X-axis vibration cooperative fly-cutting system and method for large-scale microstructure array

Abstract

The application discloses a kind of X-axis vibration coordination fly-cutting system and method for large-scale microstructure array, including fly-cutting disc, workpiece, manual height adjustment platform, height increasing platform, machine tool B-axis, machine tool Z-axis, fly-cutting disc base, machine tool C-axis, machine tool X-axis;Machine tool B-axis is located on machine tool Z-axis, height increasing platform is fixed on the upper surface of the machine tool B-axis, manual height adjustment platform is fixed on height increasing platform, machine tool C-axis is located on machine tool X-axis, fly-cutting disc base is fixed to machine tool C-axis, fly-cutting disc is fixed to fly-cutting disc base, manual height adjustment platform is used to install workpiece, fly-cutting disc 1 includes fly-cutting disc main body and turning tool.A microstructure can be machined in one revolution of the spindle according to the designed tool path, and the machining efficiency is high.The microstructure fly-cutting method improves the machining efficiency, machining precision and machining consistency of the microstructure array, and only requires three-axis motion, simple structure and low cost.

Description

Technical Field

[0001] This invention belongs to the field of ultra-precision cutting and relates to a microstructure array flying cut system and method with high machining consistency, and in particular to an X-axis vibration coordinated flying cut system and method for large-scale microstructure arrays. Background Technology

[0002] In the field of modern optics, the importance of microstructure arrays is growing daily. They are now key components in various cutting-edge optical devices, such as collimators, wavefront sensors, microscopes, and fiber optic communication systems. Compared with unconventional manufacturing methods based on high-energy particle beams and chemical etching, mechanical cutting can process a wider variety of materials and is adaptable to more complex surface shapes. Therefore, mechanical cutting, especially diamond mechanical cutting, is very promising in the fabrication of microstructure arrays.

[0003] Currently, servo-controlled diamond cutting with a fast and slow tool is the mainstream machining method for microstructure arrays. During machining, the tool moves along the Z-axis according to the workpiece's angular position, forming the surface shape. Sharp edges between microstructures cause uneven tool movement, leading to vibration and significantly reducing shape accuracy and surface smoothness. To address this issue, some researchers have proposed extending the toolpath by adding a smooth section when cutting adjacent lenses; however, this increases machining time and is only applicable to specific arrangements. Alternatively, some have proposed using additional motion axes to decompose the cutting motion, breaking down the uneven tool movement into two smooth trajectories. However, this significantly increases system cost, and its limited system dynamics may reduce efficiency and amplify errors in machining large-area microstructure arrays. Even if vibration is addressed through path optimization and the introduction of multi-axis machining, the consistency of microstructure machining remains difficult to guarantee due to varying cutting speeds at different microstructure locations during turning.

[0004] Ultra-precision diamond milling is another major machining method for processing microstructure arrays. During the process, the milling cutter rotates at high speed to remove material, with a low feed per revolution, making it well-suited for machining brittle materials. In array machining, each microstructure is processed sequentially, and the machining trajectory of each microstructure is identical, resulting in high machining consistency. However, ultra-precision diamond milling has low machining efficiency and introduces milling cutter runout and vibration errors, affecting machining accuracy. Summary of the Invention

[0005] The purpose of this invention is to provide a highly consistent, high-precision, and high-efficiency X-axis vibration-coordinated fly-cutting system and method for large-scale microstructure arrays.

[0006] The technical solution adopted in this invention is: an X-axis vibration-coordinated flying cut system for large-scale microstructure arrays, including a flying cut disc, a workpiece, a manual height adjustment platform, a height increase platform, a machine tool B-axis, a machine tool Z-axis, a flying cut disc base, a machine tool C-axis, and a machine tool X-axis;

[0007] The B-axis of the machine tool is located on the Z-axis of the machine tool. The height adjustment platform is fixed to the upper surface of the B-axis of the machine tool. The manual height adjustment platform is fixed to the height adjustment platform. The C-axis of the machine tool is located on the X-axis of the machine tool. The flying cutting disc base is fixed to the C-axis of the machine tool. The flying cutting disc is fixed to the flying cutting disc base. The manual height adjustment platform is used to install the workpiece. The flying cutting disc 1 includes a flying cutting disc body and a cutting tool. The cutting tool is located at the front end of the flying cutting disc body 10.

[0008] Furthermore, the manual height adjustment platform includes fastening bolts, fastening nuts, fine adjustment bolts, fine adjustment fastening nuts, a height adjustment platform base, coarse adjustment fastening nuts, coarse adjustment bolts, and a height adjustment platform body. The height adjustment platform body is connected to the upper part of the height adjustment platform base, and the height adjustment platform body and the height adjustment platform base are connected by fastening bolts, fastening nuts, fine adjustment bolts, fine adjustment fastening nuts, coarse adjustment fastening nuts, and coarse adjustment bolts.

[0009] Furthermore, the cutting tool is a natural diamond cutting tool.

[0010] A flying-cutting method based on the above-described X-axis vibration-coordinated flying-cutting system for large-scale microstructure arrays includes the following steps:

[0011] Step 1: Based on the parameters of the microstructure array and the tool, generate the tool path for cutting the k-th lens in a certain row. Let O... F It is the axis of the C-axis 8 of the machine tool, O W It is the center of the sphere of the processed lens, O t It is the cutting tip of the lathe tool, A t θ is the initial contact position between the cutting tool and the workpiece, and θ is the angle between the rake face of the cutting tool and the vertical line. The position where the cutting tool is perpendicular to the vertical line is set as the zero point of the machine tool's C-axis, and θ is equal to the rotation angle of the machine tool's C-axis. It is any position on the lens and O W The angle between the line connecting the two axes and the vertical line is first calculated based on the rotation angle of the machine tool's C-axis.

[0012]

[0013] r l It is the radius of curvature of the lens, and also the nose radius of the cutting tool, R. s It is the designed turning radius of the fly cut, θ0 is O F A t The angle between the vertical line and the vertical line;

[0014] Then, establish the motion trajectory of the machine tool's X-axis based on the machine tool's C-axis:

[0015]

[0016] d is the X-axis motion path of the machine tool during the cutting of the k-th lens. x It is the distance between adjacent lenses;

[0017] Step 2: Establish the transition motion trajectory between the two lens cutting processes:

[0018]

[0019] It is the transition motion of the machine tool's X-axis between the cutting of the k-th lens and the (k+1)-th lens, f (k+1) (θ) is the trajectory of the k-th lens. The motion trajectory of the (k+1)th lens cubic spline interpolation curve between, f (k +1) (θ) satisfies:

[0020]

[0021] t is the cutting time, n s It is the rotational speed of the C-axis of the machine tool, a max It is the maximum acceleration that the machine tool is allowed to operate at;

[0022] Step 3: Machining a PxP lens array to correct the turning radius of the flying cutter, where 3 ≤ P ≤ 10. First, actually measure a lens in the machined PxP lens array to obtain the two-dimensional contour shape of the center of the lens along the cutting edge movement direction. Then, establish a lens surface simulation algorithm:

[0023]

[0024] T R (θ) is the rotation matrix about the C-axis of the machine tool, T X It is the translation matrix of the machine tool's X-axis, P T It is the position matrix of the cutting edge in the tool coordinate system, z s h is the height of the blade from the bottom of the lens. s S is the maximum depth of the lens. o Is the height equal to h? s a planar matrix;

[0025] The theoretical two-dimensional profile shape is obtained through surface simulation algorithm. Then, the radius of gyration of the flying cut is iteratively calculated in the simulation algorithm until the PV error between the theoretical and measured two-dimensional profile shapes is less than a threshold. The radius of gyration of the flying cut in the first iteration is denoted as [missing value].

[0026] Step four: Repeat steps one through three to gradually reduce the machining morphology error until the turning radius of the fly cut in the nth iteration is obtained. The morphological error of the fabricated PxP lens array meets the accuracy requirements;

[0027] Step 5: Calculate the radius of rotation of the fly-cutting in the nth iteration. Substitute the processing and transition motion trajectories of individual lenses generated in steps one and two. The processing and transition motion trajectories of all lenses in the lens array have the same shape. Superimpose the processing and transition motion trajectories of individual lenses to generate the processing trajectory of the QxQ lens array, where Q > 10.

[0028] Furthermore, P is 5 and Q is 100.

[0029] The beneficial effects of this invention are as follows: The tool path for each lens processed by this invention is identical, resulting in highly consistent lenses; the X-axis of the machine tool adopts a motion path similar to simple harmonic oscillation, improving the stable operating speed of the C-axis and X-axis, and a lens can be processed with only one rotation of the C-axis, avoiding surface tool marks and achieving high processing efficiency; the X-axis of the machine tool adopts a motion path similar to simple harmonic oscillation, reducing the maximum acceleration during movement, making the machine tool more stable and achieving high processing accuracy; only two axes need to perform high-precision coordinated movements, while the other axis only needs to perform positioning movements, reducing the performance requirements of the machine tool and thus significantly reducing costs.

[0030] In addition to the objectives, features, and advantages described above, the present invention has other objectives, features, and advantages. The invention will now be described in further detail with reference to the figures. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the system structure of the X-axis vibration-coordinated flying cut system for large-scale microstructure arrays according to the present invention;

[0032] Figure 2 This is a schematic diagram of the flying cutter disk of the X-axis vibration-coordinated flying cutter system for large-scale microstructure arrays according to the present invention;

[0033] Figure 3 This is a schematic diagram of the manual height adjustment platform of the X-axis vibration coordinated flying cut system for large-scale microstructure arrays of the present invention;

[0034] Figure 4This is a flowchart of the tool trajectory calculation method for the X-axis oscillation-coordinated flying cut method of a microstructure array according to the present invention;

[0035] Figure 5 This is a schematic diagram of the processing of a single lens in the X-axis oscillation-coordinated flying cut method for a microstructure array according to the present invention. Detailed Implementation

[0036] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0037] A schematic diagram of the flying cut system of the present invention is shown below. Figure 1 The invention includes a flying cutting disc 1, a workpiece 2, a manual height adjustment platform 3, a height-increasing platform 4, a machine tool B-axis 5, a machine tool Z-axis 6, a flying cutting disc base 7, a machine tool C-axis 8, and a machine tool X-axis 9. The machine tool B-axis 5 is located above the machine tool Z-axis 6. The height-increasing platform 4 is fixed to the upper surface of the machine tool B-axis 5. The manual height adjustment platform 3 is fixed to the height-increasing platform 4. The machine tool C-axis 8 is located on the machine tool X-axis 9. The flying cutting disc base 7 is fixed to the machine tool C-axis 8. The flying cutting disc 1 is fixed to the flying cutting disc base 7. The workpiece 2 is mounted on the upper surface of the manual height adjustment platform 3. A partial schematic diagram of the flying cutting disc 1 of this invention is shown below. Figure 2 It includes a flying cutting disc body 10 and a natural diamond cutting tool 11, wherein the natural diamond cutting tool 11 is located at the front end of the flying cutting disc body 10. A schematic diagram of the manual height adjustment platform 3 of the present invention is shown below. Figure 3 The system includes fastening bolts 12, fastening nuts 13, fine-tuning bolts 14, fine-tuning fastening nuts 15, a height adjustment platform base 16, coarse-tuning fastening nuts 17, coarse-tuning bolts 18, and a height adjustment platform body 19. The height adjustment platform body 19 is connected to the upper part of the height adjustment platform base 16, and the height adjustment platform body 19 and the height adjustment platform base 16 are connected by fastening bolts 12, fastening nuts 13, fine-tuning bolts 14, fine-tuning fastening nuts 15, coarse-tuning fastening nuts 17, and coarse-tuning bolts 18. Before cutting, the machine tool B-axis 5 is rotated to a suitable position and then locked. During the flying cut, the machine tool B-axis 5 is fixed and cannot move. The workpiece 2 is fixed to the upper surface of the height adjustment platform body 19 with paraffin wax. The height of the workpiece 2 is initially adjusted by the coarse-tuning bolts 18, and then the upper surface of the workpiece 2 is adjusted to be horizontal by adjusting the four corner fine-tuning bolts 14, and the height is finely adjusted according to the cutting depth. First, the workpiece is leveled by manually adjusting the height adjustment platform 3 and aligned with the cutting tool. The microstructure array is then machined using the relative motion between the natural diamond circular arc cutter 11 and the workpiece 2. According to the designed tool path, one microstructure can be machined in one rotation of the spindle, resulting in high machining efficiency.

[0038] During the processing of this invention, the C-axis 8 of the machine tool rotates at a constant speed, and the X-axis 9 of the machine tool works in coordination with the C-axis 8 to perform a simple harmonic oscillation motion, completing the flying cut processing of one row of lenses. Then, the Z-axis 6 of the machine tool moves the workpiece 2, positioning the natural diamond cutting tool 11 at the processing position of the next row of lenses, thereby gradually completing the flying cut processing of the entire lens array.

[0039] The processing procedure of this invention is as follows: Figure 4 As shown, taking a honeycomb spherical microlens array structure as an example, the shape and position information of the microstructure array are first determined. The lens spacing is 50 μm, the radius of curvature is 220 μm, and the arrangement is 100 × 100. The natural diamond cutting tool 11 used has a radius of 220 μm.

[0040] Step one: Based on the parameters of the microstructure array and the tool, generate the tool path for cutting the k-th lens in a certain row. For example... Figure 5 As shown, O F It is the axis of the C-axis 8 of the machine tool, O W It is the center of the sphere of the processed lens, O t It is a natural diamond turning tool 11 with a cutting tip, A. t θ is the initial contact position between the natural diamond turning tool 11 and the workpiece 2. θ is the angle between the rake face of the natural diamond turning tool 11 and the vertical line. The position where the natural diamond turning tool 11 is perpendicular to the vertical line is set as the zero point of the C-axis 8 of the machine tool, and θ is equal to the rotation angle of the C-axis 8 of the machine tool. It is any position on the lens and O W The angle between the line connecting the two axes and the vertical line. First, calculate based on the rotation angle of the machine tool's C-axis 8.

[0041]

[0042] r l R is the radius of curvature of the lens, and also the nose radius of the natural diamond turning tool 11, taken as 0.220mm. s This is the designed turning radius for the fly cut, with a design value of 7.6 mm. θ0 is O F A t The angle between the vertical line and the vertical line is 0.096.

[0043] Then, establish the motion trajectory of machine tool X-axis 9 based on machine tool C-axis 8:

[0044]

[0045] This is the motion path of the machine tool's X-axis 9 during the cutting of the k-th lens, d x It is the distance between adjacent lenses, taken as 50μm.

[0046] Step 2: Establish the transition motion trajectory between the two lens cutting processes.

[0047]

[0048] It is the transition motion of the machine tool X-axis 9 between the cutting of the k-th lens and the (k+1)-th lens, f (k+1) (θ) is the trajectory of the k-th lens. The motion trajectory of the (k+1)th lens cubic spline interpolation curve between, f (k +1) (θ) satisfies:

[0049]

[0050] t is the cutting time, n s It is the rotational speed of the C-axis 8 of the machine tool, a max It is the maximum allowable acceleration of the machine tool, taken as 65 mm / s². 2 .

[0051] Step 3: Machining a 5x5 lens array to correct the turning radius of the flying cutter. First, a specific lens in the 5x5 lens array is measured to obtain the two-dimensional profile shape of the lens center along the cutting edge movement direction. Then, a lens surface simulation algorithm is established:

[0052]

[0053] T R (θ) is the rotation matrix about the C-axis of the machine tool, T X It is the translation matrix of the machine tool's X-axis 9, P T It is the position matrix of the cutting edge in the tool coordinate system, z s h is the height of the blade from the bottom of the lens. s S is the maximum depth of the lens. o Is the height equal to h? s A planar matrix.

[0054] The theoretical two-dimensional profile shape is obtained through surface simulation algorithm. Then, the gyration radius of the fly-cut is iteratively calculated in the simulation algorithm until the PV error between the theoretical and actual measured two-dimensional profile shapes is less than 10 nm. The gyration radius of the fly-cut at this point is denoted as [missing value].

[0055] Step four: Repeat steps one through three to gradually reduce the machining morphology error until the turning radius of the fly cut in the nth iteration is obtained. The morphological error of the fabricated 5x5 lens array meets the accuracy requirements.

[0056] Step 5: Calculate the radius of rotation of the fly-cutting in the nth iteration. The processing and transition motion trajectories of a single lens are generated by inputting the data from steps one and two. The processing and transition motion trajectories of all lenses in the lens array have the same shape. The processing and transition motion trajectories of the single lenses are superimposed to generate the processing trajectory of a 100×100 lens array.

[0057] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A fly-cutting method for a wide-range microstructure array-oriented X-axis vibration cooperative fly-cutting system, the system comprising a fly-cutting disc (1), a workpiece (2), a manual height-adjusting table (3), a height-increasing table (4), a machine tool B-axis (5), a machine tool Z-axis (6), a fly-cutting disc base (7), a machine tool C-axis (8), and a machine tool X-axis (9); the machine tool B-axis (5) is located on the machine tool Z-axis (6), the height-increasing table (4) is fixed on the upper surface of the machine tool B-axis (5), the manual height-adjusting table (3) is fixed on the height-increasing table (4), the machine tool C-axis (8) is located on the machine tool X-axis (9), the fly-cutting disc base (7) is fixed on the machine tool C-axis (8), the fly-cutting disc (1) is fixed on the fly-cutting disc base (7), the manual height-adjusting table (3) is used for mounting the workpiece (2), the fly-cutting disc (1) comprises a fly-cutting disc main body (10) and a turning tool (11), and the turning tool (11) is located at the front end of the fly-cutting disc main body (10); characterized in that the method comprises the following steps: Step one: according to the parameters of the microstructure array and the tool, generate the tool trajectory of the kth lens cutting in a certain row, let O F be the axis of the machine tool C axis 8, O W be the spherical center of the processed lens, O t be the tool tip of the lathe tool (11), A t be the position of the initial contact of the lathe tool (11) and the workpiece (2), θ be the angle between the rake face of the lathe tool (11) and the vertical line, the position when the lathe tool (11) is perpendicular to the vertical line is set as the zero point of the machine tool C axis (8), θ is equal to the rotation angle of the machine tool C axis (8), be the angle between the line connecting any position on the lens and O W and the vertical line, first calculate r l is the curvature radius of the lens, and is the nose radius of the tool (11), R s is the designed fly-cutting rotation radius, θ0is the angle between the vertical line and the tangent line of the design curve at the point O F A t is the angle between the vertical line and the tangent line of the design curve at the point O then, the machine tool X-axis (9) is established according to the movement trajectory of the machine tool C-axis (8): is the path of motion of the machine tool X axis (9) during the kth lens cutting process, d x is the pitch of the adjacent lenses; step two, the transition movement trajectory between the two lens cutting processes is established: is the transition motion of the machine tool X axis (9) between the kth lens and the k+1th lens cutting interval, f (k+1) (θ) is the motion trajectory of the kth lens and the motion trajectory of the k+1th lens is the cubic spline interpolation curve between them, f (k+1) (θ) satisfies: t is the cutting time, n s is the rotational speed of the machine tool C-axis (8), a max is the maximum acceleration that the machine tool operation can allow; step three, the value of the rotation radius of the lens array correction fly-cutting of a group of PxP lenses is processed, 3≤P≤10, a certain lens in the processed PxP lens array is actually measured first to obtain the two-dimensional profile shape of the center of the certain lens along the movement direction of the tool tip, and then a lens surface simulation algorithm is established: T R (θ) is the rotation matrix around the machine C-axis (8) axis, T X (X c (θ)) is the translation matrix of the machine X-axis (9), P T is the position matrix of the cutting edge in the tool coordinate system, z s is the height of the bottom end of the tool distance lens, h s is the maximum depth of the lens, S o is the plane matrix with height equal to h s ; The theoretical two-dimensional profile shape is simulated according to the surface simulation algorithm, and then the value of the fly-cut rotary radius is iterated in the simulation algorithm until the PV error between the theoretical two-dimensional profile shape and the actually measured two-dimensional profile shape is less than a threshold value, and the fly-cut rotary radius of the first iteration is recorded as R1. Step four, repeat steps one through three, progressively reducing the topography error of the process until a fly-cut rotation radius of the nth iteration is achieved The topography error of the processed PxP lens array meets the accuracy requirement; Step five, the fly-cutting rotation radius of the nth iteration The machining and transition motion trajectories of all the lenses in the lens array are consistent in shape, and the machining and transition motion trajectories of the single lens are superimposed to generate the machining trajectory of the QxQ lens array, Q>

10.

2. The fly-cutting method for the X-axis vibration cooperative fly-cutting system facing a large-range microstructure array according to claim 1, characterized in that, P is 5, and Q is 100.

3. The fly-cutting method for the X-axis vibration cooperative fly-cutting system facing a large-range microstructure array according to claim 1, characterized in that, the manual height-adjusting table (3) comprises fastening bolts (12), fastening nuts (13), fine-adjusting bolts (14), fine-adjusting fastening nuts (15), a height-adjusting table base (16), coarse-adjusting fastening nuts (17), coarse-adjusting bolts (18), and a height-adjusting table main body (19), the height-adjusting table main body (19) is connected to the upper portion of the height-adjusting table base (16), and the height-adjusting table main body (19) and the height-adjusting table base (16) are connected through the fastening bolts (12), the fastening nuts (13), the fine-adjusting bolts (14), the fine-adjusting fastening nuts (15), the coarse-adjusting fastening nuts (17), and the coarse-adjusting bolts (18).

4. The fly-cutting method for a wide-range microstructure array-oriented X-axis vibration cooperative fly-cutting system according to Claim 1, wherein the turning tool (11) is a natural diamond turning tool.

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