Plasma electrode tip of modular combined electrode and plasma cleaning machine

Abstract

The invention relates to a plasma electrode tip of a modular combined electrode and a plasma cleaning machine, the plasma cleaning machine comprises a high-voltage power supply, a gas control box, the plasma electrode tip and an ozone treatment module, the plasma electrode tip comprises a cavity and an electrode part arranged at the bottom of the cavity, and the ozone treatment module is arranged at the bottom of the cavity. The top of the cavity is provided with a high-voltage wire socket and an air inlet interface, the electrode part comprises a conductive module, an electrode module, a grounding plate and a fixing module, and the electrode module comprises a plurality of electrode blocks. According to the plasma electrode tip, the plurality of electrode blocks are spliced to form the plasma electrode tip, the thin electrode layers are arranged in the electrode blocks, the plurality of electrode blocks are included, and the plurality of electrode blocks are spliced to form the electrode module, so that the thinned electrode tip is convenient to splice, can extend and is convenient to maintain.

Description

Technical Field

[0001] The present invention relates to a plasma electrode head and a plasma cleaning machine, and in particular to a plasma electrode head with modular combined electrodes and a plasma cleaning machine. Background Art

[0002] Generally, surface treatment of substrates involves removing organic matter and other contaminants, removing resist, bonding organic films, surface modification, enhancing thin film formation, reducing metal oxides, and cleaning liquid crystal glass substrates. These surface treatments primarily involve chemical methods and plasma methods. Chemical methods, however, have the disadvantage of adversely affecting the environment.

[0003] Plasma processing equipment includes flush etching, reset ion etching (RIE), and plasma enhanced chemical vapor deposition (PECVD). Plasma processing equipment is used in the processing of semiconductor wafers, flat panel displays, and cover glass for user terminals such as smartphones.

[0004] The panel sizes in the panel industry are getting bigger and bigger. For example, the size of the 7th generation panel was 1950*2250mm, the size of the 8th generation panel was 2200*2500mm, and the size of the 10th generation panel was 2940*3300mm. The subsequent panel sizes will become larger and larger, and the requirements for plasma processing length will also increase accordingly.

[0005] The electrode head plays a key role in plasma equipment. The plasma electrode head in the existing technology is not only thick and heavy, but also difficult to expand, which limits the use of plasma cleaning machines. Summary of the Invention

[0006] The technical problem solved by the present invention is to construct a plasma electrode head and a plasma cleaning machine with modular combined electrodes, thereby overcoming the technical problem that the plasma electrode head in the prior art is thick and heavy and difficult to expand.

[0007] The technical solution of the present invention is: to construct a plasma electrode head with a modular combination electrode, including a cavity, an electrode part arranged at the bottom of the cavity, a high-voltage line socket and an air inlet interface provided at the top of the cavity, the electrode part including a conductive module, an electrode module, a grounding plate, and a fixing module, the conductive module is connected to the electrode module, the electrode module is arranged at the lower part of the conductive module, the grounding plate is arranged at the lower part of the electrode module, the conductive module includes a conductive plate, the fixing module is used to fix the electrode module, the electrode module includes a plurality of electrode blocks, and a conductive wire electrically connected to the electrode block, each electrode block is independently packaged, and a plurality of electrode blocks are spliced ​​into the electrode module, the splicing shape of the electrode module is spliced ​​according to the shape required for use, and each electrode block is independently connected to the conductive plate through the conductive wire.

[0008] A further technical solution of the present invention is: the substrate comprises a first substrate, a second substrate and an electrode, and the electrode is located between the first substrate and the second substrate.

[0009] A further technical solution of the present invention is that the electrodes in the electrode block are electrode coatings, and the electrode coatings are provided on the first substrate or the second substrate.

[0010] A further technical solution of the present invention is: the conductive module includes a conductive plate, a conductive bottom plate, and a conductive cover plate, the conductive bottom plate is provided with a groove for accommodating the conductive plate, the conductive plate is arranged in the groove, and the conductive cover plate abuts against the conductive plate.

[0011] A further technical solution of the present invention is that the second substrate of each electrode block is provided with a hole for the conductive wire to pass through.

[0012] A further technical solution of the present invention is that the electrode blocks are arranged in one or more of a strip shape, a block shape or a special shape.

[0013] The technical solution of the present invention is to construct a plasma cleaning machine, including a high-voltage power supply, a plasma electrode head, a gas control box, and the ozone treatment module, wherein the plasma electrode head includes a cavity, an electrode part arranged at the bottom of the cavity, and a high-voltage line socket and an air inlet interface are provided at the top of the cavity. The electrode part includes a conductive module, an electrode module, a grounding plate, and a fixing module. The conductive module is connected to the electrode module, the electrode module is arranged at the lower part of the conductive module, the grounding plate is arranged at the lower part of the electrode module, the conductive module includes a conductive plate, and the fixing module is used to fix the electrode module. The electrode module includes a plurality of electrode blocks and a conductive wire electrically connected to the electrode block. Each electrode block is independently packaged, and a plurality of electrode blocks are spliced ​​into the electrode module. The splicing shape of the electrode module is spliced ​​according to the shape required for use. Each electrode block is independently connected to the conductive plate through the conductive wire. The high-voltage power supply is connected to the conductive plate through the high-voltage line socket. The gas control box delivers gas to the cavity through the air inlet interface. The ozone treatment module is arranged above the cavity and surrounds the cavity.

[0014] A further technical solution of the present invention is: the ozone treatment module includes a fixed plate A, a fixed plate B, an exhaust hood, and an exhaust port, the fixed plate A and the fixed plate B are respectively fixed on opposite sides of the plasma electrode head, the exhaust hood covers the fixed plate A, the fixed plate B and the plasma electrode head, and the exhaust port is arranged on the exhaust hood.

[0015] A further technical solution of the present invention is: it also includes a bus, and the bus is arranged in the upper part of the cavity.

[0016] A further technical solution of the present invention is: it also includes an electrode separator, and the electrode separator separates the cavity into two spaces.

[0017] The technical effect of the present invention is: the present invention provides a plasma electrode head and a plasma cleaning machine with a modular combination electrode, which constructs a plasma cleaning machine, including a high-voltage power supply, a gas control box, a plasma electrode head, and an ozone treatment module. The plasma electrode head includes a cavity, an electrode part arranged at the bottom of the cavity, and a high-voltage wire socket and an air inlet interface are provided at the top of the cavity. The electrode part includes a conductive module, an electrode module, a grounding plate, and a fixing module. The conductive module is connected to the electrode module, the electrode module is arranged at the lower part of the conductive module, the grounding plate is arranged at the lower part of the electrode module, the conductive module includes a conductive plate, and the fixing module is used to fix the electrode module. The electrode module includes multiple electrode blocks and conductive wires electrically connected to the electrode blocks. Each electrode block is independently packaged, and multiple electrode blocks are spliced ​​into the electrode module. The splicing shape of the electrode module is spliced ​​according to the shape required for use, and each electrode block is independently connected to the conductive plate through the conductive wire. The high-voltage power supply is connected to the conductive plate and thus to the electrode module via the high-voltage line socket. The gas control box delivers gas to the cavity via the air inlet interface. The ozone treatment module is disposed above and surrounds the cavity. In the present invention, the plasma electrode head is composed of a plurality of electrode blocks, each of which has a thin electrode layer disposed therein. The plurality of electrode blocks are assembled into the electrode module. This not only reduces the thickness of the electrode head, but also facilitates assembly, expansion, and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention.

[0019] Figure 2 Schematic diagram of the cavity structure of the present invention.

[0020] Figure 3 Schematic diagram of the cross-section of the electrode module of the present invention.

[0021] Figure 4 This is a schematic diagram of the electrode block splicing structure of the present invention.

[0022] Figure 5 This is a schematic diagram of another splicing structure of the electrode block of the present invention. DETAILED DESCRIPTION

[0023] The technical solution of the present invention is further described below in conjunction with specific embodiments.

[0024] like Figure 1 、 Figure 2 、 Figure 3As shown, the specific embodiment of the present invention is: constructing a plasma electrode head with a modular combination electrode, including a chamber 100, an electrode part arranged at the bottom of the chamber 100, a high-voltage line socket 104 and an air inlet interface 105 are arranged on the top of the chamber, the electrode part includes a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305, the conductive module is connected to the electrode module 308, the electrode module 308 is arranged at the lower part of the conductive module, the grounding plate 102 is arranged at the lower part of the electrode module 308, the conductive module includes a conductive plate 303 and a mounting plate for installing the conductive plate The conductive base plate 304 of 303, the conductive plate 303 is connected to the high-voltage power supply through the high-voltage line socket 104, the fixing module 305 is used to fix the electrode module 308, the electrode module 308 includes a plurality of electrode blocks 306, and a conductive wire 3065 electrically connected to the electrode block 306. Each of the electrode blocks 306 is independently packaged, and a plurality of the electrode blocks 306 are spliced ​​into the electrode module 308. The splicing shape of the electrode module 308 is spliced ​​according to the shape required for use, and each of the electrode blocks 306 is independently connected to the conductive plate 303 through the conductive wire 3065.

[0025] like Figure 1 、 Figure 2 、 Figure 3 As shown, the specific implementation process of the present invention is as follows: the plasma electrode head includes a chamber 100 and an electrode part. The conductive plate 303 of the electrode part is connected to a high-voltage power supply through the high-voltage line socket 104. The gas enters the chamber through the air inlet interface 105. The electrode part includes a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305. The electrode module 308 includes multiple electrode blocks 306 and conductive wires 3065. The electrode blocks 306 are independently packaged, and multiple electrode blocks 306 are spliced ​​together to form the electrode module 308. The electrode module 308 formed after splicing is installed between the conductive module and the grounding plate 102, and also includes a fixing block 305, which fixes the electrode module 308. The plasma electrode head of the present invention, whose electrode module 308 is spliced ​​by multiple electrode blocks 306, can be conveniently expanded infinitely. Through splicing, it can be extended or deformed according to the usage and spliced ​​into the required shape. In addition, the electrode module 308 is composed of multiple electrode blocks 306, which can also prevent the problem of needing to replace the entire electrode module 308 when damaged. When a certain electrode block 306 is damaged, only that electrode block 306 needs to be replaced, which greatly saves costs.

[0026] like Figure 1As shown, a preferred embodiment of the present invention is as follows: the electrode block 306 includes an electrode, a first substrate 3063, and a second substrate 3061. The electrode 3062 is disposed between the first substrate 3063 and the second substrate 3061. The electrode is layered, namely the electrode layer 3062, disposed between the first substrate 3063 and the second substrate 3061. The electrode layer 3062 is an electrode coating disposed on the first substrate 3063 or the second substrate 3061. The plasma electrode head of the present invention provides an ultra-thin electrode, which is coated or printed to greatly reduce the thickness of the electrode, making the plasma electrode head smaller and thinner.

[0027] like Figure 1 As shown, a preferred embodiment of the present invention is as follows: the conductive module includes a conductive plate 303, a conductive bottom plate 304, and a conductive cover plate 301. The conductive bottom plate 304 is provided with a groove for accommodating the conductive plate 303, the conductive plate 303 being disposed in the groove, and the conductive cover plate 301 abuts against the conductive plate 303. The conductive cover plate 301 is in a strip shape and abuts vertically against the conductive plate 303. The conductive cover plate 301 is connected to a high-voltage power supply, and the conductive plate 303 is connected to a plurality of electrode blocks 306.

[0028] The conductive module also includes a vertically arranged long strip of conductive cover plate 301, the top surface of one end of the conductive cover plate 301 is provided with an arc-shaped groove, the center of the groove is provided with a through hole, a high-voltage socket 302 is provided in the through hole, the high-voltage line socket 104 is inserted into the high-voltage socket 302, a rectangular long strip of conductive plate 303 is provided on the lower side of the conductive cover plate 301, the top surface of the conductive cover plate 304 is provided with a long strip groove, the long strip of conductive plate 303 is provided in the long strip groove, a pin hole is provided at each end of the top surface of the conductive cover plate 304, the conductive cover plate 304 is connected and fixed to the conductive plate 303 and the conductive plate bottom plate 301 by a pin shaft, the high-voltage socket 302 is fixed on the conductive plate 303, and a fixing block 305 is provided at the lower part of the conductive cover plate 304, which fixes the electrode module 308.

[0029] like Figure 3 As shown, a preferred embodiment of the present invention is as follows: the first substrate 3063 is positioned below the second substrate 3061, and the electrode layer 3062 is an electrode coating applied to the first substrate 3063. In a specific embodiment, the electrode coating can also be applied to the second substrate 3061. The plasma electrode head of the present invention utilizes ultra-thin electrodes, which are coated or printed to significantly reduce the thickness of the electrodes, making the plasma electrode head smaller and thinner.

[0030] like Figure 4As shown, a preferred embodiment of the present invention is that each electrode block 306 is independently connected to the conductive plate 303. A hole 3066 for a conductive wire to pass through is provided on the second substrate 3061 of each electrode block 306, and the conductive wire 3065 is connected to the conductive plate 303 through the hole 3066.

[0031] A preferred embodiment of the present invention is that the electrode block 306 is configured to be one or more of a bar shape, a block shape, or a special shape, and electrode blocks 306 of various shapes can be spliced ​​into electrode modules of various shapes as needed.

[0032] like Figure 1 、 Figure 2 、 Figure 3 As shown, the specific embodiment of the present invention is: constructing a plasma cleaning machine, including a high-voltage power supply (not shown in the figure), an air control box (not shown in the figure), a plasma electrode head, and an ozone treatment module (not shown in the figure), the plasma electrode head includes a cavity 100, an electrode portion arranged at the bottom of the cavity 100, a high-voltage line socket 104 and an air inlet interface 105 are provided at the top of the cavity, the electrode portion includes a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305, the conductive module is connected to the electrode module 308, the electrode module 308 is arranged at the lower part of the conductive module, and the grounding plate 102 is arranged at the lower part of the electrode module 308. The conductive module includes a conductive plate 303 and a conductive base plate 304 on which the conductive plate 303 is mounted. The conductive plate 303 is connected to a high-voltage power supply via the high-voltage line socket 104. The fixing module 305 is used to fix the electrode module 308. The electrode module 308 includes multiple electrode blocks 306 and conductive wires 3065 electrically connected to the electrode blocks 306. Each electrode block 306 is independently packaged, and multiple electrode blocks 306 are assembled to form the electrode module 308. The splicing shape of the electrode module 308 is spliced ​​according to the required shape. Each electrode block 306 is independently connected to the conductive plate 303 via the conductive wire 3065. The high-voltage power supply is connected to the conductive plate 303 and thus to the electrode module 308 via the high-voltage line socket 104. The gas control box delivers gas to the interior of the chamber 100 via the gas inlet interface 105. The ozone treatment module is disposed above and surrounds the chamber 100.

[0033] like Figure 1 、 Figure 2 、 Figure 3As shown, the specific implementation process of the present invention is as follows: the plasma cleaning machine includes a high-voltage power supply (not shown in the figure), a gas control box (not shown in the figure), a plasma electrode head, and an ozone treatment module. The plasma electrode head includes a chamber 100 and an electrode portion. The conductive plate 303 of the electrode portion is connected to the high-voltage power supply via the high-voltage line socket 104, and gas enters the chamber through the air inlet interface 105. The electrode portion includes a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305. The grounding plate 102 is provided with multiple micropores. The electrode module 308 includes multiple electrode blocks 306. The electrode blocks 306 include an electrode layer 3062, a first substrate 3063, a second substrate 3061, and conductive wires 3065. The electrode layer 3062 is disposed between the first substrate 3063 and the second substrate 3061. The electrode blocks 306 are independently packaged, and multiple electrode blocks 306 are spliced ​​to form the electrode module 308. The assembled electrode module 308 is installed between the conductive module and the grounding plate 102 and includes a fixing block 305 that secures the electrode module 308. The high-voltage power supply is connected to the conductive plate 303 and thus to the electrode module 308 via the high-voltage line socket 104. The gas control box delivers gas into the cavity 100 via the air inlet interface 105. The ozone treatment module is positioned above and surrounds the cavity 100. During cleaning, the electrode module 308 is energized with high voltage, generating a discharge with the grounding plate 102 below, decomposing the flowing gas into oxygen free radicals. These oxygen free radicals are then discharged through the micropores of the grounding plate 102, where they chemically react with the surface of the product being cleaned, completing the cleaning process.

[0034] like Figure 1 As shown, a preferred embodiment of the present invention is: the ozone treatment module includes a fixed plate A, a fixed plate B, an exhaust hood 203, and an exhaust port 204, the fixed plate A (201) and the fixed plate B are respectively fixed on opposite sides of the plasma electrode head, the exhaust hood 203 includes baffles on both sides, the exhaust hood 203 and the fixed plate A and the fixed plate B form an enclosed space, the exhaust hood 203 and the fixed plate A and the fixed plate B cover the plasma electrode head, and the exhaust port 204 is arranged on the exhaust hood 203.

[0035] like Figure 1 As shown, a preferred embodiment of the present invention is: further comprising a bus bar 106, which is disposed at the upper portion of the cavity 100. The bus bar 106 is used to guide the inflowing gas into the lower portion of the cavity, thereby ensuring uniform gas flow throughout the cavity 100.

[0036] like Figure 1As shown, the preferred embodiment of the present invention is: further comprising an electrode separator 301, said electrode separator 301 separating the chamber 100 into two spaces. The gas in each space is supplied separately through the gas connector 105, which makes the gas flow more orderly and ensures better cleaning effect.

[0037] The technical effect of the present invention is as follows: the present invention provides a plasma electrode head and a plasma cleaning machine with a modular combination electrode, comprising a high-voltage power supply (not shown in the figure), a gas control box (not shown in the figure), a plasma electrode head, and an ozone treatment module. The plasma electrode head comprises a cavity 100, an electrode portion arranged at the bottom of the cavity 100, a high-voltage line socket 104 and an air inlet interface 105 are arranged at the top of the cavity, the electrode portion comprises a conductive module, an electrode module 308, a grounding plate 102, and a fixing module 305, the conductive module is connected to the electrode module 308, the electrode module 308 is arranged at the lower part of the conductive module, the grounding plate 102 is arranged at the lower part of the electrode module 308, and the conductive module comprises A conductive plate 303 and a conductive base plate 304 for installing the conductive plate 303, the conductive plate 303 is connected to a high-voltage power supply through the high-voltage line socket 104, the fixing module 305 is used to fix the electrode module 308, the electrode module 308 includes multiple electrode blocks 306, the electrode blocks 306 include an electrode layer 3062, a first substrate 3063, a second substrate 3061, and a conductive wire 3065, the electrode layer 3062 is arranged between the first substrate 3063 and the second substrate 3061, the electrode block 306 is independently packaged, and multiple electrode blocks 306 are spliced ​​into the electrode module 308, and the conductive wire 3065 connects the electrode layer 3062 and the conductive plate 303. The high-voltage power supply is connected to the conductive plate 303 and thus to the electrode module 308 via the high-voltage line socket 104. The gas control box delivers gas to the interior of the chamber 100 via the air inlet interface 105. The ozone treatment module is disposed above and surrounds the chamber 100. The electrode block 306 of the present invention is provided with a thin electrode layer and includes multiple electrode blocks 306. Multiple electrode blocks 306 are spliced ​​together to form the electrode module 308. This not only reduces the thickness of the electrode head, but also facilitates assembly, expansion, and maintenance.

[0038] The above is a further detailed description of the present invention in conjunction with specific preferred embodiments, and the specific implementation of the present invention should not be considered to be limited to these descriptions. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should be considered to fall within the scope of protection of the present invention.

Claims

1. A plasma electrode head with modular combination electrodes, characterized in that: It includes a cavity, an electrode part arranged at the bottom of the cavity, a high-voltage line socket and an air inlet interface are arranged at the top of the cavity, the electrode part includes a conductive module, an electrode module, a grounding plate, and a fixing module, the conductive module is connected to the electrode module, the electrode module is arranged at the lower part of the conductive module, the grounding plate is arranged at the lower part of the electrode module, the conductive module includes a conductive plate, the fixing module is used to fix the electrode module, the electrode module includes a plurality of electrode blocks, and a conductive wire electrically connected to the electrode block, each of the electrode blocks is independently packaged, and a plurality of the electrode blocks are spliced ​​into the electrode module, the splicing shape of the electrode module is spliced ​​according to the shape required for use, and each of the electrode blocks is independently connected to the conductive plate through the conductive wire.

2. The plasma electrode head of the modular combination electrode according to claim 1, characterized in that: The device includes a first substrate, a second substrate and an electrode, wherein the electrode is located between the first substrate and the second substrate.

3. The plasma electrode head of the modular combination electrode according to claim 1, characterized in that: The electrodes in the electrode block are electrode coatings, and the electrode coatings are provided on the first substrate or the second substrate.

4. The plasma electrode head of the modular combination electrode according to claim 1, characterized in that: The conductive module includes a conductive plate, a conductive bottom plate, and a conductive cover plate. The conductive bottom plate is provided with a groove for accommodating the conductive plate. The conductive plate is arranged in the groove. The conductive cover plate abuts against the conductive plate.

5. The plasma electrode head of the modular combination electrode according to claim 1, characterized in that: The second substrate of each electrode block is provided with a hole for a conductive wire to pass through.

6. The plasma electrode head of the modular combination electrode according to claim 1, characterized in that: The electrode blocks are configured to be in one or more of a strip shape, a block shape or a special shape.

7. A plasma cleaning machine, characterized in that: It includes a high-voltage power supply, a plasma electrode head, a gas control box, and an ozone treatment module. The plasma electrode head includes a cavity, an electrode part arranged at the bottom of the cavity, and a high-voltage line socket and an air inlet interface are arranged on the top of the cavity. The electrode part includes a conductive module, an electrode module, a grounding plate, and a fixing module. The conductive module is connected to the electrode module. The electrode module is arranged at the bottom of the conductive module, and the grounding plate is arranged at the bottom of the electrode module. The conductive module includes a conductive plate and a conductive bottom plate for installing the conductive plate. The conductive plate is connected to the high-voltage power supply through the high-voltage line socket. The fixing module is used to fix the electrode module, which includes multiple electrode blocks and conductive wires electrically connected to the electrode blocks. Each electrode block is independently packaged, and multiple electrode blocks are spliced ​​into the electrode module. The splicing shape of the electrode module is spliced ​​according to the shape required for use. Each electrode block is independently connected to the conductive plate through the conductive wire. The high-voltage power supply is connected to the conductive plate through the high-voltage wire socket. The gas control box delivers gas to the cavity through the air inlet interface. The ozone treatment module is arranged above the cavity and surrounds the cavity.

8. The plasma cleaning machine according to claim 7, characterized in that: The ozone treatment module includes a fixed plate A, a fixed plate B, an exhaust hood, and an exhaust port. The fixed plate A and the fixed plate B are respectively fixed on opposite sides of the plasma electrode head. The exhaust hood covers the fixed plate A, the fixed plate B and the plasma electrode head. The exhaust port is arranged on the exhaust hood.

9. The plasma cleaning machine according to claim 7, characterized in that: It also includes a bus bar, which is arranged at the upper part of the cavity.

10. The plasma cleaning machine according to claim 7, characterized in that: It also includes an electrode separator, which separates the cavity into two spaces.

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