in that: A vacuum pump (3) is arranged on the right side of the coating cylinder (1), a plurality of electric heaters (2) are fixedly connected to the upper side of the coating cylinder (1), a rolling conveyor (4) is arranged below the coating cylinder (1), a glass substrate (5) is arranged on the upper side of the rolling conveyor (4), a feeding unit (6) is arranged on the left side of the coating cylinder (1), a fixed shell (7) and a support frame (9) are fixedly connected to the inner side of the coating cylinder (1), a support block (11) is fixedly connected to the inner side of the support frame (9), a crucible (10) is fixedly connected to the outer side of the support block (11), and the coating cylinder (11) is provided with a plurality of electric heaters (2) on the upper side of the coating cylinder (1), a rolling conveyor (4) is arranged below the coating cylinder (1), a glass substrate (5) is arranged on the upper side of the rolling conveyor (4), a feeding unit (6) is arranged on the left side of the coating cylinder (1), a fixed shell (7) and a support frame (9) are fixedly connected to the inner side of the support frame (9), a crucible (10) is fixedly connected to the outer side of the support block (11), and the coating cylinder (11) is provided with a plurality of electric heaters (2) on the upper side of the coating cylinder (1). A coating hole (8) is provided on the lower side of (1), and the feeding unit (6) includes a conveying pipe (601), and the conveying pipe (601) is fixedly connected to the left side of the coating cylinder (1), and a pressure pipe (602) is fixedly connected to the left side of the conveying pipe (601), and a fixed pipe (604) is fixedly connected to the upper side of the conveying pipe (601), and a screw conveyor (603) is fixedly connected to the upper end of the fixed pipe (604), and a feeding assembly (607) is arranged on the upper side of the screw conveyor (603), and a sealing assembly (605) is arranged on the left side of the coating cylinder (1).

2. The high vacuum multi-source thermal evaporation coating equipment according to claim 1, characterized in that: The feeding assembly (607) includes a feeding frame (6073), the feeding frame (6073) is fixedly connected to the upper side of the screw conveyor (603), the upper side of the feeding frame (6073) is fixedly connected to a funnel (6072), the upper side of the funnel (6072) is fixedly connected to a feeding box (6071), the upper side of the feeding box (6071) is fixedly connected to two feeding frames (6075), the left and right inner walls of the feeding box (6071) are fixedly connected to two side blocks (6076), the outer side of the side blocks (6076) is rotatably connected to a rotating rod (6077), the outer side of the rotating rod (6077) is fixedly connected to the A swing block (6078) is connected, and the outer sides of the swing blocks (6078) on the left and right sides are fixedly connected with dispersion plates (6079), and the upper side of the dispersion plate (6079) is fixedly connected with a limit frame (60710), and the inner side of the feeding box (6071) and below the dispersion plate (6079) is rotatably connected with a control rod 2 (60722), and the outer side of the control rod 2 (60722) is fixedly connected with a roller (60725), and the outer side of the roller (60725) is fixedly connected with a plurality of stirring plates (60726), and the rear side of the feeding box (6071) is fixedly connected with a motor (60727).

3. The high vacuum multi-source thermal evaporation coating equipment according to claim 2, characterized in that: The front ends of the rotating rods (6077) on the left and right sides pass through the front side of the feeding box (6071) and are fixedly connected to a rotating disk (60711); the outer sides of the rotating disks (60711) on the left and right sides are fixedly connected to rotating blocks (60712); the front side of the feeding box (6071) is rotatably connected to a rotating shaft (60714) and a control rod 1 (60717); the front end of the rotating shaft (60714) is fixedly connected to a seesaw (60715); the front sides of the left and right ends of the seesaw (60715) are rotatably connected to inclined plates (60713); the inclined plates (60713) are rotatably connected to the rotating blocks (60712); The outer side of the control rod 1 (60717) is fixedly connected to a large gear (60718), the outer side of the rotating shaft (60714) is fixedly connected to a small gear (60716) meshing with the large gear (60718), the front end of the control rod 1 (60717) is fixedly connected to a reciprocating plate (60719), the front side of the reciprocating plate (60719) is rotatably connected to a linkage plate (60720), the front end of the control rod 2 (60722) passes through the front side of the feeding box (6071) and is fixedly connected to a rotating plate (60721), and the rotating plate (60721) is rotatably connected to the linkage plate (60720).

4. The high vacuum multi-source thermal evaporation coating equipment according to claim 3, characterized in that: The outer side of the second control rod (60722) is fixedly connected with a contact plate (60723), the lower side of the contact plate (60723) is provided with a rectangular groove, the inner side of the rectangular groove is provided with a contact wheel (60724), and the reciprocating plate (60719), the linkage plate (60720) and the rotating plate (60721) are all arranged in an inclined structure.

5. The high vacuum multi-source thermal evaporation coating equipment according to claim 4, characterized in that: The sealing assembly (605) includes a sealing airbag (6051), which is fixedly connected to the left side of the coating cylinder (1). The sealing airbag (6051) is located on the outside of the conveying pipe (601). The front side of the feeding box (6071) is fixedly connected to an air box (6053), and a piston plate (6054) is provided on the inner side of the air box (6053). The left side of the piston plate (6054) is fixedly connected to a push rod (6055), and the left end of the push rod (6055) is fixedly connected to a support plate (6056). A connecting pipe (6052) is fixedly connected between the air box (6053) and the sealing airbag (6051), and the contact wheel (60724) is located on the left side of the support plate (6056).

6. The high vacuum multi-source thermal evaporation coating equipment according to claim 5, characterized in that: A spring (6057) is fixedly connected between the abutment plate (6056) and the air box (6053); the piston plate (6054) and the push rod (6055) are both slidably connected to the air box (6053); an electromagnet (6058) is fixedly connected to the outer side of the air box (6053); and the abutment plate (6056) is made of metal material.

7. The high vacuum multi-source thermal evaporation coating equipment according to claim 5, characterized in that: A fixed cover (6074) is fixedly connected to the front side of the feeding box (6071), and the connecting pipe (6052) passes through the outer side of the fixed cover (6074).

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