Laser-assisted focusing system and image measuring instrument

Abstract

The invention provides a laser-assisted focusing system and an image measuring instrument, and belongs to the field of industrial vision, the laser-assisted focusing system comprises a laser height measurement assembly, a lens assembly, a light source assembly and a focusing processor; the lens assembly is used for detecting the quantity of the to-be-detected piece; the laser height measurement assembly is arranged on the periphery of the bottom of the lens assembly and used for collecting height information of the to-be-measured piece. The light source assembly is arranged at the bottom of the lens assembly; an acquisition light path of the lens assembly penetrates through a middle avoiding hole of the light source assembly; the focusing processor is in telecommunication connection with the laser height measurement assembly, the lens assembly and the light source assembly, and the focusing processor adjusts the overall height of the lens assembly based on height information transmitted by the laser height measurement assembly to achieve auxiliary focusing. The laser height measurement auxiliary focusing is adopted, the focusing efficiency is improved, the occupied space is small, and popularization and application in the fields of industrial quantity detection such as image measurement and semiconductor detection are facilitated.

Description

Technical Field

[0001] The present invention belongs to the field of industrial vision, and in particular relates to a laser-assisted focusing system and an image measuring instrument. Background Art

[0002] With the upgrading of the manufacturing industry, the demand for high-magnification and high-precision measurements is increasing. The large number of focusing scenarios involved in measurement (such as in the semiconductor, optical communications, and micro-assembly industries) results in longer measurement times and lower measurement efficiency. Currently, conventional laser focusing systems on the market use built-in auxiliary laser focusing, which is more compact. However, as the laser passes through multiple lenses, its intensity decreases, resulting in poor focusing on some samples (such as rough samples). Built-in laser focusing systems are also sensitive to product materials.

[0003] Therefore, it is necessary to design a focusing system that can both effectively focus and reduce measurement time. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the present invention aims to provide a laser-assisted focusing system and an image measuring instrument, which can solve the above-mentioned problems.

[0005] Design principle: On the basis of the original lens assembly, an independent height measurement mechanism is added, such as a laser displacement sensor, a spectral displacement sensor, etc., which quickly and efficiently predicts the height information and feeds it back to the processor to adjust the lifting unit, thereby providing auxiliary focusing for the final focusing and improving the overall focusing efficiency.

[0006] A laser-assisted focusing system comprises a laser altimeter assembly, a lens assembly, a light source assembly and a focusing processor; the lens assembly is used to detect the amount of a workpiece to be measured; the laser altimeter assembly is arranged at the periphery of the bottom of the lens assembly, and is used to collect height information of the workpiece to be measured; the light source assembly is arranged at the bottom of the lens assembly, and the collection light path of the lens assembly passes through the central avoidance hole of the light source assembly; the focusing processor is electrically connected to the laser altimeter assembly, the lens assembly and the light source assembly, and the focusing processor adjusts the overall height of the lens assembly based on the height information transmitted by the laser altimeter assembly to achieve assisted focusing.

[0007] Furthermore, the laser altimeter assembly includes a laser transmitting terminal and a laser receiving terminal arranged relatively on the periphery of the lower end of the lens assembly, and the laser output light path of the laser transmitting terminal and the receiving light path of the laser receiving terminal both intersect with the output light path of the lens assembly at one point.

[0008] Furthermore, the lens assembly includes a camera, a lens barrel and a zoom lens arranged from top to bottom; a zoom motor is connected to the zoom lens, and a lens light source is arranged on the periphery of the lower part of the zoom lens.

[0009] Furthermore, the light source assembly includes a light source upper cover plate, a surface light source and a light source peripheral plate; the surface light source with an avoidance hole in the middle is arranged on the inner side of the light source peripheral plate, emitting the light source downward; the light source upper cover plate with an installation hole in the middle is buckled on top of the light source peripheral plate.

[0010] Furthermore, laser avoidance notches are relatively provided on the periphery of the light source peripheral plate to avoid the optical paths of the laser transmitting terminal and the laser receiving terminal.

[0011] The present invention also provides an image measuring instrument, which includes a base frame, a carrier, a lateral movement module, a lifting drive module and a laser-assisted focusing system based on the above-mentioned; the laser-assisted focusing system is arranged on the lifting drive module, and the lens barrel of the laser-assisted focusing system is connected to the lifting adapter plate of the lifting drive module through a lens barrel clamp block; the top of the light source assembly is connected to the lifting adapter plate of the lifting drive module through a light source adapter block; the focusing processor stimulates the lifting drive module to lift and lower to achieve assisted focusing based on the height information transmitted by the laser height measurement assembly.

[0012] Compared with the existing technology, the beneficial effects of the present invention are: the present application adopts laser height measurement to assist focusing, which improves focusing efficiency, occupies less space, and is convenient for promotion and application in fields such as industrial quantity detection including image measurement and semiconductor detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 and Figure 2 Schematic diagram of different viewing angles of the laser-assisted focusing system of this application; Figure 3 is a schematic diagram of a lens assembly; Figure 4 is a schematic diagram of a light source assembly; Figure 5 Schematic diagram of the image measuring instrument.

[0014] In the figure, 11. Laser receiving terminal; 12. Laser sending terminal; 21. Camera; 22. Lens barrel; 23. Zoom lens; 24. Zoom motor; 25. Lens light source; 26. External adapter tube; 27. Lens barrel clamp; 31. Light source upper cover; 32. Surface light source; 33. Light source peripheral plate; 34. Laser mounting portion; 35. Laser avoidance notch; 36. Light source adapter block; 4. Lift and transfer the vertical board. DETAILED DESCRIPTION

[0015] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0016] Laser-assisted focusing system A laser-assisted focusing system, see Figure 1-Figure 4 The laser-assisted focusing system includes a laser height measurement component, a lens component, a light source component and a focusing processor.

[0017] The lens assembly is used for quantitative detection of the workpiece to be tested.

[0018] The laser height measuring component is arranged on the periphery of the bottom of the lens component and is used to collect the height information of the object to be measured.

[0019] The light source assembly is arranged at the bottom of the lens assembly, and the collecting light path of the lens assembly passes through the middle avoidance hole of the light source assembly.

[0020] The focusing processor is electrically connected to the laser altimeter assembly, the lens assembly, and the light source assembly. Based on the height information transmitted by the laser altimeter assembly, the focusing processor adjusts the overall height of the lens assembly to achieve auxiliary focusing.

[0021] Among them, the laser altimeter assembly includes a laser transmitting terminal 12 and a laser receiving terminal 11 which are arranged relatively on the outer periphery of the lower end of the lens assembly. The laser output light path of the laser transmitting terminal 12 and the receiving light path of the laser receiving terminal 11 both intersect with the output light path of the lens assembly at one point.

[0022] Among them, see Figure 3 The lens assembly includes a camera 21, a lens barrel 22 and a zoom lens 23 arranged from top to bottom; a zoom motor 24 is connected to the zoom lens 23, and a lens light source 25 is set on the lower periphery of the zoom lens 23.

[0023] The working distance of the lens assembly coincides with the laser zero position. The software calibrates to make the focusing more accurate. By obtaining the change in position height information, it drives the lifting drive module to complete precise focusing.

[0024] Of course, the zoom lens 23 itself may have a focusing range or a measuring height travel range, and the final focusing is completed by the overall lifting and lowering of the lens assembly and the precise focusing of the zoom lens 23 .

[0025] The laser altimeter assembly is not bound to the lens assembly (not fixedly connected). Therefore, the laser altimeter assembly can be used with lens assemblies used in various types of measuring instruments. The zoom working distance of the lens assembly is not limited. It only needs to ensure that the working distance of the lens assembly is consistent with the working distance of the laser altimeter assembly.

[0026] Furthermore, an external adapter tube 26 is provided at the end of the zoom lens 23 for connecting to a light source assembly.

[0027] Overall, the laser height measurement component is suitable for measuring the height of glass, ceramics, metal, plastic, etc.

[0028] Among them, see Figure 4 The light source assembly includes a light source upper cover plate 31, a surface light source 32 and a light source peripheral plate 33; the surface light source 32 with a avoidance hole in the middle is arranged on the inner side of the light source peripheral plate 33, emitting light downward; the light source upper cover plate 31 with a mounting hole in the middle is buckled on top of the light source peripheral plate 33.

[0029] In the illustrated example, the surface light source 32 adopts a ring light or a dome light source, and adopts a ring array LED lamp bead structure.

[0030] Furthermore, the light source upper cover plate 31 is connected to the external adapter tube 26 of the lens assembly at the mounting hole.

[0031] Furthermore, a group of laser mounting portions 34 are relatively provided on the outer periphery of the light source upper cover 31 for connecting the laser transmitting terminal 12 and the laser receiving terminal 11 .

[0032] Furthermore, laser avoidance notches 35 are provided on the periphery of the light source peripheral plate 33 to avoid the optical paths of the laser transmitting terminal 12 and the laser receiving terminal 11 .

[0033] Image measuring instrument An image measuring instrument, see Figure 5 , including a base frame, a stage, a lateral movement module, a lifting drive module and a laser-assisted focusing system based on the aforementioned.

[0034] The laser assisted focusing system is arranged on the lifting drive module, and the lens barrel 22 of the laser assisted focusing system is connected to the lifting adapter plate 4 of the lifting drive module through the lens barrel clamp block 27; the top of the light source assembly is connected to the lifting adapter plate 4 of the lifting drive module through the light source adapter block 36; the focusing processor stimulates the lifting drive module to lift and lower to achieve assisted focusing based on the height information transmitted by the laser altimeter assembly.

[0035] The laser-assisted focusing system of this application reduces the overall focusing time from over 2 seconds to less than 1 second, significantly improving focusing efficiency and enabling high-volume, high-efficiency testing. Furthermore, not only is focusing speed improved, but its focus repeatability and stability are also superior to image focusing. The auxiliary laser also has conventional laser functions, enabling Z-axis height measurement and other functions.

[0036] In summary, the laser-assisted focusing system can effectively solve the problem of long measurement time caused by a large number of focusing scenes during measurement. Compared with image focusing, laser-assisted focusing can shorten the measurement time by more than 1 times, greatly improving measurement efficiency.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A laser-assisted focusing system, characterized in that: The laser-assisted focusing system includes a laser height measurement component, a lens component, a light source component and a focusing processor; The lens assembly is used for measuring the quantity of the workpiece to be measured; The laser height measuring assembly is arranged on the periphery of the bottom of the lens assembly and is used to collect height information of the object to be measured; The light source assembly is arranged at the bottom of the lens assembly, and the light collecting path of the lens assembly passes through the middle avoidance hole of the light source assembly; The focusing processor is electrically connected to the laser altimeter assembly, the lens assembly, and the light source assembly. The focusing processor adjusts the overall height of the lens assembly based on the height information transmitted by the laser altimeter assembly to achieve auxiliary focusing.

2. The laser-assisted focusing system according to claim 1, wherein: The laser altimeter assembly comprises a laser transmitting terminal (12) and a laser receiving terminal (11) which are arranged relative to each other on the outer periphery of the lower end of the lens assembly, wherein the laser emission light path of the laser transmitting terminal (12) and the receiving light path of the laser receiving terminal (11) both intersect with the emission light path of the lens assembly at one point.

3. The laser-assisted focusing system according to claim 2, wherein: The lens assembly comprises a camera (21), a lens barrel (22) and a zoom lens (23) arranged from top to bottom; a zoom motor (24) is connected to the zoom lens (23), and a lens light source (25) is arranged on the outer periphery of the lower part of the zoom lens (23).

4. The laser-assisted focusing system according to claim 3, wherein: An external adapter tube (26) is also provided at the end of the zoom lens (23) for connecting to the light source assembly.

5. The laser-assisted focusing system according to claim 4, wherein: The light source assembly comprises a light source upper cover plate (31), a surface light source (32) and a light source peripheral plate (33); the surface light source (32) with a middle avoidance hole is arranged inside the light source peripheral plate (33) and emits the light source downward; the light source upper cover plate (31) with a middle mounting hole is buckled above the light source peripheral plate (33).

6. The laser-assisted focusing system according to claim 5, wherein: The light source upper cover plate (31) is connected to the external adapter tube (26) of the lens assembly at the mounting hole.

7. The laser-assisted focusing system according to claim 5, wherein: A group of laser mounting portions (34) are also arranged opposite to each other on the outer periphery of the light source upper cover plate (31) for connecting the laser transmitting terminal (12) and the laser receiving terminal (11).

8. The laser-assisted focusing system according to claim 5, wherein: Laser avoidance notches (35) are arranged opposite to each other on the periphery of the light source peripheral plate (33) to avoid the optical paths of the laser transmitting terminal (12) and the laser receiving terminal (11).

9. An image measuring instrument, characterized in that: The image measuring instrument comprises a chassis, a stage, a traverse module, a lifting drive module and a laser-assisted focusing system according to any one of claims 1 to 8; The laser auxiliary focusing system is arranged on the lifting drive module, and the lens barrel (22) of the laser auxiliary focusing system is connected to the lifting transfer plate (4) of the lifting drive module through the lens barrel clamp block (27); the top of the light source assembly is connected to the lifting transfer plate (4) of the lifting drive module through the light source transfer block (36); the focusing processor stimulates the lifting drive module to lift and lower based on the height information transmitted by the laser height measurement assembly to achieve auxiliary focusing.

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