Electrostatic detection probe

Abstract

The invention relates to the technical field related to electrostatic detection, in particular to an electrostatic detection probe. According to the static detection probe, a shell comprises a first shell section and a second shell section, the second shell section is a metal piece, the first shell section is made of an anti-static material, the first shell section is provided with a static detection window, an induction piece is located in the static detection window, and a gap is formed between the induction piece and the inner side wall of the static detection window so as to allow the induction piece to vibrate; the circuit module is arranged on the mounting plate and used for controlling the vibration piece to vibrate so as to drive the vibration arm to vibrate and receive the voltage signal sensed by the sensing piece. The shell part where the electrostatic detection window of the electrostatic detection probe is located is made of the anti-electrostatic material, compared with a metal material, the detection window has smaller influence on an electric field, charges are not prone to being conducted to the ground along the metal material, the quantity of the charges can be kept stable, especially in a scene with few charges, the electric field is stable, and the detection efficiency is improved. And the detection accuracy is high.

Description

Technical Field

[0001] The present invention relates to the technical field related to electrostatic detection, and in particular to an electrostatic detection probe. Background Art

[0002] Electrostatic sensors and / or electrostatic detection meters are special, precise instruments for monitoring static electricity on the surface of objects, and play a very important role in static electricity measurement and protection.

[0003] On electronics factory production lines, static electricity monitoring is crucial for protecting products from the hazards of electrostatic discharge and ensuring product quality. This is particularly true in the semiconductor field, where miniaturization and sophistication are driving increasingly stringent requirements for static electricity detection, requiring extremely low levels of static electricity. This requires equipment capable of detecting even this low level of static electricity.

[0004] The electrostatic detection probes in the prior art have low detection resolution and poor application scenarios, making it difficult to meet the needs of small electrostatic detection. Summary of the Invention

[0005] An object of the present invention is to provide a static electricity detection probe to improve the resolution of static electricity detection.

[0006] In order to solve the above technical problems, the present invention provides an electrostatic detection probe.

[0007] The static electricity detection probe of the present invention comprises a housing and a mounting plate, a circuit module, a vibration arm, a vibration element and a sensing element arranged in the housing;

[0008] The mounting plate is fixed in the housing;

[0009] The vibration arm is fixedly connected to the mounting plate, and the vibration arm comprises a first arm and a second arm which are spaced apart and have the same natural frequency, and there are two vibration members which are respectively arranged on the first arm and the second arm;

[0010] The induction element is provided on the first arm and is used for inducing static electricity;

[0011] The housing includes a first housing section and a second housing section, the second housing section is a metal member, the first housing section is made of an antistatic material, the first housing section is provided with an electrostatic detection window, the induction member is located in the electrostatic detection window and has a gap with the inner side wall of the electrostatic detection window to allow the induction member to vibrate;

[0012] The circuit module is arranged on the mounting plate, and is used for controlling the vibration of the vibrating member to drive the vibration arm to vibrate and receive the voltage signal sensed by the induction member.

[0013] Furthermore, the length of the first arm is greater than that of the second arm, and an adjustment member is provided on the second arm to make the natural frequencies of the second arm and the first arm the same.

[0014] Furthermore, the first arm has a mounting section for mounting the induction component, and the mounting section is parallel to the electrostatic detection window.

[0015] Furthermore, the first housing section is columnar, the electrostatic detection window is arranged on a side surface of the first housing section, and the mounting section is parallel to the second arm.

[0016] Further, the side surface of the first housing segment has an arcuate surface, and the electrostatic detection window is arranged on the arcuate surface; or the side surface of the first housing segment has a plane, and the electrostatic detection window is arranged on the plane.

[0017] Furthermore, the first housing section is columnar, the electrostatic detection window is arranged at an end surface of the first housing section, and the mounting section is perpendicular to the second arm.

[0018] Furthermore, an inclined surface is provided at the end of the first housing segment, the mounting segment is parallel to the inclined surface, and the electrostatic detection window is provided on the inclined surface.

[0019] Furthermore, the thickness of the first arm and the second arm is 0.4-1.2 mm.

[0020] Furthermore, a fixing member is provided in the second shell segment to fix the mounting plate.

[0021] Furthermore, the detection window and the sensing element are both circular.

[0022] Compared with the prior art, the present invention has at least the following beneficial effects:

[0023] The shell part where the electrostatic detection window of the electrostatic detection probe of the present application is located is made of anti-static material. Compared with metal materials, the detection window of the present application has less impact on the electric field, making it difficult for the charge to be conducted to the ground along the metal material, making it difficult for the charge to decrease and the charge amount to remain stable. Especially in scenarios with less charge, it is not easy to change the weak electric field itself, making the electric field relatively stable and the detection accuracy higher.

[0024] Furthermore, by arranging the electrostatic detection window at different positions of the housing, the use requirements of various spaces can be met.

[0025] Furthermore, when an inclined surface is provided on the first housing segment and the electrostatic detection window is provided on the inclined surface, it is possible to conveniently arrange a larger electrostatic detection window and a sensing element, thereby better sensing a smaller external electric field.

[0026] Furthermore, by configuring the electrostatic detection window and the induction element to be circular, the influence of the shapes of the induction element and the electrostatic detection window on the detection accuracy can be reduced, thereby improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 Schematic diagram of the structure of the first embodiment of the electrostatic detection probe of the present invention;

[0028] Figure 2 for Figure 1 A schematic diagram showing the internal structure of the electrostatic detection probe;

[0029] Figure 3 for Figure 1 A schematic diagram of the structure of the electrostatic detection probe with the shell hidden;

[0030] Figure 4 for Figure 1 A schematic diagram of the structure of the electrostatic detection probe showing the internal outline from another perspective;

[0031] Figure 5 Schematic diagram of the structure of the second embodiment of the electrostatic detection probe of the present invention;

[0032] Figure 6 for Figure 5 A schematic structural diagram of the electrostatic detection probe from another perspective;

[0033] Figure 7 for Figure 5 A schematic diagram of the structure of the electrostatic detection probe showing the internal outline;

[0034] Figure 8 2 is a schematic structural diagram of a third embodiment of an electrostatic detection probe according to the present invention;

[0035] Figure 9 for Figure 8 A schematic structural diagram of the electrostatic detection probe from another perspective;

[0036] Figure 10 for Figure 8 A schematic diagram of the structure of the electrostatic detection probe showing the internal outline;

[0037] Figure 11 2 is a schematic structural diagram of a fourth embodiment of an electrostatic detection probe according to the present invention;

[0038] Figure 12 for Figure 8 A schematic structural diagram of the electrostatic detection probe from another perspective;

[0039] Figure 13 for Figure 8 A schematic diagram of the structure of the electrostatic detection probe showing the internal outline;

[0040] Reference numerals:

[0041] 1. Mounting plate; 2. Circuit module; 3. Vibrating element; 4. Inductive element; 5. First arm; 6. Second arm; 7. First housing section; 8. Second housing section; 9. Electrostatic detection window; 10. Adjusting element; 11. Mounting section; 12. Resin. DETAILED DESCRIPTION

[0042] The following describes the electrostatic detection probe of the present invention with reference to a schematic diagram, which illustrates a preferred embodiment of the present invention. It should be understood that those skilled in the art may modify the invention described herein while still achieving the beneficial effects of the present invention. Therefore, the following description should be understood as a general guideline for those skilled in the art and is not intended to limit the present invention.

[0043] The serial numbers of the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings). In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc. are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0044] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0045] The present invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become more apparent from the following description and claims. It should be noted that the drawings are greatly simplified and not to exact scale, and are provided solely for the purpose of assisting in the description of the embodiments of the present invention.

[0046] The following is attached with the instruction manual Figure 1 To the attached Figure 13 , the electrostatic detection probe of the present invention is introduced.

[0047] In some embodiments, such as Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown, the electrostatic detection probe includes a housing and a mounting plate 1, a circuit module 2, a vibrating arm, a vibrating member 3 and a sensing member 4 arranged in the housing;

[0048] The mounting plate 1 is fixed in the housing;

[0049] The vibration arm is fixedly connected to the mounting plate 1, and the vibration arm has a first arm 5 and a second arm 6 that are spaced apart and have the same natural frequency. There are two vibration members 3, which are respectively arranged on the first arm 5 and the second arm 6;

[0050] The induction element 4 is provided on the first support arm 5 and is used for inducing static electricity;

[0051] The housing includes a first housing section 7 and a second housing section 8. The second housing section 8 is a metal member. The first housing section 7 is made of an antistatic material. The first housing section 7 is provided with an electrostatic detection window 9. The induction element 4 is located in the electrostatic detection window 9 and has a gap with the inner side wall of the electrostatic detection window 9 to allow the induction element 4 to vibrate.

[0052] The circuit module 2 is disposed on the mounting plate 1 and is used to control the vibration of the vibrating member 3 to drive the vibration arm to vibrate and receive the voltage signal sensed by the sensing member 4 .

[0053] Among them, the antistatic material can be an antistatic plastic, such as polycarbonate (PC) or polymethyl methacrylate (PMMA), or carbon fiber or conductive ceramic. The shell refers to a structure used to accommodate and protect the internal components of the electrostatic detection probe. The mounting plate 1 refers to a basic structure for fixing and supporting other components, which can be made of metal materials. The circuit module 2 refers to a collection of electronic components for controlling vibration and processing signals, which can be implemented by printed circuit boards and related electronic components. The vibrating arm refers to a structure for supporting the sensing part 4 and generating vibration, which can be made of elastic metal materials. The vibrating part 3 refers to a component for driving the vibration of the vibrating arm, which can be implemented by piezoelectric ceramics or electromagnetic drivers. The sensing part 4 refers to a core component for detecting static electricity, which can be implemented by capacitors, electrostatic induction electrodes or field effect transistors.

[0054] The shell part where the electrostatic detection window of the electrostatic detection probe of the present application is located is made of anti-static material. Compared with metal materials, the detection window of the present application has less impact on the electric field, making it difficult for the charge to be conducted to the ground along the metal material, making it difficult for the charge to decrease and the charge amount to remain stable. Especially in scenarios with less charge, it is not easy to change the weak electric field itself, making the electric field relatively stable and the detection accuracy higher.

[0055] In one embodiment, Figure 3 As shown, the length of the first arm 5 is greater than that of the second arm 6 , and an adjustment member 10 is provided on the second arm 6 to make the natural frequencies of the second arm 6 and the first arm 5 the same.

[0056] This adjustment member 10 can adjust the mass distribution of the second arm 6 , thereby changing its natural frequency to match the natural frequency of the first arm 5 .

[0057] Specifically, the adjusting member 10 can be implemented in a variety of forms. In a preferred embodiment, the adjusting member 10 is a metal block. Metal blocks have a high density and can provide sufficient mass within a small volume, facilitating precise adjustment. For example, metal blocks of varying weights can be used, or the position of the metal block on the second arm 6 can be adjusted to achieve precise adjustment.

[0058] In addition, the design of the adjusting member 10 may also take other factors into consideration. For example, it may be designed to be detachable so that it can be replaced or fine-tuned when needed. It may also be designed to be slidable so that the natural frequency can be adjusted by changing its position on the second support arm 6.

[0059] By adding an adjustment member 10 to the second arm 6, the natural frequencies of the two arms can be precisely adjusted to keep them consistent. This design ensures that the arms can maintain synchronization when vibrating, improving the accuracy and sensitivity of electrostatic detection.

[0060] As a specific example, for example, the length of the first arm 5 is 100 mm, and the length of the second arm 6 is 80 mm. A slidable metal block 10 is provided on the second arm 6 as an adjustment member. The metal block has a mass of 5 g and can be slid and adjusted along the length of the second arm 6. By changing the position of the metal block on the second arm 6, the natural frequency of the second arm 6 can be precisely adjusted to be consistent with the natural frequency of the first arm 5 (e.g., 200 Hz). The metal block can be fixed to the second arm 6 via threads, facilitating adjustment and fixation.

[0061] In some embodiments, in order to further improve the detection accuracy, such as Figure 3 As shown, the first arm 5 has a mounting section 11 for mounting the induction element 4 , and the mounting section 11 is parallel to the electrostatic detection window 9 .

[0062] Specifically, the mounting section 11 can be a specially designed plane or groove on the first arm 5 for placing and fixing the sensing element 4. The surface of this plane or groove remains parallel to the electrostatic detection window 9, ensuring that the sensing element 4 always maintains the correct orientation.

[0063] The mounting section 11 may be an adjustable structure, such as using a fine-tuning screw or an elastic buckle, to allow the position of the sensing element 4 to be fine-tuned during the installation process to achieve precise parallelism with the electrostatic detection window 9 .

[0064] In the first embodiment, as Figure 1 、 Figure 2 、 Figure 3 and Figure 4 As shown, an inclined surface is provided at the end of the first housing segment 7 , the mounting segment 11 is parallel to the inclined surface, and the electrostatic detection window 9 is provided on the inclined surface.

[0065] Specifically, the inclined surface provided at the end of the first shell segment 7 can be realized in a variety of ways. For example, the inclined surface can be a plane or an arc-shaped surface. The angle between the inclined surface and the horizontal plane can be designed according to actual needs, and can usually be selected between 15° and 75°. This inclined design makes it easier for the probe to approach the object to be measured, especially for some irregular shapes or difficult-to-reach surfaces, thereby improving the flexibility of detection. In addition, by providing an inclined surface on the first shell segment 7 and arranging the electrostatic detection window 9 on the inclined surface, it is also possible to facilitate the arrangement of larger electrostatic detection windows 9 and sensing parts 10, thereby better sensing smaller external electric fields.

[0066] In some embodiments, the first housing segment 7 is columnar, the electrostatic detection window 9 is provided on a side surface of the first housing segment 7 , and the mounting segment 11 is parallel to the second arm 6 .

[0067] The electrostatic detection window 9 is provided on the side of the first housing section 7 , so that the probe can be used in a narrow space or an environment requiring side detection, thereby making electrostatic detection more convenient.

[0068] Furthermore, the parallel arrangement of mounting section 11 and second arm 6 optimizes the vibration effect of the vibrating arm. This parallel arrangement ensures that first arm 5 and second arm 6 maintain good balance during vibration, reducing unnecessary interference. Because mounting section 11 is parallel to second arm 6, the vibration direction of sensor 4 aligns with that of second arm 6, which helps improve the sensitivity and accuracy of electrostatic detection.

[0069] Furthermore, in the second embodiment, as Figure 5 、 Figure 6 and Figure 7 As shown, the side surface of the first housing segment 7 has an arc surface, and the electrostatic detection window 9 is arranged on the arc surface; or, in the third embodiment, as shown Figure 8 、 Figure 9 and Figure 10 As shown, the side surface of the first housing segment 7 has a plane, and the static electricity detection window 9 is arranged on the plane.

[0070] The curved surface is suitable for scenarios that require a larger detection range or specific curved surface detection, while the flat surface is suitable for conventional flat surface detection scenarios. This design increases the applicability of the electrostatic detection probe, enabling it to adapt to different detection environments and requirements.

[0071] Specifically, if Figure 5 、 Figure 6 and Figure 7 As shown, when the side surface of the first housing segment 7 has a curved surface, the static detection window 9 can be located on the curved surface. The curved surface design provides a larger detection range and is suitable for scenarios requiring wide-angle detection. For example, when detecting static electricity on the surface of a cylindrical object, the curved static detection window 9 can better conform to the surface of the detected object, improving detection accuracy.

[0072] On the other hand, Figure 8 、 Figure 9 and Figure 10As shown, when the side surface of the first housing segment 7 is flat, the static detection window 9 can be positioned there. This flat design is suitable for conventional flat surface detection scenarios, such as detecting static electricity on surfaces like flat panels and thin films. A flat static detection window 9 ensures a stable distance from the surface being detected, facilitating consistent detection results.

[0073] In the fourth embodiment, Figure 11 、 Figure 12 and Figure 13 As shown, the first housing segment 7 is columnar, the electrostatic detection window 9 is provided at the end surface of the first housing segment 7 , and the mounting segment 11 is perpendicular to the second support arm 6 .

[0074] This structural design allows the electrostatic detection probe to adapt to scenarios requiring end-face detection, such as the interior spaces of electronic components and gaps in mechanical equipment. By placing the electrostatic detection window 9 on the end face of the cylindrical first housing segment 7, it allows for more flexible access to the object being detected, improving detection accuracy and flexibility.

[0075] Specifically, the cylindrical first housing segment 7 can adopt a variety of shapes, such as a cylinder, an elliptical cylinder, or a polygonal cylinder. The electrostatic detection window 9 can be positioned centrally or eccentrically on the end surface of the first housing segment 7 to accommodate different detection requirements. The design of the mounting segment 11 perpendicular to the second arm 6 allows the sensor 4 to be better aligned with the detection window, thereby improving detection accuracy and sensitivity.

[0076] In the above-mentioned different embodiments, by arranging the electrostatic detection window at different positions of the housing, the use requirements of various spaces can be met.

[0077] Furthermore, in some embodiments, the electrostatic detection window 9 and the induction element 10 are both configured to be circular, which can reduce the influence of the shapes of the induction element and the electrostatic detection window on the detection accuracy, thereby improving the detection accuracy.

[0078] In some embodiments, the thickness of the first support arm 5 and the second support arm 6 is 0.4-1.2 mm, for example, 0.5 mm, 0.8 mm or 1 mm.

[0079] Setting the thickness of the first support arm 5 and the second support arm 6 within this thickness range can ensure that the vibration arm has sufficient strength and rigidity while not being too thick and heavy to affect the vibration performance.

[0080] In some embodiments, in order to fix the mounting plate 1 , a fixing piece is provided in the second housing segment 8 .

[0081] Preferably, the fixing member is a resin 12, which encapsulates the circuit module 2 and a portion of the mounting board 1. For example, epoxy resin, polyurethane resin, or silicone resin can be used as the fixing member. The resin 12 can be encapsulated around the circuit module 2 and a portion of the mounting board 1 by pouring, injecting, or coating. The extent of the encapsulation can be adjusted based on actual needs, and can completely encapsulate the circuit module 2 or only encapsulate key portions of the circuit module 2.

[0082] Resin 12 can partially or fully encase mounting plate 1, but typically leaves some area for connecting other components. The thickness of the resin 12 can be adjusted as needed, typically ranging from 0.5 mm to 5 mm. After curing, resin 12 forms a solid, integrated structure, firmly securing circuit module 2 and mounting plate 1 within the probe.

[0083] The resin 12 wrapping not only secures the circuit module 2 and the mounting plate 1, but also reduces the impact of vibration on the circuit, improving the stability and reliability of the entire probe. Furthermore, the insulating properties of the resin 12 also help prevent electrostatic interference, further improving the detection accuracy of the probe.

[0084] Furthermore, the resin 12 coating protects the circuit module 2, preventing external interference or damage. The excellent insulating properties of the resin 12 effectively isolate external electromagnetic interference and improve the operational stability of the circuit. Furthermore, the sealing properties of the resin 12 prevent external factors such as dust and moisture from affecting the circuit module 2, thereby extending the life of the probe.

[0085] Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if such changes and modifications fall within the scope of the claims and their equivalents, the present invention is intended to include such changes and modifications.

Claims

1. An electrostatic detection probe, characterized in that: It includes a housing and a mounting plate, a circuit module, a vibration arm, a vibration member and an induction member arranged in the housing; The mounting plate is fixed in the housing; The vibration arm is fixedly connected to the mounting plate, and the vibration arm comprises a first arm and a second arm which are spaced apart and have the same natural frequency, and there are two vibration members which are respectively arranged on the first arm and the second arm; The induction element is provided on the first arm and is used for inducing static electricity; The housing includes a first housing section and a second housing section, the second housing section is a metal member, the first housing section is made of an antistatic material, the first housing section is provided with an electrostatic detection window, the induction member is located in the electrostatic detection window and has a gap with the inner side wall of the electrostatic detection window to allow the induction member to vibrate; The circuit module is arranged on the mounting plate, and is used for controlling the vibration of the vibrating member to drive the vibration arm to vibrate and receive the voltage signal sensed by the induction member.

2. The electrostatic detection probe according to claim 1, characterized in that: The length of the first arm is greater than that of the second arm, and an adjustment member is provided on the second arm to make the natural frequencies of the second arm and the first arm the same.

3. The electrostatic detection probe according to claim 1, characterized in that: The first arm has a mounting section for mounting the induction element, and the mounting section is parallel to the electrostatic detection window.

4. The electrostatic detection probe according to claim 3, characterized in that: The first housing section is columnar, the electrostatic detection window is arranged on a side surface of the first housing section, and the mounting section is parallel to the second support arm.

5. The electrostatic detection probe according to claim 4, characterized in that: The side surface of the first housing segment has an arcuate surface, and the static electricity detection window is arranged on the arcuate surface; or the side surface of the first housing segment has a flat surface, and the static electricity detection window is arranged on the flat surface.

6. The static electricity detection probe according to claim 3, characterized in that: The first housing section is columnar, the electrostatic detection window is arranged at an end surface of the first housing section, and the mounting section is perpendicular to the second support arm.

7. The static electricity detection probe according to claim 3, characterized in that: An inclined surface is provided at the end of the first housing segment, the mounting segment is parallel to the inclined surface, and the electrostatic detection window is provided on the inclined surface.

8. The static electricity detection probe according to claim 1, characterized in that: The thickness of the first support arm and the second support arm is 0.4-1.2 mm.

9. The static electricity detection probe according to claim 1, characterized in that: A fixing member is provided in the second shell section to fix the mounting plate.

10. The static electricity detection probe according to claim 1, characterized in that: The detection window and the sensing element are both circular.

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