Multi-ion source synchronous sputtering coating device and process

Abstract

The present application relates to sputtering coating technical field, specifically to a kind of multiple ion source synchronous sputtering coating device and process, multiple ion source synchronous sputtering coating process includes using multiple ion source synchronous sputtering coating device to carry out coating;Multiple ion source synchronous sputtering coating device includes shell and multiple cathode jet head inserted in shell, cathode jet head includes connecting arm, target seat, pressure joint, shield and multiple first bolt, target seat is used to place target material;Pressure joint is pressed on target material;Shield is covered on pressure joint, and can be formed with connecting arm Threaded cooperation, shield is provided with multiple first tooth convex;First bolt is inserted in pressure joint, and can be formed with target seat Threaded cooperation, and can be formed with pressure joint Stop cooperation, multiple second tooth convex are set on each first bolt, second tooth convex can be formed with first tooth convex Meshing cooperation, so that all first bolt can be driven by shield synchronous rotation, so that can improve dismounting efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of sputtering coating, in particular to a multi-ion source synchronous sputtering coating device and process. BACKGROUND

[0002] Sputtering coating is a physical vapor deposition (PVD) technology, whose principle is that in a high vacuum environment, high-energy ions accelerated by an electric field bombard a target material, so that target atoms or molecules overcome the binding force and escape, and then move irregularly in a vacuum environment to form a uniform thin film on the surface of a substrate.

[0003] Magnetron sputtering coating is a specific technical means of sputtering coating, which introduces a magnetic field on the surface of the target cathode based on sputtering coating, and uses the magnetic field to constrain charged particles to increase plasma density and increase the sputtering rate; the existing magnetron sputtering coating equipment is usually composed of a vacuum chamber, a vacuum system, a cathode target, a sputtering power supply and a gas inlet system; during coating, the vacuum system first evacuates the vacuum chamber to a specified vacuum degree, and the gas inlet system fills in argon; then, the sputtering power supply applies high voltage to the argon to initiate glow discharge and ionize the argon; the positively charged argon ions are attracted to the cathode by the negative potential and hit the cathode target at high speed, sputtering atoms and depositing them on the anode substrate to gradually form a thin film with specific properties.

[0004] However, the existing magnetron sputtering coating equipment also has some problems when in use: when the target material needs to be replaced, the operator needs to loosen a plurality of bolts one by one, and then the old target material can be removed, which not only is cumbersome and requires a lot of time and effort, but also during the disassembly process, the bolts are easy to lose due to their large number and small size, and once the bolts are lost, it will bring great trouble to the subsequent reassembly of the equipment, seriously affecting the ease of use and work efficiency of the equipment. SUMMARY

[0005] Therefore, it is necessary to provide a multi-ion source synchronous sputtering coating device and process to solve the problem of operation trouble in the target material replacement process of the existing magnetron sputtering coating equipment.

[0006] The above-mentioned purpose is achieved by the following technical solutions:

[0007] A multi-ion source synchronous sputtering coating device, comprising a housing and a plurality of cathode jets inserted into the housing;

[0008] The cathode head is directed to a component to be plated and comprises a connecting arm, a target seat, a compression part, a shielding cover and a plurality of first bolts, the connecting arm is arranged on the shell; the target seat is arranged on the connecting arm and is used for placing a target material; the compression part is compressed on the target material; the shielding cover covers the compression part and the target seat and is threadedly connected with the connecting arm, a plurality of first tooth protrusions are arranged on the shielding cover in a circumferential direction; the first bolts are inserted into the compression part and are threadedly connected with the target seat, the first bolts are stopper-connected with the compression part, a plurality of second tooth protrusions are arranged on each of the first bolts in a circumferential direction, and the second tooth protrusions are engaged with the first tooth protrusions.

[0009] Further, an external thread is arranged on each of the first bolts; a plurality of mounting holes are arranged on the target seat, and an internal thread is arranged on each of the mounting holes, the internal thread is threadedly connected with the external thread; the shielding cover is stopper-connected with all the first bolts; along a gravity direction, when the first bolts are below the mounting holes, the cathode head further comprises a plurality of first limiting grooves, a plurality of second limiting grooves, a plurality of protrusions and a plurality of first elastic members, the first limiting grooves are arranged on inner circumferential walls of the mounting holes and are stopper-connected with the first bolts; the second limiting grooves are arranged on the inner circumferential walls of the mounting holes and are communicated with the first limiting grooves; the protrusions are arranged on adjacent layers of the external threads closest to the mounting holes in an axial direction of the first bolts, the protrusions are slidably inserted into the second limiting grooves to limit rotation of the first bolts, and the protrusions are threadedly connected with the internal threads; the first elastic members are arranged between the compression part and the first bolts and are configured to have a tendency to insert the protrusions into the second limiting grooves.

[0010] Further, the first elastic members are elastic sheets.

[0011] Further, each of the first bolts is provided with external threads; the target holder is provided with a plurality of mounting holes, each of which is provided with internal threads, the internal threads and the external threads form a threaded fit; the shielding cover can form a stop fit with all the first bolts; along the direction of gravity, when the first bolts are located above the mounting holes, the cathode shower head further comprises a plurality of first limiting grooves, second limiting grooves, protrusions and second elastic members, the first limiting grooves are opened on the inner circumferential wall of the mounting hole and can form a stop fit with the first bolts; the second limiting grooves are opened on the inner circumferential wall of the mounting hole and are in communication with the first limiting grooves; a plurality of the protrusions are arranged along the axial direction of the first bolt and are respectively arranged on the adjacent multiple layers of the external threads closest to the mounting hole, the protrusions can be slidably inserted into the second limiting grooves to limit the rotation of the first bolts, and the protrusions can form a threaded fit with the internal threads; the second elastic member is arranged between the target holder and the first bolt and is configured to have a tendency to pull out the first bolt from the mounting hole.

[0012] Further, the second elastic member is a compression spring.

[0013] Further, the shielding cover has a sleeved first part and a second part, the second part is located on the outside, the second part can slide along the axial direction relative to the first part, can rotate relative to the first part, and can form a stop fit with the first part, and when the second part and the first part form a stop fit, the second part can frictionally drive the first part to rotate.

[0014] Further, the cathode shower head further comprises a rotating arm, the rotating arm is hinged on the connecting arm, and the rotating arm can rotate around its own axis.

[0015] Further, the multi-ion source synchronous sputtering and plating device further comprises a first driving member, the first driving member is configured to be able to provide a driving force for the rotation of the rotating arm.

[0016] Further, the multi-ion source synchronous sputtering and plating device further comprises a second driving member, the second driving member is configured to be able to provide a driving force for the rotation of the connecting arm around the hinge point.

[0017] The application also provides a multi-ion source synchronous sputtering and plating process, which adopts a multi-ion source synchronous sputtering and plating device, and comprises the following steps:

[0018] S1, the shielding cover is reversely rotated, the shielding cover drives all the first bolts to rotate through the meshing fit between the first tooth protrusions and the second tooth protrusions, so that the first bolts are separated from the fit between the pressure contact part and the target holder;

[0019] S2, the old target is removed from the target seat, and a new target is replaced;

[0020] S3, the shielding cover is rotated forward, the shielding cover drives all the first bolts to rotate through the meshing cooperation between the first tooth convex and the second tooth convex, and the first bolts are re-cooperated with the pressing part and the target seat;

[0021] S4, coating.

[0022] The present application has the following beneficial effects:

[0023] The present application relates to a kind of multi-ion source synchronous sputtering coating device and process, multi-ion source synchronous sputtering coating process includes using multi-ion source synchronous sputtering coating device to carry out coating;Multi-ion source synchronous sputtering coating device when replacing target material, first rotating shielding cover, make shielding cover and the thread cooperation between connecting arm apart, then continue to rotate shielding cover, shielding cover drives all the first bolts to rotate through the meshing cooperation between the first tooth convex and the second tooth convex;First bolt rotates first to remove and the stop cooperation between pressing part, so that pressing part is no longer pressed target material, then apart from the thread cooperation between target seat, so that shielding cover, pressing part and all the first bolts can be removed from target seat as a whole, then the old target is removed from the target seat, and a new target is replaced, this process does not need to unscrew multiple bolts one by one, improve the replacement efficiency of target material, and first bolt is always in pressing part, avoid the problem that bolt is lost due to multiple, small volume, significantly improve the use simplicity of equipment, and then guarantee the working efficiency of equipment.

[0024] Further, by setting cathode jet head also includes a plurality of first limiting groove, second limiting groove, convex and first elastic piece, in use process, when first bolt and installation hole are aligned, first bolt is inserted into installation hole under the action of first elastic piece, and forms stop cooperation with first limiting groove;Then rotate shielding cover, shielding cover drives all the first bolts to rotate through the meshing cooperation between the first tooth convex and the second tooth convex;When any first bolt rotates to the convex and second limiting groove align, first bolt is inserted into second limiting groove under the action of first elastic piece, and stays in second limiting groove, and second tooth convex on it and first tooth convex are disengaged;When all the first bolts are inserted into second limiting groove, shielding cover moves synchronously, and forms stop cooperation with all the first bolts again, then continue to rotate shielding cover, shielding cover drives all the first bolts to rotate through the meshing cooperation between the first tooth convex and the second tooth convex, so that all the first bolts are simultaneously formed with the thread cooperation of target seat, so as to ensure that the fastening force between all the first bolts and target seat is same.

[0025] Furthermore, by setting the shield to have a first part and a second part that fit together, the second part can form a threaded engagement with the connecting arm when the shield rotates, while the first part can periodically drive all the first bolts to rotate through the meshing engagement between the first tooth and the second tooth. This improves the efficiency of disassembly and assembly while effectively avoiding jamming problems caused by different thread pitches. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural schematic diagram of the multi-ion source synchronous sputtering coating apparatus provided in an embodiment of the present invention;

[0027] Figure 2 This is a cross-sectional structural schematic diagram of the multi-ion source synchronous sputtering coating apparatus provided in an embodiment of the present invention;

[0028] Figure 3 This is a cross-sectional view of the cathode nozzle of the multi-ion source synchronous sputtering coating apparatus provided in an embodiment of the present invention.

[0029] Figure 4 A three-dimensional structural diagram of the cathode nozzle of the multi-ion source synchronous sputtering coating apparatus provided in an embodiment of the present invention, without the rotating arm;

[0030] Figure 5 A cross-sectional view of the cathode nozzle of the multi-ion source synchronous sputtering coating apparatus provided in an embodiment of the present invention, with the rotating arm removed.

[0031] Figure 6 A three-dimensional cross-sectional view of the cathode nozzle of the multi-ion source synchronous sputtering coating apparatus provided in the embodiment of the present invention, with the rotating arm, target material, pressing part, shielding cover and first bolt removed;

[0032] Figure 7 for Figure 6 A magnified view of the structure at point A in the middle;

[0033] Figure 8 This is a three-dimensional cross-sectional view of the crimping part, the first bolt, the target material, and the protrusion of the multi-ion source synchronous sputtering coating device provided in an embodiment of the present invention.

[0034] Figure 9 for Figure 8 A magnified schematic diagram of the structure at point B in the middle;

[0035] Figure 10 for Figure 8 A magnified schematic diagram of the structure at point C in the middle;

[0036] Figure 11 This is a three-dimensional cross-sectional view of the shielding structure of the multi-ion source synchronous sputtering coating device provided in an embodiment of the present invention.

[0037] wherein:

[0038] 1. a shell;

[0039] 2. a cathode jet head; 201, a connecting arm; 2011, a hinged hole; 2012, a sliding column; 202, a target seat; 2021, a mounting hole; 203, a pressure joint; 2031, a first ring table; 2032, a slot; 2033, a blocking groove; 204, a shielding cover; 2041, a first tooth protrusion; 2042, a first part; 20421, a third ring table; 2043, a second part; 20431, a ring groove; 20432, a fourth ring table; 2044, a second ring table; 205, a first bolt; 2051, a second tooth protrusion; 206, a first limiting groove; 207, a second limiting groove; 208, a protrusion; 209, a compression spring; 210, a rotating arm; 2101, a sliding groove; 2102, a hinged column; 211, a base; 212, a magnetic steel; 213, an end cover; 214, an insulating piece; 215, a magnet;

[0040] 3. a target material. DETAILED DESCRIPTION

[0041] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application is further described in detail below with reference to the embodiments and in conjunction with the drawings. It should be understood that the specific embodiments described herein are only used to explain the present application and should not be used to limit the present application.

[0042] The serial numbers of components in this paper, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequence or technical meaning. In this paper, "connection" and "coupling" include direct and indirect connection (coupling) unless otherwise specified. In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0043] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature is "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the first feature is horizontally higher than the second feature. The first feature is "under", "below" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the first feature is horizontally lower than the second feature.

[0044] As shown in Figures 1 to 11 , the multi-ion source synchronous sputtering coating device provided by an embodiment of the present application is used for coating a to-be-coated piece, and is provided with a shell 1 and a plurality of cathode jets 2 which are all inserted into the shell 1; wherein the cathode jets 2 are directed to the to-be-coated piece, and each include a connecting arm 201, a target seat 202, a press-fit part 203, a shielding cover 204 and a plurality of first bolts 205, the connecting arm 201 is arranged on the shell 1; the target seat 202 is arranged on the connecting arm 201 and is used for placing a target material 3; the press-fit part 203 is press-fitted on the target material 3; the shielding cover 204 is arranged on the press-fit part 203 and the target seat 202, and is threadedly connected with the connecting arm 201, and a plurality of first tooth protrusions 2041 are arranged on the shielding cover 204 in a circumferential direction; the first bolts 205 are inserted into the press-fit part 203 and are threadedly connected with the target seat 202, the first bolts 205 and the press-fit part 203 form a stopper connection, and a plurality of second tooth protrusions 2051 are arranged on each of the first bolts 205 in a circumferential direction, and the second tooth protrusions 2051 can be threadedly connected with the first tooth protrusions 2041.

[0045] Specifically, in the embodiment, four cathode jets 2 are arranged, as shown in Figure 1 , the four cathode jets 2 are all arranged on the top of the shell 1, as shown in Figure 2 , the cathode jets 2 are all downward and are directed to the middle part of the shell 1, so as to ensure that the to-be-coated piece can be coated by the cathode jets 2; as shown in Figure 8 , Figure 9 and Figure 10As shown, the target material 3 is in a disc structure and is arranged at the bottom of the target seat 202; the pressing part 203 is in a ring structure and can expose the target material 3 to ensure normal sputtering of the target material 3; the first ring table 2031 is arranged on the inner circumferential wall of the pressing part 203 near the bottom; the pressing part 203 is pressed on the target material 3 through the first ring table 2031 during installation to ensure the pressing effect on the target material 3; a plurality of insertion grooves 2032 are arranged on the top of the pressing part 203 and are uniformly arranged in the circumferential direction; the insertion grooves 2032 penetrate the outer circumferential wall of the pressing part 203; the first bolt 205 is inserted into the insertion groove 2032 in the radial direction during installation to ensure a certain positional relationship between the first bolt 205 and the pressing part 203; meanwhile, two blocking grooves 2033 are arranged on the sidewall of each insertion groove 2032; the blocking grooves 2033 are configured to form a friction fit with the first bolt 205 to limit the first bolt 205 from being separated from the pressing part 203 in the radial direction, so that the first bolt 205 can still stay in the pressing part 203 after the first bolt 205 is loosened.

[0046] The connecting arm 201 is arranged on the inner top wall of the shell 1; the shielding cover 204 is in a ring structure with both ends open and is sleeved on the bottom of the connecting arm 201 to expose the target material 3 and ensure normal sputtering of the target material 3; the first tooth protrusion 2041 is arranged on the inner circumferential wall of the shielding cover 204 and is arranged near the bottom; a plurality of first tooth protrusions 2041 are uniformly arranged in the circumferential direction; the second tooth protrusion 2051 is arranged on the middle part of the first bolt 205; a plurality of second tooth protrusions 2051 are uniformly arranged in the circumferential direction and can abut against the top of the insertion groove 2032 to ensure a stop fit with the pressing part 203 and ensure the pressing effect.

[0047] When the target material 3 needs to be replaced, the shielding cover 204 is first rotated and moved downward to be separated from the threaded fit with the connecting arm 201; after the shielding cover 204 and the connecting arm 201 are separated, the shielding cover 204 is moved downward to make the first tooth protrusion 2041 engage with the second tooth protrusion 2051, then the shielding cover 204 is rotated to drive all the first bolts 205 to rotate through the engagement fit between the first tooth protrusion 2041 and the second tooth protrusion 2051; the first bolt 205 is moved downward while rotating and first releases the stop fit with the pressing part 203 to make the pressing part 203 no longer press the target material 3, then the shielding cover 204, the pressing part 203 and all the first bolts 205 can be integrally detached from the target seat 202 after being separated from the threaded fit with the target seat 202; then the old target material is detached from the target seat 202 and a new target material is replaced; this process does not need to loosen the plurality of bolts one by one, improves the replacement efficiency of the target material 3, and the first bolt 205 is always in the pressing part 203 to avoid the problem that the bolts are easy to lose due to the large number and small size of the bolts, significantly improves the use simplicity of the equipment, and further ensures the working efficiency of the equipment.

[0048] After replacing the new target material, first, the crimping part 203 is crimped on the new target material, then the shielding cover 204 is sleeved at the bottom of the connecting arm 201, so that the first tooth protrusion 2041 and the second tooth protrusion 2051 are engaged, then the shielding cover 204 is rotated, the shielding cover 204 drives all the first bolts 205 to rotate through the engagement between the first tooth protrusion 2041 and the second tooth protrusion 2051, the first bolts 205 rotate and move upwards at the same time, until the crimping part 203 forms an abutting fit, so that the crimping part 203 is pressed on the new target material, then the shielding cover 204 is moved upwards, so that the first tooth protrusion 2041 and the second tooth protrusion 2051 are disengaged, then the shielding cover 204 is rotated, so that the shielding cover 204 is threadedly connected to the connecting arm 201.

[0049] In some embodiments, when the old target material is disassembled and replaced with a new target material, the fastening of the target material 3 is crucial; however, the prior art has significant defects in this regard: at present, the common operation mode is to manually tighten the bolts, due to the unevenness of the operator's hand force and the difficulty in accurately controlling the tightening degree of each bolt, it is inevitable that the tightening degree of each bolt is uneven, this difference will cause the target material 3 to be unevenly stressed during fixation, and in the subsequent sputtering process, the sputtering force received by different parts of the target material 3 deviates from the design expectation, thereby seriously affecting the use performance of the target material 3 and reducing the quality and stability of the film coating; even if a tightening force wrench is used to assist operation, it only improves the accuracy of the single bolt tightening force to a certain extent, but since each bolt still needs to be screwed, the operation process is cumbersome, and a large amount of time and labor cost is wasted, the work efficiency is low.

[0050] To solve the above problems, an outer thread is arranged on each first bolt 205; a plurality of mounting holes 2021 are arranged on the target seat 202, and an inner thread is arranged on each mounting hole 2021, the inner thread and the outer thread being in threaded cooperation; the shielding cover 204 can form a stop cooperation with all the first bolts 205; along the direction of gravity, when the first bolt 205 is located below the mounting hole 2021, the cathode jet head 2 further comprises a plurality of first limiting grooves 206, a second limiting groove 207, a protrusion 208 and a first elastic member, the first limiting groove 206 is arranged on the inner circumferential wall of the mounting hole 2021 and can form a stop cooperation with the first bolt 205; the second limiting groove 207 is arranged on the inner circumferential wall of the mounting hole 2021 and is in communication with the first limiting groove 206; a plurality of protrusions 208 are arranged along the axial direction of the first bolt 205 and are respectively arranged on the adjacent plurality of outer threads closest to the mounting hole 2021, the protrusion 208 can be slidably inserted into the second limiting groove 207 to limit the rotation of the first bolt 205, and the protrusion 208 can form threaded cooperation with the inner thread; the first elastic member is arranged between the crimping portion 203 and the first bolt 205 and is configured to have a tendency to insert the protrusion 208 into the second limiting groove 207.

[0051] Specifically, in the embodiment, to facilitate the shielding cover 204 to form a stop cooperation with all the first bolts 205, a second ring table 2044 is arranged on the inner circumferential wall of the shielding cover 204 close to the bottom, the second ring table 2044 can abut against the bottom end of all the first bolts 205 to ensure that the stop cooperation can be formed; as shown in Figure 7 The first limiting groove 206 is arranged in a sunken groove structure and is arranged at the bottom of the mounting hole 2021, the first limiting groove 206 can abut against the protrusion 208 to ensure that the stop cooperation can be formed; the second limiting groove 207 is arranged in a strip structure and extends along a direction parallel to the extension direction of the mounting hole 2021, the top end of the second limiting groove 207 extends to the part of the inner thread in the mounting hole 2021, and the bottom end is in communication with the first limiting groove 206; the protrusion 208 is arranged in a strip spiral structure, and the number of the protrusions 208 is taken as an example, as shown in Figure 9As shown, three protrusions 208 are arranged side by side on the first, second and third layers of external threads from top to bottom; the first elastic member can be arranged as a spring, and is arranged obliquely on the bottom wall of the blocking groove 2033, and can abut against the first bolt 205, and the protrusion 208 has a tendency to insert into the second limiting groove 207 under the action of the spring; the second elastic member can be arranged as a compression spring 209, the compression spring 209 is inserted into the mounting hole 2021, and the top end is fixed on the top of the mounting hole 2021, and the bottom end can abut against the first bolt 205, and the first bolt 205 has a tendency to protrude out of the mounting hole 2021 under the action of the compression spring 209, thereby avoiding the direct cooperation of the first bolt 205 with the internal thread on the mounting hole 2021 under the combined action of the spring and gravity, which affects the subsequent process of adjusting all the first bolts 205 to have the same tightening degree.

[0052] After replacing the new target material, hold the pressure joint part 203, and then align the first bolt 205 with the mounting hole 2021, the first bolt 205 is inserted into the mounting hole 2021 under the pushing of the spring, and the top end of the first bolt 205 abuts against the top wall of the first limiting groove 206; then rotate the shield cover 204 while pushing the shield cover 204 upwards, at this time the shield cover 204 can keep self-rotation without axial movement through the stop between the second ring table 2044 and the first bolt 205, and the shield cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051; when any first bolt 205 is rotated to align the protrusion 208 with the second limiting groove 207, the protrusion 208 is inserted into the second limiting groove 207 under the pushing of the spring, so that the first bolt 205 can stay in the second limiting groove 207, and the second tooth protrusion 2051 and the first tooth protrusion 2041 on it are disengaged; when at least one first bolt 205 is not rotated to align the protrusion 208 with the second limiting groove 207, the shield cover 204 can only rotate self-rotation under the stop between the first bolt 205 and the second ring table 2044.

[0053] When all the first bolts 205 are inserted into the second limiting groove 207, the shield cover 204 moves upwards and forms a stop cooperation with all the first bolts 205 again, and the first tooth protrusion 2041 and the second tooth protrusion 2051 form meshing cooperation again; then continue to rotate the shield cover 204, the shield cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051, so that all the first bolts 205 can simultaneously form thread cooperation with the target seat 202 at the same angle, thereby ensuring that the tightening degree of all the first bolts 205 is consistent, effectively avoiding the uneven force problem of the target material 3 caused by the traditional manual operation mode, greatly improving the accuracy and stability of the target material 3 installation, and further improving the overall working performance and coating quality of the multi-ion source synchronous sputtering coating device.

[0054] In other embodiments, along the direction of gravity, when the first bolt 205 is located above the mounting hole 2021, the structure of the multi-ion source synchronous sputtering device is basically the same as that of the previous embodiment, and the difference lies in that the cathode jet head 2 further comprises a plurality of second elastic members, which are arranged between the target seat 202 and the first bolt 205 and are configured to have a tendency to pull out the first bolt 205 from the mounting hole 2021.

[0055] Specifically, the second elastic member can be arranged as a compression spring 209 and inserted into the mounting hole 2021 and capable of abutting against the first bolt 205.

[0056] The working process of the multi-ion source synchronous sputtering device is basically the same as that of the previous embodiment, and the difference lies in that when any first bolt 205 is rotated to the position where the protrusion 208 and the second limiting groove 207 are aligned, and the first bolt 205 is inserted into the second limiting groove 207 under the action of gravity, it subsequently abuts against the compression spring 209, so that the first bolt 205 can be stopped in the second limiting groove 207.

[0057] In other embodiments, the shielding cover 204 is provided with a sleeved first part 2042 and a second part 2043, the second part 2043 is located on the outside, the second part 2043 can slide along the axial direction relative to the first part 2042, can rotate relative to the first part 2042, and can form a stop cooperation with the first part 2042, and when the second part 2043 and the first part 2042 form the stop cooperation, the second part 2043 can frictionally drive the first part 2042 to rotate.

[0058] Specific to the present embodiment, as shown in Figure 11 the third ring table 20421 is arranged on the outer peripheral wall of the first part 2042 near the top, the ring groove 20431 is arranged on the inner peripheral wall of the second part 2043 near the bottom, the ring groove 20431 penetrates the bottom of the second part 2043 at the same time, the third ring table 20421 is movably inserted into the ring groove 20431 during installation, ensuring that the second part 2043 can slide along the axial direction relative to the first part 2042 and can rotate relative to the first part 2042; the fourth ring table 20432 is arranged on the inner peripheral wall of the ring groove 20431 near the bottom, the third ring table 20421 can frictionally abut against the top of the ring groove 20431, ensuring that the stop cooperation can be formed, and the fourth ring table 20432 can frictionally abut against the top of the fourth ring table 20432, ensuring that the stop cooperation can be formed; the first tooth protrusion 2041 is arranged on the inner peripheral wall of the first part 2042; the second ring table 2044 is arranged on the inner peripheral wall of the first part 2042 and near the bottom.

[0059] When the target material 3 needs to be replaced, the second part 2043 is rotated and moved downward, and the first part 2042 is kept in frictional abutment at the top of the third ring table 20421 and the fourth ring table 20432 under the action of gravity to realize rotation and downward movement.

[0060] When the first part 2042 moves to the engagement of the first tooth protrusion 2041 and the second tooth protrusion 2051, the first part 2042 drives the first bolt 205 to rotate and move downward through the engagement between the first tooth protrusion 2041 and the second tooth protrusion 2051 as the second part 2043 rotates. Since the transmission between the first tooth protrusion 2041 and the second tooth protrusion 2051 is relatively large, the rotation speed of the first bolt 205 is relatively fast, thereby enabling the first bolt 205 to first move downward synchronously with the first part 2042 and then move downward relative to the first part 2042, and the first tooth protrusion 2041 and the second tooth protrusion 2051 can be disengaged. Then, the second part 2043 continues to drive the first part 2042 to rotate and move downward. When the first part 2042 moves to the re-engagement of the first tooth protrusion 2041 and the second tooth protrusion 2051, the first bolt 205 can first move downward synchronously with the first part 2042 and then move downward relative to the first part 2042 as the second part 2043 rotates, so that the first tooth protrusion 2041 and the second tooth protrusion 2051 are disengaged. The above process is repeated to enable the first part 2042 to periodically drive all the first bolts 205 to rotate through the engagement between the first tooth protrusion 2041 and the second tooth protrusion 2051, and the shield cover 204 can be gradually loosened on the connecting arm 201, thereby improving the disassembly efficiency and effectively avoiding the jamming problem caused by different pitches.

[0061] After the replacement of the new target material, the crimping part 203 is first crimped on the new target material, and then the first bolt 205 is pre-rotated into the target seat 202. Then, the shield cover 204 is sleeved at the bottom of the connecting arm 201, and the shield cover 204 and the connecting arm 201 form a threaded connection. Then, the second part 2043 is rotated and moved upward, and the second part 2043 drives the first part 2042 to rotate and move upward through the frictional abutment at the top of the third ring table 20421 and the fourth ring table 20432.

[0062] When the first part 2042 moves to the engagement of the first tooth protrusion 2041 and the second tooth protrusion 2051, with the rotation of the second part 2043, the first part 2042 drives the first bolt 205 to rotate and move upward through the engagement between the first tooth protrusion 2041 and the second tooth protrusion 2051. Since the transmission ratio between the first tooth protrusion 2041 and the second tooth protrusion 2051 is large, the rotation speed of the first bolt 205 is fast, thereby enabling the first bolt 205 to first synchronously move upward with the first part 2042 and then move upward relative to the first part 2042, and further enabling the first tooth protrusion 2041 and the second tooth protrusion 2051 to disengage. Then, the second part 2043 continues to drive the first part 2042 to rotate and move upward. When the first part 2042 moves to the re-engagement of the first tooth protrusion 2041 and the second tooth protrusion 2051, with the rotation of the second part 2043, the first bolt 205 can first synchronously move upward with the first part 2042 and then move upward relative to the first part 2042, so that the first tooth protrusion 2041 and the second tooth protrusion 2051 disengage. The above process is repeated, so that the first part 2042 can periodically drive all the first bolts 205 to rotate through the engagement between the first tooth protrusion 2041 and the second tooth protrusion 2051, and the shield cover 204 can be gradually tightened on the connecting arm 201, thereby improving the installation efficiency and effectively avoiding the jamming problem caused by different pitches.

[0063] Further, when the cathode head 2 is provided to further include a plurality of first limiting grooves 206, a plurality of second limiting grooves 207, a plurality of protrusions 208 and a plurality of elastic sheets, the process of disassembling the old target material is the same as described above; after the new target material is replaced, the process is basically the same, the difference is that the crimping part 203 is first crimped on the new target material, then the shielding cover 204 is sleeved on the bottom of the connecting arm 201, and then the first part 2042 is pushed upward while rotating, at this time the first part 2042 can keep rotating without axial movement through the stop of the second ring table 2044 and the first bolt 205, and the first part 2042 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051; when any first bolt 205 is rotated to the position where the protrusion 208 and the second limiting groove 207 are aligned, the protrusion 208 is inserted into the second limiting groove 207 under the pushing of the elastic sheet, so that the first bolt 205 can stay in the second limiting groove 207, and the second tooth protrusion 2051 and the first tooth protrusion 2041 on it are disengaged; when at least one first bolt 205 is not rotated to the position where the protrusion 208 and the second limiting groove 207 are aligned, the first part 2042 can only rotate under the stop between the first bolt 205 and the second ring table 2044; when all the first bolts 205 are inserted into the second limiting groove 207, the first part 2042 moves upward and forms a stop cooperation with all the first bolts 205, realizing the pre-rotation of the first bolt 205 into the target seat 202.

[0064] In some other embodiments, in order to realize the orientation adjustment of the cathode head 2, the cathode head 2 is further provided with a rotating arm 210, which is hinged on the connecting arm 201 and can rotate around its own axis.

[0065] Specifically in this embodiment, the top end of the rotating arm 210 is vertically arranged on the inner top wall of the shell 1, and the bottom end is hinged on the connecting arm 201; in order to facilitate the hinged cooperation between the connecting arm 201 and the rotating arm 210, as shown in Figure 3 and Figure 4 the hinged hole 2011 is arranged on the top right side of the connecting arm 201, the sliding column 2012 is arranged on the top left side of the connecting arm 201, the hinged column 2102 is arranged on the bottom right side of the rotating arm 210, and the sliding groove 2101 is arranged on the bottom left side of the rotating arm 210, the sliding groove 2101 is arranged in an arc shape with the concave surface facing the sliding groove 2101, the sliding column 2012 is slidingly inserted into the sliding groove 2101 during installation, and the hinged column 2102 is rotatingly inserted into the hinged hole 2011 during installation, so as to ensure the connection strength between the connecting arm 201 and the rotating arm 210 while improving the hinged stability between the connecting arm 201 and the rotating arm 210.

[0066] During use, the included angle between the connecting arm 201 and the rotating arm 210 can be adjusted first, and then the rotating arm 210 is driven to rotate, and the rotating arm 210 synchronously drives the connecting arm 201 to rotate, so as to change the orientation of the cathode jet head 2 and improve the applicability of the equipment.

[0067] In further embodiments, the multi-ion source synchronous sputtering device is further provided with a first driving member configured to provide a driving force for the rotation of the rotating arm 210.

[0068] In the embodiment, the first driving member can be a first driving motor, and the motor shaft of the first driving motor can be directly arranged on the rotating arm 210 to directly drive the rotating arm 210 to rotate, or the rotating arm 210 can be driven to rotate through a first gear and a second gear. Specifically, the first gear is fixedly sleeved on the rotating arm 210 during installation, the second gear is fixedly sleeved on the motor shaft of the first driving motor during installation, and the first gear and the second gear are engaged.

[0069] In other embodiments, the multi-ion source synchronous sputtering device is further provided with a second driving member configured to provide a driving force for the rotation of the connecting arm 201 around the hinge point.

[0070] In the embodiment, the hinge column 2102 is arranged on the rotating arm 210, and the connecting arm 201 is fixedly sleeved on the hinge column 2102 through the hinge hole 2011; the second driving member can be a second driving motor, which is arranged on the rotating arm 210 and has a motor shaft fixedly arranged on the hinge column 2102, thereby driving the connecting arm 201 to rotate to change the included angle between the connecting arm 201 and the rotating arm 210.

[0071] In some other embodiments, in order to form a complete magnetic control structure for the cathode jet head 2, the cathode jet head 2 can be further provided with a base 211, a magnetic steel 212, an end cover 213, an insulating member 214, and a plurality of magnets 215, as shown in Figure 5 The base 211 is arranged on the top of the target seat 202; the plurality of magnets 215 are arranged on the base 211; the magnetic steel 212 is arranged on the top of the target seat 202 and fixedly connected to the target seat 202 through a second bolt, and is configured to communicate magnetic lines to ensure that the top magnetic field strength is enhanced; the end cover 213 is arranged in a ring structure and on the top of the target seat 202 and is fixedly connected to the target seat 202 through a third bolt, and is sleeved outside the base 211, the carbon steel, and the plurality of magnets 215, and the base 211, the magnetic steel 212, the magnets 215, and the end cover 213 are collectively at a negative high voltage potential; the insulating member 214 is arranged in a ring structure and can be made of plastic, such as polytetrafluoroethylene, and is located between the connecting arm 201 and the end cover 213.

[0072] Further, in order to facilitate the placement of the to-be-coated part, the multi-ion source synchronous sputtering coating device is provided with a support which is inserted into the housing 1 and located at the middle part of the housing 1, so that the to-be-coated part can simultaneously receive the sputtered coating molecules or atoms from the four cathode jets 2.

[0073] Another embodiment of the present application also provides a multi-ion source synchronous sputtering coating process which uses a multi-ion source synchronous sputtering coating device, and the multi-ion source synchronous sputtering coating process comprises the following steps:

[0074] S1, reverse rotation of the shielding cover 204, the shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051, so that the first bolts 205 are separated from the cooperation between the press contact part 203 and the target seat 202;

[0075] Specifically, the shielding cover 204 can be manually rotated.

[0076] S2, the old target material is removed from the target seat 202, and a new target material is replaced;

[0077] S3, forward rotation of the shielding cover 204, the shielding cover 204 drives all the first bolts 205 to rotate through the meshing cooperation between the first tooth protrusion 2041 and the second tooth protrusion 2051, so that the first bolts 205 are re-cooperated with the press contact part 203 and the target seat 202;

[0078] S4, coating.

[0079] The technical features of the above embodiments can be combined in any manner, and in order to make the description concise, not all possible combinations of the technical features in the above embodiments are described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0080] The above embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are within the scope of the present application.

Claims

1. A multi-ion source simultaneous sputtering coating apparatus, characterized in that, The multi-ion source synchronous sputtering coating device comprises a shell and a plurality of cathode jets which are inserted into the shell; The cathode jet is directed to a part to be coated and comprises a connecting arm, a target seat, a compression part, a shielding cover and a plurality of first bolts, the connecting arm is arranged on the shell, the target seat is arranged on the connecting arm and used for placing a target material, the compression part is compressed on the target material, the shielding cover covers the compression part and the target seat and is threadedly connected with the connecting arm, a plurality of first tooth protrusions are circumferentially arranged on the shielding cover, the first bolts are inserted into the compression part and threadedly connected with the target seat, the first bolts are stopper-connected with the compression part, a plurality of second tooth protrusions are circumferentially arranged on each of the first bolts, and the second tooth protrusions are engaged with the first tooth protrusions. Each of the first bolts is provided with external threads, the target seat is provided with a plurality of mounting holes, each of the mounting holes is provided with internal threads, the internal threads are threadedly connected with the external threads, the shielding cover is stopper-connected with all the first bolts, and the cathode jet further comprises a plurality of first limiting grooves, a plurality of second limiting grooves, a plurality of protrusions and a plurality of first elastic members / second elastic members in a direction of gravity when the first bolts are above or below the mounting holes.

2. The multi-ion source synchronous sputter deposition apparatus according to claim 1, wherein The first limiting grooves are arranged on inner circumferential walls of the mounting holes and stopper-connected with the first bolts, the second limiting grooves are arranged on the inner circumferential walls of the mounting holes and communicated with the first limiting grooves, the protrusions are arranged along axial directions of the first bolts and respectively arranged on adjacent layers of the external threads closest to the mounting holes, the protrusions are slidably inserted into the second limiting grooves to limit rotation of the first bolts, the protrusions are threadedly connected with the internal threads, the first elastic members are arranged between the compression part and the first bolts and configured to have a tendency to insert the protrusions into the second limiting grooves, and the second elastic members are arranged between the target seat and the first bolts and configured to have a tendency to pull the first bolts out of the mounting holes.

3. The multi-ion source synchronous sputter deposition apparatus according to claim 1, wherein The first elastic members are elastic sheets.

4. The multi-ion source synchronous sputter deposition apparatus according to claim 1, wherein The second elastic members are compression springs.

5. The multi-ion source synchronous sputter deposition apparatus according to claim 1, wherein The shielding cover has a first part and a second part which are sleeved, the second part is located on an outer side, the second part is slid along an axial direction relative to the first part, is rotatable relative to the first part, is stopper-connected with the first part, and can frictionally drive the first part to rotate when the second part is stopper-connected with the first part.

6. The multi-ion source synchronous sputter deposition apparatus according to claim 5, wherein The cathode jet further comprises a rotating arm which is hinged to the connecting arm and rotatable about an axis thereof.

7. The multi-ion source synchronous sputter deposition apparatus according to claim 5, wherein The multi-ion source synchronous sputtering coating device further comprises a first driving member which is configured to provide a driving force for rotation of the rotating arm. The multi-ion source synchronous sputtering coating device further comprises a second driving member which is configured to provide a driving force for rotation of the connecting arm about a hinge point.

8. A multi-ion source synchronized sputter deposition process, characterized by, The multi-ion source synchronous sputtering coating device comprises a vacuum chamber, a plurality of target seats arranged in the vacuum chamber, a plurality of shielding covers arranged on the target seats, a plurality of first bolts arranged on the shielding covers, a plurality of second bolts arranged on the target seats, a plurality of pressing parts arranged on the target seats, and a plurality of target materials arranged on the target seats. S1, reverse rotation of the shielding cover, the shielding cover through the meshing fit between the first tooth convex and the second tooth convex drive all the first bolt rotation, make the first bolt and the pressing part, the target seat between the cooperation of; S2, the old target material is taken off from the target seat, replace new target material; S3, forward rotation of the shielding cover, the shielding cover through the meshing fit between the first tooth convex and the second tooth convex drive all the first bolt rotation, make the first bolt and the pressing part, the target seat cooperation of; S4, coating.

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