A cassette handling apparatus

Abstract

Embodiments of the present application provide a cassette processing device, and relate to the technical field of semiconductor container processing technology. The cassette loading frame provided by the present application comprises a frame body and a rotating assembly. The frame body has at least a first loading space and a second loading space arranged from top to bottom. The first loading space is used for accommodating a cover body, and the second loading space is used for accommodating a box body. The rotating assembly is located in the first loading space and comprises a mounting frame and a rotating frame rotatably connected with the mounting frame. The rotating frame has at least one accommodating space for accommodating the cover body. The rotating frame can drive the cover body to rotate under the action of an external force, so that the cleaning liquid is separated from the cover body. The cassette processing device comprises a cleaning mechanism, a drying mechanism and the aforementioned cassette loading frame. The present application has the effect of facilitating the discharge of the cleaning liquid inside and outside the cover body, thereby facilitating the drying of the cover body.

Description

Technical Field

[0001] This invention relates to the field of semiconductor container processing technology, and more specifically, to a wafer cassette processing apparatus. Background Technology

[0002] In the semiconductor manufacturing industry, wafer storage and transportation are crucial. To simplify transportation and minimize the risk of contamination, wafers are typically stored in wafer cassettes. However, after semiconductor devices undergo various processes, various contaminants are generated on the surface of the semiconductor devices, which can contaminate the wafers while they are stored in the wafer cassettes. Therefore, the wafer cassettes need to be cleaned regularly.

[0003] Currently, cleaning is performed by fixing the box and cover to the cleaning carrier. However, due to the irregular structure inside and outside the cover, the cleaning fluid is not easy to drain from inside and outside the cover. As a result, when the wafers are stored in the wafer cassette, the cleaning fluid from the cover will drip onto the wafers. Summary of the Invention

[0004] The present invention aims to provide a wafer cassette processing device that facilitates the discharge of cleaning fluid from inside and outside the cover body, preventing the cleaning fluid on the cover body from contaminating the wafers inside the cassette.

[0005] The embodiments of the present invention can be implemented as follows:

[0006] This invention provides a tablet cassette processing device, comprising a cleaning mechanism, a drying mechanism, a rotating mechanism, and a tablet cassette loading rack. The tablet cassette includes a body and a lid, the lid being hollow and having an irregular internal structure, with windows on both sides. The cleaning mechanism is used to rinse the body and lid on the tablet cassette loading rack. The drying mechanism is used to blow air towards the tablet cassette loading rack to dry the body and lid. The tablet cassette loading rack is disposed on the rotating mechanism and is capable of rotating around the vertical central axis of the rotating mechanism. The tablet cassette loading rack includes:

[0007] The frame has at least a first loading space and a second loading space arranged from top to bottom, the first loading space being used to accommodate the cover and the second loading space being used to accommodate the box.

[0008] The rotating assembly, located within the first loading space, includes a mounting frame and a rotating frame rotatably connected to the mounting frame. The rotating frame has at least one receiving space for accommodating the cover, and the rotating frame is capable of rotating the cover under the action of the drying mechanism to separate the cleaning liquid from the cover.

[0009] In an optional embodiment, one side of the rotating frame is an open side, and the rotating assembly further comprises a first limiting member, the first limiting member comprises a fixed limiting rod arranged in a first direction and a locking member arranged in a second direction at the open side of the rotating frame, the locking member is movable under external force to have a limiting state and a turning-out state;

[0010] When the locking member is in the limiting state, the locking member and the fixed limiting rod jointly limit the cover in the accommodating space; when the locking member is in the turning-out state, the cover can enter and exit the accommodating space from the open side.

[0011] In an optional embodiment, the locking member comprises a locking portion and an elastic member, one end of the elastic member is connected with the locking portion, and the other end of the elastic member is connected with the fixed limiting rod;

[0012] When the elastic member is in a natural state, the locking member is in the limiting state, and the locking portion and the fixed limiting rod jointly limit the cover in the accommodating space.

[0013] In an optional embodiment, the locking member further comprises a connecting sleeve connected with the fixed limiting rod, at least part of the elastic member is located in the connecting sleeve, and the locking portion can drive the elastic member to move along the connecting sleeve under external force to switch between the limiting state and the turning-out state.

[0014] In an optional embodiment, a first docking portion is arranged at one end of the connecting sleeve close to the locking member;

[0015] A second docking portion adapted to the first docking portion is arranged on the locking member, and the first docking portion and the second docking portion are engaged when the locking member is in the limiting state.

[0016] In an optional embodiment, the rotating assembly further comprises a second limiting member, the second limiting member comprises a U-shaped limiting block located in the accommodating space, and a plurality of the limiting blocks jointly hold the cover.

[0017] In an optional embodiment, a plurality of counterweights are arranged on the rotating frame.

[0018] In an optional embodiment, a blocking rod is movably arranged on one side of the mounting frame, and a limiting slot is arranged on the rotating frame, when the rotating frame is turned to the position where the limiting slot is opposite to the blocking rod, the blocking rod can be arranged in the limiting slot to limit the rotation of the rotating frame.

[0019] In an optional embodiment, a blade is arranged on the rotating frame, and the drying mechanism can drive the blade to rotate the rotating frame.

[0020] The cassette loading rack and the cassette processing device provided by the embodiment of the present application have the following advantages:

[0021] By arranging the rack body and the rotating assembly on the rack body, the rack body can fix the box body and the cover body respectively, and dry the box body and the cover body respectively. The rotating frame of the rotating assembly is rotatably connected to the mounting frame, and the cover body is fixed into the accommodating space in the rotating frame. By driving the rotating frame to rotate, the centrifugal force generated by the rotating frame can shake out the cleaning liquid in the cover body which is not easy to be discharged under normal conditions. When the cover body is covered on the box body, the cleaning liquid will not drop on the wafer in the box body, and the wafer in the box body is prevented from being secondarily polluted by the cover body. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0023] Figure 1 The figure is a schematic view of the external structure of the cover body;

[0024] Figure 2 The figure is a schematic view of the internal structure of the cover body;

[0025] Figure 3 The figure is a schematic view of the structure of the cassette loading rack provided by the embodiment of the present application;

[0026] Figure 4 The figure is a schematic view of the structure of the rotating assembly from the first perspective provided by the embodiment of the present application;

[0027] Figure 5 The figure is a schematic view of the structure of the rotating assembly from the second perspective provided by the embodiment of the present application;

[0028] Figure 6 The figure is a schematic view of the structure of the rotating assembly from the second perspective provided by the embodiment of the present application; Figure 5 The figure is a sectional view of the rotating assembly along A-A;

[0029] Figure 7 The figure is a schematic view of the partial structure of the locking member provided by the embodiment of the present application;

[0030] Figure 8 The figure is a sectional view of the partial structure of the locking member provided by the embodiment of the present application;

[0031] Figure 9 The figure is a sectional view of the rotating assembly along B-B. Figure 4 The figure is a sectional view of the rotating assembly along B-B.

[0032] Icon: 100 - cover; 110 - window; 200 - cassette loading rack; 210 - rack body; 211 - first loading space; 212 - second loading space; 220 - rotating assembly; 221 - mounting rack; 222 - rotating rack; 2221 - containing space; 223 - first limiting piece; 2231 - fixed limiting rod; 2232 - locking piece; 2233 - locking part; 2233a - abutting rod; 2233b - connecting rod; 2234 - elastic piece; 2235 - connecting sleeve; 2236 - mounting seat; 2237 - first connecting part; 2238 - second connecting part; 224 - second limiting piece; 2241 - limiting block; 230 - counterweight block; 240 - blocking rod; 241 - limiting groove; 250 - blade. DETAILED DESCRIPTION

[0033] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0035] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0036] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0037] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0038] It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0039] In the field of semiconductor manufacturing, the storage and transportation of wafers is a crucial link, and the storage and transportation of wafers is usually carried out through a wafer box (such as FOUP, FOSB, etc.). However, after the semiconductor device undergoes different processes, various contaminants such as solid particles and organic matter will be generated on the surface of the semiconductor device, and the wafer stored in the wafer box will be contaminated, so the wafer box needs to be cleaned regularly.

[0040] In view of the problem that the cover after cleaning is not convenient to dry in the current wafer box cleaning process, the present application provides a wafer box loading rack and a wafer box processing equipment. The overall structure, working principle and technical effects of the wafer box loading rack and wafer box processing equipment provided by the present application will be introduced in detail below through examples and in combination with the accompanying drawings.

[0041] First, please refer to Figure 1 and Figure 2 , the wafer box includes a box body (not shown in the drawings) and a cover 100 that can be buckled to each other. When the wafer box is used to accommodate wafers, the box body and the cover 100 are closed to facilitate the storage and transportation of wafers, so as to simplify the transportation, reduce the risk of wafer contamination as much as possible, and avoid wafer damage during transportation as much as possible; when the wafers in the wafer box need to be taken out or stored in the wafer box, the box body and the cover 100 are separated, or when the wafer box needs to be cleaned or dried, the box body and the cover 100 are separated to achieve better cleaning or drying effect of the wafer box.

[0042] On the one hand, please refer to Figures 3-9 , the present application provides a wafer box processing equipment applied in the field of semiconductor manufacturing to clean and dry the wafer box loaded with wafers, so as to avoid the contamination of the wafer box by the contaminants generated on the wafer after different processes, thereby causing secondary pollution of the wafers when the wafer box is loaded with wafers.

[0043] Please refer to Figure 3 , the wafer box processing equipment provided by the present application includes a cleaning mechanism, a drying mechanism, a wafer box loading rack 200 and a rotating mechanism. The wafer box loading rack 200 is used to accommodate the box body and the cover 100 of the wafer box, and the wafer box loading rack 200 is installed on the rotating mechanism and can rotate around the vertical center axis of the rotating mechanism. The cleaning mechanism is used to provide cleaning liquid to clean the rotating box body and cover 100 loaded on the wafer box loading rack 200. The drying mechanism is used to provide clean airflow to dry the cleaned box body and cover 100.

[0044] In actual use, it is found that when the cassette loading rack 200 rotates along the vertical central axis following the rotating mechanism, the cleaning liquid inside and outside the box body is thrown out under the action of the centrifugal force generated by rotation. The cover body 100 has a hollow structure, and the inside and outside of the cover body 100 are provided with a plurality of special-shaped structures due to the need. After the cover body 100 is cleaned, the cleaning liquid near the special-shaped structures, especially the cleaning liquid inside the cover body 100, cannot be thrown out due to the existence of the special-shaped structures, resulting in that when the cover body 100 is covered on the box body containing the clean wafer after completing the cleaning and drying processes, the cover body 100 will have cleaning liquid dripping, causing secondary pollution to the clean wafer.

[0045] Based on this, in order to solve the above problems, please refer to Figures 2-4 The present application also provides a cassette loading rack 200, which comprises a rack body 210 and a rotating assembly 220. The rack body 210 is a rectangular frame structure, and the rack body 210 at least has a first loading space 211 and a second loading space 212 arranged from top to bottom, wherein the first loading space 211 is used for accommodating the cover body 100, and the second loading space 212 is used for accommodating the box body. The rotating assembly 220 is installed in the first loading space 211, and the rotating assembly 220 comprises a mounting rack 221 and a rotating rack 222 connected with the mounting rack 221 along a horizontal central axis, and the rotating rack 222 has an accommodating space 2221 for accommodating the cover body 100.

[0046] The rotating rack 222 can rotate along the rotating shaft of the rotating assembly 220 under the action of external force, thereby driving the cover body 100 inside the rotating rack 222 to rotate, providing centrifugal force for the cover body 100 to separate the cleaning liquid from the cover body 100. Specifically, when the cassette loading rack 200 rotates along the vertical central axis following the rotating mechanism, the centrifugal force generated can make the cleaning liquid inside the cover body 100 gather to the edge of the cavity inside the cover body 100, and throw out part of the cleaning liquid through the windows 110 on both sides of the cover body 100. At this time, combined with the rotation of the cover body 100 on the rotating rack 222, the opportunity of the cleaning liquid moving in different directions inside the cover body 100 is increased, so that the cleaning liquid inside the cover body 100 is more easily thrown out from the windows 110, so as to realize the effect of conveniently discharging the cleaning liquid inside the cover body 100. In this embodiment, the accommodating space 2221 has at least one on the rotating rack 222, so that at least one cover body 100 to be dried can be loaded in the rotating rack 222, so as to simultaneously dry a plurality of cover bodies 100, and improve the drying efficiency of the cover body 100.

[0047] By setting the frame body 210, the box body and the cover body 100 are fixed respectively, and the rotating frame 222 is rotationally connected to the mounting frame 221, the cover body 100 is fixed to the accommodating space 2221 in the rotating frame 222, by driving the rotating frame 222 to rotate, the cleaning liquid which is not easy to discharge in the normal state inside and outside the cover body 100 is thrown out, and the effect of facilitating drying of the cover body 100 is realized. It should be noted that the drying requirement of the cover body 100 in this embodiment is that there is no cleaning liquid drop on the inside and outside of the cover body 100, and complete drying is not required.

[0048] Please refer to Figure 4 and Figure 5 , in order to facilitate the cover body 100 to enter and exit the accommodating space 2221, so as to facilitate taking and placing the cover body 100, in this embodiment, the rotating frame 222 is a frame structure with one side open, the accommodating space 2221 is formed in the interior of the rotating frame 222, and the cover body 100 can enter and exit the accommodating space 2221 from the open side of the rotating frame 222.

[0049] Further, in some optional embodiments, the rotating assembly 220 further comprises a first limiting piece 223, the first limiting piece 223 comprises a fixed limiting rod 2231 and a locking piece 2232 which are oppositely arranged along the first direction a. Wherein, the fixed limiting rod 2231 is fixedly arranged on one side of the rotating frame 222 opposite to the open side, so that the rotating frame 222 is a frame structure with one side open and the other side closed, and the locking piece 2232 is located on the open side of the rotating frame 222, which can move under the action of external force to have a limiting state and a turning-out state.

[0050] Specifically, the locking piece 2232 is in the limiting state, the locking piece 2232, the fixed limiting rod 2231 and the rotating frame 222 jointly form the above-mentioned accommodating space 2221, the locking piece 2232 abuts against the cover body 100 located in the accommodating space 2221, thereby limiting the cover body 100 located in the accommodating space 2221 in the first direction a, to realize the effect of fixing the cover body 100 in the accommodating space 2221, and avoid the cover body 100 from escaping from the accommodating space 2221. When the locking piece 2232 is in the turning-out state, the locking piece 2232 releases the limiting of the cover body 100 in the accommodating space 2221, and the cover body 100 can enter and exit the accommodating space 2221 from the open side of the accommodating space 2221 at will.

[0051] When it is needed to put the cover body 100 into the accommodating space 2221 or take the dry finished cover body 100 out of the accommodating space 2221, the driving locking piece 2232 is in the turning-out state, at this time, the accommodating space 2221 is open, and the cover body 100 can be put into or taken out of the accommodating space 2221 from the open side. When the cover body 100 in the accommodating space 2221 is cleaned and dried, the driving locking piece 2232 is in the limiting state, at this time, the locking piece 2232 and the fixed limiting rod 2231 close the accommodating space 2221, and the cover body 100 is fixed in the accommodating space 2221, so that the cover body 100 is limited and fixed.

[0052] Please refer to Figures 4-6 , specifically, the locking piece 2232 comprises a locking portion 2233, an elastic piece 2234 and a mounting seat 2236, the mounting seat 2236 is connected with the fixed limiting rod 2231 at one end, and extends towards the locking piece 2232 at the other end, the elastic piece 2234 is connected with the locking portion 2233 at one end and connected with the mounting seat 2236 at the other end.

[0053] By exerting a force to the locking portion 2233, the locking piece 2232 can move relative to the fixed limiting rod 2231 under the action of the elastic piece 2234 to convert into the turning-out state; by removing the force exerted to the locking portion 2233, the locking portion 2233 can recover under the action of the elastic piece 2234 to convert the locking piece 2232 into the limiting state. It should be noted that when the elastic piece 2234 is in a natural state, the locking piece 2232 is in the limiting state, and the locking portion 2233 and the fixed limiting rod 2231 jointly fix the cover body 100 in the accommodating space 2221.

[0054] Please refer to Figures 6-8 In the embodiment, the locking portion 2233 is in a strip shape, when the locking piece 2232 is in the limiting state, the locking portion 2233 and the fixed limiting rod 2231 limit the cover body 100 in the first direction a (as shown in Figure 4 In the embodiment, the locking portion 2233 is arranged in a strip shape, which can ensure that the cover body 100 will not be thrown out when the locking portion 2233 abuts against the cover body 100, and can also make the contact area between the cover body 100 and the locking portion 2233 small enough, so as to reduce the dead angle formed between the cover body 100 and the locking portion 2233, and make the cover body 100 throw out the cleaning liquid more completely.

[0055] Further, in the embodiment, the mounting seat 2236 is provided with a first mounting channel in the first direction a, and the at least partial elastic member 2234 is located in the first mounting channel. The mounting seat 2236 is detachably provided with a fastener penetrating the first mounting channel in the second direction b, and one end of the elastic member 2234 is fixedly connected to the fastener. The fastener can be a bolt, a bolt, or the like.

[0056] Please refer to Figures 6-8 Further, in some optional embodiments, the locking member 2232 further comprises a connecting sleeve 2235, one end of the connecting sleeve 2235 is fixed with the mounting seat 2236 by a screw, and the connecting sleeve 2235 has a second mounting channel extending in the first direction a, the second mounting channel is in communication with the first mounting channel, and the at least partial elastic member 2234 is located in the second mounting channel, so that the locking portion 2233 can be connected with the elastic member 2234.

[0057] Further, the locking portion 2233 comprises an abutting rod 2233a and a connecting rod 2233b connected with the abutting rod 2233a. The connecting rod 2233b is used to extend into the second mounting channel, and the end thereof is used to connect with the elastic member 2234, so that the abutting rod 2233a can move along the second mounting channel through the connecting rod 2233b under the action of external force, so as to have a guiding effect on the movement of the locking portion 2233 under the action of the elastic member 2234.

[0058] Further, the connecting sleeve 2235 is provided with a first docking portion 2237 near one end of the locking member 2232, and the locking member 2232 has a second docking portion 2238 adapted to the first docking portion 2237. In the state that the locking member 2232 is in the limiting state, the first docking portion 2237 is clamped with the second docking portion 2238 to fix and limit the locking member 2232. Avoiding that the locking portion 2233 rotates relative to the connecting sleeve 2235 during the rotation of the rotating frame 222, which causes the locking member 2232 to be unable to limit the cover 100 in the accommodating space 2221. In the embodiment, the first docking portion 2237 and the second docking portion 2238 are provided as a similar mortise and tenon structure to ensure the stability of the locking member 2232 and the connecting sleeve 2235. Figure 7

[0059] Further, in order to improve the stability of the cover 100 in the accommodating space 2221, in some optional embodiments, please refer to Figure 4 and Figure 9 ​The rotating assembly 220 further comprises a second limiting piece 224, which comprises a plurality of U-shaped limiting blocks 2241 located in the accommodating space 2221. The plurality of limiting blocks 2241 jointly hold the cover body 100, so as to limit the cover body 100 in the second direction b and the third direction c. Specifically, two second limiting pieces 224 are arranged on both sides of one accommodating space 2221, and the opening ends of the second limiting pieces 224 located on both sides of the accommodating space 2221 are oppositely arranged. When the cover body 100 is located in the accommodating space 2221, the plurality of limiting blocks 2241 jointly hold the cover body 100, so as to improve the structural stability of the cover body 100 installed in the mounting cavity, so as to avoid the rotating frame 222 from rotating during the rotation process. In addition, in order to improve the overall structural stability of the rotating frame 222, a plurality of counterweight blocks 230 are further installed on the rotating frame 222. The specific number and installation position of the counterweight blocks 230 are selected according to the weight distribution of the rotating frame 222 itself.

[0060] Through the above arrangement, when the elastic piece 2234 is in a natural state, the locking piece 2232 is in a limiting state, the locking part 2233 and the fixed limiting rod 2231 jointly abut against the cover body 100 located in the accommodating space 2221, so as to limit and fix the cover body 100. When the locking piece 2232 is in a rotated-out state, the cover body 100 can enter and exit the accommodating space 2221 from the open side. In the embodiment, there are at least two forms for converting the locking piece 2232 into the rotated-out state by applying a force to the locking part 2233. One form is that the locking part 2233 moves a first distance away from the fixed limiting rod 2231 under the action of the elastic piece 2234 by applying a force to the locking part 2233, and the first distance is sufficient for the cover body 100 to enter and exit the accommodating space 2221 from the open side. Another form is that the locking part 2233 moves a second distance away from the fixed limiting rod 2231 under the action of the elastic piece 2234 by applying a force to the locking part 2233, so that the second abutting part 2238 is separated from the first abutting part 2237, and then the locking part 2233 is rotated to a sufficient angle, so that the cover body 100 can enter and exit the accommodating space from the open side. It should be noted that the second distance is much smaller than the first distance.

[0061] In the embodiment, it should be noted that when the locking piece 2232 is in the limiting state, the force of the elastic piece 2234 on the locking part 2233 is greater than the centrifugal force received by the rotating assembly 220, and the arrangement of the first abutting part 2237 and the second abutting part 2238 ensures that the cover body cannot be separated from the accommodating space.

[0062] During the use of the film cassette loading frame 200, the rotating frame 222 is in a free rotating state, which is not convenient for an operator to install the cover body 100 into the accommodating space 2221 or take the cover body 100 out of the accommodating space 2221. Based on this, please refer toFigure 6 In the embodiment, the movable through hole of one side mounting frame 221 is provided with a stop rod 240, and a limiting slot 241 is formed on the rotating frame 222. When the rotating frame 222 is rotated to the position that the limiting slot 241 is opposite to the stop rod 240, the stop rod 240 can be inserted into the limiting slot 241, so that the rotating frame 222 is fixed to limit the rotation of the rotating frame 222, and the cover 100 inside the rotating frame 222 is convenient to take out or put in.

[0063] Further, in some optional embodiments, in order to facilitate the rotation of the rotating frame 222 to shake out the cleaning liquid in the cover 100 during the drying process, a blade 250 is arranged on the rotating frame 222. In the embodiment, the drying mechanism is provided with multiple groups, and the multiple groups of drying mechanisms are arranged around the rotating mechanism. When the rotating mechanism drives the film cassette loading frame 200 to rotate, the multiple groups of drying mechanisms around the rotating mechanism can dry the film cassette in the film cassette loading frame 200 installed in the rotating mechanism. In addition, when the film cassette loading frame 200 is driven by the rotating mechanism to rotate to the vicinity of the drying mechanism, the blade 250 is driven to rotate the rotating frame 222 when the film cassette loading frame 200 is blown by the drying mechanism, so as to facilitate the rotation of the rotating frame 222.

[0064] In summary, the embodiment principle of the film cassette loading frame 200 and the film cassette processing equipment provided by the application is that: the cover 100 and the box body are fixed respectively by arranging the frame 210, and the rotating frame 222 is rotatably connected to the mounting frame 221, the cover 100 is fixed in the accommodating space 2221 in the rotating frame 222, the cleaning liquid in the cover 100 is shaken out by driving the rotating frame 222 to rotate, and the effect of facilitating the drying of the cover 100 is achieved.

[0065] The above is only a specific embodiment of the application, but the protection scope of the application is not limited to this. Any changes or replacements within the technical range disclosed by the application can be easily thought by those skilled in the art, and should be covered within the protection scope of the application.

Claims

1. A cassette processing apparatus comprising a washing mechanism, a drying mechanism, a rotating mechanism, and a cassette loading rack, the cassette comprising a box body and a cover, characterized in that, The cover is hollow, has a special-shaped structure inside, and has windows on both sides; the cleaning mechanism is used for flushing the box body and the cover on the sheet box loading rack, the drying mechanism is used for blowing air towards the sheet box loading rack to dry the box body and the cover, and the sheet box loading rack is arranged on the rotating mechanism and can rotate around a vertical central axis of the rotating mechanism; the sheet box loading rack comprises: a rack body having at least a first loading space and a second loading space arranged from top to bottom, the first loading space being used for accommodating the cover, and the second loading space being used for accommodating the box body; a rotating assembly located in the first loading space and comprising a mounting rack and a rotating rack rotationally connected with the mounting rack, the rotating rack rotating along a horizontal central axis of the mounting rack, the rotating rack having at least one accommodation space for accommodating the cover, and the rotating rack being capable of rotating the cover under the action of the drying mechanism to separate the cleaning liquid from the cover.

2. The sheet case processing apparatus according to claim 1, characterized by One side of the rotating rack is an open side, the rotating assembly further comprises a first limiting piece, the first limiting piece comprising a fixed limiting rod arranged in a first direction and a locking piece arranged in a second direction on the open side of the rotating rack, the locking piece being movable under the action of an external force to have a limiting state and a rotating-out state; when the locking piece is in the limiting state, the locking piece and the fixed limiting rod jointly limit the cover in the accommodation space; when the locking piece is in the rotating-out state, the cover can enter and exit the accommodation space from the open side.

3. The sheet case processing apparatus according to claim 2, characterized by The locking piece comprises a locking portion and an elastic piece, one end of the elastic piece being connected with the locking portion and the other end being connected with the fixed limiting rod; when the elastic piece is in a natural state, the locking piece is in the limiting state, and the locking portion and the fixed limiting rod jointly limit the cover in the accommodation space.

4. The sheet case processing apparatus according to claim 3, characterized by The locking piece further comprises a connecting sleeve connected with the fixed limiting rod, at least part of the elastic piece being located in the connecting sleeve, and the locking portion being movable along the connecting sleeve to switch between the limiting state and the rotating-out state under the action of an external force.

5. The sheet case processing apparatus according to claim 4, characterized by One end of the connecting sleeve close to the locking portion is provided with a first docking portion; the locking portion is provided with a second docking portion matched with the first docking portion, and the first docking portion and the second docking portion are engaged when the locking piece is in the limiting state.

6. The sheet case processing apparatus according to claim 1, wherein The rotating assembly further comprises a second limiting piece, the second limiting piece comprising a plurality of U-shaped limiting blocks located in the accommodation space, and the plurality of limiting blocks jointly clamping the cover.

7. The sheet case processing apparatus according to claim 1, wherein A plurality of counterweights are arranged on the rotating rack.

8. The sheet case processing apparatus according to claim 1, wherein A blocking rod is movably arranged on one side of the mounting rack, a limiting groove is arranged on the rotating rack, and when the rotating rack is rotated to the position where the limiting groove is opposite to the blocking rod, the blocking rod can be arranged in the limiting groove to limit the rotation of the rotating rack.

9. The sheet case processing apparatus according to claim 1, wherein The rotating rack is provided with a blade, and the drying mechanism can drive the blade to rotate the rotating rack.

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