Compressor reciprocating motion structure for conveying corrosive gas

Abstract

The invention relates to the technical field of gas conveying, in particular to a compressor reciprocating motion structure for conveying corrosive gas, which comprises a plurality of reciprocating motion units, a support structure for supporting the plurality of reciprocating motion units to be arranged according to a preset rule, a gas inlet pipeline, a gas outlet pipeline and a controller, each reciprocating motion unit is provided with an air inlet end and an air outlet end, a compression cavity is formed in each reciprocating motion unit, and a membrane structure is arranged in each compression cavity. The reciprocating motion units are adopted and matched with the phase cooperative driving mode, all the reciprocating motion units act according to the preset phase angle difference in sequence, sine output waveforms of the reciprocating motion units are overlapped in the pressure stabilizing cavity to form smooth flow, the system fluctuation rate is reduced to the low level, and the system stability is improved. And the multiple reciprocating motion units are matched to realize dynamic recombination and drive parameter online adjustment, a wide pressure range can be adapted, the failed reciprocating motion unit can be subjected to online hot plug replacement, and the maintenance time consumption is shortened.

Description

Technical Field

[0001] The present invention relates to the technical field of gas transportation, and particularly to a reciprocating motion structure of a compressor for transporting corrosive gases. Background Art

[0002] In fields such as chemical industry, semiconductor manufacturing, and environmental protection treatment, the efficient and stable transportation of corrosive gases is a key technical link to ensure the reliability of production processes. Traditional gas compression devices mostly adopt a single diaphragm reciprocating structure, whose core relies on a crank-link mechanism to drive the periodic deformation of the diaphragm to achieve gas pressurization. Such designs face the following common challenges in long-term engineering practices: Firstly, the pulsating output characteristics of a single diaphragm are likely to cause vibration in downstream pipelines and distortion of measuring instruments, restricting high-precision process control; Secondly, in the face of strong corrosive media, the integral structure often leads to the overall shutdown and maintenance of the device due to local failures, significantly affecting production continuity; Thirdly, the existence of complex transmission mechanisms exacerbates the risk of wear at the sealing interface, and under the coupled action of corrosion and wear, the service life of key components is greatly reduced.

[0003] With the progress of precision manufacturing and new material technologies, the industry has gradually explored improved solutions such as multi-cylinder coordination and phase compensation. However, existing technologies mostly focus on the optimization of mechanical structures and do not fundamentally solve the systematic contradiction between modular anti-corrosion design and flow pulsation suppression. Especially when dealing with strong corrosive media such as hydrofluoric acid and chlorine gas, how to achieve precise flow regulation while ensuring the corrosion resistance of materials remains a technical bottleneck that the industry urgently needs to break through. Summary of the Invention

[0004] The present invention provides a reciprocating motion structure of a compressor for transporting corrosive gases, including a plurality of reciprocating motion units, a support structure for supporting the plurality of reciprocating motion units arranged according to a predetermined rule, as well as an intake pipe, an exhaust pipe, and a controller; Each of the reciprocating motion units has an intake end and an exhaust end. A compression cavity is provided inside the reciprocating motion unit, and a membrane structure is provided inside the compression cavity. The reciprocating motion unit further includes an electromagnetic driving component for driving the membrane structure to complete reciprocating motion. The membrane structure is configured to complete one intake at the intake end and one exhaust at the exhaust end during one reciprocating motion; The intake pipe is connected to the intake end of each reciprocating motion unit through a plurality of intake branch pipes, and the exhaust pipe is connected to the exhaust end of each reciprocating motion unit through a plurality of exhaust branch pipes; The controller is electrically connected to the electromagnetic driving component and is used to control the electromagnetic driving components corresponding to a predetermined number of the reciprocating motion units to complete telescopic actions according to a predetermined cycle, and the driving of each or each group of reciprocating motion units is set to have a predetermined phase difference.

[0005] Preferably, it is defined that multiple said reciprocating motion units are divided into n groups, each group includes more than one reciprocating motion unit, the period for completing the telescopic action is W, then the phase difference of the start of the telescopic action between each group of reciprocating motion units is W / n, where n is a positive integer greater than 3.

[0006] Preferably, all the reciprocating motion units in each group have the same phase and frequency when completing the telescopic action.

[0007] Preferably, each intake manifold is provided with a one-way intake valve and an electric cut-off valve, each exhaust manifold is provided with a one-way exhaust valve and an electric cut-off valve, the intake pipe is provided with a gas flow stabilizer valve, and the exhaust pipe is provided with a flow monitoring component, and the flow monitoring component is used to monitor the gas flow passing through the exhaust pipe.

[0008] Preferably, the electric cut-off valve and the flow monitoring component are electrically connected to the controller. The controller judges the frequency and phase of the air flow peak according to the flow data monitored by the flow monitoring component, and controls the state of the electric cut-off valve and adjusts the telescopic period of the electromagnetic driving component according to the frequency and phase of the air flow peak.

[0009] Preferably, the controller monitors the air flow peak data in real time. If the frequency and phase of the target peak exceed the threshold for three consecutive cycles, the controller controls the reciprocating motion unit corresponding to the target peak to stop moving and controls the corresponding electric cut-off valve to close.

[0010] Preferably, all the said reciprocating motion units are divided into a first state and a second state. In the first state, the reciprocating motion units complete the telescopic action according to a predetermined operation period. In the second state, the reciprocating motion units are in a waiting-to-be-triggered state; The controller monitors the air flow peak data in real time. If the frequency and phase of the target peak exceed the threshold for three consecutive cycles, the controller controls the reciprocating motion unit corresponding to the target peak to stop moving and controls the corresponding electric cut-off valve to close, and at the same time controls the reciprocating motion units in the second state to complete the telescopic action according to the frequency and phase of the target peak.

[0011] Preferably, the support structure includes a plurality of cavities, the reciprocating motion units are detachably connected to the cavities, and the plurality of cavities are divided into a first area and a second area. The first area is used to accommodate the reciprocating motion units in the first state, and the second area is used to accommodate the reciprocating motion units in the second state.

[0012] Preferably, the reciprocating motion unit includes a first housing and a second housing, the first housing and the second housing are fixed by a threaded connection member, an internal compression cavity is formed after the first housing and the second housing are joined, the membrane structure is connected to the first housing and the second housing and is located in the compression cavity, the first housing is provided with an electromagnetic driving component for driving the membrane structure to perform reciprocating motion in the compression cavity, and the second housing is provided with a first joint and a second joint, the first joint is connected to the intake branch pipe, and the second joint is connected to the exhaust branch pipe.

[0013] Preferably, the electromagnetic driving component includes an electromagnetic coil, a magnetic telescopic rod and a piston. The first side of the membrane structure is a pressure medium, and the second side is a telescopic cavity. The electromagnetic coil drives the magnetic telescopic rod to expand and contract, causing the piston to perform reciprocating motion. By controlling the pressure medium, the volume of the telescopic cavity changes reciprocally, enabling the first joint to intake air periodically and the second joint to exhaust air periodically.

[0014] Compared with the prior art, the advantages of the present invention are as follows: The present invention adopts a reciprocating motion unit and a phase coordination driving method. Through sequential actions of each reciprocating motion unit according to a preset phase angle difference, the sine output waveforms are superimposed in the voltage stabilizing cavity to form a smooth flow rate, reducing the system volatility to a relatively low level. Moreover, multiple reciprocating motion units can be coordinated to achieve dynamic recombination and online adjustment of driving parameters, adapting to a wide pressure range. The modular design of multiple reciprocating motion units isolates the corrosion risk outside the independent reciprocating motion structure. The failed reciprocating motion unit can be replaced online by hot plugging, shortening the maintenance time. Additionally, the number of reciprocating motion units can be expanded as needed to optimize the output characteristics in real time, covering the full-scenario transportation requirements from strongly acidic corrosive gases to ultra-clean electronic special gases, breaking through the inherent contradiction among the corrosion environment adaptability, dynamic response accuracy, and operation and maintenance economy of traditional designs, and providing a reliable and intelligent solution for the transportation of high-value corrosive media. Description of the Drawings

[0015] Figure 1 is a schematic structural diagram of multiple reciprocating motion units shown in the present invention placed on a support structure; Figure 2 is a schematic diagram of the gas path connection of multiple reciprocating motion units shown in the present invention; Figure 3 is a schematic structural diagram of the reciprocating motion unit shown in the present invention; Figure 4 is a schematic diagram of multiple reciprocating motion units shown in the present invention distributed in a matrix; Figure 5 is a schematic control diagram of the controller and multiple electromagnetic driving components shown in the present invention. Detailed Embodiments

[0016] To better understand the technical content of the present invention, specific embodiments are hereby given and described in conjunction with the accompanying drawings as follows.

[0017] Combined with Figure 1 、 Figure 2 and Figure 5 As shown, the present invention provides a reciprocating motion structure of a compressor for conveying corrosive gas, including a plurality of reciprocating motion units 20, a support structure 10 for supporting the plurality of reciprocating motion units 20 arranged according to a predetermined rule, an intake pipe 30, an exhaust pipe 40, and a controller 50.

[0018] Among them, each reciprocating motion unit 20 has an intake end and an outlet end. A compression cavity 201 is provided inside the reciprocating motion unit 20. A membrane structure 24 is provided in the compression cavity 201. The reciprocating motion unit 20 is further provided with an electromagnetic driving component 25 for driving the membrane structure 24 to complete reciprocating motion.

[0019] The membrane structure 24 is configured to complete one intake at the intake end and one exhaust at the outlet end during one reciprocating motion. Thus, when the electromagnetic driving component 25 controls the membrane structure 24 to reciprocate, the compression cavity 201 continuously completes the process of inhaling and discharging gas.

[0020] Specifically, as shown in Figure 3 The reciprocating motion unit 20 includes a first housing 21 and a second housing 22. The first housing 21 and the second housing 22 are fixed by a threaded connector 23. After the first housing 21 and the second housing 22 are joined together, a compression cavity 201 is formed inside. The membrane structure 24 is connected to the first housing 21 and the second housing 22 and is located in the compression cavity 201. The first housing 21 is provided with an electromagnetic driving component 25 for driving the membrane structure 24 to reciprocate in the compression cavity 201. The second housing 22 is provided with a first joint 221 and a second joint 222. The first joint 221 is connected to an intake branch pipe 32, and the second joint 222 is connected to an exhaust branch pipe 42.

[0021] Among them, the first housing 21 and the second housing 22 can be made of corrosion-resistant Hastelloy, and a ceramic layer is provided on the inner wall.

[0022] Optionally, the membrane structure 24 adopts a three-layer composite structure, including a PTFE base film, a Hastelloy mesh, and an FKM coating. The PTFE base film is the base layer, the Hastelloy mesh is the intermediate reinforcement layer, and the FKM coating is the outer layer structure.

[0023] In this way, the membrane structure 24 has a corrosion-resistant main pressure-bearing layer and an alloy mesh to enhance fatigue resistance, and then the micropores are filled by the FKM coating to ensure the reliability of the membrane structure 24 during long-term reciprocating motion for conveying corrosive gas.

[0024] In an alternative embodiment, the electromagnetic driving component 25 includes an electromagnetic coil, a magnetic telescopic rod 251, and a piston 252. The first side of the membrane structure 24 is the pressure medium, and the second side is the telescopic cavity.

[0025] Specifically, the pressure medium provided on the first side of the membrane structure 24 can be selected as hydraulic oil.

[0026] In this way, when the electromagnetic coil drives the magnetic telescopic rod 251 to expand and contract, causing the piston 252 to reciprocate, the volume of the telescopic cavity is reciprocally changed through the pressure medium, enabling the first joint 221 to intake air periodically and the second joint 222 to exhaust air periodically.

[0027] Furthermore, the intake pipe 30 is connected to the intake end of each reciprocating unit 20 through multiple intake branch pipes 32, and the exhaust pipe 40 is connected to the exhaust end of each reciprocating unit 20 through multiple exhaust branch pipes 42.

[0028] In this way, by connecting the intake pipe 30 and the exhaust pipe 40 to multiple reciprocating units 20, the transportation of corrosive gas is jointly achieved by using multiple reciprocating units 20. Compared with the transportation form that only uses a large-sized reciprocating unit in the prior art, this transportation method overcomes the large fluctuations in the transportation flow rate. At the same time, the design of multiple reciprocating units 20 allows for modular replacement, reducing the impact of the failure of a single reciprocating unit 20 on the system.

[0029] Furthermore, the controller 50 is electrically connected to the electromagnetic driving component 25 and is used to control the electromagnetic driving components 25 corresponding to a predetermined number of reciprocating units 20 to complete the telescopic action according to a predetermined period, and the driving of each or each group of reciprocating units 20 is set to have a predetermined phase difference.

[0030] In this way, by reciprocating a predetermined number of reciprocating units 20 with a certain phase difference within a certain period, the fluctuation of the output air flow is made smaller, converting the discrete pulsation into a continuous quasi-steady flow, and the measured flow rate volatility is reduced to less than 3%, meeting the sub-second response requirement for the transportation of semiconductor etching gas.

[0031] In an alternative embodiment, it is defined that multiple reciprocating units 20 are divided into n groups, each group includes more than one reciprocating unit 20, and the period for completing the telescopic action is W. Then the phase difference between the start of the telescopic action of each group of reciprocating units 20 is W / n, where n is a positive integer greater than 3.

[0032] Optionally, each group includes a reciprocating motion unit 20, and multiple reciprocating motion units 20 are divided into n groups, that is, there are n reciprocating motion units 20. The phases of the telescopic actions of each reciprocating motion unit are different, and the phase difference between two adjacent reciprocating motion units 20 is W / n.

[0033] Specifically, if the period for each reciprocating motion unit 20 to complete the telescopic action is 1 s and there are a total of 25 reciprocating motion units 20, then the phase difference between every two reciprocating motion units 20 is 1 / 25 s.

[0034] Combined with Figure 4 As shown, all 25 reciprocating motion units 20 are numbered as A11, A12, A13, …, A53, A54, A55. The start time of A11 is 1 / 25 s, the end time is 26 / 25 s, and the telescopic period is 1 s. The start time of A12 is 2 / 25 s, the end time is 27 / 25 s, and the telescopic period is 1 s, and so on. It can be seen that the extension / contraction actions of all reciprocating motion units 20 are staggered in time sequence, and the total output flow tends to be a smooth curve after superposition. It should be understood that when the phase difference between two adjacent reciprocating motion units 20 is smaller, the output flow is smoother.

[0035] In an optional embodiment, each group may also include more than two reciprocating motion units 20, and multiple reciprocating motion units 20 in a group have the same phase and frequency when completing the telescopic action.

[0036] Furthermore, a one-way intake valve 33 and an electric cut-off valve are provided on each intake branch pipe 32, a one-way exhaust valve 43 and an electric cut-off valve are provided on each exhaust branch pipe 42, a gas flow stabilizer valve 31 is provided on the intake pipe 30, and a flow monitoring component 41 is provided on the exhaust pipe 40. The flow monitoring component 41 is used to monitor the gas flow rate passing through the exhaust pipe 40.

[0037] In this way, by controlling the electric cut-off valves on each intake branch pipe 32 and exhaust branch pipe 42, the current reciprocating motion unit 20 can be isolated. Especially when a certain reciprocating motion unit 20 fails, the reciprocating motion unit 20 can be isolated from the gas delivery system to avoid adverse effects on the gas delivery process.

[0038] Furthermore, the electric cut-off valves and the flow monitoring component 41 are electrically connected to the controller 50. The controller 50 judges the frequency and phase of the air flow peak according to the flow data monitored by the flow monitoring component 41, and controls the state of the electric cut-off valve and adjusts the telescopic period of the electromagnetic driving component 25 according to the frequency and phase of the air flow peak.

[0039] It should be understood that since each reciprocating motion unit 20 conveys a certain amount of gas into the exhaust duct 40 during the reciprocating motion, when multiple reciprocating motion units 20 convey gas according to a certain time sequence, the flow rate peaks of these gases in the duct are in a wave shape, and each wave peak represents the gas conveyed by a reciprocating motion unit 20. Therefore, the phase of the wave peak corresponds to each reciprocating motion unit 20 relatively, and the state of the corresponding reciprocating motion unit can be judged according to the phase change or peak value change of the wave peak.

[0040] In an alternative embodiment, the controller 50 monitors the airflow wave peak data in real time. If the frequency and phase of the target wave peak exceed the threshold for three consecutive cycles, the controller 50 controls the reciprocating motion unit 20 corresponding to the target wave peak to stop moving and controls the corresponding electric shut-off valve to close.

[0041] Specifically, if the actual value of the wave peak - the theoretical value of the wave peak is greater than 5%, it is defined as exceeding the threshold.

[0042] In this way, the reciprocating motion unit 20 can be isolated from the air supply system. At the same time, the start timing of each reciprocating motion unit 20 can be re-determined according to the number of reciprocating motion units 20 that still exist and can operate normally. For example, after one of the original 20 reciprocating motion units 20 is damaged, the phases of all the reciprocating motion units 20 can be updated, and the phase difference between two adjacent reciprocating motion units 20 is determined to be 1 / 19 s to ensure the stability of air flow conveyance.

[0043] In an alternative embodiment, all the reciprocating motion units 20 are divided into a first state and a second state. In the first state, the reciprocating motion unit 20 completes the telescopic action according to a predetermined operation cycle. In the second state, the reciprocating motion unit 20 is in a waiting-to-be-triggered state.

[0044] Combined with Figure 4 As shown, the support structure 10 includes a plurality of cavities 11, and the reciprocating motion units 20 are detachably connected to the cavities 11. The plurality of cavities 11 are divided into a first region 111 and a second region 112. The first region 111 is used to accommodate the reciprocating motion units 20 in the first state, and the second region 112 is used to accommodate the reciprocating motion units 20 in the second state.

[0045] Furthermore, the controller 50 monitors the airflow wave peak data in real time. If the frequency and phase of the target wave peak exceed the threshold for three consecutive cycles, the controller 50 controls the reciprocating motion unit 20 corresponding to the target wave peak to stop moving and controls the corresponding electric shut-off valve to close, and at the same time controls the reciprocating motion units 20 in the second state to complete the telescopic action according to the frequency and phase of the target wave peak.

[0046] That is, when the reciprocating motion unit 20 in the first region 111 fails, it can be isolated from the air supply system, and one of the reciprocating motion units in the second region 112 can be connected to the air supply system, so that the reciprocating motion unit 20 in good condition replaces the reciprocating motion unit isolated due to damage. The replaced reciprocating motion unit 20 completes the telescopic action according to the frequency and phase of the target wave peak of the original reciprocating motion unit 20, thus ensuring the stability and continuity of air supply.

[0047] Combined with the above embodiments, the present invention adopts a reciprocating motion unit and a phase-coordinated driving method. Through sequential actions of each reciprocating motion unit at a preset phase angle difference, the sine output waveforms are superimposed in the voltage stabilizing cavity to form a smooth flow rate, reducing the system volatility to a relatively low level. The modular design of multiple reciprocating motion units isolates the corrosion risk outside the independent reciprocating motion structure. The failed reciprocating motion unit can be replaced online with hot plugging, shortening the maintenance time. Moreover, the number of reciprocating motion units can be expanded as needed, and the output characteristics can be optimized in real time, covering the full-scenario transportation requirements from strongly acidic corrosive gases to ultra-clean electronic special gases.

[0048] The above is only the preferred specific implementation mode of the embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application, according to the technical solution and its concept of the present application, makes equivalent replacements or changes, and all should be covered within the protection scope of the present application.

Claims

1. A reciprocating motion structure of a compressor for conveying corrosive gas, characterized in that, It includes multiple reciprocating motion units (20), a support structure (10) for supporting the multiple reciprocating motion units (20) arranged according to a predetermined rule, an intake pipe (30), an exhaust pipe (40), and a controller (50); Each of the reciprocating motion units (20) has an intake end and an exhaust end. A compression cavity (201) is provided inside the reciprocating motion unit (20). A membrane structure (24) is provided in the compression cavity (201). The reciprocating motion unit (20) is further provided with an electromagnetic drive component (25) for driving the membrane structure (24) to complete reciprocating motion. The membrane structure (24) is configured to complete one intake at the intake end and one exhaust at the exhaust end during one reciprocating motion; The intake pipe (30) is connected to the intake end of each of the reciprocating motion units (20) through multiple intake branch pipes (32), and the exhaust pipe (40) is connected to the exhaust end of each reciprocating motion unit (20) through multiple exhaust branch pipes (42); The controller (50) is electrically connected to the electromagnetic drive component (25) and is used to control the electromagnetic drive components (25) corresponding to a predetermined number of the reciprocating motion units (20) to complete telescopic actions according to a predetermined period, and the drive of each or each group of reciprocating motion units (20) is set to have a predetermined phase difference.

2. The reciprocating motion structure of a compressor for conveying corrosive gas according to claim 1, wherein, It is defined that the multiple reciprocating motion units (20) are divided into n groups, each group includes more than one reciprocating motion unit (20), and the period for completing the telescopic action is W. Then the phase difference between the start of the telescopic actions of each group of reciprocating motion units (20) is W / n, where n is a positive integer greater than 3.

3. The reciprocating motion structure of a compressor for transporting corrosive gas according to claim 2, wherein, All the reciprocating motion units (20) in each group have the same phase and frequency when completing the telescopic action.

4. A reciprocating motion structure of a compressor for conveying corrosive gas according to claim 1, characterized in that, A one-way intake valve (33) and an electric cut-off valve are provided on each of the intake branch pipes (32), a one-way exhaust valve (43) and an electric cut-off valve are provided on each of the exhaust branch pipes (42), a gas flow stabilizer valve (31) is provided on the intake pipe (30), and a flow monitoring component (41) is provided on the exhaust pipe (40). The flow monitoring component (41) is used to monitor the gas flow rate through the exhaust pipe (40).

5. A reciprocating motion structure of a compressor for conveying corrosive gas according to claim 4, characterized in that, The electric cut-off valve and the flow monitoring component (41) are electrically connected to the controller (50). The controller (50) judges the frequency and phase of the air flow peak according to the flow data monitored by the flow monitoring component (41), and controls the state of the electric cut-off valve and adjusts the telescopic period of the electromagnetic drive component (25) according to the frequency and phase of the air flow peak.

6. The reciprocating motion structure of a compressor for conveying corrosive gas according to claim 5, characterized in that, The controller (50) monitors the air flow peak data in real time. If the frequency and phase of the target peak exceed the threshold for three consecutive periods, the controller (50) controls the reciprocating motion unit (20) corresponding to the target peak to stop moving and controls the corresponding electric cut-off valve to close.

7. A reciprocating motion structure of a compressor for conveying corrosive gas according to claim 5, characterized in that, All the reciprocating motion units (20) are divided into a first state and a second state. In the first state, the reciprocating motion unit (20) completes the telescopic action according to a predetermined operation cycle. In the second state, the reciprocating motion unit (20) is in a waiting-to-be-triggered state; The controller (50) monitors the airflow peak data in real time. If the frequency and phase of the target peak exceed the threshold for three consecutive cycles, the controller (50) controls the reciprocating motion unit (20) corresponding to the target peak to stop moving, controls the corresponding electric cut-off valve to close, and at the same time controls the reciprocating motion unit (20) in the second state to complete the telescopic action according to the frequency and phase of the target peak.

8. A reciprocating motion structure of a compressor for conveying corrosive gas according to claim 1, characterized in that, The support structure (10) includes a plurality of cavities (11). The reciprocating motion unit (20) is detachably connected to the cavity (11). The plurality of cavities (11) are divided into a first region (111) and a second region (112). The first region (111) is used to accommodate the reciprocating motion unit (20) in the first state, and the second region (112) is used to accommodate the reciprocating motion unit (20) in the second state.

9. A reciprocating motion structure of a compressor for conveying corrosive gas according to any one of claims 1-8, characterized in that, The reciprocating motion unit (20) includes a first housing (21) and a second housing (22). The first housing (21) and the second housing (22) are fixed by a threaded connector (23). After the first housing (21) and the second housing (22) are joined together, a compression cavity (201) is formed inside. The membrane structure (24) is connected to the first housing (21) and the second housing (22) and is located in the compression cavity (201). The first housing (21) is provided with an electromagnetic driving component (25). The electromagnetic driving component (25) is used to drive the membrane structure (24) to complete reciprocating motion in the compression cavity (201). The second housing (22) is provided with a first joint (221) and a second joint (222). The first joint (221) is connected to the intake branch pipe (32), and the second joint (222) is connected to the exhaust branch pipe (42).

10. A reciprocating motion structure of a compressor for conveying corrosive gas according to claim 9, characterized in that, The electromagnetic driving component (25) includes an electromagnetic coil, a magnetic telescopic rod (251), and a piston (252). The first side of the membrane structure (24) is a pressure medium, and the second side is a telescopic cavity. The electromagnetic coil drives the magnetic telescopic rod (251) to expand and contract, causing the piston (252) to reciprocate. By controlling the pressure medium, the volume of the telescopic cavity changes reciprocally, causing the first joint (221) to intake air periodically and the second joint (222) to exhaust air periodically.

Images