Vacuum cavity water cooling structure and machining method

Abstract

The invention discloses a vacuum cavity water cooling structure and a processing method, and aims to overcome the defects of poor cooling effect and poor temperature uniformity of the vacuum cavity water cooling structure. The cooling device comprises a cavity, a through hole is formed in the cavity, an inner-layer cooling flow channel and an outer-layer cooling flow channel are arranged on the periphery of the through hole, the inner-layer cooling flow channel comprises a front-side inner cooling section and a rear-side inner cooling section, the outer-layer cooling flow channel comprises a front-side outer cooling section and a rear-side outer cooling section, and the inner-layer cooling flow channel is arranged between the front-side outer cooling section and the rear-side outer cooling section. According to the vacuum cavity water cooling structure, the temperature uniformity in the reaction cavity is effectively improved, the cooling effect is good, and the cooling speed is high.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and more particularly to a vacuum chamber water cooling structure and a processing method thereof. Background Art

[0002] The goal of the epitaxial growth process is to achieve more efficient electron transmission through the device. Factors that primarily influence the epitaxial growth process include temperature and pressure. Temperature affects the epitaxial growth rate and epitaxial layer density, thus impacting the quality of the silicon wafer. Therefore, controlling temperature uniformity within the equipment is crucial. Water cooling is the primary cooling method. Current cooling methods typically utilize an internal single-layer structure. However, with the continuous upgrading of equipment and increasing requirements for working environments, this water cooling method suffers from a slow cooling rate and poor temperature uniformity within the reaction chamber, failing to meet the requirements for rapid cooling. Chinese Patent Application No. 2016105972390 discloses a gas plate and gas reaction equipment. Different process gases enter the upper plate through separate inlet pipes on the upper plate and are pre-mixed within the upper plate. These gases then pass through a gas distribution network and a gas distribution plate to achieve sufficient mixing before reaching the substrate surface. The gas distribution plate is designed as a water-cooled structure and equipped with a water cooling jacket. However, the water-cooled structure suffers from poor uniformity, failing to meet the requirements for rapid cooling. Summary of the Invention

[0003] In order to overcome the above-mentioned shortcomings, the present invention provides a vacuum chamber water cooling structure and processing method, which effectively improves the temperature uniformity inside the reaction chamber, has a good cooling effect, and a fast cooling speed.

[0004] In order to solve the above technical problems, the present invention adopts the following technical solutions: a vacuum chamber water cooling structure, comprising a cavity, a through hole being arranged on the cavity, an inner cooling channel and an outer cooling channel being arranged around the through hole, the inner cooling channel comprising a front inner cooling section and a rear inner cooling section, the outer cooling channel comprising a front outer cooling section and a rear outer cooling section, and the inner cooling channel being placed between the front outer cooling section and the rear outer cooling section.

[0005] Inner and outer cooling channels are provided within the cavity, achieving multiple cooling through a multi-layer circulating water-cooling structure, thereby improving the cooling effect. The inner and outer cooling channels are arranged around the periphery of the through-hole, ensuring good temperature consistency around the through-hole. The inner cooling channel comprises a front inner cooling section and a rear inner cooling section, while the outer cooling channel comprises a front outer cooling section and a rear outer cooling section. The inner cooling channel is placed between the front and rear outer cooling sections. Two independent cooling water paths flow through the inner and outer cooling channels, respectively, resulting in a good cooling effect, a fast cooling rate, and a more uniform temperature at all axial positions within the cavity.

[0006] The vacuum chamber water cooling structure of this patent application effectively improves the temperature uniformity inside the reaction chamber, has a good cooling effect, and a fast cooling speed.

[0007] Preferably, a first-level sinking groove is provided on both the front and rear sides of the cavity, the opening of the first-level sinking groove is connected to a closing strip, and the cavity between the closing strip and the bottom surface of the first-level sinking groove forms an outer cooling channel.

[0008] A closing strip is connected at the opening of the first-level sinking groove to form an outer cooling channel, which is easy to process.

[0009] Preferably, the closing strip and the first-level sinking trough are both C-shaped structures.

[0010] The C-shaped closing strip is easier to fit into the first-level sinking groove during splicing, which reduces the number of repairs during splicing and shortens the overall processing time.

[0011] Preferably, a first-level step surface is provided at the opening of the first-level sinking trough, and the closing strip is supported on the first-level step surface.

[0012] The first step supports and positions the closing strip, which facilitates the installation of the closing strip and ensures the depth of the outer cooling channel.

[0013] Preferably, a secondary sinking groove is provided on the bottom surface of the primary sinking groove, a partition bar is connected to the opening of the secondary sinking groove, and the cavity between the partition bar and the bottom surface of the secondary sinking groove forms an inner cooling channel.

[0014] A dividing strip is connected at the opening of the secondary sinking groove to form an inner cooling channel, which is easy to process.

[0015] Preferably, an outer layer via hole is provided between the bottom surfaces of the two first-level sinking grooves, and an inner layer via hole is provided between the bottom surfaces of the two second-level sinking grooves.

[0016] The outer layer vias connect the two outer layer cooling channels, thereby realizing the circulation of the cooling medium. The inner layer vias connect the two inner layer cooling channels, thereby realizing the circulation of the cooling medium.

[0017] Preferably, a secondary step surface is provided at the opening of the secondary sinking trough, and the dividing strip is supported on the secondary step surface.

[0018] The secondary step supports and positions the dividing bar, which facilitates the installation of the dividing bar and ensures the depth of the inner cooling channel.

[0019] Preferably, an inner water inlet, an inner water outlet, an outer water inlet and an outer water outlet are provided on the cavity, and the inner water inlet and the inner water outlet are respectively connected to the two ends of the inner cooling channel; the outer water inlet and the outer water outlet are respectively connected to the two ends of the outer cooling channel.

[0020] The cooling medium enters from the inner water inlet, passes through the inner cooling channel, and is discharged from the inner water outlet. The medium cools the cavity during the flow in the inner cooling channel.

[0021] The cooling medium enters from the outer water inlet, passes through the outer cooling channel, and is discharged from the outer water outlet. The medium cools the cavity during the flow in the outer cooling channel.

[0022] A method for processing a vacuum chamber water-cooling structure, which realizes the processing of the vacuum chamber water-cooling structure, includes the following steps: S1, processing a primary sinking groove and a secondary sinking groove on both end surfaces of the cavity; S2, installing a separator strip into the opening of the secondary sinking groove and welding it; S3, performing a sealing test on the inner cooling channel; S4, installing a sealing strip into the opening of the primary sinking groove and welding it; S5, performing a sealing test on the outer cooling channel.

[0023] When machining the water-cooling structure of a vacuum chamber, both primary and secondary sink grooves are machined on both end surfaces. The primary sink groove is machined first, and then the secondary sink groove is machined on the bottom surface of the primary sink groove. The radial width of the secondary sink groove is smaller than that of the primary sink groove. Separator strips are then welded to form the inner cooling channel. This inner cooling channel is then tested for leaks. Once this test is passed, a sealing strip is welded to form the outer cooling channel. This outer cooling channel is also tested for leaks. Once this test is passed, the next process is carried out. This machining method facilitates chamber machining and helps reduce processing costs.

[0024] Preferably, S3 and S5 are tested for sealing performance by water pressure testing. If the pressure is maintained for ≥2 hours under a water pressure of ≥1MPa and there is no leakage, the sealing performance is judged to be qualified.

[0025] The water pressure test is used for sealing detection, which is convenient to operate and the detection is accurate and reliable.

[0026] Compared with the prior art, the beneficial effects of the present invention are: (1) the vacuum chamber water cooling structure of the patent application effectively improves the temperature uniformity inside the reaction chamber, has a good cooling effect, and a fast cooling speed; (2) the inner layer cooling channel and the outer layer cooling channel are easy to process, which is conducive to reducing processing costs; (3) the C-shaped structure of the closing strip is easier to fit into the first-level sinking groove during splicing, which reduces the number of reworks during splicing and shortens the overall processing time. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is an exploded view of the present invention.

[0028] Figure 2 It is a cavity structure diagram of the present invention.

[0029] Figure 3 It is a top view of the present invention.

[0030] Figure 4 This invention Figure 3AA cross-sectional view.

[0031] Figure 5 This invention Figure 3 CC cross-sectional view.

[0032] Figure 6 This invention Figure 3 EE cross-sectional view.

[0033] Figure 7 This is a structural diagram of the welding tooling according to embodiment 2 of the present invention.

[0034] Figure 8 This is a structural diagram of the welding tooling according to embodiment 3 of the present invention.

[0035] In the figure: 1, cavity, 2, through hole, 3, through slot, 4, inner cooling channel, 5, outer cooling channel, 6, front inner cooling section, 7, rear inner cooling section, 8, front outer cooling section, 9, rear outer cooling section, 10, inner water inlet, 11, inner water outlet, 12, outer water inlet, 13, outer water outlet, 14, first-level sinking groove, 15, closing strip, 16, outer through hole, 17, first-level step surface, 18, second Step down groove, 19. Dividing strip, 20. Secondary step surface, 21. Inner through hole, 22. Welding tool, 23. Support, 24. Sliding seat, 25. Positioning column, 26. Elastic ejector pin, 27. Driving screw, 28. Driving motor, 29. Positioning ring, 30. Sliding hole, 31. Sliding column, 32. Buffer spring, 33. Spring seat, 34. Water pump, 35. Detection pipeline, 36. Solenoid valve, 37. Water pressure gauge. DETAILED DESCRIPTION

[0036] The technical solution of the present invention is further described in detail below through specific embodiments and in conjunction with the accompanying drawings: Example 1: A vacuum chamber water cooling structure (see Figures 1 to 6), comprising a cavity 1, a through hole 2 is provided on the cavity 1, and the through hole 2 is circular. A plurality of through slots 3 are provided on the side wall of the through hole 2, and the through slots 3 extend through the outer wall of the cavity 1. An inner cooling channel 4 and an outer cooling channel 5 are provided on the periphery of the through hole 2. The inner cooling channel 4 and the outer cooling channel 5 are independently provided. The inner cooling channel 4 includes a front inner cooling section 6 and a rear inner cooling section 7, both of which have an arc-shaped structure. The outer cooling channel 5 includes a front outer cooling section 8 and a rear outer cooling section 9, both of which have an arc-shaped structure. The inner cooling channel 4 is placed between the front outer cooling section 8 and the rear outer cooling section 9. The cavity 1 is provided with an inner water inlet 10, an inner water outlet 11, an outer water inlet 12, and an outer water outlet 13. The inner water inlet 10 and the inner water outlet 11 are respectively connected to the ends of the inner cooling channel 4; the outer water inlet 12 and the outer water outlet 13 are respectively connected to the ends of the outer cooling channel 5. The cooling medium enters from the inner water inlet 10, passes through the inner cooling channel 4, and is discharged from the inner water outlet 11. The process of the medium flowing through the inner cooling channel 4 cools the cavity 1. The cooling medium enters from the outer water inlet 12, passes through the outer cooling channel 5, and is discharged from the outer water outlet 13. The process of the medium flowing through the outer cooling channel 5 cools the cavity 1.

[0037] A first-level sinking trough 14 is provided on both the front and rear sides of the cavity 1. A closing strip 15 is connected to the opening of the first-level sinking trough 14. Both the closing strip 15 and the first-level sinking trough 14 have a C-shaped structure. The cavity between the closing strip 15 and the bottom surface of the first-level sinking trough 14 forms the outer cooling channel 5. A front external cooling section 8 is formed between the front closing strip 15 and the bottom surface of the first-level sinking trough 14, and a rear external cooling section 9 is formed between the rear closing strip 15 and the bottom surface of the first-level sinking trough 14. An outer layer via 16 is provided between the bottom surfaces of the two first-level sinking troughs 14. The outer layer via 16 connects the front external cooling section 8 and the rear external cooling section 9. The outer layer via 16 is provided at one end of the first-level sinking trough 14, and the outer layer water inlet 12 and the outer layer water outlet 13 are respectively connected to the other ends of the two first-level sinking troughs 14.

[0038] A first-stage stepped surface 17 is provided at the opening of the first-stage sunken trough 14, on which the closing strip 15 is supported. A flange is provided on the sidewall of the first-stage sunken trough 14, with the upper surface of the flange forming the first-stage stepped surface 17. The first-stage stepped surface 17 supports and positions the closing strip 15, facilitating its installation and ensuring the depth of the outer cooling channel 5.

[0039] A secondary subsidence trough 18 is provided at the bottom of the primary subsidence trough 14. A separator bar 19 is connected to the opening of the secondary subsidence trough 18. The cavity between the separator bar 19 and the bottom of the secondary subsidence trough 18 forms the inner cooling channel 4. A secondary step surface 20 is provided at the opening of the secondary subsidence trough 18, and the separator bar 19 is supported on the secondary step surface 20. A circle of expansion grooves is provided at the opening of the secondary subsidence trough 18, and the bottom of the expansion groove forms the secondary step surface 20. The secondary step surface 20 supports and positions the separator bar 19, facilitating its installation and ensuring the depth of the inner cooling channel 4.

[0040] Two arcuate secondary sinking grooves 18 are provided on the front side of the cavity 1, and one arcuate secondary sinking groove 18 is provided on the rear side of the cavity 1, thereby forming two front internal cooling sections 6 and one rear internal cooling section 7. Two inner layer through-holes 21 are provided between the bottom surfaces of the two secondary sinking grooves 18. The inner layer water inlet 10 is connected to one end of one front internal cooling section 6. The other end of this front internal cooling section 6 is connected to one inner layer through-hole 21 with one end of the rear internal cooling section 7. The other end of the rear internal cooling section 7 is connected to one end of the other front internal cooling section 6 with another inner layer through-hole 21. The other end of the other front internal cooling section 6 is connected to the inner layer water outlet 11.

[0041] A method for processing a vacuum chamber water-cooling structure, which realizes the processing of the vacuum chamber water-cooling structure, includes the following steps: S1, processing a first-level sunken groove 14 and a second-level sunken groove 18 on both end surfaces of a cavity 1; first, processing the first-level sunken groove 14 and the first-level step surface 17 on both the front and rear end surfaces of the cavity 1, and then processing the second-level sunken groove 18 and the second-level step surface 20 on the bottom surface of the first-level sunken groove 14, wherein the radial width of the second-level sunken groove 18 is smaller than the radial width of the first-level sunken groove 14.

[0042] S2: Install and weld a separator bar 19 into the opening of the secondary sink trough 18. Separator bar 19 is laser-cut from sheet metal, then chamfered and ground to a surface roughness of Ra 1.6. Separator bar 19 rests on the secondary step surface 20. The edges of separator bar 19 and the opening of the secondary sink trough 18 are welded together to seal the inner cooling channel 4.

[0043] S3, perform a sealing test on the inner cooling channel 4; use a water pressure test method to perform the sealing test. Under a water pressure of ≥1MPa, maintain the pressure for ≥2 hours. If there is no leakage, the sealing is judged to be qualified.

[0044] S4: Install and weld the sealing strip 15 into the opening of the first-stage sink trough 14. The sealing strip 15 is made from laser-cut sheet metal, then chamfered and ground to a surface roughness of Ra 1.6. The sealing strip 15 is supported on the first-stage stepped surface 17. The edge of the sealing strip 15 is welded to the edge of the opening of the first-stage sink trough 14 to seal the outer cooling channel 5.

[0045] S5: Perform a sealing test on the outer cooling channel 5. Use a water pressure test method to perform the sealing test. Under a water pressure of ≥1MPa, maintain the pressure for ≥2 hours. If there is no leakage, the sealing is judged to be qualified.

[0046] When machining the water-cooling structure of the vacuum chamber, a first-level sinking groove 14 and a second-level sinking groove 18 are machined on both end faces of the chamber 1. The first-level sinking groove 14 is machined first, and then the second-level sinking groove 18 is machined on the bottom face of the first-level sinking groove 14. The radial width of the second-level sinking groove 18 is smaller than the radial width of the first-level sinking groove 14. Then, a separator strip 19 is welded on to form the inner cooling channel 4. The inner cooling channel 4 is tested for sealing. After the sealing test is passed, a closing strip 15 is welded on to form the outer cooling channel 5. The outer cooling channel 5 is tested for sealing. After the sealing test is passed, the next step is to grind the weld seam at the edge of the closing strip 15 smooth, and machine sealing grooves on the surface of the closing strip 15 and the end face of the chamber 1 together to facilitate connection and sealing with gas components. This machining method facilitates the machining of the chamber 1 and helps reduce machining costs.

[0047] Example 2: A vacuum chamber water cooling structure (see Figures 1 to 6 ), comprising a cavity 1, a through hole 2 is provided on the cavity 1, and the through hole 2 is circular. A plurality of through slots 3 are provided on the side wall of the through hole 2, and the through slots 3 extend through the outer wall of the cavity 1. An inner cooling channel 4 and an outer cooling channel 5 are provided on the periphery of the through hole 2. The inner cooling channel 4 and the outer cooling channel 5 are independently provided. The inner cooling channel 4 includes a front inner cooling section 6 and a rear inner cooling section 7, both of which have an arc-shaped structure. The outer cooling channel 5 includes a front outer cooling section 8 and a rear outer cooling section 9, both of which have an arc-shaped structure. The inner cooling channel 4 is placed between the front outer cooling section 8 and the rear outer cooling section 9. The cavity 1 is provided with an inner water inlet 10, an inner water outlet 11, an outer water inlet 12, and an outer water outlet 13. The inner water inlet 10 and the inner water outlet 11 are respectively connected to the ends of the inner cooling channel 4; the outer water inlet 12 and the outer water outlet 13 are respectively connected to the ends of the outer cooling channel 5. The cooling medium enters from the inner water inlet 10, passes through the inner cooling channel 4, and is discharged from the inner water outlet 11. The process of the medium flowing through the inner cooling channel 4 cools the cavity 1. The cooling medium enters from the outer water inlet 12, passes through the outer cooling channel 5, and is discharged from the outer water outlet 13. The process of the medium flowing through the outer cooling channel 5 cools the cavity 1.

[0048] A first-level sinking trough 14 is provided on both the front and rear sides of the cavity 1. A closing strip 15 is connected to the opening of the first-level sinking trough 14. Both the closing strip 15 and the first-level sinking trough 14 have a C-shaped structure. The cavity between the closing strip 15 and the bottom surface of the first-level sinking trough 14 forms the outer cooling channel 5. A front external cooling section 8 is formed between the front closing strip 15 and the bottom surface of the first-level sinking trough 14, and a rear external cooling section 9 is formed between the rear closing strip 15 and the bottom surface of the first-level sinking trough 14. An outer layer via 16 is provided between the bottom surfaces of the two first-level sinking troughs 14. The outer layer via 16 connects the front external cooling section 8 and the rear external cooling section 9. The outer layer via 16 is provided at one end of the first-level sinking trough 14, and the outer layer water inlet 12 and the outer layer water outlet 13 are respectively connected to the other ends of the two first-level sinking troughs 14.

[0049] A first-stage stepped surface 17 is provided at the opening of the first-stage sunken trough 14, on which the closing strip 15 is supported. A flange is provided on the sidewall of the first-stage sunken trough 14, with the upper surface of the flange forming the first-stage stepped surface 17. The first-stage stepped surface 17 supports and positions the closing strip 15, facilitating its installation and ensuring the depth of the outer cooling channel 5.

[0050] A secondary subsidence trough 18 is provided at the bottom of the primary subsidence trough 14. A separator bar 19 is connected to the opening of the secondary subsidence trough 18. The cavity between the separator bar 19 and the bottom of the secondary subsidence trough 18 forms the inner cooling channel 4. A secondary step surface 20 is provided at the opening of the secondary subsidence trough 18, and the separator bar 19 is supported on the secondary step surface 20. A circle of expansion grooves is provided at the opening of the secondary subsidence trough 18, and the bottom of the expansion groove forms the secondary step surface 20. The secondary step surface 20 supports and positions the separator bar 19, facilitating its installation and ensuring the depth of the inner cooling channel 4.

[0051] Two arcuate secondary sinking grooves 18 are provided on the front side of the cavity 1, and one arcuate secondary sinking groove 18 is provided on the rear side of the cavity 1, thereby forming two front internal cooling sections 6 and one rear internal cooling section 7. Two inner layer through-holes 21 are provided between the bottom surfaces of the two secondary sinking grooves 18. The inner layer water inlet 10 is connected to one end of one front internal cooling section 6. The other end of this front internal cooling section 6 is connected to one inner layer through-hole 21 with one end of the rear internal cooling section 7. The other end of the rear internal cooling section 7 is connected to one end of the other front internal cooling section 6 with another inner layer through-hole 21. The other end of the other front internal cooling section 6 is connected to the inner layer water outlet 11.

[0052] A method for processing a vacuum chamber water-cooling structure, which realizes the processing of the vacuum chamber water-cooling structure, includes the following steps: S1, processing a first-level sunken groove 14 and a second-level sunken groove 18 on both end surfaces of a cavity 1; first, processing the first-level sunken groove 14 and the first-level step surface 17 on both the front and rear end surfaces of the cavity 1, and then processing the second-level sunken groove 18 and the second-level step surface 20 on the bottom surface of the first-level sunken groove 14, wherein the radial width of the second-level sunken groove 18 is smaller than the radial width of the first-level sunken groove 14.

[0053] S2: Install and weld a separator bar 19 into the opening of the secondary sink trough 18. Separator bar 19 is laser-cut from sheet metal, then chamfered and ground to a surface roughness of Ra 1.6. Separator bar 19 rests on the secondary step surface 20. The edges of separator bar 19 and the opening of the secondary sink trough 18 are welded together to seal the inner cooling channel 4.

[0054] S3, perform a sealing test on the inner cooling channel 4; use a water pressure test method to perform the sealing test. Under a water pressure of ≥1MPa, maintain the pressure for ≥2 hours. If there is no leakage, the sealing is judged to be qualified.

[0055] S4: Install and weld the sealing strip 15 into the opening of the first-stage sink trough 14. The sealing strip 15 is made from laser-cut sheet metal, then chamfered and ground to a surface roughness of Ra 1.6. The sealing strip 15 is supported on the first-stage stepped surface 17. The edge of the sealing strip 15 is welded to the edge of the opening of the first-stage sink trough 14 to seal the outer cooling channel 5.

[0056] S5: Perform a sealing test on the outer cooling channel 5. Use a water pressure test method to perform the sealing test. Under a water pressure of ≥1MPa, maintain the pressure for ≥2 hours. If there is no leakage, the sealing is judged to be qualified.

[0057] S2 and S4 are performed on the welding tool 22, as shown in FIG. Figure 7 As shown, welding fixture 22 includes a support 23 and two slidable slides 24. Support 23 is provided with positioning pins 25. Cavity 1 is connected to positioning pins 25 via through-slots 3. Two slides 24 are slidably mounted on either side of cavity 1. Several elastic ejector pins 26 are circumferentially spaced apart on slides 24. During S2, the two slides 24 approach each other, causing the elastic ejector pins 26 to press against divider bar 19, securing the divider bar 19 in place. During S4, the two slides 24 approach each other, causing the elastic ejector pins 26 to press against closure bar 15, securing the closure bar 15 in place.

[0058] During welding, cavity 1 is mounted on positioning pins 25, ensuring precise and reliable positioning. After separator bar 19 is installed, elastic ejector pins 26 press against separator bar 19 to position it, facilitating welding and preventing it from swaying during welding. After closure bar 15 is installed, elastic ejector pins 26 press against closure bar 15 to position it, facilitating welding and preventing it from swaying during welding.

[0059] A drive screw 27 and a guide rod are mounted on the support 23. The drive screw 27 has two threaded sections with opposite helical directions. The lower portions of the two slides 24 are threadedly connected to the two sections. A drive motor 28 is mounted on the support 23, and its output shaft is connected to the drive screw 27. The two slides 24 are movably connected to the guide rods. The drive screw 27 and the guide rod are arranged parallel to each other. The drive motor 28 drives the drive screw 27 to rotate, thereby moving the slides 24 toward and away from each other. A positioning ring 29 is mounted on the slide 24, and an elastic ejector pin 26 is mounted on the positioning ring 29. The positioning ring 29 has a sliding hole 30. A sliding post 31 is mounted on one end of the elastic ejector pin 26. The sliding post 31 slides in the sliding hole 30. A buffer spring 32 is installed in the sliding hole 30. The end of the sliding hole 30 is connected to a spring seat 33. The buffer spring 32 abuts between the sliding post 31 and the spring seat 33. The other end of the elastic ejector pin 26 has a hemispherical structure.

[0060] When machining the water-cooling structure of the vacuum chamber, a first-level sinking groove 14 and a second-level sinking groove 18 are machined on both end faces of the chamber 1. The first-level sinking groove 14 is machined first, and then the second-level sinking groove 18 is machined on the bottom face of the first-level sinking groove 14. The radial width of the second-level sinking groove 18 is smaller than the radial width of the first-level sinking groove 14. Then, a separator strip 19 is welded on to form the inner cooling channel 4. The inner cooling channel 4 is tested for sealing. After the sealing test is passed, a closing strip 15 is welded on to form the outer cooling channel 5. The outer cooling channel 5 is tested for sealing. After the sealing test is passed, the next step is to grind the weld seam at the edge of the closing strip 15 smooth, and machine sealing grooves on the surface of the closing strip 15 and the end face of the chamber 1 together to facilitate connection and sealing with gas components. This machining method facilitates the machining of the chamber 1 and helps reduce machining costs.

[0061] Example 3: A vacuum chamber water cooling structure (see Figures 1 to 6), comprising a cavity 1, a through hole 2 is provided on the cavity 1, and the through hole 2 is circular. A plurality of through slots 3 are provided on the side wall of the through hole 2, and the through slots 3 extend through the outer wall of the cavity 1. An inner cooling channel 4 and an outer cooling channel 5 are provided on the periphery of the through hole 2. The inner cooling channel 4 and the outer cooling channel 5 are independently provided. The inner cooling channel 4 includes a front inner cooling section 6 and a rear inner cooling section 7, both of which have an arc-shaped structure. The outer cooling channel 5 includes a front outer cooling section 8 and a rear outer cooling section 9, both of which have an arc-shaped structure. The inner cooling channel 4 is placed between the front outer cooling section 8 and the rear outer cooling section 9. The cavity 1 is provided with an inner water inlet 10, an inner water outlet 11, an outer water inlet 12, and an outer water outlet 13. The inner water inlet 10 and the inner water outlet 11 are respectively connected to the ends of the inner cooling channel 4; the outer water inlet 12 and the outer water outlet 13 are respectively connected to the ends of the outer cooling channel 5. The cooling medium enters from the inner water inlet 10, passes through the inner cooling channel 4, and is discharged from the inner water outlet 11. The process of the medium flowing through the inner cooling channel 4 cools the cavity 1. The cooling medium enters from the outer water inlet 12, passes through the outer cooling channel 5, and is discharged from the outer water outlet 13. The process of the medium flowing through the outer cooling channel 5 cools the cavity 1.

[0062] A first-level sinking trough 14 is provided on both the front and rear sides of the cavity 1. A closing strip 15 is connected to the opening of the first-level sinking trough 14. Both the closing strip 15 and the first-level sinking trough 14 have a C-shaped structure. The cavity between the closing strip 15 and the bottom surface of the first-level sinking trough 14 forms the outer cooling channel 5. A front external cooling section 8 is formed between the front closing strip 15 and the bottom surface of the first-level sinking trough 14, and a rear external cooling section 9 is formed between the rear closing strip 15 and the bottom surface of the first-level sinking trough 14. An outer layer via 16 is provided between the bottom surfaces of the two first-level sinking troughs 14. The outer layer via 16 connects the front external cooling section 8 and the rear external cooling section 9. The outer layer via 16 is provided at one end of the first-level sinking trough 14, and the outer layer water inlet 12 and the outer layer water outlet 13 are respectively connected to the other ends of the two first-level sinking troughs 14.

[0063] A first-stage stepped surface 17 is provided at the opening of the first-stage sunken trough 14, on which the closing strip 15 is supported. A flange is provided on the sidewall of the first-stage sunken trough 14, with the upper surface of the flange forming the first-stage stepped surface 17. The first-stage stepped surface 17 supports and positions the closing strip 15, facilitating its installation and ensuring the depth of the outer cooling channel 5.

[0064] A secondary subsidence trough 18 is provided at the bottom of the primary subsidence trough 14. A separator bar 19 is connected to the opening of the secondary subsidence trough 18. The cavity between the separator bar 19 and the bottom of the secondary subsidence trough 18 forms the inner cooling channel 4. A secondary step surface 20 is provided at the opening of the secondary subsidence trough 18, and the separator bar 19 is supported on the secondary step surface 20. A circle of expansion grooves is provided at the opening of the secondary subsidence trough 18, and the bottom of the expansion groove forms the secondary step surface 20. The secondary step surface 20 supports and positions the separator bar 19, facilitating its installation and ensuring the depth of the inner cooling channel 4.

[0065] Two arcuate secondary sinking grooves 18 are provided on the front side of the cavity 1, and one arcuate secondary sinking groove 18 is provided on the rear side of the cavity 1, thereby forming two front internal cooling sections 6 and one rear internal cooling section 7. Two inner layer through-holes 21 are provided between the bottom surfaces of the two secondary sinking grooves 18. The inner layer water inlet 10 is connected to one end of one front internal cooling section 6. The other end of this front internal cooling section 6 is connected to one inner layer through-hole 21 with one end of the rear internal cooling section 7. The other end of the rear internal cooling section 7 is connected to one end of the other front internal cooling section 6 with another inner layer through-hole 21. The other end of the other front internal cooling section 6 is connected to the inner layer water outlet 11.

[0066] A method for processing a vacuum chamber water-cooling structure, which realizes the processing of the vacuum chamber water-cooling structure, includes the following steps: S1, processing a first-level sunken groove 14 and a second-level sunken groove 18 on both end surfaces of a cavity 1; first, processing the first-level sunken groove 14 and the first-level step surface 17 on both the front and rear end surfaces of the cavity 1, and then processing the second-level sunken groove 18 and the second-level step surface 20 on the bottom surface of the first-level sunken groove 14, wherein the radial width of the second-level sunken groove 18 is smaller than the radial width of the first-level sunken groove 14.

[0067] S2: Install and weld a separator bar 19 into the opening of the secondary sink trough 18. Separator bar 19 is laser-cut from sheet metal, then chamfered and ground to a surface roughness of Ra 1.6. Separator bar 19 rests on the secondary step surface 20. The edges of separator bar 19 and the opening of the secondary sink trough 18 are welded together to seal the inner cooling channel 4.

[0068] S3, perform a sealing test on the inner cooling channel 4; use a water pressure test method to perform the sealing test. Under a water pressure of ≥1MPa, maintain the pressure for ≥2 hours. If there is no leakage, the sealing is judged to be qualified.

[0069] S4: Install and weld the sealing strip 15 into the opening of the first-stage sink trough 14. The sealing strip 15 is made from laser-cut sheet metal, then chamfered and ground to a surface roughness of Ra 1.6. The sealing strip 15 is supported on the first-stage stepped surface 17. The edge of the sealing strip 15 is welded to the edge of the opening of the first-stage sink trough 14 to seal the outer cooling channel 5.

[0070] S5: Perform a sealing test on the outer cooling channel 5. Use a water pressure test method to perform the sealing test. Under a water pressure of ≥1MPa, maintain the pressure for ≥2 hours. If there is no leakage, the sealing is judged to be qualified.

[0071] S2 and S4 are performed on the welding tool 22, as shown in FIG. Figure 8 As shown, welding fixture 22 includes a support 23 and two slidable slides 24. Support 23 is provided with positioning pins 25. Cavity 1 is connected to positioning pins 25 via through-slots 3. Two slides 24 are slidably mounted on either side of cavity 1. Several elastic ejector pins 26 are circumferentially spaced apart on slides 24. During S2, the two slides 24 approach each other, causing the elastic ejector pins 26 to press against divider bar 19, securing the divider bar 19 in place. During S4, the two slides 24 approach each other, causing the elastic ejector pins 26 to press against closure bar 15, securing the closure bar 15 in place.

[0072] During welding, cavity 1 is mounted on positioning pins 25, ensuring precise and reliable positioning. After separator bar 19 is installed, elastic ejector pins 26 press against separator bar 19 to position it, facilitating welding and preventing it from swaying during welding. After closure bar 15 is installed, elastic ejector pins 26 press against closure bar 15 to position it, facilitating welding and preventing it from swaying during welding.

[0073] A drive screw 27 and a guide rod are mounted on the support 23. The drive screw 27 has two threaded sections with opposite helical directions. The lower portions of the two slides 24 are threadedly connected to the two sections. A drive motor 28 is mounted on the support 23, and its output shaft is connected to the drive screw 27. The two slides 24 are movably connected to the guide rods. The drive screw 27 and the guide rod are arranged parallel to each other. The drive motor 28 drives the drive screw 27 to rotate, thereby moving the slides 24 toward and away from each other. A positioning ring 29 is mounted on the slide 24, and an elastic ejector pin 26 is mounted on the positioning ring 29. The positioning ring 29 has a sliding hole 30. A sliding post 31 is mounted on one end of the elastic ejector pin 26. The sliding post 31 slides in the sliding hole 30. A buffer spring 32 is installed in the sliding hole 30. The end of the sliding hole 30 is connected to a spring seat 33. The buffer spring 32 abuts between the sliding post 31 and the spring seat 33. The other end of the elastic ejector pin 26 has a hemispherical structure.

[0074] A water pump 34 is installed on the support 23, and the outlet pipe of the water pump 34 is connected in parallel to two detection pipes 35, and a solenoid valve 36 and a water pressure gauge 37 are installed on the detection pipe 35. After the cavity 1 is installed on the support 23, the two detection pipes 35 are connected to the inner water inlet 10 and the outer water inlet 12 respectively, and the inner water outlet 11 and the outer water outlet 13 are closed. During S3, the water pump 34 is turned on, and the solenoid valve 36 on the detection pipe 35 connected to the inner water inlet 10 is turned on. When the water pressure gauge 37 detects a pressure ≥1MPa, the solenoid valve 36 is closed to maintain the pressure and observe whether there is any leakage. During S5, the water pump 34 is turned on, and the solenoid valve 36 on the detection pipe 35 connected to the outer water inlet 12 is turned on. When the water pressure gauge 37 detects a pressure ≥1MPa, the solenoid valve 36 is closed to maintain the pressure and observe whether there is any leakage.

[0075] When machining the water-cooling structure of the vacuum chamber, a first-level sinking groove 14 and a second-level sinking groove 18 are machined on both end faces of the chamber 1. The first-level sinking groove 14 is machined first, and then the second-level sinking groove 18 is machined on the bottom face of the first-level sinking groove 14. The radial width of the second-level sinking groove 18 is smaller than the radial width of the first-level sinking groove 14. Then, a separator strip 19 is welded on to form the inner cooling channel 4. The inner cooling channel 4 is tested for sealing. After the sealing test is passed, a closing strip 15 is welded on to form the outer cooling channel 5. The outer cooling channel 5 is tested for sealing. After the sealing test is passed, the next step is to grind the weld seam at the edge of the closing strip 15 smooth, and machine sealing grooves on the surface of the closing strip 15 and the end face of the chamber 1 together to facilitate connection and sealing with gas components. This machining method facilitates the machining of the chamber 1 and helps reduce machining costs.

[0076] The above-described embodiments are only preferred solutions of the present invention and are not intended to limit the present invention in any form. Other variations and modifications are possible without exceeding the technical solutions described in the claims.

Claims

1. A vacuum chamber water cooling structure, characterized in that: It includes a cavity, a through hole is arranged on the cavity, an inner cooling channel and an outer cooling channel are arranged around the through hole, the inner cooling channel includes a front inner cooling section and a rear inner cooling section, the outer cooling channel includes a front outer cooling section and a rear outer cooling section, and the inner cooling channel is placed between the front outer cooling section and the rear outer cooling section.

2. The vacuum chamber water cooling structure according to claim 1, characterized in that: A first-level sinking groove is provided on both the front and rear sides of the cavity. The opening of the first-level sinking groove is connected to a closing strip. The cavity between the closing strip and the bottom surface of the first-level sinking groove forms an outer cooling channel.

3. The vacuum chamber water cooling structure according to claim 2, characterized in that: The closing strip and the first-level sinking trough are both C-shaped structures.

4. The vacuum chamber water cooling structure according to claim 2, wherein: A first-level step surface is provided at the opening of the first-level sinking trough, and the closing strip is supported on the first-level step surface.

5. The vacuum chamber water cooling structure according to claim 2, wherein: A secondary sinking groove is arranged on the bottom surface of the primary sinking groove, a partition bar is connected at the opening of the secondary sinking groove, and the cavity between the partition bar and the bottom surface of the secondary sinking groove forms an inner cooling channel.

6. The vacuum chamber water cooling structure according to claim 5, characterized in that: An outer layer via hole is arranged between the bottom surfaces of the two first-level sinking grooves, and an inner layer via hole is arranged between the bottom surfaces of the two second-level sinking grooves.

7. The vacuum chamber water cooling structure according to claim 5, characterized in that: A secondary step surface is provided at the opening of the secondary sinking trough, and the dividing strip is supported on the secondary step surface.

8. A vacuum chamber water cooling structure according to any one of claims 1 to 7, characterized in that: An inner water inlet, an inner water outlet, an outer water inlet and an outer water outlet are provided on the cavity. The inner water inlet and the inner water outlet are connected to the two ends of the inner cooling channel respectively; the outer water inlet and the outer water outlet are connected to the two ends of the outer cooling channel respectively.

9. A method for processing a vacuum chamber water cooling structure, characterized in that: The processing of the vacuum chamber water-cooling structure described in any one of claims 1 to 8 includes the following steps: S1, processing a first-level sinking groove and a second-level sinking groove on the two end faces of the cavity; S2, installing a dividing strip into the opening of the second-level sinking groove and welding it; S3, performing a sealing test on the inner cooling channel; S4, installing a closing strip into the opening of the first-level sinking groove and welding it; S5, performing a sealing test on the outer cooling channel.

10. The method for processing a vacuum chamber water cooling structure according to claim 9, wherein: S3 and S5 are tested for sealing performance using water pressure testing. If the pressure is maintained for ≥2 hours under a water pressure of ≥1MPa and there is no leakage, the sealing is judged to be qualified.

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