Device and method for polishing subsurface damage of ice-on-oil particles based on flow focusing

Abstract

The invention discloses a polishing device and method for subsurface damage of oil-borne ice particles based on flow focusing, and belongs to the technical field of subsurface damage polishing of ultra-precision optical elements. The device comprises a shell, a liquid phase conveying module, a three-dimensional fine adjustment module, an intra-cavity regulation and control module and an auxiliary gas module; an alignment wedge-shaped moving pair normal micro-feeding mechanism and a matched wedge-shaped block height adjusting mechanism are arranged in the three-dimensional fine adjustment module, the horizontal position and the vertical position of a nozzle can be adjusted through quantitative displacement of a micrometer head, and then the coaxiality and the distance between the nozzle and a focusing hole are adjusted; the high-speed ice-on-oil particles are subjected to sound field homogenization regulation and control and then refined and sprayed out through flowing focusing gas, an annular gas chamber is arranged at an outlet to slow down divergence of jet beams, and therefore high-speed ice-on-oil particle long and thin jet beams are formed. In conclusion, the method can be used for subsurface damage polishing of the ultra-precise optical element, the laser damage threshold value of the optical element is increased, and the service performance of the ultra-precise optical element is enhanced.

Description

Technical Field

[0001] The present invention belongs to the technical field of subsurface damage polishing of ultra-precision optical elements, and in particular relates to a device and method for polishing subsurface damage of an oil-borne ice particle jet based on flow focusing. Background Art

[0002] Ultra-precision optical components are widely used in aerospace, defense, and advanced civilian applications. They are core components that determine the performance of high-end equipment. However, they are prone to subsurface damage such as micro-scratches and micro-cracks during manufacturing. The presence of subsurface damage can alter the intrinsic properties of the material, causing beam scattering, thermal distortion, and other effects, significantly reducing the service performance of ultra-precision optical components. This has become a key factor restricting the development of strategic high-end equipment. For example, in giant laser fusion devices, subsurface damage becomes a precursor to laser-induced damage.

[0003] Therefore, how to efficiently polish sub-surface damage of ultra-precision optical components needs to be solved urgently. The existing magnetorheological polishing and ion beam polishing technologies are expensive and complex, and the injection effect of ion bombardment introduces new impurities.

[0004] Flow focusing technology utilizes the extrusion and stretching effect of the coaxial outflow of high-pressure gas and the jet beam to refine the jet beam, allowing the jet beam to remove the material surface with a more stable removal function. It can be applied to the field of sub-surface damage polishing technology of ultra-precision optical components.

[0005] In the jet polishing device, the distance and coaxiality between the jet nozzle and the focusing hole are key factors in jet polishing. As the size of the nozzle and the focusing hole decreases, the influence of the distance and coaxiality deviation is further amplified. The distance between the jet nozzle and the focusing hole affects the material removal function of the jet beam. The coaxiality deviation between the two will make the high-pressure gas driving force on the surface of the jet beam unbalanced, resulting in the tilt deviation of the jet beam, affecting the polishing effect. Therefore, it is particularly important to have an adjustment device for the distance and coaxiality between the jet nozzle and the focusing hole in the jet polishing device. Summary of the Invention

[0006] The purpose of the present invention is to solve the problem of sub-surface damage limiting the performance of high-end equipment, and to provide a polishing device and method for oil-borne ice particle sub-surface damage based on flow focusing. The normal micro-feed mechanism of the positioning wedge-shaped moving pair in the device can accurately adjust the coaxiality of the jet nozzle and the focusing hole.

[0007] The technical solution adopted in the present invention is as follows:

[0008] The polishing device for oil-borne ice particle subsurface damage based on flow focusing comprises: a shell 1, a liquid phase delivery module 2, a three-dimensional fine-tuning module 3, an intracavity control module 4, and an auxiliary gas module 5;

[0009] The housing 1 comprises an upper cover 11, an outer ring 12, a sealing sheet 13 and a focusing cavity 14 which are connected in sequence;

[0010] The liquid phase delivery module 2 includes a pump body 21, a delivery pipe 22, a connector 23, a capillary tube 24, and a nozzle 26 connected in sequence, and also includes a capillary tube fixing block 25 sleeved and fixedly connected to the capillary tube 24;

[0011] The pump body 21 delivers the low-temperature oil-carrying ice particle mixture to the capillary 24 through the transmission pipe 22; the nozzle 26 has a diameter between 0.1-1 mm;

[0012] The capillary fixing block 25 is a cross-bevel end surface structure, with two parallel horizontal adjustment working bevels, and the projection of the intersection of the four bevels forms a "diamond";

[0013] The three-dimensional fine-tuning module 3 includes a spring 31, an inner ring 32, a horizontal adjustment wedge block 33, a horizontal adjustment differential head 34, a vertical adjustment wedge block 35 and a vertical adjustment differential head 36;

[0014] The capillary tube 24 passes vertically through the upper cover 11, the inner ring 32, and the middle of the outer ring 12 from top to bottom with a margin; the lower part of the capillary tube 24 enters the focusing cavity 14 through the flexible sealing ring 41 of the intra-cavity control module 4;

[0015] The inner ring 32 is in a columnar groove shape, and the lower end surface of the capillary fixing block 25 is slidably connected to the inner lower part of the inner ring 32; the upper end of the inner ring 32 is connected to the upper cover 11 via a spring 31, and the spring 31 is in a compressed state;

[0016] The lower part of the inner ring 32 is provided with two symmetrical downwardly inclined vertical adjustment working inclined surfaces 323, and the vertical adjustment working inclined surfaces 323 are connected to the inclined surface of the upper part of the vertical adjustment wedge block 35;

[0017] The vertical adjustment wedge block 35 is slidably arranged in the dovetail groove 123 symmetrically arranged on the inner lower part of the outer ring 12;

[0018] The vertical adjustment differential head 36 is disposed outside the vertical adjustment wedge block 35 and fixed to the outer ring 12; the top of the vertical adjustment differential head 36 is fixedly connected to the outer end of the vertical adjustment wedge block 35. By rotating the vertical adjustment differential head 36, the vertical position of the inner ring 32 can be adjusted, thereby adjusting the vertical position of the nozzle 26;

[0019] The inner lower portion of the inner ring 32 is uniformly provided with four dovetail grooves II 322, in which a horizontal adjustment wedge block 33 is slidably connected; the inclined surface of the inner end of the horizontal adjustment wedge block 33 is sequentially connected to the horizontal adjustment working inclined surface of the capillary fixing block 25;

[0020] The outer ends of the horizontal adjustment wedge blocks 33 are fixedly connected to the tops of the horizontal adjustment differential heads 34. The four horizontal adjustment differential heads 34 pass through the outer ring 12 and are fixed on the four sides of the inner ring 32. By rotating the horizontal adjustment differential heads 34, the horizontal position of the capillary fixing block 25 can be adjusted, thereby adjusting the horizontal position of the nozzle 26.

[0021] The slope of the horizontal adjustment working inclined plane is λ1, and the slope of the vertical adjustment working inclined plane 323 is λ2;

[0022] The adjustment range ∆L of the horizontal / vertical adjustment wedge is calculated as follows: ∆L=L·λ i i is 1 or 2; where L is the input displacement of the differential head, λ i Adjust the inclination of the working surface for horizontal / vertical adjustment.

[0023] The focusing cavity 14 is a cylindrical sealed cavity, on which a gas connector 141, a camera observation window 142 and a supplementary light source window 144 are provided; a focusing disk groove 145 is provided at the bottom of the focusing cavity 14.

[0024] The intracavity control module 4 includes a flexible sealing ring 41, an acoustic signal device 42, a focusing gas adjustment block 43 and a focusing disk 44;

[0025] The flexible sealing ring 41 is tapered downward, with its upper and lower ends sealedly connected to the bottom of the outer ring 12 and the capillary tube 24, respectively, to ensure the sealing of the focusing cavity 14 and provide a certain degree of support.

[0026] The flexible sealing ring 41 can be flexibly deformed as the three-dimensional fine-tuning module 3 is adjusted;

[0027] The acoustic signal device 42 is sleeved on the outer wall of the capillary tube 24;

[0028] The focusing gas adjustment block 43 is fixed to the bottom of the focusing chamber 14, and has a downward tapered slope at its center that is the same as the slope of the outer surface of the nozzle 26;

[0029] The focusing disk 44 is placed in the focusing disk groove 145 and has a focusing hole at its center.

[0030] The diameter of the focusing hole of the focusing disk 44 is between 0.05 mm and 0.8 mm, and is smaller than the diameter of the nozzle 26 .

[0031] The auxiliary gas module 5 is arranged at the lower side of the focusing cavity 14 , with a jet hole in the center, opposite to the focusing hole of the focusing disk 44 ; the auxiliary gas module 5 includes an annular gas flow stabilization cavity 51 and an auxiliary gas connector 52 .

[0032] The gas flow stabilization cavity 51 includes an inlet 511 , an outer annular air chamber 512 , a notch 513 , a transition air chamber with uniformly distributed holes 514 , and an inner annular air chamber 515 , which are connected in sequence.

[0033] Another object of the present invention is to provide a method for polishing subsurface damage of oil-borne ice particles based on flow focusing; the polishing device for polishing subsurface damage of oil-borne ice particles based on flow focusing according to claim 7 comprises the following steps:

[0034] Step 1: Fix the polishing device of the present invention above the three-dimensional moving platform, and fix the workpiece to be polished on the three-dimensional moving platform;

[0035] Step 2: Finely adjust the coaxiality and distance between the nozzle 26 and the focusing hole of the focusing disk 44 using the micrometer head in the three-dimensional fine-tuning module 3. When adjusting the horizontal position of the nozzle 26, use a camera to observe the coaxiality of the nozzle 26 and the focusing hole in real time from the bottom of the device. When adjusting the vertical position of the nozzle 26, use the camera observation window 142, the supplementary light source window 144, and the length calibration ruler to adjust according to the set distance within the camera's field of view.

[0036] Step 3: First, high-pressure gas required for flow focusing is introduced into the focusing chamber 14 through the gas connector 141. Subsequently, a mixture of low-temperature oil-carried ice particles is delivered through the pump body 21 and ejected from the nozzle 26 through the capillary 24 and atomized.

[0037] Step 4: Activate the acoustic signal device 42 to start the external acoustic field control so that the ice particles are evenly distributed in the oil beam; introduce auxiliary gas into the gas flow stabilization cavity 51 through the auxiliary gas connector 52 to generate a uniform annular gas flow field that slows down the divergence of the jet beam;

[0038] Step 5: The workpiece to be polished is moved according to the set speed and trajectory with the help of a three-dimensional moving platform to complete the polishing work;

[0039] Step 6: After the polishing work is completed, first stop the pump body 21 from pumping the mixture of low-temperature oil and ice particles, and then stop the gas from entering the focusing cavity 14 and the gas stabilizing flow cavity 51.

[0040] The low-temperature oil-borne ice particles are formed by generating suspended small droplets of room-temperature water through an atomizer, solidifying into ice particles in the low-temperature environment provided by a condenser, and mixing with low-temperature oil in a mixing chamber. The mixed liquid of the low-temperature oil-borne ice particles is formed by mixing low-temperature oil and ice particles. The low-temperature oil can be silicone oil or gasoline. The diameter of the ice particles ranges from 0.01mm to 0.02mm, and the mixing ratio of ice particles in the oil is 5% to 30%.

[0041] The present invention provides a flow-focusing-based polishing device and method for subsurface damage of oil-borne ice particles, belonging to the technical field of subsurface damage polishing of ultra-precision optical components. The device includes a housing, a liquid phase delivery module, a three-dimensional fine-tuning module, an intracavity control module, and an auxiliary gas module. The three-dimensional fine-tuning module is provided with a normal micro-feed mechanism for a wedge-shaped moving pair and a matching wedge block height adjustment mechanism. The horizontal and vertical positions of the nozzle can be adjusted by the quantitative displacement of the differential head, thereby adjusting the coaxiality and distance between the nozzle and the focusing hole. The high-speed oil-borne ice particles are first homogenized by the acoustic field and then refined and ejected by the flow-focusing gas. An annular air chamber is provided at the outlet to slow the divergence of the jet beam, thereby forming a high-speed, slender jet beam of oil-borne ice particles. In summary, the present invention can be used for subsurface damage polishing of ultra-precision optical components, improve the laser damage threshold of optical components, and enhance the service performance of ultra-precision optical components.

[0042] The beneficial effects of the present invention are:

[0043] 1. The present invention uses a high-speed oil-loaded ice particle jet beam to polish subsurface damage, and adopts flow focusing technology to refine the oil-loaded ice particle jet beam to polish the material surface with a more stable removal function. The method is simple, low-cost, and has a good polishing effect.

[0044] 2. After the flow-focusing jet is formed, the present invention uses the auxiliary annular gas flow field to slow down the divergence of the jet beam;

[0045] 3. The normal micro-feed mechanism of the wedge-shaped moving pair of the present invention can achieve precise adjustment of the coaxiality between the nozzle and the focusing hole, and cooperate with the wedge-shaped height adjustment mechanism to adjust the distance between the nozzle and the focusing hole;

[0046] 4. The present invention adopts a modular design scheme with a compact structure, reasonable design, and coordinated work between functional modules, which is easy to integrate and maintain;

[0047] In summary, the present invention can be used for polishing ultra-precision optical elements, improving the laser damage threshold of optical elements, and enhancing the service performance of ultra-precision optical elements. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 Schematic diagram of the overall structure of the polishing device for subsurface damage of oil-borne ice particles based on flow focusing of the present invention;

[0049] Figure 2 2. It is a schematic diagram of the three-dimensional structure of the shell of the polishing device for oil-borne ice particle subsurface damage based on flow focusing of the present invention;

[0050] Figure 3 This is a schematic diagram of the three-dimensional structure of the liquid phase delivery module of the polishing device for oil-borne ice particle subsurface damage based on flow focusing of the present invention;

[0051] Figure 4 This is a schematic diagram of the overall structure of the three-dimensional fine-tuning module of the polishing device for oil-borne ice particle subsurface damage based on flow focusing of the present invention;

[0052] Figure 5 Schematic diagram of nozzle horizontal position adjustment of the polishing device for treating subsurface damage of oil-borne ice particles based on flow focusing of the present invention;

[0053] in Figure 5 (a) is the horizontal position of the nozzle, where Figure 5 (b) is the horizontal position of the nozzle II, where Figure 5 (c) is the horizontal position of the nozzle, Figure 5 (d) is the nozzle horizontal position IV;

[0054] Figure 6 It is a schematic diagram of the specific structure of the inner ring of the polishing device for oil-borne ice particle subsurface damage based on flow focusing of the present invention;

[0055] Figure 7 This is a schematic diagram of the specific structure of the intracavity control module of the polishing device for oil-borne ice particle subsurface damage based on flow focusing of the present invention;

[0056] Figure 8 This is a schematic diagram of the three-dimensional structure of the auxiliary gas module of the polishing device for oil-borne ice particle subsurface damage based on flow focusing of the present invention;

[0057] Figure 9 It is a schematic diagram of the oil-borne ice particle preparation process of the oil-borne ice particle subsurface damage polishing device based on flow focusing of the present invention.

[0058] In the attached figure:

[0059] 1. Housing; 11. Upper cover; 12. Outer ring; 121. Oblong through hole; 122. Circular hole I; 123. Dovetail groove I; 13. Sealing piece; 14. Focusing cavity; 141. Gas connector; 142. Observation window; 143. Device fixing threaded hole; 144. Supplementary light source window; 145. Focusing disk groove;

[0060] 2. Liquid phase delivery module; 21. Pump body; 22. Delivery tube; 23. Connector; 24. Capillary tube; 25. Capillary tube fixing block; 251. Horizontal adjustment working slope I; 252. Horizontal adjustment working slope II; 253. Horizontal adjustment working slope III; 254. Horizontal adjustment working slope IV; 26. Nozzle;

[0061] 3. Three-dimensional fine-tuning module; 31. Spring; 32. Inner ring; 321. Circular hole II; 322. Dovetail groove II; 323. Vertical adjustment working inclined plane; 33. Horizontal adjustment wedge block; 34. Horizontal adjustment differential head; 35. Vertical adjustment wedge block; 36. Vertical adjustment differential head;

[0062] 4. Intracavity control module; 41. Flexible sealing ring; 42. Acoustic signal device; 43. Focusing gas adjustment block; 44. Focusing disk;

[0063] 5. Auxiliary gas module; 51. Gas flow stabilization cavity; 511. Inlet; 512. Outer annular air chamber; 513. Notch; 514. Uniformly distributed hole transition air chamber; 515. Inner annular air chamber; 52. Auxiliary gas connector. DETAILED DESCRIPTION

[0064] The present invention will be further described clearly and completely below with reference to the accompanying drawings and specific embodiments. The embodiments described below are only some embodiments of the present invention.

[0065] Example 1

[0066] See attached Figure 1 -Attached Figure 8 , a polishing device for oil-borne ice particle subsurface damage based on flow focusing, comprising: a shell 1, a liquid phase delivery module 2, a three-dimensional fine-tuning module 3, an intracavity control module 4, and an auxiliary gas module 5;

[0067] The housing 1 comprises an upper cover 11, an outer ring 12, a sealing sheet 13 and a focusing cavity 14 which are connected in sequence;

[0068] The liquid phase delivery module 2 includes a pump body 21, a delivery pipe 22, a connector 23, a capillary 24, a capillary fixing block 25, and a nozzle 26;

[0069] The pump body 21 is connected to one end of the capillary tube 24 via a transmission tube 22 and a connector 23, and can transport a low-temperature oil-carrying ice particle mixture into the capillary tube 24; the nozzle 26 is fixedly connected to the other end of the capillary tube 24, and the diameter of the nozzle 26 is between 0.1-1mm; the middle of the capillary tube 24 is sleeved and fixedly connected to a capillary tube fixing block 25;

[0070] The capillary fixing block 25 is a cross-beveled end surface structure, on which are provided a horizontal adjustment working bevel I 251, a horizontal adjustment working bevel II 252, a horizontal adjustment working bevel III 253, and a horizontal adjustment working bevel IV 254; the horizontal adjustment working bevels are parallel to each other, and the projection of the intersection of the four bevels forms a "rhombus";

[0071] The three-dimensional fine-tuning module 3 includes a spring 31, an inner ring 32, a horizontal adjustment wedge block 33, a horizontal adjustment differential head 34, a vertical adjustment wedge block 35 and a vertical adjustment differential head 36;

[0072] The capillary tube 24 vertically passes through the upper cover 11, the inner ring 32, and the middle of the outer ring 12 from top to bottom with a certain margin; the lower part of the capillary tube 24 enters the focusing cavity 14 through the flexible sealing ring 41 of the intra-cavity control module 4;

[0073] The inner ring 32 is in the shape of a cylindrical groove, and the lower end surface of the capillary fixing block 25 is slidably connected to the inner lower part of the inner ring 32;

[0074] The upper end of the inner ring 32 is connected to the upper cover 11 via a spring 31. The spring 31 is in a compressed state and is used to absorb small vibrations generated during fluid transmission and to achieve adaptive adjustment of the device in the vertical direction.

[0075] The lower part of the inner ring 32 is provided with two symmetrical downwardly inclined vertical adjustment working inclined surfaces 323, and the vertical adjustment working inclined surfaces 323 are connected to the inclined surface of the upper part of the vertical adjustment wedge block 35;

[0076] The vertical adjustment wedge block 35 is slidably arranged in the dovetail groove 123 symmetrically arranged on the inner lower part of the outer ring 12;

[0077] The vertical adjustment differential head 36 is provided outside the vertical adjustment wedge block 35 and fixed to the circular hole I 122 of the outer ring 12; the top of the vertical adjustment differential head 36 is fixedly connected to the outer end of the vertical adjustment wedge block 35, and the vertical adjustment differential head 36 on both sides can be rotated to adjust the raising and lowering of the inner ring 32, thereby achieving precise adjustment of the vertical position of the nozzle 26;

[0078] The inner lower portion of the inner ring 32 is provided with four dovetail grooves II 322, each of which is slidably connected to a horizontal adjustment wedge block 33; the inclined surface of the inner end of the horizontal adjustment wedge block 33 is sequentially connected to the horizontal adjustment working inclined surface of the capillary fixing block 25;

[0079] The outer ends of the horizontal adjustment wedge blocks 33 are fixedly connected to the tops of the horizontal adjustment differential heads 34. The four horizontal adjustment differential heads 34 are fixed on the circular holes II 321 evenly distributed around the inner ring 32.

[0080] The outer ring 12 is provided with oblong through holes 121 evenly distributed around it, providing moving space for the horizontal adjustment differential head 34 during vertical adjustment; the horizontal position of the capillary fixing block 25 can be adjusted by rotating the four horizontal adjustment differential heads 34 to achieve precise adjustment of the horizontal position of the nozzle 26; in summary, the spatial position of the nozzle can be precisely controlled by the three-dimensional fine-tuning module 3.

[0081] The slope of the horizontal adjustment working inclined plane is λ1, and the slope of the vertical adjustment working inclined plane 323 is λ2;

[0082] The adjustment range ∆L of the horizontal / vertical adjustment wedge is calculated as follows: ∆L=L·λ i (i is 1 or 2); where L is the input displacement of the differential head, λ i To adjust the slope of the working slope horizontally / vertically; in this embodiment, the slope of the slope λ 1、 λ2 is set to 0.025, thereby achieving precise control of the nozzle position.

[0083] The focusing cavity 14 is a cylindrical sealed cavity, which includes a gas connector 141, a camera observation window 142, a device fixing threaded hole 143 and a supplementary light source window 144 evenly distributed on all sides; a focusing disk groove 145 is provided at the bottom of the focusing cavity 14; when working, gas is introduced into the focusing cavity 14 through the gas connector 141.

[0084] The intracavity control module 4 includes a flexible sealing ring 41, an acoustic signal device 42, a focusing gas adjustment block 43 and a focusing disk 44;

[0085] The flexible sealing ring 41 is tapered downward, with its upper and lower ends sealedly connected to the bottom of the outer ring 12 and the capillary tube 24, respectively, to ensure the sealing of the space inside the focusing cavity 14 while also providing a certain degree of support.

[0086] The flexible sealing ring 41 is made of a flexible material and can be flexibly deformed as the three-dimensional fine-tuning module 3 is adjusted. In actual manufacturing, the material can be selected from natural rubber, nitrile rubber, polyurethane rubber and other materials with good elasticity and made by injection molding.

[0087] The acoustic signal device 42 is mounted on the outer wall of the capillary tube 24 and controls the external acoustic field (energy field) to uniformly distribute the ice particles in the low-temperature oil stream.

[0088] The focusing gas adjustment block 43 is fixed to the bottom of the focusing chamber 14, and has a downward tapered slope at its center that is the same as the slope of the outer surface of the nozzle 26, thereby improving the uniformity of the focusing gas flow field.

[0089] The focusing disk 44 is placed in the focusing disk groove 145 and has a focusing hole at its center.

[0090] The diameter of the focusing hole of the focusing disk 44 is between 0.05-0.8 mm and is smaller than the diameter of the nozzle 26 , depending on actual working conditions.

[0091] The auxiliary gas module 5 is arranged on the lower side of the focusing cavity 14, and a jet hole is opened in the center, which is opposite to the focusing hole of the focusing disk 44; the auxiliary gas module 5 includes an annular gas flow stabilization cavity 51 and an auxiliary gas connector 52; when working, gas is introduced into the gas flow stabilization cavity 51 through the auxiliary gas connector 52.

[0092] The gas flow stabilization cavity 51 includes an inlet 511, an outer annular air chamber 512, a notch 513, a uniformly distributed hole transition air chamber 514, and an inner annular air chamber 515, which are connected in sequence. During operation, the gas passes through the annular gas flow stabilization cavity 51 through a double-layer multi-channel gas design to form a uniform annular gas flow field, thereby maintaining the stability of the jet beam.

[0093] Example 2

[0094] In some embodiments, the horizontal adjustment differential head 34 and the vertical adjustment differential head 36 can use electric differential heads or other electrically controlled precision telescopic actuators, which are linked and controlled by a controller to accurately adjust the spatial position of the nozzle according to actual processing conditions.

[0095] The present invention also provides a polishing method for subsurface damage of oil-borne ice particles based on flow focusing, which uses the polishing device of the above specific embodiment and includes the following steps:

[0096] Step 1: Fix the polishing device of the present invention above the three-dimensional moving platform, and fix the workpiece to be polished on the three-dimensional moving platform;

[0097] Step 2: Finely adjust the coaxiality and distance between the nozzle 26 and the focusing hole of the focusing disk 44 using the differential head in the three-dimensional fine-tuning module 3. During adjustment, a camera is used to observe the coaxiality between the nozzle 26 and the focusing hole of the focusing disk 44 in real time from the bottom of the device. The normal micro-feed mechanism of the wedge-shaped moving pair achieves quantitative adjustment of the horizontal position of the nozzle 26 by rotating the differential head. Using the camera observation window 142, the supplementary light source window 144, and the length calibration ruler, the vertical adjustment differential head 36 is rotated to finely adjust the distance between the nozzle 26 and the focusing disk 44 according to the set distance in the camera field of view through the vertical adjustment wedge block 35.

[0098] Step 3: First, the focusing chamber 14 is connected to the high-pressure gas required for flow focusing through the gas connector 141. Subsequently, the low-temperature oil-carrying ice particle mixture is pumped through the pump body 21 and ejected from the nozzle 26 through the capillary 24 of the liquid phase delivery module 2. During this process, the high-pressure gas acts as a flow focusing agent, which can refine the jet beam of oil-carrying ice particles.

[0099] Step 4: Activate the acoustic signal device 42 to start the external acoustic field (energy field) control of the oil-borne ice particle jet beam, so that the ice particles are evenly distributed in the oil beam. The gas flow stabilization cavity 51 is connected to the auxiliary gas through the auxiliary gas connector 52 to generate a uniform annular gas flow field that slows down the divergence of the jet beam, so that the oil-borne ice particle jet beam can polish the sub-surface damage of the optical component with a more stable removal function.

[0100] Step 5: The workpiece to be polished is moved according to the set speed and trajectory with the help of a three-dimensional moving platform to complete the polishing work;

[0101] Step 6: After the polishing work is completed, first stop the pump body 21 from pumping the mixture of low-temperature oil and ice particles, and then stop the gas from entering the focusing cavity 14 and the gas stabilizing flow cavity 51.

[0102] In the above steps, the low-temperature oil-borne ice particles are formed by generating suspended small droplets of room-temperature water through an atomizer, solidifying into ice particles in the low-temperature environment provided by the condenser, and mixing with low-temperature oil in a mixing chamber. The low-temperature oil can be silicone oil or gasoline. The diameter of the ice particles ranges from 0.01mm to 0.02mm, and the mixing ratio of ice particles in the oil is 5% to 30%, which is selected according to the actual polishing working conditions.

Claims

1. A polishing device for subsurface damage of oil-borne ice particles based on flow focusing, characterized in that: include: Shell (1), liquid phase delivery module (2), three-dimensional fine-tuning module (3), intracavity control module (4), auxiliary gas module (5); The housing (1) comprises an upper cover (11), an outer ring (12), a sealing sheet (13) and a focusing cavity (14) which are connected in sequence; The intracavity control module (4) comprises a flexible sealing ring (41), an acoustic signal device (42), a focusing gas adjustment block (43) and a focusing disk (44); The auxiliary gas module (5) is arranged on the lower side of the focusing cavity (14), and has a jet hole in the center, which is opposite to the focusing hole of the focusing disk (44); The liquid phase delivery module (2) comprises a pump body (21), a delivery pipe (22), a connector (23), a capillary tube (24), and a nozzle (26) connected in sequence, and also comprises a capillary tube fixing block (25) sleeved and fixedly connected to the capillary tube (24); The pump body (21) transports the low-temperature oil-carrying ice particle mixture into the capillary tube (24) via the transmission tube (22); The capillary fixing block (25) is a cross-bevel end surface structure, and is provided with two mutually parallel horizontal adjustment working bevels, and the projection of the intersection of the four bevels forms a "rhombus"; The three-dimensional fine-tuning module (3) includes a spring (31), an inner ring (32), a horizontal adjustment wedge block (33), a horizontal adjustment differential head (34), a vertical adjustment wedge block (35) and a vertical adjustment differential head (36); The capillary tube (24) vertically passes through the middle of the upper cover (11), the inner ring (32), and the outer ring (12) from top to bottom with a margin; the lower part of the capillary tube (24) enters the focusing cavity (14) through the flexible sealing ring (41) of the intracavity control module (4); The inner ring (32) is in a columnar groove shape, and the lower end surface of the capillary fixing block (25) is slidably connected to the inner lower part of the inner ring (32); the upper end of the inner ring (32) is connected to the upper cover (11) through a spring (31), and the spring (31) is in a compressed state; The lower portion of the inner ring (32) is provided with two symmetrical downwardly inclined vertical adjustment working inclined surfaces (323), and the vertical adjustment working inclined surfaces (323) are connected to the inclined surface of the upper portion of the vertical adjustment wedge block (35); The vertical adjustment wedge block (35) is slidably arranged in a dovetail groove chute I (123) symmetrically arranged on the inner lower part of the outer ring (12); The vertical adjustment differential head (36) is arranged outside the vertical adjustment wedge block (35) and fixed on the outer ring 12; the top of the vertical adjustment differential head (36) is fixedly connected to the outer end of the vertical adjustment wedge block (35), and the vertical adjustment differential head (36) can be rotated to adjust the inner ring (32) to rise and fall, thereby adjusting the vertical position of the nozzle (26); The inner lower part of the inner ring (32) is evenly provided with four dovetail grooves II (322), in which a horizontal adjustment wedge block (33) is slidably connected; the inclined surface of the inner end of the horizontal adjustment wedge block (33) is connected in sequence with the horizontal adjustment working inclined surface of the capillary fixing block (25); The outer ends of the horizontal adjustment wedge blocks (33) are fixedly connected to the tops of the horizontal adjustment differential heads (34), and the four horizontal adjustment differential heads (34) pass through the outer ring (12) and are fixed around the inner ring (32); by rotating the horizontal adjustment differential heads (34), the horizontal position of the capillary fixing block (25) can be adjusted, thereby adjusting the horizontal position of the nozzle (26).

2. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 1, characterized in that: The slope of the horizontal adjustment working inclined plane is λ1, and the slope of the vertical adjustment working inclined plane (323) is λ2; The adjustment range ∆L of the horizontal / vertical adjustment wedge is calculated as follows: ∆L=L·λ i ,E,i takes 1 or 2; where L is the differential head input displacement, λ i Adjust the inclination of the working surface for horizontal / vertical adjustment.

3. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 2, characterized in that: The nozzle (26) has a diameter between 0.1 and 1 mm.

4. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 1, 2 or 3, characterized in that: The focusing cavity (14) is a cylindrical sealed cavity, on which a gas connector (141), a camera observation window (142) and a supplementary light source window (144) are provided; and a focusing disc groove (145) is provided at the bottom of the focusing cavity (14).

5. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 4, characterized in that: The flexible sealing ring (41) is in a downward cone shape, and its upper and lower ends are respectively sealed with the bottom of the outer ring (12) and the capillary tube (24), thereby ensuring the sealing of the focusing cavity (14) space and playing a certain supporting role; The flexible sealing ring (41) can be flexibly deformed as the three-dimensional fine-tuning module (3) is adjusted; The acoustic signal device (42) is sleeved on the outer wall of the capillary tube (24); The focusing gas regulating block (43) is fixed to the bottom of the focusing cavity (14), and a downward conical inclined surface is provided at the center thereof with the same inclination as the outer surface of the nozzle (26); The focusing disc (44) is placed in the focusing disc groove (145), and a focusing hole is provided at the center thereof.

6. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 5, characterized in that: The diameter of the focusing hole of the focusing disk (44) is between 0.05 and 0.8 mm, and is smaller than the diameter of the nozzle (26).

7. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 6, characterized in that: The auxiliary gas module (5) comprises an annular gas flow stabilization cavity (51) and an auxiliary gas connector (52).

8. The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 7, characterized in that: The gas flow stabilization cavity (51) comprises an inlet (511), an outer annular air chamber (512), a notch (513), a uniformly distributed hole transition air chamber (514), and an inner annular air chamber (515), which are connected in sequence.

9. A polishing method for subsurface damage of oil-borne ice particles based on flow focusing, characterized by: The polishing device for subsurface damage of oil-borne ice particles based on flow focusing according to claim 8 comprises the following steps: Step 1: Fix the polishing device for subsurface damage of oil-borne ice particles based on flow focusing as claimed in claim 8 above a three-dimensional moving platform, and fix the workpiece to be polished on the three-dimensional moving platform; Step 2: Finely adjust the coaxiality and distance between the nozzle (26) and the focusing hole of the focusing disk (44) by using the micrometer head in the three-dimensional fine-tuning module (3); when adjusting the horizontal position of the nozzle (26), use a camera to observe the coaxiality of the nozzle (26) and the focusing hole in real time from the bottom of the device; when adjusting the vertical position of the nozzle (26), use the camera observation window (142), the supplementary light source window (144) and the length calibration ruler to adjust according to the set distance under the camera field of view; Step 3: First, high-pressure gas required for flow focusing is introduced into the focusing cavity (14) through the gas connector (141); then, a mixture of low-temperature oil-carrying ice particles is transported through the pump body (21), ejected from the nozzle (26) through the capillary (24), and refined; Step 4: Activate the acoustic signal device (42) and start the external acoustic field control to evenly distribute the ice particles in the oil beam; introduce auxiliary gas into the gas flow stabilization cavity (51) through the auxiliary gas connector (52) to generate a uniform annular gas flow field that slows down the divergence of the jet beam; Step 5: The workpiece to be polished is moved according to the set speed and trajectory with the help of a three-dimensional moving platform to complete the polishing work; Step 6: After the polishing work is completed, the pump body (21) is stopped from pumping the mixture of low-temperature oil and ice particles, and then the gas is stopped from being introduced into the focusing cavity (14) and the gas stabilizing cavity (51).

10. The method for polishing subsurface damage of oil-borne ice particles based on flow focusing according to claim 9, characterized in that: The low-temperature oil-carrying ice particle mixture is formed by mixing low-temperature oil and ice particles. The low-temperature oil is silicone oil or gasoline. The diameter of the ice particles ranges from 0.01mm to 0.02mm, and the mixing ratio of ice particles in the oil is 5% to 30%.

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