A UV-Vacuum UV Monochromator with Adjustable Resolution

Abstract

The present invention relates to the technical field of monochromators, and specifically provides an adjustable resolution ultraviolet-vacuum ultraviolet monochromator, comprising: a housing, an adjustable exit slit assembly, an adjustable entrance slit assembly, and a concave grating; wherein, the housing is provided with two light-permeable windows, each of which is equipped with an adjustable exit slit assembly and an adjustable entrance slit assembly; the concave grating is arranged on the optical path of the incident light, and diffracts and splits the incident light, directing the diffracted light toward the adjustable exit slit assembly, so that light of a specific wavelength is emitted from the exit slit; by adjusting the spatial angle of the concave grating, spectral scanning or fixed-point wavelength output is achieved. The present invention achieves coverage of the entire 100-435nm band, solving the problems of low resolution, narrow coverage band, and difficulty in adjusting the slit width existing in traditional monochromators.

Description

Technical Field

[0001] The invention belongs to the technical field of monochromators, and in particular relates to an ultraviolet-vacuum ultraviolet monochromator with adjustable resolution. Background Art

[0002] As a core device in the field of spectral analysis, the monochromator's core function is to accurately separate monochromatic light of a specific wavelength from complex composite or continuous spectra. It plays an irreplaceable role in materials science, the semiconductor industry, astronomical observations, plasma diagnostics, environmental monitoring, and other fields. For example, in the characterization of semiconductor surface structures, the monochromatic light obtained by the monochromator can be used to excite photoelectron spectroscopy, enabling analysis of the elemental composition and electronic state of the material surface. In research in the vacuum ultraviolet band (100-200nm), the monochromator can provide key support for the detection of plasma radiation characteristics and spectral analysis of the interstellar medium.

[0003] The core of a monochromator's performance lies in its spectroscopic element, which can be categorized into two main types: prism monochromators and grating monochromators. Prism monochromators utilize the differences in refractive index of light of different wavelengths in the prism material to achieve spectroscopic separation. However, they suffer from limitations such as nonlinear dispersion, material transmission band limitations (for example, the ultraviolet band requires special crystal materials), and weak stray light suppression, making them difficult to meet the needs of wide-band, high-resolution detection. Grating monochromators, based on the principle of light diffraction, achieve spectroscopic separation through the periodic structure of a grating. They offer advantages such as good dispersion linearity, a wide applicable band, and high resolution, making them the mainstream choice.

[0004] Common grating monochromators can be further divided into three categories: self-collimating plane grating monochromator, which contains a plane mirror in the optical path to achieve self-collimation. It has a simple structure but a long optical path, and stray light is easily mixed in; non-parallel beam plane grating monochromator, which requires additional lenses or mirrors to focus the beam. Although it can optimize the optical path layout, the multiple elements lead to increased light energy loss, especially poor performance in the vacuum ultraviolet band (where the energy is weak and easily absorbed by materials); concave grating monochromator uses a concave grating to achieve both splitting and focusing functions. It does not require additional focusing elements, has a compact optical path, high light energy transmission efficiency, and can effectively reduce stray light interference.

[0005] The particularity of the ultraviolet-vacuum ultraviolet band places strict demands on the monochromator: the photon energy in this band is high and the material transmittance is poor (for example, 100-200nm vacuum ultraviolet light cannot propagate in the air and requires a vacuum environment); and the target detection signal is often weak (for example, the vacuum ultraviolet radiation intensity is low), requiring the monochromator to have high transmission efficiency and low stray light characteristics.

[0006] In order to meet the needs of specific application scenarios for high resolution or high energy output, traditional grating monochromators have a problem of compromising band coverage in their design. For example, some grating monochromators used for specific element analysis only focus on a narrow band range near certain specific wavelengths, and cannot achieve continuous coverage of a wide band of 100-435nm, making it difficult to meet the needs of multi-element and multi-scenario comprehensive detection. In addition, some traditional grating monochromators cannot flexibly adjust the slit width to balance resolution and signal intensity according to different sample characteristics and detection requirements in actual detection. When high-resolution detection of fine spectral structures is required, the narrow slit results in too low signal intensity; and when the slit is widened to increase signal intensity, the resolution is difficult to guarantee, and it cannot meet the requirements of high-resolution and flexible slit adjustment in complex scenarios such as the analysis of ultraviolet photoelectronic properties of materials.

[0007] Although there have been many studies on grating monochromators in the ultraviolet-visible band, there are still deficiencies in the technical solutions that cover the entire band of 100-435nm and take into account high resolution and wide slit adjustment range. Based on the above research background and functional requirements, there is an urgent need for an ultraviolet-vacuum ultraviolet monochromator that takes into account high vacuum, wide band, wide slit adjustment range and high resolution. Summary of the Invention

[0008] In view of this, the present invention aims to provide an ultraviolet-vacuum ultraviolet monochromator with adjustable resolution, which achieves coverage of the full band of 100-435nm, and designs a double micro-slit based on the single grating fixed slit configuration. The grating automatic scanning and wavelength positioning are realized through automated program control drive, and the resolution of the output monochromatic light is adjusted by manually adjusting the slit width. The synergistic effect of these two methods takes into account both the degree of system automation and the flexibility of the detection scene, and solves the shortcomings of traditional monochromators such as low resolution, narrow coverage band, and difficult slit width adjustment.

[0009] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0010] The present invention provides an adjustable resolution ultraviolet-vacuum ultraviolet monochromator, comprising: a housing, and an adjustable exit slit assembly, an adjustable entrance slit assembly and a concave grating arranged in the housing;

[0011] The housing is used to provide an internal vacuum environment, and at least two light-permeable windows are provided on the housing, each of which is equipped with an adjustable exit slit assembly and an adjustable entrance slit assembly;

[0012] The adjustable entrance slit assembly is used to provide an entrance slit with adjustable width, and the adjustable exit slit assembly is used to provide an exit slit with adjustable width;

[0013] The concave grating is placed on the optical path of the incident light entering from the incident slit, and diffracts and splits the incident light, directing the diffracted light toward the adjustable exit slit assembly, so that light of a specific wavelength is emitted from the exit slit; the spatial angle of the concave grating is adjustable, and by adjusting the spatial angle of the concave grating, spectral scanning or fixed-point wavelength output can be achieved.

[0014] Preferably, it further comprises: a grating mounting assembly for fixing the concave grating.

[0015] Preferably, it also includes: a control unit, which includes a host computer, a drive control card and a drive motor. The host computer controls the drive control card through a program, and the drive control card sends instructions to control the drive motor to drive the concave grating set on the grating mounting assembly to rotate quantitatively.

[0016] Preferably, the angle between the incident light and the output wavelength light is a fixed value.

[0017] Preferably, the concave grating is a type IV holographic concave grating.

[0018] Preferably, the adjustable entrance slit assembly and the adjustable exit slit assembly have the same structure, both comprising: a slit seat, a slit adjustment assembly, a guide cone, a slit piece mounting seat, a slit guide rail, and two slit pieces, wherein the two slit pieces are respectively mounted on the slit piece mounting seat through the slit guide rails, the slit piece mounting seat is mounted in the slit seat, and is mounted at the light-permeable window position of the shell through the slit seat, the slit adjustment assembly is connected to the guide cone, and the guide cone is driven to move through the slit adjustment assembly, the bottom of the guide cone is located between the two slit pieces, and the bottom of the guide cone is a conical structure, and the slit width between the two slit pieces is adjusted by the movement of the guide cone.

[0019] Preferably, the adjustable incident slit assembly and the adjustable exit slit assembly further include: two slit height adjustment plates and an adjustment plate mounting seat, the two slit height adjustment plates are respectively installed in the slit seat through the adjustment plate mounting seat, and the slit height can be adjusted by adjusting the distance between the two slit height adjustment plates.

[0020] Preferably, the slit adjustment component is a micrometer screw, and a display window for showing the output wavelength is provided on the housing. The slit width is changed by adjusting the micrometer screw to achieve resolution adjustment of the output wavelength light, and the output wavelength is shown in the display window.

[0021] Preferably, the slit adjustment component is a piezoelectric ceramic driver, and the slit width is changed by electrically adjusting the piezoelectric ceramic driver to achieve resolution adjustment of the output wavelength light.

[0022] Preferably, a secondary grating is further provided between the concave grating and the optical path of the adjustable exit slit assembly, for performing secondary dispersion on the diffracted light after diffraction and spectroscopy by the concave grating.

[0023] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0024] The present invention adopts a single grating fixed slit configuration, and designs a double fine-motion slit on this basis. During use, only the rotation of the concave grating needs to be controlled, and no additional focusing elements are required in the spectroscopic process. Both the entrance slit and the exit slit are fixed designs, which reduces the difficulty of device adjustment and the structural complexity.

[0025] In addition, the present invention adopts a vacuum design, with a static vacuum design inside the shell and a dynamic vacuum design for the slit assembly, which meets the requirements of monochromatic light output in the vacuum ultraviolet band, improves the spectral coverage width of the monochromator, and solves the problem that traditional monochromators cannot be used for continuous detection of the ultraviolet-vacuum ultraviolet band (100-435nm) in a vacuum environment.

[0026] This invention utilizes an adjustable dual-micro-slit design to adjust the resolution of the output monochromatic light, resolving the issue of traditional monochromators operating in a vacuum, which lack continuous resolution adjustment. Manual adjustment of the slit adjustment assembly allows for on-demand variation of the slit width, flexibly balancing spectral resolution and signal intensity to accommodate diverse detection scenarios. The invention incorporates slit width adjustment for resolution adjustment and slit height adjustment to accommodate diverse light sources.

[0027] The present invention also introduces a dual-grating linked scanning mechanism based on the single-grating fixed-slit configuration. Through the collaborative splitting of the concave grating and the secondary grating, ultra-high-resolution output and stray light suppression are achieved, while maintaining the original vacuum compatibility and slit adjustment function. The secondary grating is used to perform secondary dispersion on the light beam split by the main grating, further subdividing the spectrum and effectively improving the output light resolution. The secondary grating can also filter out the high-order diffraction stray light generated by the concave grating, effectively improving the output light signal-to-noise ratio. In addition, the secondary grating of the present invention can adopt a drive structure to control its switching between the internal and external states of the optical path, enabling the monochromator to have both the fast scanning of a single grating and the fine adjustment function of the dual grating, thereby improving the monochromator's operational flexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0029] Figure 1 is a structural diagram of an adjustable resolution ultraviolet-vacuum ultraviolet monochromator provided according to an embodiment of the present invention;

[0030] Figure 21 is a working principle diagram of an adjustable resolution ultraviolet-vacuum ultraviolet monochromator provided according to an embodiment of the present invention;

[0031] Figure 3 is a structural diagram of an adjustable slit assembly provided according to an embodiment of the present invention;

[0032] Figure 4 is a spectroscopic configuration diagram of a concave grating provided according to an embodiment of the present invention;

[0033] Figure 5 is a full wavelength curve diagram of a mercury lamp scanned by a monochromator provided by an embodiment of the present invention under atmospheric conditions;

[0034] Figure 6 This is a graph showing the resolution test results at a slit opening of 0.015 mm according to an embodiment of the present invention;

[0035] Figure 7 This is a graph showing the resolution test results at a slit opening of 0.25 mm according to an embodiment of the present invention.

[0036] Reference numerals include:

[0037] Housing 1, adjustable entrance slit assembly 2, adjustable exit slit assembly 3, concave grating 4, grating mounting assembly 5, aperture assembly 6, dial wheel 7, housing cover 8, electrical connection interface 9, display window 10, control unit 11;

[0038] Entrance slit 201, exit slit 301, slit seat 202, slit adjustment assembly 203, guide cone 204, slit plate mounting seat 205, slit guide rail 206, slit plate 207, slit height adjustment plate 208, adjustment plate mounting seat 209, slit protection assembly 210, sealing seat 211, sealing dressing 212, sealing gasket 213, slit resetting assembly 214;

[0039] Host computer 111 , drive control card 112 , drive motor 113 , drive structure 114 . DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation to the present invention. Similar elements in different embodiments use associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present invention to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present invention are not shown or described in the specification. This is to avoid the core part of the present invention being overwhelmed by too much description. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0041] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other to form various implementation methods. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various orders in the description and the drawings are only for the purpose of clearly describing a certain embodiment and are not intended to be a required order, unless otherwise specified that a certain order must be followed.

[0042] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0043] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0044] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0045] See also Figure 1 In one embodiment of the present invention, a UV-VUV monochromator with adjustable resolution is provided. By innovatively employing a single grating spectroscopic design and maintaining an internal vacuum environment, it achieves the function of efficiently diffracting polychromatic light into monochromatic light in the vacuum ultraviolet band (100nm-200nm) and the ultraviolet band. This compensates for the defect of prism monochromators that cannot cover the vacuum ultraviolet band. At the same time, the optimized optical path layout and grating characteristics effectively suppress the generation and mixing of stray light, significantly improving the accuracy of monochromatic light output and meeting the demand for high-precision detection of weak signals. In addition, the unique dual micro-slit design enables slit width adjustment in a vacuum environment. Under different detection tasks, the slit width can be flexibly adjusted to accurately balance resolution and signal strength. This greatly improves the applicability and detection efficiency of the monochromator in complex detection scenarios in multiple fields such as material analysis and semiconductor detection, and solves the problems of existing monochromators with limited band coverage, low spectral transmission efficiency, and insufficient flexibility in resolution and slit adjustment.

[0046] Specifically, the monochromator provided in an embodiment of the present invention includes: a housing 1, an adjustable entrance slit assembly 2, an adjustable exit slit assembly 3, a concave grating 4, a grating mounting assembly 5, an aperture assembly 6, a code wheel 7, a housing cover 8, an electrical connection interface 9, a display window 10, and a control unit 11. The housing 1 serves as the mounting base for the various components and is used to provide an internal vacuum environment for the monochromator. The housing 1 is machined entirely from 6061 aluminum alloy, with a matte finish sprayed on the interior and an integrated aperture assembly 6 for stray light suppression. The aperture assembly 6 can utilize a traditional fixed-aperture aperture, an adjustable aperture design to match the relative aperture requirements of different wavelength bands, or a magnetic fluid-driven aperture blade for wear-free adjustment in a vacuum environment.

[0047] The outer surface of the housing 1 is provided with a housing cover 8, which is removable and facilitates maintenance of the monochromator's internal modules. Furthermore, the outer surface of the housing 1 is provided with a dial wheel 7, an electrical connection interface 9, and a display window 10. The electrical connection interface 9 is used to connect the monochromator to an external port, enabling control of the monochromator via a computer. The dial wheel 7 is used to adjust the wavelength of the output monochromatic light, with the output wavelength parameters preset via physical dial switches. The display window 10 is used to display the parameters of the monochromator, such as the wavelength of the output monochromatic light.

[0048] Two light-transmitting windows are provided on the housing 1, which are sealed with homogenizing glass, and an adjustable incident slit assembly 2 and an adjustable exit slit assembly 3 are provided at the positions of the two light-transmitting windows respectively. The spatial positions of the adjustable incident slit assembly 2 and the adjustable exit slit assembly 3 remain unchanged during operation. Figure 2 As shown, the adjustable input slit assembly 2 is used to provide an input slit 201 with adjustable width, and the adjustable output slit assembly 3 is used to provide an output slit 301 with adjustable width. The adjustable input slit assembly 2 and the adjustable output slit assembly 3 have the same structure, both being micro-slits. During operation, the polychromatic light provided by the light source enters the monochromator through the input slit 201 of the adjustable input slit assembly 2. The incident light then travels along the optical path toward the concave grating 4 disposed on the incident optical path. The concave grating 4 diffracts and separates the polychromatic light and directs the diffracted light toward the adjustable output slit assembly 3. The adjustable output slit assembly 3 intercepts the diffracted light after separation, and only single-wavelength light is emitted through the output slit 301, achieving monochromatic light output.

[0049] The monochromator in this embodiment of the present invention employs a single-grating fixed-slit configuration. During operation, the adjustable input slit assembly 2 and the adjustable output slit assembly 3 remain fixed in position. Spectral scanning or fixed-wavelength output is achieved by varying the spatial angle of the concave grating 4, resulting in a fixed angle between the incident light and the output wavelength. Specifically, in this embodiment of the present invention, the concave grating 4 employs a type IV holographic concave grating. The concave grating 4 is secured by a grating mounting assembly 5, which is driven by a control unit 11, thereby rotating the concave grating 4 to achieve spectral scanning and output wavelength switching. Among them, the control unit 11 includes a host computer 111, a drive control card 112, a drive motor 113 and a drive structure 114, including the host computer 111 for storing computer program control instructions, outputting control information to the host computer 111 manually or automatically, the host computer 111 outputs the control instructions to the drive motor 113 through the drive control card 112, controlling the movement of the drive motor 113, the drive motor 113 is connected to the grating mounting assembly 5 through the drive structure 114, and the drive motor 113 drives the grating mounting assembly 5 through the drive structure 114 to drive the concave grating 4 to rotate to complete the spectrum scanning and the output of the fixed wavelength.

[0050] For the spectroscopic process of the monochromator, the light source provides polychromatic light, which passes through the incident slit 201 and irradiates the surface of the concave grating 4. The concave grating 4 serves as the core spectroscopic element. The spectroscopic process does not require additional focusing elements, and wavelength scanning can be achieved by rotating the concave grating 4, avoiding the energy loss caused by multiple elements. At the same time, the compact optical path structure can minimize the mixing of external stray light, significantly improve the light transmission efficiency in the vacuum ultraviolet band (more than 30% higher than that of the plane grating monochromator), and suppress out-of-band stray light (the stray light intensity can be reduced to 10% of the main signal). -6 (See below). After incident light is diffracted and split by concave grating 4, the outgoing light travels along the diffraction optical path toward the adjustable exit slit assembly 3. Adjustable exit slit assembly 3 intercepts the diffracted light, achieving monochromatic light output at the position of exit slit 301. The wavelength of the output monochromatic light is related to the rotation angle of concave grating 4. During the entire spectroscopic process of the monochromator, the incident slit 201 and the exit slit 301 remain stationary. To adjust the spectral resolution during operation, simply manually adjust the adjustable incident slit assembly 2 and the adjustable exit slit assembly 3 to change the opening of the incident slit 201 and / or the exit slit 301.

[0051] To meet the needs of different working conditions and achieve a balance between signal strength and resolution, the embodiment of the present invention innovatively designs dual fine-slits based on the single grating fixed slit configuration, namely, an adjustable incident slit assembly 2 and an adjustable exit slit assembly 3. Furthermore, a special design is made for the adjustable incident slit assembly 2 and the adjustable exit slit assembly 3 under vacuum conditions. Specifically, the adjustable incident slit assembly 2 and the adjustable exit slit assembly 3 adopt the same structural design. The following structural description only uses the adjustable incident slit assembly 2 as an example:

[0052] The adjustable entrance slit assembly 2 includes a slit seat 202, a slit adjustment assembly 203, a guide cone 204, a slit plate mounting seat 205, a slit guide rail 206, a slit plate 207, a slit height adjustment plate 208, an adjustment plate mounting seat 209, a slit protection assembly 210, a sealing seat 211, a sealing dressing 212, a sealing gasket 213, and a slit reset assembly 214. The entrance slit 201 is formed by two slit plates 207, and the width of the entrance slit 201 is adjusted by adjusting the distance between the two slit plates 207. The slit seat 202 serves as the mounting base for the adjustable entrance slit assembly 2. The slit seat 202 is mounted on the light-transmitting window of the housing 1. The edge of the slit seat 202 is a flange structure for mounting and fixing the adjustable entrance slit assembly 2. A slit plate mounting seat 205 is installed inside the slit seat 202. Two slit plates 207 are slidably connected to the slit plate mounting seat 205 via a slit guide rail 206. A pair of springs are provided on both sides of the slit guide rail 206. The springs are initially compressed. In the absence of external force, the two slit plates 207 can be pushed toward each other, so that the two slit plates 207 are close to each other, that is, the width of the incident slit 201 is zero. To adjust the width of the entrance slit 201, a slit protection assembly 210, a slit adjustment assembly 203, and a guide cone 204 are installed on the side of the slit holder 202. The lower end of the slit adjustment assembly 203 is connected to the guide cone 204. The slit adjustment assembly 203 is provided with a scale. Rotating the slit adjustment assembly 203 pushes the guide cone 204 up and down. The bottom end of the guide cone 204 is a conical structure, located in the gap between the two slits 207. Pushing the guide cone 204 up and down adjusts the width of the entrance slit 201. The slit protection assembly 210 is used to lock the slit adjustment assembly 203. When the width of the entrance slit 201 is adjusted to meet the test requirements, the slit protection assembly 210 locks the slit adjustment assembly 203, preventing it from rotating and preventing the width of the entrance slit 201 from changing due to accidental touch or mechanical vibration.

[0053] In an embodiment of the present invention, the slit adjustment assembly 203 uses a micrometer screw. The width of the incident slit 201 is determined by the scale value on the micrometer screw, and the wavelength of the output monochromatic light is displayed through the display window 10. In addition, the resolution of the output wavelength light can also be displayed through the display window 10. Since the micrometer screw needs to be adjusted manually and its rotation handle needs to be set outside the housing 1, a through hole needs to be opened at the corresponding position of the housing 1 to facilitate the extension of the rotating shaft of the micrometer screw from the housing 1. However, since the housing 1 needs to provide a vacuum environment, the slit adjustment assembly 203 needs to be designed with a dynamic vacuum seal. Specifically, a sealing gasket 213 is provided at the position where the micrometer screw is rotatably connected to the slit seat 202. The sealing gasket 213 can be made of at least one layer of O-shaped silicone sealing ring. A sealing seat 211 is provided at the position where the micrometer is rotatably connected to the housing 1. The sealing seat 211 may adopt a tortuous sealing design or other existing sealing structures, and a sealing dressing 212 is filled underneath it to ensure high vacuum dynamic sealing of the rotating shaft position of the slit adjustment component 203 during the adjustment process, thereby ensuring stable operation of the monochromator in the 100-425nm band.

[0054] As an optional embodiment, the slit adjustment assembly 203 also utilizes a piezoelectric ceramic driver. Electrically adjusting the piezoelectric ceramic driver drives the movement of the guide cone 204, thereby varying the width of the entrance slit 201. Alternatively, the guide cone 204 can be omitted, with the piezoelectric ceramic driver directly driving the movement of the two slits 207. This electrically controlled design avoids the need for openings in the housing 1 and allows for control via wireless signals or integrated buttons on the surface of the housing 1. This design can reduce or eliminate the need for dynamic vacuum seals.

[0055] Furthermore, to accommodate different light sources, the embodiment of the present invention further includes a slit height adjustment plate 208 and an adjustment plate mounting base 209 installed within the slit holder 202. The two slit height adjustment plates 208 are mounted on the slit holder 202 via the adjustment plate mounting base 209. The distance between the two slit height adjustment plates 208 is also adjustable. The two slit height adjustment plates 208 are disposed on the upper and lower sides of the slit plate 207 and overlap with the upper and lower portions of the slit plate 207. Adjusting the distance between the slit height adjustment plates 208 allows for slit height constraint. Changing the height of the input slit 201 allows for adaptation to different light sources, minimizing stray light suppression. Changing the height of the output slit 301 allows for adaptation to different detection requirements, achieving different light pattern outputs.

[0056] In addition, the present invention further provides a slit reset component 214. After the slit width is adjusted, the slit reset component 214 is used to record the slit width. When the slit width is subsequently adjusted, the slit reset component 214 can directly adjust the slit width to the recorded width to achieve slit reset.

[0057] The embodiment of the present invention adopts a micro-slit design, which can effectively solve the problem of balancing resolution and signal strength. Resolution refers to the minimum wavelength interval that a monochromator can distinguish. The slit width of a traditional monochromator cannot be adjusted, so the resolution is basically fixed. The resolution can only be changed by replacing the slit 207. However, this method of replacing the slit 207 cannot achieve linear adjustment of the resolution, and the replacement operation is complicated and easily damages the original optical path structure. Since the present invention covers the vacuum ultraviolet band, it is necessary to ensure high vacuum inside. Therefore, it is not convenient to frequently replace the slit 207, which may affect the vacuum degree. Therefore, the micro-slit design is adopted, which not only realizes the pre-adjustment of resolution, but also is simple to operate. The resolution of the output wavelength light will be affected by the slit width and the dispersion rate of the system. Since the optical parameters of the concave grating 4 are fixed, the dispersion rate of the system is constant, and the resolution can be changed by adjusting the slit width.

[0058] When the monochromator of the present invention is working, the concave grating 4 can be driven to rotate by the control unit 11 to achieve spectral scanning or fixed-point wavelength output. After determining the wavelength of the output monochromatic light, the slit adjustment component 203 can be manually adjusted to adjust the resolution of the output monochromatic light and balance the light intensity and resolution of the output monochromatic light.

[0059] As an optional embodiment, based on the single-grating fixed-slit configuration, a dual-grating linkage scanning mechanism is further introduced. A secondary grating is also provided in the optical path between the concave grating 4 and the adjustable exit slit assembly 3. The secondary grating is used to assist in the splitting of the diffracted light from the concave grating 4, and the light beam after the diffraction splitting by the concave grating 4 is subjected to secondary dispersion, further subdividing the spectrum. By adjusting the angle between the concave grating 4 and the secondary grating, the diffraction matching between the concave grating 4 and the secondary grating is ensured during wavelength scanning. The design of the secondary grating not only achieves ultra-high resolution, but also improves the stray light suppression effect, while maintaining the original vacuum compatibility and slit adjustment function. In addition, the secondary grating of the present invention can adopt a drive structure to control its switching between the internal and external states of the optical path, so that the monochromator has both the fast scanning of a single grating and the fine adjustment function of the dual grating, which improves the flexibility of the monochromator.

[0060] Based on the above design, Figure 4 As shown, the embodiment of the present invention provides a single grating fixed slit configuration parameter of a monochromator, and the relative distance between the incident slit component 2 and the concave grating 4 (i.e., the incident arm length ) is 200mm, the relative distance between the exit slit assembly 3 and the concave grating 4 (i.e. the exit arm length ) is 187.9 mm, and the angle between the incident arm and the exit arm is 64°. The grating line density of the concave grating 4 is 1200 g / mm (lines / millimeter).

[0061] The mercury lamp spectrum was scanned using the above monochromator under atmospheric conditions. The scanning results are as follows: Figure 5 Therefore, since wavelengths below 190nm will be strongly absorbed under atmospheric conditions, the mercury lamp only retains the 184.892nm part of the intensity, Figure 5 Only the scanned wavelengths are displayed. The scan results confirm that the instrument is capable of scanning and identifying wavelengths under atmospheric conditions. Because wavelengths are linear, the instrument's performance is also guaranteed in the band below 184.892nm.

[0062] Figure 6 and Figure 7 The results of scanning the wavelength band near 313nm of a mercury lamp using a monochromator with slit openings of 0.015mm and 0.25mm are shown. At a 0.015mm opening, the full width (FWHM) of the spectral peak is 0.080nm, indicating that the monochromator can distinguish spectral lines with wavelength intervals ≥0.080nm. At a 0.25mm opening, the full width (FWHM) of the spectral peak is 1.24nm, indicating that the monochromator can distinguish spectral lines with wavelength intervals ≥1.24nm, confirming that the fine-tuning of the slit can effectively adjust the output light resolution.

[0063] The monochromator of the present invention can be used to detect trace gases in the atmosphere. Many gas molecules (such as ozone and sulfur dioxide) have characteristic absorption spectra in the 100-425 nm band. Leveraging the high resolution and wide bandwidth coverage of the present invention, these gases can be accurately identified and their concentrations measured, providing data support for air pollution control.

[0064] The monochromator of this embodiment is also suitable for use in the spectral detection module of space telescopes. The vacuum ultraviolet band contains a wealth of astrophysical information (such as the spectra of hydrogen and helium ions in the interstellar medium). The high vacuum operating capability and high transmission efficiency of this invention can effectively capture these weak signals, facilitating research into the formation and evolution of celestial bodies.

[0065] The monochromator of the present invention can also be used for ultraviolet spectral analysis of biomolecules. Biomolecules (such as proteins and nucleic acids) have specific absorption peaks in the ultraviolet band. The monochromatic light obtained by the present invention can stimulate their fluorescence or perform absorption spectrum detection, providing a basis for disease diagnosis (such as early diagnosis based on changes in biomolecular structure) and drug development.

[0066] In addition to characterizing and detecting semiconductor surface structures, the monochromator of this embodiment can also be used to test the performance of novel optoelectronic materials. By adjusting the slit width and wavelength, the photoelectric conversion efficiency and photoluminescence properties of materials under different monochromatic light illumination can be studied, providing a reference for optimizing material design.

[0067] In short, the above description is only a preferred embodiment of this specification and is not intended to limit the scope of protection of this specification. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of this specification should be included in the scope of protection of this specification.

[0068] The systems, devices, modules, or units described in one or more of the above embodiments may be implemented by a computer chip or entity, or by a product having a certain function. A typical implementation device is a computer. Specifically, the computer may be, for example, a personal computer, a laptop computer, a cellular phone, a camera phone, a smartphone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.

[0069] It should also be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, commodity, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or includes elements inherent to such process, method, commodity, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, commodity, or apparatus that includes the element.

[0070] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

Claims

1. A resolution-adjustable ultraviolet-vacuum ultraviolet monochromator, characterized in that: The invention comprises: a housing, and an adjustable exit slit assembly, an adjustable entrance slit assembly and a concave grating arranged in the housing; The housing is used to provide an internal vacuum environment, and at least two light-permeable windows are provided on the housing, on which the adjustable exit slit assembly and the adjustable entrance slit assembly are installed respectively; The adjustable entrance slit assembly is used to provide an entrance slit with adjustable width, and the adjustable exit slit assembly is used to provide an exit slit with adjustable width; The concave grating is arranged on the optical path of the incident light entering from the incident slit, and diffracts and splits the incident light, directing the diffracted light toward the adjustable exit slit assembly, so that light of a specific wavelength is emitted from the exit slit; the spatial angle of the concave grating is adjustable, and by adjusting the spatial angle of the concave grating, spectral scanning or fixed-point wavelength output is achieved.

2. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 1, characterized in that: Also includes: The grating mounting assembly is used to fix the concave grating.

3. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 2, characterized in that: Also includes: The control unit includes a host computer, a drive control card and a drive motor. The host computer controls the drive control card through a program, and the drive control card sends instructions to control the drive motor to drive the concave grating set on the grating mounting assembly to perform quantitative rotation.

4. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 1, characterized in that: The angle between the incident light and the output wavelength light is a fixed value.

5. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 1, characterized in that: The concave grating is a type IV holographic concave grating.

6. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 1, characterized in that: The adjustable entrance slit assembly and the adjustable exit slit assembly have the same structure, and both include: a slit seat, a slit adjustment assembly, a guide cone, a slit piece mounting seat, a slit guide rail, and two slit pieces, wherein the two slit pieces are respectively mounted on the slit piece mounting seat via the slit guide rails, the slit piece mounting seat is mounted in the slit seat and is mounted at the light-permeable window position of the housing via the slit seat, the slit adjustment assembly is connected to the guide cone, and the guide cone is driven to move by the slit adjustment assembly, the bottom of the guide cone is located between the two slit pieces, and the bottom of the guide cone is a conical structure, and the slit width between the two slit pieces is adjusted by the movement of the guide cone.

7. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 6, characterized in that: The adjustable entrance slit assembly and the adjustable exit slit assembly further include: two slit height adjustment plates and an adjustment plate mounting seat. The two slit height adjustment plates are respectively mounted in the slit seat through the adjustment plate mounting seat. The slit height can be adjusted by adjusting the distance between the two slit height adjustment plates.

8. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 6, characterized in that: The slit adjustment component is a micrometer screw, and a display window for showing the output wavelength is provided on the housing. The slit width is changed by adjusting the micrometer screw to achieve resolution adjustment of the output wavelength light, and the output wavelength is shown in the display window.

9. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 6, characterized in that: The slit adjustment component is a piezoelectric ceramic driver. By electrically adjusting the piezoelectric ceramic driver, the slit width is changed to achieve resolution adjustment of the output wavelength light.

10. The adjustable resolution ultraviolet-vacuum ultraviolet monochromator according to claim 1, characterized in that: A secondary grating is further provided between the concave grating and the optical path of the adjustable exit slit assembly, for performing secondary dispersion on the diffracted light after diffraction and spectroscopy by the concave grating.

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