Processing and detection equipment and detection equipment
By using time-sequential tomography fast image technology and high-frequency short-pulse laser detection beams in the laser processing process, the problem of dynamic analysis cannot be performed simultaneously in the laser processing process, and image analysis with high dynamic analysis is realized, which improves production efficiency.
Patent Information
- Application Number
- CN202311819074.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-27
- Publication Date
- 2025-06-27
AI Technical Summary
During the laser processing process, dynamic analysis cannot be performed simultaneously, resulting in additional time for product analysis after the process, affecting production efficiency.
The fast image technology of timing tomography is used to combine with high repetition frequency and short-pulse laser detection beams to generate light signals through processing elements on the stage. The galvanometer reflects the light signals in multiple timings, and is imaged on the image sensing element through the focus module to achieve high dynamic analysis image analysis.
During the process or manufacturing process, timing tomography can be performed simultaneously to achieve high dynamic analysis image effect, reducing the additional time required for product analysis and improving production efficiency.
Smart Images
Figure CN120205980A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a processing and detection device and a detection device. Background Art
[0002] Currently, in the process of laser processing, it is impossible to dynamically analyze the process or the manufacturing process of the product simultaneously in terms of time. That is to say, after all the laser processing processes are completed on one stage, the product needs to be placed on another stage for inspection. In this way, in order to analyze the product after the process, additional time is required, which also causes more loss in terms of timeliness and affects production efficiency. Summary of the Invention
[0003] The processing and detection device and the detection device provided by the present invention can adopt the temporal-tomography fast image technology, and cooperate with a high repetition frequency and a short-pulse laser detection beam (probe beam), so as to obtain high-dynamic-resolution images, and can simultaneously perform temporal tomography analysis during the process of processing or manufacturing the product.
[0004] An embodiment of the present invention provides a processing and detection device, including a stage, a processing unit, and a measurement unit. The stage bears a processing element, and the processing unit provides process laser for performing process operations on the processing element on the stage. The measurement unit includes a light source, a galvanometer, an image sensing element, and a focusing module. The light source irradiates the position of the processing element on the stage and causes the processing element to generate a light signal. The galvanometer reflects the light signals from the processing element to different directions according to multiple time sequences. The image sensing element has multiple image sensing areas, which are respectively used to receive the light signals of multiple time sequences reflected from the galvanometer. The focusing module is arranged in the optical path from the stage to the image sensing element, and is used to image the light signals in different directions reflected by the galvanometer according to multiple time sequences on the respective image sensing areas of the image sensing element, and the field of view range of the focusing module covers the processing element. The time interval when the light source is started is synchronized with the time sequence when the galvanometer reflects each light signal to the corresponding image sensing area, and in the picture recorded by the image sensing element during a single exposure, it contains multiple images received at different time sequences, and the multiple images are respectively imaged on different image sensing areas.
[0005] An embodiment of the present invention provides a detection device including a galvanometer, an image sensing element, and a focusing module. The galvanometer reflects the light signal from the sample to different directions according to a plurality of different time sequences. The image sensing element has a plurality of image sensing regions, which are respectively used to receive the light signals of a plurality of time sequences from the galvanometer. The focusing module is disposed in the optical path between the galvanometer and the image sensing element or between the galvanometer and the sample, and is used to image the light signals in different directions reflected by the galvanometer according to a plurality of time sequences on each image sensing region of the image sensing element. Wherein, the picture recorded by the image sensing element in a single exposure contains a plurality of images received at different time sequences, and the plurality of images are respectively imaged on different image sensing regions.
[0006] Based on the above, in the processing and detection device and the detection device of the embodiment of the present invention, the stage bears the processing element (sample), and the processing unit provides process laser to perform a process operation on the processing element on the stage. In the measurement unit, the light source irradiates the processing element (sample) to generate a light signal, and the galvanometer reflects the light signal from the processing element (sample) to different directions according to a plurality of different time sequences, and images the light signal on the image sensing element through the focusing module. The time interval when the light source is started is synchronized with the time sequence when the galvanometer reflects each light signal to the corresponding image sensing region. And in the picture recorded by the image sensing element in a single exposure, it contains a plurality of images received at different time sequences, and the plurality of images are respectively imaged on different image sensing regions. After post-production, the images corresponding to each image sensing region in the picture recorded by a single exposure are captured and arranged in time sequence, and continuous playback can obtain the video of the processing element (sample) during the process operation. In this way, high-dynamic-resolution images (such as ultra-high-dynamic-resolution images) can be achieved, and temporal tomography analysis can be performed simultaneously during the process of processing or manufacturing products. Description of the Drawings
[0007] Figures 1A to 1D is a schematic diagram of a processing and detection device according to an embodiment of the present invention;
[0008] Figure 2 is a schematic diagram of a processing and detection device according to an embodiment of the present invention;
[0009] Figures 3A to 3B is a schematic diagram of a processing and detection device according to an embodiment of the present invention;
[0010] Figure 4 is a schematic diagram of a processing and detection device according to an embodiment of the present invention;
[0011] Figures 5A to 5B is a schematic diagram of the time axis of a processing and detection device according to an embodiment of the present invention. Detailed implementation manners
[0012] Reference will now be made in detail to exemplary embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numerals are used in the drawings and the description to refer to the same or like parts.
[0013] Figures 1A to 1D It is a schematic diagram of a processing and detection device according to an embodiment of the present invention.
[0014] As Figure 1A shown, a processing and detection device 100a includes a stage 110, a processing unit 130, and a measuring unit 140. The stage 110 is used to carry a processing element 120. The processing unit 130 includes a process laser source 131 that provides a process laser L1 to perform a process operation on the processing element 120 on the stage 110.
[0015] The measuring unit 140 includes a light source 141, a galvanometer 143, an image sensing element 145, and a focusing module 147. The light source 141 irradiates the position of the processing element 120 on the stage 110 to cause the processing element 120 to generate a light signal L2. The light source 141 guides the light to the processing element 120 through a semi-reflective mirror HR2, causing the processing element 120 to generate a light signal L2. The galvanometer 143 reflects the light signal L2 from the processing element 120 to different directions according to a plurality of time sequences. The light signal L2 can be a light signal reflected by the processing element 120 or a light signal generated by stimulated emission of the processing element 120.
[0016] The image sensing element 145 has a plurality of image sensing regions respectively used to receive a plurality of time-sequential light signals L2 reflected by the galvanometer 143. The focusing module 147 is disposed in the optical path from the stage 110 to the image sensing element 145 to respectively image the light signals L2 in different directions reflected by the galvanometer 143 at different times on the respective image sensing regions of the image sensing element 145. The field of view range R1 of the focusing module 147 covers the processing element 120.
[0017] The time interval when the light source 141 is started is synchronized with the time sequence when the galvanometer 143 reflects each light signal L2 to the corresponding image sensing region. And in the picture recorded by the image sensing element 145 in a single exposure, it contains a plurality of images received at different time sequences, and the plurality of images are respectively imaged on different image sensing regions.
[0018] As Figure 1B shown, a plurality of time sequences (IT1 to IT3) are consecutive after the process operation LT, as Figure 1CAs shown, there is a buffer zone BF between the image sensing areas (Im1-Im9) to separate the multiple image sensing areas in space to avoid interference between multiple images of different time sequences. The image corresponding to the field of view R1 is imaged into a single image sensing area and the surrounding buffer zone BF, or the image corresponding to the field of view R1 is completely imaged into a single image sensing area.
[0019] The optical image of the processing element 120 that changes with time is reflected by the galvanometer 143 to the image sensing element 145 . Images at different time sequences are recorded in different sensing areas on the image sensing element 145 . The galvanometer 143 has different angles at different time sequences.
[0020] The galvanometer 145 reflects the image of the first time sequence IT1 to the first sensing area Im1, and reflects the image of the second time sequence IT2 to the second sensing area Im2. There is a focusing module 147 between the processing element 120 and the galvanometer 143 or between the galvanometer 143 and the image sensing element 145 for imaging the image of the processing element 120 to the image sensing element 145. When each sensing area of the image sensing element 145 is projected with an image, the image sensing element 145 stores the entire image and repeats the next round of scanning. In some embodiments, when a portion of the sensing area of the image sensing element 145 is projected with an image, the image sensing element 145 stores the entire image and repeats the next round of scanning.
[0021] Please refer to Figure 1D In this embodiment, in order to observe the continuous state change of the processing element 120 (or the sample) during the process, the measuring unit 140 continuously captures multiple frames of images (high target frame number) of the processing element 120. Since the storage and writing speed (i.e., the frame number / second) of the image sensing element 145 (for example, a charge-coupled device (CCD) or a complementary metal oxide semiconductor element (CMOS)) is limited (less than the target frame number), the images of different time intervals at the same position on the processing element 120 are sequentially projected onto different areas (Im1 to Im2) of the image sensing element 147 through the galvanometer 143 and the focusing module 147. 25 ), 25 zones are shown here, but this is not limiting.
[0022] At this time, the image sensor element 145 continues to receive the light signal L2, and after multiple frames of images are recorded, they are stored and written at one time. Subsequently, the multiple frames of images in the entire picture are divided and arranged in time sequence to form a video that can present the state changes of the processing element 120.
[0023] The number of frames that can be recorded per second is the number of sensing regions multiplied by the write rate (framerate) of the image sensing element 145, and the multiple of speed improvement is proportional to the number of sensing regions.
[0024] For example, if the resolution of the image sensing element 145 is 2000 pixels * 2000 pixels and it is divided into multiple sensing regions with a resolution of 40 pixels * 40 pixels for each sensing region, then a total of 5 * 5 = 25 sensing regions can be divided (as Figure 1D shown as Im1 to Im 25 ), which means that the entire picture of the image sensing element 145 can be used to record the images of the processing element 120 in 25 time intervals.
[0025] Even if the frame rate of the image sensing element is only 30 fps (30 frames in each second of the video), since the images in different time intervals are projected onto different positions on the image sensing element 145, it is still possible to capture 25 * 30 = 750 images within a unit time (i.e., 1 second) and compose them into a video through post - processing. The number of sensing regions depends on the arrangement method on the image sensing element 145 that can be placed without overlapping each other.
[0026] In addition, if the resolution is 50 pixels * 50 pixels, a total of 4 * 4 = 16 sensing regions can be divided; if the resolution is 60 pixels * 60 pixels, a total of 3 * 3 = 9 sensing regions can be divided. It is not necessary to be divisible exactly, and a buffer is reserved between the sensing regions to avoid the influence of tolerances.
[0027] Figure 2 It is a schematic diagram of a processing and detection device according to an embodiment of the present invention.
[0028] Figure 2 And Figure 1A The difference from
[0029] In addition, when the image sensing element 145 is continuously in the exposure (recording) state, during the scanning process of the galvanometer 143, since image dragging or ghosting will occur when the first sensing area Im1 switches to the second sensing area Im2, therefore, if the processing element 120 itself does not emit light, it is necessary to irradiate with the light source 141. The light source 141 and the galvanometer 143 are synchronously controlled, that is, the on-off frequency of the light source 141 is the same as the frequency of the galvanometer 143 changing the angle. In some embodiments, the light source 141 is a high-frequency pulsed laser.
[0030] When the galvanometer 143 can image the image of the processing element 120 at a specific timing to a specific sensing area, the light source 141 is started, and there is no leakage or misalignment to other sensing areas. After the light source 141 stops, the galvanometer 143 begins to change the angle (change to the angle that can image the image of another timing to another sensing area), and the light source 141 is directed to the processing element 120 through the half-reflecting mirror HR2, and the image of the light signal L2 can penetrate the half-reflecting mirror HR2 to the galvanometer.
[0031] Figure 3A ~FIG. 3B is a schematic diagram of a processing and detection device according to an embodiment of the present invention.
[0032] Figure 3A Compared with Figure 1A The difference is that the measurement unit 140 in the processing and detection device 100c includes light sources 141 and 142 with different wavelengths, and the light rays emitted by the light sources 141 and 142 with different wavelengths are respectively directed to the processing element 120 through the half-reflecting mirror HR2 and the half-reflecting mirror HR3. The wavelength of the light source 141 is, for example, 1064 nanometers, and the wavelength of the light source 142 is, for example, 532 nanometers.
[0033] The timing group is composed of multiple timings that are continuously respectively corresponding to the irradiations of multiple light sources with different wavelengths. The timing group includes multiple timings that are respectively corresponding to the irradiations of light sources with different wavelengths, and the minimum time difference between two adjacent timing groups is greater than the time difference of multiple timings in the same timing group.
[0034] As Figure 3B shown, the processing element 120 is irradiated with the light source 141 at the first timing IT1', and the reflected image is imaged to the first sensing area Im1. The processing element 120 is irradiated with the light source 142 at the second timing IT2', and the reflected image is imaged to the second sensing area Im2. The first timing IT1' and the second timing IT2' belong to the same timing group, which is called the first timing group. Multiple image sensing areas in the image sensing element 145 respectively record monochromatic images corresponding to the wavelength of the light source 141.
[0035] At the third timing IT3', the processing element 120 is irradiated with the light source 142, and the reflected image is imaged onto the third sensing area Im3. At the fourth timing IT4', the processing element 120 is irradiated with the light source 142, and the reflected image is imaged onto the fourth sensing area Im4. The third timing IT3' and the fourth timing IT4' belong to the same timing group, which is called the second timing group. Multiple image sensing areas in the image sensing element 145 respectively record monochromatic images corresponding to the wavelength of the light source 142.
[0036] The above light sources all irradiate the same position on the processing element 120, thereby generating images of different colors. The light sources include two or more different wavelengths, such as red laser light with a wavelength of 650 nm, green laser light with a wavelength of 532 nm, and blue laser light with a wavelength of 405 nm. In some embodiments, in the same timing group, the processing element 120 is irradiated with red laser light, green laser light, and blue laser light at three timings respectively. The light rays emitted by multiple light sources with different wavelengths are alternately guided to the processing element according to a continuous plurality of timings.
[0037] The time difference between the second timing IT2' of the first timing group and the third timing IT3' of the second timing group is greater than the time difference between the first timing IT1' and the second timing IT2' of the first timing group. The time difference between the second timing IT2' of the first timing group and the third timing IT3' of the second timing group is greater than the time difference between the third timing IT3' and the fourth timing IT4'. The time difference between the first timing IT1' and the second timing IT2' of the first timing group is equal to the time difference between the third timing IT3' and the fourth timing IT4' of the second timing group.
[0038] The time difference between the second timing IT2' of the first timing group and the third timing IT3' of the second timing group is greater than the time difference between the first timing IT1' and the second timing IT2' of the first timing group. In some embodiments, the minimum time difference between adjacent timing groups is greater than 6 times, so as to have sufficient discrimination between the timing groups.
[0039] The various monochromatic images respectively recorded by multiple image sensing areas can be superimposed to present a color image. The time difference between the timing groups is relatively large, and the state change of the processing element over time can be presented. The superimposition of multiple monochromatic images can make the image be continuously displayed, showing a color "film" of the state change of the processing element 120. In some embodiments, through post-production, the pictures recorded by the exposure are captured, and the monochromatic images of different colors in the same timing group are superimposed to form a color image. Then, the color images of each timing group are continuously played to obtain a film of the processing element 120 (sample) during the process.
[0040] Figure 4 It is a schematic diagram of a processing and detection device according to an embodiment of the present invention.
[0041] Figure 4The difference from Figure 1A is that the processing and inspection device 100d includes a processing unit 130 and a measurement unit 140. The processing unit 130 includes a process laser source 131 and a galvanometer 133. The process laser source 131 is used to provide a process laser L1, and through the angle change of the galvanometer 133 and the reflection of the beam splitter HR1, the process laser L1 is irradiated at a specified position of the processing element 120.
[0042] The process laser L1 is used to remove the processing element 120 or the process laser L1 is used to anneal the processing element 120. The positions measured by the measurement unit 140 cover the positions irradiated by the process laser L1, and measurements are made synchronously during processing. In some embodiments, the processing element 120 is a micro light-emitting diode.
[0043] Please refer to Figure 5A , when the measurement unit 140 measures, it illuminates with a light source 141 (such as a pulsed laser) according to each timing. When the process laser source 131 performs process laser processing, after the process step LT’, the measurement unit 140 immediately measures the same position for multiple timings (IT1” to IT3”), and observes the state change of the processing element 120 during the subsequent process of the process laser processing.
[0044] Please refer to Figure 5B , before the process laser source 131 performs process laser processing, the measurement unit 140 starts to measure the same position for multiple timings (IT1”’ to IT2”’), and then the process laser source 131 performs process laser processing, observing the state change after the pre-process timings (IT1”’ to IT2”’) and after the process step LT”. In an embodiment not shown, the process step LT” overlaps with one of the timing times when the measurement unit 140 measures, so as to measure the state of the processing element 120 at the moment of performing the process step LT”.
[0045] In summary, in the processing and detection equipment and the detection equipment according to the embodiments of the present invention, the processing unit provides process laser to perform process operations on the processing elements on the stage. The light source in the measurement unit irradiates the processing elements to generate light signals, and the galvanometer reflects the light signals from the processing elements to different directions according to multiple different time sequences and images the light signals on the image sensing element through the focusing module. The time intervals when the light source is started are synchronized with the time sequences when the galvanometer reflects each light signal to the corresponding image sensing regions respectively, and the picture recorded by the image sensing element in a single exposure contains multiple images received at different time sequences, and the multiple images are respectively imaged on different image sensing regions. Through post-production, in the picture recorded by a single exposure, the images corresponding to each image sensing region are captured and arranged in time sequence, and a continuous playback can obtain a video of the processing element (sample) during the process operation. In this way, during the process or product production process, time-sequential tomographic analysis can be performed simultaneously, and high-dynamic resolution (such as ultra-high dynamic resolution) image analysis can be achieved.
[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.
Claims
1. A processing and detection device, characterized in that, Comprising: A stage for carrying a processing element; A processing unit that provides process laser light for performing a process operation on the processing element on the stage; And A measurement unit, comprising: A light source that irradiates the position of the processing element on the stage and causes the processing element to generate a light signal; A galvanometer scanner that reflects the light signals from the processing element to different directions according to a plurality of time sequences; An image sensing element having a plurality of image sensing regions respectively for receiving the light signals of the plurality of time sequences reflected from the galvanometer scanner; and A focusing module disposed in the optical path from the stage to the image sensing element for respectively imaging the light signals in different directions reflected by the galvanometer scanner according to the plurality of time sequences onto the respective image sensing regions of the image sensing element, and the field of view of the focusing module covers the processing element, wherein the time interval when the light source is activated is synchronized with the time sequence when the galvanometer scanner reflects each light signal to the corresponding one of the plurality of image sensing regions, and in the picture recorded by the image sensing element in a single exposure, it contains a plurality of images received at different time sequences, and the plurality of images are respectively imaged on different ones of the image sensing regions.
2. The processing and detection equipment according to claim 1, characterized in that The plurality of time sequences are consecutive after the process operation.
3. The processing and detection equipment according to claim 1, characterized in that, There are buffers between the image sensing regions for spatially separating the plurality of image sensing regions.
4. The processing and detection device according to claim 3, characterized in that, The image corresponding to the field of view is imaged into a single one of the image sensing regions and the surrounding buffers.
5. The processing and detection device according to claim 3, characterized in that The image corresponding to the field of view is completely imaged into a single one of the image sensing regions.
6. The processing and detection equipment according to claim 1, wherein The light source includes a plurality of light sources with different wavelengths and respectively guides the light emitted by the light sources with different wavelengths to the processing element by a half-reflection mirror.
7. The processing and detection device according to claim 6, characterized in that, The light emitted by the plurality of light sources with different wavelengths is alternately guided to the processing element according to the consecutive plurality of time sequences.
8. The processing and detection device according to claim 7, wherein The plurality of time sequences respectively corresponding to the irradiation of the plurality of light sources with different wavelengths form a time sequence group, and the minimum time difference between two adjacent time sequence groups is greater than the time difference of the plurality of time sequences in the same time sequence group.
9. A detection device, characterized in that, Comprising: A galvanometer scanner that reflects the light signals from a sample to different directions according to different plurality of time sequences; An image sensing element having a plurality of image sensing regions respectively for receiving the light signals of the plurality of time sequences from the galvanometer scanner; And A focusing module disposed in the optical path between the galvanometer scanner and the image sensing element or between the galvanometer scanner and the sample for respectively imaging the light signals in different directions reflected by the galvanometer scanner according to the plurality of time sequences onto the respective image sensing regions of the image sensing element, and the field of view of the focusing module covers the sample, wherein in the picture recorded by the image sensing element in a single exposure, it contains a plurality of images received at different time sequences, and the plurality of images are respectively imaged on different ones of the image sensing regions.
10. The detection device according to claim 9, characterized in that, There is an optical modulator in the middle of the optical path, and when the image of the sample at each time sequence is imaged onto the corresponding sensing region, the optical modulator is turned on to allow the light signal to pass through.
11. The detection device according to claim 9, characterized in that, It further includes a light source for irradiating the sample, and the time intervals of the light source irradiation are synchronized with the multiple time sequences in which the galvanometer reflects the light signal to the corresponding multiple image sensing regions respectively.