Short crystal bar bonding device and short crystal bar barreling method

Through the transportation, inspection, adjustment and dispensing process of the short crystal rod bonding device, the problem of notch slot position offset after the short crystal rod bonding was solved, the effective area and electrical performance of the wafer were increased, and the yield of the wafer was improved.

CN120620008APending Publication Date: 2025-09-12FERROTEC (NINGXIA) SEMICON TECH CO LTD
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Patent Information

Application Number
CN202511069374.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-31
Publication Date
2025-09-12

AI Technical Summary

Technical Problem

In the prior art, the notch slot position of the short crystal rod after bonding cannot accurately correspond to the predetermined notch slot position of the single-segment short crystal rod, resulting in the deviation of the actual processing position of the notch slot, causing loss of effective wafer area and degradation of electrical performance, and reducing wafer yield.

Method used

A short crystal rod bonding device is used, including a transportation component, a loading component, an orienting component, a dispensing component and a dispensing component. The crystal orientation is detected by the detection component, the azimuth angle of the Notch slot is adjusted by rotating the component, and the adhesive is applied to the dispensing component to form a splicing body of a predetermined length to ensure that the Notch slot position corresponds.

Benefits of technology

The precise correspondence of the Notch slot positions on the short crystal rod adhesive is achieved, which avoids positional offset, increases the effective area and electrical performance of the wafer, and improves the yield of the wafer.

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Abstract

The invention relates to the technical field of crystal bar machining, in particular to a short crystal bar bonding device and a short crystal bar barreling method.The device is internally provided with a conveying component, a feeding component, an orientation component, a dispensing component and a discharging component; the feeding component is installed at the first end of the conveying component. The orientation component comprises a detection assembly and an adjustment assembly, the detection assembly is installed above the transportation component and close to the first end of the transportation component, and the adjustment assembly is installed on the side face of the transportation component and located below the detection assembly; the dispensing component is mounted at the first end of the conveying component; the discharging component is installed at the second end of the conveying component. Thus, the positions, where Notch grooving is carried out, of the short crystal bars needing to be bonded are all adjusted to the preset angles through the orientation component, the positions, where Notch grooving is carried out, of the spliced body formed by bonding the short crystal bars correspond to the preset Notch grooving positions of the single short crystal bars, and therefore the effective area loss and electrical performance degradation of a wafer caused by Notch grooving position deviation are avoided; therefore, the yield of the wafer is improved.
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Description

Technical Field

[0001] The present invention relates to the technical field of crystal rod processing, and in particular to a short crystal rod bonding device and a short crystal rod rolling method. Background Art

[0002] In the field of semiconductor manufacturing, when currently producing large-diameter heavily doped silicon single crystals of 8 to 12 inches, high-concentration doping is required to meet the requirements of low resistivity of the wafers. High-concentration doping makes the effective section length that meets the target resistivity specification in the crystal rod shorter. Therefore, the crystal rod needs to be processed through the following process: 1. The full-length crystal rod is placed on a large-diameter roller grinder for overall roller grinding and shaping to remove the surface damage layer and accurately control the outer diameter size to the target value; 2. The whole rod after roller grinding is cut into segments according to the resistivity test results to obtain multiple crystal rod segments that meet the resistance specifications; 3. The crystal rod segments that meet the resistance specifications are notched by the roller grinder. However, the existing large-diameter roller grinders have a minimum length limit when notching, resulting in short crystal rods that cannot be directly notched.

[0003] At present, in order to enable short crystal rods to be notched, the industry generally manually bonds the short crystal rods to a length that meets the requirements of the roller grinding machine for notch processing. However, manual placement of the crystal rods is prone to deviation, making it difficult to firmly place the crystal rods to be bonded. In addition, manual operation is prone to errors, making it difficult to ensure that the axes of the short crystal rods remain coaxial.

[0004] In order to solve the above technical problems, the technical solution of the Chinese utility model patent announcement with patent application number CN202421084529.1 is a silicon single crystal rod splicing device, including a workbench, a first placing component is fixedly provided on one side of the top of the workbench, a moving mechanism is provided at the bottom end of the workbench, the top of the moving mechanism is fixedly connected to a second placing component used in conjunction with the first placing component, the second placing component includes a vertical shell, one end of the vertical shell is fixedly connected to a first support, the top of the first support is fixedly connected to a cylinder, and the output end of the cylinder is fixedly connected to a moving plate. The present application uses the setting of the placement component structure to ensure that two silicon single crystal rods to be spliced ​​are firmly placed at the same horizontal height when splicing the rods, so as to facilitate the splicing of the silicon single crystal rods. The present application uses the setting of the moving mechanism structure to facilitate the accurate and rapid docking of the two silicon single crystal rods, so as to improve the splicing effect of the splicing device.

[0005] However, the above-mentioned prior art has the following technical problems: the above-mentioned silicon single crystal rod splicing device does not mark the Notch groove processing position on the single-segment short crystal rod in advance before splicing the short crystal rods, so that the position of the Notch groove on the subsequent splicing body formed by bonding the short crystal rods cannot accurately correspond to the predetermined Notch processing position of the single-segment short crystal rod, causing the actual processing position of the Notch groove to shift to the end transition zone or invalid section of the short crystal rod, resulting in a decrease in the effective utilization area of ​​the wafer obtained by subsequent cutting of the short crystal rod and deterioration of the electrical performance parameters, resulting in a decrease in the yield of the wafer. Summary of the Invention

[0006] In view of this, it is necessary to provide a short crystal rod bonding device and a short crystal rod rolling method, which can make the position of the Notch groove on the spliced ​​body formed by bonding the short crystal rods correspond to the predetermined Notch groove position of the single-segment short crystal rod, so as to avoid the loss of effective area of ​​the wafer and degradation of electrical performance caused by the deviation of the Notch groove position, thereby improving the yield of the wafer.

[0007] In the first aspect, the present invention provides a short crystal rod bonding device, including a transport component, a loading component, an orienting component, a dispensing component and a discharging component, wherein the transport component is used to carry and transport the short crystal rod to be bonded, and transport it from the first end to the second end of the transport component; the loading component is installed at the first end of the transport component, and is used to transport the short crystal rod to be bonded from an initial position and place it on the first end of the transport component; the orienting component includes a detection component and an adjustment component, the detection component is installed above the transport component and close to the first end of the transport component, and is used to detect the crystal orientation of the short crystal rod carried on the transport component, and the adjustment component is installed on the side of the transport component and is located below the detection component, and is used to adjust the orientation of the short crystal rod based on the crystal orientation of the short crystal rod. According to the crystal orientation of the short crystal rod detected by the detection component, the azimuth angle of the Notch groove of the short crystal rod is rotated to a predetermined angle; the dispensing component is installed at the first end of the transport component, and is used to apply adhesive to the end face of the short crystal rod facing the first end of the transport component after the adjustment component completes the adjustment of the crystal orientation of the short crystal rod, and the short crystal rod coated with the dispensing component is transported to the second end of the transport component through the transport component, and the end face of the short crystal rod coated with adhesive at the second end of the transport component is in contact and bonded with the end face of the short crystal rod not coated with adhesive that is subsequently transported to form a splicing body of a predetermined length; the blanking component is installed at the second end of the transport component, and is used to remove the splicing body from the second end of the transport component and store it.

[0008] 7. The swiftly and minutely adjusting device for a wood-planer working table as claimed in claim 1, wherein said linking rod and said adjusting base are pivotally connected to each other with a bolt, and said bolt has a round shank to contact with said linking rod. said linking rod having a round shank and a bolt has been specially designed for carrying said block.

[0009] Preferably, the loading component includes a loading rack, at least two first loading beams, a second loading beam, a loading reel and a loading clamp, the loading rack is mounted on the first end of the transport component, the two first loading beams are symmetrically installed on the top of the loading rack, the top surfaces at both ends of the second loading beam are slidably installed on the bottom of the two first loading beams, so that the second loading beam can slide along the length direction of the two first loading beams; the fixed end of the loading reel is slidably installed on the bottom surface of the second loading beam, so that the loading reel can slide along the length direction of the second loading beam, the telescopic end of the loading reel is arranged in the vertical direction and fixedly connected to the fixed end of the loading clamp, so that the height of the loading clamp can be adjusted by the telescopic end of the loading reel, and the clamping end of the loading clamp is used to clamp the short crystal rod.

[0010] Preferably, the detection assembly includes a detection frame, an x-ray emitter and an x-ray receiver, the two ends of the bottom of the detection frame are fixedly mounted on both sides of the transport member, and close to the first end of the transport member, and a channel is also opened at the bottom of the detection frame to allow the short crystal rod transported by the transport member to pass through the detection assembly from the channel; the x-ray emitter and the x-ray receiver are fixedly mounted on the top of the detection frame at a certain angle, and meet the following requirements: the x-rays emitted by the x-ray emitter can be received by the x-ray receiver after diffraction in the short crystal rod, so as to detect the crystal orientation of the short crystal rod.

[0011] Preferably, the adjustment assembly includes at least one second drive motor and two rotating shaft groups with the same structure, the two rotating shaft groups are symmetrically arranged on both sides of the transport member, and each rotating shaft group includes a rotating shaft frame and a roller, the bottom of the rotating shaft frame is fixedly installed on one side of the transport member, and the roller is rotatably installed on the top of the rotating shaft frame, and the outer edge thereof is used for frictional contact with the outer edge of the short crystal rod carried by the transport member, so that the rotation of the roller can drive the short crystal rod to rotate, thereby adjusting the Notch slot azimuth angle of the short crystal rod; the fixed end of each second drive motor is fixedly installed on the rotating shaft frame, and the driving end is connected to the roller driving so as to drive the corresponding roller to rotate through the second drive motor.

[0012] Preferably, the glue dispensing component includes two first adjustment components, a second adjustment component, a third adjustment component, a smearing component and a glue storage component, the two first adjustment components are symmetrically mounted on the first end of the transport component, each first adjustment component includes a first adjustment frame, two first adjustment rods, two first adjustment platforms and two first adjustment motors, the length direction of the first adjustment frame is the same as the transport direction of the transport component, the two first adjustment rods are symmetrically mounted above the first adjustment frame along the length direction of the first adjustment frame, each first adjustment platform is movably mounted on a first adjustment rod and is threadedly connected to the first adjustment rod; the fixed end of each first adjustment motor is fixedly mounted on the first adjustment frame, and the driving end of each first adjustment motor is drivingly connected to a first adjustment rod, so as to drive the corresponding first adjustment rod to rotate by the first adjustment motor, thereby adjusting the position of the corresponding first adjustment platform; The second adjustment assembly includes a second adjustment frame, two second adjustment rods, two second adjustment platforms and a second adjustment motor, the length direction of the second adjustment frame being perpendicular to the length direction of the first adjustment frame; the bottom surface of the second adjustment frame is fixedly connected to the top surface of the two first adjustment platforms of each first adjustment assembly, so as to move along the length direction of the first adjustment frame under the drive of each first adjustment platform; the two second adjustment rods are symmetrically installed above the second adjustment frame along the length direction of the second adjustment frame, and each second adjustment platform is slidably installed on a second adjustment rod and is threadedly connected to the second adjustment rod; the fixed end of each second adjustment motor is fixedly installed on the second adjustment frame, and the driving end of each second adjustment motor is drivingly connected to a second adjustment rod, so as to drive the corresponding second adjustment rod to rotate by the second adjustment motor, thereby adjusting the position of the corresponding second adjustment platform; The third adjustment assembly includes a third adjustment frame and a telescopic platform. The bottom surface of the third adjustment frame is fixedly connected to the top surfaces of the two second adjustment platforms so as to be movable along the length direction of the second adjustment frames under the drive of each second adjustment platform. The bottom of the telescopic platform is arbitrarily mounted on the top of the third adjustment frame, and the top is fixedly connected to the smearing assembly to adjust the height of the smearing assembly. The input end of the coating component is connected to the output end of the glue storage component to extract the adhesive stored in the glue storage component, and the output end of the coating component is used to apply the extracted adhesive to the end face of the short crystal rod.

[0013] The lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of the lifting of

[0014] In a second aspect, the present invention provides a short crystal ingot tumbling method based on the short crystal ingot bonding device described in the first aspect, comprising the following steps: S1, adjusting: using the orienting member to adjust the azimuth angle of the notch of the short crystal ingot to be bonded to a predetermined angle; S2, bonding: bonding the adjusted short crystal rods into a spliced ​​body of predetermined length using the transport component and the glue dispensing component; S3, slotting: the spliced ​​body is subjected to a tumbling process and slotting by a tumbling machine; S4, degumming: degumming the spliced ​​body after slotting.

[0015] Preferably, the step S1 includes the following steps: S101, using the loading component to transport the short crystal ingot to be bonded and placing it on the first end of the transport component; S102, transporting the short crystal ingot to the bottom of the detection assembly by using the transport component, and detecting the crystal orientation of the short crystal ingot by using the detection assembly; S103 , using the adjustment component to rotate the corresponding short crystal ingot according to the crystal orientation of the short crystal ingot detected by the detection component, so that the azimuth angle of the notch groove thereof is rotated to a predetermined angle.

[0016] Preferably, step S2 includes the following steps: S201, using the dispensing component to apply adhesive to the end surface of the short crystal ingot facing the first end of the transport component; S202, using the transport component to transport the glue-coated short crystal rod to the second end of the transport component, so that at the second end of the transport component, the un-glue-coated end face of the subsequently transported short crystal rod contacts the glue-coated end face of the previous segment crystal rod; and after the adhesive is cured, a spliced ​​body of a predetermined length is formed.

[0017] The above-mentioned short crystal rod bonding device is provided with a transport component, a loading component, an orienting component, a glue dispensing component and a unloading component; the loading component is installed at the first end of the transport component; the orienting component includes a detection component and an adjustment component, the detection component is installed above the transport component and close to the first end of the transport component, and the adjustment component is installed on the side of the transport component and is located below the detection component; the glue dispensing component is installed at the first end of the transport component; the unloading component is installed at the second end of the transport component; in this way, the short crystal rod to be bonded is transported from the initial position (for example, a storage area or a transport trolley, etc.) and placed on the first end of the transport component by the loading component; the short crystal rod moves toward the second end of the transport component, stops moving when it reaches the orienting component, and the crystal orientation of the short crystal rod is detected by the detection component, and at the same time, the adjustment component adjusts the Notch groove of the crystal rod according to the detected crystal orientation. The angle is rotated to a predetermined angle; after the adjustment component completes the orientation adjustment of the short crystal rod, the adhesive is applied to the end face of the crystal rod facing the first section of the transport component through the dispensing component; as the transport component continues to operate, the short crystal rod reaches the second end of the transport component and stops moving, and there it contacts and bonds with the short crystal rods subsequently transported by the transport component until a splicing body of a predetermined length is formed; the unloading component removes the splicing body from the second end of the transport component and stores it; the positions of the Notch grooves of the short crystal rods to be bonded are adjusted to a predetermined angle through the directional component, so that the positions of the Notch grooves on the splicing body formed by bonding the short crystal rods correspond to the predetermined Notch groove positions of the single-segment short crystal rods, so as to avoid the loss of effective area of ​​the wafer and degradation of electrical performance caused by the offset of the Notch groove position, thereby improving the yield of the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional diagram of the short crystal rod bonding device of the present application.

[0019] Figure 2 It is a three-dimensional diagram of the transport component of the present application.

[0020] Figure 3 This application Figure 2 A partial enlarged view of area A in the middle.

[0021] Figure 4 It is a three-dimensional diagram of the feeding component of the present application.

[0022] Figure 5 It is a three-dimensional diagram of the directional component of the present application.

[0023] Figure 6 It is a three-dimensional diagram of the dispensing component of the present application.

[0024] Figure 7 It is a side view of the dispensing component of the present application.

[0025] Figure 8 It is a three-dimensional diagram of the blanking component of this application.

[0026] In the figure: short ingot bonding device 10, transport component 20, conveying assembly 21, conveying base 211, rotating wheel group 212, transport frame 2121, transport wheel 2122, first drive motor 2123, transmission gear 2124, baffle 22, loading component 30, loading frame 31, first loading beam 32, second loading beam 33, loading reel 34, loading clamp 35, orienting component 40, detection component 41, detection frame 411, X-ray emitting element 412, X-ray receiving element 413, adjustment component 42, second drive motor 421, rotating shaft group 422, rotating shaft frame 42 21. Roller 4222. Glue dispensing component 50. First adjustment component 51. First adjustment frame 511. First adjustment rod 512. First adjustment platform 513. First adjustment motor 514. Second adjustment component 52. Second adjustment frame 521. Second adjustment rod 522. Second adjustment platform 523. Second adjustment motor 524. Third adjustment component 53. Third adjustment frame 531. Telescopic platform 532. Coating component 54. Glue storage component 55. Unloading component 60. Unloading frame 61. First unloading beam 62. Second unloading beam 63. Unloading reel 64. Unloading clamp 65. Storage rack 66. DETAILED DESCRIPTION

[0027] The technical solutions and technical effects of the embodiments of the present invention are further elaborated below in conjunction with the accompanying drawings of the present invention.

[0028] Please refer to Figure 1In the first aspect, the present invention provides a short crystal rod bonding device 10, comprising a transport component 20, a loading component 30, an orienting component 40, a dispensing component 50 and a discharging component 60, wherein the transport component 20 is used to carry and transport the short crystal rod to be bonded, and transport it from the first end to the second end of the transport component 20; the loading component 30 is installed at the first end of the transport component 20, and is used to transport the short crystal rod to be bonded from the initial position and place it on the first end of the transport component 20; the orienting component 40 includes a detection component 41 and an adjustment component 42, the detection component 41 is installed above the transport component 20 and close to the first end of the transport component 20, and is used to detect the crystal orientation of the short crystal rod carried on the transport component 20, and adjust the orientation of the short crystal rod The component 42 is installed on the side of the transport component 20 and is located below the detection component 41. It is used to rotate the Notch groove azimuth angle of the short crystal rod to a predetermined angle according to the crystal orientation of the short crystal rod detected by the detection component 41; the dispensing component 50 is installed at the first end of the transport component 20. After the adjustment component 42 completes the adjustment of the crystal orientation of the short crystal rod, it applies the adhesive to the end face of the short crystal rod facing the first end of the transport component 20, and transports the short crystal rod coated with the dispensing component 50 to the second end of the transport component 20 through the transport component 20. The end face of the short crystal rod coated with the adhesive at the second end of the transport component 20 contacts and bonds with the end face of the short crystal rod not coated with the adhesive subsequently transported to form a predetermined The length of the splicing body; the unloading component 60 is installed at the second end of the transport component 20, and is used to remove the splicing body from the second end of the transport component 20 and store it; in this way, the short crystal rod to be bonded is transported from the initial position and placed on the first end of the transport component 20 by the loading component 30; the short crystal rod moves toward the second end of the transport component 20, stops moving when it reaches the orienting component 40, and the crystal orientation of the short crystal rod is detected by the detection component 41, and the adjustment component 42 rotates the Notch groove azimuth of the crystal rod to a predetermined angle according to the detected crystal orientation; after the adjustment component 42 completes the orientation adjustment of the short crystal rod, the adhesive is applied to the end face of the crystal rod facing the first section of the transport component 20 by the dispensing component 50 On; as the transport component 20 continues to operate, the short crystal rod reaches the second end of the transport component 20 and stops moving, and there it contacts and bonds with the short crystal rod subsequently transported by the transport component 20 until a splicing body of a predetermined length is formed; the unloading component 60 removes the splicing body from the second end of the transport component 20 and stores it; the positions of the Notch grooves of the short crystal rods to be bonded are adjusted to a predetermined angle by the orienting component 40, so that the positions of the Notch grooves on the splicing body formed by bonding the short crystal rods correspond to the predetermined Notch groove positions of the single-segment short crystal rods, so as to avoid the loss of effective area of ​​the wafer and degradation of electrical performance caused by the offset of the Notch groove position, thereby improving the yield of the wafer.

[0029] In this embodiment, when the end face of the short crystal rod that is subsequently transported to the second end of the transport member 20 through the transport member 20 and is not coated with adhesive comes into contact with the end face of the short crystal rod that has stopped at the second end of the transport member 20 or the splicing body that is being formed and is coated with adhesive, since the short crystal rod has a certain speed, it will generate a certain instantaneous pressure on the contact surface. This instantaneous pressure can make the two end faces fit tightly, promote the uniform diffusion of the adhesive on the contact surface, and effectively eliminate bubbles that may be entrained in the adhesive, thereby initially forming a firm bonding point at the moment of contact between the short crystal rods.

[0030] In this embodiment, the bonded short crystal ingots have the same diameter and crystal orientation to ensure that their notch groove requirements are consistent.

[0031] Please refer to Figure 2 and Figure 3 Furthermore, the transport component 20 includes at least two conveying components 21 and baffles 22 with the same structure, and each conveying component 21 is connected head to tail; the baffle 22 is fixedly installed on the conveying component 21 at the end of the transport component 20, so as to enable the short crystal rod carried and transported by the transport component 20 to stay at the baffle 22; each conveying component 21 includes a conveying base 211 and two rotating wheel groups 212 with the same structure, and the two rotating wheel groups 212 are symmetrically installed on both sides of the conveying base 211; each rotating wheel group 212 includes a transport frame 2121, at least two transport wheels 2122 and a first driving motor 2123, and the transport frame 2121 is fixedly installed on the side of the conveying base 211 at a certain angle to form a stable support for the short crystal rod with the conveying base 211 Transport groove, a transport groove is opened on the transport frame 2121, and each transport wheel 2122 is rotatably installed in the transport groove and is evenly arranged. Each transport wheel 2122 is connected to the adjacent transport wheel 2122 by transmission so that all transport wheels 2122 can rotate synchronously; the fixed end of the first drive motor 2123 is fixedly installed on the transport frame 2121, and the driving end is connected to one of the transport wheels 2122 to drive each transport wheel 2122 to rotate synchronously through the first drive motor 2123, thereby transporting the short crystal rod from the first end of the transport component 20 to the second end; specifically, by setting at least two conveying components 21 with the same structure, the transport component 20 can be divided into a transport area and a rod storage area for independent control, and the operations performed in each area do not interfere with each other.

[0032] In this embodiment, a transmission gear 2124 is provided on the rotating shaft of each transport wheel 2122 , and the transmission gears 2124 of adjacent transport wheels 2122 are meshed with each other, so that the transmission connection of each transport wheel 2122 is achieved through the transmission gear 2124 .

[0033] Please refer to Figure 4Furthermore, the feeding member 30 includes a feeding frame 31, at least two first feeding beams 32, a second feeding beam 33, a feeding roll 34 and a feeding clamp 35. The feeding frame 31 is mounted on the first end of the transport member 20, and the two first feeding beams 32 are symmetrically mounted on the top of the feeding frame 31. The top surfaces of the two ends of the second feeding beam 33 are slidably mounted on the bottom of the two first feeding beams 32, so that the second feeding beam 33 can slide along the length direction of the two first feeding beams 32; the fixed end of the feeding roll 34 can be It is slidably mounted on the bottom surface of the second loading beam 33 so that the loading drum 34 can slide along the length direction of the second loading beam 33. The telescopic end of the loading drum 34 is arranged in the vertical direction and is fixedly connected to the fixed end of the loading clamp 35. The height of the loading clamp 35 can be adjusted by the telescopic end of the loading drum 34. The clamping end of the loading clamp 35 is used to clamp the short crystal rod; specifically, the radial and tangential movement of the loading clamp 35 in the horizontal direction is achieved through the sliding of the second loading beam 33 and the sliding of the loading drum 34.

[0034] Please refer to Figure 5 Furthermore, the detection component 41 includes a detection frame 411, an x-ray emitter 412 and an x-ray receiver 413. The two ends of the bottom of the detection frame 411 are fixedly installed on both sides of the transport member 20, and close to the first end of the transport member 20. A channel is also opened at the bottom of the detection frame 411 to allow the short crystal rod transported by the transport member 20 to pass through the detection component 41 from the channel; the x-ray emitter 412 and the x-ray receiver 413 are fixedly installed at a certain angle on the top of the detection frame 411, and meet the following requirements: the x-ray emitted by the x-ray emitter 412 can be received by the x-ray receiver 413 after diffraction in the short crystal rod, so as to detect the crystal orientation of the short crystal rod.

[0035] Please refer to Figure 5 Furthermore, the adjustment component 42 includes at least one second drive motor 421 and two rotating shaft groups 422 with the same structure. The two rotating shaft groups 422 are symmetrically arranged on both sides of the transport member 20. Each rotating shaft group 422 includes a rotating shaft frame 4221 and a rotating roller 4222. The bottom of the rotating shaft frame 4221 is fixedly mounted on one side of the transport member 20, and the rotating roller 4222 is rotatably mounted on the top of the rotating shaft frame 4221, and its outer edge is used for frictional contact with the outer edge of the short crystal rod carried by the transport member 20, so that the rotation of the rotating roller 4222 can drive the short crystal rod to rotate, thereby adjusting the Notch slot azimuth angle of the short crystal rod; the fixed end of each second drive motor 421 is fixedly mounted on the rotating shaft frame 4221, and the driving end is connected to the rotating roller 4222 to drive the corresponding rotating roller 4222 to rotate through the second drive motor 421.

[0036] In one embodiment, the rotating shaft frame 4221 also has a lifting function, and the adjustment process of the adjustment component 42 on the short crystal rod is as follows: 1. When the short ingot reaches the bottom of the detection frame 411, the two rotating shaft frames 4221 rise synchronously, causing the two rollers 4222 to contact the short ingot and lift the short ingot off the transport member 20; 2. The second drive motor 421 rotates the short ingot according to its crystal orientation so that the notch angle of the short ingot reaches a predetermined angle; 3. The two rotating shaft frames 4221 descend synchronously, and after the short crystal ingot is placed on the transport member 20, the two rotating rollers 4222 are separated from the short crystal ingot for subsequent steps.

[0037] In this embodiment, the orienting member 40 further includes a control component, which is electrically connected to the detection component 41 and the adjustment component 42. Specifically, the process of adjusting the azimuth angle of the notch of the short crystal ingot by the orienting member 40 is as follows: 1. When the short ingot reaches the bottom of the detection rack 411, the X-ray emitter 412 emits an X-ray beam that penetrates the lattice structure inside the ingot at a specific angle of incidence and continuously generates a diffracted beam. Simultaneously, the X-ray receiver 413 receives the diffracted beam and transmits the diffraction intensity data to the control unit. 2. The control component issues a rotation command to the second drive motor 42. Driven by the second drive motor 42, the roller 4222 rotates at a constant speed and drives the short crystal ingot to rotate at a constant speed, causing the diffraction intensity to change periodically with the rotation angle of the short crystal ingot. 3. The control component analyzes the diffraction intensity data received from the X-ray receiving element 413, identifies the specific rotation angle at which the diffraction intensity peak occurs, and calculates the crystal orientation of the short crystal rod based on the fixed correspondence between this angle and the direction of the normal line of the crystal plane generating the diffraction; 4. The control component is based on the corresponding rules of the preset crystal direction and the Notch slot standard orientation (for example: <100> Crystal direction, the Notch groove should be located at <110> Direction), automatically calculate the Notch azimuth of the short crystal rod; 5. The control component issues a rotation instruction to the second drive motor 42 according to the Notch groove azimuth angle and the predetermined angle. The roller 4222 drives the short crystal ingot to rotate around its own axis under the drive of the second drive motor 42, so that the Notch groove azimuth angle of the short crystal ingot rotates to the predetermined angle.

[0038] Please refer to Figure 6 and Figure 7, further, the glue dispensing component 50 includes two first adjustment components 51, a second adjustment component 52, a third adjustment component 53, a smearing component 54 and a glue storage component 55, the two first adjustment components 51 are symmetrically installed on the first end of the transport component 20, each first adjustment component 51 includes a first adjustment frame 511, two first adjustment rods 512, two first adjustment platforms 513 and two first adjustment motors 514, the length direction of the first adjustment frame 511 is the same as the transport direction of the transport component 20, the two first adjustment rods 512 are symmetrically installed above the first adjustment frame 511 along the length direction of the first adjustment frame 511, each first adjustment platform 513 is movably installed on a first adjustment rod 512 and is threadedly connected to the first adjustment rod 512; the fixed end of each first adjustment motor 514 is fixedly installed on the first adjustment frame 511, and the driving end of each first adjustment motor 514 is drivingly connected to a first adjustment rod 512, so as to drive the corresponding first adjustment rod 512 to rotate through the first adjustment motor 514, thereby adjusting the position of the corresponding first adjustment platform 513; The second adjustment assembly 52 includes a second adjustment frame 521, two second adjustment rods 522, two second adjustment platforms 523, and a second adjustment motor 524. The length direction of the second adjustment frame 521 is perpendicular to the length direction of the first adjustment frame 511. The bottom surface of the second adjustment frame 521 is fixedly connected to the top surface of the two first adjustment platforms 513 of each first adjustment assembly 51, so that it can move along the length direction of the first adjustment frame 511 under the drive of each first adjustment platform 513. The two second adjustment rods 522 are symmetrically mounted above the second adjustment frame 521 along the length direction of the second adjustment frame 521. Each second adjustment platform 523 is slidably mounted on a second adjustment rod 522 and is threadedly connected to the second adjustment rod 522. The fixed end of each second adjustment motor 524 is fixedly mounted on the second adjustment frame 521. The driving end of each second adjustment motor 524 is drivingly connected to a second adjustment rod 522, so that the second adjustment motor 524 drives the corresponding second adjustment rod 522 to rotate, thereby adjusting the position of the corresponding second adjustment platform 523. The third adjustment assembly 53 includes a third adjustment frame 531 and a telescopic platform 532. The bottom surface of the third adjustment frame 531 is fixedly connected to the top surfaces of the two second adjustment platforms 523, so that it can move along the length direction of the second adjustment frame 521 under the drive of each second adjustment platform 523. The bottom of the telescopic platform 532 is arbitrarily mounted on the top of the third adjustment frame 531, and the top is fixedly connected to the smear assembly 54 to adjust the height of the smear assembly 54. The input end of the smearing component 54 is connected to the output end of the glue storage component 55 to extract the adhesive stored in the glue storage component 55. The output end of the smearing component 54 is used to apply the extracted adhesive to the end face of the short crystal rod; Specifically, the radial and tangential directions of the smear component 54 in the horizontal direction are adjusted by the first adjustment component 51 and the second adjustment component 52 , and the position of the smear component 54 in the vertical direction is adjusted by the third adjustment component 53 .

[0039] In one embodiment, the adhesive stored in the glue storage component 55 is epoxy resin, and the glue storage component 55 is provided with independent material tanks for storing glue A and glue B respectively, and the temperature in each material tank is controlled at a low level to prevent the glue A or glue B stored in the material tank from solidifying; when the coating component 54 coats the epoxy resin, the glue A and glue B are mixed only at the last moment when it is applied to the end face of the short crystal rod to prevent the epoxy resin from solidifying in the coating component 54.

[0040] In this embodiment, the dispensing principle of the dispensing member 50 is the same as that of an epoxy resin dispensing machine.

[0041] In this embodiment, the adhesive used is an adhesive that does not contaminate the crystal rod and is easy to separate, such as paraffin wax and epoxy resin.

[0042] Please refer to Figure 8 Furthermore, the unloading component 60 includes an unloading rack 61, at least two first unloading beams 62, a second unloading beam 63, at least two unloading reels 64, at least two unloading clamps 65 and at least one storage rack 66. The unloading rack 61 is mounted on the second end of the transport component 20, and the two first unloading beams 62 are symmetrically mounted on the top of the unloading rack 61. The top surfaces of the two ends of the second unloading beam 63 are slidably mounted on the bottom of the two first unloading beams 62, so that the second unloading beam 63 can slide along the length direction of the two first unloading beams 62; each unloading reel 64 The fixed end is slidably mounted on the bottom surface of the second unloading beam 63 so that each unloading drum 64 can slide along the length direction of the second unloading beam 63. The telescopic end of each unloading drum 64 is arranged in the vertical direction and fixedly connected to the fixed end of a unloading clamp 65, so that the height of the corresponding unloading clamp 65 can be adjusted by the telescopic end of the unloading drum 64. The clamping end of each unloading clamp 65 is used to clamp the splicing body; each storage rack 66 is arranged below the unloading rack 61 and is arranged parallel to the transport component 20 for storing the splicing body clamped by the unloading clamp 65.

[0043] In this embodiment, the surface of the baffle 22, the surface of the conveying base 211, the surface of the transport wheel 2122, the surface of the rotating roller 4222, the clamping end of the loading clamp 35 and the clamping end of the unloading clamp 65 are all provided with a flexible protective layer; and the flexible protective layer is made of a material that will not contaminate the crystal rod.

[0044] In this embodiment, the short ingot bonding device 10 is disposed in a factory building with a radiation protection design.

[0045] In a second aspect, the present invention provides a short ingot tumbling method based on the short ingot bonding device 10 of the first aspect, comprising the following steps: S1, adjustment: using an orienting member to adjust the azimuth angle of the notch of the short crystal ingot to be bonded to a predetermined angle; S2, bonding: using a transport component and a dispensing component to bond the adjusted short crystal rods into a spliced ​​body of predetermined length; S3, slotting: slotting the spliced ​​body by a roller mill; S4, degumming: degumming the spliced ​​body after slotting.

[0046] In this embodiment, the adhesive used is paraffin wax or epoxy resin.

[0047] Furthermore, step S1 includes the following steps: S101, the loading component 30 transports the short crystal ingot to be bonded and places it on the first end of the transport component 20; S102, transporting the short crystal ingot to the bottom of the detection assembly 41 by using the transport component 20, and detecting the crystal orientation of the short crystal ingot by using the detection assembly 41; S103 , using the adjustment component 42 to rotate the corresponding short crystal ingot according to the crystal orientation of the short crystal ingot detected by the detection component 41 , so that the azimuth angle of the notch groove thereof is rotated to a predetermined angle.

[0048] Furthermore, step S2 includes the following steps: S201, using the dispensing component 50 to apply adhesive to the end surface of the short crystal rod facing the first end of the transport component 20; S202, using the transport component 20 to transport the glue-coated short crystal rod to the second end of the transport component 20, so that at the second end of the transport component 20, the un-glue-coated end face of the subsequently transported short crystal rod is in contact with the glue-coated end face of the previous segment crystal rod; and after the adhesive is cured, a spliced ​​body of a predetermined length is formed.

[0049] In this embodiment, the predetermined length is a length that meets the requirements of the grooving process of the roller grinder.

[0050] Example 1, working process of the short crystal rod bonding device 10: 1. The operator transports the pre-selected short ingots of the same diameter and crystal orientation to the workshop where the short ingot bonding device 10 is located, and places the short ingots horizontally within reach of the loading member 30. 2. Adjust the positions of the second loading beam 33 and the loading drum 34 so that the loading jaws 35 are positioned above the short ingot. Then, the telescopic end of the loading drum 34 descends, and the loading jaws 35 grip the short ingot. 3. Adjust the positions of the second loading beam 33 and the loading reel 34 so that the loading jaws 35 are located above the first end of the transport member 20. Then, lower the telescopic end of the loading reel 34, and the loading jaws 35 clamp the ingot and place it horizontally on the first end of the transport member 20. 4. The short crystal ingot is driven by each transport wheel 2122 to move from the first end to the second end of the transport member 20; 5. When the short crystal ingot moves to the bottom of the detection assembly 41, it stops moving. The X-ray emitting element 412 emits an X-ray beam at a specific angle to penetrate the lattice structure inside the crystal ingot and continuously generate a diffracted beam. At the same time, the X-ray receiving element 413 receives the diffracted beam and records the intensity of the diffracted beam. 6. The second drive motor 421 of the adjustment assembly 42 drives the roller 4222 to rotate. The outer edge of the roller 4222 frictionally contacts the outer edge of the short crystal ingot, causing the short crystal ingot to rotate about its own axis, causing the intensity of the diffracted beam to continuously change. Simultaneously, the X-ray receiving element 413 analyzes the peak intensity of the diffracted beam to determine the crystal orientation of the short crystal ingot and, based on this, the notch azimuth. 7. The second drive motor 421 of the adjustment assembly 42 drives the roller 4222 to rotate. The outer edge of the roller 4222 frictionally contacts the outer edge of the short crystal ingot, driving the short crystal ingot to rotate around its own axis and rotate the notch groove azimuth angle to a predetermined angle. 8. The output end of the smearing assembly 54 is driven by the first adjustment assembly 51 to be close to the end surface of the short crystal ingot facing the first end of the transport member 20; 9. The coating assembly 54 extracts adhesive from the adhesive storage assembly 55 and applies the adhesive to the end face of the short crystal ingot. At the same time, the second adjustment assembly 52 and the third adjustment assembly 53 adjust the position of the output end of the coating assembly 54. 10. The transport member 20 restarts and transports the glue-coated short crystal ingot to the second end of the transport member 20. The crystal ingot is stopped by the baffle 22 on the conveying assembly 21; 11. After orientation and adhesive application, the subsequent short ingot is transported to the second end. The uncoated end of the ingot facing the second end of the transport member 20 contacts the adhesive-coated end of the ingot facing the first end of the transport member 20 at the baffle 22, and the ingot is bonded and fixed together due to contact pressure and adhesive curing. This process is repeated until multiple short ingots are bonded end to end at the baffle 22 to form a spliced ​​body of a predetermined length. 12. Adjust the positions of the second unloading beam 63 and the unloading drum 64 so that the lower material clamps 65 are located above the spliced ​​body. Then, the telescopic end of the unloading drum 64 descends and the unloading clamps 65 clamp the spliced ​​body. 13. After adjusting the positions of the second unloading beam 63 and the unloading drum 64 so that the lower material clamps 65 are located above the storage rack 66, the telescopic end of the unloading drum 64 descends, and the unloading clamps 65 place the spliced ​​body on the storage rack 66; 14. The operator manually removes the spliced ​​body from the storage rack 66 and transfers it to the tumbling process for subsequent processing.

[0051] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A short crystal rod bonding device, characterized in that: The invention comprises a transport component, a feeding component, an orienting component, a dispensing component and a dispensing component, wherein the transport component is used to carry and transport the short crystal rod to be bonded, and transport it from the first end of the transport component to the second end; the feeding component is installed at the first end of the transport component, and is used to transport the short crystal rod to be bonded from the initial position and place it on the first end of the transport component; the orienting component comprises a detection component and an adjustment component, wherein the detection component is installed above the transport component and close to the first end of the transport component, and is used to detect the crystal orientation of the short crystal rod carried on the transport component, and the adjustment component is installed on the side of the transport component and is located below the detection component, and is used to adjust the orientation of the short crystal rod according to the short crystal rod detected by the detection component. The crystal orientation of the crystal rod, and the azimuth angle of the Notch groove of the short crystal rod is rotated to a predetermined angle; the dispensing component is installed at the first end of the transport component, and is used to apply the adhesive to the end face of the short crystal rod facing the first end of the transport component after the adjustment component completes the adjustment of the crystal orientation of the short crystal rod, and transport the short crystal rod coated by the dispensing component to the second end of the transport component through the transport component, and the end face of the short crystal rod coated with the adhesive at the second end of the transport component is in contact with and bonded to the end face of the short crystal rod not coated with the adhesive subsequently transported to form a splicing body of a predetermined length; the blanking component is installed at the second end of the transport component, and is used to remove the splicing body from the second end of the transport component and store it.

2. The short crystal rod bonding device according to claim 1, characterized in that: The transport component includes at least two conveying components and baffles with identical structures, and each conveying component is connected head to tail; the baffle is fixedly mounted on the conveying component at the end of the transport component, so that the short crystal rod carried and transported by the transport component can stay at the baffle; each conveying component includes a conveying base and two rotating wheel groups with identical structures, and the two rotating wheel groups are symmetrically mounted on both sides of the conveying base; each rotating wheel group includes a transport frame, at least two transport wheels and a first driving motor, and the transport frame is fixedly mounted on the side of the conveying base at a certain angle to form a transport groove with the conveying base that can stably carry the short crystal rod, and a transport groove is opened on the transport frame, and each transport wheel is rotatably mounted in the transport groove and is evenly arranged, and each transport wheel is transmission-connected to the adjacent transport wheel so that all transport wheels can rotate synchronously; the fixed end of the first driving motor is fixedly mounted on the transport frame, and the driving end is drivingly connected to one of the transport wheels to drive each transport wheel to rotate synchronously through the first driving motor, thereby transporting the short crystal rod from the first end of the transport component to the second end.

3. The short crystal rod bonding device according to claim 1, characterized in that: The loading component includes a loading rack, at least two first loading beams, a second loading beam, a loading reel and a loading clamp, the loading rack is mounted on the first end of the transport component, the two first loading beams are symmetrically installed on the top of the loading rack, the top surfaces at both ends of the second loading beam are slidably installed on the bottom of the two first loading beams, so that the second loading beam can slide along the length direction of the two first loading beams; the fixed end of the loading reel is slidably installed on the bottom surface of the second loading beam, so that the loading reel can slide along the length direction of the second loading beam, the telescopic end of the loading reel is arranged in the vertical direction and fixedly connected to the fixed end of the loading clamp, so that the height of the loading clamp can be adjusted by the telescopic end of the loading reel, and the clamping end of the loading clamp is used to clamp the short crystal rod.

4. The short crystal rod bonding device according to claim 1, characterized in that: The detection assembly includes a detection frame, an X-ray emitter and an X-ray receiver. The two ends of the bottom of the detection frame are fixedly installed on both sides of the transport member, and are close to the first end of the transport member. A channel is also opened at the bottom of the detection frame to allow the short crystal rod transported by the transport member to pass through the detection assembly from the channel; the X-ray emitter and the X-ray receiver are fixedly installed on the top of the detection frame at a certain angle, and meet the following requirements: the X-rays emitted by the X-ray emitter can be received by the X-ray receiver after diffraction in the short crystal rod, so as to detect the crystal orientation of the short crystal rod.

5. The short crystal rod bonding device according to claim 4, characterized in that: The adjustment assembly includes at least one second drive motor and two rotating shaft groups with identical structures. The two rotating shaft groups are symmetrically arranged on both sides of the transport member. Each rotating shaft group includes a rotating shaft frame and a rotating roller. The bottom of the rotating shaft frame is fixedly mounted on one side of the transport member. The rotating roller is rotatably mounted on the top of the rotating shaft frame. The outer edge of the rotating roller is used for frictional contact with the outer edge of the short crystal ingot carried by the transport member, so that the rotation of the rotating roller can drive the short crystal ingot to rotate, thereby adjusting the notch groove azimuth of the short crystal ingot. The fixed end of each second driving motor is fixedly mounted on the rotating shaft frame, and the driving end is drivingly connected to the rotating roller so as to drive the corresponding rotating roller to rotate through the second driving motor.

6. The short ingot bonding device according to claim 1, wherein: The glue dispensing component includes two first adjustment components, a second adjustment component, a third adjustment component, a smearing component and a glue storage component. The two first adjustment components are symmetrically mounted on the first end of the transport component. Each first adjustment component includes a first adjustment frame, two first adjustment rods, two first adjustment platforms and two first adjustment motors. The length direction of the first adjustment frame is the same as the transport direction of the transport component. The two first adjustment rods are symmetrically mounted above the first adjustment frame along the length direction of the first adjustment frame. Each first adjustment platform is movably mounted on a first adjustment rod and is threadedly connected to the first adjustment rod; the fixed end of each first adjustment motor is fixedly mounted on the first adjustment frame, and the driving end of each first adjustment motor is drivingly connected to a first adjustment rod, so as to drive the corresponding first adjustment rod to rotate by the first adjustment motor, thereby adjusting the position of the corresponding first adjustment platform; The second adjustment assembly includes a second adjustment frame, two second adjustment rods, two second adjustment platforms and a second adjustment motor, the length direction of the second adjustment frame being perpendicular to the length direction of the first adjustment frame; the bottom surface of the second adjustment frame is fixedly connected to the top surface of the two first adjustment platforms of each first adjustment assembly, so as to move along the length direction of the first adjustment frame under the drive of each first adjustment platform; the two second adjustment rods are symmetrically installed above the second adjustment frame along the length direction of the second adjustment frame, and each second adjustment platform is slidably installed on a second adjustment rod and is threadedly connected to the second adjustment rod; the fixed end of each second adjustment motor is fixedly installed on the second adjustment frame, and the driving end of each second adjustment motor is drivingly connected to a second adjustment rod, so as to drive the corresponding second adjustment rod to rotate by the second adjustment motor, thereby adjusting the position of the corresponding second adjustment platform; The third adjustment assembly includes a third adjustment frame and a telescopic platform. The bottom surface of the third adjustment frame is fixedly connected to the top surfaces of the two second adjustment platforms so as to be movable along the length direction of the second adjustment frames under the drive of each second adjustment platform. The bottom of the telescopic platform is arbitrarily mounted on the top of the third adjustment frame, and the top is fixedly connected to the smearing assembly to adjust the height of the smearing assembly. The input end of the coating component is connected to the output end of the glue storage component to extract the adhesive stored in the glue storage component, and the output end of the coating component is used to apply the extracted adhesive to the end face of the short crystal rod.

7. The short ingot bonding device according to claim 1, wherein: The carrier material is transported to the loading platform of the transport frame, and the carrier material is transported to the loading platform of the transport frame by the support leg.

8. A short crystal ingot tumbling method based on the short crystal ingot bonding device according to any one of claims 1 to 7, characterized in that: The following steps are involved: S1, adjusting: using the orienting member to adjust the azimuth angle of the notch of the short crystal ingot to be bonded to a predetermined angle; S2, bonding: bonding the adjusted short crystal rods into a spliced ​​body of predetermined length using the transport component and the glue dispensing component; S3, slotting: the spliced ​​body is subjected to a tumbling process and slotting by a tumbling machine; S4, degumming: degumming the spliced ​​body after slotting.

9. The short ingot tumbling method according to claim 8, wherein: The step S1 comprises the following steps: S101, using the loading component to transport the short crystal ingot to be bonded and placing it on the first end of the transport component; S102, transporting the short crystal ingot to the bottom of the detection assembly by using the transport component, and detecting the crystal orientation of the short crystal ingot by using the detection assembly; S103 , using the adjustment component to rotate the corresponding short crystal ingot according to the crystal orientation of the short crystal ingot detected by the detection component, so that the azimuth angle of the notch groove thereof is rotated to a predetermined angle.

10. The short crystal rod tumbling method according to claim 8, wherein: The step S2 comprises the following steps: S201, using the dispensing component to apply adhesive to the end surface of the short crystal ingot facing the first end of the transport component; S202, using the transport component to transport the glue-coated short crystal rod to the second end of the transport component, so that at the second end of the transport component, the un-glue-coated end face of the subsequently transported short crystal rod contacts the glue-coated end face of the previous segment crystal rod; and after the adhesive is cured, a spliced ​​body of a predetermined length is formed.

Citation Information

Patent Citations

  • Rod splicing device for silicon single crystal rods

    CN222226652U