High-speed linear motor for die bonder and die bonder

Abstract

The invention discloses a high-speed linear motor for a die bonder and the die bonder, the motor comprises a stator and a mover, the stator comprises a first magnet yoke plate and a second magnet yoke plate which are parallel to each other, the first magnet yoke plate is provided with a first permanent magnet plane formed by a plurality of first magnetic steel assemblies, and the second magnet yoke plate is provided with a second permanent magnet plane formed by a plurality of second magnetic steel assemblies; a first permanent magnet plane composed of a plurality of first magnetic steel assemblies is installed on the first magnet yoke plate, a second permanent magnet plane composed of a plurality of second magnetic steel assemblies is installed on the second magnet yoke plate, the first permanent magnet plane and the second permanent magnet plane are oppositely arranged, a stator cavity is formed between the first permanent magnet plane and the second permanent magnet plane, the rotor comprises a flat wire coil, the flat wire coil comprises a plurality of inner and outer wire turns and stacked wire turns, and the flat wire coil extends into the stator cavity. During servo driving, the stator cavity has a stroke in a plane direction and a thrust force with high acceleration. According to the high-speed linear motor and the die bonder, the servo thrust can be greatly improved and 16G acceleration can be realized by optimizing the magnetic field distribution through the stator cavity structure and combining with the high slot fullness rate of the rotor, and the equipment efficiency and the productivity of the die bonder are greatly improved.

Description

Technical Field

[0001] The present invention relates to the field of die bonder equipment, and particularly to a high-speed linear motor with a maximum acceleration of up to 16G for a die bonder and a die bonder. Background Art

[0002] A die bonder is an automated device for fixing grains onto a substrate and fixing them by means such as thermal pressing, and a linear motor is required to accurately transport the grains to a specified position.

[0003] A linear motor directly converts electrical energy into linear motion mechanical energy and is a transmission device that does not require any intermediate conversion mechanism. Structurally, linear motors are divided into iron-core linear motors, ironless linear motors, and rod-shaped linear motors. The internal mechanical structure of a linear stepping motor can be regarded as formed by cutting a rotary motor along a radial plane and unfolding the circumference of the motor into a straight line.

[0004] The stator inside the linear motor is equivalent to the primary in the linear motor, and the rotor inside the linear motor is equivalent to the secondary in the linear motor. When current is applied to the primary of the linear motor, a traveling magnetic field will be generated in the air gap between the primary and secondary. The linear motor generates a driving force under the interaction of the traveling magnetic field and the permanent magnet of the secondary, thereby achieving the purpose of making the moving part connected to the linear motor move in a straight line.

[0005] The linear motors in the prior art still have the following technical problems in the application of die bonders:

[0006] The acceleration performance of the linear motor is only applicable to ordinary general linear stroke occasions, that is, the acceleration ≤ 3G, and it cannot be applied to the high-response die bonder applications where the die bonder needs to reach an acceleration of 16G.

[0007] The existing linear motors use circular coils, and the slot fill factor is only 60 - 70%, and the motor power density is on the low side.

[0008] For the application of a two-axis structure, the weight of the stator part needs to be calculated on the lower-axis load, which not only increases the load of the stroke movement, but also a single linear motor cannot achieve a compatible stroke in two movement directions.

[0009] In addition, the existing linear motors use natural cooling and cannot cool down quickly, resulting in a decrease in the current density of the coil and a decrease in the motor output force. Summary of the Invention

[0010] The purpose of the present invention is to provide a high-speed linear motor for a die bonder and a die bonder, and solve the problems of inability to be compatible with strokes in two directions, low acceleration and slow response, and low slot fill factor and motor power.

[0011] To achieve this purpose, the present invention adopts the following technical solutions:

[0012] In a first aspect, the present invention relates to a high-speed linear motor for a die bonder, including a stator and a mover. The stator includes a first yoke plate and a second yoke plate that are parallel to each other. A first permanent magnet plane composed of a plurality of first magnet assemblies is installed on the first yoke plate, and a second permanent magnet plane composed of a plurality of second magnet assemblies is installed on the second yoke plate. The first permanent magnet plane and the second permanent magnet plane are oppositely arranged to enclose a stator cavity and form a magnetic field in the stator cavity. The mover includes a carbon fiber bracket, and flat wire coils are arranged in parallel and tiled in the carbon fiber bracket. The flat wire coils include a plurality of inner and outer turns and stacked turns. The flat wire coils extend into the stator cavity. When servo-driven, the carbon fiber bracket has a stroke in the plane direction (XY direction) and a high-acceleration thrust (F) in the stator cavity.

[0013] The carbon fiber bracket is recessed to form three inner cavities arranged in parallel. Each inner cavity is provided with a flat wire coil. The flat wire coils are arranged in parallel and tiled and are connected to three phases of the power supply. Each flat wire coil is in the shape of a cuboid. Each layer of coil winding includes an effective long side, an effective short side, and an arc-shaped corner connecting the effective long side and the effective short side. The average value calculation formula of the thrust (F) is the following formula one:

[0014]

[0015] Among them, N refers to the effective number of turns of a single-phase flat wire coil, that is, N = N1 * N2; B refers to the magnetic induction intensity of the stator cavity; I eff refers to the effective value of the phase current; L refers to the effective length of the effective long side of the flat wire coil in the magnetic field direction.

[0016] The structure of the stator cavity determines the magnetic induction intensity B, as shown in the following formula two:

[0017]

[0018] Among them, B r is the remanence of the permanent magnets of the first permanent magnet plane and the second permanent magnet plane; h m is the thickness of a single first permanent magnet plane or second permanent magnet plane; g represents the air gap length.

[0019] Among them, the first permanent magnet plane is composed of a plurality of first magnet assemblies assembled in a multi-row and multi-column form, and are respectively bonded to the first yoke plate with high-strength structural adhesive. The number of rows of the first permanent magnet plane constitutes the lateral stroke of the stator cavity in the X direction, and the number of columns constitutes the depth stroke of the stator cavity in the Y direction. Among them, the magnetic poles (N and S poles) of adjacent first magnet assemblies in the same column are opposite, and there are upper ventilation gaps between adjacent first magnet assemblies in the same row and the same column; the second permanent magnet plane is composed of a plurality of second magnet assemblies assembled in a multi-row and multi-column form, and are respectively bonded to the second yoke plate with high-strength structural adhesive. The magnetic poles (N and S poles) of adjacent second magnet assemblies in the same column are opposite, and there are lower ventilation gaps between adjacent second magnet assemblies in the same row and the same column. The range of the upper ventilation gap is 0.5 - 0.8 mm, and the range of the lower ventilation gap is 0.5 - 0.8 mm.

[0020] In addition, the magnetic poles (N and S poles) between each first magnet assembly and the corresponding second magnet assembly facing each other are opposite; the flat wire coil is connected to the high-flex wire in three phases, and a power plug is arranged at the end of the high-flex wire.

[0021] The high-speed linear motor for the die bonder further includes a first yoke side plate, a second yoke side plate, and a yoke rear plate. The first yoke side plate and the second yoke side plate are fixedly supported on both sides of the first yoke plate and the second yoke plate, and the yoke rear plate is fixed at the rear of the first yoke plate and the second yoke plate.

[0022] For rapid cooling, an air inlet and a first small hole array are opened on the first yoke side plate, a second air inlet and a second small hole array are opened on the second yoke side plate. The air inlet is externally connected to an air pipe joint, and the air pipe joint is connected to an air cooling device.

[0023] A number of first limiting strips for positioning a number of first magnet assemblies and spacing to form upper ventilation gaps are protrudingly arranged on the first yoke plate, and a number of second limiting strips for positioning a number of second magnet assemblies and spacing to form lower ventilation gaps are protrudingly arranged on the second yoke plate.

[0024] In a second aspect, the present invention relates to a die bonder, including at least one high-speed linear motor described in the first aspect.

[0025] The die bonder further includes a machine head, a first high-speed linear motor, and a second high-speed linear motor. The machine head is supported on a Y-axis guide rail, the Y-axis guide rail is installed on a transfer table, the transfer table is supported on an X-axis guide rail. The first high-speed linear motor includes a first carbon fiber bracket connected to the transfer table, and outputs motion to the transfer table on the X-axis guide rail through the first carbon fiber bracket. The second high-speed linear motor includes a second carbon fiber bracket connected to the machine head, and outputs motion to the machine head on the Y-axis guide rail through the second carbon fiber bracket.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] Beneficial effect 1: The high-speed linear motor of this embodiment adopts a flat cuboid-shaped flat wire coil. The flat wire coil is cuboid-shaped and is wound around the cavity wall by a number of inner and outer turns (N2) and stacked turns (N1). There is almost no gap between the coils, and the slot fill factor is above 95%. Compared with a round wire coil with more gaps, the normal slot fill factor of which is 60 - 70%, under the same current density, the flat wire coil can withstand 30% more current than the round wire coil, and can increase the motor thrust output (F) by 30% compared with the round wire coil, greatly improving the power density of the motor.

[0028] Beneficial effect 2: The high-speed linear motor of this embodiment adopts a stator cavity structure. By reasonably setting the magnet thickness, air gap length, and remanence of the permanent magnet, the magnetic induction intensity in the cavity can be enhanced, further increasing the motor thrust output (F); in addition, the stator cavity structure is compatible with the strokes in both the X direction and the Y direction, which can reduce the load of the lower shaft of the die bonder by 35%, and at the same time reduce the moment of inertia, ensuring the stable operation of the machine at high speed.

[0029] Beneficial effect 3: The high-speed linear motor of this embodiment is provided with two air inlets and an air inlet small hole array on the wall surface of the stator cavity, a ventilation gap is formed between the magnet assemblies in the stator cavity to form a connected air duct, and a high-pressure air cooling device is adopted outside the stator cavity, so as to quickly cool the flat wire coil of the mover, improve the power density of the flat wire coil, and it can increase the current density of the flat wire coil by 15% and the motor output force through testing.

[0030] Beneficial effect 4: The carbon fiber bracket of the flat wire coil adopts a carbon fiber board with high strength and low density, which can minimize the weight of the mover as a moving part while ensuring the rigidity of the coil skeleton, and further increase the acceleration that the die bonder can achieve. The mover made of carbon fiber board can minimize the moving weight of the moving parts by 30%.

[0031] Beneficial effect 5: Combining the above beneficial effects 1 to 4, using the high-speed linear motor of this embodiment can greatly improve the die bonding work efficiency. From the perspective of acceleration, the acceleration can reach a maximum of 16G from the original 5G acceleration, the equipment efficiency of the die bonder is increased by 3 times, and the production capacity of die bonding is also increased by 3 times. Description of the Drawings

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0033] The structures, proportions, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the implementation conditions of the present invention. Therefore, they do not have any technical substantial meaning. Any modification of the structure, change of the proportional relationship, or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed in the present invention.

[0034] Figure 1 is a three-dimensional structure schematic diagram of the high-speed linear motor of the present invention;

[0035] Figure 2 is an exploded structure schematic diagram of the high-speed linear motor of the present invention;

[0036] Figure 3 is an electrode structure diagram of the first and second permanent magnet planes of the high-speed linear motor of the present invention;

[0037] Figure 4 is a three-dimensional structure diagram of the mover of the high-speed linear motor of the present invention;

[0038] Figure 5 is a schematic diagram of the flat wire coil structure of the high-speed linear motor of the present invention;

[0039] Figure 6 is a schematic diagram of the stator cavity structure of the high-speed linear motor of the present invention;

[0040] Figure 7 is an analysis diagram of the motor output force of the simulation software ANSYS of the high-speed linear motor of the present invention;

[0041] Figure 8 is a schematic diagram of the structure of the die bonder of the present invention;

[0042] Figure 9 is a schematic diagram of the magnetic yoke side plate heat dissipation air duct structure of the high-speed linear motor of the present invention.

[0043] Illustration:

[0044] Stator 1; Rotor 6; First yoke plate 10; Second yoke plate 20; First yoke side plate 30; Yoke rear plate 40; Second yoke side plate 50; Air duct 51; Second air inlet 54; Second air inlet 54; Second air pipe joint 55; First permanent magnet plane A; Second permanent magnet plane E; Stator cavity C; Upper ventilation gap P1; Lower ventilation gap P2; Carbon fiber bracket 60; First inner cavity 61; Second inner cavity 62; Third inner cavity 63; First flat wire coil 71; Arc corner 713; Effective short side 715; Effective long side L; Stacked turns N1; Inner and outer turns N2; Second flat wire coil 72; Third flat wire coil 73; High-flex wire 80; Power plug 85; First limiting strip 101; First high-speed linear motor 200; X-axis guide rails 211, 212; Adapter table 220; First carbon fiber bracket 240; Y-axis guide rails 251, 252; Machine head 300; Connecting plate 321; Second high-speed linear motor 400; Second carbon fiber bracket 460. Detailed implementation

[0045] In order to make the invention purpose, features, and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the embodiments described below are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.

[0046] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be intermediate components present.

[0047] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation manners.

[0048] Please refer to Figure 1 , the high-speed linear motor for a die bonder in the embodiment of the present invention includes a stator 1 and a rotor 6. The stator 1 is fixed on the machine table of the die bonder, and the rotor 6 can perform two-dimensional movement in the stator.

[0049] Please refer to Figure 2 and Figure 6, the stator 1 includes a first yoke plate 10, a second yoke plate 20, a first yoke side plate 30, a second yoke side plate 50, and a yoke rear plate 40 that are parallel to each other. A first permanent magnet plane A composed of a number of first magnet assemblies is mounted on the first yoke plate 10, and a second permanent magnet plane E composed of a number of second magnet assemblies is mounted on the second yoke plate 20. The first permanent magnet plane A and the second permanent magnet plane E are oppositely arranged to enclose a stator cavity C and form a magnetic field in the stator cavity C, and the air gap length of the magnetic field is g.

[0050] The first yoke side plate 30 and the second yoke side plate 40 are fixedly supported on both sides of the first yoke plate 10 and the second yoke plate 20. The yoke rear plate 50 is fixed to the rear parts of the first yoke plate 10 and the second yoke plate 20.

[0051] Please refer to Figure 2 and Figure 3 , in order to form a deep cavity structure for planar motion in the stator cavity C, the first permanent magnet plane A is composed of a number of first magnet assemblies combined and spliced in a multi-row and multi-column form, and are respectively bonded to the first yoke plate 10 with high-strength structural adhesive, as Figure 2 and Figure 3 shown, twenty-one magnet assemblies are combined into a pole plane in a three-row and seven-column manner. The first row of magnet assemblies includes magnet assembly A11, magnet assembly A12, and magnet assembly A13. The magnet assemblies in the third column are magnet assemblies A31 to A37. The number of rows of the first permanent magnet plane A constitutes the lateral stroke of the stator cavity C in the X direction, and the number of columns constitutes the depth stroke of the stator cavity C in the Y direction. Among them, the magnetic poles (N and S poles) of adjacent first magnet assemblies in the same column are opposite, for example, the magnetic poles between magnet assembly A31 and magnet assembly A32 are opposite. There is an upper ventilation gap P1 between adjacent first magnet assemblies in the same row and the same column.

[0052] The second permanent magnet plane E is composed of a number of second magnet assemblies combined and spliced in a multi-row and multi-column form, and are respectively bonded to the second yoke plate 20 with high-strength structural adhesive. The magnetic poles (N and S poles) of adjacent second magnet assemblies in the same column are opposite, for example, the magnetic poles between magnet assembly E31 and magnet assembly E32 are opposite. There is a lower ventilation gap P2 between adjacent second magnet assemblies in the same row and the same column.

[0053] In this embodiment, the range of the upper ventilation gap is 0.5 - 0.8 mm, and the range of the lower ventilation gap is 0.5 - 0.8 mm. A number of first limiting strips for positioning a number of first magnet assemblies and spacing to form the upper ventilation gap are protrudingly provided above the first yoke plate 10, such as the first limiting strip 101. A number of second limiting strips for positioning a number of second magnet assemblies and spacing to form the lower ventilation gap are protrudingly provided below the second yoke plate 20.

[0054] Please refer to Figure 6 , the magnetic poles (N and S poles) between the first magnetic steel component above and the corresponding second magnetic steel component below facing each other are opposite. For example, the magnetic poles between the first magnetic steel component A31 and the second magnetic steel component E31 are opposite.

[0055] In the high-speed linear motor of this embodiment, the first permanent magnet plane A and the second permanent magnet plane E of the stator cavity structure are planes with a gap, having a large area, compatible with the strokes in both the X and Y directions, which can reduce the load of the lower shaft of the die bonder by 35%, and at the same time reduce the moment of inertia to ensure the stable operation of the machine at high speed.

[0056] Please refer to Figure 4 , the mover 6 includes a flat carbon fiber bracket 60, and the carbon fiber bracket 60 is recessed to form three inner cavities arranged in parallel, including a first inner cavity 61, a second inner cavity 62, and a third inner cavity 63. Flat wire coils are arranged in each inner cavity. The first flat wire coil 71 is arranged in the first inner cavity 61, the second flat wire coil 72 is arranged in the second inner cavity 62, and the third flat wire coil 73 is arranged in the third inner cavity 63. The first to third flat wire coils 71 - 73 are fixed with epoxy resin and are connected to the three phases (UVW) of the power supply and powered by a three-phase AC power supply. The mover is controlled to move by AC servo. UVW respectively represent three different phases of the power supply. There is a 120-degree electrical angle difference between the U phase, the V phase, and the W phase.

[0057] The first to third flat wire coils 71 - 73 are arranged in parallel and tiled, in the shape of a flat cuboid and are three-phase connected to the high-flexible wire 80, being a coreless coil. The wiring of the first to third flat wire coils is bundled in the high-flexible wire 80, and a power plug 85 is arranged at the end of the high-flexible wire 80.

[0058] Please refer to Figure 5 , taking the flat wire coil 71 as an example to introduce the structure. The structures of the other flat wire coils are the same. The first flat wire coil 71 is closely attached to the cavity wall in the corresponding inner cavity, being a three-dimensional multi-layer coil structure in the shape of a cuboid inside and outside, up and down. The first flat wire coil 71 includes a number of inner and outer turns N2 and stacked turns N1. Each layer of turns includes an effective long side L, an effective short side 715, and an arc-shaped corner 713 connecting the effective long side and the effective short side. In the flat wire coil structure of this embodiment, a number of inner and outer turns (N2) and stacked turns (N1) are wound closely around the cavity wall with a slot fill factor of more than 95%, which improves the magnetic flux of the coil and the winding factor, so that the higher the slot fill factor of the coil, the greater the thrust (F) generated and the corresponding acceleration is also greater.

[0059] The first to third flat wire coils 71 - 73 at one end of the carbon fiber bracket 60 extend into the stator cavity C, and have a stroke in the plane direction (XY direction) and a high-acceleration thrust (F) in the stator cavity C during servo drive. The exposed bracket part of the carbon fiber bracket 60 is connected to the die bonder.

[0060] Please refer to Figure 5 , the high-speed linear motor of this embodiment is a three-phase coreless linear motor, and the thrust (F) is the three-phase thrust. The three-phase currents are 120 degrees apart in space. By reasonably arranging the flat wire coils, a magnetic field wave traveling in a straight line direction can be synthesized. The thrust is generated by the interaction between the three-phase currents and the magnetic field of the permanent magnet, and its resultant force is the vector sum of the thrusts of each phase. The inner and outer turns (N2) and the stacked turns (N1) of the rectangular parallelepiped structure in this embodiment have a high slot fill factor, which increases the thrust output. In a three-phase balanced system, the average value calculation formula of the thrust (F) is the following formula one:

[0061]

[0062] Among them, N refers to the effective number of turns of the single-phase flat wire coil, that is, N = N1 * N2; B refers to the magnetic induction intensity of the stator cavity C; I eff refers to the effective value of the phase current; L refers to the effective length of the effective long side of the flat wire coil in the magnetic field direction.

[0063] Alternatively, based on the peak current I peak , the average value calculation formula of the thrust (F) is the following formula three:

[0064]

[0065] Among them, N refers to the effective number of turns of the single-phase flat wire coil; B refers to the magnetic induction intensity of the stator cavity; I peak refers to the peak current; L refers to the effective length of the effective long side of the flat wire coil in the magnetic field direction.

[0066] It can be seen from the above calculations that by increasing the value of the magnetic induction intensity B of the stator cavity C, based on the improved flat rectangular parallelepiped flat wire coil parameters N and L, the greater the thrust that can be generated, and the corresponding acceleration is also greater.

[0067] Based on the improved flat wire coil closely attached to the cavity wall, the slot fill factor is above 95%. In the case of the same current density, the flat wire coil can withstand 30% more current than the round wire coil, and the motor output thrust (F) can be increased by 30% compared with the round wire coil. Please refer to it together Figure 5 and Figure 6 , the high-speed linear motor of this embodiment adopts a stator cavity structure. By reasonably setting the magnet thickness, air gap length, and remanence of the permanent magnet, the magnetic induction intensity in the cavity can be enhanced, and the motor output thrust (F) can be further increased to improve the acceleration. The structure of the stator cavity determines the magnetic induction intensity B, as shown in the following formula two:

[0068]

[0069] Among them, B ris the remanence of the permanent magnets in the first permanent magnet plane and the second permanent magnet plane, B r is related to the magnetic grade number. In this embodiment, the highest grade number 54SH is adopted. h m are the thicknesses of the first permanent magnet plane and the second permanent magnet plane; g is in meters and represents the air gap length, that is, the vertical distance between the upper and lower rows of magnetic steels, which is the physical gap between the permanent magnet and the coil in the magnetic circuit and directly affects the attenuation degree of the magnetic field.

[0070] The skeleton of the mover 6 adopts a carbon fiber bracket 60, which is a high-strength and low-density carbon fiber board. It can minimize the weight of the moving part while ensuring the rigidity of the coil skeleton, and further increase the acceleration that the die bonder can achieve.

[0071] The cavity structure of the stator 1 of the high-speed linear motor is as Figure 2 shown. The number of rows of the first permanent magnet plane A constitutes the lateral stroke of the stator cavity C in the X direction, and the number of columns constitutes the depth stroke of the stator cavity C in the Y direction. For example, the first magnetic steel assembly A11 - A31 and the second magnetic steel assembly E11 - E31 have three rows, and the first magnetic steel assembly A11 - A17 and the second magnetic steel assembly E11 - E17 have seven columns. In addition to meeting the stroke in the force direction, it can also meet the movement stroke in another direction. Moreover, the stator can be installed on the frame of the die bonder, and the weight of the stator 1 will not increase the load on the Y-direction support shaft 200 of the mover 6. For an application occasion such as a die bonder with an extremely high beat response, reducing the load weight is extremely important and can greatly reduce the load and moving inertia.

[0072] Please refer to Figure 5 . The top view of the flat wire coil is rectangular, and there is almost no gap between the coils. The slot fill factor is above 95%. Compared with the round wire coil, there are more gaps, and the normal slot fill factor is 60 - 70%. Under the same current density, the flat wire coil can withstand 30% more current than the round wire coil.

[0073] It can be seen from the calculation by the Ampere's law formula F = BIL that among them, F is the Ampere force, B is the magnetic induction intensity, I is the current intensity, and L is the length of the wire in the magnetic field. Among them, the current intensity I can be increased by 30%, that is, the output thrust (F) of the motor can be increased by about 30%.

[0074] Please refer to Figure 7 . Through the motor thrust analysis using the simulation software ANSYS, it can also be simulated that after the motor uses the flat wire coil, the motor force can be increased by 30% compared with the round wire coil.

[0075] Please refer to Figure 2 and Figure 9, the first yoke side plate 30 has the same structure as the first yoke side plate 50. For rapid cooling, a first air inlet and a first small hole array for uniform air outlet are provided on the first yoke side plate 30. A second air inlet and a second small hole array for uniform air outlet are provided on the second yoke side plate 50. The first air inlet is externally connected to a first air pipe joint 35, and the second air inlet is externally connected to a second air pipe joint 55. The first and second air pipe joints are connected to a high-pressure air cooling device.

[0076] As Figure 9 shown, the structure of the second yoke side plate 50 is introduced, and the first yoke side plate 30 has the same structure. An air groove 51 is recessed on the inner side of the second yoke side plate 50. A second air inlet 54 is provided on the outer side of the second yoke side plate 50, and a second small hole array for uniform air outlet, such as a small hole 58, is provided inside. The second air inlet 54 communicates with the second small hole array. A second air pipe joint 55 is installed on the second air inlet 54.

[0077] The extremely small first and second small hole arrays can form an air knife with extremely fast air flow in the upper and lower ventilation gaps between the flat wire coil and the first and second magnet assemblies, quickly take away the heat generated by the coil, form forced air cooling, and cool the coil. In this way, the current density of the flat wire coil can be increased by more than 15%. According to Ampere's law, the motor thrust (F) can also be increased by more than 15%.

[0078] As Figure 8 shown, this embodiment also relates to a die bonder, which includes at least one high-speed linear motor.

[0079] To achieve planar movement in two directions of X and Y, two high-speed linear motors are used in the die bonder of this embodiment. The die bonder also includes a machine head 300, a first high-speed linear motor 200, and a second high-speed linear motor 400. The machine head 300 is supported on Y-axis guide rails, such as Y-axis guide rails 251 and 252. The Y-axis guide rails are installed on a transfer table 220. The transfer table 220 is supported on X-axis guide rails, such as X-axis guide rails 211 and 212. The first high-speed linear motor 200 includes a first carbon fiber bracket 240 connected to the transfer table 220, and the movement of the linear motor is output to the transfer table 220 on the X-axis guide rails through the first carbon fiber bracket 240. The second high-speed linear motor 400 includes a second carbon fiber bracket 460, and the second carbon fiber bracket 460 is fixedly connected to the machine head 300 through a connecting plate 321. The second high-speed linear motor 400 outputs the movement of the motor to the machine head 300 on the Y-axis guide rails through the second carbon fiber bracket 460.

[0080] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-speed linear motor for a die bonder, characterized in that, It includes a stator and a rotor. The stator includes a first yoke plate and a second yoke plate that are parallel to each other. On the first yoke plate, a first permanent magnet plane composed of several first magnet assemblies is installed. On the second yoke plate, a second permanent magnet plane composed of several second magnet assemblies is installed. The first permanent magnet plane and the second permanent magnet plane are arranged opposite to each other to enclose a stator cavity and form a magnetic field in the stator cavity. The rotor includes a carbon fiber bracket, and flat wire coils are arranged in parallel and tiled in the carbon fiber bracket. The flat wire coils include several inner and outer turns (N2) and stacked turns (N1). The flat wire coils extend into the stator cavity. When servo-driven, the carbon fiber bracket has a stroke in the plane direction (XY direction) and a high-acceleration thrust (F) in the stator cavity.

2. The high-speed linear motor for a die bonder according to claim 1, wherein The carbon fiber bracket is recessed to form three inner cavities arranged in parallel. Each inner cavity is provided with a flat wire coil. The flat wire coils are arranged in parallel and tiled and are connected to three phases of the power supply. Each flat wire coil is cuboid-shaped. Each turn includes an effective long side, an effective short side, and an arc-shaped corner connecting the effective long side and the effective short side. The average value calculation formula of the thrust (F) is the following formula one: Among them, N refers to the effective number of turns of the single-phase flat wire coil, that is, N = N1 * N2; B refers to the magnetic induction intensity of the stator cavity; I eff refers to the effective value of the phase current; L refers to the effective length of the effective long side of the flat wire coil in the magnetic field direction.

3. The high-speed linear motor for a die bonder according to claim 2, characterized in that, The structure of the stator cavity determines the magnetic induction intensity B, as shown in the following formula two: Among them, B r is the remanence of the permanent magnets of the first permanent magnet plane and the second permanent magnet plane; h m is the thickness of a single first permanent magnet plane or the second permanent magnet plane; g represents the air gap length.

4. The high-speed linear motor for die bonder according to claim 3, wherein The first permanent magnet plane is composed of multiple first magnet assemblies combined and spliced in a multi-row and multi-column form, and is respectively bonded to the first yoke plate with high-strength structural adhesive. The number of rows of the first permanent magnet plane constitutes the lateral stroke of the stator cavity in the X direction, and the number of columns constitutes the depth stroke of the stator cavity in the Y direction. Among them, the magnetic poles (N and S poles) of adjacent first magnet assemblies in the same column are opposite. There is an upper ventilation gap between adjacent first magnet assemblies in the same row and the same column. The second permanent magnet plane is composed of multiple second magnet assemblies combined and spliced in a multi-row and multi-column form, and is respectively bonded to the second yoke plate with high-strength structural adhesive. The magnetic poles (N and S poles) of adjacent second magnet assemblies in the same column are opposite. There is a lower ventilation gap between adjacent second magnet assemblies in the same row and the same column. The range of the upper ventilation gap is 0.5 - 0.8 mm, and the range of the lower ventilation gap is 0.5 - 0.8 mm.

5. The high-speed linear motor for a die bonder according to claim 4, wherein, The magnetic poles (N and S poles) of each first magnet assembly and the corresponding opposite second magnet assembly are opposite. The flat wire coils are connected to three phases of high-flexible wires, and a power plug is arranged at the end of the high-flexible wires.

6. The high-speed linear motor for a die bonder according to claim 4, wherein It further includes a first yoke side plate, a second yoke side plate, and a yoke rear plate. The first yoke side plate and the second yoke side plate are fixedly supported on both sides of the first yoke plate and the second yoke plate, and the yoke rear plate is fixed at the rear of the first yoke plate and the second yoke plate.

7. The high-speed linear motor for die bonder according to claim 6, characterized in that, A first air inlet and a first small hole array are opened on the first yoke side plate. A second air inlet and a second small hole array are opened on the second yoke side plate. The first air inlet and the second air inlet are externally connected to an air pipe joint, and the air pipe joint is connected to an air cooling device.

8. The high-speed linear motor for a die bonder according to claim 7, wherein, A plurality of first limiting strips for positioning a plurality of first magnet assemblies and spaced to form the upper ventilation gap are protrudingly provided on the first yoke plate, and a plurality of second limiting strips for positioning a plurality of second magnet assemblies and spaced to form the lower ventilation gap are protrudingly provided on the second yoke plate.

9. A die bonder, characterized in that, It includes at least one high-speed linear motor according to any one of claims 1-8.

10. The die bonder according to claim 9, characterized in that, It further includes a machine head, a first high-speed linear motor, and a second high-speed linear motor. The machine head is supported on a Y-axis guide rail, the Y-axis guide rail is mounted on a transfer table, the transfer table is supported on an X-axis guide rail. The first high-speed linear motor includes a first carbon fiber bracket connected to the transfer table, and outputs motion to the transfer table on the X-axis guide rail through the first carbon fiber bracket. The second high-speed linear motor includes a second carbon fiber bracket connected to the machine head, and outputs motion to the machine head on the Y-axis guide rail through the second carbon fiber bracket.

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