Electronic component manufacturing apparatus

Abstract

Provided is an electronic component manufacturing apparatus that makes it easy to separate beads from a slurry. The electronic component manufacturing apparatus includes a cylindrical container, a shaft portion, and a plurality of stirrers. The container has an axial center extending in a first direction and is capable of accommodating slurry. The shaft portion is disposed inside the container, extends in a first direction, and is rotatable about the first direction. Each of the plurality of stirrers has at least one stirring portion extending from the shaft portion in an in-plane direction intersecting the first direction, and is rotatable together with the shaft portion so as to stir the slurry together with the plurality of beads. Among the plurality of stirrers, the stirrers are arranged one by one at intervals in the first direction. The plurality of stirrers include a first stirrer and a second stirrer that are adjacent to each other in the first direction. The first stirrer has a lower stirring force than the second stirrer.

Description

Technical Field

[0001] The present invention relates to an electronic component manufacturing apparatus. Background Art

[0002] As a prior art document that discloses the structure of a bead mill that can be used as an electronic component manufacturing apparatus, there is Japanese Utility Model Registration No. 3217671 (Patent Document 1). The bead mill described in Patent Document 1 includes a cylindrical container and a stirrer. The bead mill rotates the stirrer in the cylindrical container to stir hard particles (beads). Thereby, the particles in the suspension (slurry) of solid particles are pulverized. After that, the beads are separated from the slurry.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: Japanese Utility Model Registration No. 3217671 Summary of the Invention

[0006] Problems to be Solved by the Invention

[0007] In order to miniaturize the particles of the ceramic slurry along with the miniaturization of the multilayer ceramic capacitor, the beads for pulverizing the ceramic slurry are also miniaturized. In the bead mill described in Patent Document 1, along with the miniaturization of the beads, it may be difficult to separate the beads from the slurry.

[0008] The present invention has been made in view of the above problems, and an object thereof is to provide an electronic component manufacturing apparatus that can easily separate beads from the slurry.

[0009] Technical Solution for Solving the Problems

[0010] The electronic component manufacturing apparatus based on the present invention includes a cylindrical container, a shaft portion, and a plurality of stirrers. The container has an axis extending in a first direction and can accommodate a slurry. The shaft portion is disposed inside the container, extends in the first direction, and can rotate about the first direction as an axis. Each of the plurality of stirrers has at least one stirring portion extending in a plane direction intersecting the first direction from the shaft portion, and can rotate together with the shaft portion so as to stir the slurry together with a plurality of beads. Among the plurality of stirrers, the stirrers are arranged at intervals in the first direction one by one. The plurality of stirrers includes a first stirrer and a second stirrer adjacent to each other in the first direction. The first stirrer has a lower stirring force than the second stirrer.

[0011] Advantages of the Invention

[0012] According to the device structure of the present invention, it becomes easy to control the flow of the beads, and it is possible to easily separate the beads from the slurry. Brief Description of the Drawings

[0013] Figure 1 is a partial cross-sectional view showing the structure of the electronic component manufacturing apparatus according to Embodiment 1 of the present invention.

[0014] Figure 2 is a schematic view showing the structure of the shaft portion and the plurality of agitators included in the electronic component manufacturing apparatus according to Embodiment 1 of the present invention.

[0015] Figure 3 is a partial cross-sectional view showing the internal structure of the shaft portion included in the electronic component manufacturing apparatus according to Embodiment 1 of the present invention.

[0016] Figure 4 is a schematic view showing the state in which a plurality of beads flow in the container according to Embodiment 1 of the present invention.

[0017] Figure 5 is a flowchart showing the manufacturing method of the electronic component according to Embodiment 1 of the present invention.

[0018] Figure 6 is a perspective view showing the structure of the electronic component manufacturing apparatus according to Embodiment 2 of the present invention.

[0019] Figure 7 is a perspective view showing the projected area of the stirring portion caused by the stirring force of the plurality of agitators.

[0020] Figure 8 is a perspective view showing the structure of the electronic component manufacturing apparatus according to Embodiment 3 of the present invention.

[0021] Figure 9 is a perspective view showing the structure of the electronic component manufacturing apparatus according to Embodiment 4 of the present invention.

[0022] Description of Reference Numerals

[0023] 1, 1A, 1B, 1C: Electronic component manufacturing apparatus;

[0024] 2: Slurry;

[0025] 3: Cooling water;

[0026] 10: Container;

[0027] 11: First end;

[0028] 12: Second end;

[0029] 20: Lower cover;

[0030] 21: First pulley;

[0031] 21A: Lower pulley;

[0032] 21B: Intermediate pulley

[0033] 21C: Upper pulley

[0034] 22: First transmission belt

[0035] 22A: Lower transmission belt

[0036] 22B: Intermediate transmission belt

[0037] 22C: Upper transmission belt

[0038] 23: First motor

[0039] 24: Spindle

[0040] 30: Upper cover

[0041] 31: Second pulley

[0042] 32: Second transmission belt

[0043] 33: Second motor

[0044] 40: Inlet

[0045] 50: Outlet

[0046] 60: Multiple beads

[0047] 70, 70A: Shaft portion

[0048] 71, 71A: First shaft portion

[0049] 72, 72A: Second shaft portion

[0050] 73, 73A: Third shaft portion

[0051] 80, 80A, 80B, 80C: Multiple agitators

[0052] 81, 81A, 81B, 81C: First agitator

[0053] 82, 82A, 82B, 82C: Second agitator

[0054] 85, 85A: Fifth agitator

[0055] 90: Separator

[0056] 91: Blade portion

[0057] 92: Disk member

[0058] 100: Outer wall portion

[0059] 101: Cooling water flow port

[0060] 110: Inner wall portion;

[0061] 111: Inner peripheral surface;

[0062] 120: Cooling water flow path;

[0063] 130: Spiral portion;

[0064] 180: Stirring portion;

[0065] 181A, 181B, 181C: First stirring portion;

[0066] 182A, 182B, 182C: Second stirring portion;

[0067] C: Axis;

[0068] R1: First region;

[0069] R2: Second region;

[0070] S1, S2: Projection area. Detailed implementation manners

[0071] Hereinafter, an electronic component manufacturing apparatus according to each embodiment of the present invention will be described with reference to the drawings. In the following description of the embodiments, the same or corresponding parts in the drawings are denoted by the same reference numerals, and the description thereof will not be repeated.

[0072] In addition, in the drawings, an arbitrary direction orthogonal to the first direction extending along the axis of the container included in the electronic component manufacturing apparatus is defined as the X direction, a direction orthogonal to the first direction and the X direction is defined as the Y direction, and the first direction is defined as the Z direction.

[0073] (Embodiment 1)

[0074] Figure 1 It is a partial cross-sectional view showing the structure of the electronic component manufacturing apparatus according to Embodiment 1 of the present invention.

[0075] The electronic component manufacturing apparatus 1 in the present embodiment is an apparatus that pulverizes particles in a slurry by stirring a suspension (slurry) of a plurality of hard particles (beads) and solid particles inside the apparatus. The electronic component manufacturing apparatus 1 in the present embodiment is a so-called bead mill.

[0076] The slurry 2 processed by the electronic component manufacturing apparatus 1 is, for example, a ceramic slurry. The ceramic slurry is mainly used for ceramic capacitors. The ceramic slurry contains ceramic particles, a binder, a dispersant, an organic solvent, and the like.

[0077] As Figure 1As shown, the electronic component manufacturing apparatus 1 according to Embodiment 1 of the present invention includes a cylindrical container 10, a lower cover 20, an upper cover 30, an inlet 40, an outlet 50, a plurality of beads 60, a shaft portion 70, a plurality of stirrers 80, and a separator 90.

[0078] The container 10 is cylindrical. The container 10 in the present embodiment is cylindrical. In addition, the container 10 is not limited to a cylindrical shape and may be other shapes such as an elliptical shape.

[0079] The container 10 has an axis C extending in the first direction (Z direction). The first direction (Z direction) in the present embodiment is the vertical direction. In addition, the first direction (Z direction) may also be the horizontal direction.

[0080] The container 10 can accommodate the slurry 2. When the container 10 has an axis C in the vertical direction, the contents (such as slurry) are filled from below to above inside the container 10.

[0081] The capacity of the container 10 can be appropriately changed according to the processing amount of the slurry 2. For example, the inner diameter of the container 10 is 0.3 m or more and 1.0 m or less. The height of the container 10 in the first direction (Z direction) is, for example, 0.5 m or more and 1.5 m or less.

[0082] The container 10 is a double structure capable of circulating cooling water 3 in the circumferential surface portion of the container 10. The container 10 has an outer wall portion 100, an inner wall portion 110, and a cooling water flow path 120.

[0083] The outer wall portion 100 is located outside the container 10. The outer wall portion 100 is cylindrical. The inner wall portion 110 is located inside the container 10. The inner wall portion 110 is cylindrical. The inner wall portion 110 is arranged at an interval from the outer wall portion 100 in the X direction and the Y direction. A cooling water flow path 120 is formed between the outer wall portion 100 and the inner wall portion 110. By allowing the cooling water 3 to flow in the cooling water flow path 120, the slurry 2 can be cooled.

[0084] A cooling water circulation port 101 is provided on the outer wall portion 100. A pair of cooling water circulation ports 101 are provided above and below the outer wall portion 100 in the Z direction. The cooling water 3 is introduced into the cooling water flow path 120 from one cooling water circulation port 101 and discharged from the other cooling water circulation port 101. Thus, in the cooling water flow path 120, the cooling water 3 can flow along the Z direction and the circumferential direction of the Z direction.

[0085] A spiral portion 130 is formed on the inner peripheral surface 111 of the inner wall portion 110 in the present embodiment. The spiral portion 130 extends along the first direction (Z direction) while rotating around the axis C on the inner peripheral surface 111 of the container 10. The spiral portion 130 in the present embodiment is a spiral groove that is concave in the direction away from the axis C.

[0086] For example, the spiral portion 130 is formed to rotate within a range of two or more turns and three or fewer turns in the first direction (Z direction) of the inner wall portion 110.

[0087] The plurality of beads 60 can flow in the container 10 along the spiral portion 130. By forming the spiral portion 130, it can be configured such that when the plurality of beads 60 come into contact with the inside of the spiral portion 130 or enter the inside of the spiral portion 130, the plurality of beads 60 flow toward the first end portion 11 side.

[0088] Specifically, the plurality of beads 60 that have entered the spiral portion 130 flow smoothly along the circumferential direction of the first direction (Z direction) and the first direction by flowing along the spiral portion 130. Therefore, the plurality of beads 60 can not only rotate and flow on the XY plane but also flow in the first direction (Z direction). As a result, the plurality of beads 60 are efficiently dispersed in the container 10.

[0089] The spiral portion 130 is disposed at least from the position corresponding to the separator 90 to the first end portion 11 side in the first direction (Z direction). Thereby, when separating the plurality of beads 60 using the separator 90, it is easy for the plurality of beads 60 to flow from the spiral portion 130 to the first end portion 11 side, and thus it is possible to suppress the plurality of beads 60 from entering the downstream of the separator 90.

[0090] The container 10 is configured to be able to rotate about the axis C. In the present embodiment, the inner wall portion 110 of the container 10 is configured to be able to rotate about the axis C. The inner wall portion 110 can rotate independently of the shaft portion 70, the separator 90, the outer wall portion 100, etc. by a motor not shown. Thereby, when the plurality of beads 60 enter the spiral portion 130, the flow of the plurality of beads 60 inside the spiral portion 130 is promoted. Additionally, the container 10 may not be configured to be able to rotate about the axis C.

[0091] The rotational speed or rotational direction of the inner wall portion 110 of the container 10 is not particularly limited. The rotational speed of the inner wall portion 110 of the container 10 can be the same as the rotational speed of the shaft portion 70 or a speed less than or equal to the rotational speed of the shaft portion 70. The rotational direction of the inner wall portion 110 of the container 10 is preferably different from the rotational direction of the shaft portion 70.

[0092] The lower cover 20 is connected to the first end portion 11 of the container 10. A first pulley 21 is disposed inside the lower cover 20. The first pulley 21 is connected to the shaft portion 70. The first pulley 21 is capable of rotating in the circumferential direction in the Z direction. A first transmission belt 22 is wound around the first pulley 21. The first transmission belt 22 is connected to the first pulley 21 and the first motor 23. By driving the first motor 23, the first pulley 21 can rotate via the first transmission belt 22. Thus, the shaft portion 70 can rotate together with the first pulley 21.

[0093] The upper cover 30 is connected to the second end portion 12 of the container 10. A second pulley 31 is disposed inside the upper cover 30. The second pulley 31 is connected to the separator 90. The second pulley 31 is capable of rotating in the circumferential direction in the Z direction. A second transmission belt 32 is wound around the second pulley 31. The second transmission belt 32 is connected to the second pulley 31 and the second motor 33. By driving the second motor 33, the second pulley 31 can rotate via the second transmission belt 32. Thus, the separator 90 can rotate together with the second pulley 31.

[0094] The inlet 40 can introduce the slurry 2 into the interior of the container 10. The inlet 40 is located on the side of the first end portion 11 in the first direction (Z direction) of the container 10. In the present embodiment, the inlet 40 is located at the first end portion 11. In addition, the arrangement of the inlet 40 is not limited to the first end portion 11. The inlet 40 may also be arranged at any position around the first end portion 11 in the first direction (Z direction) of the container 10.

[0095] The outlet 50 can take out the slurry 2 from the interior of the container 10. The outlet 50 is located on the side of the second end portion 12, which is on the opposite side of the first end portion 11 in the first direction (Z direction) of the container 10. In the present embodiment, the outlet 50 is located at the second end portion 12. In addition, the arrangement of the outlet 50 is not limited to the second end portion 12. The outlet 50 may also be arranged at any position around the second end portion 12 in the first direction (Z direction) of the container 10.

[0096] A plurality of beads 60 are accommodated inside the container 10. The plurality of beads 60 are spherical bodies made of zirconia or resin. The diameter of each of the plurality of beads 60 is, for example, 0.3 μm or more and 1.0 mm or less. However, the particle size of the beads 60 is not limited to 0.3 μm or more and 1.0 mm or less.

[0097] The shaft portion 70 is disposed inside the container 10. The shaft portion 70 extends in the first direction (Z direction). The shaft portion 70 can rotate about the axis in the first direction (Z direction).

[0098] A plurality of stirrers 80 extend from the shaft portion 70 in a direction intersecting the first direction. In the present embodiment, the plurality of stirrers 80 extend from the shaft portion 70 in a direction orthogonal to the first direction (any direction on the XY plane). The plurality of stirrers 80 extend radially while being spaced apart from each other around the shaft portion 70 on the same XY plane. The plurality of stirrers 80 can rotate together with the shaft portion 70 to stir the slurry 2 and the plurality of beads 60 together. Details of the shaft portion 70 and the plurality of stirrers 80 will be described later. In addition, the shaft portion 70 may extend to the separator 90.

[0099] The separator 90 is disposed inside the container 10. The separator 90 is located on the second end portion 12 side of the shaft portion 70 in the first direction (Z direction). The separator 90 is provided at a position immediately before the take-out port 50 in the flow of the slurry 2 inside the container 10.

[0100] The separator 90 has a blade portion 91 and two disk members 92. The blade portion 91 extends radially and curvedly from the center of the separator 90. The two disk members 92 sandwich the blade portion 91 in the Z direction.

[0101] The separator 90 can rotate about the first direction (Z direction) as the axis center. When the separator 90 rotates, a centrifugal force is applied to the slurry 2 and the plurality of beads 60 on the XY plane facing the separator 90. By this centrifugal force, the plurality of beads 60 mixed in the slurry 2 are pushed against the inner peripheral surface 111 of the container 10. Thereby, the plurality of beads 60 are separated from the slurry 2. In addition, the rotation speeds of the separator 90 and the plurality of stirrers 80 may be the same or different.

[0102] Figure 2 It is a schematic diagram showing the structure of the shaft portion and the plurality of stirrers included in the electronic component manufacturing apparatus according to Embodiment 1 of the present invention. Figure 3 It is a partial cross-sectional view showing the internal structure of the shaft portion included in the electronic component manufacturing apparatus according to Embodiment 1 of the present invention.

[0103] As Figure 2 and Figure 3 shown, the shaft portion 70 is at least divided into two parts in the first direction (Z direction). In the present embodiment, the shaft portion 70 is divided into three parts.

[0104] The shaft portion 70 has a first shaft portion 71, a second shaft portion 72, and a third shaft portion 73. The first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 have a structure that overlaps threefold at the rotation axis center.

[0105] In the first shaft portion 71, the lower pulley 21A of the first pulley 21 is connected below. In the second shaft portion 72, the middle pulley 21B of the first pulley 21 is connected below. In the third shaft portion 73, the upper pulley 21C of the first pulley 21 is connected below.

[0106] In the first motor 23, a main shaft 24 with the Z direction as the rotation axis center is provided. The lower pulley 21A is connected to the main shaft 24 via the lower transmission belt 22A of the first transmission belt 22. The middle pulley 21B is connected to the main shaft 24 via the middle transmission belt 22B of the first transmission belt 22. The upper pulley 21C is connected to the main shaft 24 via the upper transmission belt 22C of the first transmission belt 22. By rotating the first motor 23, the first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 connected to the respective pulleys rotate. By making the diameters of the respective pulleys different, the rotation speeds of the first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 can be made different.

[0107] The first shaft portion 71, the second shaft portion 72, and the third shaft portion 73 can rotate in the same direction. In the present embodiment, the first shaft portion 71 rotates at a lower rotational speed relative to the second shaft portion 72 and the third shaft portion 73. The rotational speed of the first shaft portion 71 in the present embodiment rotates at a rotational speed of 80% or more and 90% or less relative to the second shaft portion 72 and the third shaft portion 73.

[0108] Each of the plurality of stirrers 80 has at least one stirring portion 180 extending in the in-plane direction intersecting the first direction from the shaft portion 70. In the present embodiment, at least one stirring portion 180 extends in a direction orthogonal to the first direction. At least one stirring portion 180 extends radially in four directions while being spaced apart from each other around the shaft portion 70 on the XY plane in which the stirring portion extends.

[0109] At least one stirring portion 180 has a cylindrical shape in a cross-section viewed from the extending direction. In addition, the stirring portion 180 is not limited to a cylindrical shape. The stirring portion 180 may also be an elliptical shape, a quadrilateral shape, or other shapes.

[0110] The thickness of the stirring portion 180 in a cross-section viewed from the extending direction is, for example, 10 mm or more and 20 mm or less. The length of the stirring portion 180 in the extending direction is, for example, 100 mm or more and 400 mm or less.

[0111] The plurality of stirrers 80 includes a first stirrer 81 and a second stirrer 82. The plurality of stirrers 80 in the present embodiment further includes a third stirrer, a fourth stirrer, and a fifth stirrer 85.

[0112] Among the plurality of stirrers 80, the stirrers are arranged at intervals in the first direction (Z direction) one by one. Among the plurality of stirrers 80 in the present embodiment, the first stirrer 81 to the fifth stirrer 85 are arranged at intervals in the first direction (Z direction) one by one.

[0113] The first stirrer 81 and the second stirrer 82 are adjacent to each other in the first direction (Z direction). As Figure 1 and Figure 2 shown, the first stirrer 81 is located on the side closer to the discharge port 50 than the second stirrer 82 in the first direction (Z direction).

[0114] The first stirrer 81 is connected to the first shaft portion 71. The second stirrer 82, the third stirrer, and the fourth stirrer are connected to the second shaft portion 72. The fifth stirrer 85 is connected to the third shaft portion 73.

[0115] Hereinafter, the flow of the slurry 2 and the plurality of beads 60 inside the container 10 will be described.

[0116] Figure 4 is a schematic diagram showing the state of the flow of the plurality of beads according to Embodiment 1 of the present invention inside the container.

[0117] In the present embodiment, the rotational speed of the first shaft portion 71 is slower than the rotational speed of the second shaft portion 72. Therefore, the rotational speed of the first stirrer 81 is slower than the rotational speed of the second stirrer 82.

[0118] If the rotational speed of the first stirrer 81 becomes slower than the rotational speed of the second stirrer 82, since the amount of fluid stirred by the stirring portion becomes smaller, the stirring force of the first stirrer 81 becomes lower. Therefore, the first stirrer 81 has a lower stirring force than the second stirrer 82. Then, the slurry urchased 2 stirred in the first region R1 around the first stirrer 81 connected to the first shaft portion 71 is in a low-pressure state (a state where the flow of the slurry 2 is small) compared to the slurry 2 stirred in the second region R2 around the second stirrer 82 to the fifth stirrer 85 connected to the second shaft portion 72 and the third shaft portion 73.

[0119] Generally, a fluid flows from a region of high pressure toward a region of low pressure. Assuming that the stirring forces of all the plurality of stirrers 80 are the same, inside the container 10, the pressure in the first direction (Z direction) is substantially uniform. Therefore, the plurality of beads 60 stirred by the plurality of stirrers 80 are pushed onto the XY plane orthogonal to the first direction (Z direction) of the inner wall portion 110 and rotate in the circumferential direction in the first direction (Z direction) on the same XY plane. Although the plurality of beads 60 mixed in the slurry 2 are separated by the separator 90, a part of them may flow beyond the separator 90 to the subsequent process.

[0120] On the other hand, in the present embodiment, a plurality of beads 60 flow from the high-pressure second region R2 around the second stirrer 82 to the low-pressure first region R1 around the first stirrer 81 (flow along the Figure 4 DR1 direction in ). A plurality of beads 60 mixed in the slurry 2 tend to aggregate in the first region R1, so that it is possible to easily separate the plurality of beads 60 from the slurry 2.

[0121] In addition, by disposing the first stirrer 81 on the side of the take-out port 50, a low-pressure first region R1 can be formed in the region near the take-out port 50 side. As a result, a plurality of beads 60 can sufficiently exist along the shaft portion 70. In addition, a plurality of beads 60 on the side of the inlet port 40 also flow toward the region on the side of the take-out port 50 along the flow of the slurry 2. As a result, a flow of a plurality of beads 60 circulating in the container 10 is formed, so that the stirring property of the slurry 2 can be increased. In addition, since the plurality of beads 60 separated by the separator 90 can be aggregated around the first stirrer 81, the performance of the separator 90 for separating beads can be improved.

[0122] In addition, the thickness or length of the stirring portions in the present embodiment is the same, but it is not limited thereto, and they may be different from each other.

[0123] Hereinafter, a method for manufacturing an electronic component will be described. Figure 5 It is a flowchart showing a method for manufacturing an electronic component according to Embodiment 1 of the present invention.

[0124] As Figure 1 , Figure 2 and Figure 5 shown, as a method for manufacturing an electronic component according to Embodiment 1 of the present invention, first, the slurry 2 is introduced into the inside of the container 10 from the inlet port 40 (S1). A plurality of beads 60 are previously arranged inside the container 10. Inside the container 10, a state where the slurry 2 and the plurality of beads 60 are mixed together is formed. The slurry 2 is continuously introduced while the slurry 2 and the plurality of beads 60 are being stirred.

[0125] Next, the slurry 2 and the plurality of beads 60 are stirred together by the rotation of the shaft portion 70 and the plurality of stirrers 80 extending from the shaft portion 70 disposed inside the container 10 (S2). The stirring time is, for example, 2 hours or more. By stirring, since the plurality of beads 60 collide with the particles in the slurry 2, the particles are crushed.

[0126] When stirring the slurry 2 together with the plurality of beads 60, the plurality of beads 60 are caused to flow toward the first region R1 around the first stirrer 81 in the container 10 (S3). Since the plurality of beads 60 gather around the first stirrer 81, the number of the plurality of beads 60 reaching the separator 90 can be reduced.

[0127] Next, the plurality of beads 60 are separated from the slurry 2 by the separator 90 (S4). The plurality of beads 60 are given a centrifugal force by the separator 90 and flow from the axial center C side toward the inner peripheral surface 111 of the container 10. At this time, the plurality of beads 60 repelled by the separator 90 are likely to gather at the first stirrer 81 disposed near the separator 90. Therefore, the plurality of beads 60 can be efficiently separated by the separator 90.

[0128] Next, the slurry 2 inside the container 10 is taken out (S5). The slurry 2 is discharged from the outlet 50 to the subsequent process. After that, the slurry 2 is completed. Alternatively, a filter may be provided after the outlet 50 to remove the plurality of beads 60 from the slurry 2.

[0129] In the electronic component manufacturing apparatus 1 according to the first embodiment of the present invention, when stirring the slurry 2 together with the plurality of beads 60, a pressure change is generated to cause the plurality of beads 60 to flow from the side of the second stirrer 82 having a second stirring force higher than the first stirring force toward the side of the first stirrer 81. Thus, the first region R1 around the first stirrer 81 is set as a low-pressure region compared to the second region R2 around the second stirrer 82. Thereby, the plurality of beads 60 can be gathered in the first region R1, and thus it is easy to separate the plurality of beads 60 from the slurry 2. Further, the plurality of beads 60 can be left in the region where the plurality of stirrers 80 are disposed in the container 10. Therefore, the number of the plurality of beads 60 flowing to the subsequent process after the separator 90 is reduced, and thereby the slurry 2 can be efficiently pulverized in the container 10.

[0130] In the electronic component manufacturing apparatus 1 according to the first embodiment of the present invention, by disposing the first stirrer 81 having a stirring force lower than that of the second stirrer 82 on the outlet 50 side, the plurality of beads 60 can be left in the region where the plurality of stirrers 80 are disposed in the container 10. Thereby, the situation where the plurality of beads 60 reach the outlet 50 can be suppressed, and thus the outflow of the plurality of beads 60 from the container 10 to the subsequent process can be suppressed.

[0131] In the electronic component manufacturing apparatus 1 according to Embodiment 1 of the present invention, the rotational speed of the first stirrer 81 is slower than the rotational speed of the second stirrer 82, so that the first stirrer 81 has a lower stirring force relative to the second stirrer 82. Thus, fine adjustment of the rotational speed control of each stirrer can be performed. Thereby, manufacturing conditions can be easily changed, and the separation conditions of the beads can be easily adjusted. In addition, the first stirrer and the second stirrer can be formed with the same shape of the stirrer, so that the components of the stirrer can be made common.

[0132] (Embodiment 2)

[0133] Hereinafter, the electronic component manufacturing apparatus according to Embodiment 2 of the present invention will be described with reference to the drawings. The structure of the shaft portion and the plurality of stirrers of the electronic component manufacturing apparatus according to Embodiment 2 of the present invention is different from that of the electronic component manufacturing apparatus 1 according to Embodiment 1 of the present invention. Therefore, the same structure as that of the electronic component manufacturing apparatus 1 according to Embodiment 1 of the present invention will not be described repeatedly.

[0134] Figure 6 is a perspective view showing the structure of the electronic component manufacturing apparatus according to Embodiment 2 of the present invention. Figure 7 is a perspective view showing the projected area of the stirring portion caused by the stirring force of the plurality of stirrers.

[0135] As Figure 6 and Figure 7 shown, the electronic component manufacturing apparatus 1A according to Embodiment 2 of the present invention includes a shaft portion 70A and a plurality of stirrers 80A. The shaft portion 70A includes a first shaft portion 71A, a second shaft portion 72A, and a third shaft portion 73A.

[0136] The first stirrer 81A is connected to the first shaft portion 71A. The second stirrer 82A, the third stirrer, and the fourth stirrer are connected to the second shaft portion 72A. The fifth stirrer 85A is connected to the third shaft portion 73A. The first shaft portion 71A, the second shaft portion 72A, and the third shaft portion 73A rotate at the same rotational speed. Therefore, the first stirrer 81A to the fifth stirrer 85A also rotate at the same rotational speed.

[0137] Each of the plurality of stirrers 80A (the first stirrer 81A to the fifth stirrer 85A) has at least one stirring portion extending from the shaft portion 70A in the circumferential direction in the first direction (Z direction).

[0138] The first stirrer 81A has four first stirring portions 181A as the stirring portions. The four first stirring portions 181A are arranged in the circumferential direction in the first direction (Z direction).

[0139] The second stirrer 82A has four second stirring parts 182A as stirring parts. The four second stirring parts 182A are arranged along the circumferential direction of the first direction (Z direction).

[0140] The third stirrer, the fourth stirrer, and the fifth stirrer 85A each have four stirring parts arranged along the circumferential direction of the first direction (Z direction), similar to the first stirrer 81A and the second stirrer 82A. The four stirring parts in the third stirrer, the fourth stirrer, and the fifth stirrer 85A have the same shape as the stirring parts of the second stirrer 82A.

[0141] In a cross-section along the direction in which the stirring parts extend, the thicknesses of each first stirring part 181A and each second stirring part 182A are different. In the present embodiment, the thickness of each first stirring part 181A is, for example, 50% or more and 70% or less relative to the thickness of each second stirring part 182A.

[0142] As Figure 7 shown, since the thicknesses of each first stirring part 181A and each second stirring part 182A are different, in a cross-section along the first direction (Z direction) and the direction in which the stirring parts extend, the sum of the projected areas S1 when observing each first stirring part 181A from the circumferential direction of the shaft part 70A is smaller than the sum of the projected areas S2 when observing each second stirring part 182A from the circumferential direction. If the projected area becomes smaller, the range in which the stirring part stirs the fluid becomes smaller, and thus the stirring force of the first stirrer 81A becomes lower. Accordingly, the first stirrer 81A has a lower stirring force than the second stirrer 82A.

[0143] In the electronic component manufacturing apparatus 1A according to Embodiment 2 of the present invention, by changing the sum of the above-described projected areas, a pressure change is generated that causes the plurality of beads 60 to flow from the side of the second stirrer 82A having a second stirring force higher than the first stirring force toward the side of the first stirrer 81A. Thus, the first region R1 around the first stirrer 81A is set as a low-pressure region compared to the second region R2 around the second stirrer 82A. Accordingly, the plurality of beads 60 can be gathered in the first region R1, and thus it is possible to easily separate the plurality of beads 60 from the slurry 2.

[0144] In the electronic component manufacturing apparatus 1A according to Embodiment 2 of the present invention, the first stirrer 81A and the second stirrer 82A can be simply configured as compared with a structure in which the rotational speeds are changed in the first stirrer and the second stirrer.

[0145] Hereinafter, an electronic component manufacturing apparatus according to Embodiment 3 and Embodiment 4 of the present invention will be described with reference to the accompanying drawings. The structures of the plurality of stirrers of the electronic component manufacturing apparatus according to Embodiment 3 and Embodiment 4 of the present invention are different from those of the electronic component manufacturing apparatus 1A according to Embodiment 2 of the present invention. Therefore, the same structures as those of the electronic component manufacturing apparatus 1A according to Embodiment 2 of the present invention will not be described repeatedly.

[0146] (Embodiment 3)

[0147] Figure 8 FIG. is a perspective view showing the structure of an electronic component manufacturing apparatus according to Embodiment 3 of the present invention.

[0148] As Figure 8 shown, the plurality of stirrers 80B included in the electronic component manufacturing apparatus 1B according to Embodiment 3 of the present invention include a first stirrer 81B and a second stirrer 82B. Since the first shaft portion 71B and the second shaft portion 72B rotate at the same rotational speed, the first stirrer 81B and the second stirrer 82B also rotate at the same rotational speed.

[0149] The first stirrer 81B has four first stirring portions 181B. The second stirrer 82 has four second stirring portions 182B.

[0150] The total length of each first stirring portion 181B in the direction in which the stirring portion extends is shorter than the total length of each second stirring portion 182B. Accordingly, the first stirrer 81B has a lower stirring force than the second stirrer 82B. In the present embodiment, in the direction in which the stirring portion extends, the total length of each first stirring portion 181B is, for example, 80% or less of the total length of each second stirring portion 182B.

[0151] In the electronic component manufacturing apparatus 1B according to Embodiment 3 of the present invention, by changing the total length of each of the above-described stirring portions, a pressure change is generated that causes the plurality of beads 60 to flow from the side of the second stirrer 82B having a second stirring force higher than the first stirring force toward the side of the first stirrer 81B. Accordingly, the first region R1 around the first stirrer 81B is set as a low-pressure region as compared with the second region R2 around the second stirrer 82B. Thereby, the plurality of beads 60 can be aggregated in the first region R1, and thus it is possible to easily separate the plurality of beads 60 from the slurry 2.

[0152] In the electronic component manufacturing apparatus 1B according to Embodiment 3 of the present invention, by changing the total length of each of the above-described stirring portions, the first stirrer 81B and the second stirrer 82B can be simply configured as compared with a structure in which the rotational speed is changed in the first stirrer and the second stirrer.

[0153] (Embodiment 4)

[0154] Figure 9 This is a perspective view showing the structure of an electronic component manufacturing apparatus according to Embodiment 4 of the present invention.

[0155] As Figure 9 shown, the plurality of stirrers 80C included in the electronic component manufacturing apparatus 1C according to Embodiment 4 of the present invention include a first stirrer 81C and a second stirrer 82C. Since the first shaft portion 71C and the second shaft portion 72C rotate at the same rotational speed, the first stirrer 81C and the second stirrer 82C also rotate at the same rotational speed.

[0156] The first stirrer 81C has three first stirring portions 181C. The second stirrer 82C has four second stirring portions 182C.

[0157] Since the number of the first stirring portions 181C included in the first stirrer 81C is smaller than the number of the second stirring portions 182C included in the second stirrer 82C, the first stirrer 81C has a lower stirring force than the second stirrer 82C. The number of each of the first stirring portions 181C and the second stirring portions 182C can be appropriately changed according to the stirring force of the stirrer.

[0158] In the electronic component manufacturing apparatus 1C according to Embodiment 4 of the present invention, by changing the number of the above-described stirring portions, a pressure change is generated that causes the plurality of beads 60 to flow from the side of the second stirrer 82C having a second stirring force higher than the first stirring force toward the side of the first stirrer 81C. Thus, the first region R1 around the first stirrer 81C is set as a low-pressure region compared to the second region R2 around the second stirrer 82C. Thereby, the plurality of beads 60 can be gathered in the first region R1, and thus it becomes easy to separate the plurality of beads 60 from the slurry 2.

[0159] In the electronic component manufacturing apparatus 1C according to Embodiment 4 of the present invention, by changing the number of the stirring portions included in each stirrer, the first stirrer 81C and the second stirrer 82C can be simply configured compared to a structure in which the rotational speed is changed in the first stirrer and the second stirrer.

[0160] In addition, the first stirrer having a lower stirring force than the second stirrer may be provided on the side of the inlet 40. In this case, it is also possible to suppress the plurality of beads 60 from reaching the separator 90 side.

[0161] Furthermore, the rotational directions of the first stirrer and the second stirrer may be opposite to each other. In this case, it becomes easy to stir the slurry 2, and thus while suppressing the plurality of beads 60 from reaching the separator 90 side, the stirring force inside the container 10 can be increased.

[0162] In addition, it is also possible that in the first direction (Z direction) of the container 10, regions with weak stirring force are formed on both the inlet 40 side and the outlet 50 side while sandwiching a region with high stirring force therebetween. Thus, in the first direction (Z direction) of the container 10, a structure is formed in which a high-pressure region is sandwiched between low-pressure regions. In this case, it is possible to further suppress subsequent processes after the plurality of beads 60 reach the separator 90.

[0163] In addition, it is also possible that in the first direction (Z direction) of the container 10, the stirring force is changed to three or more stages, and thus regions with weak stirring force are formed in the order of the inlet 40 side, the intermediate position, and the outlet 50 side. Thus, in the first direction (Z direction) of the container 10, a region that gradually becomes a low pressure from the inlet 40 of the slurry 2 toward the outlet 50 is formed. In this case, it is possible to further suppress subsequent processes after the plurality of beads 60 reach the separator 90.

[0164] [Supplementary Note]

[0165] <1>

[0166] An electronic component manufacturing apparatus includes:

[0167] A cylindrical container having an axis extending in a first direction and capable of accommodating a slurry;

[0168] A shaft portion disposed inside the container, extending in the first direction, and capable of rotating about the first direction as an axis center; and

[0169] A plurality of stirrers each having at least one stirring portion extending in a plane inner direction intersecting the first direction from the shaft portion, and capable of rotating together with the shaft portion to stir the slurry,

[0170] Among the plurality of stirrers, the stirrers are arranged at intervals from one another in the first direction,

[0171] The plurality of stirrers include a first stirrer and a second stirrer adjacent to each other in the first direction,

[0172] The first stirrer has a lower stirring force than the second stirrer.

[0173] <2>

[0174] In the electronic component manufacturing apparatus described in <1>,

[0175] The electronic component manufacturing apparatus further includes:

[0176] An inlet located on the first end side in the first direction of the container, and capable of introducing the slurry into the interior of the container; and

[0177] The discharge port is located on the second end side opposite to the first end in the first direction of the container, and the slurry can be taken out from the inside of the container.

[0178] The first stirrer is located on the discharge port side with respect to the second stirrer in the first direction.

[0179] <3>

[0180] In the electronic component manufacturing apparatus described in <1> or <2>,

[0181] The rotational speed of the first stirrer is slower than that of the second stirrer, whereby the first stirrer has a lower stirring force than the second stirrer.

[0182] <4>

[0183] In the electronic component manufacturing apparatus described in any one of <1> to <3>,

[0184] The first stirrer has a first stirring portion as the stirring portion.

[0185] The second stirrer has a second stirring portion as the stirring portion.

[0186] In a cross-section along the first direction and the direction in which the stirring portion extends, the total projected area of each of the first stirring portions when viewed from the circumferential direction of the shaft portion is smaller than the total projected area of each of the second stirring portions when viewed from the circumferential direction, whereby the first stirrer has a lower stirring force than the second stirrer.

[0187] <5>

[0188] In the electronic component manufacturing apparatus described in <4>,

[0189] The total length of each of the first stirring portions in the direction in which the stirring portion extends is shorter than the total length of each of the second stirring portions, whereby the first stirrer has a lower stirring force than the second stirrer.

[0190] <6>

[0191] In the electronic component manufacturing apparatus described in <4> or <5>,

[0192] The number of the first stirring portions of the first stirrer is smaller than the number of the second stirring portions of the second stirrer, whereby the first stirrer has a lower stirring force than the second stirrer.

[0193] <7>

[0194] In the electronic component manufacturing apparatus according to any one of <1> to <6>,

[0195] The plurality of stirrers are capable of rotating together with the shaft portion so as to stir the slurry together with the plurality of beads.

[0196] In the description of the above embodiments, structures that can be combined may also be combined with each other.

[0197] The embodiments disclosed herein should be considered illustrative in all respects and not restrictive. The scope of the present invention is shown by the claims rather than by the above description, and is intended to include meanings equivalent to the claims and all modifications within the scope.

Claims

1. An electronic component manufacturing device comprising: a cylindrical container having an axis extending in a first direction and capable of containing the slurry; an axis portion disposed inside the container, extending along the first direction and rotatable about the first direction as an axis center; and A plurality of stirrers each having at least one stirring portion extending from the shaft portion in an in-plane direction intersecting the first direction and capable of rotating together with the shaft portion to stir the slurry. The plurality of stirrers are arranged one by one in the first direction at intervals from each other. The plurality of agitators include a first agitator and a second agitator adjacent to each other in the first direction. The first stirrer has a stirring force lower than that of the second stirrer.

2. The electronic component manufacturing apparatus according to claim 1, wherein The electronic component manufacturing apparatus further comprises: an inlet located on the first end side of the container in the first direction, capable of injecting the slurry into the interior of the container; as well as The outlet is located on the second end side of the container on the opposite side to the first end in the first direction, and is capable of taking out the slurry from the interior of the container. The first agitator is located closer to the outlet side than the second agitator in the first direction.

3. The electronic component manufacturing apparatus according to claim 1 or 2, wherein: The rotation speed of the first stirrer is slower than the rotation speed of the second stirrer, and thus the first stirrer has a lower stirring force than the second stirrer.

4. The electronic component manufacturing apparatus according to any one of claims 1 to 3, wherein The first stirrer has a first stirring portion as the stirring portion, The second stirrer has a second stirring portion as the stirring portion, In the cross-section along the first direction and the direction in which the stirring portion extends, the total projected area of each of the first stirring portions when observed from the circumferential direction of the shaft portion is smaller than the total projected area of each of the second stirring portions when observed from the circumferential direction, thereby the first stirrer has a lower stirring force than the second stirrer.

5. The electronic component manufacturing apparatus according to claim 4, wherein The total length of the first stirring parts in the direction in which the stirring parts extend is shorter than the total length of the second stirring parts. Therefore, the first stirrer has a lower stirring force than the second stirrer.

6. The electronic component manufacturing apparatus according to claim 4 or 5, wherein: The number of the first stirring parts included in the first stirrer is smaller than the number of the second stirring parts included in the second stirrer. Therefore, the first stirrer has a lower stirring force than the second stirrer.

7. The electronic component manufacturing apparatus according to any one of claims 1 to 6, wherein The plurality of agitators are rotatable together with the shaft portion so as to agitate the slurry together with the plurality of beads.

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