Rapid cooling device for base plate of single crystal furnace

Abstract

The invention belongs to the technical field of single crystal furnace auxiliary work, and discloses a single crystal furnace chassis rapid cooling device, which comprises a single crystal furnace assembly and a chassis installed in the single crystal furnace assembly through a support shaft. Through cooperation of the cooling assembly, the steering wheel and other structures, the telescopic end of the hydraulic cylinder descends, the ratchet wheel is meshed with the second oblique tooth plate and rotates by 180 degrees, the power assembly drives the telescopic end of the hydraulic cylinder to ascend, the first oblique tooth plate clamps the ratchet wheel, and the ratchet wheel cannot reversely rotate through the second oblique tooth plate; the cooling medium always flows in the cooling box, so that the heat absorbed by the cooling box which is originally attached to the bottom of the steering wheel can be rapidly reduced by the flowing cooling medium, and the cooling box can be quickly cooled when the cooling box is attached to the steering wheel every time; and the temperature of the binding surface of the cooling box can be reduced again, so that the cooling time can be shortened as much as possible, and the cooling efficiency of the device on the chassis is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal furnace auxiliary work, and in particular is a single crystal furnace chassis rapid cooling device. Background Art

[0002] A single crystal furnace is a specialized device used to grow single crystal materials. It is typically used to produce high-purity single crystal silicon rods in industries such as semiconductors and solar photovoltaics. The furnace primarily consists of a furnace body, a heating system, a crystal pulling mechanism, a cooling system, and a chassis. The chassis is the base support structure at the bottom of the equipment, carrying a crucible containing the single crystal. To prevent high temperatures from softening or deforming the metal structure inside the equipment, and to control the crystal growth rate and quality, the sidewalls of the furnace must be cooled. In the existing technical solutions, a water cooling system is generally used for rapid cooling. However, it should be noted that in the existing solutions, only the periphery of the crucible can be cooled, but the temperature of its bottom and chassis is still uncontrollable, which will shorten the service life of the metal structure near the chassis, and the crystal production rate at the lower end of the crucible will also be affected. Therefore, it is necessary to provide a single crystal furnace chassis rapid cooling device. Summary of the Invention

[0003] In order to solve the problems raised in the above background technology, the present invention provides a single crystal furnace chassis rapid cooling device, which solves the problem that the bottom of the crucible and the chassis part cannot be cooled well, resulting in the metal structure around the chassis being forced to age faster, and the crystal growth rate at the lower end of the crucible will also be affected.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solution: a single crystal furnace chassis rapid cooling device, comprising a single crystal furnace assembly and a chassis installed inside the single crystal furnace assembly via a support shaft, and further comprising; Turn the steering wheel mounted on the bottom of the chassis; A support plate fixed inside the single crystal furnace assembly; a flow assembly mounted on top of the support plate; Two sets of cooling components are symmetrically arranged on top of the circulation component; The cooling assembly includes a cooling box, and displacement mechanisms are provided on both sides of the cooling box; The displacement mechanism includes a hydraulic cylinder connected to the circulation assembly, the top of the hydraulic cylinder is connected to the cooling box via a double-headed metal tube, a ratchet is fixedly installed on the outer periphery of the double-headed metal tube, a carrier box 1 is movably mounted on the double-headed metal tube, the top of the hydraulic cylinder is connected to the carrier box 1 via the metal tube 1, the top of the hydraulic cylinder is fixedly connected to the carrier box 1, and a bevel gear plate 1 is movably engaged inside the carrier box 1; The fixed end of the hydraulic cylinder is fixedly mounted with a second carrier box, which is connected to the circulation assembly through a second metal tube. A second helical tooth plate is movably engaged inside the second carrier box, and the inclination direction of the teeth of the second helical tooth plate is opposite to that of the first helical tooth plate. The circulation component is used to inject cooling medium into the hydraulic cylinder and the metal pipe on one side; A power assembly is arranged inside the single crystal furnace assembly, and the power assembly is used to drive the telescopic end of the hydraulic cylinder to move up and down and rotate.

[0005] Preferably, the cooling box is initially attached to the bottom of the steering wheel, the interior of the cooling box is divided into two independent chambers, the two ends of one side of the double-headed metal tube are respectively connected to the two chambers, and the cooling assembly also includes a baffle equidistantly installed in the two chambers inside the cooling box, the end of the baffle faces the air inlet end of the cooling box and a slot is opened in the middle.

[0006] Preferably, the circulation component includes a first circulation plate and a second circulation plate fixed on the top of the support plate, the first circulation plate is used to infuse cooling medium, and the second circulation plate is used to output cooling medium. A turntable is movably installed on the top of the first circulation plate and the second circulation plate, and the interior of the turntable is divided into a first chamber and a second chamber. The first chamber and the second chamber are connected to the first circulation plate and the second circulation plate respectively. The hydraulic cylinder and the metal pipe 2 on one side are connected to the first chamber, and the hydraulic cylinder and the metal pipe 2 on the other side are connected to the second chamber.

[0007] Preferably, the circulation assembly further comprises an infusion pipe installed on the first circulation disc and the second circulation disc, and a one-way valve is installed inside the infusion pipe for outputting the cooling medium.

[0008] Preferably, the injection tubes are located outside the single crystal furnace assembly, and the ends of the two injection tubes face oppositely and are both provided with thread grooves.

[0009] Preferably, the power assembly includes two mutually meshing gears and a motor fixed to the bottom of the single crystal furnace assembly, the support shaft and the outer periphery of the motor are movably connected with a bearing plate, one of the gears is installed on the output shaft of the motor, and the other gear is movably sleeved on the support shaft, the top of the gear is movably connected with a bracket through a support cage, a guide groove is opened on the outer periphery of the support shaft, and the bracket is movably connected to the guide groove.

[0010] Preferably, the guide grooves are connected end to end and are wavy, and the ends of the brackets are fixedly connected to the telescopic ends of the hydraulic cylinders.

[0011] Preferably, the bracket is movably sleeved on the outer periphery of the support shaft, and the bracket moves vertically inside the support cage.

[0012] Compared with the prior art, the present invention has the following beneficial effects: The present invention cooperates with structures such as a cooling assembly and a steering wheel. The telescopic end of the hydraulic cylinder descends, the ratchet engages with the second bevel gear plate and rotates 180 degrees, the power assembly drives the telescopic end of the hydraulic cylinder to rise, the first bevel gear plate clamps the ratchet, and prevents it from rotating in the opposite direction through the second bevel gear plate. Finally, the side of the cooling box with a lower temperature is in close contact with the bottom of the steering wheel and is cooled again. Since the cooling medium always flows inside the cooling box, the heat originally absorbed by the cooling box in close contact with the bottom of the steering wheel can be quickly reduced by the flowing cooling medium. Each time the cooling box is in contact with the steering wheel, the temperature of the contact surface of the cooling box can be reduced again, thereby shortening the cooling time as much as possible and improving the cooling efficiency of the device for the chassis. The present invention cooperates with structures such as a cooling assembly and a steering wheel. When the top of the cooling box is tightly attached to the bottom of the steering wheel, the heat transferred from the steering wheel to the upper end chamber through the top of the cooling box will not excessively affect the lower end chamber. The cooling medium flowing in the lower end chamber can quickly take away the heat thereon, so that when the bottom of the cooling box is turned upward and attached to the bottom of the steering wheel, the temperature difference between the two is widened, further improving the cooling efficiency of the device. When the cooling medium passes through the cooling box, it is blocked by the baffle, which can increase the time the cooling medium stays in the baffle, thereby more completely absorbing the heat on the steering wheel and avoiding waste of cooling medium.

[0013] The present invention cooperates with structures such as a power component and a cooling component. The output shaft of the motor drives two gears to rotate, and one of the gears drives the support cage and the bracket thereon to rotate. Since the bracket also moves inside the guide groove, the bracket will also move up and down according to the trajectory of the guide groove during rotation. At this time, the bracket can drive the telescopic ends of each hydraulic cylinder to move up and down and rotate thereby, thereby realizing the working process of the cooling component and rotating during the lifting process, thereby increasing the area of ​​the cooling box contacting the steering wheel, and further improving the cooling efficiency of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a first schematic diagram of the internal structure of the single crystal furnace assembly of the present invention; Figure 2 This is a second schematic diagram of the internal structure of the single crystal furnace assembly of the present invention; Figure 3 This is a schematic diagram of the structure coordination between the circulation component and the cooling component of the present invention; Figure 4 This is a schematic diagram of the structural coordination of the power assembly and the cooling assembly of the present invention; Figure 5 This is a schematic diagram of the coordination between the displacement mechanism and the cooling box structure of the present invention; Figure 6 This is a schematic diagram of the internal structure of the hydraulic cylinder and the second carrying box of the present invention; Figure 7 A front view of the ratchet and its surrounding structures in working order of the present invention; Figure 8 This is a schematic diagram of the coordination between the hydraulic cylinder and the center turntable structure of the present invention; Figure 9 This is a schematic diagram of the internal structure of the circulation component of the present invention; Figure 10 This is a schematic diagram of the disassembly of the power assembly structure of the present invention.

[0015] In the figure: 1. Single crystal furnace assembly; 2. Chassis; 3. Steering wheel; 4. Support shaft; 5. Power assembly; 51. Motor; 52. Carrying plate; 53. Gear; 54. Support cage; 55. Bracket; 56. Guide groove; 6. Circulation assembly; 61. First circulation disk; 62. Second circulation disk; 63. Transfer disk; 64. First chamber; 65. Second chamber; 66. Infusion tube; 67. One-way valve; 7. Cooling assembly; 71. Cooling box; 711. Baffle; 72. Positioning mechanism; 721. Hydraulic cylinder; 722. Double-headed metal tube; 723. Ratchet; 724. Carrying box one; 725. Metal tube one; 726. Bevel gear plate one; 727. Carrying box two; 728. Metal tube two; 729. Bevel gear plate two; 8. Support plate. DETAILED DESCRIPTION

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] like Figures 1 to 10 As shown, the present invention provides a single crystal furnace chassis rapid cooling device, comprising a single crystal furnace assembly 1 and a chassis 2 installed inside the single crystal furnace assembly 1 through a support shaft 4, and further comprising; Rotate the steering wheel 3 mounted on the bottom of the chassis 2; A support plate 8 fixedly mounted inside the single crystal furnace assembly 1; A flow assembly 6 mounted on top of a support plate 8; Two sets of cooling components 7 are symmetrically arranged on top of the circulation component 6; The cooling assembly 7 includes a cooling box 71, and a displacement mechanism 72 is provided on both sides of the cooling box 71; The displacement mechanism 72 includes a hydraulic cylinder 721 connected to the circulation assembly 6. The top of the hydraulic cylinder 721 is connected to the cooling box 71 via a double-ended metal tube 722. A ratchet 723 is fixedly installed on the outer periphery of the double-ended metal tube 722. A carrier box 1 724 is movably mounted on the double-ended metal tube 722. The top of the hydraulic cylinder 721 is connected to the carrier box 1 724 via a metal tube 1 725. The top of the hydraulic cylinder 721 is fixedly connected to the carrier box 1 724. A bevel gear plate 1 726 is movably engaged with the interior of the carrier box 1 724. The fixed end of the hydraulic cylinder 721 is fixedly mounted with a second carrier box 727, which is connected to the circulation assembly 6 via a second metal tube 728. A second beveled tooth plate 729 is movably engaged inside the second carrier box 727. The beveled tooth plate 729 and the beveled tooth plate 1 726 have teeth with an inclination direction opposite to that of the tooth plate 729. The circulation component 6 is used to inject cooling medium into the hydraulic cylinder 721 and the metal pipe 2 728 on one side; The power assembly 5 is arranged inside the single crystal furnace assembly 1, and is used to drive the telescopic end of the hydraulic cylinder 721 to move up and down and rotate.

[0018] Adopt the above solution: when chassis 2 needs to be cooled; Continuously inject cooling medium into the hydraulic cylinder 721 on one side and the interior of the second metal tube 728 through the circulation component 6; However, it should be noted that in the existing solution, the mainstream cooling medium used in the single crystal furnace assembly 1 is usually: deionized water, silicone oil, mineral oil, helium and nitrogen, but the cooling medium inside the circulation assembly 6 can be liquid or gas, which is not limited. The specific situation needs to select a suitable cooling medium according to the actual application situation. The cooling medium mentioned above is for reference only and is not limited to the various cooling media mentioned above. The cooling medium enters the interior of the second carrier box 727 through the second metal tube 728, and pushes the second bevel gear plate 729 against the inner wall of the second carrier box 727. The cooling medium also enters the interior of the first carrier box 724 through the hydraulic cylinder 721 and the first metal tube 725, thereby pushing the first bevel gear plate 726 to engage with the ratchet 723. Due to the restriction of the circulation component 6, the cooling medium does not flow too smoothly, so the cooling medium will preferentially enter the interior of the carrier box 1 724 and the carrier box 2 727, thereby forcing the bevel plate 2 729 and the bevel plate 1 726 to reach the working position; A crucible is placed above the chassis 2. The heat from the crucible is transferred to the steering wheel 3 through the chassis 2. The cooling box 71 is located at the bottom of the steering wheel 3. The cooling medium eventually enters the cooling box 71 through the double-ended metal pipe 722, then flows back to the circulation component 6 through the other side hydraulic cylinder 721 and the second metal pipe 728, and is finally discharged to the outside through the circulation component 6. After the cooling medium enters the cooling box 71, its overall temperature drops and it can remove the heat from the steering wheel 3. It should be noted that the top of the cooling box 71 is close to the bottom of the steering wheel 3, so the temperature of the top of the cooling box 71 is higher than the temperature of the bottom. The power assembly 5 drives each cooling assembly 7 to rotate, and the telescopic end of the hydraulic cylinder 721 can move up and down at this time; like Figure 7 As shown in , when the telescopic end of the hydraulic cylinder 721 drives the structure above it to descend, since the second bevel plate 729 is installed on the fixed end of the hydraulic cylinder 721, the ratchet 723 gradually engages with the second bevel plate 729 and rotates. The inclination of the teeth of the second bevel plate 729 and the first bevel plate 726 are opposite, which causes the ratchet 723 to simultaneously push the first bevel plate 726 to move without getting stuck. The ratchet 723 eventually drives the cooling box 71 to flip through the double-ended metal tube 722, so that the top of the cooling box 71 with a higher temperature faces downward and the bottom with a lower temperature faces upward. When the cooling box 71 flips 180 degrees, the power assembly 5 drives the telescopic end of the hydraulic cylinder 721 to rise. The bevel plate 1 726 then blocks the ratchet 723, preventing it from rotating in the opposite direction through the bevel plate 2 729. Instead, the ratchet 723 and the inclined surface of the teeth of the bevel plate 2 729 push the bevel plate 2 729 to move. Finally, the side of the cooling box 71 with a lower temperature is in close contact with the bottom of the steering wheel 3, thereby cooling the chassis 2 again. Since the cooling medium is always flowing inside the cooling box 71, the heat originally absorbed by the cooling box 71 when it is in close contact with the bottom of the steering wheel 3 can be quickly reduced by the flowing cooling medium. During the continuous operation, each time the cooling box 71 is in contact with the steering wheel 3, the temperature of the contact surface of the cooling box 71 can be reduced again, thereby shortening the cooling time as much as possible and improving the cooling efficiency of the chassis 2. The steering wheel 3 is rotatably installed at the bottom of the chassis 2, so when the power component 5 drives the cooling component 7 to rotate and makes the cooling box 71 fit against the bottom of the steering wheel 3, it will not rub against the chassis 2, thereby causing loss. At the same time, it also increases the smoothness of the operation of the device. The rotation of the cooling box 71 can also fit more comprehensively at different positions on the bottom of the steering wheel 3, thereby further improving the cooling effect of the device.

[0019] like Figures 1-10 As shown, the cooling box 71 is initially attached to the bottom of the steering wheel 3, and the interior of the cooling box 71 is divided into two independent chambers. The two ends of one side of the double-headed metal tube 722 are respectively connected to the two chambers. The cooling assembly 7 also includes a spoiler 711 equidistantly installed in the two chambers inside the cooling box 71. The end of the spoiler 711 faces the air inlet end of the cooling box 71 and a slot is opened in the middle.

[0020] With the above solution, the cooling medium can pass through the two chambers inside the cooling box 71 respectively. Therefore, when the top of the cooling box 71 is in close contact with the bottom of the steering wheel 3, since the two chambers exist independently, the heat transferred from the steering wheel 3 to the upper chamber through the top of the cooling box 71 will not affect the lower chamber too much. This allows the cooling medium flowing in the lower chamber to quickly remove the heat therefrom. As a result, when the bottom of the cooling box 71 is turned upward and in contact with the bottom of the steering wheel 3, the temperature difference between the two is widened, and the heat on the steering wheel 3 is better removed, further improving the cooling efficiency of the device. When the cooling medium passes through the cooling box 71, it will also impact the baffle 711. After being blocked by the baffle 711, the time the cooling medium stays in the baffle 711 can be increased, thereby more completely absorbing the heat on the steering wheel 3 and avoiding the waste of the cooling medium. The slots on the baffle 711 can prevent the cooling medium from being continuously retained, and eventually it will escape from the baffle 711 and the cooling box 71 through the slots.

[0021] like Figures 1-9 As shown, the circulation component 6 includes a first circulation plate 61 and a second circulation plate 62 fixed on the top of the support plate 8. The first circulation plate 61 is used to inject cooling medium, and the second circulation plate 62 is used to output cooling medium. The tops of the first circulation plate 61 and the second circulation plate 62 are jointly and movably mounted with a turntable 63. The interior of the turntable 63 is divided into a first chamber 64 and a second chamber 65. The first chamber 64 and the second chamber 65 are connected to the first circulation plate 61 and the second circulation plate 62 respectively. The hydraulic cylinder 721 and the metal tube 728 on one side are connected to the first chamber 64, and the hydraulic cylinder 721 and the metal tube 728 on the other side are connected to the second chamber 65.

[0022] The injection pipes 66 are located outside the single crystal furnace assembly 1 . The ends of the two injection pipes 66 face oppositely and are both provided with thread grooves.

[0023] The circulation assembly 6 further includes an infusion pipe 66 installed on the first circulation disk 61 and the second circulation disk 62 . A one-way valve 67 is installed inside the infusion pipe 66 for outputting the cooling medium.

[0024] Adopting the above solution: the upper end infusion tube 66 is connected to the pipe for infusing the cooling medium through a thread, and the lower end infusion tube 66 is connected to the container for placing the cooling medium through a pipe; The cooling medium enters the first circulation disk 61 through the upper end infusion pipe 66, and finally enters the hydraulic cylinder 721 on one side through the first chamber 64 inside the turntable 63. At this time, the cooling work of the cooling assembly 7 begins. After the cooling medium flows back to the second chamber 65 and the second circulation disk 62 through the other side hydraulic cylinder 721, the cooling medium is finally discharged through the lower end infusion pipe 66. Due to the restriction of the one-way valve 67, the cooling medium does not flow and discharge too smoothly. Instead, it will preferentially enter the interior of the carrier box 1 724 and the carrier box 2 727, thereby forcing the bevel gear plate 2 729 and the bevel gear plate 1 726 to reach the working position. This can prevent the ratchet 723 from getting stuck when passing through the bevel gear plate 2 729 and the bevel gear plate 1 726. The cooling medium is divided into two parts after being diverted by the first circulation disk 61 and the second circulation disk 62 and the first chamber 64 and the second chamber 65, so that the cooling medium can flow in an orderly manner without confusion.

[0025] like Figures 1-10 As shown, the power assembly 5 includes two gears 53 that mesh with each other and a motor 51 that is fixed to the bottom of the single crystal furnace assembly 1. The support shaft 4 and the outer periphery of the motor 51 are movably connected with a bearing plate 52. One gear 53 is transmission-mounted on the output shaft of the motor 51, and the other gear 53 is movably sleeved on the support shaft 4. The top of the gear 53 is movably connected with a bracket 55 through a support cage 54. A guide groove 56 is opened on the outer periphery of the support shaft 4, and the bracket 55 is movably connected to the guide groove 56.

[0026] The guide groove 56 is connected end to end and is wavy in shape. The end of the bracket 55 is fixedly connected to the telescopic end of the hydraulic cylinder 721.

[0027] The bracket 55 is movably sleeved on the outer periphery of the support shaft 4 , and the bracket 55 moves vertically inside the support cage 54 .

[0028] Using the above solution: the output shaft of the motor 51 drives the two gears 53 to rotate, and one of the gears 53 drives the support cage 54 and the bracket 55 on it to rotate. Since the bracket 55 is also movable inside the guide groove 56, the bracket 55 also moves up and down according to the trajectory of the guide groove 56 during the rotation process; At this time, the bracket 55 can drive the telescopic ends of each hydraulic cylinder 721 to move up and down, and rotate thereby, thereby realizing the working process of the cooling component 7 and rotating during the lifting process, thereby increasing the area of ​​the cooling box 71 contacting the steering wheel 3, and further improving the cooling efficiency of the device.

[0029] The working principle and use process of the present invention: The upper end infusion tube 66 is connected to the pipe for infusing the cooling medium through a thread, and the lower end infusion tube 66 is connected to the container for placing the cooling medium through a pipe; The cooling medium enters the first circulation disk 61 through the upper end infusion pipe 66, and finally enters the hydraulic cylinder 721 on one side through the first chamber 64 inside the transfer disk 63. At this time, the cooling work of the cooling assembly 7 begins. After the cooling medium flows back to the second chamber 65 and the second circulation disk 62 through the other side hydraulic cylinder 721, the cooling medium is finally discharged through the lower end infusion pipe 66. Due to the restriction of the one-way valve 67, the cooling medium does not flow and discharge too smoothly. Instead, it will preferentially enter the interior of the carrier box 1 724 and the carrier box 2 727, thereby forcing the bevel gear plate 2 729 and the bevel gear plate 1 726 to reach the working position. After the cooling medium enters the cooling box 71, its overall temperature drops and it can take away the heat from the steering wheel 3; The output shaft of the motor 51 drives the two gears 53 to rotate. One of the gears 53 drives the support cage 54 and the bracket 55 on it to rotate. Since the bracket 55 is also movable inside the guide groove 56, the bracket 55 also moves up and down according to the trajectory of the guide groove 56 during the rotation process. When the telescopic end of the hydraulic cylinder 721 drives the structure above it to descend, since the second bevel plate 729 is installed on the fixed end of the hydraulic cylinder 721, the ratchet 723 gradually engages with the second bevel plate 729 and rotates. The inclination of the teeth of the second bevel plate 729 and the first bevel plate 726 are opposite, which allows the ratchet 723 to push the first bevel plate 726 to move at the same time without getting stuck. The ratchet 723 eventually drives the cooling box 71 to flip through the double-ended metal tube 722, so that the top of the cooling box 71 with a higher temperature faces downward and the bottom with a lower temperature faces upward. When the cooling box 71 flips 180 degrees, the power assembly 5 drives the telescopic end of the hydraulic cylinder 721 to rise. The bevel plate 1 726 then blocks the ratchet 723, preventing it from rotating in the opposite direction through the bevel plate 2 729. Instead, the ratchet 723 and the inclined surface of the teeth of the bevel plate 2 729 push the bevel plate 2 729 to move. Finally, the side of the cooling box 71 with a lower temperature is brought into close contact with the bottom of the steering wheel 3 , thereby further cooling the steering wheel 3 .

[0030] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0031] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace chassis rapid cooling device, comprising a single crystal furnace assembly (1) and a chassis (2) mounted inside the single crystal furnace assembly (1) via a support shaft (4), characterized in that: Also includes; Rotating a steering wheel (3) mounted on the bottom of the chassis (2); A support plate (8) fixedly mounted inside the single crystal furnace assembly (1); A flow assembly (6) mounted on top of a support plate (8); Two sets of cooling components (7) symmetrically arranged on top of the circulation component (6); The cooling assembly (7) comprises a cooling box (71), and displacement mechanisms (72) are provided on both sides of the cooling box (71); The displacement mechanism (72) includes a hydraulic cylinder (721) connected to the circulation component (6); the top of the hydraulic cylinder (721) is connected to the cooling box (71) through a double-headed metal tube (722); a ratchet (723) is fixedly installed on the outer periphery of the double-headed metal tube (722); a carrier box (724) is movably installed on the double-headed metal tube (722); the top of the hydraulic cylinder (721) is connected to the carrier box (724) through a metal tube (725); the top of the hydraulic cylinder (721) is fixedly connected to the carrier box (724); and a bevel tooth plate (726) is movably connected inside the carrier box (724); The fixed end of the hydraulic cylinder (721) is fixedly provided with a second carrier box (727), the second carrier box (727) is connected to the circulation component (6) through a second metal tube (728), and the second carrier box (727) is movably connected to a second beveled tooth plate (729) inside, and the beveled tooth plate (729) and the beveled tooth plate (726) have teeth with an inclination direction opposite to each other; The circulation component (6) is used to inject cooling medium into the hydraulic cylinder (721) and the second metal pipe (728) on one side; A power assembly (5) is arranged inside the single crystal furnace assembly (1), and the power assembly (5) is used to drive the telescopic end of the hydraulic cylinder (721) to move up and down and rotate.

2. The single crystal furnace chassis rapid cooling device according to claim 1, characterized in that: In an initial state, the cooling box (71) is tightly attached to the bottom of the steering wheel (3), and the interior of the cooling box (71) is divided into two independent chambers. The two ends of one side of the double-headed metal tube (722) are respectively connected to the two chambers. The cooling assembly (7) also includes a baffle (711) equidistantly installed in the two chambers inside the cooling box (71), and the end of the baffle (711) faces the air inlet end of the cooling box (71) and a notch is opened in the middle.

3. The single crystal furnace chassis rapid cooling device according to claim 2, characterized in that: The circulation component (6) includes a first circulation plate (61) and a second circulation plate (62) fixed on the top of the support plate (8), the first circulation plate (61) is used for injecting cooling medium, and the second circulation plate (62) is used for outputting cooling medium. The tops of the first circulation plate (61) and the second circulation plate (62) are movably mounted with a central turntable (63), the interior of the central turntable (63) is divided into a first chamber (64) and a second chamber (65), the first chamber (64) and the second chamber (65) are respectively connected to the first circulation plate (61) and the second circulation plate (62), the hydraulic cylinder (721) and the second metal pipe (728) on one side are connected to the first chamber (64), and the hydraulic cylinder (721) and the second metal pipe (728) on the other side are connected to the second chamber (65).

4. The single crystal furnace chassis rapid cooling device according to claim 3, characterized in that: The circulation assembly (6) further comprises an infusion pipe (66) mounted on the first circulation disk (61) and the second circulation disk (62), wherein a one-way valve (67) is installed inside the infusion pipe (66) for outputting the cooling medium.

5. The rapid cooling device for the single crystal furnace chassis according to claim 4, characterized in that: The injection pipes (66) are located outside the single crystal furnace assembly (1), and the ends of the two injection pipes (66) face oppositely and are both provided with thread grooves.

6. The rapid cooling device for the single crystal furnace chassis according to claim 5, characterized in that: The power assembly (5) includes two mutually meshing gears (53) and a motor (51) fixed to the bottom of the single crystal furnace assembly (1); the outer periphery of the support shaft (4) and the motor (51) is movably connected to a carrier plate (52); one of the gears (53) is transmission-mounted on the output shaft of the motor (51); the other gear (53) is movably sleeved on the support shaft (4); the top of the gear (53) is movably connected to a bracket (55) through a support cage (54); a guide groove (56) is provided on the outer periphery of the support shaft (4); and the bracket (55) is movably connected to the guide groove (56).

7. The rapid cooling device for the single crystal furnace chassis according to claim 6, characterized in that: The guide groove (56) is connected end to end and is wavy, and the end of the bracket (55) is fixedly connected to the telescopic end of the hydraulic cylinder (721).

8. The rapid cooling device for the single crystal furnace chassis according to claim 7, characterized in that: The bracket (55) is movably sleeved on the outer periphery of the support shaft (4), and the bracket (55) is vertically movable inside the support cage (54).

Images