Liquid supply barrel and liquid supply device

Abstract

The invention relates to a liquid supply barrel and a liquid supply device. The liquid supply barrel comprises a barrel body, one end of the barrel body is provided with a first opening, and the other opposite end of the barrel body is provided with a bottom wall; the cover plate covers the first opening of the barrel body and is provided with a liquid outlet, a liquid inlet and an exhaust port which are controllably closed or opened; the inner bag body is arranged in the inner cavity of the barrel body, a control cavity is formed between the inner bag body and the bottom wall, the inner bag body is provided with a containing cavity used for storing liquid medicine and a second opening communicated with the containing cavity, and the second opening is located in the end, facing the first opening, of the inner bag body; wherein the control cavity is constructed to be controllably inflated with gas or vacuumized, and when the gas is inflated into the control cavity, the inner bag body shrinks under the action of positive pressure in the control cavity; and when the control cavity is vacuumized, the inner bag body expands under the action of negative pressure in the control cavity.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor equipment, and specifically relates to a liquid supply barrel and a liquid supply device. Background Art

[0002] The semiconductor industry requires a lot of chemical solutions. For example, in the lithography process, a liquid supply device is needed to provide chemical solutions for processing wafers such as etching, including but not limited to edge removal liquid and organic solvent-based chemical solutions. However, when the traditional liquid supply device supplies liquid, bubbles will be generated in the chemical solution, which has an adverse effect on the quality of the wafers. Summary of the Invention

[0003] Based on this, it is necessary to provide a liquid supply barrel and a liquid supply device that can avoid generating bubbles in the chemical solution and thus improve the quality of the wafers in view of the above problems.

[0004] A liquid supply barrel, comprising:

[0005] A barrel body, one end of the barrel body has a first opening, and the opposite end has a bottom wall;

[0006] A cover plate, covering the first opening of the barrel body, and having a liquid outlet, a liquid inlet, and an exhaust port that can be controlled to be closed or opened; and

[0007] An inner bladder, disposed in the inner cavity of the barrel body, and forming a control cavity with the bottom wall. The inner bladder has a receiving cavity for storing the chemical solution and a second opening communicating with the receiving cavity. The second opening is located at one end of the inner bladder facing the first opening;

[0008] Wherein, the control cavity is configured to be controllably filled with gas or evacuated. When the control cavity is filled with gas, the inner bladder shrinks towards the cover plate under the positive pressure in the control cavity; when the control cavity is evacuated, the inner bladder expands towards the bottom wall under the negative pressure in the control cavity.

[0009] In some embodiments, the liquid supply barrel further includes a fixing member, the fixing member is fixedly connected to the end of the barrel body having the first opening, one end of the inner bladder having the second opening is fixedly connected to the fixing member, and the fixing member has a third opening communicating with the second opening.

[0010] In some embodiments, the liquid supply barrel further includes a movable member disposed in the inner cavity of the barrel body. One end of the inner bladder facing the bottom wall is fixedly connected to the movable member, and the movable member and the bottom wall form the control cavity; the movable member can move closer to or away from the cover plate under the positive or negative pressure in the control cavity.

[0011] In some of these embodiments, the circumferential side wall of the inner capsule body is pleated.

[0012] In some of these embodiments, the liquid supply barrel further includes a first induction sensor, a second induction sensor, and an induction element. The first induction sensor and the second induction sensor are installed on the barrel body, and the second induction sensor is closer to the cover plate than the first induction sensor. The induction element is installed on the movable member; both the first induction sensor and the second induction sensor can detect the passing induction element.

[0013] In some of these embodiments, when the first induction sensor detects the induction element, the control cavity stops evacuating; when the second induction sensor detects the induction element, the control cavity stops introducing gas.

[0014] In some of these embodiments, the liquid supply barrel further includes a third induction sensor installed on the barrel body, and the third induction sensor is closer to the cover plate than the second induction sensor.

[0015] In some of these embodiments, the induction element is a magnetic ring, and the first induction sensor, the second induction sensor, and the third induction sensor are magnetic switches.

[0016] In some of these embodiments, the barrel body further has a ventilation port communicating with the control cavity, and the ventilation port is used to connect to an external gas path.

[0017] A liquid supply device includes the liquid supply barrel as described in any of the above embodiments.

[0018] In the actual use process of the above liquid supply barrel and liquid supply device, when liquid supply is required, the liquid outlet, the liquid inlet, and the exhaust port are closed, and gas is introduced into the control cavity, so that the control cavity is in a positive pressure state and the air pressure gradually increases, thereby pushing the inner capsule body to gradually contract toward the cover plate. At this time, the liquid outlet is opened, and due to the contraction of the inner capsule body, the liquid medicine in the accommodation cavity of the inner capsule body is output from the liquid outlet, that is, liquid supply is achieved.

[0019] When it is necessary to add liquid medicine to the inner capsule, the liquid outlet, liquid inlet and exhaust port are closed, and the control chamber is evacuated, so that the control chamber is in a negative pressure state and the vacuum degree gradually increases, thereby driving the inner capsule to gradually expand toward the bottom wall. At this time, the liquid inlet is opened, and due to the expansion of the inner capsule, the external liquid medicine can be added to the receiving chamber of the inner capsule through the liquid inlet. After the liquid medicine is added, the liquid inlet is closed, and the control chamber is continuously evacuated for a period of time, and the control chamber is in a negative pressure state for a period of time. During this process, the bubbles in the receiving chamber of the inner capsule float up and gather at the top of the receiving chamber of the inner capsule. Then, gas is introduced into the control chamber, that is, the control chamber is pre-pressurized. Then, the exhaust port is opened, and the bubbles gathered at the top of the receiving chamber of the inner capsule are discharged from the exhaust port. After the bubbles are removed, the exhaust port is closed and the liquid supply is waited for.

[0020] In this way, in the liquid supply barrel of the present application, after each addition of medical liquid into the inner capsule, the bubbles in the medical liquid in the inner capsule will float to the top of the receiving chamber of the inner capsule. At this time, the control chamber is pre-pressurized and the exhaust port is opened, so that the bubbles at the top of the receiving chamber of the inner capsule are discharged from the exhaust port, thereby debubbling the medical liquid and ensuring that the medical liquid provided to the downstream does not contain bubbles, which is beneficial to improving the quality of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the structure of a liquid supply barrel in one embodiment of the present application;

[0022] Figure 2 for Figure 1 A cross-sectional view of the liquid supply barrel shown (the inner bladder is in a full liquid state);

[0023] Figure 3 for Figure 1 The cross-sectional view of the liquid supply barrel is shown (the inner capsule is in a state where liquid medicine needs to be added). DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0025] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application.

[0026] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present application, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0027] In the present application, unless otherwise clearly specified and limited, the terms "mounted", "connected", "coupled", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0028] In the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0029] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there can also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0030] Please refer to Figure 1 and Figure 2 This application provides a liquid supply bucket, including a bucket body 10, a cover plate 20 and an inner bladder 30. One end of the bucket body 10 has a first opening 11, and the opposite end has a bottom wall 13. The cover plate 20 is covered at the first opening 11 of the bucket body 10, so that the inner cavity of the bucket body 10 is in a sealed state. The inner bladder 30 is disposed in the inner cavity of the bucket body 10, and a control cavity A is formed between the inner bladder 30 and the bottom wall 13. The inner bladder 30 has a receiving cavity B for storing liquid medicine and a second opening 31 communicating with the receiving cavity B. The second opening 31 is located at one end of the inner bladder 30 facing the first opening 11. The cover plate 20 has a liquid outlet a1, a liquid inlet a2 and an exhaust port a3 that can be controlled to be closed or opened, so that the liquid outlet a1, the liquid inlet a2 and the exhaust port a3 can all communicate with the receiving cavity B of the inner bladder 30. Thus, the liquid medicine in the receiving cavity B of the inner bladder 30 can be output through the liquid outlet a1, the external liquid medicine can be added to the receiving cavity B of the inner bladder 30 through the liquid inlet a2, and the air bubbles in the receiving cavity B of the inner bladder 30 can be discharged from the exhaust port a3. The control cavity A is configured to be controllably filled with gas or evacuated. When gas is introduced into the control cavity A, the control cavity A is in a positive pressure state. As the air pressure in the control cavity A increases, the inner bladder 30 gradually contracts toward the cover plate 20 under the positive pressure in the control cavity A, so that the volume of the receiving cavity B of the inner bladder 30 gradually decreases, thereby outputting the liquid medicine in the receiving cavity B of the inner bladder 30 from the liquid outlet a1. When the control cavity A is evacuated, the control cavity A is in a negative pressure state, and the degree of vacuum in the control cavity A increases, so that the inner bladder 30 gradually expands toward the bottom wall 13 under the negative pressure in the control cavity A, so that the volume of the receiving cavity B of the inner bladder 30 gradually increases, thereby enabling the liquid medicine to be added to the receiving cavity B of the inner bladder 30 through the liquid inlet a2.

[0031] In the actual use process of the above liquid supply bucket, when liquid supply is required, the liquid outlet a1, the liquid inlet a2 and the exhaust port a3 are closed, and gas is introduced into the control cavity A to make the control cavity A in a positive pressure state and the air pressure gradually increase, thereby pushing the inner bladder 30 to gradually contract toward the cover plate 20. At this time, the liquid outlet a1 is opened, and since the inner bladder 30 contracts, the liquid medicine in the receiving cavity B of the inner bladder 30 is output from the liquid outlet a1, that is, liquid supply is achieved.

[0032] When it is necessary to add liquid medicine into the inner capsule body 30, the liquid outlet a1, the liquid inlet a2 and the exhaust port a3 are closed, and the control cavity A is evacuated, so that the control cavity A is in a negative pressure state and the degree of vacuum gradually increases, thereby driving the inner capsule body 30 to gradually expand towards the bottom wall 13. At this time, the liquid inlet a2 is opened. Since the inner capsule body 30 expands, the external liquid medicine can be added into the receiving cavity B of the inner capsule body 30 through the liquid inlet a2. After the liquid medicine is added, the liquid inlet a2 is closed, and the control cavity A is evacuated for a period of time, and the control cavity A remains in a negative pressure state for a period of time. During this process, the bubbles in the receiving cavity B of the inner capsule body 30 float up and gather at the top of the receiving cavity B of the inner capsule body 30. Then, gas is introduced into the control cavity A, that is, the control cavity A is pre-pressurized. Then, the exhaust port a3 is opened, and the bubbles gathered at the top of the receiving cavity B of the inner capsule body 30 are discharged from the exhaust port a3. After the bubbles are exhausted, the exhaust port a3 is closed, and wait for liquid supply.

[0033] In this way, for the liquid supply barrel of the present application, after each addition of liquid medicine into the inner capsule body 30, the bubbles in the liquid medicine in the inner capsule body 30 will float to the top of the receiving cavity B of the inner capsule body 30. At this time, the control cavity A is pre-pressed, and the exhaust port a3 is opened, so that the bubbles at the top of the receiving cavity B of the inner capsule body 30 are discharged from the exhaust port a3, that is, defoaming of the liquid medicine is realized, ensuring that the liquid medicine provided to the downstream does not contain bubbles, which is beneficial to improving the quality of the wafer.

[0034] It should be noted that the specific steps of the above liquid supply, liquid medicine addition and exhaust of bubbles are not limited to this. For example, when exhausting at the exhaust port a3, the liquid outlet a1 can also be opened at the same time (to prevent the liquid medicine from being discharged from the exhaust port a3 due to excessive contraction of the inner capsule body 30), as long as the corresponding functions can be realized, which is not limited here.

[0035] It is understandable that the liquid outlet a1 is used to connect to the liquid supply pipeline, so that the liquid medicine output from the liquid outlet a1 enters the liquid supply pipeline and is then transported by the liquid supply pipeline to the downstream wafer processing equipment. The wafer processing equipment processes the wafer with the liquid medicine, such as etching the wafer. The liquid inlet a2 is used to communicate with the liquid medicine source (such as a storage tank for storing the liquid medicine) through the liquid addition pipeline, so that the liquid medicine provided by the liquid medicine source can be added into the inner bladder 30 through the liquid addition pipeline and the liquid inlet a2. The exhaust port a3 can also be connected to an external exhaust pipeline, so that the bubbles discharged from the exhaust port a3 can be centrally collected and processed through the exhaust pipeline. Further, a control valve can be used to automatically control the opening or closing of the liquid outlet a1. Of course, a manual valve can also be used to manually control the opening or closing of the liquid outlet a1, which is not limited here. Similarly, a control valve can be used to automatically control the opening or closing of the liquid inlet a2. Of course, a manual valve can also be used to manually control the opening or closing of the liquid inlet a2, which is not limited here. A control valve can be used to automatically control the opening or closing of the exhaust port a3. Of course, a manual valve can also be used to manually control the opening or closing of the exhaust port a3, which is not limited here.

[0036] It should also be noted that by introducing gas (such as compressed air) into the control chamber A, the air pressure in the control chamber A gradually increases, thereby pushing the inner bladder 30 to contract towards the cover plate 20, and further enabling the liquid medicine in the receiving chamber B of the inner bladder 30 to be output from the liquid outlet a1. Compared with the pumping scheme in the prior art, since the power source for driving the liquid medicine to be output from the liquid outlet a1 in this application is the air pressure in the control chamber A, the transported liquid medicine will not generate pulses, that is, pulse-free liquid supply is achieved.

[0037] Specifically in the embodiment, the barrel body 10 also has a ventilation port a4 communicating with the control chamber A, and this ventilation port a4 is used to connect to an external air path. In this way, the external air path can input compressed air into the control chamber A through this ventilation port a4, so that the control chamber A is in a positive pressure state and the air pressure gradually increases. The external air path can also evacuate the control chamber A through this ventilation port a4, so that the control chamber A is in a negative pressure state and the degree of vacuum gradually increases.

[0038] Specifically in the embodiment, a filter is connected at the liquid inlet a2, so as to filter the liquid medicine entering the inner bladder 30 from the liquid inlet a2 by using the filter, and prevent foreign objects or impurities from entering the inner bladder 30 and causing damage to the inner bladder 30. It is understandable that the filter can be installed inside the liquid inlet a2 or on the pipeline connected to the liquid inlet a2, as long as it can filter the liquid medicine entering the inner bladder 30, which is not limited here.

[0039] In the embodiment of the present application, the liquid supply barrel further comprises a fixing member 40, which is fixedly connected to one end of the barrel body 10 having the first opening 11, and one end of the inner capsule 30 having the second opening 31 is fixedly connected to the fixing member 40. The fixing member 40 has a third opening 41 connected to the second opening 31, so that the liquid outlet a1, the liquid inlet a2 and the exhaust port a3 can all be connected to the receiving cavity B of the inner capsule 30 through the first opening 11, the second opening 31 and the third opening 41. In this way, one end of the inner capsule 30 facing the cover plate 20 is fixedly connected to the fixing member 40, so that the inner capsule 30 is contracted or expanded by moving one end of the inner capsule 30 toward the bottom wall 13, so that the contraction and expansion of the inner capsule 30 are more stable and reliable.

[0040] Furthermore, the barrel body 10 also has a mounting flange 12 arranged around the first opening 11. The fixing member 40 is annular and supported on the mounting flange 12. The cover plate 20 is covered on the side of the fixing member 40 away from the mounting flange 12, and the cover plate 20 and the fixing member 40 are locked and fixed on the mounting flange 12 by fasteners, thereby achieving the fixation of the cover plate 20, the fixing member 40 and the barrel body 10. Optionally, the fastener can be a bolt.

[0041] Furthermore, a first sealing ring is arranged between the cover plate 20 and the fixing member 40, and a second sealing ring is arranged between the fixing member 40 and the mounting flange 12, so that when the cover plate 20 and the fixing member 40 are locked and fixed on the mounting flange 12 by fasteners, the cover plate 20 and the fixing member 40 jointly squeeze the first sealing ring, so that the first sealing ring seals the gap between the cover plate 20 and the fixing member 40, thereby preventing the medicine liquid in the inner capsule 30 from leaking from the gap; at the same time, the fixing member 40 and the mounting flange 12 jointly squeeze the second sealing ring, so that the second sealing ring seals the gap between the fixing member 40 and the mounting flange 12, thereby preventing the gas in the barrel body 10 from leaking from the gap.

[0042] Specifically in the embodiment, the liquid supply barrel also includes a liquid outlet pipe 60, one end of which is installed on the liquid outlet a1 on the cover plate 20, and the other end passes through the third opening 41 of the fixing member 40 and the second opening 31 of the inner capsule 30, and extends into the accommodating cavity B of the inner capsule 30, thereby ensuring that the end of the liquid outlet pipe 60 away from the cover plate 20 is always below the liquid level of the medicine.

[0043] In an embodiment of the present application, the liquid supply barrel further includes a movable member 50 disposed in the receiving cavity B of the barrel body 10. One end of the inner bladder 30 facing the bottom wall 13 is fixedly connected to the movable member 50. The control cavity A is formed between the movable member 50 and the bottom wall 13. The movable member 50 can move closer to or away from the cover plate 20 under the action of positive pressure or negative pressure in the control cavity A. That is to say, when gas is introduced into the control cavity A, the control cavity A is in a positive pressure state and the air pressure gradually increases, thereby pushing the movable member 50 to move towards the cover plate 20, and then compressing the inner bladder 30. When the control cavity A is evacuated, the control cavity A is in a negative pressure state and the degree of vacuum gradually increases, thereby driving the movable member 50 to move towards the bottom wall 13 (i.e., move away from the cover plate 20), and then stretching the inner bladder 30, so that the inner bladder 30 expands towards the bottom wall 13.

[0044] Specifically in the embodiment, the circumferential side wall of the inner bladder 30 is in a corrugated shape, so that the movable member 50 can drive the inner bladder 30 to contract or expand more smoothly.

[0045] Optionally, the material of the inner bladder 30 can be PTFE (polytetrafluoroethylene) to ensure better lubricity and corrosion resistance.

[0046] In an embodiment of the present application, the liquid supply barrel further includes a first induction sensor b1, a second induction sensor b2 and an induction member 51. The first induction sensor b1 and the second induction sensor b2 are installed on the barrel body 10, and the second induction sensor b2 is closer to the cover plate 20 than the first induction sensor b1. The induction member 51 is installed on the movable member 50, and both the first induction sensor b1 and the second induction sensor b2 can detect the passing induction member 51. Thus, when the first induction sensor b1 detects the induction member 51 on the movable member 50 (see Figure 2 ), it indicates that the movable member 50 has moved to the position of the first induction sensor b1. At this time, the inner bladder 30 is in a full liquid state (that is, the inner bladder 30 expands to the maximum and holds the most liquid medicine), and it is necessary to stop evacuating the control cavity A to stop adding liquid medicine. When the second induction sensor b2 detects the induction member 51 on the movable member 50 (see Figure 3 ), it indicates that the movable member 50 has moved to the position of the second induction sensor b2. At this time, the inner bladder 30 has a large degree of contraction and the amount of liquid medicine contained in the inner bladder 30 is small. It is necessary to stop introducing gas into the control cavity A to stop supplying liquid.

[0047] Further, the liquid supply bucket further includes a third induction sensor b3 installed on the bucket body 10, and the third induction sensor b3 is closer to the cover plate 20 than the second induction sensor b2. Thus, when the third induction sensor b3 detects the induction member 51 on the movable member 50, it indicates that the movable member 50 has moved to the position of the third induction sensor b3, and the inner bladder 30 is in the limit state of contraction and cannot be further contracted. Therefore, at this time, it is necessary to stop introducing gas into the control chamber A to avoid the movable member 50 from continuously squeezing the inner bladder 30.

[0048] Optionally, the induction member 51 can be a magnetic ring, and the first induction sensor b1, the second induction sensor b2, and the third induction sensor b3 can adopt magnetic switches. Of course, in other embodiments, the first induction sensor b1, the second induction sensor b2, and the third induction sensor b3 can also adopt other contact or non-contact sensors, as long as they can detect the position of the induction member 51, and no special limitation is made here.

[0049] Based on the above liquid supply bucket, the present application further provides a liquid supply device. The liquid supply device includes a liquid supply bucket and a liquid supply pipeline, and the liquid supply pipeline is connected to the liquid outlet a1 on the cover plate 20 for transporting the liquid medicine output from the liquid outlet a1 to the downstream wafer processing equipment, that is, for providing liquid medicine for the wafer processing equipment.

[0050] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0051] The above-described embodiments only represent several implementation manners of the present application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several deformations and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A liquid supply bucket, characterized in that, Comprising: A barrel body (10), one end of the barrel body (10) has a first opening (11), and the opposite end has a bottom wall (13); A cover plate (20), covering the first opening (11) of the barrel body (10), and having a liquid outlet (a1), a liquid inlet (a2) and a vent port (a3) that can be controllably closed or opened; and An inner bladder (30), disposed in the inner cavity of the barrel body (10), and a control cavity (A) is formed between the inner bladder (30) and the bottom wall (13). The inner bladder (30) has a receiving cavity (B) for storing the liquid medicine and a second opening (31) communicating with the receiving cavity (B). The second opening (31) is located at one end of the inner bladder (30) facing the first opening (11); Wherein, the control cavity (A) is configured to be controllably filled with gas or evacuated. When gas is introduced into the control cavity (A), the inner bladder (30) contracts towards the cover plate (20) under the positive pressure in the control cavity (A); when the control cavity (A) is evacuated, the inner bladder (30) expands towards the bottom wall (13) under the negative pressure in the control cavity (A).

2. The liquid supply bucket according to claim 1, characterized in that, The liquid supply barrel further includes a fixing member (40), the fixing member (40) is fixedly connected to the end of the barrel body (10) having the first opening (11), one end of the inner bladder (30) having the second opening (31) is fixedly connected to the fixing member (40), and the fixing member (40) has a third opening (41) communicating with the second opening (31).

3. The liquid supply bucket according to claim 1, characterized in that, The liquid supply barrel further includes a movable member (50) disposed in the inner cavity of the barrel body (10). One end of the inner bladder (30) facing the bottom wall (13) is fixedly connected to the movable member (50), and the control cavity (A) is formed between the movable member (50) and the bottom wall (13); the movable member (50) can move closer to or away from the cover plate (20) under the positive or negative pressure in the control cavity (A).

4. The liquid supply barrel according to claim 3, characterized in that, The circumferential side wall of the inner bladder (30) is in a corrugated shape.

5. The liquid supply barrel according to claim 3, characterized in that, The liquid supply barrel further includes a first induction sensor (b1), a second induction sensor (b2) and an induction member (51). The first induction sensor (b1) and the second induction sensor (b2) are installed on the barrel body (10), and the second induction sensor (b2) is closer to the cover plate (20) than the first induction sensor (b1). The induction member (51) is installed on the movable member (50); both the first induction sensor (b1) and the second induction sensor (b2) can detect the passing induction member (51).

6. The liquid supply barrel according to claim 5, characterized in that, When the first induction sensor (b1) detects the induction member (51), the control cavity (A) stops being evacuated; when the second induction sensor (b2) detects the induction member (51), the control cavity (A) stops being filled with gas.

7. The liquid supply bucket according to claim 5, characterized in that, The liquid supply bucket further includes a third induction sensor (b3) installed on the bucket body (10), and the third induction sensor (b3) is closer to the cover plate (20) than the second induction sensor (b2).

8. The liquid supply bucket according to claim 7, characterized in that, The induction element (51) is a magnetic ring, and the first induction sensor (b1), the second induction sensor (b2) and the third induction sensor (b3) are magnetic switches.

9. The liquid supply bucket according to claim 1, characterized in that, The bucket body (10) further has a ventilation port (a4) communicating with the control chamber (A), and the ventilation port (a4) is used for connecting to an external gas circuit.

10. A liquid supply device, characterized in that, It includes the liquid supply bucket according to any one of claims 1 to 9.

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