A kind of evaporation equipment

Abstract

The application provides a kind of evaporation equipment, including process chamber and multiple evaporation components, evaporation component includes fixed seat, flexible connecting pipe, movable seat and evaporation source, fixed seat is fixedly connected with process chamber, fixed seat has with process chamber interior communication first communication hole, movable seat has second communication hole, the first end of second communication hole is connected with evaporation source, the second end of second communication hole is communicated with first communication hole by flexible connecting pipe, further include multiple adjusting structure, multiple adjusting structure is distributed in the outside of flexible connecting pipe, the first connecting end and the second connecting end of adjusting structure are connected with movable seat and fixed seat respectively, adjusting structure can respond to telescopic adjusting signal and adjust the distance between the first connecting end and the second connecting end, change the distance and angle between evaporation source and fixed seat.The evaporation equipment provided by the application can automatically adjust the distance and angle between the evaporation source and the base through the adjusting structure, improve the flexibility and convenience of the evaporation component.

Description

Technical Field

[0001] The present invention relates to the field of evaporation equipment, and in particular to an evaporation equipment. Background Art

[0002] In the field of vacuum evaporation equipment manufacturing technology, the evaporation source is one of the core elements of the evaporation equipment. Its main function is to evaporate the raw materials, make the vapor of the raw materials contact with the substrate, and deposit on the substrate in the form of a thin film.

[0003] Different deposition processes require different optimal distances and angles between the evaporation source and the substrate. To adapt these distances and angles to suit different process requirements, existing solutions primarily isolate the evaporation source and combine it with various chamber types as a replaceable module outside the process chamber. This allows for the creation of evaporation modules of varying specifications, which can then be replaced to adjust the distance and angle between the evaporation source and the substrate in existing deposition equipment.

[0004] However, although the existing solution for replacing the evaporation module can flexibly adjust the position of the evaporation source to a certain extent, it usually requires complex manual operations to load and unload the replaced evaporation module, resulting in low efficiency and high labor costs in the evaporation source adjustment process; and evaporation modules of different specifications require cavities of different shapes and sizes. For evaporation equipment with a rich variety of processes, the evaporation module cavities are of various types, resulting in high manufacturing costs and difficult warehouse management of the evaporation equipment; moreover, manual loading and unloading of the evaporation module is easily affected by human factors, resulting in poor stability of the evaporation module, which in turn affects process consistency; in addition, due to the unavoidable process errors in the manufacture of different process chambers, the same evaporation module will also have poor consistency when used in different process chambers.

[0005] Therefore, how to provide an evaporation source position adjustment solution that is convenient to operate and has good stability has become a technical problem that needs to be urgently solved in this field. Summary of the Invention

[0006] The present invention aims to address, to a certain extent, one of the technical problems in the related art. To this end, the present invention provides an evaporation device that can adjust the distance and angle between the evaporation source and the base by varying the length of the portion of the adjustment structure connected between the movable base and the fixed base, thereby enabling a single evaporation assembly to be used in a variety of different evaporation processes.

[0007] To achieve the above objectives, as one aspect of the present invention, there is provided an evaporation apparatus comprising a process chamber, a base, a control device, and a plurality of evaporation assemblies, wherein the base is disposed in the process chamber, and the outer wall of the process chamber has a plurality of evaporation through-holes. The evaporation assembly comprises a fixed seat, a flexible connecting tube, a movable seat, and an evaporation source. The fixed seat is configured to be fixedly connected to the process chamber and has a first communicating hole for communicating with the interior of the process chamber. The first communicating holes of the plurality of fixed seats are respectively connected to the plurality of evaporation through-holes. The movable seat has a second communicating hole, a first end of the second communicating hole being connected to the evaporation source, and a second end of the second communicating hole being connected to the first communicating hole via the flexible connecting tube. The evaporation assembly further comprises a plurality of adjustment structures, the plurality of adjustment structures being distributed outside the flexible connecting tube, and the first and second connecting ends of the adjustment structures being respectively connected to the movable seat and the fixed seat. The control device is configured to send an extension and contraction adjustment signal to the adjustment structures of the plurality of evaporation assemblies, so that each adjustment structure can adjust the distance between its first and second connecting ends in response to the extension and contraction adjustment signal, thereby changing the distance and angle between the evaporation source and the fixed seat.

[0008] Optionally, the evaporation component further includes a plurality of chamber fixing screws, a plurality of chamber fixing through holes are formed in the fixing seat, the nail rods of the plurality of chamber fixing screws pass through the plurality of chamber fixing through holes one by one, and the plurality of chamber fixing screws are used to screw into the threaded holes on the outer wall of the process chamber to fix the evaporation component on the process chamber.

[0009] Optionally, the movable seat has a plurality of first mounting through holes, and the plurality of first mounting through holes are distributed around the second connecting hole of the movable seat. The evaporation source has a mounting flange, and the mounting flange has a plurality of second mounting through holes. The mounting flange is overlapped with the movable seat and is fixedly connected to the movable seat by mounting fasteners that pass through the plurality of first mounting through holes and the plurality of second mounting through holes in sequence in a one-to-one correspondence.

[0010] Optionally, the mounting fastener is a bolt.

[0011] Optionally, the adjustment structure includes a rotary drive structure, a screw rod, a threaded fitting, and a universal joint, wherein the rotary drive structure is connected to the first end of the screw rod, the second end of the screw rod is connected to the first end of the universal joint, the second end of the universal joint forms the second connection end of the adjustment structure, and the threaded fitting is sleeved on the screw rod and forms the first connection end of the adjustment structure;

[0012] The rotary drive structure can change the rotation angle of the lead screw around its own axis in response to the telescopic adjustment signal to adjust the distance between the first connecting end and the second connecting end.

[0013] Optionally, the adjustment structure also includes a telescopic connection piece, and the rotation drive structure includes a rotating motor and a motor fixing seat. The rotating motor is fixedly connected to the movable seat through the motor fixing seat, and the output shaft of the rotating motor is connected to the first end of the screw rod through the telescopic connection piece. The output shaft of the rotating motor can drive the screw rod to rotate through the telescopic connection piece, and the first end of the screw rod can slide relative to the telescopic connection piece along its axial direction.

[0014] Optionally, the evaporation assembly includes two groups of the adjustment structures, and the two groups of the adjustment structures are respectively located on both sides of the flexible connecting pipe along the first direction.

[0015] Optionally, the evaporation component includes two pairs of the adjustment structures, which are respectively located on both sides of the flexible connecting pipe along the first direction, and each pair of the adjustment structures is distributed along a second direction, which intersects with the first direction.

[0016] Optionally, the movable seat is a rectangular plate or a rounded rectangular plate, and the positions of the multiple adjustment structures correspond to the four corners of the movable seat respectively.

[0017] Optionally, the plurality of adjustment structures include at least one first adjustment structure and at least one second adjustment structure, the first adjustment structure includes a first telescopic device, a first hinge, and a second hinge, the first hinge being fixedly disposed on the movable seat and forming a first connection end of the first adjustment structure, the second hinge being fixedly disposed on the fixed seat and forming a second connection end of the first adjustment structure, the length of the first telescopic device being adjustable, and both ends of the first telescopic device being hinged to the first hinge and the second hinge, respectively;

[0018] The second adjustment structure includes a second telescopic device and a third articulated seat. The third articulated seat is fixedly arranged on the movable seat and forms the first connection end of the second adjustment structure. One end of the second telescopic device is fixedly connected to the fixed seat and forms the second connection end of the second adjustment structure. The other end of the second telescopic device is hinged to the third articulated seat.

[0019] Optionally, the evaporation component further includes a plurality of positioning structures, each of which includes a scale rod and a guide seat, wherein the guide seat is fixedly disposed on the movable seat and has an avoidance through-hole, one end of the scale rod is fixedly connected to the fixed seat, and the other end of the scale rod passes through the avoidance through-hole, and the surface of the scale rod has scale structures spaced apart along the length direction of the scale rod.

[0020] Optionally, the scale rod includes a threaded section and a mating section connected in sequence along its axial direction, the fixing seat has a plurality of positioning threaded holes, the threaded sections of the plurality of scale rods are screwed into the plurality of positioning threaded holes one by one, and the scale structure is located on the mating section.

[0021] Optionally, the scale structure is an annular groove formed on the surface of the scale rod and extending around the axis of the scale rod.

[0022] Optionally, the scale structure is an annular protrusion formed on the surface of the scale rod and extending around the axis of the scale rod.

[0023] Optionally, the evaporation assembly includes two groups of the adjustment structures, which are respectively located on both sides of the flexible connecting pipe along a first direction, and a cross section of the avoidance through hole extends along the first direction.

[0024] Optionally, the positions of the plurality of positioning structures correspond one-to-one to the positions of the plurality of adjusting structures.

[0025] Optionally, the outer wall of the process chamber has a plurality of threaded holes, the evaporation component also includes a plurality of chamber fixing screws, a plurality of chamber fixing through holes are formed in the fixing seat, and the nail rods of the plurality of chamber fixing screws pass through the plurality of chamber fixing through holes and are screwed into the plurality of threaded holes one by one to fix the evaporation component on the process chamber.

[0026] Optionally, the process chamber includes a chamber upper shell and a chamber base, the chamber base closes the bottom opening of the chamber upper shell, the bottom surface of the chamber base includes a central flat plate and connecting inclined plates arranged on both sides of the central flat plate along a first horizontal direction, the height of each point on the connecting inclined plates gradually increases in the direction away from the central flat plate, and a plurality of evaporation through holes are opened on the connecting inclined plates, and the plurality of evaporation through holes are arranged at intervals along a second horizontal direction, and the second horizontal direction intersects with the first horizontal direction.

[0027] In the evaporation assembly and evaporation equipment provided by the present invention, the fixed seat is used to be fixedly connected to the process chamber, the evaporation source is arranged on the movable seat, and the fixed seat and the movable seat are connected by a flexible connecting tube. A plurality of adjustment structures are provided between the fixed seat and the movable seat, and the adjustment structure can adjust the length between its two ends according to the signal when receiving a telescopic adjustment signal. Therefore, when the process requirements change, the distance between the fixed seat and the movable seat can be quickly changed by controlling the plurality of adjustment structures to adjust their own lengths, thereby changing the distance between the evaporation source and the base in the process chamber. The angle between the fixed seat and the movable seat can also be changed by adjusting the length between the two ends of some adjustment structures to a different method from that of other adjustment structures, thereby changing the angle between the evaporation source and the base. During the adjustment process, the flexible connecting tube can always ensure that the evaporation source is stably connected to the process chamber.

[0028] The evaporation assembly provided by the present invention can automatically adjust the distance and angle between the evaporation source and the base by changing the length of the portion of the adjustment structure connected between the movable seat and the fixed seat, thereby improving the flexibility and convenience of the evaporation assembly, so that the evaporation assembly can be applied to a variety of different evaporation processes, eliminating the need to manufacture and store a variety of different models of evaporation modules for a variety of processes, thereby reducing the manufacturing cost and storage management cost of the evaporation equipment. At the same time, the solution of the present invention only needs to send telescopic adjustment signals to multiple adjustment structures to adjust the distance and angle between the evaporation source and the base in the chamber, which can reduce the time consumed by manual loading and unloading of the evaporation source, reduce labor costs and improve production efficiency. In addition, the evaporation assembly provided by the present invention does not require frequent disassembly and assembly, and can effectively reduce the position deviation caused by manual disassembly and assembly of the evaporation source, ensure the stability of the position of the evaporation assembly, and thus ensure process consistency.

[0029] Furthermore, multiple evaporation components are arranged on the outer wall of the process chamber of the evaporation equipment. When the evaporation process is carried out, the multiple evaporation components jointly provide coating gas to the process chamber. The evaporation sources 400 of the multiple evaporation components can be evaporation sources 400 of different material types, that is, in a one-step evaporation process, multiple different materials are deposited on the surface of the substrate on the base at the same time to obtain a film layer formed by a mixture of multiple substances, and the positions and angles between the multiple evaporation sources 400 and the substrate can be independently and flexibly adjusted according to the telescopic adjustment signal, thereby ensuring the uniformity of the content of various substances in the film layer, and further ensuring the product quality of the evaporation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The present invention will be further described below in conjunction with the accompanying drawings:

[0031] Figure 1 is a schematic structural diagram of an evaporation assembly provided by an embodiment of the present invention;

[0032] Figure 2This is a schematic diagram of the disassembled structure of the evaporation assembly provided in an embodiment of the present invention;

[0033] Figure 3 is a schematic structural diagram of an adjustment structure in an evaporation assembly provided in an embodiment of the present invention;

[0034] Figure 4 is a schematic structural diagram of an evaporation assembly provided by another embodiment of the present invention;

[0035] Figure 5 Schematic diagram of the bottom structure of the evaporation equipment provided by an embodiment of the present invention;

[0036] Figure 6 It is a schematic diagram of the side structure of the bottom of the evaporation equipment provided by an embodiment of the present invention.

[0037] Description of reference numerals:

[0038] Fixed seat 100; chamber fixing through hole 102; positioning threaded hole 103; flexible connecting tube 200; movable seat 300; adjustment through hole 301; first mounting through hole 302; evaporation source 400; mounting flange 410; second mounting through hole 411; adjustment structure 500; drive structure 501; rotating motor 501a; motor fixing seat 501b; lead screw 502; threaded fitting 503; universal joint 504; telescopic connecting member 505; first adjustment structure 510; first telescopic device 511; first hinge 512; second hinge 513; second adjustment structure 520; third adjustment structure 530; drive part 531; drive lead screw 532; threaded fitting 533; positioning structure 600; scale rod 610; scale structure 611; guide seat 620; chamber fixing screw 710; mounting fastener 720; outer wall 10. DETAILED DESCRIPTION

[0039] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described in the embodiments are intended to explain the present invention and are not to be construed as limiting the present invention.

[0040] References in this specification to "one embodiment," "an example," or "an example" mean that a particular feature, structure, or characteristic described in connection with the embodiment itself can be included in at least one embodiment disclosed herein. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment.

[0041] In order to solve the above technical problems, as one aspect of the present invention, an evaporation component is provided, such as Figures 1-2 、 Figure 4As shown, the evaporation assembly comprises a fixed seat 100, a flexible connecting pipe 200, a movable seat 300 and an evaporation source 400, the fixed seat 100 is used for fixed connection with a process chamber, and the fixed seat 100 has a first communication hole for communication with the inside of the process chamber, the movable seat 300 has a second communication hole, the first end of the second communication hole is connected with the evaporation source 400, and the second end of the second communication hole is communicated with the first communication hole through the flexible connecting pipe 200;

[0042] The evaporation assembly further comprises a plurality of adjusting structures 500, the plurality of adjusting structures 500 are distributed on the outside of the flexible connecting pipe 200, and the first connecting end and the second connecting end of the adjusting structure 500 are connected with the movable seat 300 and the fixed seat 100 respectively, and the adjusting structure 500 can adjust the distance between the first connecting end and the second connecting end in response to an extension and contraction adjusting signal, so as to change the distance and the angle between the evaporation source 400 and the fixed seat 100.

[0043] In the evaporation assembly provided by the application, the fixed seat 100 is used for fixed connection with a process chamber, the evaporation source 400 is arranged on the movable seat 300, the fixed seat 100 and the movable seat 300 are communicated through the flexible connecting pipe 200, a plurality of adjusting structures 500 are arranged between the fixed seat 100 and the movable seat 300, and the adjusting structure 500 can adjust the length between the two ends thereof according to a signal when receiving an extension and contraction adjusting signal, so that when the process requirement changes, the distance between the fixed seat 100 and the movable seat 300 can be quickly changed by controlling the length adjustment of the plurality of adjusting structures 500, and then the distance between the evaporation source 400 and the base in the process chamber is changed, and the angle between the fixed seat 100 and the movable seat 300 can be changed by adjusting the length between the two ends of part of the adjusting structures 500 to be different from that of the other adjusting structures 500, so that the angle between the evaporation source 400 and the base is changed, and the flexible connecting pipe 200 can always ensure that the evaporation source 400 is stably connected with the process chamber during the adjusting process;

[0044] The evaporation component provided by the present invention can automatically adjust the distance and angle between the evaporation source 400 and the base by changing the length of the portion of the adjustment structure 500 connected between the movable seat 300 and the fixed seat 100, thereby improving the flexibility and convenience of the evaporation component, so that the evaporation component can be applied to a variety of different evaporation processes, without the need to manufacture and store a variety of different models of evaporation modules for a variety of processes, thereby reducing the manufacturing cost and storage management cost of the evaporation equipment. At the same time, the solution of the present invention only needs to send a telescopic adjustment signal to multiple adjustment structures 500 to adjust the distance and angle between the evaporation source 400 and the base in the chamber, which can reduce the time consumed by manual loading and unloading of the evaporation source 400, reduce labor costs and improve production efficiency. In addition, the evaporation component provided by the present invention does not require frequent disassembly and assembly, and can effectively reduce the position deviation caused by manual disassembly and assembly of the evaporation source 400, ensure the stability of the position of the evaporation component, and thus ensure process consistency;

[0045] Moreover, when the evaporation assembly provided by the present invention is applied to different process chambers, the position of the evaporation source 400 can be flexibly fine-tuned according to the actual process effect, thereby eliminating the influence of size and shape errors between different process chambers on the process effect, and further ensuring the product consistency of the evaporation process.

[0046] As an optional embodiment of the present invention, Figures 1-2 、 Figure 4 As shown, the flexible connecting pipe 200 is a bellows.

[0047] As an optional embodiment of the present invention, Figure 2 As shown, the evaporation assembly further includes a plurality of chamber fixing screws 710, and a plurality of chamber fixing through holes 102 are formed in the fixing base 100. The nail rods of the plurality of chamber fixing screws 710 pass through the plurality of chamber fixing through holes 102 in a one-to-one correspondence, and the plurality of chamber fixing screws 710 are used to be screwed into threaded holes (not shown in the figure) on the outer wall 10 of the process chamber to fix the evaporation assembly on the process chamber.

[0048] As an optional embodiment of the present invention, Figure 2 As shown, the movable seat 300 has a plurality of first mounting through holes 302, and the plurality of first mounting through holes 302 are distributed around the second connecting hole of the movable seat 300. The evaporation source 400 has a mounting flange 410, and the mounting flange 410 has a plurality of second mounting through holes 411. The mounting flange 410 is overlapped with the movable seat 300, and is fixedly connected to the movable seat 300 by mounting fasteners 720 that pass through the plurality of first mounting through holes 302 and the plurality of second mounting through holes 411 in sequence in a one-to-one correspondence.

[0049] As an optional embodiment of the present invention, Figure 2 As shown, the mounting fasteners 720 are bolts.

[0050] As an optional embodiment of the present invention, the adjustment structure 500 may adopt a screw drive structure, specifically, as Figure 3 As shown, the adjustment structure 500 includes a rotation drive structure 501, a screw rod 502, a threaded fitting 503, and a universal joint 504. The rotation drive structure 501 is connected to a first end of the screw rod 502, and a second end of the screw rod 502 is connected to a first end of the universal joint 504. The second end of the universal joint 504 forms a second connection end of the adjustment structure 500. The threaded fitting 503 is sleeved on the screw rod 502 and forms a first connection end of the adjustment structure 500.

[0051] The rotary drive structure 501 can change the rotation angle of the screw rod 502 around its own axis in response to the telescopic adjustment signal to adjust the distance between the first connection end and the second connection end.

[0052] As an optional embodiment of the present invention, Figure 2 As shown, a plurality of adjustment through holes 301 are formed on the movable seat 300 and pass through the movable seat 300 along the thickness direction. The first end of the screw rod 502 passes through the adjustment through hole 301 and is connected to the rotation drive structure 501. The threaded fitting 503 is fixedly connected to the side of the movable seat 300 facing the fixed seat 100, and the inner hole of the threaded fitting 503 is connected to the adjustment through hole 301.

[0053] Optionally, the rotary drive structure 501 (eg, including a motor) may be movably connected to other supports on the evaporation device, and only swings along with the movable seat 300 and the screw 502 , and does not move along the screw 502 along with the movable seat 300 .

[0054] Alternatively, as an optional embodiment of the present invention, Figure 3 As shown, the adjustment structure 500 also includes a telescopic connection 505, and the rotation drive structure 501 includes a rotating motor 501a and a motor fixing seat 501b. The rotating motor 501a is fixedly connected to the movable seat 300 through the motor fixing seat 501b, and the output shaft of the rotating motor 501a is connected to the first end of the screw rod 502 through the telescopic connection 505. The output shaft of the rotating motor 501a can drive the screw rod 502 to rotate through the telescopic connection 505, and the first end of the screw rod 502 can slide along its axial direction relative to the telescopic connection 505.

[0055] That is, the rotating motor 501a is fixed to the movable seat 300 through the motor fixing seat 501b, and moves along the screw rod 502 together with the movable seat 300. The first end of the screw rod 502 can be partially pulled out of the telescopic connection member 505 as the rotating motor 501a moves away from the fixed seat 100, and can be more inserted into the telescopic connection member 505 as the rotating motor 501a approaches the fixed seat 100, so that when the movable seat 300 and the rotating motor 501a move axially, the transmission connection relationship between the rotating motor 501a, the telescopic connection member 505 and the screw rod 502 is maintained.

[0056] Alternatively, as Figure 3 As shown, the telescopic connection member 505 is a coupling.

[0057] As an optional embodiment of the present invention, the movable seat 300 is a rectangular plate or a rounded rectangular plate (such as Figures 1-2 、 Figure 4 As shown), the positions of the multiple adjustment structures 500 correspond to the four corners of the movable seat 300 respectively.

[0058] In other embodiments of the present invention, the adjustment structure 500 may also be other forms of retractable components. For example, as an optional embodiment of the present invention, Figure 4 As shown, the multiple adjustment structures 500 include at least one first adjustment structure 510 and at least one second adjustment structure 520. The first adjustment structure 510 includes a first telescopic device 511, a first hinge 512, and a second hinge 513. The first hinge 512 is fixedly disposed on the movable seat 300 and forms a first connection end of the first adjustment structure 510. The second hinge 513 is fixedly disposed on the fixed seat 100 and forms a second connection end of the first adjustment structure 510. The length of the first telescopic device 511 is adjustable, and both ends of the first telescopic device 511 are hinged to the first hinge 512 and the second hinge 513, respectively.

[0059] The second adjustment structure 520 includes a second telescopic device (for example, the cylinder structure shown in the figure) and a third articulated seat (not shown in the figure). The third articulated seat is fixedly arranged on the movable seat 300. One end of the second telescopic device is fixedly connected to the fixed seat 100, and the other end of the second telescopic device is hinged to the third articulated seat.

[0060] Optionally, the first telescopic device 511 may be a telescopic motion pair such as a pneumatic cylinder, an electric cylinder, or a hydraulic cylinder.

[0061] Optionally, the second telescopic device can be a telescopic motion pair such as a pneumatic cylinder, an electric cylinder, or a hydraulic cylinder.

[0062] In order to ensure the accuracy of adjusting the posture of the movable seat 300, as an optional embodiment of the present invention, Figures 1-2 、 Figure 4As shown, the evaporation assembly also includes a plurality of positioning structures 600, which include a scale rod 610 and a guide seat 620. The guide seat 620 is fixedly arranged on the movable seat 300, and the fixed seat 100 has an avoidance through-hole. One end of the scale rod 610 is fixedly connected to the fixed seat 100, and the other end of the scale rod 610 passes through the avoidance through-hole. The surface of the scale rod 610 has scale structures 611 distributed at intervals along the length direction of the scale rod 610.

[0063] In an embodiment of the present invention, the positioning structure 600 includes a scale rod 610 and a guide seat 620, which are respectively arranged on the fixed seat 100 and the movable seat 300, so that when the relative distance between the fixed seat 100 and the movable seat 300 at this location changes, the position of the guide seat 620 along the scale rod 610 will also change accordingly. Then, the position of the movable seat 300 can be determined by reading the scale structure 611 on the scale rod 610 corresponding to the guide seat 620 in multiple positioning structures 600, so that the staff can adjust the movable seat 300 to the same position and angle with the help of the positioning structure 600 in multiple processes, thereby improving process consistency.

[0064] As an optional embodiment of the present invention, the scale rod 610 includes a threaded section and a matching section connected in sequence along its axial direction, such as Figure 2 As shown, the fixing base 100 has a plurality of positioning threaded holes 103 , and the threaded sections of the plurality of scale rods 610 are screwed into the plurality of positioning threaded holes 103 one by one, and the scale structure 611 is located on the matching section.

[0065] As an optional embodiment of the present invention, the scale structure 611 is an annular groove formed on the surface of the scale rod 610 and extending around the axis of the scale rod 610 .

[0066] Alternatively, in other embodiments of the present invention, the scale structure 611 may also be an annular protrusion formed on the surface of the scale rod 610 and extending around the axis of the scale rod 610 .

[0067] As an optional embodiment of the present invention, Figures 1-2 、 Figure 4 As shown, the evaporation assembly includes two groups of adjustment structures 500 , and the two groups of adjustment structures 500 are respectively located on both sides of the flexible connecting pipe 200 along the first direction a.

[0068] Alternatively, as Figures 1-2 、 Figure 4 As shown, the evaporation assembly includes two pairs of adjustment structures 500, which are respectively located on both sides of the flexible connecting pipe 200 along the first direction a, and each pair of adjustment structures is distributed along the second direction b, which intersects the first direction a.

[0069] Optionally, the second direction b is perpendicular to the first direction a.

[0070] As an optional embodiment of the present invention, Figures 1-2 、 Figure 4 As shown, the positions of the plurality of positioning structures 600 correspond one-to-one to the positions of the plurality of adjusting structures 500 , thereby providing feedback on the connection lengths of the plurality of adjusting structures 500 in a targeted manner.

[0071] As a second aspect of the present invention, a vapor deposition device is provided, such as Figure 5 、 Figure 6 As shown, the evaporation equipment includes a process chamber (only the chamber base 11 at the bottom of the process chamber is shown in the figure), a base (not shown in the figure), a control device and multiple evaporation components provided by embodiments of the present invention, the base is arranged in the process chamber, and a plurality of evaporation through holes are provided on the outer wall of the process chamber, and the position of the base corresponds to the position of the evaporation through holes, the fixed seat 100 of the evaporation component is fixedly connected to the process chamber, and the first connecting holes of the plurality of fixed seats 100 are respectively connected to the plurality of evaporation through holes, and the control device is used to send a telescopic adjustment signal to the adjustment structure 500 of the plurality of evaporation components so that each adjustment structure 500 adjusts the distance between its first connection end and the second connection end.

[0072] In the evaporation equipment provided by the present invention, the fixed seat 100 of the evaporation assembly is fixedly connected to the process chamber, the evaporation source 400 is arranged on the movable seat 300, and the fixed seat 100 and the movable seat 300 are connected through the flexible connecting tube 200. A plurality of adjustment structures 500 are provided between the fixed seat 100 and the movable seat 300, and the adjustment structure 500 can adjust the length between its two ends according to the signal when receiving a telescopic adjustment signal. Therefore, when the process requirements change, the distance between the fixed seat 100 and the movable seat 300 can be quickly changed by controlling the plurality of adjustment structures 500 to adjust their own lengths, thereby changing the distance between the evaporation source 400 and the base in the process chamber. The angle between the fixed seat 100 and the movable seat 300 can also be changed by adjusting the length between the two ends of some adjustment structures 500 to a different length from that of other adjustment structures 500, thereby changing the angle between the evaporation source 400 and the base. During the adjustment process, the flexible connecting tube 200 can always ensure that the evaporation source 400 is stably connected to the process chamber.

[0073] The evaporation equipment provided by the present invention can adjust the distance and angle between the evaporation source 400 and the base by changing the length of the portion of the adjustment structure 500 connected between the movable seat 300 and the fixed seat 100, thereby improving the flexibility and convenience of the evaporation component, so that the evaporation component can be applied to a variety of different evaporation processes, without the need to manufacture and store a variety of different models of evaporation modules for a variety of processes, thereby reducing the manufacturing cost and storage management cost of the evaporation equipment. At the same time, the solution of the present invention only needs to send a telescopic adjustment signal to multiple adjustment structures 500 to adjust the distance and angle between the evaporation source 400 and the base in the chamber, which can reduce the time consumed by manual loading and unloading of the evaporation source 400, reduce labor costs and improve production efficiency. In addition, the evaporation component provided by the present invention does not need to be frequently disassembled and assembled, and can effectively reduce the position deviation caused by manual disassembly and assembly of the evaporation source 400, ensure the stability of the position of the evaporation component, and thus ensure process consistency;

[0074] In addition, a plurality of evaporation components are arranged on the outer wall of the process chamber of the evaporation equipment. When the evaporation process is carried out, the coating gas is provided to the process chamber by the plurality of evaporation components together. The evaporation sources 400 of the plurality of evaporation components can be evaporation sources 400 of different material types. That is, in a one-step evaporation process, a plurality of different materials are deposited on the surface of the substrate on the base at the same time to obtain a film layer formed by a mixture of multiple substances. Moreover, the positions and angles between the plurality of evaporation sources 400 and the substrate can be independently and flexibly adjusted according to the telescopic adjustment signal, thereby ensuring the uniformity of the content of various substances in the film layer, and further ensuring the product quality of the evaporation process.

[0075] To facilitate understanding by technicians, the following provides an embodiment of the evaporation process performed by the evaporation device provided by the present invention:

[0076] When switching to a new evaporation process, the control device first sends an initial expansion and contraction adjustment signal to the multiple adjustment structures 500 of the multiple evaporation components, so that the distance between the two ends of the multiple adjustment structures 500 is respectively expanded and contracted to the length corresponding to the signal, so that each evaporation component reaches the initial position corresponding to the signal;

[0077] Transferring the test piece to the base and performing a test evaporation process (specifically, the control device controls the evaporation source 400 of each evaporation assembly to heat for a preset time to provide raw material vapor to the test piece on the base to achieve film coating), forming a test film layer on the test piece;

[0078] Detecting the thickness and uniformity of the test film layer formed on the test piece, and generating a correction expansion and contraction adjustment signal based on the thickness and uniformity;

[0079] The control device sends a correction extension and contraction adjustment signal to the multiple adjustment structures 500 of the multiple evaporation components, so that the distance between the two ends of the multiple adjustment structures 500 is respectively extended to the length corresponding to the signal, so that each evaporation component reaches the correction position corresponding to the signal;

[0080] The substrate is transferred to the base and subjected to a production evaporation process to obtain a product sheet.

[0081] It is understood that when the same evaporation process is subsequently performed, the control device can directly control each evaporation component to reach the correct position based on the expansion and contraction adjustment signal issued during the previous same process. Alternatively, the previous calibration step can be performed again.

[0082] As an optional embodiment of the present invention, the process chamber includes a chamber upper shell (not shown in the figure) and a chamber base, such as Figure 5 、 Figure 6 As shown, the chamber base 11 closes the bottom opening of the chamber upper shell. The bottom surface of the chamber base 11 includes a central flat plate 11a and connecting inclined plates 11b arranged on both sides of the central flat plate along the first horizontal direction x. The height of each point on the connecting inclined plate 11b gradually increases in the direction away from the central flat plate 11a. The connecting inclined plate 11b is provided with a plurality of evaporation holes, and the plurality of evaporation holes are arranged at intervals along the second horizontal direction y, and the second horizontal direction y intersects with the first horizontal direction x.

[0083] Optionally, the second horizontal direction y and the first horizontal direction x are perpendicular to each other.

[0084] The above are only specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Those skilled in the art should understand that the present invention includes but is not limited to the contents described in the drawings and the above specific embodiments. Any modifications that do not deviate from the functional and structural principles of the present invention are intended to be included within the scope of the claims.

Claims

1. A vapor deposition device, characterized in that: The evaporation equipment includes a process chamber, a base, a control device and a plurality of evaporation components, the base is arranged in the process chamber, the outer wall of the process chamber has a plurality of evaporation through holes, the evaporation component includes a fixed seat (100), a flexible connecting pipe (200), a movable seat (300) and an evaporation source (400), the fixed seat (100) is used to be fixedly connected to the process chamber, and the fixed seat (100) has a first connecting hole for communicating with the interior of the process chamber, the first connecting holes of the plurality of fixed seats (100) are respectively connected to the plurality of evaporation through holes, the movable seat (300) has a second connecting hole, the first end of the second connecting hole is connected to the evaporation source (400), the second end of the second connecting hole is connected to the evaporation source (400), and the second end of the second connecting hole is connected to the evaporation source (400). The two ends are connected to the first communicating hole through the flexible connecting tube (200); the evaporation component further comprises a plurality of adjusting structures (500); the plurality of adjusting structures (500) are distributed on the outside of the flexible connecting tube (200); and the first connecting end and the second connecting end of the adjusting structure (500) are respectively connected to the movable seat (300) and the fixed seat (100); the control device is used to send a telescopic adjustment signal to the adjusting structures (500) of the plurality of evaporation components, so that each adjusting structure (500) can adjust the distance between its first connecting end and the second connecting end in response to the telescopic adjustment signal, so as to change the distance and angle between the evaporation source (400) and the fixed seat (100); The evaporation component further comprises a plurality of positioning structures (600), wherein the positioning structures (600) comprise a scale rod (610) and a guide seat (620), wherein the guide seat (620) is fixedly arranged on the movable seat (300), and wherein the guide seat (620) comprises an avoidance through hole, wherein one end of the scale rod (610) is fixedly connected to the fixed seat (100), and the other end of the scale rod (610) passes through the avoidance through hole, and the surface of the scale rod (610) comprises scale structures (611) spaced apart along the length direction of the scale rod (610), and the positions of the plurality of positioning structures (600) correspond one-to-one to the positions of the plurality of adjustment structures (500).

2. The evaporation device according to claim 1, characterized in that The adjustment structure (500) comprises a rotation drive structure (501), a screw rod (502), a threaded fitting (503) and a universal joint (504); the rotation drive structure (501) is connected to a first end of the screw rod (502); a second end of the screw rod (502) is connected to a first end of the universal joint (504); the second end of the universal joint (504) forms a second connection end of the adjustment structure (500); and the threaded fitting (503) is sleeved on the screw rod (502) and forms the first connection end of the adjustment structure (500); The rotary drive structure (501) is capable of changing the rotation angle of the screw rod (502) around its own axis in response to the telescopic adjustment signal, so as to adjust the distance between the first connecting end and the second connecting end.

3. The evaporation device according to claim 2, characterized in that The adjustment structure further includes a telescopic connecting member (505), and the rotation drive structure includes a rotating motor (501a) and a motor fixing seat (501b), wherein the rotating motor (501a) is fixedly connected to the movable seat (300) via the motor fixing seat (501b), and the output shaft of the rotating motor (501a) is connected to the first end of the screw rod (502) via the telescopic connecting member (505), and the output shaft of the rotating motor (501a) can drive the screw rod (502) to rotate via the telescopic connecting member (505), and the first end of the screw rod (502) can slide along its axial direction relative to the telescopic connecting member (505).

4. The evaporation equipment according to claim 1, characterized in that The evaporation component comprises two groups of the regulating structures (500), and the two groups of the regulating structures (500) are respectively located on both sides of the flexible connecting pipe (200) along the first direction (a).

5. The evaporation equipment according to claim 1, characterized in that The plurality of adjustment structures (500) include at least one first adjustment structure (510) and at least one second adjustment structure (520), wherein the first adjustment structure (510) includes a first telescopic device (511), a first hinge (512), and a second hinge (513), wherein the first hinge (512) is fixedly disposed on the movable seat (300) and forms a first connection end of the first adjustment structure (510), and the second hinge (513) is fixedly disposed on the fixed seat (100) and forms a second connection end of the first adjustment structure (510), wherein the length of the first telescopic device (511) is adjustable, and both ends of the first telescopic device (511) are hinged to the first hinge (512) and the second hinge (513), respectively; The second adjustment structure (520) includes a second telescopic device and a third articulated seat, the third articulated seat is fixedly arranged on the movable seat (300) and forms the first connection end of the second adjustment structure (520), one end of the second telescopic device is fixedly connected to the fixed seat (100) and forms the second connection end of the second adjustment structure (520), and the other end of the second telescopic device is hinged to the third articulated seat.

6. The evaporation device according to any one of claims 1 to 5, characterized in that: The evaporation component comprises two groups of the regulating structures (500), the two groups of the regulating structures (500) being respectively located on both sides of the flexible connecting pipe (200) along a first direction (a), and the cross section of the avoidance through hole extends along the first direction (a).

7. The evaporation device according to any one of claims 1 to 5, characterized in that: The evaporation component comprises two pairs of the regulating structures (500), the two pairs of the regulating structures (500) being respectively located on both sides of the flexible connecting pipe (200) along a first direction (a), and each pair of the regulating structures being distributed along a second direction (b), the second direction (b) intersecting the first direction (a).

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