Machining method of large thin-wall aluminum gas uniformizing disc

Abstract

The invention discloses a machining method for a large thin-wall aluminum gas uniformizing disc. The machining method comprises the following steps that S1, a groove cavity with a plurality of supporting columns is formed in the back face of the gas uniformizing disc in a rough machining mode; s2, the end face of the groove cavity and the supporting columns serve as supports, the front face of the gas uniformizing disc is subjected to finish machining, and a front side hole system is machined in the front face; s3, the front face with the machined front and side hole series serves as a support, a supporting column reserved on the back face of the gas uniformizing disc is removed, and a complete groove cavity is obtained; and S4, finish machining is conducted on the groove cavity, a cavity side hole system is machined in the groove cavity, and the cavity side hole system communicates with the front side hole system. According to the machining method for the large thin-wall aluminum gas uniformizing disc, it can be guaranteed that the gas uniformizing disc has a good supporting effect when a hole system is machined, and the hole system cannot be greatly influenced when a groove cavity is machined again subsequently.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a processing method of a large thin-walled aluminum gas-distributing disk. Background Art

[0002] For example, the publication number "CN116672909A" discloses "a semiconductor-grade closed-cavity gas-distributing disk", which includes a base, an air inlet, an air chamber, an air path, a connecting mechanism, a one-way mechanism, an air outlet and a cover plate; the base is a circular chassis, the air inlet is located at the edge of the base, the air inlet is connected to the air chamber, and the air chamber is fixedly connected to the upper surface of the base; the air path is fixedly connected to the air chamber, the air chamber is arranged around the central axis of the base, and the connecting mechanism is fixedly connected to one end of the air chamber; the one-way mechanism is fixedly connected to the air chamber; the air outlet is located on the surface of the cover plate, the cover plate is a circular cover body, and the cover plate is fixedly connected to the upper end of the air chamber by stir friction welding. However, in actual applications, when processing the gas-distributing disk, since the groove cavity and each hole system need to be processed, if the hole system is processed first and then the groove cavity, the processed hole system will be deformed. If the groove cavity is processed first and then the hole system, the overall gas-distributing disk will be deformed due to lack of support, and subsequent repair processes need to be added, and the product yield is low. Summary of the Invention

[0003] In response to the problem of easy deformation during processing in the existing technology mentioned in the background technology, the present invention provides a processing method for a large thin-walled aluminum uniform air disk, which can ensure that the uniform air disk has a good supporting effect when processing the hole system, and the subsequent processing of the groove cavity will not have a significant impact on the hole system.

[0004] To achieve the above objectives, the present invention adopts the following technical solutions.

[0005] A method for processing a large thin-walled aluminum gas-distributing disk comprises the following steps: S1. Roughly machine a groove cavity with several support columns on the back of the gas-distributing disk; S2. Using the end surface of the groove cavity and the support column as support, fine-machine the front of the gas-distributing disk and machine the positive and side hole systems on the front; S3. Using the front side of the positive side hole system as support, remove the support column reserved on the back side of the gas uniforming disk to obtain a complete groove cavity; S4. Fine-machine the groove cavity and machine the cavity side hole system in the groove cavity, and the cavity side hole system is connected to the positive side hole system. In the present application, when processing the groove cavity, the groove cavity is not directly grooved in its entirety, but support columns are reserved in the groove cavity. Therefore, in step S1, after the rough processing is completed, a plurality of support columns are still provided in the groove cavity to complete the back processing of the uniform air disk in step S1. After the back processing of the uniform air disk is completed, the uniform air disk is turned over, the front of the uniform air disk is processed, and the front of the uniform air disk is fine-processed to ensure the flatness of the surface. At the same time, the positive side hole system of the front is opened. In the process of processing the front and positive side hole systems, the end face on one side of the groove cavity and the support columns are used as the supporting body. Since the support columns are distributed inside the groove cavity and are provided in number, deformation and collapse during the processing caused by the opening of the groove cavity are avoided, thereby ensuring that the opening directions of each hole system are flush and avoiding offset. However, since the hole system structure of the uniform air disk is complex, it is generally not a single through-hole structure, but a through-hole structure formed by a combination of multi-specification holes of different apertures and shapes. Therefore, it is also necessary to process from one side of the groove cavity (the back of the uniform air disk). In this process, it is necessary to remove the support columns inside the groove cavity first. Since there is no connection between the support columns, when the support columns are removed, it will not cause a large deformation of the entire gas distribution disk, nor will it cause too much impact on the positive and side hole systems that have been processed. After all the support columns are removed, the cavity side hole system is processed at the bottom surface of the groove cavity, and the hole system is processed on the front and back sides of the gas distribution disk respectively, which can shorten the depth of single-sided processing and avoid the tool from going too deep. In this application, since multiple support columns are formed by rough processing, the connection of support parts in the groove cavity is avoided. In actual production, since the specifications and sizes of each gas distribution disk are different, the corresponding groove cavities are also different. If additional support parts are used, different support parts are required to adapt to groove cavities of different specifications, which increases production costs. However, in this application, since support columns reserved for rough processing are used, no additional support parts are required, and different groove cavity shapes can be better adapted, which has greater flexibility and lower production costs.

[0006] Preferably, the end face of the support column is flush with the end face of the groove cavity. The end face of the support column is set flush with the end face of the groove cavity, so that when processing the front face of the gas distribution plate, the support column and the end face of the groove cavity can simultaneously provide support force to avoid partial collapse of the gas distribution plate.

[0007] Preferably, after the rough machining in step S1, heat treatment is performed to remove stress. After the rough machining, heat treatment is performed to remove stress, thereby improving the material's machining performance, reducing product deformation, and ensuring product quality.

[0008] Preferably, after removing the stress, the gas leveling disk is reshaped to ensure that the overall structure of the gas leveling disk is flat, thereby preventing the hole system opening from shifting in the direction during the processing of the cavity side hole system.

[0009] Preferably, during the machining of the front and cavity side hole systems, a horizontal machining process is employed, with the aerator plate upright and the axes of the front and cavity side hole systems arranged horizontally. With the axes of the front and cavity side hole systems arranged horizontally, during machining, debris produced by the drilling tool can slide downward along the surface of the aerator plate, reducing the amount of aluminum chips that enter the stepped hole during subsequent milling. This increases tool life, reduces abnormal tool breakage caused by aluminum chips getting stuck, and improves the surface quality within the hole.

[0010] Preferably, a connecting pore is provided between the frontal hole system and the cavity-side hole system, and the connecting pore is processed simultaneously when machining the side with the smaller depth between the frontal hole system and the cavity-side hole system. A connecting pore is provided between the frontal hole system and the cavity-side hole system, wherein the connecting pore can connect the frontal hole system and the cavity-side hole system. Machining the connecting pore is performed simultaneously with machining the side with the smaller depth between the frontal hole system and the cavity-side hole system, thereby avoiding the tool penetrating too deep when machining the connecting pore, thereby improving machining efficiency.

[0011] Preferably, in step S2, a radial sleeve is installed on each support column, wherein the radial sleeve is provided with a plurality of fixing units, and each fixing unit is connected to the corresponding support column. After the connection is completed, the radial sleeve is connected and limited to each support column in the radial direction. A radial sleeve is installed on the support column, and the radial sleeve is in the shape of a rod-shaped structure. The fixing units on the radial sleeve can be detachably connected to the support column through the fixing units on the radial sleeve. The detachable connection includes but is not limited to various quick connection methods such as snap connection, plug-in connection, and interlocking connection. The radial sleeve is connected to each support column to provide a radial connection relationship between each support column, thereby enabling each support column to provide a more comprehensive anti-deformation function for the gas-uniform disk during the processing, especially improving the radial anti-deformation effect. In order to ensure the connection stability between each support column, two radial sleeves can be connected to each support column, which are respectively arranged horizontally and vertically. The radial sleeves extending in different directions are staggered and docked with the different axial heights of the support column, thereby further strengthening the connection relationship between each support column.

[0012] Preferably, the radial sleeve comprises a plurality of monomer blocks, each of which is provided with a fixing unit for connecting the fixing unit to a corresponding support column, and each of which includes a plurality of docking units arranged around the fixing unit for connecting the docking units of adjacent monomer blocks connected to the support column, so that the monomer blocks form a radial sleeve after the connection is completed. The radial sleeve is divided into individual monomer blocks, each of which is provided with a docking unit, and the docking unit can be connected to an adjacent docking unit, including but not limited to a groove and a protrusion structure. Therefore, in order to ensure that each monomer block can connect to an adjacent monomer block, the docking unit structure of each monomer block is different, for example, one side is a groove and the other side is a protrusion. In the present application, the radial sleeve can be formed by connecting multiple monomer blocks together, so that the length of the radial sleeve can be adjusted when forming the radial sleeve, that is, the corresponding number of monomer blocks can be connected according to the number of support columns, thereby forming radial sleeves of different lengths, which is more adaptable and can be adjusted according to different specifications of the gas distribution disk.

[0013] Preferably, the axial dimension of the support column processed in step S1 is smaller than the cavity depth of the groove cavity, and the radial sleeve includes a plurality of raised bases arranged at the positions corresponding to the support columns, and the raised base is provided with a fixing groove, and the fixing groove is connected to the support column by snapping, and the end face of the raised base is flush with the end face of the groove cavity after the connection is completed. The axial dimension of the support column is set low, so that the end face of the support column is lower than the end face of the groove cavity, and by providing a raised base on the support column, and connecting the corresponding support column through the raised base, the end face of the raised base is flush with the end face of the groove cavity, thereby reducing the processing size of the support column. For example, during the rough processing process, the groove cavity can be processed to half the depth first, and in the processing of the remaining half depth, the support column is reserved, thereby reducing the time required for trimming the support column, and then the lifting base is connected to the support column to ensure that the end face of the raised base is flush with the end face of the groove cavity. At the same time, a fixing groove is set on the lifting base, and the support column is connected by the fixing groove. Since the lifting base and the support column are connected in a slot-type manner, the overall size of the lifting base is larger than the size of the support column, which can increase the support surface and ensure the stability of the support. In the actual processing process, it is only necessary to control the distance between the end face of the support column and the end face of the groove cavity to be the same, so the corresponding lifting height of the required lifting base is the same. The same set of radial sleeves can be used for different specifications of gas uniforming disks. Furthermore, the radial sleeves can be combined by multiple single sleeve blocks to further improve the flexibility of adaptation.

[0014] Preferably, the support columns are arranged in a diamond shape, which can improve the stability and anti-deformation effect of the support.

[0015] The beneficial effects of the present invention are as follows: (1) It can ensure that the gas-distributing plate has a good supporting effect when processing the hole system, and the subsequent processing of the groove cavity will not have a significant impact on the hole system, reducing the investment in special tooling and avoiding the time of frequent replacement of special tooling, thereby greatly improving production efficiency; (2) Use a horizontal machining center with a dedicated fine hole tool to improve chip removal efficiency during machining, reduce aluminum chips from entering the step hole of subsequent milling, increase tool life, reduce abnormal tool breakage caused by aluminum chips getting stuck, and improve the surface quality of the hole; (3) Heat treatment after roughing to relieve stress, improve material machining performance, reduce product deformation and ensure product quality.

[0016] (4) By setting up radial sleeve rods, the connectivity between the support columns can be further improved, the stability of the support can be ensured, the anti-deformation ability can be improved, and the deformation of the gas-distributing disk and the hole system during the processing can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present invention.

[0018] Figure 2 yes Figure 1 Partial cross-sectional view at AA in the middle.

[0019] Figure 3 It is an axonometric drawing of the present invention.

[0020] Figure 4 yes Figure 2 A partial enlarged view of point B in the middle.

[0021] Figure 5 It is an axonometric view of the radial sleeve rod in Example 2.

[0022] Figure 6 This is an axonometric view of the single body block in Example 3.

[0023] Figure 7 This is an axonometric view of the single body block in Example 5.

[0024] In the picture: 1 gas-distributing plate, 11 front and side hole system, 12 cavity side hole system, 13 connecting pores, 14 front side, 15 back side; 2 support columns; 3 groove cavity; 4 radial sleeve rod, 41 fixing unit, 42 single sleeve block, 43 docking unit, 44 lifting base, 45 fixing groove; 5 horizontal machining center, 51 horizontal working table, 52 backrest, 53 mounting plate, 54 horizontal spindle. DETAILED DESCRIPTION

[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0026] Example 1: like Figure 1 、 2 As shown in Figures 3 and 4, a method for processing a large thin-walled aluminum gas-distributing disk includes the following steps: S1. Roughly machine a groove cavity 3 with several support pillars 2 on the back surface 15 of the gas distribution plate 1 (the figure only shows the support pillars 2 in a partial quarter of the area for clarity; the support pillars 2 are actually evenly distributed throughout the groove cavity. The front side hole system and cavity side hole system described below also only show a partial area). S2, using the end surface of the groove cavity 3 and the support column 2 as support, finely machine the front surface 14 of the gas uniforming disk 1, and machine the positive side hole system 11 on the front surface; S3, using the front side of the processed positive and side hole system 11 as support, remove the support column 2 reserved on the back side of the gas uniforming disk 1 to obtain a complete groove cavity 3; S4, finish machining the groove cavity 3, and machine out the cavity side hole system 12 in the groove cavity 3, and the cavity side hole system 12 is connected to the front side hole system 11. In the present application, when machining the groove cavity 3, the groove cavity 3 is not directly grooved, but a support column 2 is reserved in the groove cavity 3. Therefore, in step S1, after the rough machining is completed, a plurality of support columns 2 are still provided in the groove cavity 3, and the back processing of the gas uniform disk 1 in step S1 is completed. After the back processing of the gas uniform disk 1 is completed, the gas uniform disk 1 is turned over, and the front side of the gas uniform disk 1 is machined. The front side of the gas uniform disk 1 is finish machining to ensure the flatness of the surface, and at the same time, the front side hole system 11 is opened. When machining the front and the front side holes, In the process of forming the system 11, the end face of the groove cavity 3 and the support column 2 are used as the supporting body. Since the support column 2 is distributed inside the groove cavity 3 and is provided in several pieces, deformation and collapse caused by the opening of the groove cavity 3 during the processing are avoided, thereby ensuring that the opening directions of each hole system are flush and avoiding deviation. However, since the hole system structure of the gas uniform disk 1 is complex, it is generally not a single through-hole structure, but a through-hole structure formed by a combination of multiple specifications of holes with different apertures and shapes. Therefore, it is also necessary to form a through-hole structure from one side of the groove cavity 3 (the back of the gas uniform disk 1). The grommets 3 are then machined to fit the grooves 3 so that the grommets 3 do not become obsolete, and the grommets 3 are not easily detached from one another.

[0027] like Figure 2 As shown, the end face of the support column 2 is flush with the end face of the groove cavity 3. By setting the end face of the support column 2 flush with the end face of the groove cavity 3, when machining the front face of the gas distribution plate 1, the end faces of the support column 2 and the groove cavity 3 can simultaneously provide support force, preventing the gas distribution plate 1 from partially collapsing.

[0028] After the rough machining in step S1, heat treatment is performed to remove stress. After the rough machining, heat treatment is performed to remove stress, improve the material's machining performance, reduce product deformation, and ensure product quality.

[0029] After the stress is removed, the gas distribution plate 1 is reshaped to ensure that the overall structure of the gas distribution plate 1 is flat, thereby preventing the hole system opening from being offset during the processing of the cavity side hole system 12 .

[0030] like Figure 3 As shown, during the machining of the front-side hole system 11 and the cavity-side hole system 12, a horizontal machining process is employed, with the aerator plate 1 upright and the axes of the front-side hole system 11 and the cavity-side hole system 12 arranged horizontally. With the axes of the front-side hole system 11 and the cavity-side hole system 12 arranged horizontally, during machining, chips introduced by the drilling tool can slide downward along the surface of the aerator plate 1, reducing the amount of aluminum chips that enter the stepped hole during subsequent milling. This increases tool life, reduces abnormal tool breakage caused by aluminum chips getting stuck, and improves the surface quality within the hole.

[0031] like Figure 4 As shown, a connecting hole 13 is provided between the frontal hole system 11 and the luminal hole system 12. When machining the side with the smaller depth between the frontal hole system 11 and the luminal hole system 12, the connecting hole 13 is machined simultaneously. The connecting hole 13 is provided between the frontal hole system 11 and the luminal hole system 12. The connecting hole 13 can connect the frontal hole system 11 and the luminal hole system 12. Machining the connecting hole 13 is performed simultaneously with machining the side with the smaller depth between the frontal hole system 11 and the luminal hole system 12. This prevents the tool from penetrating too deeply when machining the connecting hole 13, thereby improving machining efficiency.

[0032] like Figure 1 As shown, the support columns 2 are distributed in a diamond shape. The diamond shape distribution of the support columns 2 can improve the stability and anti-deformation effect of the support.

[0033] In this embodiment, processing is performed by a horizontal machining center 5, which includes a horizontal machining workbench 51, a backrest 52 is provided on the horizontal machining workbench 51, and a mounting plate 53 is provided on the backrest 52. The mounting plate 53 fixes the aerator 1, and then processing and production are performed by a horizontal machining spindle 54.

[0034] Example 2: like Figure 5 As shown, unlike Example 1, this embodiment discloses a method for processing a large thin-walled aluminum gas-distributing disk, including the following steps: S1. Roughly machine a groove cavity 3 with several support columns 2 on the back of the gas-distributing disk 1; S2. Using the end surface of the groove cavity 3 and the support column 2 as support, finely machine the front surface of the gas distribution plate 1 and form a positive side hole system 11 on the front surface. Install radial sleeve rods 4 on each support column 2. The radial sleeve rods 4 are provided with a plurality of fixing units 41. Each fixing unit 41 is connected to each support column 2. The radial sleeve rods 4 connect each support column 2 in the radial direction. S3, using the front side of the processed positive and side hole system 11 as support, remove the support column 2 reserved on the back side of the gas uniforming disk 1 to obtain a complete groove cavity 3; S4 , fine-machining the groove cavity 3 , and machining a cavity side hole system 12 in the groove cavity 3 , wherein the cavity side hole system 12 is connected to the positive side hole system 11 .

[0035] A radial sleeve rod 4 is installed on the support column 2. The radial sleeve rod 4 is in the shape of a rod-shaped structure. The radial sleeve rod 4 can be detachably connected to the support column 2 through the fixing unit 41 on the radial sleeve rod 4. The detachable connection includes but is not limited to various quick connection methods such as snap connection, plug-in connection, and chimeric connection. The radial sleeve rod 4 can provide a radial connection relationship between each support column 2 by connecting each support column 2, thereby enabling each support column 2 to provide a more comprehensive anti-deformation function for the gas uniforming disk 1 during the processing, especially improving the radial anti-deformation effect. In order to ensure the connection stability between each support column 2, two radial sleeve rods 4 can be connected to each support column 2, which are respectively arranged horizontally and vertically. The radial sleeve rods 4 extending in different directions are staggered and docked with different axial heights of the support column 2, thereby further strengthening the connection relationship between each support column 2.

[0036] The specific operating steps in this embodiment are as follows: define the length and width dimensions of the groove cavity 3, and after determining the dimensions, select a radial sleeve rod 4 of appropriate size, wherein a plurality of circular holes are provided on the radial sleeve rod 4, and the circular holes are arranged along the extension direction of the radial sleeve rod 4. First, a support column 2 flush with the end face of the groove cavity 3 is processed in the gas uniforming disk 1, wherein the shape of the support column 2 is cylindrical, and the size of the support column 2 is just able to fit the circular hole with a clearance, and then the radial sleeve rod 4 is connected to the support column 2, and each support column 2 is arranged in a matrix or a diamond arrangement, that is, each support column 2 can be arranged in a line horizontally and vertically, and then the corresponding radial sleeve rod 4 is connected to the linearly arranged support column 2, and the radial sleeve rod 4 slides along the support column 2 to The bottom of the groove cavity 3 is then loaded and connected to the remaining radial sleeve rods 4. When the connected radial sleeve rods 4 include horizontal and vertical settings, multiple radial sleeve rods 4 will be connected to the same support column 2, and each radial sleeve rod 4 is stacked. Therefore, it is necessary to set the radial sleeve rod 4 to a flat structure to avoid multiple radial sleeve rods 4 being stacked beyond the end face of the groove cavity 3. After all the support columns 2 are connected, the air uniforming disk 1 is erected and placed on the bedroom machining center for front processing. Since the air uniforming disk 1 is processed upright, the radial sleeve rod 4 will not easily fall off the support column 2 during the processing. After the front processing is completed, all the radial sleeve rods 4 are removed from the support column 2, and the support column 2 is removed to process the inside of the groove cavity 3.

[0037] Example 3: like Figure 6 As shown, unlike Example 1, this embodiment discloses a method for processing a large thin-walled aluminum gas-distributing disk, including the following steps: S1. Roughly machine a groove cavity 3 with several support columns 2 on the back of the gas-distributing disk 1; S2, with the end face of the groove cavity 3 and the support column 2 as support, fine-machine the front of the gas-distributing disk 1, and machine the positive side hole system 11 on the front, install a radial sleeve rod 4 on each support column 2, and the radial sleeve rod 4 is provided with a plurality of fixing units 41, each fixing unit 41 is connected to each support column 2, and the radial sleeve rod 4 is connected to each support column 2 in the radial direction. The radial sleeve rod 4 includes a plurality of monomer sleeve blocks 42, each monomer sleeve block 42 is provided with a fixing unit 41, and the fixing unit 41 is engaged with the support column 2, and each monomer sleeve block 42 includes a plurality of docking units 43 arranged on the circumference of the fixing unit 41, and the docking units 43 of adjacent monomer sleeve blocks 42 are detachably connected; S3, using the front side of the processed positive and side hole system 11 as support, remove the support column 2 reserved on the back side of the gas uniforming disk 1 to obtain a complete groove cavity 3; S4 , fine-machining the groove cavity 3 , and machining a cavity side hole system 12 in the groove cavity 3 , wherein the cavity side hole system 12 is connected to the positive side hole system 11 .

[0038] The radial sleeve rod 4 is divided into individual monomer blocks 42, and each monomer block 42 is provided with a docking unit 43, which can be connected to adjacent docking units 43, including but not limited to grooves and protrusions. Therefore, in order to ensure that each monomer block 42 can be connected to the adjacent monomer blocks 42, the docking unit 43 of each monomer block 42 is set to have a different structure, for example, a groove on one side and a protrusion on the other side; in the present application, the radial sleeve rod 4 can be formed by a combination of multiple monomer blocks 42. Therefore, the length of the radial sleeve rod 4 can be adjusted when forming it, that is, the corresponding number of monomer blocks 42 can be connected according to different numbers of support columns 2, thereby forming radial sleeve rods 4 of different lengths, which are more adaptable and can be adjusted according to different specifications of the gas uniforming disk 1.

[0039] The specific operating steps in this embodiment are as follows: define the length and width dimensions of the groove cavity 3, and after determining the dimensions, select a suitable reserved position for the support column 2 so that adjacent support columns 2 can be connected to the monomer sleeve 42, and after the monomer sleeve 42 is connected to the support column 2, it can also be connected to the docking unit 43. A circular hole is provided on the monomer sleeve 42, and the circular hole is the fixing unit 41. A support column 2 flush with the end face of the groove cavity 3 is processed in the gas uniforming disk 1, wherein the shape of the support column 2 is cylindrical, and the size of the support column 2 can just be clearance-matched with the circular hole, and then the monomer sleeve 42 is connected to the support column 2, and each support column 2 is arranged in a matrix or a diamond arrangement, that is, each support column 2 can be arranged in a line horizontally and vertically, and then the monomer sleeves 42 connected to each support column 2 are connected. In the embodiment, the connection is made by snapping together through grooves and protrusions. After the connection of the single-unit blocks 42 in one direction is completed, the connection in the vertical direction is carried out, so that each support column 2 can obtain multiple horizontal and vertical limit constraints. Since each single-unit block 42 needs to be stacked on the same support column 2, it is necessary to set the single-unit block 42 to a flat structure to avoid multiple stacking exceeding the end face of the groove cavity 3. After all the support columns 2 are connected, the air distribution plate 1 is erected and placed on the bedroom machining center for front processing. Since the air distribution plate 1 is processed upright, the single-unit block 42 will not easily fall off the support column 2 during the processing, and will not move along the axial direction of the support column 2. After the front processing is completed, all the single-unit blocks 42 are removed from the support column 2, the support column 2 is removed, and the inside of the groove cavity 3 is processed.

[0040] Example 4: Different from Example 1, this embodiment discloses a method for processing a large thin-walled aluminum gas-distributing disk, which includes the following steps: S1. Roughly machine a groove cavity 3 with several support columns 2 on the back of the gas-distributing disk 1; S2, with the end face of the groove cavity 3 and the support column 2 as support, finely machine the front of the gas-distributing disk 1, and machine a positive side hole system 11 on the front, install a radial sleeve rod 4 on each support column 2, and provide a plurality of fixing units 41 on the radial sleeve rod 4, each fixing unit 41 is connected to each support column 2, and the radial sleeve rod 4 is connected to each support column 2 in the radial direction. The axial dimension of the support column 2 is smaller than the cavity depth of the groove cavity 3, and the radial sleeve rod 4 includes a plurality of lifting bases 44 arranged at the positions corresponding to the support columns 2, and a fixing groove 45 is provided on the lifting base 44, which is engaged with the support column 2; S3, using the front side of the processed positive and side hole system 11 as support, remove the support column 2 reserved on the back side of the gas uniforming disk 1 to obtain a complete groove cavity 3; S4 , fine-machining the groove cavity 3 , and machining a cavity side hole system 12 in the groove cavity 3 , wherein the cavity side hole system 12 is connected to the positive side hole system 11 .

[0041] The axial dimension of the support column 2 is set low, so that the end face of the support column 2 is lower than the end face of the groove cavity 3, and by setting a lifting base 44 on the support column 2, the corresponding support column 2 is connected through the lifting base 44, so that the end face of the lifting base 44 is flush with the end face of the groove cavity 3, thereby reducing the processing size of the support column 2. For example, during the rough processing process, the groove cavity 3 can be processed to half the depth, and the support column 2 can be reserved in the processing of the remaining half depth, thereby reducing the time required for trimming the support column 2, and then the lifting base 44 is connected to the support column 2 to ensure The end face of the lifting base 44 can be flush with the end face of the groove cavity 3. At the same time, a fixing groove 45 is set on the lifting base 44, and the support column 2 is connected by the fixing groove 45. Since the lifting base 44 and the support column 2 are connected in a slot-type manner, the overall size of the lifting base 44 is larger than the size of the support column 2, which can increase the support surface and ensure the stability of the support. In the actual processing process, it is only necessary to control the distance between the end face of the support column 2 and the end face of the groove cavity 3 to be the same. Therefore, the corresponding lifting height of the required lifting base 44 is the same, and the same set of radial sleeve rods 4 can be used for different specifications of the gas uniforming disk 1.

[0042] Example 5: like Figure 7 As shown, unlike Example 1, this embodiment discloses a method for processing a large thin-walled aluminum gas-distributing disk, including the following steps: S1. Roughly machine a groove cavity 3 with several support columns 2 on the back of the gas-distributing disk 1; S2, with the end face of the groove cavity 3 and the support column 2 as support, the front of the gas-distributing disk 1 is finely machined, and a positive side hole system 11 is machined on the front, and a radial sleeve rod 4 is installed on each support column 2, and a plurality of fixing units 41 are provided on the radial sleeve rod 4, and each fixing unit 41 connects each support column 2, and the radial sleeve rod 4 connects each support column 2 in the radial direction, and the radial sleeve rod 4 includes a plurality of monomer sleeve blocks 42, and each monomer sleeve block 42 is provided with a fixing unit 41, and the fixing unit 41 is engaged with the support column 2, and each monomer sleeve block 42 includes a plurality of docking units 43 arranged on the circumference of the fixing unit 41, and the docking units 43 of adjacent monomer sleeve blocks 42 are detachably connected, and the axial dimension of the support column 2 is smaller than the cavity depth of the groove cavity 3, and the radial sleeve rod 4 includes a plurality of lifting bases 44 arranged at the positions corresponding to the support columns 2, and the lifting base 44 is provided with a fixing groove 45, and the fixing groove 45 is engaged with the support column 2; S3, using the front side of the processed positive and side hole system 11 as support, remove the support column 2 reserved on the back side of the gas uniforming disk 1 to obtain a complete groove cavity 3; S4 , fine-machining the groove cavity 3 , and machining a cavity side hole system 12 in the groove cavity 3 , wherein the cavity side hole system 12 is connected to the positive side hole system 11 .

[0043] The specific operating steps in this embodiment are as follows: In this embodiment, a raised base 44 is provided on each monomer block 42, and a fixing groove 45 is provided on the raised base 44, that is, the fixing unit 41 of the monomer block 42 in this application is a fixing groove 45 provided on the raised base 44, and the monomer block 42 connected to the central area support column 2 in this application is provided with two docking units 43 in the horizontal and vertical directions, respectively, and the monomer block 42 connected to the edge support column 2 is provided with one docking unit 43 in the horizontal and vertical directions, respectively, so as to ensure that the monomer block 42 can be connected to the adjacent monomer block in a non-stacked state. The sleeve block 42 is connected, and then cutting is performed in the area where the groove cavity 3 needs to be processed. The end face of the support column 2 in this embodiment is not flush with the end face of the groove cavity 3, that is, the axial length of the support column 2 is relatively short. Then the corresponding fixed groove 45 of the single sleeve block 42 is engaged with the support column 2, so that the end face of the support column 2 abuts against the bottom of the fixed groove 45. At this time, the end face of the single sleeve block 42 is flush with the end face of the groove cavity 3, thereby ensuring the stability of the support, while reducing the trimming of the support column 2 and improving the processing efficiency. After the front processing is completed, the single sleeve block 42 is completely removed from the support column 2, the support column 2 is removed, and the inside of the groove cavity 3 is processed.

Claims

1. A method for processing a large thin-walled aluminum gas-distributing plate, characterized in that: The following steps are included: S1. Roughly machine a groove cavity with several support columns on the back of the gas-distributing disk; S2. Using the end surface of the groove cavity and the support column as support, fine-machine the front of the gas-distributing disk and machine the positive and side hole systems on the front; S3, using the front side of the machined positive and side hole systems as support, remove the support column reserved on the back side of the gas uniforming disk to obtain a complete groove cavity; S4. Finish-machine the groove cavity and machine a cavity side hole system in the groove cavity, wherein the cavity side hole system is connected to the positive side hole system.

2. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 1, characterized in that: The end surface of the support column is flush with the end surface of the groove cavity.

3. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 1, characterized in that: After the rough machining in step S1, heat treatment is performed to remove stress.

4. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 3, characterized in that: After stress removal, the gas distribution disk is reshaped.

5. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 1, characterized in that: During the process of machining the front side hole system and the cavity side hole system, horizontal machining is adopted to stand the gas uniforming disk upright, and the axes of the front side hole system and the cavity side hole system are arranged horizontally.

6. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 1, characterized in that: A connecting fine hole is provided between the front side hole system and the cavity side hole system. When processing the side with smaller depth among the front side hole system and the cavity side hole system, the connecting fine hole is processed simultaneously.

7. A method for processing a large thin-walled aluminum gas-distributing disk according to any one of claims 1 to 6, characterized in that: In step S2, radial sleeve rods are installed on each support column. The radial sleeve rods are provided with a plurality of fixing units. Each fixing unit is connected to a corresponding support column. After the connection is completed, the radial sleeve rods connect and limit each support column in the radial direction.

8. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 7, characterized in that: The radial sleeve rod includes several monomer blocks, each of which is provided with a fixing unit, which is connected to each corresponding support column. Each of the monomer blocks includes several docking units arranged on the circumference of the fixing unit, which are connected to the docking units on adjacent monomer blocks connected to the support column. After the connection is completed, each of the monomer blocks forms a radial sleeve rod.

9. The method for processing a large thin-walled aluminum gas-distributing disk according to claim 7, characterized in that: The axial dimension of the support column processed in step S1 is smaller than the cavity depth of the groove cavity. The radial sleeve includes several raising bases arranged corresponding to the positions of the support columns. The raising base is provided with a fixing groove, and the fixing groove is connected with the support column by snapping. After the connection is completed, the end face of the raising base is flush with the end face of the groove cavity.

10. A method for processing a large thin-walled aluminum gas-distributing disk according to any one of claims 1 to 6, characterized in that: The supporting columns are distributed in a diamond shape.

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