Automatic defect detection and reinspection equipment for glass substrate

Abstract

The invention relates to the technical field of glass substrate detection, in particular to glass substrate automatic defect detection and reinspection equipment which comprises a bottom frame, a workbench, a portal frame, a transmission connection mechanism, a movable detection mechanism, a positioning detection mechanism and a defect reinspection mechanism. The workbench is arranged on the underframe, and the portal frame is arranged on the workbench; the transmission connection mechanism is arranged on the underframe and on the two sides of the mobile detection mechanism, and is used for transmitting the glass substrate; the positioning detection mechanism and the defect reinspection mechanism are arranged on the two sides of the portal frame correspondingly, the movable detection mechanism comprises a linear transmission module, an alignment adjustment platform, a lifting discharging platform and a positioning transmission module, and the linear transmission module extends in the first direction of the workbench and is transmitted below the portal frame; and the workpiece sequentially passes through the positioning detection mechanism and the defect reinspection mechanism. According to the invention, various 2D defects on the glass substrate of the OLED display panel can be accurately identified, and the product quality is ensured to meet high standard requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of glass substrate detection, and in particular to automatic defect detection and re-inspection equipment for glass substrates. Background Art

[0002] Defect detection is crucial in the production of OLED glass substrates, as its accuracy directly impacts product quality and yield. However, existing inspection technologies have limitations, one of which is the difficulty in achieving simultaneous inspection of both surface and dimensions.

[0003] Most current inspection methods focus on single-dimensional inspection. For example, some inspection equipment focuses only on the flatness inspection of glass substrates, obtaining plane information through optical interference or laser scanning. However, during the inspection process, precise dimensional measurement is often overlooked. A single inspection method cannot fully assess whether a glass substrate meets production standards, because even if the flatness meets the standards, dimensional deviations may cause problems in subsequent production links. Other technologies that focus on dimensional inspection do not fully consider flatness when inspecting dimensional accuracy. Image recognition or mechanical measurement methods may be used to determine dimensional parameters such as the length and width of the glass substrate, but changes in flatness cannot be monitored in real time.

[0004] Since the flatness and size of OLED glass substrates are interrelated and affect each other during the production process, defects that cannot be detected synchronously make it difficult to quickly and accurately determine whether the glass substrates are qualified on the production line, increasing the defective rate and production costs, and also limiting the improvement of production efficiency. More advanced detection technology is urgently needed to solve this problem. Summary of the Invention

[0005] To solve the above problems, the present invention is an automatic defect detection and re-inspection device for glass substrates that can accurately identify various 2D defects on OLED display panel glass substrates to ensure that product quality meets high standards.

[0006] The technical solution adopted by the present invention is: an automatic defect detection and re-inspection equipment for glass substrates, including a base frame, a workbench, a gantry, a transmission and connection mechanism, a mobile detection mechanism, a positioning detection mechanism and a defect re-inspection mechanism; the workbench is arranged on the base frame, and the gantry is arranged on the workbench; the transmission and connection mechanism is arranged on the base frame and on both sides of the mobile detection mechanism for glass substrate transmission; the positioning detection mechanism and the defect re-inspection mechanism are respectively arranged on both sides of the gantry; the mobile detection mechanism includes a linear transmission module, an alignment adjustment platform, a lifting and unloading platform and a positioning transmission module, and the linear transmission module is arranged along the workbench The glass substrate is extended in the first direction and transmitted to the bottom of the gantry, and passes through the positioning detection mechanism and the defect re-inspection mechanism in sequence. The alignment adjustment platform is arranged on the linear transmission module, the lifting and unloading platform is arranged on the alignment adjustment platform and is used to place the glass substrate, the positioning transmission module is arranged on the alignment adjustment platform, and the lifting and unloading platform is provided with a through slot for exposing the positioning transmission module to drive the transmission of the glass substrate; the positioning detection mechanism is used to detect the position of the glass substrate on the lifting and unloading platform, and the alignment adjustment platform is used to perform position correction on the detected glass substrate; the defect re-inspection mechanism is used to perform defect detection on the glass substrate.

[0007] A further improvement to the above solution is that the base frame includes a frame-type frame composed of multiple square tubes, and a supporting foot cup is provided at the bottom of the frame-type frame; multiple pneumatic vibration isolation modules are provided on the frame-type frame, and the frame-type frame is connected to the workbench through the pneumatic vibration isolation modules.

[0008] A further improvement to the above scheme is that the workbench is a marble workbench, the gantry includes support columns and crossbeams, there are two support columns, the two support columns are respectively arranged on both sides of the workbench, the crossbeam is erected between the two support columns, and the support columns and crossbeam are both made of marble.

[0009] A further improvement to the above scheme is that the transmission docking mechanism includes a loading docking module and a unloading docking module, the loading docking module includes a loading bracket, a loading conveying rack and a loading conveying roller, a plurality of the loading conveying rollers are provided, and a plurality of loading conveying rollers are arranged on the loading conveying rack, the loading bracket is used to connect the loading conveying rack with the base frame; the loading conveying rollers are used to transport the glass substrate toward the lifting and unloading platform.

[0010] A further improvement to the above solution is that the unloading connection module includes a unloading bracket, an unloading conveying rack and an unloading conveying roller. There are multiple unloading conveying rollers, and multiple unloading conveying rollers are arranged on the unloading conveying rack. The unloading bracket is used to connect the unloading conveying rack with the base frame; the unloading conveying roller is used to receive the glass substrate sent out by the lifting and unloading platform.

[0011] A further improvement to the above scheme is that the linear transmission module includes a linear motor, a linear guide rail and a transmission seat, the linear motor is arranged on the workbench, the linear guide rail is arranged on the workbench, the transmission seat is arranged on the linear guide rail, and the linear motor is used to drive the transmission seat to slide along the linear guide rail; the positioning adjustment platform is arranged on the transmission seat.

[0012] A further improvement to the above scheme is that the alignment adjustment platform includes a UVW alignment platform and a connecting panel, the UVW alignment platform is arranged on the linear transmission module, the connecting panel is arranged on the UVW alignment platform, the lifting and unloading platform includes a lifting base plate, a lifting connecting column and a unloading platform, the lifting connecting column is used to slide and connect the positioning and transmission module, the positioning and transmission module includes a rolling conveying component for connecting the transmission connection mechanism and a unloading platform for placing the glass substrate, the unloading platform is arranged above the rolling conveying component, the through groove is arranged on the unloading platform, the unloading platform is a vacuum adsorption platform for adsorbing the glass substrate, and the UVW alignment platform performs position compensation according to the XY and angle θ deviations of the glass substrate recognized by the camera.

[0013] A further improvement to the above scheme is that the positioning detection mechanism includes a positioning detection transmission module, a positioning detection lifting module and a positioning detection module. The positioning detection transmission module is arranged on the gantry, and the positioning detection lifting modules are provided in two groups and are relatively arranged on both sides of the positioning detection transmission module. The positioning detection transmission module is used to drive the two groups of the positioning detection lifting modules to move relative to each other. The positioning detection module is arranged on the detection lifting module and is used to detect the position of the glass substrate, and correct the position of the glass substrate through the positioning adjustment platform according to the detected position.

[0014] A further improvement to the above solution is that the positioning detection module includes a positioning camera and a detection camera, the positioning camera is used to detect and position the glass substrate, and the detection camera is used to detect and provide correction data to the alignment adjustment platform.

[0015] A further improvement to the above solution is that the defect re-inspection mechanism includes a transverse movement module and a scanning detection module, the transverse movement module is arranged on the gantry, and the scanning detection module is used to scan and detect the glass substrate on the lifting and unloading platform.

[0016] A further improvement to the above scheme is that the scanning detection modules are provided with multiple groups, and the multiple groups of scanning detection modules are arranged in a linear array on the transverse movement module. Each group of the scanning detection modules includes a scanning lifting module, a scanning camera, a scanning detection component and a scanning light source auxiliary component. The scanning lifting module is arranged on the transverse movement module, the scanning camera is arranged on the scanning lifting module, the scanning detection component is located on one side of the scanning camera, and the scanning light source auxiliary component is used to assist the scanning camera and provide a light source.

[0017] The beneficial effects of the present invention are:

[0018] Compared with the existing glass substrate defect detection, the layout design of the present invention is reasonable, and the coordination between the chassis, workbench, gantry and various mechanisms ensures the smoothness of the glass substrate detection process. The transmission connection mechanism is arranged on the chassis and located on both sides of the mobile detection mechanism, which can efficiently realize the loading and unloading transmission of the glass substrate, ensure the continuous operation of the production line, and improve production efficiency. The linear transmission module in the mobile detection mechanism extends along the first direction of the workbench and is located below the gantry. It passes through the positioning detection mechanism and the defect re-inspection mechanism in sequence, so that the glass substrate can perform different stages of detection operations on a stable path. The coordination of the positioning adjustment platform and the lifting and unloading platform realizes the precise positioning and height adjustment of the glass substrate during the placement process, ensuring the stability and accuracy of the glass substrate during the detection process. At the same time, the positioning transmission module drives the transmission of the glass substrate through the through slot, further improving the stability and synchronization of the transmission.

[0019] The positioning detection mechanism can accurately detect the position of the glass substrate on the lifting and unloading platform, providing accurate data for subsequent alignment adjustments. The alignment adjustment platform corrects the position of the glass substrate based on the detection data, effectively improving the positioning accuracy of the glass substrate, reducing detection errors caused by position deviation, and improving the reliability of the detection results. The defect review mechanism performs comprehensive defect inspection on the glass substrate and can accurately identify various 2D defects on the OLED display panel glass substrate to ensure that product quality meets high standards. The overall design of the equipment and the coordinated operation of its various mechanisms provide an efficient, accurate, and reliable solution for automatic 2D defect detection of OLED display panel glass substrates. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional schematic diagram of the automatic defect detection and re-inspection equipment for glass substrates of the present invention;

[0021] Figure 2 for Figure 1 A three-dimensional schematic diagram of the automatic defect detection and re-inspection equipment for glass substrates from another perspective;

[0022] Figure 3 for Figure 1 Schematic diagram of the main view of the automatic defect detection and re-inspection equipment for glass substrates;

[0023] Figure 4 for Figure 1 Schematic diagram of the chassis of the automatic defect detection and re-inspection equipment for glass substrates;

[0024] Figure 5 for Figure 1 Schematic diagram of the transmission and connection mechanism of the automatic defect detection and re-inspection equipment for glass substrates;

[0025] Figure 6 for Figure 1 The main view of the transmission and connection mechanism of the automatic defect detection and re-inspection equipment for glass substrates;

[0026] Figure 7 for Figure 1 Schematic diagram of the positioning detection mechanism of the automatic defect detection and re-inspection equipment for glass substrates;

[0027] Figure 8 for Figure 1 Schematic diagram of the defect re-inspection mechanism of the automatic defect detection and re-inspection equipment for glass substrates.

[0028] Description of reference numerals: chassis 1, frame 11, support foot cup 12, pneumatic vibration isolation module 13, workbench 2;

[0029] Gantry 3, support column 31, crossbeam 32, transmission connection mechanism 4, loading connection module 41, loading bracket 411, loading conveyor frame 412, loading conveyor roller 413, unloading connection module 42, unloading bracket 421, unloading conveyor frame 422, unloading conveyor roller 423;

[0030] Mobile detection mechanism 5, linear transmission module 51, linear motor 511, linear guide rail 512, transmission seat 513, alignment adjustment platform 52, UVW alignment platform 521, connection panel 522, lifting and unloading platform 53, lifting base plate 531, lifting connection column 532, unloading platform 533, through slot 534, positioning transmission module 54, rolling conveyor assembly 541;

[0031] Positioning detection mechanism 6, positioning detection transmission module 61, positioning detection lifting module 62, positioning detection module 63, positioning camera 631, detection camera 632;

[0032] Defect re-inspection mechanism 7, transverse movement module 71, scanning detection module 72, scanning lifting module 721, scanning camera 722, scanning detection component 723, scanning light source auxiliary component 724. DETAILED DESCRIPTION

[0033] To facilitate understanding of the present invention, the present invention will be described more fully below with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the accompanying drawings. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the present disclosure.

[0034] It should be noted that when an element is referred to as being “fixed to” another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or there may be an intermediate element.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in this specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0036] like Figures 1 to 8As shown, in one embodiment of the present invention, a glass substrate automatic defect detection and re-inspection device is involved, including a base frame 1, a workbench 2, a gantry 3, a transmission and connection mechanism 4, a mobile detection mechanism 5, a positioning detection mechanism 6 and a defect re-inspection mechanism 7; the workbench 2 is arranged on the base frame 1, and the gantry 3 is arranged on the workbench 2; the transmission and connection mechanism 4 is arranged on the base frame 1 and on both sides of the mobile detection mechanism 5 for glass substrate transmission; the positioning detection mechanism 6 and the defect re-inspection mechanism 7 are respectively arranged on both sides of the gantry 3, and the mobile detection mechanism 5 includes a linear transmission module 51, an alignment adjustment platform 52, a lifting and unloading platform 53 and a positioning transmission module 54, and the linear transmission module 51 is arranged along the workbench 2 and is transferred below the gantry 3, passing sequentially through the positioning detection mechanism 6 and the defect re-inspection mechanism 7. The alignment adjustment platform 52 is disposed on the linear transmission module 51. The lifting and unloading platform 53 is disposed on the alignment adjustment platform 52 and is used to place the glass substrate. The positioning transmission module 54 is disposed on the alignment adjustment platform 52. The lifting and unloading platform 53 is provided with a through slot 534, which allows the positioning transmission module 54 to be exposed to drive the glass substrate. The positioning detection mechanism 6 is used to detect the position of the glass substrate on the lifting and unloading platform 53. The alignment adjustment platform 52 is used to correct the position of the glass substrate after detection. The defect re-inspection mechanism 7 is used to detect defects on the glass substrate. This embodiment has a reasonable layout design. The coordination between the base frame 1, the worktable 2, the gantry 3, and the various mechanisms ensures a smooth glass substrate inspection process. The transmission connection mechanism 4 is disposed on the base frame 1 and located on both sides of the mobile detection mechanism 5, enabling efficient loading and unloading of glass substrates, ensuring continuous operation of the production line and improving production efficiency. The linear transmission module 51 in the mobile inspection mechanism 5 extends along the first direction of the worktable 2 and is located below the gantry 3. It passes sequentially through the positioning inspection mechanism 6 and the defect re-inspection mechanism 7, allowing the glass substrate to undergo different stages of inspection along a stable path. The alignment adjustment platform 52 cooperates with the lifting and unloading platform 53 to achieve precise positioning and height adjustment of the glass substrate during placement, ensuring stability and accuracy during inspection. Simultaneously, the positioning transmission module 54 drives the glass substrate through the through slot 534, further improving transmission stability and synchronization.

[0037] In this embodiment, the positioning detection mechanism 6 can accurately detect the position of the glass substrate on the lifting and unloading platform 53, providing accurate data for subsequent alignment adjustment. The alignment adjustment platform 52 performs position correction on the glass substrate based on the detection data, effectively improving the position accuracy of the glass substrate, reducing the detection error caused by position deviation, and improving the reliability of the detection results. The defect re-inspection mechanism 7 performs comprehensive defect detection on the glass substrate and can accurately identify various types of 2D defects on the OLED display panel glass substrate to ensure that the product quality meets high standards. The overall design of the equipment and the coordinated work of various mechanisms provide an efficient, accurate and reliable solution for automatic 2D defect detection of OLED display panel glass substrates.

[0038] The base frame 1 includes a frame-type frame 11 composed of a plurality of square tubes, and a supporting foot cup 12 is provided at the bottom of the frame-type frame 11; a plurality of pneumatic vibration isolation modules 13 are provided on the frame-type frame 11, and the frame-type frame 11 is connected to the workbench 2 via the pneumatic vibration isolation module 13. Specifically, the workbench 2 is a marble workbench 2, and the gantry 3 includes a support column 31 and a crossbeam 32. There are two support columns 31, and the two support columns 31 are respectively provided on both sides of the workbench 2. The crossbeam 32 is erected between the two support columns 31, and the support columns 31 and the crossbeam 32 are both made of marble. In this embodiment, the frame-type frame 11 of the base frame 1 is composed of a plurality of square tubes, has good structural strength and stability, and can stably support the various components of the supporting equipment. The supporting foot cup 12 provided at the bottom not only supports the entire equipment, but also ensures that the equipment is in a horizontal state by adjusting the height of the foot cup, thereby avoiding affecting the detection accuracy due to uneven ground. Multiple pneumatic vibration isolation modules 13 effectively isolate the impact of external environmental vibration on the workbench 2, creating a stable working environment for automatic 2D defect detection of glass substrates. In the high-precision detection process, even the smallest vibration may lead to detection errors, and the pneumatic vibration isolation module 13 can minimize this interference, greatly improving the accuracy and reliability of the detection results. The use of a marble workbench 2 and a gantry 3 support column 31 and a crossbeam 32 made of marble further improves the performance of the equipment. Marble material has high hardness, low expansion coefficient and good shock absorption performance, which can ensure the dimensional stability of the workbench 2 and the gantry 3, and reduce thermal deformation and vibration interference. This allows for accurate capture of tiny defects when inspecting glass substrates, providing high-quality inspection guarantees for OLED display panel production.

[0039] See Figures 5 and 6As shown, the transmission connection mechanism 4 includes a loading connection module 41 and a unloading connection module 42. The loading connection module 41 includes a loading bracket 411, a loading conveying rack 412 and a loading conveying roller 413. There are multiple loading conveying rollers 413, and multiple loading conveying rollers 413 are set on the loading conveying rack 412. The loading bracket 411 is used to connect the loading conveying rack 412 to the base frame 1; the loading conveying rollers 413 are used to load the glass substrate The glass substrates are transported toward the elevating unloading platform 53. Specifically, the unloading docking module 42 includes a unloading bracket 421, an unloading conveyor rack 422, and unloading conveyor rollers 423. Multiple unloading conveyor rollers 423 are provided on the unloading conveyor rack 422. The unloading bracket 421 is used to connect the unloading conveyor rack 422 to the base frame 1. The unloading conveyor rollers 423 are used to receive glass substrates delivered by the elevating unloading platform 53. In this embodiment, in the loading docking module 41, multiple loading conveyor rollers 413 work together to stably and efficiently transport glass substrates along the loading conveyor rack 412 toward the elevating unloading platform 53. The loading bracket 411 ensures a secure connection between the loading conveyor rack 412 and the base frame 1, ensuring the stability and reliability of the entire loading process. This allows the glass substrates to be accurately transported to the inspection starting position, providing a good material preparation foundation for subsequent automatic 2D defect detection. Multiple unloading conveyor rollers 423 precisely receive the glass substrates delivered by the lifting and unloading platform 53. The unloading bracket 421 firmly connects the unloading conveyor frame 422 to the base frame 1, ensuring the smoothness of the unloading process. After completing defect inspection or re-inspection, the glass substrate can be smoothly transported to the next process through the unloading docking module 42, effectively improving the overall operating efficiency of the equipment. Through the coordinated operation of the loading and unloading docking modules 42, the automatic 2D defect inspection and re-inspection equipment for OLED display panel glass substrates achieves efficient, stable, and accurate material transportation, greatly improving inspection efficiency and product quality, and reducing errors and instabilities caused by manual intervention.

[0040] The linear transmission module 51 includes a linear motor 511, a linear guide 512, and a transmission base 513. The linear motor 511 is mounted on the workbench 2, the linear guide 512 is mounted on the workbench 2, and the transmission base 513 is mounted on the linear guide 512. The linear motor 511 is used to drive the transmission base 513 to slide along the linear guide 512. The alignment adjustment platform 52 is mounted on the transmission base 513. In this embodiment, the linear motor 511, as a power source, is precisely mounted on the workbench 2, providing a stable and powerful driving force for the entire transmission process, ensuring that the transmission base 513 can achieve high-precision sliding on the linear guide 512. The rational arrangement of the linear guide 512 not only provides a smooth sliding path for the transmission base 513, greatly reducing frictional resistance, but also effectively ensures the straightness and repeatability of the operation of the transmission base 513, which is crucial for accurately detecting the location of defects in glass substrates. Driven by a linear motor 511, the drive base 513 slides precisely along a pre-set path, thereby adjusting the position of the alignment adjustment platform 52 mounted on it. This precise positioning ensures that the detection device accurately reaches each inspection position on the glass substrate, preventing positional deviations that could lead to missed or inaccurate inspections.

[0041] The alignment adjustment platform 52 includes a UVW alignment platform 521 and a connection panel 522. The UVW alignment platform 521 is mounted on the linear drive module 51, and the connection panel 522 is mounted on the UVW alignment platform 521. The lifting and unloading platform 53 includes a lifting base plate 531, lifting connection columns 532, and an unloading platform 533. The lifting connection columns 532 are used for sliding connection with the positioning and transmission module 54. The positioning and transmission module 54 includes a rolling conveyor assembly 541 for connecting to the transmission and connection mechanism 4. The unloading platform 533 is mounted above the rolling conveyor assembly 541, and the through slot 534 is provided on the unloading platform 533. The unloading platform 533 is a vacuum adsorption platform for adsorbing glass substrates. In this embodiment, the UVW alignment platform 521 of the alignment adjustment platform 52 is mounted on the linear drive module 51, enabling high-precision planar position adjustment, providing a basic guarantee for the precise positioning of glass substrates. The connection panel 522 is mounted on the UVW alignment platform 521, ensuring a secure mechanical connection and signal transmission between all components, ensuring accurate adjustment. The lifting base plate 531 of the lifting and unloading platform 53 is slidably connected to the positioning and transmission module 54 via lifting connecting posts 532, enabling flexible lifting and lowering of the unloading platform 533. The rolling conveyor assembly 541 of the positioning and transmission module 54 not only efficiently connects to the transmission docking mechanism 4, enabling rapid transport of glass substrates, but also accurately delivers them to the designated location. The unloading platform 533 is mounted above the rolling conveyor assembly 541 and is a vacuum-based platform. This utilizes the vacuum suction principle to securely secure the glass substrate, effectively preventing displacement or movement during inspection and significantly improving the accuracy and stability of 2D defect detection. The UVW alignment platform compensates for the X, Y, and θ deviations of the glass substrate as detected by the camera. It features both X, Y, and θ micro-motion. Based on the camera's accurate detection of the X, Y, and θ deviations of the glass substrate, the platform quickly and accurately compensates for these deviations. Its XY micro-motion function boasts exceptional precision, enabling micron-level adjustments to the glass substrate's planar position deviations, ensuring precise positioning within the XY plane. The angular micro-motion function is equally important, enabling meticulous correction of angular deviations, keeping angular errors within a minimal range. Through this series of precise micro-motion compensation operations, the UVW alignment platform significantly improves the accuracy and reliability of glass substrate inspection, effectively reducing inspection errors caused by substrate position deviations and ensuring efficient and accurate glass substrate quality inspection.

[0042] See Figure 7As shown, the positioning detection mechanism 6 includes a positioning detection transmission module 61, a positioning detection lifting module 62, and a positioning detection module 63. The positioning detection transmission module 61 is arranged on the gantry 3. The positioning detection lifting module 62 is provided with two groups and is relatively arranged on both sides of the positioning detection transmission module 61. The positioning detection transmission module 61 is used to drive the two groups of the positioning detection lifting modules 62 to move relative to each other. The positioning detection module 63 is arranged on the detection lifting module and is used to detect the position of the glass substrate and correct the position of the glass substrate through the alignment adjustment platform 52 according to the detected position. Specifically, the positioning detection module 63 includes a positioning camera 631 and a detection camera 632. The positioning camera 631 is used to detect and position the glass substrate, and the detection camera 632 is used to detect and provide correction data to the alignment adjustment platform 52. In this embodiment, the positioning detection transmission module 61, the positioning detection lifting module 62, and the positioning detection module 63 cooperate with each other, greatly improving the accuracy of the equipment in detecting and correcting the position of the glass substrate. By driving the two sets of positioning detection lifting modules 62 to move relative to each other through the positioning detection transmission module 61, the position of the positioning detection module 63 can be flexibly adjusted to meet the detection requirements of glass substrates of different specifications. The positioning camera 631 quickly and accurately detects and positions the glass substrate, determining the benchmark for subsequent detection work. The detection camera 632 carefully detects the position deviation of the glass substrate and provides accurate correction data to the alignment adjustment platform 52. This enables the detection equipment to operate more stably and efficiently, reducing detection errors and misjudgments caused by position deviations of the glass substrate. It effectively guarantees the quality and efficiency of automatic 2D defect detection of OLED display panel glass substrates, and provides strong support for the production of high-quality OLED display panels.

[0043] See Figure 8As shown, the defect re-inspection mechanism 7 includes a transverse movement module 71 and a scanning and detection module 72. The transverse movement module 71 is arranged on the gantry 3, and the scanning and detection module 72 is used to scan and detect the glass substrate on the lifting and unloading platform 53. Specifically, there are multiple groups of scanning and detection modules 72, which are arranged in a linear array on the transverse movement module 71. Each group of scanning and detection modules 72 includes a scanning and lifting module 721, a scanning camera 722, a scanning and detection component 723, and a scanning light source auxiliary component 724. The scanning and lifting module 721 is arranged on the transverse movement module 71, and the scanning camera 722 is arranged on the scanning and lifting module 721. The scanning and detection component 723 is located on one side of the scanning camera 722. The scanning light source auxiliary component 724 is used to assist the scanning camera 722 and provide a light source. In this embodiment, the transverse movement module 71 is mounted on the gantry 3 and can flexibly move the scanning and inspection module 72 within a certain range, achieving comprehensive coverage scanning of glass substrates at different positions on the lifting and unloading platform 53, greatly improving the scope and efficiency of inspection. Multiple groups of scanning and inspection modules 72 arranged in a linear array on the transverse movement module 71 work together to further enhance inspection accuracy. The scanning and lifting modules 721 in each group of scanning and inspection modules 72 can be precisely adjusted according to the actual height of the glass substrate, ensuring that the scanning camera 722 is always in the optimal shooting position to obtain clear and accurate image data. As the core inspection component, the scanning camera 722, in conjunction with the scanning and inspection component 723, can capture and analyze detailed images of the glass substrate surface, accurately identifying even the smallest 2D defects. The stable light source provided by the scanning light source auxiliary component 724 effectively avoids inspection errors caused by uneven or insufficient light, ensuring that the scanning camera 722 can obtain high-quality images in various environments, providing a strong guarantee for accurate defect detection. Through the coordinated work of various modules, the overall equipment realizes efficient and accurate automatic 2D defect detection and re-inspection of OLED display panel glass substrates.

[0044] The above embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous modifications and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. An automatic defect detection and re-inspection device for glass substrates, characterized by: It includes a base frame, a workbench, a gantry, a transmission and connection mechanism, a mobile detection mechanism, a positioning detection mechanism and a defect re-inspection mechanism; the workbench is arranged on the base frame, and the gantry is arranged on the workbench; the transmission and connection mechanism is arranged on the base frame and on both sides of the mobile detection mechanism for transmitting the glass substrate; the positioning detection mechanism and the defect re-inspection mechanism are respectively arranged on both sides of the gantry, and the mobile detection mechanism includes a linear transmission module, an alignment adjustment platform, a lifting and unloading platform and a positioning transmission module, and the linear transmission module extends along the first direction of the workbench and is transmitted under the gantry. , passing through the positioning detection mechanism and the defect re-inspection mechanism in sequence, the alignment adjustment platform is arranged on the linear transmission module, the lifting and unloading platform is arranged on the alignment adjustment platform and is used to place the glass substrate, the positioning transmission module is arranged on the alignment adjustment platform, the lifting and unloading platform is provided with a through slot for positioning the transmission module to be exposed to drive the transmission of the glass substrate; the positioning detection mechanism is used to detect the position of the glass substrate on the lifting and unloading platform, the alignment adjustment platform is used to perform position correction on the detected glass substrate; the defect re-inspection mechanism is used to perform defect detection on the glass substrate.

2. The automatic defect detection and re-inspection equipment for glass substrates according to claim 1, characterized in that: The base frame includes a frame-type frame composed of multiple square tubes, and a supporting foot cup is provided at the bottom of the frame-type frame; a plurality of pneumatic vibration isolation modules are provided on the frame-type frame, and the frame-type frame is connected to the workbench through the pneumatic vibration isolation modules.

3. The automatic defect detection and re-inspection equipment for glass substrates according to claim 2, characterized in that: The workbench is a marble workbench, and the gantry includes support columns and crossbeams. There are two support columns, which are respectively arranged on both sides of the workbench. The crossbeam is installed between the two support columns, and both the support columns and the crossbeam are made of marble.

4. The automatic defect detection and re-inspection equipment for glass substrates according to claim 1, characterized in that: The transmission docking mechanism includes a loading docking module and a unloading docking module. The loading docking module includes a loading bracket, a loading conveying rack, and a loading conveying roller. A plurality of loading conveying rollers are provided. The plurality of loading conveying rollers are arranged on the loading conveying rack. The loading bracket is used to connect the loading conveying rack with the base frame. The loading conveying rollers are used to transport the glass substrate toward the lifting and unloading platform. The unloading connection module includes an unloading bracket, an unloading conveying rack and an unloading conveying roller. There are multiple unloading conveying rollers, which are arranged on the unloading conveying rack. The unloading bracket is used to connect the unloading conveying rack with the base frame; the unloading conveying roller is used to receive the glass substrate sent out by the lifting and unloading platform.

5. The automatic defect detection and re-inspection equipment for glass substrates according to claim 1, characterized in that: The linear transmission module includes a linear motor, a linear guide rail and a transmission seat. The linear motor is arranged on a workbench, the linear guide rail is arranged on the workbench, the transmission seat is arranged on the linear guide rail, and the linear motor is used to drive the transmission seat to slide along the linear guide rail; the alignment adjustment platform is arranged on the transmission seat.

6. The automatic defect detection and re-inspection equipment for glass substrates according to claim 1, characterized in that: The alignment adjustment platform includes a UVW alignment platform and a connection panel. The UVW alignment platform is arranged on a linear transmission module. The connection panel is arranged on the UVW alignment platform. The lifting and unloading platform includes a lifting base plate, a lifting connecting column and a unloading platform. The lifting connecting column is used to slide and connect the positioning and transmission module. The positioning and transmission module includes a rolling conveying component for connecting the transmission connection mechanism. The unloading platform is arranged above the rolling conveying component. The through groove is arranged on the unloading platform. The unloading platform is a vacuum adsorption platform for adsorbing the glass substrate. The UVW alignment platform performs position compensation according to the XY and angle θ deviations of the glass substrate recognized by the camera.

7. The automatic defect detection and re-inspection equipment for glass substrates according to claim 1, characterized in that: The positioning detection mechanism includes a positioning detection transmission module, a positioning detection lifting module and a positioning detection module. The positioning detection transmission module is arranged on the gantry. The positioning detection lifting modules are provided in two groups and are relatively arranged on both sides of the positioning detection transmission module. The positioning detection transmission module is used to drive the two groups of positioning detection lifting modules to move relative to each other. The positioning detection module is arranged on the detection lifting module and is used to detect the position of the glass substrate and correct the position of the glass substrate through the alignment adjustment platform according to the detected position.

8. The automatic defect detection and re-inspection equipment for glass substrates according to claim 7, characterized in that: The positioning detection module includes a positioning camera and a detection camera. The positioning camera is used to detect and position the glass substrate, and the detection camera is used to detect and provide correction data to the alignment adjustment platform.

9. The automatic defect detection and re-inspection equipment for glass substrates according to claim 1, characterized in that: The defect re-inspection mechanism includes a transverse movement module and a scanning detection module. The transverse movement module is arranged on the gantry. The scanning detection module is used to scan and detect the glass substrate on the lifting and unloading platform.

10. The automatic defect detection and re-inspection equipment for glass substrates according to claim 9, characterized in that: The scanning detection modules are provided in multiple groups, and the multiple groups of scanning detection modules are arranged in a linear array on the transverse movement module. Each group of the scanning detection modules includes a scanning lifting module, a scanning camera, a scanning detection component and a scanning light source auxiliary component. The scanning lifting module is arranged on the transverse movement module, the scanning camera is arranged on the scanning lifting module, the scanning detection component is located on one side of the scanning camera, and the scanning light source auxiliary component is used to assist the scanning camera and provide a light source.

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