Magnetron sputtering coating equipment, rotating cathode and online adjustable magnetic bar

Abstract

The invention discloses magnetron sputtering coating equipment, a rotating cathode and an online adjustable magnetic bar, and belongs to the field of magnetron sputtering coating, a magnet assembly is arranged in the length direction of a supporting beam and movably connected with the supporting beam, and a driving assembly is connected with the supporting beam and used for adjusting the distance between the magnet assembly and the surface of the supporting beam. A supporting connector matched with the supporting flange is arranged in the supporting end away from the magnetic bar driving end, and an electric transmission structure used for supplying power to the driving assembly and / or providing signals is arranged in the supporting connector. The electric transmission structure is arranged in the supporting end of the magnetic rod, power supply / signal transmission is provided for the driving assembly in the magnetic rod, the driving design of the driving end does not need to be changed, electric transmission is isolated from a coolant pipeline, the electric transmission safety is guaranteed, and therefore online magnetic field adjustment of the magnetic rod can be achieved without shutdown; and the stability and reliability of power supply / signal transmission of long-term use of the on-line adjustable magnetic bar are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetron sputtering, and in particular to a magnetron sputtering coating device, a rotating cathode and an on-line adjustable magnetic rod. Background Art

[0002] The magnetron sputtering cathode is the core component of a vacuum magnetron sputtering coating device, and is mainly applied in high-tech fields such as semiconductors, optics, energy-saving glass, liquid crystal panels, photovoltaics, and vehicle-mounted touch screens. The basic principle of magnetron sputtering is to change the movement direction of electrons with a magnetic field, confine and extend the movement path of electrons, increase the ionization probability of electrons and effectively utilize the energy of electrons. The generated ions bombard the target cylinder, and target cylinder atoms are sputtered from the target cylinder. The target cylinder atoms are deposited on the substrate to form a required functional thin film.

[0003] The coating uniformity is affected by various factors such as magnetic field uniformity, electric field uniformity, process atmosphere uniformity, target cylinder quality and baffle opening uniformity; and the coating uniformity shows a gradually deteriorating law from the initial stage to the final stage of target cylinder use. In recent years, the coating industry has higher and higher requirements for coating uniformity. Generally, the coating uniformity is adjusted by adjusting the intensity distribution of the magnetic field on the surface of the target cylinder. In the prior art, when the magnetic field needs to be adjusted, the entire coating device needs to be evacuated and stopped, and the magnetic rod in the target cylinder needs to be taken out by disassembling the rotating cathode, which will cause the device to stop for a long time, reduce the production capacity of the device, and may require multiple stops to adjust the magnetic field to achieve the required coating uniformity. After the target cylinder is used for a period of time, due to the gradual deterioration of the coating uniformity, it is necessary to evacuate and adjust again.

[0004] To solve the above problems, Patent CN104137221B provides a signal connector between the terminal module (also called the end in the industry) and the magnetic rod. The signal connector is placed in the coolant of the cooling channel of the end, and the end provides a protection device for the signal connector to protect the signal connector from degradation, damage or interference due to the surrounding cooling fluid / or due to the surrounding high-energy field. However, since the signal connector is placed in the coolant, plugging and unplugging operations are required each time the target cylinder is replaced, which reduces the reliability of the long-term use of the device. Patent CN105026609B places the power supply inside the magnetic rod, and at the same time realizes signal communication through non-contact means such as light to achieve the purpose of on-line adjusting the magnetic field intensity of the magnetic rod. However, since the power supply placed inside the magnetic rod needs to be regularly charged when the device is evacuated, and in applications with very high uniformity requirements, many magnetic field adjustment points need to be added, and the magnetic field needs to be adjusted multiple times during the service life cycle of the target cylinder, there is a risk of insufficient power supply. Summary of the Invention

[0005] To solve the technical problems in the background art, the present invention provides a magnetron sputtering coating device, a rotating cathode and an on-line adjustable magnetic rod.

[0006] An online adjustable magnetic rod proposed by the present invention includes: a support beam, a magnet assembly, at least one driving assembly, a driving joint, a support joint and a support flange; The magnet assembly is arranged along the length direction of the support beam and is movably connected to the support beam, and the driving assembly is connected to the support beam for adjusting the distance between the magnet assembly and the surface of the support beam; The driving joint and the support joint are respectively located at both ends of the support beam. The middle of the support flange is provided with an installation opening. The support joint is rotatably installed at the installation opening, and an electric transmission structure for supplying power and / or providing signals for the driving assembly is arranged inside the support joint.

[0007] Preferably, a cooling channel extending from the driving joint towards the support joint is arranged inside the support beam. A communication hole is arranged on the side wall of one end of the cooling channel close to the support joint, and a communication cavity communicated with the cooling channel is arranged inside the driving joint.

[0008] Preferably, a through cavity is arranged inside the support joint, and the electric transmission structure is a cable passing through the through cavity.

[0009] Preferably, a flange plug connected to the electric transmission structure is arranged at one end of the support joint away from the support beam.

[0010] Preferably, the driving assembly includes a driving mechanism and an adjusting connecting piece. The magnet assembly is connected to the support beam through at least one adjusting connecting piece, and the driving mechanism is connected to the adjusting connecting piece for driving the adjusting connecting piece to move to adjust the distance between the magnet assembly and the surface of the support beam.

[0011] Preferably, the driving mechanism adopts a waterproof motor. An inner connection end is arranged at one end of the electric transmission structure close to the support beam, and the driving mechanism is connected to the inner connection end through a waterproof cable.

[0012] Preferably, a sealing cover is further included. The sealing cover forms a sealed space outside the driving motor, and one end of the electric transmission structure connecting the driving mechanism is located inside the sealed space.

[0013] Preferably, an inner control box is further included. The inner control box is arranged on the support beam and is connected between the driving assembly and the electric transmission structure for power supply distribution of the driving assembly and / or control and feedback of driving signals.

[0014] Preferably, an outer control box is further included. The outer control box is connected to the inner control box through the electric transmission structure for inputting power supply / signals into the magnetic rod and / or receiving feedback signals from the inner control box.

[0015] In the present invention, an on-line adjustable magnetic rod is proposed. The magnet assembly is arranged along the length direction of the support beam and is movably connected to the support beam. The driving assembly is connected to the support beam for adjusting the distance between the magnet assembly and the surface of the support beam. A support joint cooperating with the support flange is arranged inside the support end far from the driving end of the magnetic rod. An electrical transmission structure for supplying power and / or providing signals to the driving assembly is arranged inside the support joint. By arranging the electrical transmission structure inside the support end of the magnetic rod, power supply / signal transmission is provided for the driving assembly inside the magnetic rod, without changing the driving design at the driving end, and isolating the electrical transmission from the coolant pipeline to ensure the safety of electrical transmission. Thus, on-line magnetic field adjustment of the magnetic rod can be achieved without shutting down the machine, ensuring the stability and reliability of power supply / signal transmission during the long-term use of the on-line adjustable magnetic rod.

[0016] The present invention also proposes a rotary cathode, which includes a driving end head, a support end head and the above-mentioned on-line adjustable magnetic rod; Both ends of the on-line adjustable magnetic rod are respectively installed on the driving end head and the support end head through a driving joint and a support joint. The driving end head includes a driving flange for cooperating with the support flange to install a target cylinder.

[0017] Preferably, it further includes a cathode cover plate, and the driving end head and the support end head are respectively installed on the cathode cover plate.

[0018] Preferably, a vacuum plug is further arranged on the cathode cover plate, and one end of the electrical transmission structure far from the support beam is connected to the vacuum plug.

[0019] Preferably, it further includes a vacuum pipeline. Vacuum flanges for installing both ends of the vacuum pipeline are respectively arranged on the cathode cover plate and the support joint. The vacuum pipeline is used to provide an atmospheric pressure channel for the cable connecting the magnetic rod and the outside.

[0020] In the present invention, for the proposed rotary cathode, the support flange and the support joint with the electrical transmission structure are used as part of the magnetic rod, and there is no need to disassemble and assemble when replacing the target cylinder. At the same time, since the magnetic field adjustment and the electrical transmission structure are both integrated on the magnetic rod, there is no need to change the internal structure of the existing driving end head and the overall rotary cathode architecture. By replacing the magnetic rod, the upgrade of the on-line adjustable magnetic field function can be achieved.

[0021] The present invention also proposes a magnetron sputtering coating device, which includes the above-mentioned rotary cathode.

[0022] In the present invention, for the proposed magnetron sputtering coating device, its technical effects are similar to those of the above-mentioned rotary cathode, so they will not be elaborated here. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of an embodiment of an on-line adjustable magnetic rod proposed by the present invention.

[0024] Figure 2Schematic front view structure diagram of an embodiment of an online adjustable magnetic rod proposed by the present invention.

[0025] Figure 3 For Figure 2 A - A sectional view schematic diagram.

[0026] Figure 4 For Figure 3 B - B sectional view schematic diagram.

[0027] Figure 5 Schematic structure diagram of an embodiment of a rotating cathode proposed by the present invention.

[0028] Figure 6 Schematic structure diagram of another embodiment of a rotating cathode proposed by the present invention.

[0029] Figure 7 Schematic structure diagram of still another embodiment of a rotating cathode proposed by the present invention.

[0030] Figure 8 Schematic structure diagram of an embodiment of a magnetron sputtering coating device proposed by the present invention.

[0031] Reference numerals: 10. Electrical transmission structure; 100. Target cylinder; 101. Support beam; 102. Driving joint; 103. Driving mechanism; 104. Adjusting connecting piece; 105. Magnet assembly; 106. Inner control box; 107. Support joint; 108. Inner connection end; 109. Support flange; 110. Flange plug; 111. Coolant dynamic seal; 112. Bearing; 201. Driving end; 203. Outer control box; 204. Target cylinder clamp; 205. Cathode cover plate; 206. Support end; 208. First cable; 209. Second cable; 210. Vacuum plug; 300. Substrate; 301. Cable flange; 303. Vacuum pipeline; 304. Pipeline flange; 402. Rotating shaft; 405. Sealing cover. Detailed implementation manners

[0032] Referring to Figure 1-4 , an online adjustable magnetic rod proposed by the present invention includes: a support beam 101, a magnet assembly 105, at least one driving assembly, a driving joint 102, a support joint 107, and a support flange 109; The magnet assembly 105 is arranged along the length direction of the support beam 101 and is movably connected to the support beam 101, and the driving assembly is connected to the support beam 101 for adjusting the distance between the magnet assembly 105 and the surface of the support beam 101; The drive joint 102 and the support joint 107 are respectively located at both ends of the support beam 101. The middle part of the support flange 109 is provided with an installation opening. The support joint 107 is rotatably installed at the installation opening. An electrical transmission structure 10 for supplying power and / or providing signals to the drive assembly is provided inside the support joint 107.

[0033] In the actual design of the support beam 101, the drive joint 102, the support joint 107 and the support beam 101 can be integrally processed and formed, or can be processed separately and assembled and connected.

[0034] During specific design, the electrical transmission structure 10 can be configured as a conduction structure built inside the support joint 107, or a cable can be used as the electrical transmission structure 10, passing through the support joint 107 and directly leading out to the support end 206 for external connection. Also, according to needs, a plug can be set on the support joint 107. One end of the cable is connected to the plug, and the other end passes through the support joint 107 to be connected to the internal / external electrical components inside the magnetic rod, so that the external / internal electrical components are connected to it through the plug.

[0035] To illustrate in detail the specific working principle of this embodiment, this embodiment also proposes a rotating cathode and a magnetron sputtering coating device. The rotating cathode includes a drive end 201, a support end 206 and the above-mentioned online adjustable magnetic rod; Both ends of the online adjustable magnetic rod are respectively installed on the drive end 201 and the support end 206 through the drive joint 102 and the support joint 107. The drive end 201 includes a drive flange for cooperating with the support flange 109 to install the target cylinder 100.

[0036] Refer to Figure 8 , the magnetron sputtering device of this embodiment includes a rotating cathode and a target cylinder 100 sleeved outside the rotating cathode. The target cylinder 100 is sleeved outside the magnetic rod. During operation, the inside of the target cylinder 100 is filled with a coolant. The magnet assembly 105 on the magnetic rod forms a magnetic field outside the target cylinder 100, and then plasma occurs, bombarding the peripheral target cylinder 100, so that the particles of the target cylinder 100 are sputtered onto the substrate 300 to be coated. At the same time, the drive end 201 drives the target cylinder 100 and the distal support flange 109 to rotate together through the drive flange, so that the surface of the target cylinder 100 is evenly etched, thereby realizing continuous coating. During this process, the magnetic rod is respectively installed on the drive end 201 and the support end 206 through the drive joint 102 and the support joint 107 at both ends, and the three are in a relatively stationary state.

[0037] With the operation of the rotating cathode, it is necessary to adjust the coating uniformity by regulating the intensity distribution of the magnetic field on the surface of the target cylinder 100. During the specific adjustment, power / signal is supplied to the driving component inside the magnetic rod through the electrical transmission structure 10 within the support joint 107 from the distal end of the magnetic rod. The driving component adjusts the distance between the magnet component 105 and the support beam 101 at the corresponding position according to the external adjustment signal, that is, the effective magnetic field intensity of the magnet component 105.

[0038] Since the magnetic rod generates a large amount of heat during operation, in the specific design of the coolant pipeline, the coolant inlet and outlet are arranged at the driving end of the magnetic rod. At this time, a cooling channel extending from the driving joint 102 towards the support joint 107 is provided inside the support beam 101. A communication hole is provided on the side wall of one end of the cooling channel close to the support joint 107, and a communication cavity communicating with the cooling channel is provided inside the driving joint 102. A cooling flow channel is provided inside the driving end head 201, and the cooling flow channel communicates with the cooling channel through the driving joint 102. The coolant enters the cooling channel in the middle of the support beam 101 through the driving joint 102, fills the space between the magnetic rod and the target cylinder 100 via the communication hole, so that the magnet component 105 is immersed in the coolant during operation. By separately arranging the coolant pipeline interface and the electrical interface at both ends of the magnetic rod, while ensuring stable water and electricity functions, on the one hand, physical isolation between the two is achieved, and on the other hand, the complexity of the end head design is reduced.

[0039] In this embodiment, for the proposed rotating cathode and the online adjustable magnetic rod, the magnet components 105 are arranged along the length direction of the support beam 101 and are movably connected to the support beam 101. The driving component is connected to the support beam 101 to adjust the distance between the magnet component 105 and the surface of the support beam 101. A support joint 107 cooperating with the support flange 109 is arranged inside the support end far from the driving end of the magnetic rod, and an electrical transmission structure 10 for supplying power and / or providing signals to the driving component is provided inside the support joint 107. By arranging the electrical transmission structure 10 inside the support end of the magnetic rod to provide power / signal transmission for the driving component inside the magnetic rod, it is not necessary to change the driving design at the driving end, and the electrical transmission is isolated from the coolant pipeline, ensuring the safety of electrical transmission. Thus, the online magnetic field adjustment of the magnetic rod can be realized without shutting down the machine, ensuring the stability and reliability of the power / signal transmission for the long-term use of the online adjustable magnetic rod.

[0040] Since the inside of the target cylinder 100 is filled with coolant during operation and the magnetic rod is immersed in the coolant. Therefore, a sealing structure is provided between the support joint 107 and the support flange 109 to achieve the sealing of the coolant. In a specific design of the support joint 107, a through cavity through which the power supply transmission structure 10 passes is provided inside the support joint 107, and the electrical transmission structure 10 uses a waterproof cable to supply power / signal to the driving component inside the target cylinder 100 through the through cavity.

[0041] In actual operation, in order to ensure the sealing effect at the position of the support joint 107, a flange plug 110 connected to the electrical transmission structure 10 is provided at one end of the support joint 107 away from the support beam 101. The electrical transmission structure 10 is arranged inside the support joint 107 and is externally connected to the target cylinder 100 through the flange plug 110, facilitating circuit plugging and unplugging.

[0042] Since the magnet assembly 105 extends along the length direction of the support beam 101, in actual design, multiple driving components are usually provided to adjust different positions of the magnet assembly 105. In the power supply / signal design of the rotating cathode, the online adjustable magnetic rod of this embodiment further includes an internal control box 106. The internal control box 106 is arranged on the support beam 101, and the driving components are connected to the electrical transmission structure 10 through the internal control box 106. After the power supply / signal cable accesses the magnetic rod, it is first connected to the internal control box 106 to perform the distribution of power supply for each driving component and the control and feedback of the driving motor signal. In actual design, one internal control box 106 can be connected to multiple driving components, or one internal control box 106 can be provided for each driving component.

[0043] In the specific design manner of the internal control box 106, the internal control box 106 includes communication equipment, and the communication equipment is configured to receive command signals from outside the rotating cathode and transmit information signals to outside the rotating cathode. The internal control box 106 further includes an electronic controller that is operably communicable with the driving components. The communication equipment can be a transceiver operably coupled to the electronic controller. The transceiver can adopt a radio frequency (RF) transceiver, an optical transceiver, or an ultrasonic transceiver, etc.

[0044] In order to ensure the waterproof performance of the driving mechanism 103 and the internal control box 106 inside the target cylinder 100, in a specific embodiment, a waterproof motor can be used to be connected to the electrical transmission structure 10 of the support joint 107 through a waterproof cable.

[0045] In another specific embodiment, as Figure 6 and 7 shown, a sealing cover can also be arranged inside the target cylinder 100. The sealing cover forms a sealed space outside the driving motor. One end of the electrical transmission structure 10 connected to the driving mechanism 103 is located in the sealed space, ensuring the reliability of the electrical connection between the electrical transmission structure 10 and the driving mechanism 103. At the same time, the mechanical strength of the magnetic rod is further improved through the sealing cover. In actual design, the sealing cover can be set as a tubular structure, and both ends are respectively installed on the support joint 107 and the driving joint 102 through flanges to form a sealed space inside, so that the support beam 101 and the driving mechanism 103 are located in the sealed space. In addition, the sealing cover can also adopt a sealing cap installed on the support beam 101 through a sealing ring to jointly form a sealed space with the support beam 101.

[0046] The rotating cathode of this embodiment further includes a cathode cover plate 205. The driving end 201 and the supporting end 206 are respectively installed on the cathode cover plate 205, and the rotating cathode is installed in the sputtering chamber through the cathode cover plate 205.

[0047] During sputtering operation, the sputtering chamber is in a vacuum environment or a protective gas environment. In the electrical transmission structure 10 connected to external power supply / signal, the power supply / signal needs to be transmitted through the vacuum environment from the rotating cathode to the outside of the sputtering chamber. In a specific embodiment, a vacuum plug 210 is further provided on the cathode cover plate 205. One end of the electrical transmission structure 10 away from the support beam 101 is connected to the vacuum plug 210, and then further connected to the outside through the vacuum plug 210. The power supply / signal realizes reliable electrical connection between the liquid and the vacuum / vacuum and normal pressure environments through the electrical connection structure and the vacuum plug 210.

[0048] In another specific embodiment, a vacuum pipeline 303 is further provided in the sputtering chamber. Vacuum flanges 304 for installing both ends of the vacuum pipeline 303 are respectively provided on the cathode cover plate 205 and the support joint 107. The vacuum pipeline 303 is used to provide a normal pressure channel for the cable connecting the magnetic rod and the outside. One end of the cable can be directly connected to the outside through the vacuum channel after passing through the electrical transmission structure 10, so as to realize electrical transmission through the vacuum environment.

[0049] In the external signal connection, an external control box 203 can also be set for the cathode signal. The external control box 203 is located outside the sputtering chamber. The external control box 203 is connected to the internal control box 106 through the electrical transmission structure 10, and is used to input power supply / signal into the magnetic rod and / or receive the feedback signal from the internal control box 106.

[0050] In the specific adjustment design of the magnet assembly 105, the distance between the magnet assembly 105 and the target cylinder 100 can be adjusted according to the position of the magnet assembly 105, or the distance between the two can be adjusted according to the magnetic field intensity. The driving assembly can be adjusted in various ways. For example, the driving assembly can include a spring-loaded pneumatic structure or a spring-loaded hydraulic structure. The driving assembly can also include a rotating cable or a push-pull cable. In one embodiment, each driving assembly can include a spring-loaded pneumatic bellows, bladder, or cylinder. In this method, the adjustment point can be loaded with a pressure spring in the pneumatic element that pushes and presses in the opposite direction.

[0051] In a specific embodiment of the driving assembly, the magnet assembly 105 is coupled to the support beam 101 through a plurality of driving assemblies to adjust the position of each adjustment point respectively.

[0052] Each drive assembly may also include a built-in position sensor. The position sensor can measure the position of the magnet assembly 105 by direct sensing or by indirect measurement. For example, the position sensor can be implemented with a Hall probe and a magnet in an analog sensor. Alternatively, the position sensor can be implemented with a digital indicator such as a plunger type digital indicator, which directly transmits data to the operator without additional processing. The power supply for the inner control box 106 can be provided through the electrical transmission structure 10 in the same way as the drive assembly.

[0053] In a specific embodiment, the drive assembly may also include a drive mechanism 103 and an adjustment connecting member 104. The magnet assembly 105 is connected to the support beam 101 through at least one adjustment connecting member 104, and the drive mechanism 103 is connected to the adjustment connecting member 104 for driving the adjustment connecting member 104 to move to adjust the distance between the magnet assembly 105 and the surface of the support beam 101. In a specific embodiment of the drive assembly, the adjustment connecting member 104 can be an adjustment screw rod, and the drive mechanism 103 is a drive motor with an encoder function, which can record and feedback the actual position of the adjustment screw rod.

[0054] In another specific embodiment of the drive assembly, the drive mechanism 103 can alternatively be implemented with a motorized structure such as a servo motor, a stepper motor, or a piezoelectric motor. Any number of mechanical configurations can be used for the driving motion. An example is a screw jack that can additionally incorporate bevel gears or reduction gears. In these embodiments, the position sensing of the magnet assembly 105 can be performed through feedback from the motorized structure.

[0055] The magnetron sputtering coating equipment, the rotating cathode, and the online adjustable magnetic rod of this embodiment will be described in detail below through specific examples.

[0056] Refer to Figure 1-4 , the online adjustable magnetic rod of this embodiment includes: a support beam 101, a drive joint 102, a drive mechanism 103, an adjustment connecting member 104, a magnet assembly 105, an inner control box 106, a support joint 107, an inner connection end 108, a support flange 109, a flange plug 110, a coolant dynamic seal 111, and a bearing 112. The drive mechanism 103 uses a drive motor, and the adjustment connecting member 104 uses an adjustment stud.

[0057] The magnet assembly 105 is fixed on the support beam 101 through several adjustment studs. One end of the support beam 101 and the drive joint 102 are connected together by screws. The other end of the support beam 101 and the support joint 107 are connected together by screws. The support beam 101 can also form an integral support with the drive joint 102 and the support joint 107. The material of the support beam 101 is generally a metal such as stainless steel.

[0058] The drive joint 102 is inserted into the drive end 201 to form channels for support and cooling water. For example, the material can be a metal or non-metal material such as stainless steel.

[0059] The drive mechanism 103 rotates to drive the adjustment connecting member 104 to rotate, causing the magnet assembly 105 to deform at the adjustment screw, thereby changing the distance between the magnet assembly 105 and the target cylinder 100, and thus adjusting the magnetic field strength on the surface of the target cylinder 100.

[0060] In a specific embodiment of the drive mechanism 103, the drive mechanism 103 is placed in the cooling liquid and needs to have a waterproof function; it also has an absolute encoder function to record and feedback the actual position of the adjustment connecting member 104. It is fixed to the magnet assembly 105 by means of screws or welding. For example, the material is a metal such as stainless steel.

[0061] The magnet assembly 105 is composed of a magnetic yoke and magnets, etc. The adjustment of the on-line adjustable magnetic rod is to adjust the distance between the magnet assembly 105 and the target cylinder 100, so as to achieve the purpose of adjusting the magnetic field strength on the surface of the target cylinder 100.

[0062] After the power supply / signal cable is connected to the inside of the magnetic rod, it is first connected to the internal control box 106 to distribute the power supply for each drive motor, control and feedback the signals of the drive motors, and feedback the control signal results to the external control box 203.

[0063] The support joint 107 is hollow in the middle to allow the power supply / signal cable to pass through the middle and reach the inside of the magnetic rod or the target cylinder 100.

[0064] In a specific embodiment of the cable joint, when the drive mechanism 103 and the internal control box 106 are placed in the coolant, its function is to achieve the water seal of the cable passing through the support joint 107 and the coolant outside the magnetic rod.

[0065] In the specific embodiment of the support flange 109, the support joint 107 is inserted into the inside of the support flange 109, and a coolant dynamic seal 111 and a bearing 112 are arranged in the support flange 109 to achieve the relative rotation of the support flange 109 and the support joint 107 and the dynamic seal of the coolant.

[0066] The support flange 109 is fixedly connected to the target cylinder 100 through the target cylinder 100 clamp 204. During the operation of the rotating cathode, the target cylinder 100 is in a rotating state, and the support flange 109 is also in a rotating state.

[0067] In a specific embodiment of the flange plug 110, the flange plug 110 is fixed to the support joint 107 for realizing quick plugging and unplugging of power / signal and external connection during target replacement. A sealing ring is provided between the flange plug 110 and the support joint 107 to achieve sealing between the external vacuum and the internal channel of the support joint 107. The flange plug 110 can be single-pin, double-pin, or multi-pin. In one design, the pins of the flange plug 110 are of vacuum sealing grade. In other designs, the flange plug 110 and the support joint 107 can also be prepared as an integral structure, preferably a signal / power plug with vacuum sealing grade.

[0068] In a specific embodiment of the coolant dynamic seal 111, during operation, the support joint 107 and the support flange 109 are in a relatively rotating state to achieve dynamic sealing between the vacuum side and the coolant. In a specific embodiment of the bearing 112, during operation, the support joint 107 and the support flange 109 are in a relatively rotating state, and the bearing is used for support and rotation.

[0069] Refer to Figure 5-7 , the rotating cathode of this embodiment includes the above-mentioned online adjustable magnetic rod, and also includes: a drive end 201, a target cylinder 100, an external control box 203, a target cylinder 100 clamp 204, a cathode cover plate 205, a support end 206, a first cable 208, a second cable 209, and a vacuum plug 210.

[0070] In a specific design of the rotating cathode, the target cylinder 100 clamp 204 is used to realize the fixed connection between the target cylinder 100 and the drive end 201, and to realize the fixed connection between the target cylinder 100 and the support flange 109. The drive end 201 is connected and fixed to the target cylinder 100 through the target cylinder 100 clamp 204, and is used to realize the transmission of power to the target cylinder 100, the transmission of coolant, and dynamic / static sealing, as well as vacuum dynamic sealing.

[0071] During operation of the target cylinder 100, the sputtered target cylinder 100 needs to be powered externally and needs to be cooled by coolant, and the target cylinder 100 is in a rotating state during operation.

[0072] The external control box 203 is used to provide power supply / control signals for the magnetic rod.

[0073] The cathode cover plate 205 is used to install and fix the drive end 201 and the support end 206.

[0074] The support end 206 remains stationary during operation. The drive joint 102, drive motor 103, adjustment connecting piece 104, magnet assembly 105, inner control box 106, support joint 107, inner connection end 108, support flange 109, flange plug 110, coolant dynamic seal 111, bearing 112, etc. are connected together to form the magnetic rod described in this embodiment. The support flange 109 of the magnetic rod inserts the support end 206. The support flange 109 and the target cylinder 100 are connected as a whole by the target cylinder 100 clamp 204 and are in a rotating state, thus realizing the support function.

[0075] The first cable 208 is a power supply / signal cable for the vacuum side. For example, both ends are in the form of quick connectors.

[0076] The second cable 209 is a power supply / signal cable for the atmospheric side. For example, both ends are in the form of quick connectors.

[0077] In a specific embodiment of the vacuum plug 210, as Figure 5 shown, the vacuum plug 210 is of the vacuum sealing level. One side is in the atmospheric state, and the other side is in the vacuum state.

[0078] Referring to Figure 7 , in another specific embodiment, a cable flange 301 is further provided on the support flange 109. It is a hollow structure, and the power supply / signal cable passes through the middle. Both ends are in the form of flanges. One end of the power supply / signal flange is fixed on the support joint 107, and the other end of the power supply / signal flange is fixed on the vacuum pipe 303. A sealing ring is arranged between the power supply / signal flange plug 110 and the support joint 107 to realize the seal between the external vacuum and the internal channel.

[0079] A sealing ring is arranged between the flange plug 110 and the vacuum pipe 303 to realize the seal between the external vacuum and the internal channel. When replacing the target cylinder 100, they need to be frequently disassembled and assembled. The vacuum pipe 303 and the flange plug 110 can be made of insulating engineering plastics or metal materials such as stainless steel.

[0080] Referring to Figure 7 , the first cable 208 is located inside the cathode cover 205. The power supply / signal cable in the pipe or channel has both ends in the form of plugs or is directly connected without plugs. The first cable 208 passes through the vacuum pipe 303 to realize the vacuum sealing channel between the atmospheric state on the cable side and the vacuum side. The flange of the vacuum pipe 303 is hermetically fixed on the cathode cover 205, and a sealing ring is arranged between it and the vacuum pipe 303 to realize the connection and seal between the two. The second cable 209 is outside the cathode cover 205 and has both ends in the form of plugs or is directly connected without plugs.

[0081] The driving motor rotates to drive the adjusting stud to rotate, so that the magnet assembly 105 deforms at the adjusting screw, so that the distance between the magnet assembly 105 and the target cylinder 100 becomes closer or farther, so as to adjust the magnetic field strength on the surface of the target cylinder 100.

[0082] In other specific embodiments, the driving motor is placed in an atmospheric pressure environment and does not need to have a waterproof function, such as Figure 6 and 7 shown. At the same time, it has an absolute encoder function to record and feedback the actual position of the adjusting stud.

[0083] In the specific embodiment of the rotating shaft 402, referring to Figure 6 and 7 , when adjusting the magnetic field, the output shaft of the driving motor drives the rotating shaft 402 to rotate to achieve rotation. The adjusting stud is fixed on the magnet assembly 105 by screws or welding, etc. Through the cooperation with the rotating shaft 402, the up and down movement of the adjusting stud is realized. In actual design, the driving motor can adopt a stepping motor with a preset reduction ratio, and is matched with the rotating shaft 402 through bevel gears to drive the rotating shaft 402.

[0084] The middle of the support joint 107 is empty, so that the power / signal cable can pass through the middle and reach the inside of the magnetic rod target cylinder 100.

[0085] In the specific design of the sealing cover, the support beam 101 adopts a box structure, and a sealed space is formed between the sealing cover 405 and the support beam 101. The driving motor, transmission components and the internal control box 106, etc. are placed inside, and the driving motor, transmission components and the internal control box 106, etc. do not need a waterproof function.

[0086] The magnetron sputtering coating equipment of this embodiment includes the above-mentioned rotating cathode.

[0087] During the working process of the rotating cathode, the target cylinder 100 must be in a rotating state. The 204 target cylinder clamp realizes the fixed connection between the 201 driving end 201 and the target cylinder 100, and the 204 target cylinder clamp realizes the fixed connection between the 109 target cylinder support flange 109 and the target cylinder 100. Therefore, the support flange 109 is in a rotating state during the working process.

[0088] This embodiment aims to solve the stability and reliability of power / signal transmission during the long-term use of the online adjustable magnetic rod. The core of this embodiment is that the support flange 109 is a part of the magnetic rod, and the two are integrated when replacing and disassembling the target cylinder 100 without disassembly. The support flange 109 is internally provided with a rotary dynamic seal, and the power supply / signal cable passes through the hollow support joint 107 of the magnetic rod. The part between the magnetic rod and the end is designed as a quick plug. There is no power supply inside the magnetic rod, and the plug is not arranged in water.

[0089] In addition to the drive mechanism 103, the magnet assembly 105, the inner control box 106 and the support beam 101, the online adjustable magnetic rod of this embodiment also includes an externally rotating hollow power supply / signal cable channel formed by the support flange 109, the flange plug 110, the coolant dynamic seal 111, etc. The power supply / signal transmission structure is located in the atmospheric environment and has no contact with the coolant. Through external direct power supply, there is no risk of power shortage, and the signal transmission is stable and reliable.

[0090] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

Claims

1. An online adjustable magnetic rod, characterized in that, Comprising: A support beam (101), a magnet assembly (105), at least one drive assembly, a drive joint (102), a support joint (107), and a support flange (109); The magnet assembly (105) is arranged along the length direction of the support beam (101) and is movably connected to the support beam (101), and the drive assembly is connected to the support beam (101) for adjusting the distance between the magnet assembly (105) and the surface of the support beam (101); The drive joint (102) and the support joint (107) are respectively located at both ends of the support beam (101). The middle part of the support flange (109) is provided with an installation opening, and the support joint (107) is rotatably installed at the installation opening. An electrical transmission structure (10) for supplying power and / or providing signals is arranged inside the support joint (107).

2. The online adjustable magnetic bar according to claim 1, wherein, A cooling channel extending from the drive joint (102) towards the support joint (107) is arranged inside the support beam (101). A communication hole is arranged on the side wall of one end of the cooling channel close to the support joint (107), and a communication cavity communicated with the cooling channel is arranged inside the drive joint (102).

3. The online adjustable magnetic rod according to claim 1, characterized in that, A through cavity is arranged inside the support joint (107), and the electrical transmission structure (10) is a cable passing through the through cavity.

4. The online adjustable magnetic rod according to claim 1, characterized in that, A flange plug (110) connected to the electrical transmission structure (10) is arranged at one end of the support joint (107) far from the support beam (101).

5. The online adjustable magnetic bar according to claim 1, characterized in that, The drive assembly includes a drive mechanism (103) and an adjustment connecting piece (104). The magnet assembly (105) is connected to the support beam (101) through at least one adjustment connecting piece (104), and the drive mechanism (103) is connected to the adjustment connecting piece (104) for driving the adjustment connecting piece (104) to move to adjust the distance between the magnet assembly (105) and the surface of the support beam (101).

6. The online adjustable magnetic rod according to claim 5, wherein The drive mechanism (103) adopts a waterproof motor. An inner connection end (108) is arranged at one end of the electrical transmission structure (10) close to the support beam (101), and the drive mechanism (103) is connected to the inner connection end (108) through a waterproof cable.

7. The online adjustable magnetic rod according to claim 1, characterized in that, It further includes a sealing cover, and the sealing cover forms a sealed space outside the drive motor. One end of the electrical transmission structure (10) connected to the drive mechanism is located inside the sealed space.

8. The online adjustable magnetic rod according to claim 1, wherein It further includes an inner control box (106). The inner control box (106) is arranged on the support beam (101), and the inner control box (106) is connected between the drive assembly and the electrical transmission structure (10) for power supply distribution of the drive assembly and / or control and feedback of drive signals.

9. The online adjustable magnetic rod according to claim 8, wherein, It further includes an outer control box (203). The outer control box (203) is connected to the inner control box (106) through the electrical transmission structure (10) for inputting power supply / signals into the magnetic rod and / or receiving feedback signals from the inner control box (106).

10. A rotary cathode, characterized in that, Comprising a drive end head (201), a support end head (206), and an on-line adjustable magnetic rod according to any one of claims 1-9; Both ends of the online adjustable magnetic rod are respectively installed on the driving end (201) and the supporting end (206) through a driving joint (102) and a supporting joint (107). The driving end (201) includes a driving flange for cooperatively installing a target cylinder (100) with a supporting flange (109).

11. The rotary cathode according to claim 10, wherein It further includes a cathode cover plate (205), and the driving end (201) and the supporting end (206) are respectively installed on the cathode cover plate (205).

12. The rotary cathode according to claim 11, wherein A vacuum plug (210) is further provided on the cathode cover plate (205), and one end of the electric transmission structure (10) away from the supporting beam (101) is connected to the vacuum plug (210).

13. The rotary cathode according to claim 11, characterized in that, It further includes a vacuum pipeline (303). Vacuum flanges (304) for installing both ends of the vacuum pipeline (303) are respectively provided on the cathode cover plate (205) and the supporting joint (107). The vacuum pipeline (303) is used to provide a normal pressure channel for the cable connecting the magnetic rod and the outside.

14. A magnetron sputtering coating device, characterized in that, It includes a rotating cathode according to any one of claims 10-13.

Images