Deep hole machining device

By setting up a deep hole processing device in which the liquid outlet tank and the through hole are connected to the drill bit, cutting fluid is sprayed and recycled, the chip removal difficulties and poor cooling effect in the deep hole processing of semiconductor materials are solved, and more efficient processing is achieved and drill bit wear is slowed down.

CN120422367APending Publication Date: 2025-08-05浙江盾源聚芯半导体科技有限公司
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Patent Information

Application Number
CN202510342888.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-03-21
Publication Date
2025-08-05

AI Technical Summary

Technical Problem

In the prior art, when deep hole processing of semiconductor materials, chip removal is difficult, cooling effect is poor, and tool is prone to wear.

Method used

A deep hole processing device is designed, and the drill bit is equipped with a liquid outlet slot and communicated with the through hole for spraying cutting fluid. Combined with a clamping component and a cutting fluid recovery system, the effective injection and recovery of cutting fluid is achieved.

Benefits of technology

It improves chip removal efficiency and cooling effect of deep hole processing, slows down the wear of drill bits, and improves processing quality and efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of deep hole machining, and discloses a deep hole machining device which is used for machining a to-be-machined part to form a deep hole located in the to-be-machined part. The clamping assembly is arranged on the frame body, and the clamping assembly is used for clamping the part to be machined; the device comprises a to-be-machined part, a cutter feeding assembly and a drill bit, the cutter feeding assembly is used for clamping the drill bit, the cutter feeding assembly is used for driving the drill bit to be close to or away from the to-be-machined part, a first through hole is formed in the drill bit in a penetrating mode in the first direction, and a liquid outlet groove is formed in the side, close to the to-be-machined part, of the drill bit in the radial direction. And the liquid outlet groove is communicated with the first through hole. The invention provides a deep hole machining device capable of spraying cutting fluid into a hole.
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Description

Technical Field

[0001] The present application relates to the field of deep hole processing, and in particular to a deep hole processing device. Background Art

[0002] Semiconductor materials are widely used in high-tech fields such as electronics, communications, and computers, and their manufacturing and processing are at the core of modern technology. Deep hole drilling is a critical technology in the manufacturing of semiconductor materials like silicon, directly impacting the performance and quality of semiconductor devices. However, semiconductor materials like silicon are also known to be hard and brittle. Consequently, using existing drill bits to drill deep holes in semiconductor materials can lead to difficulties with chip removal, poor cooling, and increased tool wear. Summary of the Invention

[0003] This application mainly solves the technical problems existing in the prior art of deep hole machining of semiconductor materials, such as difficulty in chip removal, poor cooling effect and easy wear of the tool. It provides a deep hole machining device capable of spraying cutting fluid into the hole.

[0004] In order to solve the above technical problems, the present application provides a deep hole processing device, which is used to process a part to be processed to form a deep hole located in the part to be processed. It is characterized in that the deep hole processing device includes: frame; A clamping assembly, the clamping assembly being arranged on the frame and being used to clamp the part to be processed; A feed assembly and a drill bit, wherein the feed assembly is used to clamp the drill bit, and the feed assembly is used to drive the drill bit to approach or move away from the part to be processed. The drill bit is provided with a first through hole along a first direction, and a liquid outlet groove is radially provided on the side of the drill bit close to the part to be processed, and the liquid outlet groove is connected to the first through hole.

[0005] In one embodiment, the drill bit comprises: A connecting portion and a drilling portion, wherein the connecting portion and the drilling portion are sequentially arranged along the first direction, the connecting portion is connected to the drilling portion, the clamping position between the feed assembly and the drill bit is located on the connecting portion, and the radial dimension of the connecting portion is smaller than the radial dimension of the drilling portion to form a liquid-permeable gap between the connecting portion and the drilling portion.

[0006] In one embodiment, chip removal grooves are circumferentially arranged on the outer surface of the drilling portion, and the chip removal grooves are respectively communicated with the liquid outlet groove and the liquid permeable gap.

[0007] In one embodiment, a clamping position is provided on the frame, and two connecting frames are provided on the clamping position at intervals along the first direction, and both ends of the clamping assembly are connected to the frame through the connecting frames.

[0008] In one embodiment, the clamping assembly includes: a first clamping cylinder, the first clamping cylinder being divided into an upper cylinder and a lower cylinder along the first direction, the upper cylinder having a first accommodating cavity along the first direction, the upper cylinder being provided with a first opening on a downward side thereof, the first opening being communicated with the first accommodating cavity, the lower cylinder having a second accommodating cavity along the first direction, the lower cylinder being provided with a second opening on an upward side thereof, the second opening being communicated with the second accommodating cavity, the upper cylinder being fixedly connected to the lower cylinder via a first connecting member; A first clamping block, wherein the first clamping block has a clamping cavity along the first direction, the part to be processed is arranged in the clamping cavity along the first direction to form the clamping assembly for the part to be processed, the first clamping block is divided into an upper clamping block and a lower clamping block along the first direction, and the clamping cavity is divided into a first clamping cavity and a second clamping cavity along the first direction, the upper clamping block has a first clamping cavity, the lower clamping block has a second clamping cavity, the upper clamping block is located in the first accommodating cavity, and the lower clamping block is located in the second accommodating cavity.

[0009] In one embodiment, the clamping assembly further includes: a first positioning member, the first positioning member being located between the lower clamping block and the lower cylinder to maintain a relative position between the lower clamping block and the lower cylinder; A second positioning member is located between the upper tube and the lower tube to maintain the relative position between the upper tube and the lower tube.

[0010] In one embodiment, the deep hole processing device further includes: A cutting fluid recovery box is located between the clamping assembly and the feed assembly. The cutting fluid recovery box has a recovery cavity therein, and the recovery cavity is used to store cutting fluid.

[0011] In one embodiment, the deep hole processing device further includes: An intermediate block, a third through hole is provided along the first direction through the first clamping cylinder near the cutting fluid recovery tank side, the third through hole is connected to the cutting fluid recovery cavity, the intermediate block is provided in the third through hole, a second through hole is provided along the first direction through the intermediate block, the second through hole is connected to the third through hole, the part to be processed is abutted against the intermediate block, and the deep hole in the part to be processed is connected to the second through hole.

[0012] In one embodiment, the deep hole processing device further includes: The guide part is arranged along the first direction on the side of the cutting fluid recovery box close to the feed assembly, a first guide hole is arranged in the guide part along the first direction, a guide sleeve is arranged in the first guide hole along the first direction, and the guide sleeve and the drill bit are clearance-fitted.

[0013] In one embodiment, the deep hole processing device further includes: A protective cover is arranged between the cutting fluid recovery box and the feed assembly along the first direction, the protective cover is arranged outside the guide rail of the feed assembly, the protective cover is a foldable structure, and the protective cover and the feed assembly can move synchronously.

[0014] Compared with the prior art, the drill bit of the present application can add cutting fluid to the working surface between the drill bit and the part to be processed through the first through hole. The cutting fluid flows from the liquid outlet groove to the working surface between the drill bit and the part to be processed, so as to enhance chip removal during deep hole processing and cool the drill bit, further slowing down the wear of the drill bit.

[0015] Therefore, the present invention has the characteristics of reasonable structure and convenient use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Attachment Figure 1 This is a structural diagram of the deep hole processing device of the present application; Attachment Figure 2 This is a cross-sectional view of the deep hole processing device of the present application; Attachment Figure 3 This application is attached Figure 2 A partial enlarged view of point A in the middle; Attachment Figure 4 This application is attached Figure 2 A partial enlarged view of point B in the middle; Attachment Figure 5 It is a structural schematic diagram of the clamping assembly of the present application; Attachment Figure 6 It is a structural schematic diagram of the drill bit of this application.

[0017] Description of the numbers in the figure: X, first direction; Y, second direction; 10. Deep hole processing device; 20. Parts to be processed; 21. Deep hole; 100, frame; 110, clamping position; 120, cutting fluid position; 130, feed position; 200, clamping assembly; 210, first clamping cylinder; 211, upper cylinder; 212, lower cylinder; 213, first accommodating cavity; 214, second accommodating cavity; 215, third through hole; 220, first clamping block; 221, clamping cavity; 221-1, first clamping cavity; 221-2, second clamping cavity; 222, upper clamping block; 223, lower clamping block; 230, first positioning member; 231, first positioning structure; 232, second positioning structure; 240, second positioning member; 241, third positioning structure; 242, fourth positioning structure; 250, first connecting member; 300, feed assembly; 310, guide rail; 400, drill bit; 410, first through hole; 420, liquid outlet groove; 430, connecting portion; 440, drilling portion; 450, liquid permeable gap; 460, chip removal groove; 500, connecting frame; 600, cutting fluid recovery box; 610, recovery chamber; 700, middle block; 710, second through hole; 800, guide portion; 810, first guide hole; 820, guide sleeve; 900. Protective cover. DETAILED DESCRIPTION

[0018] In order to make the purpose, features, and advantages of this application more obvious and easy to understand, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of this application.

[0019] The existing technology has technical problems in deep hole machining of semiconductor materials, such as difficulty in chip removal, poor cooling effect and easy wear of the tool.

[0020] To this end, the present application provides a deep hole processing device, which is used to process a part to be processed to form a deep hole located in the part to be processed, and is characterized in that the deep hole processing device includes: frame; A clamping assembly, the clamping assembly being arranged on the frame and being used to clamp the part to be processed; A feed assembly and a drill bit, wherein the feed assembly is used to clamp the drill bit, and the feed assembly is used to drive the drill bit to approach or move away from the part to be processed. The drill bit is provided with a first through hole along a first direction, and a liquid outlet groove is radially provided on the side of the drill bit close to the part to be processed, and the liquid outlet groove is connected to the first through hole.

[0021] Example 1: Please refer to the attached Figure 1 To the attached Figure 6 As shown, a specific embodiment of the deep hole processing device 10 of the present application is shown. The deep hole processing device 10 of the present application is used to process deep holes 21 on the parts 20 to be processed. In the present application, deep hole parts refer to parts with a deep hole 21 having a diameter less than 10mm and a length greater than 1000mm. Such parts are used in the semiconductor field and are usually made of semiconductor materials. Such parts also have problems of high hardness and brittleness. The above-mentioned deep hole parts are only one of the specific use scenarios of the deep hole processing device 10 of the present application. Other parts with deep holes are also suitable for processing by the deep hole processing device 10 of the present application. In one embodiment, the semiconductor material is silicon.

[0022] Please refer to the attached Figure 1 To the attached Figure 6 As shown, the first direction X of the present application refers to the length direction of the deep hole processing device 10, that is, the direction from left to right of the deep hole processing device 10 or the direction from right to left of the deep hole processing device 10. In the present application, the clamping assembly 200 is arranged to the left of the feed assembly 300, and the feed assembly 300 is arranged to the right of the holding assembly 200. The second direction Y of the present application refers to the height direction of the deep hole processing device 10, that is, the direction from top to bottom of the deep hole processing device 10 or the direction from bottom to top of the deep hole processing device 10. In the present application, the upper cylinder 211 is arranged above the lower cylinder 212, and the lower cylinder 212 is arranged below the upper cylinder 211.

[0023] Attachment Figure 1 1 is a structural diagram of the deep hole processing device 10 of the present application. Figure 2 This is a cross-sectional view of the deep hole processing device 10 of the present application. Figure 1 and attached Figure 2 As shown, the deep hole machining device 10 of the present application is used to machine a deep hole 21 in a part 20 to be machined. The deep hole 21 can be either a blind hole or a through hole in the part 20 to be machined. After machining by the deep hole machining device 10 of the present application, the deep hole 21 is arranged in the part 20 to be machined along a first direction X. In one embodiment, the part 20 to be machined is made of silicon, which is a semiconductor material with high hardness and brittleness.

[0024] Please refer to the attached Figure 1 and attached Figure 2 As shown, the deep hole processing device 10 of the present application includes a frame 100. The frame 100 of the present application is used to support other components in the deep hole processing device 10 except the frame 100. Other components in the deep hole processing device 10 except the frame 100 are all installed on the frame 100.

[0025] Furthermore, the frame 100 is sequentially arranged with a clamping position 110 , a cutting fluid position 120 , and a feed position 130 along the first direction X. The cutting fluid position 120 is located between the clamping position 110 and the feed position 130 .

[0026] Please refer to the attached Figure 1 and attached Figure 2 As shown, the deep hole processing device 10 of the present application also includes a clamping assembly 200 and a connecting frame 500. The clamping assembly 200 is arranged at the clamping position 110 of the frame 100. The clamping assembly 200 is used to clamp the part to be processed 20. Under the clamping of the clamping assembly 200, the part to be processed 20 is stationary relative to the frame 100. In the present application, the connecting frame 500 is used to install the clamping assembly 200 and maintain the stability of the relative position of the clamping assembly 200 on the frame 100. Furthermore, two connecting frames 500 are arranged at intervals along the first direction X at the clamping position 110, and the two ends of the clamping assembly 200 are connected to the frame 100 through the connecting frames 500.

[0027] In one embodiment, a through hole is formed in the connecting frame 500 along the first direction X. The through holes of the two connecting frames 500 are coaxially arranged on the frame body 100, and the two ends of the clamping assembly 200 are respectively located in the through holes of the two connecting frames 500. The connecting frame 500 is fixedly connected to the clamping assembly 200 by bolt locking.

[0028] Please refer to the attached Figure 1 and attached Figure 2 As shown, the deep hole machining device 10 of the present application also includes a feed assembly 300 and a drill bit 400. The feed assembly 300 is used to clamp the drill bit 400, and the feed assembly 300 is used to drive the drill bit 400 toward or away from the part 20 to be machined and drive the drill bit 400 to rotate. The feed assembly 300 is mounted on the feed position 130 of the frame 100. A guide rail 310 is provided on the feed position 130 of the frame 100 along the first direction X, and the feed assembly 300 is slidably connected to the guide rail 310. Furthermore, the feed assembly 300 includes a feed frame and a rotating frame. The feed frame is connected to the rotating frame, and the rotating frame is used to clamp the drill bit 400 and drive the drill bit 400 to rotate. The feed frame is slidably connected to the frame 100 via the guide rail 310, and drives the rotating frame to move along the first direction X to drive the drill bit 400 toward or away from the part 20 to be machined.

[0029] Please refer to the attached Figure 1 and attached Figure 2As shown, the deep hole processing device 10 of the present application also includes a cutting fluid recovery box 600, which is arranged on the cutting fluid position 120 of the frame 100. The cutting fluid recovery box 600 is located between the clamping assembly 200 and the feed assembly 300. The cutting fluid recovery box 600 has a recovery cavity 610, which is used to store the used cutting fluid. The cutting fluid flows back to the cutting fluid recovery box 600 after cooling the workpiece 20 to be processed. The specific recovery process of the cutting fluid will be described in the attached Figure 4 Further explanation in.

[0030] Please refer to the attached Figure 1 and attached Figure 2 As shown, the deep hole processing device 10 of the present application also includes a protective cover 900, which is arranged between the cutting fluid recovery box 600 and the feed assembly 300 along the first direction X. The protective cover 900 is arranged outside the guide rail 310 of the feed assembly 300 to prevent impurities formed by dust or chips from falling on the guide rail 310 and further affecting the normal use of the guide rail 310. Furthermore, the protective cover 900 has a folding structure and can move synchronously with the feed assembly 300. That is, when the feed assembly 300 moves toward the part to be processed 20, the protective cover 900 is synchronously folded. When the feed assembly 300 moves away from the part to be processed 20, the protective cover 900 extends along the first direction X.

[0031] Attachment Figure 3 This application is attached Figure 2 A partial enlarged view of point A in the figure. Please refer to the attached Figure 3 As shown, the specific structure of the guide part 800 of the present application is shown. In the present application, since the drill bit 400 is also a slender structure, in order to ensure the coaxiality of the deep hole 21 in the part 20 to be processed, it is necessary to further set a guide part 800 to ensure the strength of the drill bit 400 while keeping the drill bit 400 extending in a predetermined direction. The guide part 800 of the present application is arranged on the side of the cutting fluid recovery box 600 close to the feed assembly 300 along the first direction X, so as to avoid interference between the guide part 800 and the clamping assembly 200. A first guide hole 810 is provided in the guide part 800 along the first direction X, and a guide sleeve 820 is provided in the guide hole along the first direction X. The guide sleeve 820 and the drill bit 400 are clearance-fitted. The drill bit 400 passes through the guide sleeve 820 and enters the cutting fluid recovery box 600.

[0032] In one embodiment, the guide sleeve 820 is made of a bearing or a bushing.

[0033] Attachment Figure 4 This application is attached Figure 2 A partial enlarged view of point B in the figure. Please refer to the attached Figure 4As shown, a schematic diagram of the specific structure of the intermediate block 700 of the present application is shown. The intermediate block 700 of the present application is provided to discharge the cutting fluid in the workpiece 20 to be processed to the cutting fluid recovery tank 600. The first clamping cylinder 210 of the present application is provided corresponding to the cutting fluid recovery tank 600. A third through hole 215 is provided on the side of the first clamping cylinder 210 close to the cutting fluid recovery tank 600. At the same time, a through hole is also provided on the side of the cutting fluid recovery tank 600 close to the first clamping cylinder 210. The through hole on the cutting fluid recovery tank 600 is connected to the cutting fluid recovery cavity 610. The first clamping cylinder 210 is connected to the through hole on the cutting fluid recovery tank 600 through the third through hole 215, so as to further realize the connection between the third through hole 215 and the cutting fluid recovery cavity 610. The intermediate block 700 is provided in the third through hole 215. A second through hole 710 is provided in the intermediate block 700 along the first direction X. The second through hole 710 is connected to the third through hole 215. During specific use, the part to be processed 20 is offset against the intermediate block 700. When the drill bit 400 forms a deep hole 21 in the part to be processed 20, the used cutting fluid in the deep hole 21 enters the intermediate block 700 through the second through hole 710, and further enters the cutting fluid recovery cavity 610 to realize the recovery of the cutting fluid.

[0034] Attachment Figure 5 This is a structural diagram of the clamping assembly 200 of the present application. Figure 5 As shown, the part 20 to be processed in the present application is a slender shaft-like part, so a specially designed clamping assembly 200 needs to be designed to clamp the part 20 to be processed.

[0035] Please refer to the attached Figure 5As shown, the clamping assembly 200 of the present application includes a first clamping cylinder 210 and a first clamping block 220. The first clamping block 220 is located in the first clamping cylinder 210. The first clamping cylinder 210 clamps the workpiece 20 to be processed, and the first clamping block 220 positions the workpiece 20 to be processed. The first clamping cylinder 210 is divided into an upper cylinder 211 and a lower cylinder 212 along a first direction X. The upper cylinder 211 and the lower cylinder 212 are arranged in sequence along a second direction Y. The dividing surface between the upper cylinder 211 and the lower cylinder 212 is a plane. The cross-sections of the upper cylinder 211 and the lower cylinder 212 are both fan-shaped, and the central angle of the cross-sections of the upper cylinder 211 and the lower cylinder 212 is 180°. The upper tube 211 has a first accommodating cavity 213 along the first direction X. The upper tube 211 has a first opening on its downward side, which communicates with the first accommodating cavity 213. The lower tube 212 has a second accommodating cavity 214 along the first direction X. The lower tube 212 has a second opening on its upward side, which communicates with the second accommodating cavity 214. In the present application, the upper tube 211 is connected to the lower tube 212 via a first connecting member 250. The first connecting member 250 includes a bolt and a screw hole. The screw hole is provided on one side of the second opening of the lower tube 212. The bolt passes through the upper tube 211 and connects with the screw hole on the upper tube 211 to securely connect the upper tube 211 and the lower tube 212.

[0036] Please refer to the attached Figure 5As shown, the first clamping block 220 has a clamping cavity 221 along the first direction X, and the workpiece 20 to be processed is arranged in the clamping cavity 221 along the first direction X, so as to form the first clamping block 220 to position the workpiece 20 to be processed, and further form the clamping assembly 200 to clamp the workpiece 20 to be processed. In this application, the first clamping block 220 is divided into an upper clamping block 222 and a lower clamping block 223 along the first direction X, and the clamping cavity 221 is divided into a first clamping cavity 221-1 and a second clamping cavity 221-2 along the first direction. The upper clamping block 222 has a first clamping cavity 221-1, and the lower clamping block 223 has a second clamping cavity 221-2. The upper clamping block 222 enters the first container of the upper cylinder 211 through the first opening. In the receiving cavity 213, the lower clamping block 223 enters the second receiving cavity 214 of the lower cylinder 212 through the second opening. The lower surface of the upper clamping block 222 protrudes from the lower surface of the first receiving cavity 213 of the upper cylinder 211, and the upper surface of the lower clamping block 223 protrudes from the upper surface of the second receiving cavity 214 of the lower cylinder 212. When the part 20 to be processed is installed in the lower clamping block 223, the part 20 to be processed protrudes from the upper surface of the lower clamping block 223. During installation, the part 20 to be processed is first arranged in the second clamping cavity 221-2 along the first direction X, and then the upper cylinder 211 with the upper clamping block 222 is placed on the lower cylinder 212. At this time, the part 20 to be processed is respectively against the upper clamping block 222 and the lower clamping block 223. Then, the upper cylinder 211 and the lower cylinder 212 are fixed to form a clamp for the part 20 to be processed.

[0037] In one embodiment, the cross-sections of the first clamping cavity 221 - 1 and the second clamping cavity 221 - 2 are both V-shaped structures.

[0038] Please refer to the attached Figure 5 As shown, a first positioning member 230 is provided between the lower clamping block 223 and the lower barrel 212 to maintain the relative position between the lower clamping block 223 and the lower barrel 212. The first positioning member 230 includes a first positioning structure 231 and a second positioning structure 232. The first positioning structure 231 is a stop block provided within the lower barrel 212, which is spaced axially within the lower barrel 212. The second positioning structure 232 is a positioning groove provided on the lower clamping block 223, which is spaced axially within the lower barrel 212. When the lower clamping block 223 is installed within the second accommodating cavity 214 of the lower barrel 212, the first positioning structure 231 and the second positioning structure 232 abut against each other to limit the axial position of the lower clamping block 223.

[0039] Please refer to the attached Figure 5As shown, a second positioning member 240 is provided between the upper tube 211 and the lower tube 212 to maintain the relative position between the upper tube 211 and the lower tube 212. The second positioning member 240 includes a third positioning structure 241 and a fourth positioning structure 242. The third positioning structure 241 is a positioning post provided on the lower tube 212, which is spaced apart along the axial direction. The fourth positioning structure 242 is a positioning groove provided on the upper tube 211, which is spaced apart along the axial direction. Before installation, the upper tube 211 and the lower tube 212 are first positioned using the second positioning member 240, and the connection position of the first connecting member 250 is determined to facilitate the connection of the first connecting member 250 to the upper tube 211 and the lower tube 212.

[0040] Attachment Figure 6 This is a structural diagram of the drill bit 400 of this application. Figure 6 As shown, the drill bit 400 of the present application is provided with a first through-hole 410 extending along a first direction X. The first through-hole 410 is intended to direct cutting fluid to the active surface between the drill bit 400 and the workpiece 20 to be machined. The active surface between the drill bit 400 and the workpiece 20 to be machined refers to the contact surface between one end of the drill bit 400 along the first direction and the workpiece 20 to be machined during drilling. The drill bit 400 includes a connecting portion 430 and a drilling portion 440 sequentially arranged along the first direction X. The clamping position 110 between the feed assembly 300 and the drill bit 400 is located on the connecting portion 430, and the drilling portion 440 completes the machining of the deep hole 21 within the workpiece 20 by drilling the workpiece 20. In the present application, both the connecting portion 430 and the drilling portion 440 have circular cross-sections. The radial dimension of the connecting portion 430 is smaller than that of the drilling portion 440, thereby forming a liquid-permeable gap 450 between the connecting portion 430 and the drilling portion 440. Furthermore, the liquid-permeable gap 450 refers to the gap between the outer surface of the connecting portion 430 and the sidewall of the deep hole 21 in the workpiece 20 to be machined. A liquid outlet groove 420 is radially disposed on the side of the drill bit 400 of the present application proximate to the workpiece 20. The liquid outlet groove 420 communicates with the first through-hole 410. An end surface is disposed on the side of the drilling portion 440 away from the connecting portion 430, intersecting the liquid outlet groove 420 and the end surface. Chip removal grooves 460 are circumferentially arranged on the outer surface of the drilling portion 440. The chip removal grooves 460 communicate with the liquid outlet groove 420 and the liquid-permeable gap 450, respectively. The chip removal grooves 460 are spirally arranged circumferentially on the outer surface of the drilling portion 440.

[0041] During specific operation, the cutting fluid flows through the first through hole 410 and the liquid outlet groove 420 to the working surface between the drill bit 400 and the part to be processed 20. After the processing is completed, the cutting fluid is mixed and drilled and flows to the chip groove 460, and then flows from the chip groove 460 to the liquid permeable gap 450, until it flows to the cutting fluid recovery box 600, finally completing the recovery of the cutting fluid.

[0042] In the description of this specification, the reference terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" mean that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. Moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification, as well as features of different embodiments or examples, unless they are mutually inconsistent.

[0043] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0044] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A deep hole processing device, which is used to process a part to be processed to form a deep hole in the part to be processed, characterized in that: The deep hole processing device comprises: frame; A clamping assembly, the clamping assembly being arranged on the frame and being used to clamp the part to be processed; A feed assembly and a drill bit, wherein the feed assembly is used to clamp the drill bit, and the feed assembly is used to drive the drill bit to approach or move away from the part to be processed. The drill bit is provided with a first through hole along a first direction, and a liquid outlet groove is radially provided on the side of the drill bit close to the part to be processed, and the liquid outlet groove is connected to the first through hole.

2. The deep hole machining device according to claim 1, characterized in that: The drill bit comprises, A connecting portion and a drilling portion, wherein the connecting portion and the drilling portion are sequentially arranged along the first direction, the connecting portion is connected to the drilling portion, the clamping position between the feed assembly and the drill bit is located on the connecting portion, and the radial dimension of the connecting portion is smaller than the radial dimension of the drilling portion to form a liquid-permeable gap between the connecting portion and the drilling portion.

3. The deep hole machining device according to claim 2, characterized in that: A chip removal groove is circumferentially arranged on the outer surface of the drilling portion, and the chip removal groove is communicated with the liquid outlet groove and the liquid permeable gap respectively.

4. The deep hole machining device according to claim 1, characterized in that: The frame body is provided with a clamping position, and two connecting frames are spaced apart along the first direction on the clamping position, and two ends of the clamping assembly are connected to the frame body through the connecting frames.

5. The deep hole machining device according to claim 4, characterized in that: The clamping assembly comprises, a first clamping cylinder, the first clamping cylinder being divided into an upper cylinder and a lower cylinder along the first direction, the upper cylinder having a first accommodating cavity along the first direction, the upper cylinder being provided with a first opening on a downward side thereof, the first opening being communicated with the first accommodating cavity, the lower cylinder having a second accommodating cavity along the first direction, the lower cylinder being provided with a second opening on an upward side thereof, the second opening being communicated with the second accommodating cavity, the upper cylinder being fixedly connected to the lower cylinder via a first connecting member; A first clamping block, wherein the first clamping block has a clamping cavity along the first direction, the part to be processed is arranged in the clamping cavity along the first direction to form the clamping assembly for the part to be processed, the first clamping block is divided into an upper clamping block and a lower clamping block along the first direction, and the clamping cavity is divided into a first clamping cavity and a second clamping cavity along the first direction, the upper clamping block has a first clamping cavity, the lower clamping block has a second clamping cavity, the upper clamping block is located in the first accommodating cavity, and the lower clamping block is located in the second accommodating cavity.

6. The deep hole machining device according to claim 5, characterized in that: The clamping assembly further includes, a first positioning member, the first positioning member being located between the lower clamping block and the lower cylinder to maintain a relative position between the lower clamping block and the lower cylinder; A second positioning member is located between the upper tube and the lower tube to maintain the relative position between the upper tube and the lower tube.

7. The deep hole machining device according to claim 5, characterized in that: The deep hole processing device further includes: A cutting fluid recovery box is located between the clamping assembly and the feed assembly. The cutting fluid recovery box has a recovery cavity therein, and the recovery cavity is used to store cutting fluid.

8. The deep hole machining device according to claim 7, characterized in that: The deep hole processing device further includes: An intermediate block, a third through hole is provided along the first direction through the first clamping cylinder near the cutting fluid recovery tank side, the third through hole is connected to the cutting fluid recovery cavity, the intermediate block is provided in the third through hole, a second through hole is provided along the first direction through the intermediate block, the second through hole is connected to the third through hole, the part to be processed is abutted against the intermediate block, and the deep hole in the part to be processed is connected to the second through hole.

9. The deep hole machining device according to claim 7, characterized in that: The deep hole processing device further includes: The guide part is arranged along the first direction on the side of the cutting fluid recovery box close to the feed assembly, a first guide hole is arranged in the guide part along the first direction, a guide sleeve is arranged in the first guide hole along the first direction, and the guide sleeve and the drill bit are clearance-fitted.

10. The deep hole machining device according to claim 7, characterized in that: The deep hole processing device further includes: A protective cover is arranged between the cutting fluid recovery box and the feed assembly along the first direction, the protective cover is arranged outside the guide rail of the feed assembly, the protective cover is a foldable structure, and the protective cover and the feed assembly can move synchronously.