Method and device for measuring large-angle curved surface profile of inner surface of micropore

Abstract

The invention provides a micropore inner surface large-angle curved surface contour measurement method and device, and belongs to the technical field of optical measurement, and the device comprises at least three obliquely arranged light paths, a spectrometer and a processing unit. Each light path comprises an optical fiber, a reflecting prism (a first light path and a second light path) and a dispersion super lens, divergent light is refracted by the reflecting prism or directly enters the dispersion super lens and then is focused on a measured curved surface, and reflected light returns through the original path and is analyzed by a spectrograph to analyze spectral wavelength and light intensity sequence data of each light path. The processing unit calculates a displacement value by extracting peak wavelength of each measurement point and converts the displacement value into a three-dimensional space coordinate, and reconstructs a curved surface contour through data fitting. According to the invention, the dispersion superlens and multi-optical-path collaborative design is adopted, and the volume of the sensor is reduced in combination with the reflecting prism; different inclined areas are covered by presetting the inclination angle of the optical axis, a measurement blind area of a high-curvature area is eliminated, and high-precision measurement of a large-angle curved surface is achieved in cooperation with the spectrum confocal chromatography technology.

Description

Technical Field

[0001] The present invention relates to the technical field of optical measurement, and particularly to a method and device for measuring the large-angle curved surface profile of the inner surface of a micro-hole. Background Art

[0002] The curved surface profiles such as inner fillets of micro-holes play a crucial role at the steps of shaft parts. It can effectively reduce stress concentration, avoid fatigue cracks or fractures caused by sharp corners, and significantly improve the fatigue life and reliability of parts. And the accuracy of curved surface profile measurement is an important basis for ensuring the machining quality of curved surface profiles. Existing non-contact measurement methods, including laser confocal, line laser, structured light, etc., these technologies have defects in one or several aspects such as large volume, difficulty in measuring highly reflective surfaces, and inability to measure features with high-curvature transitions, and cannot measure the curved surface profiles inside micro-holes. The spectral confocal sensing technology has significant application advantages such as high measurement accuracy and axial tomography ability, and has been widely used in fields such as electronic manufacturing, aerospace, laser nuclear fusion, automobiles, biology, and IC manufacturing.

[0003] However, due to the limitations of lens materials and structures, the traditional lens-type spectral confocal displacement sensor has a limited minimum volume and insufficient tolerance angle, and cannot be applied to the measurement of the curved surface profile inside micro-holes.

[0004] Therefore, it is of great significance to develop a spectral confocal high-precision non-contact displacement sensor with small size and the ability to measure curved surface profiles. Summary of the Invention

[0005] The present invention provides a method and device for measuring the large-angle curved surface profile of the inner surface of a micro-hole to solve the defect that the traditional lens-type spectral confocal displacement sensor is difficult to be used for measuring the curved surface profile inside micro-holes.

[0006] In a first aspect, the present invention provides a device for measuring the large-angle curved surface profile of the inner surface of a micro-hole, including: at least three optical paths, including: a first optical path, a second optical path, and a third optical path; The first optical path includes a first optical fiber, a first reflection prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflection prism to the first dispersive superlens and focused on the measured curved surface through the first dispersive superlens; The second optical path includes a second optical fiber, a second reflection prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflection prism to the second dispersive superlens and focused on the measured curved surface through the second dispersive superlens; The third optical path includes a third optical fiber and a third dispersive superlens. The divergent light emitted by the third optical fiber is directly incident on the third dispersive superlens and focused on the measured curved surface through the third dispersive superlens; A spectrometer is used to analyze the reflected light of the surface under test returned along the original optical path received by the first optical fiber, the second optical fiber, and the third optical fiber respectively, and output the spectral wavelength sequence data and the corresponding optical intensity sequence data of the measurement points corresponding to each optical path. A processing unit is configured to: According to the spectral wavelength sequence data and the corresponding optical intensity sequence data of each measurement point, obtain the peak wavelength of each measurement point, and determine the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point; Convert the displacement value corresponding to each measurement point into a spatial position; Fit the spatial positions of all the measurement points to determine the surface profile of the surface under test.

[0007] According to the micro-hole inner surface large-angle surface profile measurement device provided by the present invention, the optical axes of the first dispersion superlens, the second dispersion superlens, and the third dispersion superlens are arranged at a preset inclination angle, corresponding to the regions of the surface under test within different inclination angle ranges respectively.

[0008] According to the micro-hole inner surface large-angle surface profile measurement device provided by the present invention, it further includes: a probe housing; the at least three optical paths are arranged inside the probe housing.

[0009] According to the micro-hole inner surface large-angle surface profile measurement device provided by the present invention, the divergent light emitted by the optical fiber is broad-spectrum divergent light.

[0010] According to the micro-hole inner surface large-angle surface profile measurement device provided by the present invention, determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point includes: using a pre-determined mapping function to convert the peak wavelength into a displacement value.

[0011] According to the micro-hole inner surface large-angle surface profile measurement device provided by the present invention, the mapping function is a polynomial.

[0012] In a second aspect, the present invention further provides a method for measuring the large-angle surface profile of the inner surface of a micro-hole, including: Projecting optical signals to the surface under test through at least three optical paths, where: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it on the surface under test through the first dispersion superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it on the surface under test through the second dispersion superlens; The third optical path directly focuses the divergent light emitted by the third optical fiber on the surface under test through the third dispersion superlens; The reflected light of the measured curved surface returning along the original optical path is received through the first optical fiber, the second optical fiber, and the third optical fiber respectively, and the reflected light is analyzed by a spectrometer to output the spectral wavelength sequence data and the light intensity sequence data of the measurement points corresponding to each optical path; According to the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, the peak wavelength of each measurement point is obtained, and the displacement value corresponding to each measurement point is determined according to the peak wavelength of each measurement point; The displacement value corresponding to each measurement point is converted into a spatial position; The spatial positions of all the measurement points are fitted to determine the curved surface profile of the measured curved surface.

[0013] According to the method for measuring the large-angle curved surface profile of the inner surface of a micro-hole provided by the present invention, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the measured curved surface within different inclination angle ranges respectively.

[0014] According to the method for measuring the large-angle curved surface profile of the inner surface of a micro-hole provided by the present invention, the divergent light in each optical path is wide-spectrum divergent light.

[0015] According to the method for measuring the large-angle curved surface profile of the inner surface of a micro-hole provided by the present invention, determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point includes: converting the peak wavelength into a displacement value by using a pre-determined mapping function.

[0016] The method and device for measuring the large-angle curved surface profile of the inner surface of a micro-hole provided by the present invention significantly reduce the volume of the sensor and break through the measurement space limitation inside the micro-hole by using a dispersive superlens to replace a traditional lens and combining a multi-optical-path inclined layout with a reflecting prism structure; the measurement angle range is effectively expanded by covering different normal regions with the preset angles of the optical axes of the three optical paths, solving the measurement blind area problem of a high-curvature transition curved surface; the precise measurement of the large-angle curved surface profile is realized by combining the high-precision tomography ability of the spectral confocal technology. Brief Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0018] Figure 1 is a schematic optical path diagram of the measuring device provided by the present invention; Figure 2 is a schematic diagram of the measurement process of the dispersive superlens of the device provided by the present invention; Figure 3 It is a schematic diagram of the measurement ranges corresponding to different dispersion superlenses provided by the present invention; Figure 4 It is a schematic flow diagram of the method for measuring the large-angle curved surface profile of the inner surface of a micro-hole provided by the present invention; Among them, the reference numerals are: 1: First optical fiber; 2: Second optical fiber; 3: Third optical fiber; 4: First reflection prism; 5: Second reflection prism; 6: First dispersion superlens; 7: Second dispersion superlens; 8: Third dispersion superlens; 9: Probe housing; 10: Object to be measured; 11: Light source; 12: Spectrometer; 13: Measured curved surface (surface of the object to be measured). Specific embodiments

[0019] To make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present invention without any creative efforts shall fall within the protection scope of the present invention.

[0020] It should be noted that in the description of the embodiments of the present invention, the terms "include", "comprise" or any other variant thereof are intended to cover a non-exclusive inclusion, such that a process, method, article or device including a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0021] The terms "first", "second", etc. in the present application are used to distinguish similar objects and are not used to describe a specific order or sequence. It should be understood that such terms can be interchanged under appropriate circumstances so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. generally belong to the same category and do not limit the number of objects. For example, the first object can be one or multiple.

[0022] Figure 1 It is a schematic optical path diagram of the measuring device provided by the present invention, Figure 2This is a schematic diagram of the measurement process of the dispersion superlens of the device provided by the present invention. The following will refer to Figure 1 and Figure 2 to illustrate the solution of the present invention.

[0023] The device for measuring the large-angle curved surface profile of the inner surface of a micro-hole provided by the present invention includes: At least three optical paths, including: a first optical path, a second optical path, and a third optical path; optionally, the at least three optical paths are arranged in the probe housing 9.

[0024] The first optical path includes a first optical fiber 1, a first reflection prism 4, and a first dispersion superlens 6. The divergent light emitted by the first optical fiber 1 is reflected by the first reflection prism 4 to the first dispersion superlens 6 and focused on the measured curved surface 13 through the first dispersion superlens 6; The second optical path includes a second optical fiber 2, a second reflection prism 5, and a second dispersion superlens 7. The divergent light emitted by the second optical fiber 2 is reflected by the second reflection prism 5 to the second dispersion superlens 7 and focused on the measured curved surface 13 through the second dispersion superlens 7; The third optical path includes a third optical fiber 3 and a third dispersion superlens 8. The divergent light emitted by the third optical fiber 3 is directly incident on the third dispersion superlens 8 and focused on the measured curved surface 13 through the third dispersion superlens 8; A spectrometer 12, configured to analyze the reflected light of the measured curved surface 13 returned along the original optical path received by the first optical fiber 1, the second optical fiber 2, and the third optical fiber 3 respectively, and output the spectral wavelength sequence data and the corresponding light intensity sequence data of the measurement points corresponding to each optical path; A processing unit, configured as: According to the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, obtain the peak wavelength of each measurement point, and determine the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point; Convert the displacement value corresponding to each measurement point into a spatial position; Fit the spatial positions of all the measurement points to determine the curved surface profile of the measured curved surface 13.

[0025] Optionally, the divergent light emitted by the optical fiber is broadband divergent light.

[0026] The following will illustrate the core structure of the device of the present invention: (1) Explanation of each component in the first optical path and the second optical path Reflection prism: Adjust the optical path direction to make the divergent light incident on the dispersion superlens at a specific angle.

[0027] Dispersion superlens: Utilize its linear relationship between wavelength and focal length to focus lights of different wavelengths to different depth positions on the measured curved surface.

[0028] The present invention changes the optical path direction through a reflection prism to achieve coverage of different regions of the curved surface.

[0029] (2) Explanation of the third optical path Direct incidence, omitting the reflection prism, simplifies the optical path and is applicable to measurements in a specific direction; in cooperation with the first and second optical paths, it improves the measurement coverage rate and robustness.

[0030] (3) Arrangement of the dispersion hyperlens Figure 3 It is a schematic diagram of the corresponding measurement ranges of different dispersion hyperlenses provided by the present invention. As Figure 3 shown, the optical axes of the first dispersion hyperlens, the second dispersion hyperlens, and the third dispersion hyperlens are arranged at a preset inclination angle, corresponding to the regions of the measured curved surface within different inclination angle ranges. Among them, the inclination angle refers to the angle of deviation compared to the normal.

[0031] Specifically, when performing curved surface profile measurement, due to the limited tolerance angle of a single first dispersion hyperlens 6 θ When the measured curved surface is inclined too much, the light emitted by the first dispersion hyperlens 6 cannot return to the first dispersion hyperlens 6. Therefore, the second dispersion hyperlens 7 and the third dispersion hyperlens 8 are configured to correspond to the curved surface profiles at different inclination angles (compared to the normal). For example, the first dispersion hyperlens 6 corresponds to the curved surface profile from 0° to 15°, the second dispersion hyperlens 7 corresponds to the curved surface profile from 15° to 45°, and the third dispersion hyperlens 8 corresponds to the curved surface profile from 45° to 75°.

[0032] (4) Determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point, including: using a pre-determined mapping function to convert the peak wavelength into a displacement value. Among them, the mapping function can be a polynomial.

[0033] Taking the third dispersion hyperlens 8 as an example, the measurement process of a single dispersion hyperlens is described (except for the differences in the optical paths, the measurement methods of other optical paths are the same and will not be elaborated one by one): As Figure 2 shown, the light source 11 generates polychromatic light, emits divergent light through the third optical fiber 3, and after passing through the third dispersion hyperlens 8, the light of different wavelengths in the polychromatic light is focused at different positions. The focusing position of the long-wavelength light is closer to the third dispersion hyperlens 8, and the focusing position of the short-wavelength light is farther from the third dispersion hyperlens 8, forming a measurement range S. At this time, when there is a measured curved surface 13 within the measurement range S, the light reflected by the measured curved surface 13 passes through the third dispersion hyperlens 8 and returns to the optical fiber. The reflected light passes through the third optical fiber 3 and reaches the spectrometer 12. The spectrometer 12 obtains a measurement signal, and when the measured curved surface changes within the measurement range S, the single-peak signal moves accordingly. Define the wavelength sequence:

[0034] Among them, is the spectral wavelength sequence data output by the spectrometer.

[0035] When the object is within the measurement range S, spectral light intensity data can be obtained through the spectrometer. The spectral light intensity sequence data is defined as:

[0036] Among them, is the light intensity sequence data corresponding to the spectral wavelength values output by the spectrometer. According to the wavelength sequence data and the light intensity sequence data, the peak wavelength is calculated, including: According to the wavelength sequence data and the light intensity sequence data, obtain the light intensity value corresponding to the value of each wavelength; Multiply the value of each wavelength by its corresponding light intensity value to obtain a set of products; add up all the products to obtain the total sum; Divide the total sum of the products by the total sum of all the light intensity values to obtain the peak wavelength.

[0037] The expression is as follows:

[0038] Among them, is the peak wavelength obtained through calculation; using the peak wavelength calculate the displacement value, and the expression is as follows:

[0039] Among them, is the displacement value obtained through calculation, and are polynomial coefficients, represents to the j power.

[0040] (5) Convert the displacement value corresponding to each measurement point into a spatial position That is, according to the displacement value corresponding to each measurement point and the relative position relationship of the dispersive hyperlens, determine the spatial position of the measurement point.

[0041] Move the probe so that the surface of the curved profile reaches the measurement range of the dispersive hyperlens, and the inclination angle of the surface of the curved profile satisfies the measurement range of the dispersive hyperlens. Obtain the displacement values d measured by the three optical paths. Combine the relative position relationships of the three dispersive hyperlenses (i.e., the first dispersive hyperlens, the second dispersive hyperlens, and the third dispersive hyperlens) obtained from the design parameters, such as the relative inclination angles between the optical axes of each dispersive hyperlens, the relative spatial distances between the centers of each dispersive hyperlens, and the distances from the measurement point to the centers of each dispersive hyperlens. According to spatial geometry, calculate the relative spatial position data between the three measurement points.

[0042] (6) Fit the spatial positions of all measurement points to determine the surface profile of the measured surface.

[0043] The present invention can adopt a numerical fitting method to fit out the surface profile.

[0044] Optionally, the surface profile in the present invention is the surface profile of the inner fillet of the micro-hole. By calculating the surface profile parameters of the surface profile, the present invention can realize the measurement of the fillet size inside the micro-hole.

[0045] On the other hand, the present invention also provides a method for measuring the large-angle surface profile of the inner surface of a micro-hole. Figure 4 is a schematic flow chart of the method for measuring the large-angle surface profile of the inner surface of a micro-hole provided by the present invention, as Figure 4 shown, the steps include: Step 401: Project light signals to the measured surface through at least three optical paths, where: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it on the measured surface through the first dispersive superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it on the measured surface through the second dispersive superlens; The third optical path directly focuses the divergent light emitted by the third optical fiber on the measured surface through the third dispersive superlens; Optionally, the optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the measured surface within different inclination angle ranges respectively.

[0046] Optionally, the divergent light in each optical path is wide-spectrum divergent light (divergent light with a wavelength within a preset range), such as light with a preset wavelength range from 360 nm to 1100 nm set in advance according to needs.

[0047] Step 402: Receive the reflected light of the measured surface returning along the original optical path through the first optical fiber, the second optical fiber, and the third optical fiber respectively, and analyze the reflected light by a spectrometer to output the spectral wavelength sequence data and the light intensity sequence data of the corresponding measurement points of each optical path; Step 403: Obtain the peak wavelength of each measurement point according to the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point.

[0048] Determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point includes: Using a pre-determined mapping function to convert the peak wavelength into a displacement value.

[0049] Regarding the calculation of the peak wavelength, reference can be made to the above embodiments, which will not be elaborated here.

[0050] Step 404: Convert the displacement value corresponding to each measurement point into a spatial position; The present invention can determine the spatial position of the measurement point based on the displacement value corresponding to each measurement point in combination with the relative position relationship of the dispersive superlens.

[0051] Step 405: Fit the spatial positions of all the measurement points to determine the surface profile of the measured surface.

[0052] In summary, for the method and device for measuring the large-angle surface profile of the inner surface of a micro-hole provided by the present invention, by using a dispersive superlens to replace a traditional lens, in combination with a multi-optical-path inclined layout and a reflecting prism structure, the volume of the sensor is significantly reduced, breaking through the measurement space limitation inside the micro-hole; by presetting the optical axis angles of three optical paths to cover different normal regions, the measurement angle range is effectively expanded, solving the problem of the measurement blind area of a highly curved transition surface; in combination with the high-precision tomography ability of the spectral confocal technology, the accurate measurement of the large-angle surface profile is achieved.

[0053] The above are only exemplary embodiments of the present disclosure, and the scope of the present disclosure cannot be limited thereby. That is, any equivalent changes and modifications made in accordance with the teachings of the present disclosure still fall within the scope covered by the present disclosure. Those skilled in the art will readily think of other embodiments of the present disclosure after considering the specification and practicing the present disclosure herein. This application is intended to cover any variations, uses, or adaptations of the present disclosure that follow the general principles of the present disclosure and include common general knowledge or conventional technical means in the technical field not recorded in the present disclosure. The specification and embodiments are only regarded as exemplary, and the scope and spirit of the present disclosure are defined by the claims.

[0054] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0055] It is easy for those skilled in the art to understand that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A measuring device for the large-angle curved surface profile of the inner surface of micropores, characterized in that, Comprising: At least three optical paths, a spectrometer, and a processing unit; At least three optical paths, including: a first optical path, a second optical path, and a third optical path; The first optical path includes a first optical fiber, a first reflecting prism, and a first dispersive superlens. The divergent light emitted by the first optical fiber is reflected by the first reflecting prism to the first dispersive superlens and focused on the measured curved surface through the first dispersive superlens; The second optical path includes a second optical fiber, a second reflecting prism, and a second dispersive superlens. The divergent light emitted by the second optical fiber is reflected by the second reflecting prism to the second dispersive superlens and focused on the measured curved surface through the second dispersive superlens; The third optical path includes a third optical fiber and a third dispersive superlens. The divergent light emitted by the third optical fiber is directly incident on the third dispersive superlens and focused on the measured curved surface through the third dispersive superlens; A spectrometer for analyzing the reflected light of the measured curved surface returned along the original optical paths respectively received by the first optical fiber, the second optical fiber, and the third optical fiber, and outputting the spectral wavelength sequence data and the corresponding light intensity sequence data of the measurement points corresponding to each optical path; A processing unit configured to: Obtain the peak wavelength of each measurement point according to the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determine the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point; Convert the displacement value corresponding to each measurement point into a spatial position; Fit the spatial positions of all the measurement points to determine the curved surface profile of the measured curved surface.

2. The micro-hole inner surface large-angle curved surface contour measuring device according to claim 1, characterized in that, The optical axes of the first dispersive superlens, the second dispersive superlens, and the third dispersive superlens are arranged at a preset inclination angle, corresponding to the regions of the measured curved surface within different inclination angle ranges respectively.

3. The micro-hole inner surface large-angle curved surface contour measuring device according to claim 1, characterized in that, Further comprising: A probe housing; The at least three optical paths are arranged inside the probe housing.

4. The micro-hole inner surface large-angle curved surface contour measuring device according to claim 1, characterized in that The divergent light emitted by the optical fiber is broadband divergent light.

5. The micro-hole inner surface large-angle curved surface profile measuring device according to claim 1, wherein, Determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point includes: Using a pre-determined mapping function to convert the peak wavelength into a displacement value.

6. The micro-hole inner surface large-angle curved surface profile measuring device according to claim 5, characterized in that, The mapping function is a polynomial.

7. A method for measuring the large-angle curved surface profile of the inner surface of micropores, characterized in that, Comprising: Projecting optical signals to the measured curved surface through at least three optical paths, wherein: The first optical path reflects the divergent light emitted by the first optical fiber through the first reflecting prism and focuses it on the measured curved surface through the first dispersive superlens; The second optical path reflects the divergent light emitted by the second optical fiber through the second reflecting prism and focuses it on the measured curved surface through the second dispersive superlens; The third optical path directly focuses the divergent light emitted by the third optical fiber on the measured curved surface through the third dispersive superlens; Receiving the reflected light of the measured curved surface returned along the original optical paths respectively through the first optical fiber, the second optical fiber, and the third optical fiber, and analyzing the reflected light by the spectrometer to output the spectral wavelength sequence data and the light intensity sequence data of the measurement points corresponding to each optical path; Obtaining the peak wavelength of each measurement point according to the spectral wavelength sequence data and the corresponding light intensity sequence data of each measurement point, and determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point; Converting the displacement value corresponding to each measurement point into a spatial position; Fitting the spatial positions of all the measurement points to determine the curved surface profile of the measured curved surface.

8. The method for measuring the large-angle curved surface profile of the inner surface of the micro-pores according to claim 7, wherein The optical axes of the first dispersive metalens, the second dispersive metalens, and the third dispersive metalens are arranged at a preset tilt angle, corresponding to the regions of the measured curved surface within different tilt angle ranges respectively.

9. The method for measuring the large-angle curved surface profile of the inner surface of the micro-pores according to claim 7, wherein The divergent light in each optical path is broadband divergent light.

10. The method for measuring the large-angle curved surface profile of the inner surface of the micropores according to claim 7, characterized in that, Determining the displacement value corresponding to each measurement point according to the peak wavelength of each measurement point, including: Converting the peak wavelength into a displacement value by using a pre-determined mapping function.

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