On-line temperature measuring device for sapphire crystal growth furnace

Through the combination of cleaning mechanism and online temperature measurement mechanism, the problem that dust on the surface of infrared temperature measurement sensor affects the temperature measurement accuracy is solved, and the accurate monitoring and stable control of the temperature in the sapphire crystal furnace is achieved, ensuring the quality of sapphire crystal growth.

CN120274887AActive Publication Date: 2025-07-08YONGCHUN SEMICON (WUXI) CO LTD
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Patent Information

Application Number
CN202510306709.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-14
Publication Date
2025-07-08
Estimated Expiration
2045-03-14

AI Technical Summary

Technical Problem

The existing online temperature measurement device of sapphire crystal furnace has affected the accuracy of temperature measurement data due to dust scattering or absorption on the surface of infrared temperature measurement sensor, resulting in inaccurate temperature monitoring.

Method used

A device including a cleaning mechanism and an online temperature measurement mechanism was designed to clean up dust on the surface of sapphire glass through components such as high-temperature tube furnaces, fans, high-temperature resistant nozzles, and use infrared temperature measurement sensors to monitor the temperature in real time to ensure data accuracy.

Benefits of technology

Effectively remove dust, avoid damage to the thermal stress of glass, improve the accuracy and reliability of temperature measurement, and ensure the quality and stability of sapphire crystal growth.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a sapphire crystal growth furnace on-line temperature measuring device, and relates to the technical field of sapphire, the sapphire crystal growth furnace on-line temperature measuring device comprises a furnace cover, a cleaning mechanism comprises a high-temperature tube furnace, a fan, a high-temperature-resistant nozzle, an arc-shaped tube, a first branch valve and an exhaust pipe, the air inlet end of the high-temperature tube furnace is provided with a main valve for controlling air to enter, and the air inlet end of the high-temperature tube furnace is provided with a second branch valve; a second branch valve is installed at one air outlet end of the three-way pipe, and a temperature sensor for detecting the temperature of air entering the exhaust pipe is installed at the detection end of the exhaust pipe. The temperature of the surface of the sapphire glass on the furnace cover cannot be reduced, so that the sapphire glass cannot generate thermal stress and cannot be damaged, and the accuracy of temperature data measured by the online temperature measuring device is improved.
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Description

Technical Field

[0001] The present invention relates to the technical field of sapphire, and specifically to an on-line temperature measuring device for a sapphire crystal growth furnace. Background Art

[0002] Sapphire is a precious gem-grade corundum mineral, with its main component being alumina, and is generally applied in the jewelry industry, optics, electronics and other fields.

[0003] When sapphire needs to meet the quality and size requirements under different application scenarios, a sapphire crystal growth furnace is required at this time. It can enable sapphire crystals to grow according to certain rules in a specific environment. During the growth process of sapphire crystals, in order to ensure the quality and stability of sapphire crystal growth, workers often need to monitor the temperature inside the furnace in real time and accurately, and this is where the on-line temperature measuring device is used.

[0004] However, the existing on-line temperature measuring device for sapphire crystal growth furnace has the following deficiencies:

[0005] When the on-line temperature measuring device measures the temperature inside the sapphire crystal growth furnace in real time, an infrared temperature sensor is used to measure through the sapphire glass. The main reason is to prevent impurities or air in the environment from entering the furnace and affecting the growth of sapphire crystals. However, after long-term use of sapphire crystals, more dust will accumulate on their surfaces. At this time, the dust scatters or absorbs the infrared light, which will in turn affect the accuracy of the data measured by the infrared temperature sensor for the temperature inside the furnace.

[0006] Therefore, we propose an on-line temperature measuring device for a sapphire crystal growth furnace to solve the problems raised in the above background art. Summary of the Invention

[0007] The purpose of the present invention is to provide an on-line temperature measuring device for a sapphire crystal growth furnace. By setting a cleaning mechanism, the dust on the surface of the sapphire glass can be cleaned, and the temperature of the surface of the sapphire glass will not be reduced, so that the sapphire glass will not generate thermal stress due to thermal expansion and contraction and then be damaged. That is, the accuracy of the data measured by the on-line temperature measuring device for the temperature inside the sapphire crystal growth furnace is greatly improved, so as to solve the problems raised in the above background art.

[0008] To achieve the above purpose, the present invention provides the following technical solution: An on-line temperature measuring device for a sapphire crystal growth furnace, including a furnace cover, an on-line temperature measuring mechanism is provided on the furnace cover, and a cleaning mechanism is provided on the on-line temperature measuring mechanism;

[0009] The cleaning mechanism includes a high-temperature tubular furnace, a blower, a high-temperature resistant nozzle, an arc-shaped pipe, a first sub-valve, and an exhaust pipe. The high-temperature tubular furnace is used to heat the conveyed air. A main valve for controlling the entry of air is installed at the air inlet end of the high-temperature tubular furnace. A collar and a set of fixing bolts are provided on the outer surface of the high-temperature resistant nozzle. The high-temperature resistant nozzle is fixed inside the collar by being extruded by a set of fixing bolts. A tee pipe is installed at the air inlet end of the first sub-valve. One of the outlet ends of the tee pipe is installed with a second sub-valve. The first sub-valve and the second sub-valve are used to control the air conveyed by the tee pipe to enter the inside of the arc-shaped pipe or the inside of the exhaust pipe. A temperature sensor for detecting the temperature of the air entering the exhaust pipe is installed at the detection end of the exhaust pipe.

[0010] Preferably, a conveying pipe is installed at the air inlet end of the main valve. The air inlet end of the conveying pipe is installed with the air outlet end of the blower. A flow regulating valve is installed at the air outlet end of the high-temperature tubular furnace. A high-temperature resistant hose is installed at the air outlet end of the flow regulating valve.

[0011] Preferably, the high-temperature resistant hose is installed with the air inlet end of the tee pipe. The air outlet end of the arc-shaped pipe is installed with the air inlet end of the high-temperature resistant nozzle. The air inlet end of the arc-shaped pipe is installed with the air outlet end of the first sub-valve.

[0012] Preferably, the air outlet end of the second sub-valve is installed with the air inlet end of the exhaust pipe. The detection end of the temperature sensor extends into the inside of the exhaust pipe. A filter mesh is installed at the air inlet end port of the blower.

[0013] Preferably, the on-line temperature measuring mechanism includes a housing. The housing is installed on the top of the furnace cover. A heat insulation plate is fixed on the outer wall of the housing. An installation plate is fixed on the upper side of the heat insulation plate.

[0014] Preferably, the bottom of the heat insulation plate and the top of the furnace cover are on the same horizontal plane. The top of the heat insulation plate and the top of the installation plate are on the same horizontal plane. The housing is at the observation hole position of the furnace cover. The high-temperature resistant nozzle is at the middle position on the top of the housing.

[0015] Preferably, a controller is installed on the top of the installation plate. A wireless transmitter is installed at the wireless port of the controller. A rotating rod is fixed on the top of the housing. A hollow block is rotatably connected to the outer surface of the rotating rod through a bearing.

[0016] Preferably, an installation frame is installed on the surface of the hollow block. An infrared temperature sensor is threadedly connected to the upper side of the installation frame. The bottom of the detection end of the infrared temperature sensor, the bottom of the jet end of the high-temperature resistant nozzle, and the top of the housing are on the same horizontal plane.

[0017] Preferably, two rectangular grooves are preset on the upper side of the mounting frame. Rotating shafts are fixed inside both of the two rectangular grooves, and stabilizing rods are rotatably connected to the outer surfaces of both of the two rotating shafts. The lower sides of the two stabilizing rods are respectively in contact with the bottoms of the inner walls of the two rectangular grooves.

[0018] Preferably, hand-tightening bolts penetrate through the tops of both of the two stabilizing rods, and the threaded ends of the two hand-tightening bolts are respectively threadedly connected to the bottoms of the inner walls of the two rectangular grooves. The high-temperature spray head is movably sleeved inside the upper through hole of the mounting frame, and the collar is fixed to the upper side of the mounting frame.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] 1. By arranging a cleaning mechanism, the present invention can clean the dust on the surface of the sapphire glass on the furnace cover. During the cleaning process, the temperature of the surface of the sapphire glass on the furnace cover will not be reduced, thus ensuring that the sapphire glass will not generate thermal stress and then be damaged. That is, when the on-line temperature measuring device measures the temperature inside the sapphire crystal growth furnace in the later stage, the accuracy of the temperature data obtained after detection will not be affected by the dust on the sapphire glass, thereby improving the use effect of the on-line temperature measuring device. When it is necessary to clean the dust on the sapphire glass on the furnace cover 1 and the temperature measuring operation has not started yet, but there is already high-temperature molten liquid in the sapphire crystal growth furnace, at this time, first cooperate with the controller, the blower, the filter mesh, the conveying pipe and the opened main valve to filter and then inhale the air in the environment. Subsequently, cooperate with the started high-temperature tubular furnace, the opened flow regulating valve and the high-temperature resistant hose to convey the heated air into the three-way pipe.

[0021] 2. Then, by cooperating the three-way pipe, the opened second sub-valve, the exhaust pipe, the controller, the temperature threshold preset by the controller and the temperature sensor, the normal-temperature air in the above-connected components can be discharged into the environment. When the normal-temperature air in the above-connected components is exhausted, at this time, first open the first sub-valve and then close the second sub-valve to allow the high-temperature air entering the three-way pipe to enter the inside of the arc-shaped pipe. Subsequently, cooperate with the high-temperature resistant spray head to quickly spray the high-temperature air entering the inside of the arc-shaped pipe onto the surface of the sapphire glass on the furnace cover, that is, use the fast-flowing high-temperature air to remove the dust on the surface of the sapphire glass.

[0022] 3. By providing an on-line temperature measurement mechanism, the present invention can perform real-time temperature monitoring inside the sapphire crystal growth furnace, thus ensuring the quality and stability of sapphire crystal growth. When it is necessary to measure the temperature inside the sapphire crystal growth furnace, first, the cooperation of the controller, the rotating rod, the bearing, the hollow block, the mounting bracket, the rectangular groove, the rotating shaft, the stabilizing rod, the hand-tightening bolt and the housing is utilized to enable the infrared temperature sensor to stably emit infrared light into the sapphire crystal growth furnace, thereby measuring the temperature inside the sapphire crystal growth furnace. Subsequently, by using the cooperation of the controller, the pre-set temperature threshold range in the controller, the infrared temperature sensor and the wireless transmitter, the staff in the monitoring room can view the temperature data and know whether the temperature inside the sapphire crystal growth furnace is suitable for sapphire crystal growth. When it is determined that the temperature is not suitable for sapphire crystal growth, an alarm prompt will be issued in a timely manner to remind the staff to make timely handling.

[0023] 4. When the staff needs to comprehensively observe the situation inside the sapphire crystal growth furnace through the furnace cover, at this time, remove the two hand-tightening bolts, and the stabilizing rod can be rotated. Subsequently, remove the fixing bolt, and the high-temperature resistant nozzle can be removed from the collar. Then, by using the cooperation of the rotating rod, the bearing, the hollow block and the mounting bracket, the infrared temperature sensor, the rotating shaft and the stabilizing rod can be removed from the top of the housing. When the mounting bracket rotates to a suitable position, stop the rotation of the mounting bracket at this time. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is the main view three-dimensional structure diagram of an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention;

[0025] Figure 2 is the bottom view three-dimensional structure diagram of an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention;

[0026] Figure 3 is the partial top view three-dimensional structure diagram of an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention;

[0027] Figure 4 is an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention Figure 3 the enlarged three-dimensional view at A in;

[0028] Figure 5 is the three-dimensional structure schematic diagram of the second sub-valve, the exhaust pipe and the temperature sensor of an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention;

[0029] Figure 6 is the sectional three-dimensional view of the furnace cover of an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention;

[0030] Figure 7 is the partial bottom view sectional three-dimensional view of an on-line temperature measurement device for a sapphire crystal growth furnace of the present invention;

[0031] Figure 8 This is a schematic three-dimensional structure diagram of the housing, rotating rod, and rectangular groove of an on-line temperature measuring device for a sapphire crystal growth furnace according to the present invention.

[0032] In the figure: 1, furnace cover; 2, on-line temperature measuring mechanism; 201, housing; 202, heat insulation plate; 203, mounting plate; 204, controller; 205, wireless transmitter; 206, rotating rod; 207, hollow block; 208, mounting bracket; 209, infrared temperature sensor; 210, rectangular groove; 211, rotating shaft; 212, stabilizing rod; 213, hand-tightening bolt; 3, cleaning mechanism; 301, high-temperature tube furnace; 302, main valve; 303, delivery pipe; 304, fan; 305, flow regulating valve; 306, high-temperature resistant hose; 307, high-temperature resistant spray head; 308, collar; 309, fixing bolt; 310, arc-shaped pipe; 311, first branch valve; 312, tee; 313, second branch valve; 314, exhaust pipe; 315, temperature sensor; 316, filter mesh. Specific embodiments

[0033] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0034] Embodiment 1: Please refer to Figures 1 - 8As shown in the figure, the present invention provides a technical solution: an on-line temperature measuring device for a sapphire crystal growth furnace, which includes a furnace cover 1. An on-line temperature measuring mechanism 2 is provided on the furnace cover 1, and a cleaning mechanism 3 is provided on the on-line temperature measuring mechanism 2. The on-line temperature measuring mechanism 2 includes a housing 201, and the housing 201 is installed on the top of the furnace cover 1. A heat insulation plate 202 is fixed on the outer wall of the housing 201. An installation plate 203 is fixed on the upper side of the heat insulation plate 202. The bottom of the heat insulation plate 202 and the top of the furnace cover 1 are on the same horizontal plane, and the top of the heat insulation plate 202 and the top of the installation plate 203 are on the same horizontal plane. The housing 201 is located at the observation hole position of the furnace cover 1. A controller 204 is installed on the top of the installation plate 203. A wireless transmitter 205 is installed on the wireless port of the controller 204. A rotating rod 206 is fixed on the top of the housing 201. A hollow block 207 is rotatably connected to the outer surface of the rotating rod 206 through a bearing. An installation frame 208 is installed on the surface of the hollow block 207. An infrared temperature sensor 209 is threadedly connected to the upper side of the installation frame 208. Two rectangular grooves 210 are preset on the upper side of the installation frame 208. A rotating shaft 211 is fixed inside each of the two rectangular grooves 210, and a stabilizing rod 212 is rotatably connected to the outer surface of each of the two rotating shafts 211. The lower sides of the two stabilizing rods 212 are respectively in contact with the bottom of the inner wall of the two rectangular grooves 210. The tops of the two stabilizing rods 212 are respectively movably penetrated by a hand-tightening bolt 213, and the threaded ends of the two hand-tightening bolts 213 are respectively threadedly connected to the bottom of the inner wall of the two rectangular grooves 210. The cleaning mechanism 3 includes a high-temperature tube furnace 301, a blower 304, a high-temperature resistant spray head 307, an arc-shaped tube 310, a first sub-valve 311 and an exhaust pipe 314. A collar 308 and a set of fixing bolts 309 are provided on the outer surface of the high-temperature resistant spray head 307.

[0035] In this embodiment, when it is necessary to measure the temperature inside the sapphire crystal growth furnace, the controller 204 is first used to turn on the infrared temperature sensor 209. At this time, the activated infrared temperature sensor 209 will, under the cooperation of the rotating rod 206, bearings, hollow block 207, mounting bracket 208, rectangular groove 210, rotating shaft 211, stabilizing rod 212, hand-tightening bolt 213 and housing 201, stably emit infrared light into the sapphire crystal growth furnace. The emitted infrared light will pass through the sapphire glass on the furnace cover 1 and then reach the inside of the sapphire crystal growth furnace. Subsequently, the auxiliary infrared temperature sensor 209 (the emitted infrared light can be superimposed on the self-infrared radiation of the target object, enabling the sensor to receive a stronger signal, thereby improving the measurement accuracy and reliability) measures the temperature inside the sapphire crystal growth furnace. Then, the measured temperature data (the accuracy of the temperature data at this time will be improved because there is no dust on the sapphire surface of the furnace cover 1) will be directly transmitted to the controller 204 in the form of an electrical signal. Next, the controller 204 will directly compare the received temperature data with the temperature threshold range previously set by the controller 204. When the temperature data received by the controller 204 is not within the temperature threshold range previously set by the controller 204, it indicates that the temperature inside the sapphire crystal growth furnace is too low or too high. At this time, the controller 204 will directly, through the cooperation of the wireless transmitter 205, wirelessly transmit the obtained result to the monitoring device in the ground control room to remind the staff in the monitoring room to handle it in time. At the same time, the received temperature data will be wirelessly transmitted to the monitoring device in the ground control room for the staff to view. When the temperature data received by the controller 204 is within the temperature threshold range previously set by the controller 204, it indicates that the temperature inside the sapphire crystal growth furnace is just suitable for sapphire crystal growth. At this time, the controller 204 will not alarm the monitoring device in the ground control room through the wireless transmitter 205, but will wirelessly transmit the received temperature data to the monitoring device in the ground control room for the staff to view. When the staff needs to comprehensively observe the inside of the sapphire crystal growth furnace through the furnace cover 1, the staff first removes the two hand-tightening bolts 213 from the two stabilizing rods 212 respectively, then rotates 90 degrees with their respective corresponding rotating shafts 211 as the fulcrums, then loosens the two fixing bolts 309, and then removes the high-temperature nozzle 307 from the collar 308. Next, with the rotating rod 206 as the rotation fulcrum and using the cooperation of the bearings and the hollow block 207, the mounting bracket 208 is rotated. At this time, the rotating mounting bracket 208 will move the infrared temperature sensor 209, rotating shaft 211 and stabilizing rod 212 away from the top of the housing 201. When the mounting bracket 208 rotates to the appropriate position, stop the rotation of the mounting bracket 208 at this time.

[0036] Embodiment 2: According to Figures 1 - 8As shown, the cleaning mechanism 3 includes a high-temperature tubular furnace 301, a blower 304, a high-temperature resistant spray head 307, an arc-shaped pipe 310, a first sub-valve 311, and an exhaust pipe 314. The high-temperature tubular furnace 301 is used to heat the conveyed air. A main valve 302 for controlling the entry of air is installed at the air inlet end of the high-temperature tubular furnace 301. A collar 308 and a set of fixing bolts 309 are provided on the outer surface of the high-temperature resistant spray head 307. The high-temperature resistant spray head 307 is fixed inside the collar 308 by squeezing with a set of fixing bolts 309. A tee pipe 312 is installed at the air inlet end of the first sub-valve 311. One of the outlet ends of the tee pipe 312 is installed with a second sub-valve 313. The first sub-valve 311 and the second sub-valve 313 are used to control the air conveyed by the tee pipe 312 to enter the inside of the arc-shaped pipe 310 or the inside of the exhaust pipe 314. A temperature sensor 315 for detecting the temperature of the air entering the inside of the exhaust pipe 314 is installed at the detection end of the exhaust pipe 314. A conveying pipe 303 is installed at the air inlet end of the main valve 302. The air inlet end of the conveying pipe 303 is installed with the outlet end of the blower 304. A flow regulating valve 305 is installed at the outlet end of the high-temperature tubular furnace 301. The outlet end of the flow regulating valve 305 is installed with a high-temperature resistant hose 306. The high-temperature resistant hose 306 is installed with the air inlet end of the tee pipe 312. The outlet end of the arc-shaped pipe 310 is installed with the air inlet end of the high-temperature resistant spray head 307. The air inlet end of the arc-shaped pipe 310 is installed with the outlet end of the first sub-valve 311. The outlet end of the second sub-valve 313 is installed with the air inlet end of the exhaust pipe 314. The detection end of the temperature sensor 315 extends into the inside of the exhaust pipe 314. A filter mesh 316 is installed at the air inlet end port of the blower 304. The on-line temperature measuring mechanism 2 includes a housing 201. A heat insulation plate 202 is fixed on the outer wall of the housing 201. A mounting plate 203 is fixed on the upper side of the heat insulation plate 202. A controller 204 is installed on the top of the mounting plate 203. The high-temperature resistant spray head 307 is located at the middle position on the top of the housing 201. A rotating rod 206 is fixed on the top of the housing 201. A hollow block 207 is rotatably connected to the outer surface of the rotating rod 206 through a bearing. A mounting frame 208 is installed on the surface of the hollow block 207. An infrared temperature sensor 209 is threadedly connected to the upper side of the mounting frame 208. And the bottom of the detection end of the infrared temperature sensor 209, the bottom of the jet end of the high-temperature resistant spray head 307 and the top of the housing 201 are on the same horizontal plane. The high-temperature resistant spray head 307 is movably sleeved inside the upper side through hole of the mounting frame 208. The collar 308 is fixed on the upper side of the mounting frame 208.

[0037] In this embodiment, when it is necessary to clean the dust on the sapphire glass on the furnace lid 1 and the temperature measurement operation has not started yet, but there is already high-temperature molten liquid (for sapphire crystal growth) in the sapphire crystal growth furnace, first press the start switch of the high-temperature tube furnace 301 at this time, then manually open the main valve 302 and the second sub-valve 313, then use the controller 204 to start the fan 304 and the temperature sensor 315. After that, the started fan 304 will, in cooperation with the filter mesh 316, filter and then suck in the air in the environment, and then transport it to the inside of the delivery pipe 303. Then, through the opened main valve 302, it is transported to the inside of the high-temperature tube furnace 301. After that, the air entering the high-temperature tube furnace 301 will be first heated to a high temperature (a parameter set in advance, and this parameter comes from the temperature required for sapphire crystal growth), and then transported to the inside of the pipeline of the flow regulating valve 305. Finally, through the cooperation of the high-temperature resistant hose 306, it is transported to the inside of the tee 312. And after being transported to the inside of the tee 312, through the cooperation of the opened second sub-valve 313 and the exhaust pipe 314, it is transported back to the environment. At the same time, when the fan 304 sucks in the air in the environment, the air in its connecting components will also start the transportation operation. At this time, the started temperature sensor 315 will measure the temperature of the air entering the inside of the exhaust pipe 314 and directly transmit the detected temperature data to the controller 204 in the form of an electrical signal. Then, the controller 204 will compare the received temperature data with the temperature threshold set in advance by the controller 204. When the temperature data received by the controller 204 is lower than the temperature threshold set in advance by the controller 204, the second sub-valve 313 is kept in the open state at this time. When the temperature data received by the controller 204 is the same as the temperature threshold set in advance by the controller 204 (the analysis situation on the screen of the controller 204 can be observed on-site), first open the first sub-valve 311 at this time, and then close the second sub-valve 313. At this time, the air entering the inside of the tee 312 will enter the inside of the opened first sub-valve 311, then enter the inside of the arc tube 310, and then enter the inside of the fixed high-temperature resistant spray head 307, and then spray out from its outlet and spray on the sapphire glass on the furnace lid 1. When the fast-sprayed high-temperature air touches the surface of the sapphire glass, the fast-flowing high-temperature air will take away the dust on the surface of the sapphire glass. When the sapphire glass on the furnace lid 1 has been cleaned for a period of time, first use the controller 204 to turn off the fan 304 and the temperature sensor 315, and then manually close the main valve 302, the first sub-valve 311 and the high-temperature tube furnace 301.

[0038] The effects and working principles achieved by its entire mechanism are as follows:

[0039] In the preparation stage, first connect the high-temperature tube furnace 301 and the controller 204 to the external power supply together. Then turn on the controller 204, set the temperature threshold range (corresponding to the infrared temperature sensor 209) and the temperature threshold (corresponding to the temperature sensor 315, and this temperature is the same as the air heating temperature parameter set for the high-temperature tube furnace 301). Then, with the cooperation of the wireless transmitter 205, wirelessly connect the controller 204 to the monitoring equipment in the ground control room. After that, turn on the high-temperature tube furnace 301, set the air heating temperature parameter, and at the same time manually adjust the valve opening degree of the flow regulating valve 305. Then install the housing 201 on the furnace cover 1 (the furnace cover 1 is the cover of the observation hole of the sapphire crystal growth furnace). After that, place the high-temperature tube furnace 301 on the ground or the prepared placement rack, and at the same time install the blower 304 on the placement rack or the ground;

[0040] Cleaning stage: When it is necessary to clean the dust on the sapphire glass on the furnace cover 1, and the temperature measurement operation has not started yet, but there is already high-temperature molten liquid (for sapphire crystal growth) in the sapphire crystal growth furnace, first press the start switch of the high-temperature tube furnace 301 at this time, then manually open the main valve 302 and the second branch valve 313, then start the blower 304 and the temperature sensor 315 by using the controller 204. After that, the started blower 304 will, with the cooperation of the filter mesh 316, filter and inhale the air in the environment first, then transport it into the interior of the delivery pipe 303, and then through the opened main valve 302, transport it into the interior of the high-temperature tube furnace 301. After that, the air entering the high-temperature tube furnace 301 will be heated to a high temperature first (parameters set in advance, and this parameter comes from the temperature required for sapphire crystal growth), then transported into the pipeline interior of the flow regulating valve 305, and finally through the cooperation of the high-temperature resistant hose 306, transported into the interior of the tee 312. And after being transported into the interior of the tee 312, through the cooperation of the opened second branch valve 313 and the exhaust pipe 314, it is transported back to the environment. At the same time, when the blower 304 inhales the air in the environment, the air in its connecting components will also start the transportation operation. At this time, the started temperature sensor 315 will measure the temperature of the air entering the interior of the exhaust pipe 314, and directly transmit the detected temperature data to the controller 204 in the form of an electrical signal. Then the controller 204 will compare the received temperature data with the temperature threshold set in advance by the controller 204. When the temperature data received by the controller 204 is lower than the temperature threshold set in advance by the controller 204, keep the second branch valve 313 in the open state at this time. When the temperature data received by the controller 204 is the same as the temperature threshold set in advance by the controller 204 (the analysis situation on the screen of the controller 204 can be observed on-site), first open the first branch valve 311 at this time, and then close the second branch valve 313. At this time, the air entering the interior of the tee 312 will enter the interior of the opened first branch valve 311, then enter the interior of the arc-shaped pipe 310, and then enter the interior of the fixed high-temperature resistant spray head 307, and then spray out from its outlet, spraying on the sapphire glass on the furnace cover 1. When the fast-sprayed high-temperature air contacts the surface of the sapphire glass, the fast-flowing high-temperature air will take away the dust on the surface of the sapphire glass. When the sapphire glass on the furnace cover 1 has been cleaned for a period of time, first use the controller 204 to turn off the blower 304 and the temperature sensor 315, and then manually close the main valve 302, the first branch valve 311 and the high-temperature tube furnace 301;

[0041] During the temperature measurement stage, when it is necessary to measure the temperature inside the sapphire crystal growth furnace, first use the controller 204 to turn on the infrared temperature sensor 209. At this time, the activated infrared temperature sensor 209 will, with the cooperation of the rotating rod 206, bearings, hollow block 207, mounting bracket 208, rectangular groove 210, rotating shaft 211, stabilizing rod 212, hand-tightening bolts 213 and the housing 201, stably emit infrared light into the sapphire crystal growth furnace. The emitted infrared light will pass through the sapphire glass on the furnace cover 1 and then reach the inside of the sapphire crystal growth furnace. Then, the auxiliary infrared temperature sensor 209 (the emitted infrared light can be superimposed on the self-infrared radiation of the target object, enabling the sensor to receive a stronger signal, thereby improving the measurement accuracy and reliability) measures the temperature inside the sapphire crystal growth furnace. After that, the measured temperature data (the accuracy of the temperature data at this time will be improved because there is no dust on the sapphire surface of the furnace cover 1) will be directly transmitted to the controller 204 in the form of an electrical signal. Then, the controller 204 will directly compare the received temperature data with the temperature threshold range previously set by the controller 204. When the temperature data received by the controller 204 is not within the temperature threshold range previously set by the controller 204, it indicates that the temperature inside the sapphire crystal growth furnace is too low or too high. At this time, the controller 204 will directly, with the cooperation of the wireless transmitter 205, wirelessly transmit the obtained result to the monitoring device in the ground control room to remind the staff in the monitoring room to deal with it in time. At the same time, the received temperature data will be wirelessly transmitted to the monitoring device in the ground control room for the staff to view. When the temperature data received by the controller 204 is within the temperature threshold range previously set by the controller 204, it indicates that the temperature inside the sapphire crystal growth furnace is just suitable for sapphire crystal growth. At this time, the controller 204 will not alarm the monitoring device in the ground control room through the wireless transmitter 205, but will wirelessly transmit the received temperature data to the monitoring device in the ground control room for the staff to view. When the staff needs to comprehensively observe the inside of the sapphire crystal growth furnace through the furnace cover 1, first, the staff removes the two hand-tightening bolts 213 from the two stabilizing rods 212 respectively, then rotates 90 degrees with their respective corresponding rotating shafts 211 as the fulcrums, then loosens the two fixing bolts 309, and then removes the high-temperature nozzle 307 from the collar 308. Then, with the rotating rod 206 as the rotation fulcrum and using the cooperation of the bearings and the hollow block 207, rotate the mounting bracket 208. At this time, the rotating mounting bracket 208 will move the infrared temperature sensor 209, rotating shaft 211 and stabilizing rod 212 away from the top of the housing 201. When the mounting bracket 208 rotates to the appropriate position, stop the rotation of the mounting bracket 208 at this time. Then, the staff can observe the inside of the sapphire crystal growth furnace through the cooperation of the housing 201 and the sapphire glass on the furnace cover 1.

[0042] Among them, the furnace cover 1 is composed of components such as a perforated furnace cover plate, sapphire glass, and a ring for fixing the sapphire glass.

[0043] Among them, the controller 204 (PLC controller), wireless transmitter 205, infrared temperature sensor 209, high-temperature tubular furnace 301, main valve 302, blower 304, flow regulating valve 305, first sub-valve 311, second sub-valve 313, and temperature sensor 315 are all prior arts, and their models can be selected according to actual situations and will not be elaborated here.

[0044] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An on-line temperature measuring device for a sapphire crystal growth furnace, comprising a furnace cover (1), characterized in that: An on-line temperature measuring mechanism (2) is provided on the furnace cover (1), and a cleaning mechanism (3) is provided on the on-line temperature measuring mechanism (2); The cleaning mechanism (3) includes a high-temperature tube furnace (301), a blower (304), a high-temperature resistant spray head (307), an arc-shaped tube (310), a first sub-valve (311) and an exhaust pipe (314). The high-temperature tube furnace (301) is used to heat the conveyed air. A main valve (302) for controlling the entry of air is installed at the air inlet end of the high-temperature tube furnace (301). A collar (308) and a set of fixing bolts (309) are provided on the outer surface of the high-temperature resistant spray head (307). The high-temperature resistant spray head (307) is fixed inside the collar (308) by squeezing with a set of fixing bolts (309). A tee (312) is installed at the air inlet end of the first sub-valve (311). One of the outlet ends of the tee (312) is installed with a second sub-valve (313). The first sub-valve (311) and the second sub-valve (313) are used to control the air conveyed by the tee (312) to enter the inside of the arc-shaped tube (310) or the inside of the exhaust pipe (314). A temperature sensor (315) for detecting the temperature of the air entering the exhaust pipe (314) is installed at the detection end of the exhaust pipe (314).

2. The online temperature measurement device for sapphire crystal growth furnace according to claim 1, wherein: A conveying pipe (303) is installed at the air inlet end of the main valve (302). The air inlet end of the conveying pipe (303) is installed with the outlet end of the blower (304). A flow regulating valve (305) is installed at the outlet end of the high-temperature tube furnace (301). A high-temperature resistant hose (306) is installed at the outlet end of the flow regulating valve (305).

3. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, characterized in that: The high-temperature resistant hose (306) is installed with the air inlet end of the tee (312). The outlet end of the arc-shaped tube (310) is installed with the air inlet end of the high-temperature resistant spray head (307). The air inlet end of the arc-shaped tube (310) is installed with the outlet end of the first sub-valve (311).

4. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, wherein: The outlet end of the second sub-valve (313) is installed with the air inlet end of the exhaust pipe (314). The detection end of the temperature sensor (315) extends into the inside of the exhaust pipe (314). A filter screen (316) is installed at the air inlet end port of the blower (304).

5. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 1, characterized in that: The on-line temperature measuring mechanism (2) includes a housing (201). The housing (201) is installed on the top of the furnace cover (1). A heat insulation plate (202) is fixed on the outer wall of the housing (201). A mounting plate (203) is fixed on the upper side of the heat insulation plate (202).

6. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 5, characterized in that: The bottom of the heat insulation plate (202) and the top of the furnace cover (1) are on the same horizontal plane. The top of the heat insulation plate (202) and the top of the mounting plate (203) are on the same horizontal plane. The housing (201) is located at the observation hole position of the furnace cover (1). The high-temperature resistant spray head (307) is located at the middle position on the top of the housing (201).

7. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 5, characterized in that: The top of the mounting plate (203) is provided with a controller (204), the wireless port of the controller (204) is provided with a wireless transmitter (205), the top of the housing (201) is fixed with a rotating rod (206), and the outer surface of the rotating rod (206) is rotatably connected with a hollow block (207) through a bearing.

8. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 7, wherein: The surface of the hollow block (207) is provided with a mounting frame (208), the upper side of the mounting frame (208) is threadedly connected with an infrared temperature sensor (209), and the bottom of the detection end of the infrared temperature sensor (209) and the bottom of the jet end of the high-temperature resistant nozzle (307) are on the same horizontal plane as the top of the housing (201).

9. The online temperature measuring device for sapphire crystal growth furnace according to claim 8, characterized in that: Two rectangular grooves (210) are preset on the upper side of the mounting frame (208), rotating shafts (211) are fixed inside the two rectangular grooves (210), and the outer surfaces of the two rotating shafts (211) are rotatably connected with stabilizing rods (212). The lower sides of the two stabilizing rods (212) are respectively in contact with the bottom of the inner walls of the two rectangular grooves (210).

10. The on-line temperature measuring device for sapphire crystal growth furnace according to claim 9, characterized in that: The tops of the two stabilizing rods (212) are both movably penetrated by hand-tightening bolts (213), and the threaded ends of the two hand-tightening bolts (213) are respectively threadedly connected to the bottom of the inner walls of the two rectangular grooves (210). The high-temperature resistant nozzle (307) is movably sleeved inside the upper through hole of the mounting frame (208), and the collar (308) is fixed on the upper side of the mounting frame (208).

Citation Information

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