Aluminum nitride aluminum-coated ceramic substrate production equipment and method

Abstract

The invention belongs to the technical field of aluminum nitride aluminum-coated ceramic substrate production, and particularly discloses aluminum nitride aluminum-coated ceramic substrate production equipment and method.The aluminum nitride aluminum-coated ceramic substrate production equipment comprises a mounting shell, a cleaning mechanism is arranged in the mounting shell, a drying mechanism is arranged at the top of the mounting shell, and a filtering mechanism is arranged at the bottom of the cleaning mechanism; two conveying belts are arranged in the mounting shell, a plurality of plate bodies are arranged at the tops of the conveying belts, the cleaning mechanism is used for cleaning the plate bodies on the conveying belts, the drying mechanism is used for drying the plate bodies, the filtering mechanism is used for filtering and cleaning, and the cleaning mechanism comprises a mounting frame. The top of the mounting frame is fixedly connected to the interior of the mounting shell. And through the cleaning mechanism, the two sides of the substrate can be sprayed and brushed at the same time, then the substrate cleaning effect can be improved, meanwhile, the brushed substrate can be dried, and the practicability of the device is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of the production of aluminum - clad aluminum nitride ceramic substrates, and specifically discloses a production device and method for aluminum - clad aluminum nitride ceramic substrates. Background Art

[0002] The aluminum - clad aluminum nitride ceramic substrate is a new type of electronic ceramic substrate material. It uses an aluminum nitride ceramic as the substrate and has an aluminum layer on its surface. It has high thermal conductivity, can effectively dissipate heat, and can improve the reliability of electronic devices. At the same time, it also has good insulation performance, mechanical strength, and chemical stability, and can adapt to a variety of complex working environments. It has extensive and important applications in high - end electronic fields such as power amplifiers, microwave circuits, and aerospace. There are various production devices for aluminum - clad aluminum nitride ceramic substrates, and the cleaning device in the production of aluminum - clad aluminum nitride ceramic substrates is also one type of the production devices for aluminum - clad aluminum nitride ceramic substrates.

[0003] In the prior art, the cleaning devices in the production equipment for aluminum - clad aluminum nitride ceramic substrates mainly include ultrasonic cleaning equipment, spraying equipment, etc. Among them, the spraying equipment flushes and cleans the substrate, but cannot brush the two sides of the substrate, reducing the cleaning effect of the substrate. Summary of the Invention

[0004] In view of this, the purpose of the present invention is to provide a production device and method for aluminum - clad aluminum nitride ceramic substrates to solve the problem that the cleaning device in the production equipment for aluminum - clad aluminum nitride ceramic substrates in the prior art generally flushes and cleans the substrate, but cannot brush the two sides of the substrate, reducing the cleaning effect of the substrate.

[0005] To achieve the above - mentioned purpose, the present invention provides a production device for aluminum - clad aluminum nitride ceramic substrates, including an installation housing. A cleaning mechanism is arranged inside the installation housing, a drying mechanism is arranged on the top of the installation housing, a filtering mechanism is arranged at the bottom of the cleaning mechanism. Two conveyor belts are arranged inside the installation housing, and a plurality of plates are arranged on the top of the conveyor belts. The cleaning mechanism is used to clean the plates on the conveyor belts, the drying mechanism is used to dry the plates, and the filtering mechanism is used for filtering and cleaning.

[0006] In the above technical solution, preferably, the cleaning mechanism includes a mounting frame, the top of the mounting frame is fixedly connected inside the mounting housing, the bottom of the mounting frame is fixedly connected with a mounting frame, two cleaning rollers are rotatably connected inside the mounting frame, one end of the outer part of the mounting frame is fixedly connected with a fixed box, an impeller is rotatably connected inside the fixed box, one end of the upper cleaning roller is fixedly connected to the middle of the impeller, a water pump is fixedly connected inside the mounting housing, the input end of the water pump is fixedly connected with a water suction pipe, the output end of the water pump is fixedly connected with a water outlet pipe, the end of the water outlet pipe away from the water pump is fixedly connected to the outside of the fixed box, the bottom end of the outside of the fixed box is fixedly connected with a connecting water pipe, one side of the top of the mounting frame and the inner bottom of the mounting frame are both fixedly connected with spray pipes, a communicating pipe is fixedly connected between the two spray pipes, one end of the lower spray pipe away from the communicating pipe is fixedly connected with an automatic valve, the end of the automatic valve away from the spray pipe is fixedly connected to the outside of the connecting water pipe, two fixing rods are fixedly connected to the inner top end of the mounting housing, a water passing pipe is fixedly connected between the bottoms of the two fixing rods, a plurality of spray heads are fixedly connected to the bottom of the water passing pipe, one end of the connecting water pipe away from the fixed box is fixedly connected to one end of the water passing pipe, and a water receiving tank is fixedly connected to the bottom of the mounting housing.

[0007] In the above technical solution, preferably, the drying mechanism includes a fixing ring, the fixing ring is fixedly connected to one end of the top of the mounting housing, a fan is detachably connected inside the fixing ring, engaging blocks are fixedly connected to both outer ends of the fan, an installation groove is formed inside the engaging block, a return spring is arranged inside the installation groove, a limiting disc is slidably connected inside the installation groove, a engaging head is fixedly connected to the end of the limiting disc away from the return spring, a pushing plate is fixedly connected to the top of the limiting disc, a sliding groove is formed at the top of the engaging block, the pushing plate is slidably connected inside the sliding groove, an installation ring is fixedly connected to the other end of the top of the mounting housing, a ventilation pipe is detachably connected between the top of the fixing ring and the top of the installation ring, and a plurality of heating wires are fixedly connected inside the installation ring.

[0008] In the above technical solution, preferably, the filtering mechanism includes a fixing cover, the top of the fixing cover is fixedly connected to the bottom of the water suction pipe, fixing blocks are fixedly connected to both outer ends of the fixing cover, a sliding groove is formed inside the fixing block, two rotating grooves are formed on the inner wall of the fixing cover, a fixing frame is fixedly connected to one side of the top of the fixing cover, a sliding insertion rod is slidably connected inside the fixing frame, a pushing spring is sleeved outside the sliding insertion rod, a pulling handle is fixedly connected to the outside of the sliding insertion rod, a fixing frame is arranged inside the bottom end of the fixing cover, two fixing ears are fixedly connected to the top end of the outside of the fixing frame, and engaging holes are formed inside the fixing ears.

[0009] In the above technical solution, preferably, one end of the return spring is fixedly connected inside the mounting groove, and the other end of the return spring is fixedly connected to one end of the limiting disc away from the engaging head.

[0010] In the above technical solution, preferably, the engaging head penetrates through the inside of the engaging block, and the engaging head is engaged with the inside of the top end of the mounting housing.

[0011] In the above technical solution, preferably, one end of the push spring is fixedly connected to the bottom of the top end of the fixed frame, and the other end of the push spring is fixedly connected to the top of the pulling handle.

[0012] In the above technical solution, preferably, the fixed ear is engaged with the rotating groove, the bottom of the sliding insertion rod is engaged with the inside of the engaging hole, a filter element is arranged inside the fixed frame, and the bottom of the sliding insertion rod penetrates through the top of one of the pulling handles.

[0013] In the above technical solution, preferably, the two cleaning rollers are connected by a belt, two rotating doors are rotatably connected to one side of the mounting housing, and an observation window is arranged in the middle of the rotating door.

[0014] A production method of an aluminum nitride-coated aluminum ceramic substrate includes the following steps:

[0015] Step 1: Alkaline wash and roughen the aluminum nitride ceramic plate with a sodium hydroxide solution with a mass fraction of 10-20%, and perform cutting.

[0016] Step 2: Perform cold spraying coating processing on the roughened aluminum nitride ceramic plate in Step 1. Clamp and place the high-purity aluminum foil and the ceramic in a forming mold in a cross-laminated manner, and perform clamping and sintering by means of hot die-casting to form a heat dissipation aluminum layer.

[0017] Step 3: Perform surface treatment on the product sintered in Step 2 to obtain an aluminum nitride-coated aluminum ceramic substrate.

[0018] Step 4: Place the plate body on the conveyor belt, clean it through a cleaning mechanism, and dry it by means of a drying mechanism, so as to obtain a clean aluminum nitride-coated aluminum ceramic substrate.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. Through the cleaning mechanism, the present invention can simultaneously spray both sides of the substrate and can perform brushing. Therefore, not only can the substrate be rinsed, but also brushing can be achieved, thereby improving the cleaning effect of the substrate. At the same time, the substrate after brushing can be dried, improving the practicability of the device.

[0021] 2. The present invention enables the disassembly and installation of the fixing ring through detachable engaging blocks, thereby facilitating the disassembly and assembly of the fan, avoiding the use of bolts for the disassembly and assembly of the fan, and then avoiding the situation where the bolts are stripped and difficult to disassemble, and then facilitating the maintenance and replacement of the fan. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a perspective view of the present invention;

[0023] Figure 2 is a schematic structural view of the conveyor belt of the present invention;

[0024] Figure 3 is a schematic structural view of the mounting frame of the present invention;

[0025] Figure 4 is a schematic structural view of the cleaning roller of the present invention;

[0026] Figure 5 is a schematic structural view of the spray pipe of the present invention;

[0027] Figure 6 is a schematic structural view of the fixing ring of the present invention;

[0028] Figure 7 is a schematic internal structural view of the engaging block of the present invention;

[0029] Figure 8 is a schematic structural view of the fixing cover of the present invention;

[0030] Figure 9 is a schematic structural view of the fixing ear of the present invention;

[0031] Figure 10 is a schematic structural view of the fixing bracket of the present invention.

[0032] In the figure: 1. Installation housing; 2. Cleaning mechanism; 201. Installation frame; 202. Installation box; 203. Cleaning roller; 204. Fixed box; 205. Impeller; 206. Water pump; 207. Suction pipe; 208. Outlet pipe; 209. Spray pipe; 210. Automatic valve; 211. Fixed rod; 212. Water pipe; 213. Spray head; 214. Connecting water pipe; 215. Connecting pipe; 216. Water receiving tank; 3. Drying mechanism; 301. Fixed ring; 302. Fan; 303. Engaging block; 304. Installation groove; 305. Return spring; 306. Limiting disc; 307. Engaging head; 308. Pushing plate; 309. Slide groove; 310. Installation ring; 311. Heating wire; 312. Ventilation pipe; 4. Filter mechanism; 401. Fixed cover; 402. Fixed block; 403. Sliding groove; 404. Rotating groove; 405. Fixed frame; 406. Sliding insertion rod; 407. Pushing spring; 408. Pulling handle; 409. Fixed frame; 410. Fixed ear; 411. Engaging hole; 412. Filter element; 5. Conveyor belt; 6. Plate body; 7. Rotating door; 8. Observation window. Detailed implementation mode

[0033] In order to be able to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention will be further described in detail below with reference to the drawings and specific implementation modes.

[0034] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described herein. Therefore, the present invention is not limited by the limitations of the specific embodiments disclosed below.

[0035] Embodiment 1:

[0036] As Figures 1 - 10 shown, a production device and method for an aluminum nitride-coated aluminum ceramic substrate includes an installation housing 1. A cleaning mechanism 2 is arranged inside the installation housing 1, a drying mechanism 3 is arranged on the top of the installation housing 1, a filter mechanism 4 is arranged at the bottom of the cleaning mechanism 2, two conveyor belts 5 are arranged inside the installation housing 1, the conveyor belts 5 are used for transporting the plate body 6, a plurality of plate bodies 6 are arranged on the top of the conveyor belts 5, the cleaning mechanism 2 is used for cleaning the plate body 6 on the conveyor belt 5, the drying mechanism 3 is used for drying the plate body 6, and the filter mechanism 4 is used for filtering the cleaning liquid.

[0037] The cleaning mechanism 2 includes a mounting frame 201 which provides mounting conditions. The top of the mounting frame 201 is fixedly connected inside the mounting housing 1. The bottom of the mounting frame 201 is fixedly connected with a mounting frame 202 which can provide a mounting position. Two cleaning rollers 203 are rotatably connected inside the mounting frame 202 and can clean both sides of the plate body 6. One end of the outer part of the mounting frame 202 is fixedly connected with a fixed box 204 which provides a mounting position. An impeller 205 is rotatably connected inside the fixed box 204 and can rotate under the flow of liquid. One end of the upper cleaning roller 203 is fixedly connected to the middle of the impeller 205. A water pump 206 is fixedly connected inside the mounting housing 1 which provides the power for the liquid flow. The input end of the water pump 206 is fixedly connected with a water suction pipe 207 which provides the condition for the liquid to enter. The output end of the water pump 206 is fixedly connected with a water outlet pipe 208. The end of the water outlet pipe 208 far from the water pump 206 is fixedly connected to the outside of the fixed box 204. The bottom end of the outside of the fixed box 204 is fixedly connected with a connecting water pipe 214. One side of the top of the mounting frame 202 and the inner bottom of the mounting frame 202 are both fixedly connected with a spray pipe 209 which can not only wash the plate body 6 but also wash the cleaning rollers 203. A communicating pipe 215 is fixedly connected between the two spray pipes 209 which has the function of connection. One end of the lower spray pipe 209 far from the communicating pipe 215 is fixedly connected with an automatic valve 210. The end of the automatic valve 210 far from the spray pipe 209 is fixedly connected to the outside of the connecting water pipe 214. Two fixed rods 211 are fixedly connected to the top end inside the mounting housing 1. A water pipe 212 is fixedly connected between the bottoms of the two fixed rods 211. A plurality of spray heads 213 are fixedly connected to the bottom of the water pipe 212. One end of the connecting water pipe 214 far from the fixed box 204 is fixedly connected to one end of the water pipe 212. A water receiving tank 216 is fixedly connected to the bottom of the mounting housing 1 which can filter the liquid inside the mounting housing 1. The two cleaning rollers 203 are connected by a belt. Two rotating doors 7 are rotatably connected to one side of the mounting housing 1. An observation window 8 is arranged in the middle of the rotating door 7. When cleaning the plate body 6, start the conveyor belt 5. When the conveyor belt 5 transports the plate body 6 between the two cleaning rollers 203, start the water pump 206. The input end of the water pump 206 sucks the cleaning liquid inside the water receiving tank 216 through the filtering mechanism 4 and passes the cleaning liquid into the inside of the fixed box 204 through the output end of the water pump 206 and the water outlet pipe 208, and can drive the impeller 205 to rotate, thus being able to drive the upper cleaning roller 203 to rotate, and then being able to drive the lower cleaning roller 203 to rotate through the belt. At this time, the plate body 6 is between the two cleaning rollers 203, so the plate body 6 can be brushed under the rotation of the two cleaning rollers 203. Open the automatic valve 210, and the cleaning liquid enters the inside of the spray pipe 209 through the connecting water pipe 214 and sprays out the cleaning liquid through the spray pipe 209.Spraying the cleaning liquid on the plate body 6 and the cleaning roller 203 can wash the plate body 6, and at the same time can wash the cleaning roller 203. Meanwhile, under the connection of the connecting water pipe 214, the cleaning liquid is introduced into the inside of the through water pipe 212 and sprayed out through the spray head 213, so as to be able to spray the plate body 6.

[0038] The drying mechanism 3 includes a fixing ring 301 which provides an installation position. The fixing ring 301 is fixedly connected to one end of the top of the installation shell 1. A fan 302 is detachably connected inside the fixing ring 301. The rotation of the fan 302 can provide the power for gas flow. Both external ends of the fan 302 are fixedly connected with engaging blocks 303. An installation groove 304 is formed inside the engaging block 303, which can provide an installation position. A return spring 305 is arranged inside the installation groove 304, which can provide the power for the reset of the limiting disc 306. A limiting disc 306 is slidably connected inside the installation groove 304, which can play a limiting role. One end of the limiting disc 306 away from the return spring 305 is fixedly connected with an engaging head 307. The top of the limiting disc 306 is fixedly connected with a pushing plate 308. A sliding groove 309 is formed at the top of the engaging block 303, and the pushing plate 308 is slidably connected inside the sliding groove 309. The other end of the top of the installation shell 1 is fixedly connected with an installation ring 310. A ventilation pipe 312 is detachably connected between the top of the fixing ring 301 and the top of the installation ring 310. A plurality of heating wires 311 are fixedly connected inside the installation ring 310, and the heating wires 311 can heat the air passing through the installation ring 310. One end of the return spring 305 is fixedly connected inside the installation groove 304, and the other end of the return spring 305 is fixedly connected to the end of the limiting disc 306 away from the engaging head 307. The engaging head 307 penetrates through the inside of the engaging block 303 and is engaged with the inside of the top end of the installation shell 1. After the cleaning is completed, the plate body 6 will enter the inside of the installation shell 1 equipped with the installation ring 310 and the fixing ring 301 along with the conveyor belt 5. The fan 302 is started, and the fan 302 sucks the air into the inside of the ventilation pipe 312. After the air flow is heated by the heating wires 311, the plate body 6 can be dried. When the fan 302 needs to be disassembled, the pushing plate 308 is pushed towards the fixing ring 301, which can drive the limiting disc 306 to move towards the fixing ring 301. At the same time, the return spring 305 is compressed by the limiting disc 306 and the engaging head 307 enters the inside of the installation shell 1, so as to release the engagement between the engaging head 307 and the top of the installation shell 1, and the fixing ring 301 can be disassembled, that is, it is convenient to replace or repair the fan 302.

[0039] The filtering mechanism 4 includes a fixed cover 401 which provides a basis for installation. The top of the fixed cover 401 is fixedly connected to the bottom of the water suction pipe 207. Fixed blocks 402 are fixedly connected to both outer ends of the fixed cover 401. A sliding groove 403 is provided inside the fixed block 402. Two rotating grooves 404 are provided on the inner wall of the fixed cover 401. A fixed frame 405 is fixedly connected to one side of the top of the fixed cover 401 which provides an installation position. A sliding plug rod 406 is slidably connected inside the fixed frame 405. A pushing spring 407 is sleeved outside the sliding plug rod 406. A pulling handle 408 is fixedly connected to the outside of the sliding plug rod 406 which is convenient for the staff to pull. A fixed frame 409 is provided inside the bottom end of the fixed cover 401. The inside of the fixed frame 409 has a function of accommodating. The pushing spring 407 can provide the power for the pulling handle 408 to reset, and then can drive the sliding plug rod 406 to reset. Two fixed ears 410 are fixedly connected to the outer top of the fixed frame 409. A clamping hole 411 is provided inside the fixed ear 410. One end of the pushing spring 407 is fixedly connected to the bottom of the top end of the fixed frame 405, and the other end of the pushing spring 407 is fixedly connected to the top of the pulling handle 408. The fixed ear 410 is engaged with the rotating groove 404, and the bottom of the sliding plug rod 406 is engaged with the inside of the clamping hole 411. A filter element 412 is provided inside the fixed frame 409. The bottom of the sliding plug rod 406 penetrates through the top of one of the pulling handles 408. When the filter element 412 needs to be replaced, first pull the pulling handle 408 upward, which can drive the sliding plug rod 406 to move upward, and then can compress the pushing spring 407 by using the pulling handle 408. At the same time, the sliding plug rod 406 moves out of the inside of the clamping hole 411. At this time, the fixed frame 409 can be rotated, so that the fixed frame 409 drives the fixed ear 410 to rotate towards the notch of the rotating groove 404. When the fixed ear 410 moves to the notch of the rotating groove 404, the fixed frame 409 can be pulled out of the inside of the fixed cover 401. At this time, the filter element 412 can be replaced. When installing the fixed frame 409, pull the pulling handle 408 upward, align the fixed ear 410 with the notch of the rotating groove 404, slide the fixed ear 410 into the inside of the rotating groove 404, and rotate the fixed frame 409 in the reverse direction, so that the fixed ear 410 can be slid into the inside of the sliding groove 403. At this time, release the pulling handle 408, and under the action of the pushing spring 407, it can drive the pulling handle 408 to move downward, and can drive the sliding plug rod 406 to move downward, so that the bottom of the sliding plug rod 406 can be re-engaged with the clamping hole 411, and then the replacement of the filter element 412 can be completed.

[0040] Working principle: When cleaning the plate body 6, start the conveyor belt 5. When the conveyor belt 5 transports the plate body 6 between the two cleaning rollers 203, start the water pump 206. The input end of the water pump 206 sucks the cleaning liquid inside the receiving water tank 216 through the filtering mechanism 4, and the cleaning liquid is introduced into the inside of the fixed box 204 through the output end of the water pump 206 and the water outlet pipe 208, and can drive the impeller 205 to rotate, thereby driving the upper cleaning roller 203 to rotate, and then driving the lower cleaning roller 203 to rotate through the belt. At this time, the plate body 6 is between the two cleaning rollers 203, so the plate body 6 can be brushed under the rotation of the two cleaning rollers 203. Open the automatic valve 210, and the cleaning liquid enters the inside of the spray pipe 209 through the connecting water pipe 214 and sprays the cleaning liquid through the spray pipe 209, spraying the cleaning liquid on the plate body 6 and the cleaning rollers 203, which can wash the plate body 6 and can also wash the cleaning rollers 203. At the same time, under the connection of the connecting water pipe 214, the cleaning liquid is introduced into the inside of the through water pipe 212 and sprayed out through the spray head 213, so as to spray the plate body 6;

[0041] After the cleaning is completed, the plate body 6 will enter the inside of the installation housing 1 equipped with the installation ring 310 and the fixed ring 301 along with the conveyor belt 5. Start the fan 302. The fan 302 can suck air into the ventilation pipe 312, and after heating the air flow through the heating wire 311, the plate body 6 can be dried. When the fan 302 needs to be disassembled, push the push plate 308 in the direction of the fixed ring 301, and then the limit disk 306 can be driven to move in the direction of the fixed ring 301, and the return spring 305 is compressed through the limit disk 306 while the engaging head 307 enters the inside of the installation housing 1, so that the engagement between the engaging head 307 and the top of the installation housing 1 can be released, and the fixed ring 301 can be disassembled, that is, it is convenient to replace or repair the fan 302;

[0042] When the filter element 412 needs to be replaced, the pulling handle 408 is first pulled upward, which can then drive the sliding rod 406 to move upward, and then the pulling handle 408 can be used to compress the push spring 407, and the sliding rod 406 moves out of the inside of the engaging hole 411. At this time, the fixing frame 409 can be rotated so that the fixing frame 409 drives the fixing ear 410 to rotate toward the notch of the rotating groove 404. When the fixing ear 410 moves to the notch of the rotating groove 404, the fixing frame 409 can be pulled out of the interior of the fixing cover 401, and the filter element 412 can be replaced. When installing the fixing frame 409, pull the pulling handle 408 upward, face the fixing ear 410 to the notch of the rotating groove 404, slide the fixing ear 410 into the inside of the rotating groove 404, and rotate the fixing frame 409 in the opposite direction, so that the fixing ear 410 can slide into the inside of the sliding groove 403. At this time, release the pulling handle 408, and the pulling handle 408 can be driven downward by the action of the push spring 407, and the sliding rod 406 can be driven downward, so that the bottom of the sliding rod 406 can be re-engaged with the engaging hole 411, and then the filter element 412 can be replaced.

[0043] Example 2:

[0044] A method for producing an aluminum nitride-coated aluminum ceramic substrate comprises the following steps:

[0045] Step 1: Use 10-20% by mass sodium hydroxide solution to alkali-wash and roughen the aluminum nitride ceramic plate, and then cut it;

[0046] Step 2: The aluminum nitride ceramic plate roughened in step 1 is subjected to cold spray coating, the high-purity aluminum foil and ceramic are clamped into a forming mold in a cross-laminated manner, and the heat dissipation aluminum layer is formed by hot die casting and then clamped and sintered;

[0047] Step 3: Surface treatment is performed on the product sintered in step 2 to obtain an aluminum nitride-coated aluminum ceramic substrate;

[0048] Step 4: Place the plate 6 on the conveyor belt 5, clean it through the cleaning mechanism 2, and dry it using the drying mechanism 3, so as to obtain a clean aluminum nitride-coated aluminum ceramic substrate.

[0049] Step 1: Preprocessing

[0050] The surface of the aluminum nitride ceramic plate was roughened by alkaline washing with a 15% by mass sodium hydroxide solution to obtain a roughened aluminum nitride ceramic plate with a surface roughness Ra of 0.32 μm, which was then cut into pieces according to the specified specifications. The aluminum plate to be used was cut into pieces according to the specified specifications, and the oxide layer was removed by a 3% by mass sodium hydroxide solution, followed by acid washing, deionized water washing, and drying for later use.

[0051] The specific process steps are as follows:

[0052] A) Prepare the roughened ceramic plate

[0053] Use MARUWA aluminum nitride ceramic plate with dimensions of 138.1mm * 190.2mm * 1.0mm, flexural strength of about 430MPa, thermal conductivity of about 189W / m·K, and surface roughness Ra of about 0.17μm; prepare a sodium hydroxide solution with a mass fraction of 15%, solution temperature of 46°C, soak the aluminum nitride ceramic plate in the sodium hydroxide solution for 5 minutes, and measure the surface roughness Ra to be about 0.32μm; after cleaning and drying with deionized water, obtain the surface-roughened aluminum nitride ceramic plate for standby;

[0054] B) Use high-purity aluminum plates of grade 1A99 with three specifications of 0.3mm, 0.8mm, and 5.0mm, prepare a sodium hydroxide solution with a mass fraction of 3%, temperature of 45°C, soak and wash for 3 minutes and then wash with deionized water, then use a 10% nitric acid solution, temperature of 25°C, acid wash for 15 seconds and then wash with deionized water and dry for standby;

[0055] C) Cut the edges of the aluminum nitride ceramic and the aluminum plate processed in steps A and B, and cut them into sizes of 60mm * 120mm for standby;

[0056] Step two: Multi-layer composite sintering

[0057] Take the roughened aluminum nitride ceramic in step one for surface treatment, perform cold spray coating processing on the surface of the roughened ceramic, the coating composition is one or a combination of Si, Cu, Ag, Mg, Ti, Ni, Sn, Zn, the surface coating thickness is 3.5 - 10μm, place the high-purity aluminum foil and the ceramic in a cross-laminated manner and clamp them into a forming mold, and clamp and sinter them in the order of the surface pattern metal aluminum layer, insulating ceramic plate layer, intermediate buffer metal aluminum layer, structure-reinforcing ceramic plate layer, and bottom heat-die-cast forming heat dissipation aluminum layer, the clamping thickness is 1.5 - 8.0mm, the pre-pressure is 3 - 5MPa, the sintering temperature is 580 - 660°C, the forming pressure is 10 - 20MPa, and the heat preservation time is 30 - 60 minutes;

[0058] The specific process steps are as follows:

[0059] D) Place the segmented aluminum nitride ceramic plate in step C in a cold spray machine to deposit pure copper on the upper and lower surfaces. Select spherical copper powder with a particle size of 1 - 3 microns for the copper powder, use high-pressure compressed air as the accelerating gas, the gas pressure is 2.5MPa, and the temperature is 450°C. Argon is used as the powder feeding gas, the pressure is 2.8MPa, the powder feeding rate is 12 - 20g / min, the moving speed is 20mm / s, and the thickness of the sprayed copper layer is about 9.3μm.

[0060] E) Stack and clamp the laminated structure of 5.0 mm bottom heat-dissipating aluminum - 1.0 mm reinforced ceramic layer - 0.8 mm intermediate buffer aluminum layer - 1.0 mm ceramic layer - 0.3 mm surface aluminum layer into a graphite mold. The graphite mold is spray-coated and dried with high-temperature insulation coating boron nitride to facilitate demolding after forming.

[0061] F) The graphite mold has a bottom surface with needle-shaped fin grooves, with a root size of 1 mm * 1 mm, a depth of 3.5 mm, and a wall thickness of 20 mm.

[0062] G) Place multiple laminated and pressurized sheets in a vacuum pressure brazing furnace for welding. The pre-pressurization pressure is 3 MPa; when sintering reaches a temperature of 640 °C, increase the forming pressure to 15 MPa; keep the temperature for 60 min and cool with the furnace.

[0063] Step Three: Surface Treatment

[0064] Demold the heat sink bottom plate of the multi-layer composite sintering completed in Step Two, and perform overall sandblasting, surface grinding, cleaning and drying for standby. The surface roughness Ra ≤ 0.6;

[0065] H) After demolding, perform overall sandblasting on the sample. Select 320-mesh corundum sand, with a spraying pressure of 30 N / cm 2 , and the spraying time is 120 s.

[0066] I) Then, use 400#, 800#, 1200#, and 2000# sandpapers to grind the surface layer and edge burrs of the sample, polish, clean, wash and dry. The measured surface roughness Ra of the sample is 0.25 μm.

[0067] Step Four: Surface Plating

[0068] Perform surface electroless nickel and gold plating on the multi-layer composite heat sink bottom plate after surface treatment in Step Three. The thickness of the Ni layer is 3 - 9 μm, and the thickness of the Au layer is 0.04 - 0.10 μm. The sample is alkali-washed, pickled, zinc-dipped, pickled again, and then activated by secondary zinc-dipping before nickel and gold plating. The specific process is as follows:

[0069] J) For alkali washing, use a 5% mass fraction sodium hydroxide solution as the alkali washing solution and place the sample surface in the solution for 1 - 2 min; for pickling, use a 10% mass fraction nitric acid solution for pickling for 1 - 2 min; during zinc dipping and secondary zinc dipping, use a zinc dipping solution prepared with 10 - 40 g / L sodium hydroxide and 50 - 100 g / L zinc oxide to dip the sample surface for 20 - 40 s. The above test temperatures are all controlled at 20 - 40 °C.

[0070] K) Place the surface of the sample in electroless nickel plating solution for surface nickel plating. The electroless nickel plating solution consists of 25 g / L of sodium sulfate heptahydrate, 36 g / L of sodium hypophosphite monohydrate, and 12 g / L of trisodium citrate dihydrate, with the rest being pure water. The pH value of the electroless nickel plating solution is 4.5 - 5.6, the experimental temperature is 80 °C, and the nickel plating is carried out for 30 min. The thickness of the surface nickel layer is measured to be 4 - 5 μm.

[0071] L) After the nickel-plated sample is cleaned with pure water to ensure the cleanliness of the sample surface, it is then placed in a gold plating solution containing 5 g / L of gold trichloride, 75 g / L of ammonium chloride, 50 g / L of sodium citrate, 20 g / L of sodium hypophosphite, and 14 g / L of nickel chloride for surface chemical gold plating. The pH value of the gold plating solution is controlled at 5.3 - 6.2, and the thickness of the surface gold layer is measured to be 0.08 - 0.1 μm.

[0072] Comparative Example 1:

[0073] In this comparative example, a vacuum hot pressing powder metallurgy method is used to prepare an aluminum silicon carbide base plate. Silicon carbide powder with a D50 of 10 - 15 μm and spherical aluminum powder with a particle size of 1 - 3 μm are mixed. The mass ratio of silicon carbide powder to aluminum powder is 1:3 - 5. It is placed in a graphite mold for hot pressing sintering, with a pressure of 5 - 15 MPa, a sintering temperature of 650 - 700 °C, an insulation time of 30 - 60 min, and cooled in the furnace and demolded. The specific process is as follows:

[0074] A) Mixing

[0075] Weigh 60.3 g of high-purity silicon carbide powder with a particle size of 10 - 15 μm and 39.8 g of high-purity aluminum micro-powder with a particle size of 1 - 3 μm, and place them in a ball mill can mixer for stirring at a speed of 1800 / min for 10 min.

[0076] B) Pressurized sintering

[0077] Take the micro-powder after mixing in the above step and place it in a 60 mm * 120 mm graphite mold. The pressure of the pressing head is 10 Mpa. After holding at 680 °C for 60 min in a vacuum sintering furnace, sinter and cool it and take it out.

[0078] Performance test comparison:

[0079] The samples of Example 2 and Comparative Example 1 are detected for density and thermal conductivity by a float densitometer and a laser thermal conductivity tester. The density of the sample in Example 2 is 3.08 g / cm3, and the density of the sample in Comparative Example 1 is 2.98 g / cm3. The flexural strength of Example 2 tested on a universal testing machine is 380 MPa, and the flexural strength of the comparative example is 312 MPa. After surface inkjet printing on the samples of Example 2 and Comparative Example 1, they are detected in a laser thermal conductivity instrument. The comprehensive thermal conductivity of the sample in Example 2 is 218 W / m·K, and the thermal conductivity of the sample in Comparative Example 1 is 179 W / m·K. The specific comparison experimental data are shown in Table 1 below;

[0080] Example 2 Comparative Example 1 Density <![CDATA[3.08g / cm 3 > <![CDATA[2.98g / cm 3 > Flexural strength 380 MPa 312 MPa Thermal conductivity 218 W / m·K 179 W / m·K Flatness <50 μm (100 mm) <43 μm (100 mm)

[0081] For the aluminum-silicon carbide composite material sample obtained according to Comparative Example 1, its surface was ground and polished, and observed under a microscope. There were silicon carbide particle protrusions and tiny pores on the surface, which affected the subsequent surface welding process.

[0082] The beneficial effects of Example 2 compared with Comparative Example 1 are as follows:

[0083] Through pretreatment, the surface roughness of the aluminum nitride ceramic plate was controlled and the oxide layer on the aluminum plate surface was removed, increasing the wettability between the aluminum layer and the aluminum nitride ceramic surface during hot press sintering, and realizing the bonding between the aluminum surface and the ceramic surface;

[0084] For multi-layer pressure sintering, the fine circuit can be prepared on the surface pattern metal aluminum layer of the surface layer by traditional film pasting, exposure and etching methods. The insulating ceramic plate layer plays a role of high thermal conductivity, insulation and voltage resistance in the high-temperature and high-pressure environment of high-power devices. The intermediate buffer metal aluminum layer can fully absorb the thermal stress brought by the thermal cycle to further improve the reliability of the integrated heat dissipation bottom plate. The structure-enhanced ceramic plate layer can improve the warping caused by the unequal double-sided stress after the heat dissipation bottom plate is formed, greatly improving the overall flatness requirement of the heat dissipation bottom plate. The bottom heat die-casting formed heat dissipation aluminum layer adopts the heat die-casting forming method to prepare aluminum heat dissipation fins at one time, enhancing the heat conduction and heat dissipation efficiency.

[0085] Patterns can be prepared on the surface aluminum surface of the surface layer, nickel-gold plating is carried out on the surface to improve the solderability, realizing subsequent welding and multiple applications, and meeting the high-reliability surface plating requirements of semiconductor device packaging substrates.

[0086] Compared with the packaging method of welding the heat dissipation bottom plate or radiator for the traditional IGBT module metal-ceramic substrate, the integrated heat dissipation bottom plate of the present invention can achieve high-efficiency and rapid forming, sinter and prepare the metal-ceramic substrate and the radiator into a whole at one time, and effectively reduce the overall thermal resistance layer by using the diffusion welding method; increasing the heat conduction and heat dissipation efficiency, and realizing the preparation of a high-reliability heat dissipation bottom plate.

[0087] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification is only the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An aluminum nitride-coated aluminum ceramic substrate production device, including an installation housing (1), characterized in that, Inside the installation housing (1), a cleaning mechanism (2) is provided. At the top of the installation housing (1), a drying mechanism (3) is provided. At the bottom of the cleaning mechanism (2), a filtering mechanism (4) is provided. Inside the installation housing (1), two conveyor belts (5) are provided. On the top of the conveyor belts (5), a plurality of plate bodies (6) are provided. The cleaning mechanism (2) is used to clean the plate bodies (6) on the conveyor belts (5), the drying mechanism (3) is used to dry the plate bodies (6), and the filtering mechanism (4) is used to filter the cleaning liquid.

2. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 1, characterized in that, The cleaning mechanism (2) includes a mounting frame (201). The top of the mounting frame (201) is fixedly connected inside the installation housing (1). The bottom of the mounting frame (201) is fixedly connected with a mounting frame (202). Inside the mounting frame (202), two cleaning rollers (203) are rotatably connected. At one end of the outside of the mounting frame (202), a fixed box (204) is fixedly connected. Inside the fixed box (204), an impeller (205) is rotatably connected. One end of the upper cleaning roller (203) is fixedly connected to the middle of the impeller (205). Inside the installation housing (1), a water pump (206) is fixedly connected. The input end of the water pump (206) is fixedly connected with a water suction pipe (207). The output end of the water pump (206) is fixedly connected with a water outlet pipe (208). The end of the water outlet pipe (208) far from the water pump (206) is fixedly connected to the outside of the fixed box (204). At the bottom end of the outside of the fixed box (204), a connecting water pipe (214) is fixedly connected. On one side of the top of the mounting frame (202) and at the inner bottom of the mounting frame (202), spray pipes (209) are fixedly connected. A communicating pipe (215) is fixedly connected between the two spray pipes (209). The end of the lower spray pipe (209) far from the communicating pipe (215) is fixedly connected with an automatic valve (210). The end of the automatic valve (210) far from the spray pipe (209) is fixedly connected to the outside of the connecting water pipe (214). At the top end inside the installation housing (1), two fixing rods (211) are fixedly connected. A water pipe (212) is fixedly connected between the bottoms of the two fixing rods (211). A plurality of spray heads (213) are fixedly connected to the bottom of the water pipe (212). The end of the connecting water pipe (214) far from the fixed box (204) is fixedly connected to one end of the water pipe (212). A water receiving tank (216) is fixedly connected to the bottom of the installation housing (1).

3. The production equipment for an aluminum-coated aluminum nitride ceramic substrate according to claim 1, characterized in that, The drying mechanism (3) includes a fixing ring (301). The fixing ring (301) is fixedly connected to one end of the top of the installation housing (1). A fan (302) is detachably connected inside the fixing ring (301). Both outer ends of the fan (302) are fixedly connected with engaging blocks (303). An installation groove (304) is formed inside the engaging block (303). A return spring (305) is arranged inside the installation groove (304). A limiting disc (306) is slidably connected inside the installation groove (304). One end of the limiting disc (306) away from the return spring (305) is fixedly connected with an engaging head (307). A pushing plate (308) is fixedly connected to the top of the limiting disc (306). A sliding groove (309) is formed at the top of the engaging block (303). The pushing plate (308) is slidably connected inside the sliding groove (309). Another end of the top of the installation housing (1) is fixedly connected with an installation ring (310). A ventilation pipe (312) is detachably connected between the top of the fixing ring (301) and the top of the installation ring (310). A plurality of heating wires (311) are fixedly connected inside the installation ring (310).

4. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 2, characterized in that, The filtering mechanism (4) includes a fixing cover (401). The top of the fixing cover (401) is fixedly connected to the bottom of the water suction pipe (207). Both outer ends of the fixing cover (401) are fixedly connected with fixing blocks (402). A sliding groove (403) is formed inside the fixing block (402). Two rotating grooves (404) are formed at the inner wall of the fixing cover (401). A fixing frame (405) is fixedly connected to one side of the top of the fixing cover (401). A sliding insertion rod (406) is slidably connected inside the fixing frame (405). A pushing spring (407) is sleeved outside the sliding insertion rod (406). A pulling handle (408) is fixedly connected to the outside of the sliding insertion rod (406). A fixing frame (409) is arranged inside the bottom end of the fixing cover (401). Two fixing ears (410) are fixedly connected to the outer top end of the fixing frame (409). A clamping hole (411) is formed inside the fixing ear (410).

5. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 3, characterized in that, One end of the return spring (305) is fixedly connected inside the installation groove (304), and the other end of the return spring (305) is fixedly connected to the end of the limiting disc (306) away from the engaging head (307).

6. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 3, characterized in that, The engaging head (307) penetrates through the inside of the engaging block (303), and the engaging head (307) is engaged with the inside of the top end of the installation housing (1).

7. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 4, characterized in that, One end of the pushing spring (407) is fixedly connected to the bottom of the top end of the fixing frame (405), and the other end of the pushing spring (407) is fixedly connected to the top of the pulling handle (408).

8. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 4, characterized in that, The fixed ear (410) is engaged with the rotating groove (404), the bottom of the sliding insertion rod (406) is engaged with the inside of the engaging hole (411), a filter element (412) is arranged inside the fixed frame (409), and the bottom of the sliding insertion rod (406) penetrates through the top of one of the pulling handles (408).

9. The production equipment of an aluminum nitride-coated aluminum ceramic substrate according to claim 4, characterized in that, The two cleaning rollers (203) are connected by a belt, and two rotating doors (7) are rotatably connected to one side of the installation housing (1), and an observation window (8) is arranged in the middle of the rotating door (7).

10. A production method of an aluminum-coated aluminum nitride ceramic substrate, according to the production equipment of an aluminum-coated aluminum nitride ceramic substrate described in claim 1, characterized in that: It includes the following steps: Step 1: The aluminum nitride ceramic plate is subjected to alkaline washing and roughening with a sodium hydroxide solution with a mass fraction of 10-20%, and then cut; Step 2: The roughened aluminum nitride ceramic plate in Step 1 is subjected to cold spraying coating processing. The high-purity aluminum foil and the ceramic are clamped and placed in a forming die in a cross-laminated manner, and are clamped and sintered by means of hot die casting to form a heat dissipation aluminum layer; Step 3: The product sintered in Step 2 is subjected to surface treatment to obtain an aluminum nitride aluminum-clad ceramic substrate; Step 4: The plate body (6) is placed on the conveyor belt (5), and is cleaned by the cleaning mechanism (2) and dried by the drying mechanism (3), so as to obtain a clean aluminum nitride aluminum-clad ceramic substrate.

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