A processing apparatus and a processing method for TGV glass substrates

Abstract

The application discloses a kind of TGV glass substrate processing equipment and processing method, the TGV glass substrate processing method is, preheating is carried out to the point to be punched before punching, so that the temperature of the point to be processed and surrounding area is increased to form preheating zone, preheating can make the local temperature of glass substrate more uniform, so that when punching, the heat applied by laser cutting is not easy to cause sharp temperature difference, thereby effectively reducing the thermal stress generated in the material, and then eliminating or reducing the occurrence of crack or rough surface condition;The TGV glass substrate processing equipment is connected by the light path of cutting head and preheating head, and the laser beam of cutting head is partially reflected into the preheating head by the beam splitter, so that punching of glass substrate and preheating of the next processing point are carried out at the same time, which saves the processing time of glass substrate.

Description

Technical Field

[0001] This invention belongs to the field of TGV chip processing technology, specifically relating to a processing equipment and method for TGV glass substrates. Background Technology

[0002] In recent years, due to the advantages of glass, such as its adjustable coefficient of thermal expansion, low insertion loss, and high resistivity, through-glass via (TGV) technology, an extension of TSV technology, has attracted widespread attention in the industry. By using vertical short-wire interconnects through vias to replace traditional inter-chip wire interconnects, high integration is achieved while miniaturizing products, significantly improving product performance. As a potential alternative to silicon-based interposers, glass vias have broad application prospects in fields such as radio frequency devices, microelectromechanical systems (MEMS) packaging, and optoelectronic system integration.

[0003] Drilling holes in glass substrates using high-temperature lasers is currently the most widely used method. However, glass, as a non-metallic material, has low thermal conductivity. This means that heat is difficult to conduct quickly to other parts of the drilled area, leading to excessively high local temperatures and the formation of heat-affected zones. This is mainly due to the high energy density of the laser beam, the low thermal conductivity of glass, and the generation of instantaneous high temperatures.

[0004] The formation of a heat-affected zone can cause cracks or rough surfaces around the vias in the glass substrate. To address these issues, existing technologies mainly offer the following two solutions:

[0005] Option 1: First, form several small holes on the glass substrate, then soak the glass substrate in strong acid, using the corrosiveness of the strong acid to corrode the through holes to the target hole diameter.

[0006] Option 2: Use resin and other components to cover the surface of the through hole, forming a protective layer on the surface of the through hole.

[0007] However, neither of the above two solutions fundamentally reduces the generation of cracks. Instead, they cover or eliminate the cracks or rough surfaces of the through holes through chemical methods, which always have certain defects. Summary of the Invention

[0008] The main objective of this invention is to provide a processing equipment and method for TGV glass substrates, aiming to solve the problem that existing technologies cannot fundamentally reduce the cracks or rough surfaces caused by thermal stress during drilling of glass substrates in the TGV process.

[0009] The technical solution adopted in this invention is as follows:

[0010] A processing device for TGV glass substrates, comprising:

[0011] The cutting head includes a first reflecting mirror, a beam splitter, and a beam converger arranged sequentially.

[0012] The preheating head includes a second reflecting mirror and a beam expander arranged in sequence. The second reflecting mirror is parallel to the beam splitter. The inner cavity of the preheating head is connected to the inner cavity of the cutting head so that the optical paths of the beam splitter and the second reflecting mirror are connected.

[0013] The first reflector reflects the light source generated by the laser generator to the beam splitter, which splits the light source into two beams with different energy densities. The beam splitter refracts the beam with higher energy density to the beam focusing lens and reflects the beam with lower energy density to the second reflector. The second reflector reflects the beam to the beam expander. The beam focusing lens is used to drill holes in the glass substrate, and the beam expander is used to preheat the glass substrate.

[0014] Optionally, the cutting head includes a first mounting part, a second mounting part, and a third mounting part that are detachably connected in sequence; a first reflector is installed in the first mounting part, the first reflector has an angle with the horizontal plane, and a first entrance hole is opened on the side wall of the first mounting part, through which the light source generated by the laser generator is directed towards the first reflector; a beam splitter is installed in the second mounting part, and a reflection hole is opened on the side wall of the second mounting part, the mirror surface of the beam splitter has an angle of 45° with both the axis of the reflection hole and the axis of the second mounting part; a beam converger is installed in the third mounting part, and the beam converger is parallel to the glass substrate.

[0015] Optionally, the sidewall of the second mounting part includes a first threaded section, a connecting section, and a second threaded section in sequence; the outer diameter of the first threaded section is smaller than that of the connecting section, and it is provided with an external thread, and the first threaded section is threadedly connected to the first mounting part; a reflective hole is opened in the connecting section, and the inner cavity of the connecting section includes a placement part and a transition section, the inner diameter of the placement part is larger than that of the transition section, and the inner diameter of the transition section is the same as that of the first threaded section; the inner cavity of the second threaded section communicates with the transition section, and the inner diameter of the second threaded section is larger than that of the transition section, and an internal thread is opened in the second threaded section, and the second threaded section is threadedly connected to the third mounting part.

[0016] Optionally, a reflective hole and a placement part are provided at one end of the connecting section near the first threaded section. The placement part includes a first annular groove and a second annular groove, and the reflective hole is opened between the first annular groove and the second annular groove. The inner diameter of the first annular groove and the inner diameter of the second annular groove are the same and both are larger than the inner diameter of the transition section. The first annular groove and the second annular groove are respectively used to place the two ends of the beam splitter.

[0017] Optionally, the third mounting section includes a first mounting section, a second mounting section, and a conical section in sequence; the inner cavity of the first mounting section is connected to a focusing lens via a thread, and the first mounting section is connected to the second mounting section; the inner diameter of the second mounting section is smaller than that of the first mounting section, a protective lens is snapped into the second mounting section, and a second air inlet communicating with the outside is opened on the side wall of the second mounting section, the second air inlet being located between the protective lens and the conical section; the inner diameter of the conical section gradually decreases from top to bottom, and a through hole for the beam to pass through is opened at the bottom end of the conical section, the conical section being coaxially arranged with the focusing lens.

[0018] Optionally, the inner wall of the second mounting section has a first annular protrusion and a second annular protrusion, and a snap-fit ​​groove for snapping a protective lens is formed between the first annular protrusion and the second annular protrusion; the edge of the protective lens has a chamfer; the cross-section of the first annular protrusion is arc-shaped, and the surface of the first annular protrusion and the chamfer of the protective lens are used to facilitate the entry of the protective lens into the snap-fit ​​groove.

[0019] Optionally, the preheating head includes a detachably connected first housing and second housing, and the beam expander includes a second convex lens and a concave lens; a second reflector is installed at the top of the inner cavity of the first housing, and a second entrance hole is provided on one side wall of the first housing, which communicates with the inner cavity of the cutting head; the mirror surface of the second reflector has an angle of 45° with both the axis of the first housing and the axis of the second entrance hole; the inner cavity of the first housing includes an upper section and a lower section, the inner diameter of the upper section is larger than the inner diameter of the lower section, the second convex lens is installed in the upper section, and the lower section is connected to the second housing; a concave lens is installed in the second housing.

[0020] Optionally, the inner cavity of the preheating head is connected to the inner cavity of the cutting head through an adjusting mechanism; the adjusting mechanism includes a first connecting pipe, a second connecting pipe and a third connecting pipe, and the optical path between the beam splitter and the second reflecting mirror is connected through the first connecting pipe and the second connecting pipe, which are respectively installed on the cutting head and the preheating head; one end of the third connecting pipe is threaded to the first connecting pipe, and the other end is rotatably sleeved to the second connecting pipe.

[0021] Optionally, a rotating part is provided at one end of the inner wall of the third connecting pipe, and an adjusting part is provided at the other end; the rotating part includes at least one annular groove, and a third annular protrusion is provided on the outer wall of the second connecting pipe, the third annular protrusion being engaged in the annular groove; the adjusting part is provided with an internal thread, the outer wall of the first connecting pipe has an external thread, and the adjusting part is threadedly connected to the first connecting pipe; a tightening nut is also installed on the first connecting pipe, the tightening nut being threadedly connected to the first connecting pipe, and the tightening nut being used to press against the third connecting pipe.

[0022] A method for processing a TGV glass substrate includes the following steps:

[0023] S1. Fix the glass substrate to be processed on the placement table, and adjust the cutting head and preheating head to their initial positions;

[0024] S2. Adjust the output power of the laser generator to the first level so that the laser beam output from the cutting head preheats the first point to be processed in the initial row / column;

[0025] S3. After preheating, increase the output power of the laser generator to the second level so that the laser generator can drill the first point to be processed. While the first point to be processed is being drilled, the preheating head preheats the next point to be drilled. This cycle continues until the drilling of the row / column is completed.

[0026] S4. After punching the previous row / column, repeat steps S2~S3.

[0027] S5. After all the points to be processed on the glass substrate are drilled, the glass substrate after drilling is immersed in a strong acid solution for 5 to 10 minutes.

[0028] S6. Clean the glass substrate after soaking and check the aperture and surface roughness parameters of the aperture wall.

[0029] The beneficial effects of this invention are as follows:

[0030] 1) This invention provides a processing method for TGV glass substrates: Before drilling, the first processing point in a row / column is preheated by a cutting head, and then the preheated point is drilled; during drilling, a beam splitter refracts a higher energy density laser beam toward a focusing lens, which focuses the beam to drill the glass substrate. At the same time, the beam splitter reflects a portion of the lower energy density laser beam to the preheating head, which preheats the next processing point. The cutting head can then directly drill after moving to the next point. This process is repeated until all processing points in the row / column are completed. Then, the cutting head and the preheating head are moved to the next row / column, and the above steps are repeated. Preheating can make the local temperature of the glass substrate more uniform, so that the heat applied by laser cutting during drilling is less likely to cause drastic temperature differences, thus effectively reducing the thermal stress generated inside the material. This eliminates or reduces the occurrence of cracks or rough surfaces. Furthermore, by modifying the processing method, the preheated area can effectively reduce the occurrence of cracks and rough surfaces, resulting in a higher yield of qualified glass substrates and lower overall construction costs.

[0031] 2) This invention also provides a processing device for TGV glass substrates. By connecting the optical paths of the cutting head and the preheating head, a beam splitter is used to split the laser beam into two beams with different energy densities, which are simultaneously delivered to a focusing mirror and a second reflecting mirror. The beam splitter refracts the higher energy density beam to the focusing mirror, which then focuses the laser beam onto the processing point, thereby preheating or drilling the processing point. The second reflecting mirror reflects the laser beam to a beam expander, which expands the focal point of the laser beam, thus preheating the processing point and its vicinity. This invention can preheat the processing points on the glass substrate, thereby effectively reducing the problems of cracks or rough hole surfaces caused by excessive temperature differences at the drilling points. It also allows drilling of the glass substrate and preheating of the next processing point to be performed simultaneously, further saving processing time on the glass substrate. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of the present invention;

[0034] Figure 2 This is a top view of the present invention;

[0035] Figure 3 This is a structural diagram of the placement platform;

[0036] Figure 4 This is a structural schematic diagram of the support base;

[0037] Figure 5 yes Figure 3 Enlarged view of region A in the middle;

[0038] Figure 6 yes Figure 3 Enlarged view of region B in the middle;

[0039] Figure 7 yes Figure 4 Enlarged view of region C in the middle;

[0040] Figure 8 yes Figure 4 Enlarged schematic diagram of region D in the middle;

[0041] Figure 9 This is a structural diagram of the processing components;

[0042] Figure 10This is a top view of the processing components;

[0043] Figure 11 yes Figure 10 A cross-sectional view of the EE, omitting the mounting plate;

[0044] Figure 12 This is a structural schematic diagram of the second mounting section;

[0045] Figure 13 This is a structural schematic diagram of the third installation section;

[0046] Figure 14 yes Figure 13 Enlarged schematic diagram of region H in the middle;

[0047] Figure 15 This is a schematic diagram of the internal structure of the preheating head;

[0048] Figure 16 This is a schematic diagram of the third connecting pipe;

[0049] Figure 17 This is a schematic diagram of the structure of a laser generator;

[0050] Figure 18 yes Figure 17 Enlarged schematic diagram of region F in the middle;

[0051] Figure 19 yes Figure 17 A magnified diagram of region G in the middle.

[0052] Explanation of icon numbers:

[0053] 100. Support base; 110. Bottom support frame; 111. Top support frame; 200. Placement platform; 210. Mounting profile; 221. First clamping component; 222. Second clamping component; 223. Third clamping component; 224. Fourth clamping component; 225. Electric push rod; 230. Linear module; 231. Vertical mounting plate; 232. First drive motor; 233. First synchronous pulley; 234. Ball screw; 235. Screw nut; 236. Connecting plate; 300. Planar moving assembly; 310. First slide rail; 311. Second... Drive motor; 312, second synchronous pulley; 313, coupling; 314, drive shaft; 320, moving crossbeam; 330, second slide rail; 3301, second slider; 331, third drive motor; 332, third synchronous pulley; 400, laser generator; 410, radiator housing; 411, first air inlet; 412, first air outlet; 413, heat dissipation fins; 414, guide hole; 600, processing component; 601, fourth mounting plate; 602, translation channel; 603, limit block; 604, sliding guide rail; 605, the... 610. Mounting plate; 611. Cutting head; 612. First mounting part; 613. First reflector; 614. Second mounting part; 615. First threaded section; 616. Connecting section; 617. Second threaded section; 618. Reflecting hole; 619.22. First annular groove; 610.23. Second annular groove; 611. Beam splitter; 612. Third mounting part; 613.1. First mounting section; 613.22. Second mounting section; 613.21. First annular protrusion; 613.22. Second annular protrusion; 614. Conical section; 615. 617. Focusing lens; 618. Protective lens; 620. Second air inlet; 621. Preheating head; 622. Reflector mounting plate; 623. Second reflector; 624. First housing; 625. Second convex lens; 625. Second housing; 6251. Third air inlet; 6252. Annular airflow cavity; 626. Concave lens; 630. Adjustment mechanism; 631. First connecting pipe; 632. Locking nut; 633. Third connecting pipe; 6331. Anti-slip stripe; 6332. Adjustment part; 6333. Annular groove; 634. Second connecting pipe.

[0054] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0055] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0056] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0057] Furthermore, the use of terms such as "first" and "second" in this invention is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the term "and / or" throughout the text includes three solutions; taking A and / or B as an example, it includes technical solution A, technical solution B, and a technical solution that simultaneously satisfies A and B. Furthermore, the technical solutions of various embodiments can be combined with each other, provided that they are feasible for those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0058] Example 1:

[0059] like Figures 1-2 As shown, this embodiment provides a processing device for TGV glass substrates. The glass substrate is mounted on a placement stage 200, and a processing assembly 600 consisting of a cutting head 610 and a preheating head 620 is movably disposed above the glass substrate.

[0060] like Figures 9-11As shown, the cutting head 610 includes a first reflecting mirror 612, a beam splitter 614, and a beam converger 616, which are installed sequentially from top to bottom in the use state. The preheating head 620 includes a second reflecting mirror 622 and a beam expander, which are arranged sequentially from top to bottom in the use state. The second reflecting mirror 622 is parallel to the beam splitter 614. The inner cavity of the preheating head 620 is connected to the inner cavity of the cutting head 610 so that the optical paths of the beam splitter 614 and the second reflecting mirror 622 are connected. The first reflecting mirror 612 reflects the light source generated by the laser generator 400 to the beam splitter 614, which splits the light source into two beams with different energy densities. The beam splitter 614 refracts the beam with higher energy density towards the beam converger 616 and reflects the beam with lower energy density towards the second reflecting mirror 622. The second reflecting mirror 622 reflects the beam to the beam expander. The beam converger 616 is used to drill holes in the glass substrate, and the beam expander is used to preheat the glass substrate. In this embodiment, by connecting the optical paths of the cutting head 610 and the preheating head 620, the laser beam is split into two beams with different energy densities using a beam splitter 614 and simultaneously delivered to a focusing mirror 616 and a second reflecting mirror 622. The beam splitter 614 refracts the higher energy density beam to the focusing mirror 616, which then focuses the laser beam onto the processing point on the glass substrate, thereby preheating or drilling the processing point. The second reflecting mirror 622 reflects the laser beam to a beam expander, which adjusts the focal point of the laser beam, expanding the area irradiated by the preheating head 620 on the glass substrate, thus preheating the processing point and its vicinity. This allows for preheating of the processing point on the glass substrate, effectively reducing cracks or rough hole surfaces caused by excessive temperature differences at the drilling point. Furthermore, it enables simultaneous drilling of the glass substrate and preheating of the next processing point, further saving processing time on the glass substrate.

[0061] like Figures 11-14 As shown, the cutting head 610 includes a first mounting part 611, a second mounting part 613, and a third mounting part 615 that are detachably connected in sequence. A first reflector 612 is installed in the first mounting part 611. The first reflector 612 has an angle with the horizontal plane, and a first entrance hole is opened on the side wall of the first mounting part 611. The light source generated by the laser generator 400 is directed towards the first reflector 612 through the first entrance hole. A beam splitter 614 is installed in the second mounting part 613, and a reflection hole 61321 is opened on the side wall of the second mounting part 613. The mirror surface of the beam splitter 614 has an angle of 45° with both the axis of the reflection hole 61321 and the axis of the second mounting part 613. A beam converger 616 is installed in the third mounting part 615. The beam converger 616 is parallel to the glass substrate.

[0062] In this embodiment, the first mounting part 611 is a space consisting of three side walls, a bottom wall, and an inclined wall. The three side walls are perpendicular to each other, the bottom wall is perpendicular to the three side walls, the inclined wall is set at an angle to the bottom wall, and the four sides of the inclined wall abut against the three side walls and the bottom wall simultaneously. The first entrance hole is opened on the side wall opposite to the inclined wall, the first reflector 612 is mounted on the inclined wall, and the mirror surface of the first reflector 612 faces the first entrance hole. A threaded hole is opened on the bottom wall of the first mounting part 611.

[0063] Preferably, the first reflector 612 forms a 45° angle with the bottom wall of the first mounting part 611, the laser generator 400 is horizontally mounted, and the laser emission aperture of the laser generator 400 is aligned with the center of the first reflector 612; so that the laser beam emitted by the laser generator 400 can be reflected along the central axis of the second mounting part 613.

[0064] In this embodiment, the second mounting part 613 is cylindrical.

[0065] The sidewall of the second mounting part 613 sequentially includes a first threaded section 6131, a connecting section 6132, and a second threaded section 6133. The outer diameter of the first threaded section 6131 is smaller than that of the connecting section 6132, and it is provided with an external thread. The first threaded section 6131 is threadedly connected to the threaded hole on the bottom wall of the first mounting part 611. The reflecting hole 61321 is opened in the connecting section 6132. The inner cavity of the connecting section 6132 includes a placement part and a transition part. The inner diameter of the placement part is larger than that of the transition part, so that the beam-splitting mirror 614 can be inserted from either end of the second mounting part 613. The inner diameter of the transition part is the same as that of the first threaded section 6131. ​​The inner cavity of the second threaded section 6133 is connected to the transition part, and the inner diameter of the second threaded section 6133 is larger than that of the transition part. The second threaded section 6133 is provided with an internal thread, and it is threadedly connected to the third mounting part 615.

[0066] In this embodiment, a reflective hole 61321 and a placement portion are provided at one end of the connecting segment 6132 near the first threaded segment 6131. ​​The placement portion includes a first annular groove 61322 and a second annular groove 61323. The reflective hole 61321 is opened between the first annular groove 61322 and the second annular groove 61323. The inner diameter of the first annular groove 61322 and the inner diameter of the second annular groove 61323 are the same and both are larger than the inner diameter of the transition segment. The first annular groove 61322 and the second annular groove 61323 are respectively used to place the two ends of the beam splitter 614.

[0067] In this embodiment, the lens of the beam splitter 614 is rectangular, and the width of the beam splitter 614 is smaller than the inner diameter of the first threaded section 6131, so that the beam splitter 614 can be placed into the second mounting part 613; the reflecting surface of the beam splitter 614 faces the second reflecting mirror 622.

[0068] In this embodiment, the beam splitter 614 is disposed at one end near the first mounting part 611. When installing the beam splitter 614, one end of the beam splitter 614 is first inserted into the end near the first mounting part 611. After the bottom end of the beam splitter 614 abuts against the second annular groove 61323, the other end of the beam splitter 614 is released, causing the beam splitter 614 to tilt towards the first annular groove 61322, thereby completing the installation of the beam splitter 614.

[0069] Preferably, the diameter of the second annular groove 61323 is equal to the height of the transition section, so that after the beam splitter 614 is placed, the mirror surface of the beam splitter 614 simultaneously forms a 45° angle with both the axis of the reflecting aperture 61321 and the axis of the second mounting portion 613. After the beam splitter 614 is placed, the first mounting portion 611 and the second mounting portion 613 can be threaded together.

[0070] In this embodiment, the third mounting portion 615 sequentially includes a first mounting section 6151, a second mounting section 6152, and a tapered section 6153. A focusing lens 616 is threadedly connected to the inner cavity of the first mounting section 6151, and the first mounting section 6151 is threadedly connected to the second mounting portion 613. The inner diameter of the second mounting section 6152 is smaller than the inner diameter of the first mounting section 6151, and a protective lens 617 is snapped into the second mounting section 6152. During installation, the smaller-diameter protective lens 617 is first snapped into the second mounting section 6152, and then the focusing lens 616 is screwed into the first mounting section 6151. The third mounting portion 615 is then connected to the second mounting portion 613.

[0071] The protective lens 617 is used to prevent the fumes from the high-temperature molten glass during the drilling process from affecting the focusing lens 616. The protective lens 617 is generally made of a material that does not absorb the laser light source, and it is a full lens. The focusing lens 616 is a first convex lens, and the focal point of the focusing lens 616 can be adjusted by adjusting the distance between the tapered segment 6153 and the glass substrate.

[0072] In this embodiment, a second air inlet 618 communicating with the outside is provided on the side wall of the second mounting section 6152. The second air inlet 618 is located between the protective lens 617 and the tapered section 6153. The inner diameter of the tapered section 6153 gradually decreases from top to bottom, and a through hole for the light beam to pass through is provided at the bottom end of the tapered section 6153. The tapered section 6153 is coaxially arranged with the focusing lens 616.

[0073] The tapered section 6153 is used to prevent mist or debris generated during drilling from entering the third mounting part 615, thereby further protecting the focusing lens 616. Simultaneously, a second air inlet 618 is provided on the side wall of the tapered section 6153. The second air inlet 618 is used to input protective air into the inner cavity of the tapered section 6153, making the air pressure inside the tapered section 6153 greater than the external air pressure, thereby preventing mist generated by glass melting from entering the third mounting part 615. At the same time, the air output from the tapered section 6153 can also disperse the molten debris generated during drilling, preventing the molten debris from cooling, solidifying, and accumulating in the processed hole, thus affecting the hole quality.

[0074] In this embodiment, the inner wall of the second mounting section 6152 has a first annular protrusion 61521 and a second annular protrusion 61522, and a snap-fit ​​groove for snapping the protective lens 617 is formed between the first annular protrusion 61521 and the second annular protrusion 61522; the cross-section of the first annular protrusion 61521 is arc-shaped, and the edge of the protective lens 617 has a chamfer. The surface of the first annular protrusion 61521 and the chamfer of the protective lens 617 are used to facilitate the entry of the protective lens 617 into the snap-fit ​​groove.

[0075] In this embodiment, as Figures 9-16 As shown, the preheating head 620 includes a first housing 623 and a second housing 625 that are detachably connected. The beam expander includes a second convex lens 624 and a concave lens 626. An inclined mirror mounting plate 621 is provided on the top of the first housing 623. The mirror mounting plate 621 is used to mount a second mirror 622, with the mirror surface of the second mirror 622 facing the beam splitter 614. After the second mirror 622 is mounted on the mirror mounting plate 621, the mirror mounting plate 621 is then locked onto the first housing 623.

[0076] In this embodiment, a second reflector 622 is installed at the top of the inner cavity of the first housing 623. A second entrance hole is provided on one side wall of the first housing 623, and the second entrance hole communicates with the inner cavity of the cutting head 610. The mirror surface of the second reflector 622 forms a 45° angle with both the axis of the first housing 623 and the axis of the second entrance hole, so that the central axis of the second reflector 622 is aligned with the central axis of the beam splitter 614. The inner cavity of the first housing 623 includes an upper section and a lower section. The inner diameter of the upper section is larger than that of the lower section. A second convex lens 624 is installed in the upper section, and the lower section is connected to the second housing 625. A concave lens 626 is installed inside the second housing 625.

[0077] Specifically, a stepped surface is formed at the junction of the upper and lower sections of the inner cavity of the first housing 623, and the second convex lens 624 is placed on the stepped surface of the inner cavity of the first housing 623.

[0078] In this embodiment, the first housing 623 and the second housing 625 are threadedly connected, allowing either the first housing 623 or the second housing 625 to be rotated, causing the second convex lens 624 and the concave lens 626 to move closer or further apart, thereby adjusting the dispersion of the laser beam by the beam expander and thus adjusting the preheating area of ​​the glass substrate. The inner cavity of the second housing 625 is configured as a single-stage stepped hole, and the concave lens 626 is threadedly connected to the end of the stepped hole with the larger aperture.

[0079] In this embodiment, as Figure 15 As shown, an airflow groove is provided in the peripheral wall of the second housing 625, with the opening of the airflow groove facing downwards, and a third air inlet 6251 is provided on the peripheral wall of the second housing 625, which is used to input air into the airflow groove.

[0080] In this embodiment, the width of the airflow channel opening gradually decreases, and the gas in the airflow channel is pressurized and output after passing through the channel opening.

[0081] In this embodiment, the laser generator 400 is a carbon dioxide laser generator 400.

[0082] In this embodiment, as Figures 17-19 As shown, air-cooled heat sinks are provided on both sides of the laser generator 400. Each air-cooled heat sink includes a heat sink housing 410 and several heat dissipation fins 413 sealed within the heat sink housing 410. The heat sink housing 410 has a first air inlet 411 and a first air outlet 412 only on its end face. The first air inlet 411 connects a compressed air source to the inner cavity of the heat sink housing 410. The first air inlet 411 is located above the uppermost heat dissipation fin 413, and the first air outlet 412 is located below the lowermost heat dissipation fin 413.

[0083] In this embodiment, a plurality of heat dissipation fins 413 divide the inner cavity of the radiator housing 410 into a plurality of independent spaces. The heat dissipation fins 413 are provided with guide holes 414, and the spaces divided by two adjacent heat dissipation fins 413 are connected through the guide holes 414. The guide holes 414 on two adjacent heat dissipation fins 413 are located at the ends of the two heat dissipation fins 413 that are far apart from each other. The guide hole 414 of the uppermost heat dissipation fin 413 is located at one end of the first air inlet 411 in the middle, and the guide hole 414 of the lowermost heat dissipation fin 413 is located at the end close to the first air outlet 412. After compressed air enters from the first air inlet 411, it passes through the plurality of guide holes 414 in sequence and flows out through the first air outlet 412.

[0084] In this embodiment, the air output from the first air outlet 412 of the radiator is simultaneously connected to the second air inlet 618 and the third air inlet 6251 through a three-way valve.

[0085] In this embodiment, the air output from the first air outlet 412 of the heat sink carries a certain amount of heat after exchanging heat with the heat sink fins 413. Thus, the hot air output from the airflow slot can assist in preheating the glass substrate, which can reduce the power requirement of the preheating head 620 for the laser beam. Therefore, a beam splitter 614 with lower reflectivity can be selected so that more energy is concentrated in the cutting head 610.

[0086] Example 2:

[0087] This embodiment provides an optional solution for the connection structure of the preheating head 620 and the cutting head 610.

[0088] In this embodiment, as Figures 9-16 The inner cavity of the preheating head 620 is connected to the inner cavity of the cutting head 610 through the adjusting mechanism 630. The adjusting mechanism 630 includes a first connecting pipe 631, a second connecting pipe 634 and a third connecting pipe 633. The optical path between the beam splitter 614 and the second reflecting mirror 622 is connected through the first connecting pipe 631 and the second connecting pipe 634. The first connecting pipe 631 and the second connecting pipe 634 are respectively disposed on the cutting head 610 and the preheating head 620. One end of the third connecting pipe 633 is threadedly connected to the first connecting pipe 631, and the other end is rotatably sleeved to the second connecting pipe 634. The inner wall of the third connecting pipe 633 has a rotating part at one end and an adjusting part 6332 at the other end. The rotating part includes at least one annular groove 6333. The outer wall of the second connecting pipe 634 has a third annular protrusion that engages with the annular groove 6333. The cross-section of the third annular protrusion is arc-shaped, and the edge of the annular groove 6333 is rounded. The adjusting part 6332 has an internal thread, and the outer wall of the first connecting pipe 631 has an external thread. The adjusting part 6332 is threaded to the first connecting pipe 631. The first connecting pipe 631 is also equipped with a tightening nut, which is threaded to the first connecting pipe 631 and is used to tighten the third connecting pipe 633.

[0089] In this embodiment, a plurality of anti-slip stripes 6331 are also provided on the outer peripheral wall of the third connecting pipe 633. The anti-slip stripes 6331 extend along the axial direction of the third connecting pipe 633. The plurality of anti-slip stripes 6331 are evenly distributed in the circumferential direction of the third connecting pipe 633.

[0090] Specifically, the anti-slip stripe 6331 is used to prevent slippage when rotating the third connecting pipe 633.

[0091] Example 3:

[0092] This embodiment provides a method for processing TGV glass substrates.

[0093] The processing method for TGV glass substrates includes the following steps:

[0094] S1. Fix the glass substrate to be processed on the placement stage 200, and adjust the cutting head 610 and the preheating head 620 to their initial positions.

[0095] S2. Adjust the output power of the laser generator 400 to the first level so that the laser beam output from the cutting head 610 preheats the first point to be processed in the initial row / column; use the preheating head 620 to preheat the glass substrate to be processed at a low temperature so that the area around the hole to be drilled on the glass substrate forms a preheating zone. The preheating temperature is 10% to 30% of the drilling temperature, and the preheating temperature should be controlled so as not to cause the glass substrate to deform. The preheating time can be reasonably set according to the material of the glass substrate and the frequency of the selected laser beam.

[0096] When glass is heated by laser irradiation, it expands. The degree of expansion is determined by the coefficient of thermal expansion (α). T This is determined by the temperature difference. Uneven heating can cause stress due to temperature variations. Thermal stress can be estimated using the following formula:

[0097]

[0098] Where σ is thermal stress, E is Young's modulus of glass, and α T It is the coefficient of thermal expansion, and ΔT is the temperature difference. E and α... T These are all inherent properties of the glass substrate material and are fixed values ​​for the selected material. This invention reduces the impact of thermal stress on the processing area by preheating the glass, i.e., by reducing the temperature difference ΔT.

[0099] The power and preheating temperature for the first setting can be selected according to actual needs. In order to better reduce thermal stress, the temperature difference ΔT can be small enough, but the preheating temperature should not exceed the deformation temperature of the glass substrate material.

[0100] For common TGV glass substrate materials, the preheating temperature should usually be controlled between 50℃ and 300℃ to avoid excessively high temperatures causing deformation or loss of hardness in the glass.

[0101] S3. After preheating, increase the output power of the laser generator 400 to the second level so that the laser generator 400 can drill a hole at the first point to be processed. While the first point to be processed is being drilled, the preheating head 620 preheats the next point to be drilled. This cycle continues until the drilling of the row / column is completed. The power of the second level should ensure that the laser power output by the laser generator 400 is sufficient to melt and penetrate the point to be processed on the glass substrate after the cutting head 610 passes through the beam splitter 614 and the beam converger 616.

[0102] S4. After the previous row / column is finished punching, repeat steps S2~S3 until all the points to be processed are processed.

[0103] S5. After all the points to be processed on the glass substrate are drilled, the glass substrate is immersed in a strong acid solution for 5 to 10 minutes. Immersion in the strong acid solution can corrode the debris or rough surface on the hole wall, thereby making the hole wall smoother.

[0104] S6. Clean the glass substrate after soaking and check the aperture and surface roughness parameters of the aperture wall.

[0105] Example 4:

[0106] This embodiment provides a moving mechanism for a processing component 600.

[0107] In this embodiment, as Figures 1-10 As shown, the moving mechanism of the processing assembly 600 includes a support base 100 and a liftable placement stage 200 disposed on the support base 100, the placement stage 200 being used to place the glass substrate; it also includes a laser generator 400 disposed on the processing assembly 600, used to provide a laser source for drilling holes in the glass substrate; the processing assembly 600 is movably disposed above the glass substrate.

[0108] In this embodiment, the processing component 600 is mounted on the fourth mounting plate 601, and the cutting head 610 and the laser generator 400 are fixed to one side of the fourth mounting plate 601. A translation channel 602 is provided on the fourth mounting plate 601, and the length direction of the translation channel 602 is perpendicular to the length direction of the laser generator 400 (e.g., ...). Figure 9 and Figure 10 As shown, sliding guide rails 604 are provided on both sides of the translation channel 602. Matching sliders are slidably mounted on the sliding guide rails 604. The preheating head 620 is mounted on the fifth mounting plate 605, which is mounted on the slider of the sliding guide rail 604. This allows the preheating head 620 to move within the translation channel 602 when the third connecting pipe 633 is rotated, thereby moving closer to or away from the cutting head 610.

[0109] In this embodiment, a limiting block 603 is also provided at the end of the translation channel 602 away from the cutting head 610. The limiting block 603 is used to limit the movement distance of the preheating head 620.

[0110] In this embodiment, the support base 100 includes a bottom support frame 110 and a top support frame 111 connected by several vertical supports. The top support frame 111 is provided with a planar moving component 300 for moving the processing component 600. The planar moving component 300 is used to drive the processing component 600 to move in a plane above the glass substrate so as to process different points on the glass substrate.

[0111] In this embodiment, the planar moving component 300 includes a first slide rail 310 and a second slide rail 330 that are perpendicular to each other in space. The first slide rail 310 is provided at both ends of the top of the support base 100. The two ends of the second slide rail 330 are respectively mounted on the first slider of the first slide rail 310. The processing component 600 is mounted on the second slider 3301 of the second slide rail 330.

[0112] Specifically, a second synchronous pulley 312 is provided at both ends of the first slide rail 310 along its length, and the second synchronous pulleys 312 at both ends of the first slide rail 310 are connected by a synchronous belt drive; a second drive motor 311 is also provided at one end of the first slide rail 310, and the second drive motor 311 is used to drive the second synchronous pulley 312 to rotate; the second synchronous pulleys 312 on the two first slide rails 310 at both ends of the top support frame 111 are driven to move synchronously through a coupling 313 and a drive shaft 314.

[0113] like Figure 8 As shown, the cutting head 610 and the preheating head 620 are located on both sides of the second slide rail 330; a movable crossbeam 320 is also installed between the second slide rail 330 and the first slider.

[0114] Specifically, the mounting base of the third drive motor 331 presses the top surface of the timing belt against the top surface of the moving crossbeam 320, thereby fixing the moving crossbeam 320 to the timing belt and allowing the timing belt to drive the moving crossbeam 320 to move. The bottom surface of the moving crossbeam 320 is mounted on the first slider of the first slide rail 310, and the first slider can move along the length of the first slide rail 310, thereby guiding the movement of the moving crossbeam 320. The two ends of the timing belt are fitted onto the second timing pulleys 312 at both ends of the first slide rail 310. Through-holes are provided on both sides of the moving crossbeam 320, through which the timing belt passes, so that when the second drive motor 311 drives the second timing pulleys 312 to rotate, the moving crossbeam 320 moves along the length of the first slide rail 310.

[0115] In this embodiment, the specific connection method between the second drive motor 311 and the second synchronous pulley 312 can be referred to the figure. The second synchronous pulley 312 at one end of the first slide rail 310 includes two coaxial synchronous pulleys. The power output shaft of the second drive motor 311 is also provided with synchronous teeth. The synchronous teeth on the power output shaft of the second drive motor 311 are connected to one of the synchronous pulleys of the second synchronous pulley 312. The other synchronous pulley of the second synchronous pulley 312 is connected to the synchronous belt drive.

[0116] Similarly, the two ends of the second slide rail 330 are provided with third synchronous pulleys 332, and synchronous belts are also fitted on the two third synchronous pulleys 332; one end of the second slide rail 330 is provided with a third drive motor 331, and the third drive motor 331 is connected to the third synchronous pulley 332 for transmission.

[0117] In this embodiment, the fourth mounting plate 601 is mounted on the second slider 3301, and the bottom belt of the timing belt connected to the third timing pulley 332 is locked on the fourth mounting plate 601, so that the third drive motor 331 can drive the fourth mounting plate 601 to move with the second slider 3301.

[0118] In this embodiment, the second drive motor 311 is used to drive the moving crossbeam 320 to move along the length direction of the first slide rail 310. The third drive motor 331 is used to drive the fourth mounting plate 601 to move along the length direction of the second slide rail 330; thereby realizing the planar movement of the processing component 600 above the placement table 200.

[0119] In this embodiment, the placement platform 200 includes a funnel-shaped storage compartment and a mounting profile 210 disposed on the top edge of the storage compartment.

[0120] like Figures 1-8 As shown, a clamping assembly is provided on the placement platform 200. The clamping assembly includes a first clamping member 221, a second clamping member 222 and a third clamping member 223 disposed on the top edge of the placement platform 200.

[0121] Specifically, the first clamping member 221 and the two second clamping members 222 are respectively installed on the mounting profiles 210 on different sides of the storage compartment.

[0122] like Figures 4-7 As shown, the first clamping member 221 is fixedly mounted on the placement platform 200, and the two ends of the first clamping member 221 are fixedly mounted with second clamping members 222. The two ends of the third clamping member 223 are movably mounted on the second clamping members 222. The third clamping member 223 and the first clamping member 221 are respectively movably mounted with fourth clamping members 224. The first clamping member 221, the second clamping member 222, the third clamping member 223 and the fourth clamping member 224 fix the edge of the glass substrate from different directions.

[0123] Specifically, the second clamping member 222 is provided with a linear module 230, and both ends of the third clamping member 223 are mounted on the linear module 230; an electric push rod 225 is provided at the same end of the first clamping member 221 and the third clamping member 223, and the fourth clamping member 224 is mounted on the electric push rod 225. The first clamping member 221, the second clamping member 222, the third clamping member 223 and the fourth clamping member 224 are all profiles with snap-fit ​​grooves.

[0124] During installation, the two perpendicular edges of the glass substrate are first engaged in the engagement slots of the first clamping member 221 and the second clamping member 222, respectively. Then, the linear module 230 is activated, which drives the third clamping member 223 to move and engage the third edge of the glass substrate in the engagement slot of the third clamping member 223. Finally, the electric push rod 225 is activated to push the fourth clamping member 224 to move and engage the fourth edge of the glass substrate, thereby completing the fixation of the glass substrate.

[0125] In this embodiment, the area between the four mounting profiles 210 on the top surface of the placement platform 200 is grid-like or mesh-like; the grid-like or mesh-like shape facilitates the falling of glass substrate residues into the storage compartment for unified treatment.

[0126] In this embodiment, the placement platform 200 is connected to the support base 100 through a lifting mechanism. The lifting mechanism is used to drive the placement platform 200 to move on the support base 100, thereby adjusting the installation height of the placement platform 200.

[0127] Specifically, the lifting mechanism includes a vertical mounting plate 231, a first drive motor 232, a first synchronous pulley 233, a ball screw 234, a screw nut 235, and a connecting plate 236. The ball screw 234 is rotatably mounted between the top support frame 111 and the bottom support frame 110, and two ball screws 234 are provided at both ends of the support base 100. The two ball screws 234 at the same end of the support base 100 are symmetrically distributed on both sides of the support base 100. One end of the ball screw 234 is fixedly connected to the first synchronous pulley 233, and the other end of the ball screw 234 is drivenly connected to the screw nut 235. The screw nut 235 can convert the rotation of the ball screw 234 into translation along the length direction of the ball screw 234. The two first synchronous pulleys 233 at the same end of the support base 100 are connected by a synchronous belt. A vertical mounting plate 231 is arranged parallel to one side of the ball screw 234. The vertical mounting plate 231 is used to mount the first drive motor 232. The first drive motor 232 is connected to the adjacent first synchronous pulley 233. One end of the connecting plate 236 is connected to the screw nut 235, and the other end is connected to the placement platform 200. The first drive motor 232 drives the first synchronous pulley 233 to rotate, thereby driving the screw nut 235 to move up and down along the ball screw 234, and thus driving the placement platform 200 to move up and down within the support base 100, so as to adjust the installation height of the placement platform 200.

[0128] This invention is not limited to the optional embodiments described above, and anyone can derive other various forms of products based on the inspiration of this invention. The specific embodiments described above should not be construed as limiting the scope of protection of this invention; the scope of protection of this invention should be determined by the claims, and the specification can be used to interpret the claims.

Claims

1. A processing equipment for TGV glass substrates, characterized in that, include: The cutting head (610) includes a first reflecting mirror (612), a beam splitter (614) and a beam converger (616) arranged in sequence. A preheating head (620) includes a second reflector (622) and a beam expander arranged in sequence. The second reflector (622) is parallel to the beam splitter (614). The inner cavity of the preheating head (620) is connected to the inner cavity of the cutting head (610) so that the optical paths of the beam splitter (614) and the second reflector (622) are connected. The first reflector (612) reflects the light source generated by the laser generator (400) to the beam splitter (614), which splits the light source into two beams with different energy densities. The beam splitter (614) refracts the beam with higher energy density to the beam converger (616) and reflects the beam with lower energy density to the second reflector (622). The second reflector (622) reflects the beam to the beam expander. The beam converger (616) is used to drill holes in the glass substrate, and the beam expander is used to preheat the glass substrate. The preheating head (620) includes a first housing (623) and a second housing (625) that are detachably connected, and the beam expander includes a second convex lens (624) and a concave lens (626). A second reflector (622) is installed at the top of the inner cavity of the first housing (623). A second entrance hole is provided on one side wall of the first housing (623). The second entrance hole communicates with the inner cavity of the cutting head (610). The mirror surface of the second reflector (622) has an angle of 45° with both the axis of the first housing (623) and the axis of the second entrance hole. The inner cavity of the first housing (623) includes an upper section and a lower section. The inner diameter of the upper section is larger than that of the lower section. The second convex lens (624) is installed in the upper section. The lower section is connected to the second housing (625). A concave lens (626) is installed inside the second housing (625); The inner cavity of the preheating head (620) is connected to the inner cavity of the cutting head (610) through the adjusting mechanism (630); The distance adjustment mechanism (630) includes a first connecting tube (631), a second connecting tube (634), and a third connecting tube (633). The optical path between the beam splitter (614) and the second reflector (622) is connected through the first connecting tube (631) and the second connecting tube (634). The first connecting tube (631) and the second connecting tube (634) are respectively disposed on the cutting head (610) and the preheating head (620). One end of the third connecting pipe (633) is threaded to the first connecting pipe (631), and the other end is rotatably sleeved to the second connecting pipe (634); The cutting head (610) includes a first mounting part (611), a second mounting part (613), and a third mounting part (615) that are detachably connected in sequence. The first mounting part (611) houses the first reflector (612), which has an angle with the horizontal plane. The side wall of the first mounting part (611) has a first entrance hole, through which the light source generated by the laser generator (400) is directed towards the first reflector (612). The second mounting part (613) houses the beam splitter (614), which has a reflection hole (61321) on its side wall. The mirror surface of the beam splitter (614) has an angle of 45° with both the axis of the reflection hole (61321) and the axis of the second mounting part (613). The third mounting part (615) houses the focusing mirror (616), which is parallel to the glass substrate. The third mounting section (615) includes, in sequence, a first mounting section (6151), a second mounting section (6152), and a tapered section (6153). The inner cavity of the first mounting section (6151) is connected to a focusing lens (616) by a thread, and the first mounting section (6151) is threadedly connected to the second mounting part (613). The inner diameter of the second mounting section (6152) is smaller than that of the first mounting section (6151). A protective lens (617) is snapped into the second mounting section (6152). A second air inlet (618) communicating with the outside is opened on the side wall of the second mounting section (6152). The second air inlet (618) is located between the protective lens (617) and the tapered section (6153). The inner diameter of the conical segment (6153) gradually decreases from top to bottom, and the bottom end of the conical segment (6153) is provided with a through hole for the light beam to pass through. The conical segment (6153) is coaxially arranged with the focusing lens (616). The inner wall of the second mounting section (6152) has a first annular protrusion (61521) and a second annular protrusion (61522), and a snap-fit ​​groove for snapping the protective lens (617) is formed between the first annular protrusion (61521) and the second annular protrusion (61522). The first annular protrusion (61521) has an arc-shaped cross section, and the edge of the protective lens (617) has a chamfer. The surface of the first annular protrusion (61521) and the chamfer of the protective lens (617) are used to facilitate the protective lens (617) to enter the snap-fit ​​groove.

2. The processing equipment for TGV glass substrates according to claim 1, characterized in that, The sidewall of the second mounting part (613) includes a first threaded section (6131), a connecting section (6132), and a second threaded section (6133) in sequence. The outer diameter of the first threaded section (6131) is smaller than that of the connecting section (6132), and it is provided with external threads. The first threaded section (6131) is threadedly connected to the first mounting part (611). The reflective hole (61321) is formed in the connecting section (6132). The inner cavity of the connecting section (6132) includes a placement part and a transition section. The inner diameter of the placement part is larger than the inner diameter of the transition section. The inner diameter of the transition section is the same as the inner diameter of the first threaded section (6131). The inner cavity of the second threaded section (6133) is connected to the transition section, and the inner diameter of the second threaded section (6133) is larger than the inner diameter of the transition section. The second threaded section (6133) is provided with an internal thread, and the second threaded section (6133) is threadedly connected to the third mounting part (615).

3. The processing equipment for TGV glass substrates according to claim 2, characterized in that, The connecting section (6132) has a reflective hole (61321) and a placement part at one end near the first threaded section (6131). The placement part includes a first annular groove (61322) and a second annular groove (61323). The reflective hole (61321) is located between the first annular groove (61322) and the second annular groove (61323). The inner diameter of the first annular groove (61322) and the inner diameter of the second annular groove (61323) are the same and both are larger than the inner diameter of the transition section; The first annular groove (61322) and the second annular groove (61323) are respectively used to place the two ends of the beam splitter (614).

4. The processing equipment for TGV glass substrates according to claim 1, characterized in that, The inner wall of the third connecting pipe (633) is provided with a rotating part at one end and an adjusting part (6332) at the other end. The rotating part includes at least one annular groove (6333), and a third annular protrusion is provided on the outer wall of the second connecting pipe (634). The third annular protrusion is engaged in the annular groove (6333). The cross-section of the third annular protrusion is arc-shaped, and the edge of the annular groove (6333) is rounded. The adjusting part (6332) is provided with an internal thread, and the outer wall of the first connecting pipe (631) is provided with an external thread. The adjusting part (6332) is threadedly connected to the first connecting pipe (631). The first connecting pipe (631) is also equipped with an adjusting nut, which is threadedly connected to the first connecting pipe (631) and is used to abut against the third connecting pipe (633).

5. A method for processing a TGV glass substrate, characterized in that, The processing method for the TGV glass substrate is applied to the processing equipment for the TGV glass substrate as described in any one of claims 1 to 4, and the processing method for the TGV glass substrate includes the following steps: S1. Fix the glass substrate to be processed on the placement table, and adjust the cutting head and preheating head to their initial positions; S2. Adjust the output power of the laser generator to the first level so that the laser beam output from the cutting head preheats the first point to be processed in the initial row / column; S3. After preheating, increase the output power of the laser generator to the second level so that the laser generator can drill the first point to be processed. While the first point to be processed is being drilled, the preheating head preheats the next point to be drilled. This cycle continues until the drilling of the row / column is completed. S4. After punching the previous row / column, repeat steps S2~S3. S5. After all the points to be processed on the glass substrate are drilled, the glass substrate after drilling is immersed in a strong acid solution for 5 to 10 minutes. S6. Clean the glass substrate after soaking and check the aperture and surface roughness parameters of the aperture wall.

Images