Rotary spraying and vibration auxiliary cleaning equipment for silicon material cleaning

Abstract

The invention discloses rotary spraying and vibration auxiliary cleaning equipment for silicon material cleaning, and relates to the field of silicon material processing equipment. A rotary spraying and vibration auxiliary cleaning device for silicon material cleaning comprises a fixed frame and further comprises a hollow shaft motor, a rotary spraying device, a vibration device, a cleaning device body and a cleaning device body, and the hollow shaft motor is fixedly connected to the upper end of the fixed frame; the hollow driving shaft is vertically and fixedly connected into the hollow shaft motor; the spraying pipe is installed at the lower end of the hollow driving shaft, the water inlet end of the spraying pipe is communicated with the water outlet end of the hollow driving shaft, and the lower end of the spraying pipe is communicated with a plurality of spraying heads at equal intervals; compared with an existing cleaning device, the problem that a traditional cleaning device is single in cleaning mode is solved through combination of a rotary spraying mode and a vibration assisting mode, cleaning liquid can cover the surface of a silicon material in all directions through rotary spraying, the contact area of the silicon material and the cleaning liquid is increased through vibration assisting, and cleaning is more thorough.

Description

Technical Field

[0001] The present invention belongs to the technical field of silicon material processing equipment. Specifically, it relates to a rotary spraying and vibration-assisted cleaning device for silicon material cleaning. Background Art

[0002] In the semiconductor and photovoltaic industries, silicon material, as a core basic material, its purity plays a decisive role in the performance and quality of the final product. During the production, transportation, and storage of silicon material, it is inevitable that impurities such as dust, metal particles, organic substances, and oxide layers adhere to its surface. Therefore, silicon material cleaning has become a key link in ensuring product quality.

[0003] Currently, for existing silicon material cleaning equipment, on the one hand, the cleaning method is relatively single, mostly using simple soaking or static spraying methods. Simple soaking is difficult to make the cleaning liquid fully act on all corners of the silicon material. For some silicon materials with irregular shapes or with gaps and holes, internal impurities are difficult to effectively remove. Static spraying has the problem of uneven spraying, and some areas may not be fully cleaned, resulting in incomplete cleaning and affecting the overall purity of the silicon material. On the other hand, most existing equipment lacks auxiliary cleaning means. The silicon material is in a relatively static state during the cleaning process, and the contact area with the cleaning liquid is limited, unable to fully play the role of the cleaning liquid, resulting in low cleaning efficiency. Moreover, in the face of large-scale production requirements, existing equipment is difficult to meet the requirements of high-efficiency and high-quality cleaning, thereby increasing production costs and restricting the further development of the industry. In view of this, the present invention is specifically proposed. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a rotary spraying and vibration-assisted cleaning device for silicon material cleaning that can overcome the above problems or at least partially solve the above problems.

[0005] To solve the above technical problems, the basic concept of the technical solution adopted by the present invention is: a rotary spraying and vibration-assisted cleaning device for silicon material cleaning, including a fixed frame, and further including: a hollow shaft motor fixedly connected to the upper end of the fixed frame; a hollow drive shaft vertically fixedly connected inside the hollow shaft motor; a spray pipe installed at the lower end of the hollow drive shaft, the water inlet end of the spray pipe being connected to the water outlet end of the hollow drive shaft, and a plurality of spray heads being equidistantly connected to the lower end of the spray pipe; a delivery pipe rotatably connected to the water inlet end of the hollow drive shaft through a rotary joint; a storage bin with openings at both the upper and lower ends, slidably connected to the fixed frame and located below the spray pipe; support blocks symmetrically fixedly connected to the fixed frame, with both sides of the storage bin located on adjacent support blocks; a discharge assembly installed at the lower opening of the storage bin; when the silicon material is being cleaned in the storage bin, the discharge assembly is in a closed state, and the discharge assembly is provided with drain holes for discharging cleaning water; a lifting assembly for lifting the storage bin, installed on the fixed frame.

[0006] Further, the discharge assembly includes a fixed shaft, a semi-circular sealing plate, a ring-shaped electromagnet, and a semi-circular magnet. The fixed shaft is fixedly connected to the lower opening of the storage bin. The semi-circular sealing plates are symmetrically rotatably connected to the fixed shaft. The drain holes are provided on the semi-circular sealing plates. A torsion spring is provided between the semi-circular sealing plates and the fixed shaft. The ring-shaped electromagnet is embedded and installed at the bottom of the storage bin, and the semi-circular magnet is embedded and installed on the semi-circular sealing plate. When the ring-shaped electromagnet is energized, the ring-shaped electromagnet will attract the semi-circular magnet.

[0007] Further, the lifting assembly includes a rotating shaft and an eccentric wheel. The rotating shaft is symmetrically rotatably connected to both sides of the fixed frame and is located below the support blocks. The eccentric wheel is fixedly connected to one end of the rotating shaft close to the storage bin. The eccentric wheel intermittently abuts against the storage bin. A transmission part for driving the rotating shaft to rotate is connected to the hollow drive shaft.

[0008] Even further, the transmission part includes a first bevel gear, a support plate, a transmission shaft, a second bevel gear, a first sprocket, and a second sprocket. The first bevel gear is fixedly connected to the hollow drive shaft. The support plates are symmetrically fixedly connected to the fixed frame and are located on both sides of the hollow drive shaft. The transmission shaft is rotatably connected to the support plates. The second bevel gear is fixedly connected to one end of the transmission shaft close to the hollow drive shaft and meshes with the first bevel gear. The first sprocket is fixedly connected to the end of the transmission shaft passing through the fixed frame, and the second sprocket is fixedly connected to the end of the rotating shaft passing through the fixed frame. The first sprocket and the second sprocket are connected by a chain.

[0009] In order to facilitate the vibration of the storage bin at a higher frequency, further, the diameter of the first bevel gear is larger than that of the second bevel gear.

[0010] In order to prevent the operator from accidentally contacting the rotating sprockets and chains, further, protective covers are symmetrically and fixedly connected to both sides of the fixed frame, and the first sprocket and the second sprocket are located inside the protective covers.

[0011] In order to facilitate further improving the cleaning effect and making the silicon material cleaner, further, two rows of fixed rods are fixedly connected inside the storage bin, and multiple rows of brushes are fixedly connected at equal intervals on the fixed rods.

[0012] In order to facilitate blocking the silicon material from splashing outward, further, a circle of raised protective plates is fixedly connected at the upper opening of the storage bin, and the inner side of the raised protective plates is inclined downward.

[0013] In order to facilitate drying the silicon material after cleaning is completed without the need for further transportation, further, the conveying pipe is a three-way pipe, and one-way valves are arranged in both input ends of the conveying pipe.

[0014] In order to facilitate collecting the waste water and the cleaned silicon material, further, a water collecting bin is arranged below the storage bin inside the fixed frame, the water collecting bin is located directly below the drain hole, one side of the water collecting bin is connected to a drain valve pipe, a drainage plate inclined towards the drain valve pipe is fixedly connected to the bottom inside the water collecting bin, and collecting boxes are placed on both sides of the water collecting bin on the fixed frame.

[0015] After adopting the above technical solutions, the present invention has the following beneficial effects compared with the prior art: Compared with the existing cleaning equipment, the present invention combines the two methods of rotary spraying and vibration assistance, changing the problem of single cleaning method of traditional cleaning equipment. Rotary spraying enables the cleaning liquid to cover the surface of the silicon material in all directions, and vibration assistance increases the contact area between the silicon material and the cleaning liquid, making the cleaning more thorough.

[0016] In each link of pre-cleaning, alkali cleaning, acid cleaning, and pure water cleaning, rotary spraying and vibration assistance continuously act, effectively removing large particle impurities, oxide layers, various metal impurities, and organic substances on the surface of the silicon material, improving the cleanliness and quality of the silicon material.

[0017] And this cleaning equipment realizes the automation of operations such as rotary spraying, vibration assistance, and discharging during the cleaning process through the coordinated work of a hollow shaft motor, transmission components, and electromagnetic control components, reducing manual intervention, improving the cleaning efficiency, and reducing the labor intensity.

[0018] The following further describes in detail the specific embodiments of the present invention with reference to the accompanying drawings. Description of the Drawings

[0019] In the accompanying drawings:

[0020] Figure 1 is the front view schematic diagram of the present invention;

[0021] Figure 2 is the front view sectional structure schematic diagram of the present invention;

[0022] Figure 3 is the three-dimensional schematic of a part of the structure of the present invention Figure 1 ;

[0023] Figure 4 is the three-dimensional schematic of a part of the structure of the present invention Figure 2 ;

[0024] Figure 5 is the three-dimensional schematic diagram when the discharging assembly of the present invention is opened;

[0025] Figure 6 is for the present invention Figure 2 is the structure schematic diagram of part A in

[0026] In the figure: 1, fixed frame; 101, water collecting bin; 102, drainage plate; 103, collection box; 104, protective cover; 105, support block; 2, hollow shaft motor; 201, hollow driving shaft; 202, spray pipe; 203, rotary joint; 204, conveying pipe; 3, first bevel gear; 301, support plate; 302, transmission shaft; 303, second bevel gear; 304, first sprocket; 305, rotating shaft; 306, second sprocket; 307, eccentric wheel; 4, holding bin; 401, heightened protective plate; 402, fixed rod; 403, brush; 404, annular electromagnet; 405, fixed shaft; 5, semi-circular sealing plate; 501, drainage hole; 502, semi-circular magnet. Detailed implementation manners

[0027] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention, but are not used to limit the scope of the present invention.

[0028] Embodiment 1:

[0029] Referring to Figures 1-6, A rotary spraying and vibration-assisted cleaning device for silicon material cleaning, including a fixed frame 1, and also including: a hollow shaft motor 2, fixedly connected to the upper end of the fixed frame 1; a hollow drive shaft 201, vertically fixedly connected inside the hollow shaft motor 2; a spray pipe 202, installed at the lower end of the hollow drive shaft 201, the water inlet end of the spray pipe 202 is connected to the water outlet end of the hollow drive shaft 201, and a plurality of spray heads are equidistantly connected to the lower end of the spray pipe 202; a delivery pipe 204, rotatably connected to the water inlet end of the hollow drive shaft 201 through a rotary joint 203; a storage bin 4 with openings at both the upper and lower ends, slidably connected to the fixed frame 1 and located below the spray pipe 202; support blocks 105, symmetrically fixedly connected to the fixed frame 1, and both sides of the storage bin 4 are located on adjacent support blocks 105; a discharge assembly, installed at the lower opening of the storage bin 4; when the silicon material is being cleaned in the storage bin 4, the discharge assembly is in a closed state, and a drain hole 501 is provided on the discharge assembly for discharging the cleaning water; a lifting assembly for lifting the storage bin 4, installed on the fixed frame 1.

[0030] The discharge assembly includes a fixed shaft 405, a semi-circular sealing plate 5, an annular electromagnet 404, and a semi-circular magnet 502. The fixed shaft 405 is fixedly connected to the lower opening of the storage bin 4. The semi-circular sealing plates 5 are symmetrically rotatably connected to the fixed shaft 405. The drain hole 501 is provided on the semi-circular sealing plate 5. A torsion spring is provided between the semi-circular sealing plate 5 and the fixed shaft 405. The annular electromagnet 404 is embedded and installed at the bottom of the storage bin 4, and the semi-circular magnet 502 is embedded and installed on the semi-circular sealing plate 5. When the annular electromagnet 404 is energized, the annular electromagnet 404 will attract the semi-circular magnet 502.

[0031] The lifting assembly includes a rotating shaft 305 and an eccentric wheel 307. The rotating shaft 305 is symmetrically rotatably connected to both sides of the fixed frame 1 and is located below the support block 105. The eccentric wheel 307 is fixedly connected to one end of the rotating shaft 305 close to the storage bin 4. The eccentric wheel 307 intermittently abuts against the storage bin 4. A transmission part for driving the rotating shaft 305 to rotate is connected to the hollow drive shaft 201.

[0032] The transmission part includes a first bevel gear 3, a support plate 301, a transmission shaft 302, a second bevel gear 303, a first sprocket 304 and a second sprocket 306. The first bevel gear 3 is fixedly connected to the hollow drive shaft 201. The support plate 301 is symmetrically and fixedly connected to the fixed frame 1 and is located on both sides of the hollow drive shaft 201. The transmission shaft 302 is rotatably connected to the support plate 301. The second bevel gear 303 is fixedly connected to one end of the transmission shaft 302 close to the hollow drive shaft 201 and meshes with the first bevel gear 3. The first sprocket 304 is fixedly connected to the end of the transmission shaft 302 passing through the fixed frame 1. The second sprocket 306 is fixedly connected to the end of the rotating shaft 305 passing through the fixed frame 1. The first sprocket 304 and the second sprocket 306 are connected by a chain.

[0033] When the cleaning equipment needs to be used to clean the silicon material, first check whether all components of the equipment are firmly installed and whether the connections are normal. Then, energize the annular electromagnet 404. By using its magnetic attraction with the semi-circular magnet 502, the semi-circular sealing plate 5 is tightly attached to the bottom opening of the storage bin 4 to block the bottom opening of the storage bin 4. Then, the silicon material to be cleaned can be put into the storage bin 4.

[0034] Next, connect the delivery pipe 204 to an external clean water delivery device, start the clean water delivery device and the hollow shaft motor 2. The hollow shaft motor 2 drives the hollow drive shaft 201 to rotate, and then drives the spray pipe 202 to rotate, and the spray head fully sprays the silicon material to remove large particle impurities and dust on the surface of the silicon material. During this process, when the hollow drive shaft 201 rotates, the first bevel gear 3 fixedly connected thereto rotates accordingly. The second bevel gear 303 meshing with the first bevel gear 3 drives the transmission shaft 302 to rotate. The first sprocket 304 at the end of the transmission shaft 302 rotates, drives the second sprocket 306 through the chain, and makes the rotating shaft 305 rotate. The eccentric wheel 307 on the rotating shaft 305 rotates, intermittently lifting the storage bin 4 upward. When the eccentric wheel 307 separates from the storage bin 4, the storage bin 4 quickly drops under the action of its own and the silicon material's gravity and impacts the support block 105, generating vibration on the silicon material. The cleaning water and impurities entering the storage bin 4 will pass through the drain holes 501 and be discharged from the storage bin 4 to achieve separation from the silicon material.

[0035] After the pre-cleaning is completed, connect the delivery pipe 204 to an external alkaline cleaning liquid delivery device, and the spray head sprays an alkaline cleaning liquid such as sodium hydroxide on the silicon material to remove the oxide layer and some metal impurities on the surface of the silicon material. During this period, the rotating spray and vibration processes continue to ensure the cleaning effect. The cleaning water and impurities entering the storage bin 4 will pass through the drain holes 501 and be discharged from the storage bin 4 to achieve separation from the silicon material.

[0036] After the caustic washing is completed, connect the delivery pipe 204 to the external pickling cleaning liquid delivery equipment. The spray head sprays acidic cleaning liquids such as hydrochloric acid, nitric acid, and hydrofluoric acid (mixed acids can be used) onto the silicon material. Hydrochloric acid removes metal impurities, nitric acid removes insoluble metal impurities and organic substances, and hydrofluoric acid removes the silicon oxide layer on the surface of the silicon material. At the same time, the equipment continuously rotates for spraying and vibrates for auxiliary cleaning. The cleaning water and impurities that enter the storage bin 4 will pass through the drain holes 501 and be discharged from the storage bin 4 to achieve separation from the silicon material.

[0037] After the pickling is completed, connect the delivery pipe 204 to the external pure water delivery equipment. The spray head sprays pure water onto the silicon material for continuous rinsing to thoroughly remove the chemical reagents and impurity ions remaining on the surface of the silicon material and ensure that the resistivity of the rinsing water meets certain requirements, usually above 18 MΩ·cm, to avoid introducing new impurities. The cleaning water and impurities that enter the storage bin 4 will pass through the drain holes 501 and be discharged from the storage bin 4 to achieve separation from the silicon material.

[0038] After the cleaning is completed, the annular electromagnet 404 can be powered off, and then the limit on the semi-circular sealing plate 5 can be released. Then, the semi-circular sealing plate 5 will be opened under the gravitational force of the silicon material, overcoming the torsion force of the torsion spring. Then, the cleaned silicon material can be discharged through the lower opening of the storage bin 4. During this process, continuously control the vibration of the storage bin 4 to ensure that the silicon material can be fully and quickly discharged from the storage bin 4.

[0039] Compared with the existing cleaning equipment, this equipment combines the two methods of rotary spraying and vibration assistance, changing the problem of the single cleaning method of traditional cleaning equipment. Rotary spraying enables the cleaning liquid to cover the surface of the silicon material in all directions, and vibration assistance increases the contact area between the silicon material and the cleaning liquid, making the cleaning more thorough.

[0040] In each link of pre-cleaning, caustic washing, pickling, and pure water cleaning, rotary spraying and vibration assistance continuously act, effectively removing large particle impurities, oxide layers, various metal impurities, and organic substances on the surface of the silicon material, improving the cleanliness and quality of the silicon material.

[0041] This cleaning equipment works in coordination with components such as the hollow shaft motor 2, transmission components, and electromagnetic control components to achieve the automation of operations such as rotary spraying, vibration assistance, and discharging during the cleaning process, reducing manual intervention, improving the cleaning efficiency, and reducing the labor intensity.

[0042] Example 2:

[0043] Refer to Figures 1-6 , a rotary spraying and vibration-assisted cleaning equipment for silicon material cleaning, is basically the same as Example 1. Further, the diameter of the first bevel gear 3 is larger than the diameter of the second bevel gear 303.

[0044] The diameter of the first bevel gear 3 is larger than that of the second bevel gear 303, forming a speed-increasing effect of the gear drive. When the hollow drive shaft 201 drives the first bevel gear 3 to rotate, the meshing second bevel gear 303 will rotate at a faster speed. The second bevel gear 303 drives the rotating shaft 305 and the eccentric wheel 307 to rotate through transmission components such as the transmission shaft 302 and the sprocket, enabling the eccentric wheel 307 to rotate more quickly.

[0045] The rapid rotation of the eccentric wheel 307 can contact and lift the storage bin 4 more frequently per unit time, enabling the storage bin 4 to obtain a higher-frequency vibration. This high-frequency vibration can make the silicon material shake more fully during the cleaning process, greatly increasing the contact area between the silicon material and the cleaning liquid and improving the cleaning effect. At the same time, the high-frequency vibration also helps the cleaning liquid to penetrate more quickly into the gaps and holes on the surface of the silicon material, effectively removing impurities and further enhancing the cleaning efficiency.

[0046] Example 3:

[0047] Refer to Figures 1-6 For a rotary spraying and vibration-assisted cleaning device for silicon material cleaning, which is basically the same as Example 2. Further, protective covers 104 are symmetrically and fixedly connected to both sides of the fixed frame 1. The first sprocket 304 and the second sprocket 306 are located inside the protective covers 104, which can effectively prevent operators from accidentally contacting the operating sprockets and chains, avoiding safety accidents such as clothing being caught and body collisions, ensuring the personal safety of the operators. Additionally, it can also block impurities such as dust and silicon material debris from entering, preventing them from adhering to the surfaces of the sprockets and chains, reducing wear caused by impurity accumulation, and reducing the situation where the transmission efficiency is affected by dirt, thereby extending the service life of the sprockets and chains.

[0048] Two columns of fixed rods 402 are fixedly connected inside the storage bin 4, and multiple columns of brushes 403 are fixedly connected at equal intervals on the fixed rods 402. When the silicon material is driven to shake in the storage bin 4 by the eccentric wheel 307, it will contact and rub against the brushes 403. The brushes 403 can physically brush the surface of the silicon material, effectively removing some impurities with strong adhesion, such as stubborn oil stains and oxide films. In combination with the chemical cleaning liquid, it acts together from both physical and chemical aspects to further improve the cleaning effect and make the silicon material cleaner.

[0049] Example 4:

[0050] Refer to Figures 1-6, A rotary spray and vibration-assisted cleaning device for silicon material cleaning, which is basically the same as Embodiment 3. Further, a circle of raised protective plates 401 are fixedly connected to the upper opening of the storage bin 4. The inner side of the raised protective plates 401 is inclined downward. Under the action of the eccentric wheel 307, the silicon material in the storage bin 4 will shake greatly. And the raised protective plates 401 form a physical barrier through their height advantage to prevent the silicon material from splashing outward. At the same time, the downward inclination design on the inner side makes it so that when the silicon material touches the protective plate, due to the guidance of the inclined surface, the silicon material will not bounce out of the storage bin 4 due to impact, but will slide back into the bin along the inclined surface, further reducing the risk of the silicon material falling. This not only ensures the integrity of the silicon material cleaning process, prevents incomplete cleaning caused by the falling of the silicon material, but also reduces the waste of the silicon material, avoids pollution to the surrounding environment of the equipment caused by the scattered silicon material, and ensures the cleanliness and safety of the production site.

[0051] The conveying pipe 204 is a three-way pipe, and one-way valves are provided in both input ends of the conveying pipe 204. In the conventional cleaning stage, the one-way valves can ensure that different cleaning liquids, such as clean water, alkaline cleaning liquid, and acidic cleaning liquid, flow into from the corresponding input ends according to the set path, ensuring the smooth progress of the cleaning process and maintaining the stability and accuracy of each cleaning link. After the cleaning is completed, at this time, a heat source can be connected to the other input end of the conveying pipe 204 to convey hot air into the spray pipe 202. The one-way valves prevent the hot air from flowing reversely into other cleaning liquid input paths, ensuring that the hot air flows stably and efficiently to the spray pipe 202. The hot air sprays out from the spray heads of the spray pipe 202 and evenly covers the silicon material to achieve the drying treatment of the silicon material. This design ingeniously integrates the cleaning and drying functions into the same conveying system, eliminating the need for additional complex drying equipment, simplifying the equipment structure, saving space while improving the functionality and practicality of the equipment, and significantly enhancing the overall efficiency of the silicon material cleaning process.

[0052] Embodiment 5:

[0053] Refer to Figures 1-6 , A rotary spray and vibration-assisted cleaning device for silicon material cleaning, which is basically the same as Embodiment 4. Further, a water collection bin 101 is provided below the storage bin 4 inside the fixed frame 1. The water collection bin 101 is directly below the drain hole 501. One side of the water collection bin 101 is connected to a drain valve pipe. A drainage plate 102 inclined towards the drain valve pipe is fixedly connected to the bottom inside the water collection bin 101. Collection boxes 103 are placed on both sides of the water collection bin 101 on the fixed frame 1.

[0054] The water collecting bin 101 is located below the storage bin 4 and exactly below the drain hole 501, and can accurately collect all the cleaning water discharged from the drain hole 501 during the cleaning process, preventing the cleaning water from splashing everywhere, maintaining the dry and clean environment around the equipment, and reducing the risk of failures such as short circuits and corrosion of the equipment caused by water stains. The drain valve pipe connected to one side of it facilitates the centralized control of the discharge of the cleaning water. According to actual needs, such as timed discharge or unified discharge after the cleaning process is completed, the operation is flexible and convenient.

[0055] The drainage plate 102 at the inner bottom of the water collecting bin 101 slopes towards the drain valve pipe, greatly accelerating the discharge speed of the cleaning water. The cleaning water quickly flows towards the drain valve pipe along the inclined surface of the drainage plate 102, reducing the residue of the cleaning water in the water collecting bin 101 and decreasing the possibility of impurity precipitation and accumulation, facilitating the subsequent cleaning and maintenance of the water collecting bin 101.

[0056] When the cleaning is completed and the semi-circular sealing plate 5 is opened, when the silicon material falls to both sides along the semi-circular sealing plate 5 due to gravity, the collection box 103 can accurately catch the silicon material, preventing the silicon material from directly falling to the ground and causing damage, deformation or re-contamination of the surface with impurities, ensuring the quality of the silicon material after cleaning to a great extent. The setting of the collection box 103 makes the transfer and subsequent processing of the silicon material more convenient. The collection box 103 can be directly transported to the subsequent processing area or storage location without the need for cumbersome secondary handling operations, reducing the risk of damage to the silicon material during the transfer process and optimizing the entire production operation process.

[0057] The above are only the preferred embodiments of the present invention and do not impose any form of limitation on the present invention. Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention.

Claims

1. A rotary spraying and vibration-assisted cleaning device for silicon material cleaning, characterized in that, It includes a fixed frame (1), and further includes: A hollow shaft motor (2), fixedly connected to the upper end of the fixed frame (1); A hollow drive shaft (201), vertically and fixedly connected inside the hollow shaft motor (2); A spray pipe (202), installed at the lower end of the hollow drive shaft (201), the water inlet end of the spray pipe (202) is connected to the water outlet end of the hollow drive shaft (201), and a plurality of spray heads are equidistantly connected to the lower end of the spray pipe (202); A delivery pipe (204), rotatably connected to the water inlet end of the hollow drive shaft (201) through a rotary joint (203); A storage bin (4) with openings at both the upper and lower ends, slidably connected to the fixed frame (1) and located below the spray pipe (202); Support blocks (105), symmetrically and fixedly connected to the fixed frame (1), and both sides of the storage bin (4) are located on adjacent support blocks (105); A discharging assembly, installed at the lower opening of the storage bin (4); When the silicon material is being cleaned in the storage bin (4), the discharging assembly is in a closed state, and a drain hole (501) is provided on the discharging assembly for discharging the cleaning water; A lifting assembly for lifting the storage bin (4), installed on the fixed frame (1).

2. The rotary spray and vibration-assisted cleaning equipment for silicon material cleaning according to claim 1, characterized in that, The discharging assembly includes a fixed shaft (405), a semi-circular sealing plate (5), a ring-shaped electromagnet (404), and a semi-circular magnet (502). The fixed shaft (405) is fixedly connected to the lower opening of the storage bin (4). The semi-circular sealing plates (5) are symmetrically and rotatably connected to the fixed shaft (405). The drain hole (501) is provided on the semi-circular sealing plate (5). A torsion spring is provided between the semi-circular sealing plate (5) and the fixed shaft (405). The ring-shaped electromagnet (404) is embedded and installed at the bottom of the storage bin (4), and the semi-circular magnet (502) is embedded and installed on the semi-circular sealing plate (5). When the ring-shaped electromagnet (404) is energized, the ring-shaped electromagnet (404) will attract the semi-circular magnet (502).

3. A rotary spray and vibration-assisted cleaning device for silicon material cleaning according to claim 1, characterized in that, The lifting assembly includes a rotating shaft (305) and an eccentric wheel (307). The rotating shaft (305) is symmetrically and rotatably connected to both sides of the fixed frame (1) and is located below the support block (105). The eccentric wheel (307) is fixedly connected to one end of the rotating shaft (305) close to the storage bin (4). The eccentric wheel (307) intermittently abuts against the storage bin (4). A transmission part for driving the rotating shaft (305) to rotate is connected to the hollow drive shaft (201).

4. The rotary spraying and vibration-assisted cleaning equipment for silicon material cleaning according to claim 3, characterized in that, The transmission part includes a first bevel gear (3), a support plate (301), a transmission shaft (302), a second bevel gear (303), a first sprocket (304) and a second sprocket (306). The first bevel gear (3) is fixedly connected to the hollow drive shaft (201). The support plate (301) is symmetrically and fixedly connected to the fixed frame (1) and is located on both sides of the hollow drive shaft (201). The transmission shaft (302) is rotatably connected to the support plate (301). The second bevel gear (303) is fixedly connected to one end of the transmission shaft (302) close to the hollow drive shaft (201) and meshes with the first bevel gear (3). The first sprocket (304) is fixedly connected to one end of the transmission shaft (302) passing through the fixed frame (1). The second sprocket (306) is fixedly connected to one end of the rotating shaft (305) passing through the fixed frame (1). The first sprocket (304) and the second sprocket (306) are connected by a chain.

5. A rotary spray and vibration-assisted cleaning device for silicon material cleaning according to claim 4, characterized in that, The diameter of the first bevel gear (3) is larger than that of the second bevel gear (303).

6. A rotary spraying and vibration-assisted cleaning device for silicon material cleaning according to claim 4, characterized in that, Protective covers (104) are symmetrically and fixedly connected to both sides of the fixed frame (1). The first sprocket (304) and the second sprocket (306) are located inside the protective covers (104).

7. A rotary spraying and vibration-assisted cleaning device for silicon material cleaning according to claim 1, characterized in that, Two columns of fixed rods (402) are fixedly connected inside the storage bin (4). Multiple columns of brushes (403) are equidistantly and fixedly connected to the fixed rods (402).

8. A rotary spraying and vibration-assisted cleaning device for silicon material cleaning according to claim 1, characterized in that, A circle of raised protective plates (401) is fixedly connected to the upper opening of the storage bin (4). The inner side of the raised protective plates (401) is inclined downward.

9. A rotary spray and vibration-assisted cleaning device for silicon material cleaning according to claim 1, characterized in that, The delivery pipe (204) is a tee pipe, and check valves are arranged in both input ends of the delivery pipe (204).

10. The rotational spraying and vibration-assisted cleaning device for silicon material cleaning according to claim 1, characterized in that, A water collecting bin (101) is arranged below the storage bin (4) inside the fixed frame (1). The water collecting bin (101) is directly below the drain hole (501). One side of the water collecting bin (101) is connected to a drain valve pipe. A drainage plate (102) inclined towards the drain valve pipe is fixedly connected to the inner bottom of the water collecting bin (101). Collection boxes (103) are placed on both sides of the water collecting bin (101) on the fixed frame (1).

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