Pyroelectric sensitive element capable of inhibiting transverse thermal crosstalk
By designing the connection method of detectors, conductive paths and compensation elements in the pyroelectric sensitive element, we reduce transverse thermal crosstalk, improve detection accuracy and response speed, the problem of low detection accuracy of traditional pyroelectric detectors is solved, simplifying the manufacturing process and reducing costs.
Patent Information
- Application Number
- CN202510343407.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-21
- Publication Date
- 2025-07-04
AI Technical Summary
The existing pyroelectric detectors have the problem of low detection accuracy, mainly due to the serious lateral thermal crosstalk, especially in the traditional integrated compensation structure, the physical contact area between the detection element and the compensation element is large, resulting in a greater impact on environmental noise.
A pyroelectric sensitive element that can suppress transverse thermal crosstalk is designed. By connecting the detection element, conductive path and compensation element in sequence on the same plane, the lateral physical contact area between the detection element and the compensation element is reduced, and their position and shape are optimized through the design of the conductive path to avoid the gold wire bonding process. Electrode conductive thin film technology is used to prepare electrodes and conductive metal layers.
Effectively suppress lateral thermal crosstalk, improve detection accuracy and response speed, simplify manufacturing processes, reduce costs, and keep the preparation process of the traditional integrated compensation structure simple and convenient polarization.
Smart Images
Figure CN120252968A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a pyroelectric sensitive element capable of suppressing lateral thermal crosstalk, and belongs to the technical field of thermoelectric devices. Background Art
[0002] The response spectrum of a thermal detector can theoretically cover the entire electromagnetic spectrum. Therefore, thermal detectors have many wide applications, such as fire alarm, life detection, thermal imaging, gas detection, etc. The pyroelectric detector has the advantages of high sensitivity, fast response, non-contact detection, strong adaptability, low power consumption and flexible installation. It can accurately sense the thermal radiation of the human body without directly contacting the object to be detected, and is suitable for various environmental conditions and long-term operation. The core structure of the pyroelectric detection technology includes a pyroelectric material, an adiabatic structure, a compensation structure, an absorption layer and a readout circuit. The compensation structure can reduce the influence of environmental factors such as temperature change and mechanical vibration on the detector. The optimized design and coordinated cooperation of these components directly determine the performance and application fields of the supporting instrument and equipment.
[0003] Environmental noise will affect the pyroelectric detector and limit its performance. Environmental noise mainly includes environmental temperature change and mechanical vibration. The environmental temperature change may cause the drift of the output signal of the pyroelectric detector, that is, the temperature change may cause the reference value or zero point of the output signal to change, rather than the change of the real target signal. In addition, mechanical vibration will also interfere with the pyroelectric infrared detector. The pyroelectric sensitive element itself is also a piezoelectric material. The sensitive element in the clamped state will generate stress under the action of external vibration, thereby outputting microphonic noise. A reasonable compensation structure can effectively suppress the influence of environmental noise on the device. The compensation structure contains two sensitive elements with the same characteristics, namely a detection element and a compensation element, which are connected together in a reverse series or parallel manner. Since they have the same characteristics and are close in space, the electric charges generated by environmental noise can be completely offset theoretically, thereby effectively reducing the influence of environmental noise on the device performance and improving the accuracy and stability of the detector.
[0004] Traditional compensation structures can be divided into integral compensation structures and split compensation structures. In the integral compensation structure, the detection element and the compensation element share a piece of pyroelectric material. The detection element and the compensation element are directly electrically connected through the upper electrode, and they are only distinguished by the separated lower electrode. This structure has the advantages of simple preparation process and convenient polarization. However, due to the large physical contact (thermal contact) area between the detection element and the compensation element, the lateral thermal crosstalk is relatively serious. In the split compensation structure, the detection element and the compensation element are completely separated, and their upper electrodes are electrically connected through bonding wires. There is no thermal crosstalk between the detection element and the compensation element in this structure. However, due to the need for bonding wires, the processing difficulty is large, and the gold wire bonding process is not very suitable for flexible pyroelectric materials such as PVDF (polyvinylidene fluoride), P(VDF-HFP) (polyvinylidene fluoride-hexafluoropropylene), P(VDF-TrFE) (polyvinylidene fluoride-trifluoroethylene), and polyimide (PI) films. In addition, the thermal expansion coefficients of different materials are different, and stress may be caused between the gold wire and the sensitive element during temperature changes, resulting in errors.
[0005] In summary, the sensitive elements in the prior art still have the defect of low detection accuracy. Summary of the Invention
[0006] The purpose of the present invention is to provide a pyroelectric sensitive element that can suppress lateral thermal crosstalk and solve the problem of low detection accuracy in the prior art.
[0007] To achieve the above purpose, the present invention is implemented by the following technical solutions: The present invention provides a pyroelectric sensitive element that can suppress lateral thermal crosstalk, including a detection element, a conductive path, and a compensation element that are located in the same plane and connected in sequence. The detection element includes a detection upper electrode, a first pyroelectric material layer, and a detection lower electrode that are connected in sequence from top to bottom. The conductive path includes a conductive metal layer and a second pyroelectric material layer that are connected in sequence from top to bottom. The compensation element includes a compensation upper electrode, a third pyroelectric material layer, and a compensation lower electrode that are connected in sequence from top to bottom. The conductive metal layer connects the detection upper electrode and the compensation upper electrode, and the second pyroelectric material layer is respectively connected to the first pyroelectric material layer and the third pyroelectric material layer.
[0008] Further, the detection lower electrode and the compensation lower electrode are not connected.
[0009] Further, the first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer have the same thickness and the same material.
[0010] Further, the first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer are the same piece of pyroelectric material.
[0011] Further, the first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer are composite materials composed of one or more of lead zirconate titanate, lithium tantalate, lithium niobate, and polyvinylidene fluoride.
[0012] Further, the detection upper electrode is formed on the upper surface of the first pyroelectric material layer at one time through the electrode conductive film technology, the compensation upper electrode is formed on the upper surface of the third pyroelectric material layer at one time through the electrode conductive film technology, the conductive metal layer is formed on the upper surface of the second pyroelectric material layer at one time through the electrode conductive film technology, the detection lower electrode is formed on the lower surface of the first pyroelectric material layer at one time through the electrode conductive film technology, and the compensation lower electrode is formed on the lower surface of the third pyroelectric material layer at one time through the electrode conductive film technology; The electrode conductive film technology includes screen printing and vacuum evaporation.
[0013] Further, the conductive path is a cuboid, the length of the conductive path is 0.5 mm to 1.0 mm, the width of the conductive path is 0.4 mm to 2.0 mm, and the thickness of the conductive path is the same as the thickness of the detection element and the compensation element.
[0014] Further, the conductive path is centered both horizontally and vertically in the pyroelectric sensitive element.
[0015] Further, the position of the conductive path in the pyroelectric sensitive element is: centered horizontally and located at the bottom of the pyroelectric sensitive element vertically.
[0016] Further, the conductive path is a special-shaped structure other than a cuboid, and the special-shaped structure includes a serpentine structure and a zigzag structure.
[0017] Compared with the prior art, the beneficial effects achieved by the present invention are as follows: A pyroelectric sensitive element capable of suppressing lateral thermal crosstalk provided by the present invention, through the design of the compensation structure, retains the advantages of the traditional integrated compensation structure, such as simple preparation process, convenient polarization, convenient assembly, and no need to use the gold wire bonding process, etc. By reducing the lateral physical contact area between the detection element and the compensation element, the purpose of suppressing lateral thermal crosstalk is achieved, the heat conduction path can be precisely controlled, unnecessary heat conduction can be reduced, lateral thermal crosstalk can be reduced, the detection error of the pyroelectric sensitive element can be reduced, and the detection accuracy of the pyroelectric sensitive element can be improved; By restricting the width and length of the conductive path and adjusting the position of the conductive path relative to the detection element and the compensation element, the lateral thermal crosstalk between the detection element and the compensation element can be further suppressed, the thermal response time of the detection element and the compensation element can be faster, thereby improving the response speed of the entire system, making the reaction to temperature changes more rapid, and improving the detection accuracy of the pyroelectric sensitive element; Regulate the lateral physical contact area between the detection element and the compensation element, and design the geometric parameters such as the position, shape, and length of the remaining part to form a conductive path. While suppressing the lateral thermal crosstalk, electrical connection between the detection element and the compensation element can be achieved without electrical connection through external bonding wires, which can reduce the complexity of the system, simplify the structural design and manufacturing process, and reduce costs; By designing the conductive path as a special-shaped structure and lengthening the conduction path, the lateral thermal crosstalk can be suppressed. Description of the Drawings
[0018] Figure 1 It is a schematic structural diagram of a pyroelectric sensitive element capable of suppressing lateral thermal crosstalk provided by an embodiment of the present invention; Figure 2 It is an exploded view of a pyroelectric sensitive element capable of suppressing lateral thermal crosstalk provided by an embodiment of the present invention; Figure 3 It is a heat distribution curve diagram with different widths when the conductive path is in the middle position and the length is 0.5 mm provided by an embodiment of the present invention; Figure 4 It is a heat distribution curve diagram with different widths when the conductive path is in the middle position and the length is 0.75 mm provided by an embodiment of the present invention; Figure 5 It is a heat distribution curve diagram with different widths when the conductive path is in the middle position and the length is 1.0 mm provided by an embodiment of the present invention; Figure 6 It is a heat distribution curve diagram with different lengths when the conductive path is in the middle position and the length is 0.4 mm provided by an embodiment of the present invention; Figure 7 It is a heat distribution curve diagram with different lengths when the conductive path is in the middle position and the length is 1.2 mm provided by an embodiment of the present invention; Figure 8 It is a heat distribution curve diagram with different lengths when the conductive path is in the middle position and the length is 2.0 mm provided by an embodiment of the present invention; Figure 9 It is a heat distribution curve diagram with different positions when the length of the conductive path is 0.75 mm and the width is 0.4 mm provided by an embodiment of the present invention; Figure 10It is a heat distribution curve graph at different positions when the length of the conductive path provided by the embodiment of the present invention is 0.75 mm and the width is 1.2 mm; Figure 11 It is a heat distribution curve graph at different positions when the length of the conductive path provided by the embodiment of the present invention is 0.75 mm and the width is 2.0 mm.
[0019] In the figure: 1. Detection element; 2. Conductive path; 3. Compensation element; 1-1. Detection upper electrode; 1-2. First pyroelectric material layer; 1-3. Detection lower electrode; 2-1. Conductive metal layer; 2-2. Second pyroelectric material layer; 3-1. Compensation upper electrode; 3-2. Third pyroelectric material layer; 3-3. Compensation lower electrode. Specific embodiments
[0020] The present invention will be further described below with reference to the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention and cannot be used to limit the protection scope of the present invention.
[0021] Embodiment 1
[0022] As Figure 1 shown, this embodiment provides a pyroelectric sensitive element capable of suppressing lateral thermal crosstalk, including a detection element 1, a conductive path 2, and a compensation element 3 that are located in the same plane and connected in sequence.
[0023] As Figure 2 shown, the detection element 1 includes a detection upper electrode 1-1, a first pyroelectric material layer 1-2, and a detection lower electrode 1-3 that are connected in sequence from top to bottom. The conductive path 2 includes a conductive metal layer 2-1 and a second pyroelectric material layer 2-2 that are connected in sequence from top to bottom. The compensation element 3 includes a compensation upper electrode 3-1, a third pyroelectric material layer 3-2, and a compensation lower electrode 3-3 that are connected in sequence from top to bottom. The conductive metal layer 2 connects the detection upper electrode 1-1 and the compensation upper electrode 3-1, and the second pyroelectric material layer 2-2 is respectively connected to the first pyroelectric material layer 1-2 and the third pyroelectric material layer 3-2.
[0024] Through the design of the compensation structure, the present invention maintains the advantages of the traditional integrated compensation structure, such as simple preparation process, convenient polarization, convenient assembly, and no need to use the gold wire bonding process, etc. By reducing the lateral physical contact area between the detection element and the compensation element, the purpose of suppressing lateral thermal crosstalk is achieved. It can accurately control the heat conduction path, reduce unnecessary heat conduction, reduce lateral thermal crosstalk, reduce the detection error of the pyroelectric sensitive element, and improve the detection accuracy of the pyroelectric sensitive element.
[0025] Embodiment 2
[0026] As Figure 1As shown in the figure, this embodiment provides a pyroelectric sensitive element that can suppress lateral thermal crosstalk. Horizontally, it includes a sequentially connected detection element 1, a conductive path 2, and a compensation element 3.
[0027] As Figure 1 and Figure 2 shown in the figure, the detection element 1, the conductive path 2, and the compensation element 3 are located on the same plane. The upper electrode between the detection element 1 and the compensation element 3 is connected through a conductive metal layer 2-1 grown on the conductive path 2, and their lower electrodes are separated.
[0028] As Figure 2 shown in the figure, the detection element 1 is composed of a detection upper electrode 1-1, a first pyroelectric material layer 1-2, and a detection lower electrode 1-3. The detection upper electrode 1-1 is arranged on the upper surface of the detection element 1, the detection lower electrode 1-3 is arranged on the lower surface of the detection element 1, and the first pyroelectric material layer 1-2 is arranged between the detection upper electrode 1-1 and the detection lower electrode 1-3; the compensation element 3 is composed of a compensation upper electrode 3-1, a third pyroelectric material layer 3-2, and a compensation lower electrode 3-3. The compensation upper electrode 3-1 is arranged on the upper surface of the compensation element 3, the compensation lower electrode 3-3 is arranged on the lower surface of the compensation element 3, and the third pyroelectric material layer 3-3 is arranged between the compensation upper electrode 3-1 and the compensation lower electrode 3-3; and there is a conductive path 2 between the detection element and the compensation element. The conductive path 2 is composed of a conductive metal layer 2-1 and a second pyroelectric material layer 2-2 connected in sequence from top to bottom.
[0029] The detection upper electrode 1-1, the compensation upper electrode 3-1, and the conductive metal layer 2-1 on the conductive path 2 are prepared at one time through electrode conductive thin film preparation technologies such as screen printing and vacuum evaporation; and the detection lower electrode 1-3 and the compensation lower electrode 3-3 are also prepared at one time through electrode conductive thin film preparation technologies such as screen printing and vacuum evaporation.
[0030] The pyroelectric material in the conductive path 2 and the pyroelectric materials of the detection element 1 and the compensation element 3 are the same pyroelectric body. The conductive path 2 is formed by regulating the lateral physical contact area between the detection element 1 and the compensation element 3. For example, redundant pyroelectric materials are removed by processes such as laser cutting or mechanical cutting, and only a small amount of pyroelectric materials located below the conductive metal layer 2-1 are retained, and the length, position, and shape of the retained part are optimized.
[0031] The structure provided in this embodiment is simulated through the finite element simulation software Comsol Multiphysics to prove the inhibitory effect of the structure provided in this embodiment on lateral thermal crosstalk; when periodic thermal excitation and constant thermal excitation are respectively applied to the compensation upper electrode 3-1, in the case of different relative positions, different lengths, and widths of the conductive path 2, the greater the heat transferred from the compensation element 3 to the detection element 1, the greater its lateral thermal crosstalk.
[0032] Fix the relative position and length of the fixed conductive path 2, and measure the heat distribution curves under different widths as shown in Figure 3 、 Figure 4 and Figure 5 shown. It can be seen from the results of Figure 3 、 Figure 4 and Figure 5 that without changing the relative position and length of the conductive path 2, as the width of the conductive path 2 increases, the heat transferred from the compensation element 3 to the detection element 1 gradually increases; it shows that without changing the relative position and length of the conductive path 2, as the width of the conductive path increases, its ability to suppress the lateral thermal crosstalk between the detection element and the compensation element continuously decreases.
[0033] Fix the relative position and width of the fixed conductive path 2, and measure the heat distribution curves under different lengths as shown in Figure 6 、 Figure 7 and Figure 8 shown. It can be seen from the results of Figure 6 、 Figure 7 and Figure 8 that without changing the relative position and width of the conductive path 2, as the length of the conductive path 2 increases, the heat transferred from the compensation element 3 to the detection element 1 gradually decreases; it shows that without changing the relative position and width of the conductive path 2, as the length of the conductive path increases, its ability to suppress the lateral thermal crosstalk between the detection element and the compensation element continuously increases.
[0034] Fix the length and width of the fixed conductive path 2, and measure the heat distribution curves under different relative positions as shown in Figure 9 、 Figure 10 and Figure 11 shown. It can be seen from the results of Figure 9 、 Figure 10 and Figure 11 that without changing the length and width of the conductive path 2, when the relative position of the conductive path 2 is at the middle position relative to the bottom position, the heat transferred from the compensation element 3 to the detection element 1 is lower; it shows that without changing the length and width of the conductive path 2, the ability of the relative position of the conductive path 2 at the middle position to suppress the lateral thermal crosstalk between the detection element and the compensation element is stronger than that of the relative position of the conductive path 2 at the bottom position to suppress the lateral thermal crosstalk between the detection element and the compensation element.
[0035] By fabricating the pyroelectric sensitive element provided in this embodiment into a complete pyroelectric detector for actual data testing, the inhibitory effect of the structure provided in this embodiment on the lateral thermal crosstalk of the integrated compensation structure is demonstrated. In a closed shielding box, the light source is directed at the pyroelectric detector made based on the pyroelectric sensitive element provided in this embodiment, with a spacing of 1 cm. Only one of the relative position, width, and length of the conductive path 2 is changed. Under the irradiation of a light source with the same frequency, the peak-to-peak voltages (unit: mv) of some of the pyroelectric detectors made of the pyroelectric sensitive element provided in this embodiment are shown in Table 1 below:
[0036] Without changing the relative position and width of the conductive path, the peak-to-peak voltage of the measured detector increases as the length of the conductive path increases, indicating that the ability to suppress the lateral thermal crosstalk between the detection element and the compensation element continuously improves as the length of the conductive path increases; without changing the relative position and length of the conductive path, as the width of the conductive path increases, the peak-to-peak voltage of the measured detector continuously decreases, indicating that the ability to suppress the lateral thermal crosstalk between the detection element and the compensation element continuously decreases as the width of the conductive path increases; without changing the length and width of the conductive path, the peak-to-peak voltage of the detector measured when the conductive path is in the middle position is generally higher than that when the conductive path is in the bottom position, indicating that the ability to suppress the lateral thermal crosstalk between the detection element and the compensation element is higher when the conductive path is in the middle position; compared with the traditional integrated compensation structure, the present invention can effectively suppress the lateral thermal crosstalk between the detection element and the compensation element.
[0037] In Table 1, the conductive path being in the bottom position means that the conductive path is at the bottom of the horizontally centered position of the pyroelectric sensitive element, and the conductive path being in the middle position means that the conductive path is in the middle of the horizontally centered position of the pyroelectric sensitive element.
[0038] Through simulation and actual testing, it can be known that the lateral thermal crosstalk between the detection element 1 and the compensation element 3 can be further suppressed by reducing the width of the conductive path 2, increasing the length of the conductive path 2, or adjusting the position of the conductive path 2 relative to the detection element 1 and the compensation element 3.
[0039] The materials of the above-mentioned detection element 1, conductive path 2, and compensation element 3 are the same, and are all prepared from pyroelectric materials. The pyroelectric materials used may include, but are not limited to, one or more composites of the following pyroelectric materials: lead zirconate titanate (PZT), lithium tantalate (LiTaO3), lithium niobate (LiNbO3), PVDF, etc.
[0040] The specific working principle is as follows: After the light rays radiated by the light source pass through the filter disposed on the encapsulation cap, they act on the surface of the pyroelectric sensitive element. Since both the detection element and the compensation element of the sensitive element can be affected by the useful incident light, useful pyroelectric signals can be generated by both of them; since the detection element and the compensation element are connected in reverse, a large number of useful pyroelectric signals are cancelled out, and thermal crosstalk is generated, resulting in a decrease in the sensitivity of the device. As Figure 2 shown, in this embodiment, by removing the redundant pyroelectric material on a sensitive element, a physical isolation is formed between the detection element and the compensation element, thereby regulating the physical contact area between the detection element and the compensation element and the shape and position of the conductive path, and further blocking the heat propagation path in the lateral direction and reducing heat conduction. This isolation effect can significantly reduce the influence of lateral heat transfer. Secondly, the design of the conductive path can guide the heat flow to propagate laterally, further reducing the diffusion of heat in the longitudinal direction. The existence of the conductive path makes the heat flow more concentrated along the designed path, thereby reducing lateral thermal crosstalk. Through the above-mentioned designs, the detector can effectively reduce lateral thermal crosstalk and improve the accuracy and stability of the detector.
[0041] In summary, under the same irradiance, the pyroelectric detector provided by the present invention for reducing lateral thermal crosstalk in the compensation structure can solve the problem of thermal crosstalk in the traditional compensation structure and achieve an improvement in the sensitivity of the device.
[0042] Embodiment 3
[0043] This embodiment provides a pyroelectric sensitive element capable of suppressing lateral thermal crosstalk. Other structures are the same, but the first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer are three interconnected materials, while keeping the thickness and material of the three the same.
[0044] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and deformations can be made, and these improvements and deformations should also be regarded as the protection scope of the present invention.
Claims
1. A pyroelectric sensor element capable of suppressing lateral thermal crosstalk, characterized in that, It includes a detection element, a conductive path, and a compensation element that are located in the same plane and connected in sequence. The detection element includes a detection upper electrode, a first pyroelectric material layer, and a detection lower electrode that are connected in sequence from top to bottom. The conductive path includes a conductive metal layer and a second pyroelectric material layer that are connected in sequence from top to bottom. The compensation element includes a compensation upper electrode, a third pyroelectric material layer, and a compensation lower electrode that are connected in sequence from top to bottom. The conductive metal layer connects the detection upper electrode and the compensation upper electrode. The second pyroelectric material layer is respectively connected to the first pyroelectric material layer and the third pyroelectric material layer.
2. The pyroelectric sensor capable of suppressing lateral thermal crosstalk according to claim 1, wherein The detection lower electrode and the compensation lower electrode are not connected.
3. The pyroelectric sensitive element capable of suppressing lateral thermal crosstalk according to claim 1, wherein The first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer have the same thickness and the same material.
4. The pyroelectric sensor capable of suppressing lateral thermal crosstalk according to claim 1, wherein The first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer are the same piece of pyroelectric material.
5. The pyroelectric sensitive element capable of suppressing lateral thermal crosstalk according to claim 1, characterized in that The first pyroelectric material layer, the second pyroelectric material layer, and the third pyroelectric material layer are composite materials composed of one or more of lead zirconate titanate, lithium tantalate, lithium niobate, and polyvinylidene fluoride.
6. The pyroelectric sensitive element capable of suppressing lateral thermal crosstalk according to claim 1, characterized in that, The detection upper electrode is formed on the upper surface of the first pyroelectric material layer at one time through the electrode conductive film technology. The compensation upper electrode is formed on the upper surface of the third pyroelectric material layer at one time through the electrode conductive film technology. The conductive metal layer is formed on the upper surface of the second pyroelectric material layer at one time through the electrode conductive film technology. The detection lower electrode is formed on the lower surface of the first pyroelectric material layer at one time through the electrode conductive film technology. The compensation lower electrode is formed on the lower surface of the third pyroelectric material layer at one time through the electrode conductive film technology. The electrode conductive film technology includes screen printing and vacuum evaporation.
7. The pyroelectric sensitive element capable of suppressing lateral thermal crosstalk according to claim 1, wherein The conductive path is a cuboid. The length of the conductive path is 0.5 mm to 1.0 mm. The width of the conductive path is 0.4 mm to 2.0 mm. The thickness of the conductive path is the same as the thickness of the detection element and the compensation element.
8. The pyroelectric sensitive element capable of suppressing lateral thermal crosstalk according to claim 1, wherein The conductive path is centered both horizontally and vertically in the pyroelectric sensitive element.
9. The pyroelectric sensor capable of suppressing lateral thermal crosstalk according to claim 1, characterized in that, The position of the conductive path in the pyroelectric sensitive element is: centered horizontally and located at the bottom of the pyroelectric sensitive element vertically.
10. The pyroelectric sensitive element capable of suppressing lateral thermal crosstalk according to claim 1, wherein The conductive path is a special-shaped structure other than a cuboid. The special-shaped structure includes a serpentine structure and a zigzag structure.