A gas path mechanism and gas distribution analysis method for a vapor deposition heating block

Abstract

This invention discloses a gas path mechanism and gas distribution analysis method for a vapor deposition heating block, comprising: a supply end, a gas pipe, a vacuum pipe connector, and a gas supply pipe connector. The ends of the vacuum pipe connector and / or the gas supply pipe connector are provided with a support structure. When the vacuum pipe connector and / or the gas supply pipe connector are connected to a grooved portion of the substrate, the support structure is located at one end serving as the connection part. The support structure of the vacuum pipe connector and / or the gas supply pipe connector is welded to the grooved portion of the substrate. This invention avoids direct welding on the pipe body by providing a dedicated support structure at the connection part of the connector for welding to the grooved portion of the substrate. By changing the traditional direct connection between the pipe body and the grooved portion of the substrate to an indirect connection, leakage is reduced. The support structure also reduces the deformation of the "connector" when pressure difference changes occur, preventing cracks from forming at the welded area due to micro-deformation.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition heating block technology, and more specifically, to a gas path mechanism and a gas distribution analysis method for a vapor deposition heating block. Background Technology

[0002] Key characteristics of the raw material compounds used in vapor phase deposition (VPD) include high vapor pressure, liquid state, vaporization temperature, thermal stability during storage, ease of handling, easy reaction with reactants during processing, and simple deposition mechanism. Furthermore, in the case of ITO thin films, since deposition must be performed as a composite oxide, process conditions such as deposition temperature must be consistent or similar for each deposition. The applicant mentioned in a prior Korean patent application that "when the gas supply pipe is connected to the grooved portion of the connecting channel that connects vertically to the substrate, direct welding to the pipe body will cause cracks." Figure 13 and Figure 14 As shown. Therefore, how to prevent cracks from appearing in the welded part due to welding stress and thermal stress, without having to weld directly to the pipe body, is the technical problem that this invention aims to solve. Summary of the Invention

[0003] The summary section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. The summary section of this invention is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0004] To at least partially solve the above problems, the present invention provides a gas path mechanism and a gas distribution analysis method for a vapor deposition heating block, comprising: a supply end, a gas pipe, a vacuum pipe connector, and a gas supply pipe connector. The ends of the vacuum pipe connector and / or the gas supply pipe connector are provided with a support structure. When the vacuum pipe connector and / or the gas supply pipe connector are connected to the groove portion of the base block, the support structure is provided at one end serving as the connection portion. The support structure of the vacuum pipe connector and / or the gas supply pipe connector is welded to the groove portion of the base block.

[0005] Preferably, the vacuum tube connector and / or gas supply tube connector consists of a cylindrical section, a conical section, and the supporting structure. One end of the cylindrical section is the connector end, which is connected to the gas tube, and the other end is connected to one end of the conical section. The other end of the conical section is connected to the supporting structure. The supporting structure is located in the groove portion of the base block and is fixed in the groove portion of the base block by welding. The vacuum tube connector and / or gas supply tube connector is provided with a vent hole that penetrates the cylindrical section, the conical section, and the supporting structure.

[0006] Preferably, the outer diameter of the cylindrical segment is r, and the outer diameters of the two ends of the tapered segment are r and R, respectively, where R > r. The end of the tapered segment with an outer diameter of r is connected to the end of the cylindrical segment, and the end with an outer diameter of R is connected to the supporting structure.

[0007] Preferably, the support structure is frustum-shaped, with the outer diameters of the two ends of the support structure being d and D, respectively, where D > d > R. The end of the support structure with an outer diameter of d is connected to the end of the tapered segment with an outer diameter of R, and the end with an outer diameter of D is located on the inner end face of the groove portion of the base block.

[0008] Preferably, the groove portion of the base block is a conical groove, the opening diameter of the groove portion of the base block is T, and the inner end face diameter of the groove portion of the base block is t, where T>t≥D.

[0009] Preferably, the sidewalls of the support structure are provided with a plurality of structural grooves along the circumferential direction.

[0010] Preferably, the inner wall of the vent hole of the air supply pipe connector is provided with corrugations.

[0011] Preferably, a diversion mesh is provided in the vent hole of the air supply pipe connector or in the connecting channel connected to the groove of the base block. The diversion mesh is a circular mesh structure and consists of a first zone, a second zone, and a third zone. When the airflow changes direction after passing through the diversion mesh, the turning path Y of the airflow flowing through the first zone is greater than the turning path Z of the airflow flowing through the second zone, and the turning path Z of the airflow flowing through the second zone is greater than the turning path J of the airflow flowing through the third zone.

[0012] Preferably, the mesh density of the first region is less than that of the second region, and the mesh density of the second region is less than that of the third region.

[0013] Preferably, the gas distribution analysis method for the gas path mechanism of a vapor deposition heating block according to the present invention includes:

[0014] Based on the gas path distribution of the vapor deposition heating block and the status of the vacuum tube connector and gas supply tube connector, the gas distribution is statistically analyzed. A thin-film pressure sensor group is installed around the vacuum negative pressure port of the vacuum tube connector to detect pressure signals at multiple points around the vacuum port. When a vacuum is drawn, the negative pressure adsorbs the substrate onto the heating block. Under negative pressure, the substrate substrate attachment surface and the heating block adsorption surface are not completely adhered, with micro-gap areas and micro-gap areas extending non-directionally from the substrate edge towards the vacuum port, resulting in a non-uniform distribution of negative pressure. The thin-film pressure sensor group detects pressure signals at multiple points around the vacuum port between the substrate substrate attachment surface and the heating block adsorption surface. Based on the multi-point pressure signals, the pressure distribution of the vacuum-adsorbed substrate is statistically analyzed. Based on the statistical analysis of the stress characteristics of the substrate with non-uniform negative pressure distribution, an upper limit pressure difference value for negative pressure is set. The pressure distribution of the substrate is controlled to ensure that the difference in negative pressure distribution of the vacuum adsorption substrate is less than the set upper limit of the negative pressure difference. Nanoscale pressure sensors are installed around the gas outlet of the gas supply pipe connector to detect the gas pressure at the outlet and acquire multiple gas pressure signals. Based on these signals, the gas distribution at the outlet is statistically analyzed to obtain statistical characteristics. Based on these characteristics, the gas distribution on the surface of the heating block is analyzed, and a gas distribution analysis model is constructed. Using this model, the dynamic difference in gas pressure distribution within the gas supply pipe and gas supply path mechanism is analyzed to ensure that the dynamic difference does not exceed the set upper limit of the gas pressure difference, and that the gas pressure is uniformly distributed across the heating block surface.

[0015] Compared with the prior art, the present invention has at least the following beneficial effects:

[0016] This invention employs a support structure at the joint connection point specifically designed for welding to the grooved portion of the base block. This avoids direct welding to the pipe body, changing the traditional direct connection between the pipe body and the grooved portion of the base block to an indirect connection, thereby reducing leakage. The support structure also reduces the deformation of the joint when pressure differential changes occur, preventing cracks from forming at the welded area due to micro-deformation.

[0017] The gas path mechanism and gas distribution analysis method for vapor deposition heating blocks described in this invention, along with other advantages, objectives, and features of this invention, will be partly apparent from the following description and partly understood by those skilled in the art through study and practice of this invention. Attached Figure Description

[0018] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:

[0019] Figure 1 This is a cross-sectional view of the grooved portion of the vacuum tube connector and the base block.

[0020] Figure 2 This is a cross-sectional view of the air supply pipe connector without a supporting structure and the grooved portion of the base block.

[0021] Figure 3 This is a schematic diagram of a vacuum tube connector with a supporting structure.

[0022] Figure 4 for Figure 3 A schematic diagram of the cross-sectional structure.

[0023] Figure 5 A schematic diagram of structural grooves installed on the supporting structure.

[0024] Figure 6 A cross-sectional structural diagram of a gas supply pipe connector with corrugated patterns.

[0025] Figure 7 A schematic diagram showing the installation of a diversion mesh inside the vent of the gas supply pipe connector.

[0026] Figure 8 A schematic diagram of a diversion mesh when a diversion mesh is installed inside the vent hole of the air supply pipe connector.

[0027] Figure 9 for Figure 7 A schematic diagram of the traffic splitting in the splitting network.

[0028] Figure 10 A schematic diagram showing the installation of a distribution network within the connecting channel that connects the recessed portion of the base block.

[0029] Figure 11 A schematic diagram of the distribution network when a distribution network is installed in the connecting channel connected to the groove portion of the base block.

[0030] Figure 12 for Figure 10 A schematic diagram of the traffic splitting in the splitting network.

[0031] Figure 13 , Figure 14 This is a schematic diagram of the cracking at the welded part mentioned in the background art.

[0032] In the diagram: 1 Vacuum pipe connector, 2 Gas supply pipe connector, 3 Cylindrical section, 4 Conical section, 5 Support structure, 6 Vent hole, 7 Structural groove, 8 Diverter net, 81 First zone, 82 Second zone, 83 Third zone. Detailed Implementation

[0033] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments, so that those skilled in the art can implement it based on the description.

[0034] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0035] like Figures 1-12 As shown, the present invention provides a gas path mechanism for a vapor deposition heating block, comprising: a supply end, a gas pipe, a vacuum pipe connector 1, and a gas supply pipe connector 2. The ends of the vacuum pipe connector 1 and / or the gas supply pipe connector 2 are provided with a support structure 5. When the vacuum pipe connector 1 and / or the gas supply pipe connector 2 are connected to the groove portion of the base block, the support structure 5 is provided at one end serving as the connection portion. The support structure 5 of the vacuum pipe connector 1 and / or the gas supply pipe connector 2 is welded to the groove portion of the base block.

[0036] The working principle and beneficial effects of the above technical solution are as follows: Through the design of the above structure, this invention adopts a support structure 5 specifically designed for welding with the grooved portion of the base block at the connection part of the joint, thereby avoiding direct welding on the pipe body. By changing the traditional direct connection between the pipe body and the grooved portion of the base block to an indirect connection, leakage is reduced. Furthermore, the support structure 5 can reduce the deformation of the "joint" when pressure difference changes occur, preventing cracks from forming at the welded area due to micro-deformation.

[0037] Furthermore, the vacuum pipe connector 1 and / or the gas supply pipe connector 2 are composed of a cylindrical section 3, a conical section 4 and the supporting structure 5. One end of the cylindrical section 3 is the connector end, which is connected to the gas pipe, and the other end is connected to one end of the conical section 4. The other end of the conical section 4 is connected to the supporting structure 5. The supporting structure 5 is located in the groove portion of the base block and is fixed in the groove portion of the base block by welding. The vacuum pipe connector 1 and / or the gas supply pipe connector 2 are provided with a vent hole 6 that penetrates the cylindrical section 3, the conical section 4 and the supporting structure 5.

[0038] The outer diameter of the cylindrical segment 3 is r, and the outer diameters of the two ends of the tapered segment 4 are r and R, respectively, where R > r. The end of the tapered segment 4 with an outer diameter of r is connected to the end of the cylindrical segment 3, and the end with an outer diameter of R is connected to the support structure 5.

[0039] The support structure 5 is frustum-shaped, with outer diameters d and D at its two ends, where D > d > R. The end of the support structure 5 with outer diameter d is connected to the end of the tapered segment 4 with outer diameter R, and the end with outer diameter D is located on the inner end face of the groove portion of the base block. This allows the support structure 5 to protrude beyond the tapered segment 4, thereby making the vacuum pipe connector 1 and the gas supply pipe connector 2 more stable in the radial direction and reducing the deformation caused by micro-deformation.

[0040] The grooved portion of the base block is a conical groove. The opening diameter of the grooved portion of the base block is T, and the inner end face diameter of the grooved portion is t, where T>t≥D, as shown. Figure 1 As shown.

[0041] Furthermore, the sidewall of the supporting structure 5 is provided with a plurality of structural grooves 7 along the circumferential direction, such as... Figure 5 As shown, adding structural groove 7 will inevitably increase the number of weld points, but by setting structural groove 7, the axial firmness of vacuum pipe joint 1 and gas supply pipe joint 2 can be increased, reducing the possibility of cracking caused by rotation.

[0042] Furthermore, the inner wall of the vent hole 6 of the air supply pipe connector 2 is provided with corrugations, thereby reducing the air vortex generated when the air supply pipe connector 2 enters the connection channel in the groove portion of the base block.

[0043] When gas enters the connecting channel through the gas supply pipe connector 2, the cyclone will change the direction of gas transport, especially after entering the connecting channel. If the gas changes direction in the cyclone state, it will cause turbulence in the airflow entering the connecting channel.

[0044] Furthermore, after eliminating cyclones as much as possible through wavy lines, it is also necessary to guide the changing airflow to avoid turbulence. In this embodiment, a diversion net 8 is provided in the connecting channel connected to the vent 6 of the air supply pipe or the groove of the base block. The diversion net 8 has a circular mesh structure and consists of a first zone 81, a second zone 82, and a third zone 83. When the airflow changes direction after passing through the diversion net 8, the turning path Y of the airflow flowing through the first zone 81 is greater than the turning path Z of the airflow flowing through the second zone 82, and the turning path Z of the airflow flowing through the second zone 82 is greater than the turning path J of the airflow flowing through the third zone 83. Figure 9 and Figure 12 As shown. The mesh density of the first zone 81 is less than that of the second zone 82, and the mesh density of the second zone 82 is less than that of the third zone 83. All meshes are openwork to allow gas flow; the mesh can be rectangular, such as... Figure 8 and Figure 11 As shown, the shapes can also be hexagonal, triangular, circular, etc. By artificially dividing the airflow into different turning paths, the airflow with larger turning paths passes through a smaller grid density, encountering less resistance and flow loss. Conversely, the airflow with smaller turning paths passes through a larger grid density, encountering greater resistance and flow loss. This ensures that after passing through the diversion grid 8, the airflow can maintain its direction of transport without generating cyclones. Furthermore, because the airflow velocity is basically consistent at each location, turbulence can be avoided.

[0045] The present invention provides a gas distribution analysis method for a gas path mechanism of a vapor deposition heating block, comprising:

[0046] Based on the gas path distribution of the vapor deposition heating block and the status of vacuum tube connector 1 and gas supply connector 2, the gas distribution is statistically analyzed. A thin-film pressure sensor group is set around the vacuum negative pressure port of vacuum tube connector 1 to detect the pressure signal at multiple points around the vacuum port. When vacuuming, the negative pressure adsorbs the substrate onto the heating block. Under negative pressure, the substrate substrate attachment surface and the heating block adsorption surface are in contact and adhere to each other under the gas pressure of the substrate non-attached surface. Under actual process conditions, the substrate substrate attachment surface and the heating block adsorption surface are not completely adhered. There are micro-gap areas and non-directional micro-gap extensions from the substrate edge to the vacuum port. These non-directional micro-gap extensions create minor gas leakage and local pressure reduction. External airflow flows into the vacuum tube through these non-directional micro-gap extensions. The negative pressure at the non-directional micro-gap extension areas is less than the negative pressure at the completely adhered, non-leaking areas, resulting in a non-uniform distribution of negative pressure. The thin-film pressure sensor group detects the pressure signal at multiple points around the vacuum port between the substrate substrate attachment surface and the heating block adsorption surface. Based on the multi-point... Pressure signals are statistically analyzed to determine the pressure distribution of the vacuum adsorption substrate. Based on the statistical analysis of the force characteristics of the substrate with non-uniform negative pressure distribution, an upper limit pressure difference value for negative pressure is set. The difference in non-uniform negative pressure distribution of the vacuum adsorption substrate is controlled to be less than the set upper limit pressure difference value. Nanoscale pressure sensors are installed around the gas outlet of the gas supply pipe connector 2 to detect the gas pressure at the gas outlet and acquire multiple gas pressure signals. Based on these multiple gas pressure signals, the gas distribution at the gas outlet is statistically analyzed to obtain statistical characteristics of the gas distribution. Based on these statistical characteristics, the gas distribution on the surface of the heating block is analyzed, and a gas distribution analysis model is constructed. Based on the gas distribution analysis model, the dynamic difference in gas pressure distribution of the gas supply pipe and gas supply path mechanism is analyzed. The dynamic difference in gas pressure distribution of the gas supply pipe and gas supply path mechanism is kept no greater than the set upper limit of the gas supply pressure difference, and the gas pressure is kept uniformly distributed, thus controlling the uniform distribution of gas on the surface of the heating block.

[0047] The working principle of the above technical solution: The gas distribution analysis method for the gas path mechanism of the vapor deposition heating block of the present invention includes: due to the distribution characteristics of the gas path mechanism of the vapor deposition heating block, the vacuum tube joint and the gas supply tube joint are subjected to different pressure states; the vacuum negative pressure port of the vacuum tube joint is subjected to vacuum negative pressure, and the gas supply tube joint is subjected to gas positive pressure; statistical analysis of gas distribution; a thin-film pressure sensor group is set around the vacuum negative pressure port of the vacuum tube joint to detect pressure signals at multiple points around the vacuum port; under the action of vacuum negative pressure; when evacuating, the negative pressure adsorbs the substrate onto the heating block, and the negative pressure... During operation, the substrate's attachment surface contacts the heating block's adsorption surface, and they adhere to each other under the air pressure of the substrate's non-attached surface. However, under actual process conditions, the substrate's attachment surface and the heating block's adsorption surface are not completely adhered; there are micro-gap areas and non-directional micro-gap extensions from the substrate edge towards the vacuum port. These non-directional micro-gap extensions create minor air leakage and localized pressure reduction. External airflow flows into the vacuum tube through these non-directional micro-gap extensions. The negative pressure at the non-directional micro-gap extensions is lower than the negative pressure at the completely adhered, non-leaking areas, resulting in a non-uniform distribution of negative pressure. The thin-film pressure sensor group detects the adhesion surface of the substrate and the heating block's adsorption surface. Multiple pressure signals were collected around the vacuum tube inlet. Based on these signals, the pressure distribution of the vacuum adsorption substrate was statistically analyzed. According to the statistical analysis of the stress characteristics of the substrate with non-uniform negative pressure distribution, an upper limit pressure difference was set. Based on the pressure distribution of the vacuum adsorption substrate, the non-uniform negative pressure difference was controlled to be less than the set upper limit pressure difference. A nano-pressure sensor was installed around the gas outlet of the gas supply pipe joint to detect the gas pressure at the outlet and acquire multiple gas outlet pressure signals. Based on these multiple gas outlet pressure signals, the gas distribution at the outlet was statistically analyzed to obtain the gas supply... Statistical characteristics of outlet gas distribution; based on the statistical characteristics of outlet gas distribution, analyze the gas distribution state on the surface of the heating block and construct a gas distribution analysis model; the gas distribution analysis model analyzes the gas distribution state on the surface of the heating block; based on the gas distribution analysis model, analyze the dynamic difference of gas pressure distribution in the gas supply pipe and gas supply circuit mechanism, keep the dynamic difference of gas pressure distribution in the gas supply pipe and gas supply circuit mechanism not greater than the set upper limit of gas supply pressure difference, and keep the gas pressure in the gas supply pipe and gas supply circuit mechanism uniformly distributed, and feed back to the gas supply end of the gas supply pipe and gas supply circuit mechanism to set up a control device to control the gas to be uniformly distributed on the surface of the heating block.

[0048] The beneficial effects of the above technical solution are as follows: Through the design of the above structure, the gas distribution analysis method for the gas path mechanism of the vapor deposition heating block of the present invention can statistically analyze the pressure state of the vacuum tube joint and the gas supply tube joint based on the distribution characteristics of the gas path mechanism of the vapor deposition heating block; the vacuum negative pressure port of the vacuum tube joint bears the vacuum negative pressure, and the gas supply tube joint bears the gas positive pressure; statistical analysis of gas distribution; a thin-film pressure sensor group is set around the vacuum negative pressure port of the vacuum tube joint to detect the pressure signal at multiple points around the vacuum port; under the action of vacuum negative pressure; when evacuating, the negative pressure will adsorb the substrate onto the heating block. Under negative pressure, the substrate's attachment surface contacts the heating block's adsorption surface and adheres to it under the air pressure of the substrate's non-attached surface. However, under actual process conditions, the substrate's attachment surface and the heating block's adsorption surface are not completely adhered; micro-gap areas and non-directional micro-gap extensions from the substrate edge towards the vacuum port exist. These non-directional micro-gap extensions create minor air leakage and localized pressure reduction. External airflow flows into the vacuum tube through these non-directional micro-gap extensions. The negative pressure at these non-directional micro-gap areas is lower than the negative pressure at the completely adhered, non-leaking areas, resulting in a non-uniform distribution of negative pressure. The thin-film pressure sensor group detects the vacuum between the substrate's attachment surface and the heating block's adsorption surface. Multiple pressure signals around the pipe opening; statistical analysis of the pressure distribution of the vacuum adsorption substrate based on these signals; statistical analysis of the stress characteristics of the substrate with non-uniform negative pressure distribution to set an upper limit pressure difference value for negative pressure; control the non-uniform negative pressure difference of the vacuum adsorption substrate to be less than the set upper limit pressure difference value based on the pressure distribution of the vacuum adsorption substrate; install nano-pressure sensors around the gas outlet of the gas supply pipe joint to detect the gas pressure at the gas outlet and acquire multiple gas outlet pressure signals; statistical analysis of the gas distribution at the gas outlet based on these multiple gas outlet pressure signals to obtain statistical characteristics of the gas distribution at the gas outlet; based on... Based on the statistical characteristics of gas distribution at the gas outlet, the gas distribution on the surface of the heating block is analyzed, and a gas distribution analysis model is constructed. The gas distribution analysis model analyzes the gas distribution on the surface of the heating block. Based on the gas distribution analysis model, the dynamic difference of gas pressure distribution in the gas supply pipe and gas supply circuit mechanism is analyzed. The dynamic difference of gas pressure distribution in the gas supply pipe and gas supply circuit mechanism is kept no greater than the set upper limit of the gas supply pressure difference, and the gas pressure in the gas supply pipe and gas supply circuit mechanism is kept uniformly distributed. The feedback is sent to the gas supply end of the gas supply pipe and gas supply circuit mechanism to set a control device to control the uniform distribution of gas on the surface of the heating block, thus significantly improving the uniformity of gas distribution on the surface of the heating block.

[0049] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0050] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0051] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for the present invention. Other modifications can be easily made by those skilled in the art. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and illustrations shown and described herein.

Claims

1. A gas path mechanism for a vapor deposition heating block, comprising: The supply end, air pipe, vacuum pipe connector (1) and air supply pipe connector (2) are characterized in that the ends of the vacuum pipe connector (1) and / or air supply pipe connector (2) are provided with a support structure (5), and when the vacuum pipe connector (1) and / or air supply pipe connector (2) are connected to the groove portion of the base block, the support structure (5) is provided at one end as a connecting part, and the support structure (5) of the vacuum pipe connector (1) and / or air supply pipe connector (2) is welded to the groove portion of the base block; The vacuum pipe connector (1) and / or the gas supply pipe connector (2) are composed of a cylindrical section (3), a conical section (4) and the support structure (5). One end of the cylindrical section (3) is the connector end, which is connected to the gas pipe, and the other end is connected to one end of the conical section (4). The other end of the conical section (4) is connected to the support structure (5). The support structure (5) is located in the groove of the base block and is fixed in the groove of the base block by welding. The vacuum pipe connector (1) and / or the gas supply pipe connector (2) are provided with a vent hole (6) that penetrates the cylindrical section (3), the conical section (4) and the support structure (5). The outer diameter of the cylindrical segment (3) is r, and the outer diameters of the two ends of the tapered segment (4) are r and R respectively, where R > r. The end of the tapered segment (4) with an outer diameter of r is connected to the end of the cylindrical segment (3), and the end with an outer diameter of R is connected to the support structure (5). The support structure (5) is frustum-shaped. The outer diameters of the two ends of the support structure (5) are d and D, respectively, where D > d > R. The end of the support structure (5) with an outer diameter of d is connected to the end of the tapered segment (4) with an outer diameter of R. The end with an outer diameter of D is located on the inner end face of the groove part of the base block. The groove portion of the base block is a conical groove, the opening diameter of the groove portion of the base block is T, and the inner end face diameter of the groove portion of the base block is t, where T>t≥D.

2. The gas path mechanism for a vapor deposition heating block according to claim 1, characterized in that, The sidewall of the support structure (5) is provided with a number of structural grooves (7) along the circumferential direction.

3. The gas path mechanism for a vapor deposition heating block according to claim 1, characterized in that, The inner wall of the vent hole (6) of the air supply pipe connector (2) is provided with a corrugated pattern.

4. The gas path mechanism for a vapor deposition heating block according to claim 1, characterized in that, A diversion net (8) is provided in the air vent (6) of the air supply pipe connector (2) or in the connecting channel connected to the groove of the base block. The diversion net (8) is a circular mesh structure. The diversion net (8) is composed of a first zone (81), a second zone (82) and a third zone (83). When the airflow changes direction after passing through the diversion net (8), the turning path Y of the airflow flowing through the first zone (81) is greater than the turning path Z of the airflow flowing through the second zone (82), and the turning path Z of the airflow flowing through the second zone (82) is greater than the turning path J of the airflow flowing through the third zone (83).

5. The gas path mechanism for a vapor deposition heating block according to claim 4, characterized in that, The mesh density of the first region (81) is less than that of the second region (82), and the mesh density of the second region (82) is less than that of the third region (83).

6. A gas distribution analysis method for a gas path mechanism for a vapor deposition heating block according to any one of claims 1-5, characterized in that, include: Based on the gas path distribution of the vapor deposition heating block and the status of the vacuum tube connector (1) and the gas supply tube connector (2), the gas distribution is statistically analyzed; a thin-film pressure sensor group is set around the vacuum negative pressure port of the vacuum tube connector (1) to detect the pressure signals at multiple points around the vacuum port; when vacuuming, the negative pressure adsorbs the substrate onto the heating block. Under negative pressure, the substrate substrate attachment surface and the heating block adsorption surface are not completely attached, and there are micro-gap areas and micro-gap areas extending non-directionally from the substrate edge to the vacuum port, resulting in a non-uniform distribution of negative pressure; the thin-film pressure sensor group detects the pressure signals at multiple points around the vacuum port between the substrate substrate attachment surface and the heating block adsorption surface; based on the multi-point pressure signals, the pressure distribution of the vacuum adsorption substrate is statistically analyzed; based on the statistical analysis of the stress characteristics of the substrate with non-uniform negative pressure distribution, an upper limit pressure difference value for negative pressure is set, and based on... The pressure distribution of the vacuum adsorption substrate is controlled to ensure that the difference in the non-uniform distribution of negative pressure on the vacuum adsorption substrate is less than the upper limit of the negative pressure difference. A nano pressure sensor is set around the gas outlet of the gas supply pipe connector (2) to detect the gas pressure at the gas outlet and obtain multiple gas pressure signals at the gas outlet. Based on the multiple gas pressure signals at the gas outlet, the gas distribution at the gas outlet is statistically analyzed to obtain the statistical characteristics of the gas distribution at the gas outlet. Based on the statistical characteristics of the gas distribution at the gas outlet, the gas distribution state on the surface of the heating block is analyzed, and a gas distribution analysis model is constructed. Based on the gas distribution analysis model, the dynamic difference of gas pressure distribution in the gas supply pipe and gas supply circuit mechanism is analyzed to ensure that the dynamic difference of gas pressure distribution in the gas supply pipe and gas supply circuit mechanism is not greater than the upper limit of the gas pressure difference, and the gas pressure in the gas supply pipe and gas supply circuit mechanism is uniformly distributed to control the gas to be uniformly distributed on the surface of the heating block.

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