Silicon carbide crystal growth equipment and growth method thereof

Abstract

The invention discloses silicon carbide crystal growth equipment and a growth method thereof, and belongs to the field of silicon carbide crystal growth, the silicon carbide crystal growth equipment comprises a case, a conveying component, a lower furnace body and an air-entrapping box are arranged in the case, and the conveying component is composed of a rack and a first pushing module connected to the rack. According to the silicon carbide crystal growth equipment and the growth method thereof, through the arranged communication component, when the air pressure in the upper furnace body is increased, the driving component can be triggered to rotate to act on the heating component, so that the heating ring part is separated from heating of the upper furnace body, the temperature in the upper furnace body is reduced, and the temperature in the upper furnace body is reduced according to the principle of thermal expansion and cold contraction; after the temperature in the upper furnace body is reduced, the expansion speed of gas in the upper furnace body can be reduced, and when the air pressure is balanced for the first time, the air inlet amount in the pressure stabilizing pipe can be rapidly adjusted through the air pressure balancing component while the driving component rotates, so that the air inlet amount in the pressure stabilizing pipe is reduced.

Description

Technical Field

[0001] The present invention belongs to the field of silicon carbide crystal growth, and in particular relates to a silicon carbide crystal growth device and a growth method thereof. Background Art

[0002] Most semiconductor integrated circuit crystals are grown using the physical vapor transport (PVT) method. The basic crystal growth principle is to place the raw material at the bottom of a graphite crucible and heat the crucible using the skin effect through an induction coil. When the temperature reaches a certain level, the raw material decomposes into gas and evaporates into the seed crystal area at the top of the crucible. After a series of chemical reactions, SiC is generated and crystallizes on the seed crystal surface through a certain axial and radial temperature gradient to obtain single-crystal silicon carbide with a certain structure. When silicon carbide crystals grow in a growth furnace, it is often necessary to introduce a certain air pressure into the growth furnace and apply a certain temperature externally to promote the growth of the silicon carbide crystals. However, when air pressure and heat are introduced into the growth furnace, the air pressure often rises at a certain point in the growth of the silicon carbide crystals, affecting the normal growth of the silicon carbide crystals. How to balance the air pressure in the growth furnace has become a technical problem that needs to be solved urgently.

[0003] The present invention seeks to alleviate or at least mitigate such problems or deficiencies by providing new or otherwise improved methods for growing silicon carbide crystals. Summary of the Invention

[0004] In response to one or more of the above-mentioned defects or improvement needs in the prior art, the present invention provides a silicon carbide crystal growth device and a growth method thereof, which have the advantage of being able to maintain the gas pressure balance in the growth furnace.

[0005] To achieve the above-mentioned object, the present invention provides a silicon carbide crystal growth apparatus, comprising a chassis, a conveying member, a lower furnace body, and a gas filling box disposed within the chassis, the conveying member comprising a frame, a first push module connected to the frame, a second push module connected to the first push module, an upper furnace body disposed on the second push module, a voltage regulator tube disposed on the gas filling box, a hose disposed at one end of the voltage regulator tube capable of being inserted into the upper furnace body, and further comprising: a heating member disposed on the upper furnace body; A driving member is provided on the chassis, the driving member comprising a base provided on the chassis, a rotating drum provided on the base, a gear disc and a driving ring provided on the rotating drum, and a first protruding section and a second protruding section provided on the driving ring; a connecting member, which is provided on the lower furnace body; A gas pressure balancing component is provided on the driving component, and the gas pressure balancing component comprises: A machine frame is provided on the driving member, a push plate is slidably provided in the machine frame, a rack section is provided at one end of the push plate, a roller and an embedded rod are provided on the push plate, and a second spring is provided on the embedded rod; A follower rod is arranged in the machine frame and has a balancing piece on the follower rod; The air-deflating component is arranged on the machine frame and can be driven when the push plate moves.

[0006] As a further improvement of the present invention, the connecting member includes: a connecting pipe disposed on the lower furnace body, wherein the connecting pipe and the lower furnace body are in communication with each other; An inner block is slidably disposed in the communicating tube, and a push rod capable of passing through the communicating tube is provided on the inner block; a first spring sleeved on the push rod and located between the inner block and the connecting pipe; The tooth plate is arranged at one end of the push rod. When in the initial position, the tooth plate and the tooth disc are meshed with each other.

[0007] As a further improvement of the present invention, the heating component comprises: A support rod is arranged on the chassis, a slide rod is slidably sleeved on the support rod, a heating ring is provided on the slide rod, and the heating ring can be sleeved on the upper furnace body; The screw barrel is arranged on the heating ring The screw rod is arranged on the rotating drum and can be rotated and inserted into the screw rod barrel.

[0008] As a further improvement of the present invention, an annular sealing gasket is provided at the bottom of the upper furnace body. When the upper furnace body and the lower furnace body are closed, the annular sealing gasket can penetrate into the lower furnace body. A pressure relief valve is also detachably installed on the upper furnace body. A baffle is provided on the main body of the pressure relief valve, and a tension spring is provided on the baffle. The tension spring is connected to the handle end of the pressure relief valve.

[0009] As a further improvement of the present invention, in the initial position, the smooth section of the drive ring and the roller are in conflict with each other, and the caliber of the second raised section is larger than the caliber of the first raised section.

[0010] As a further improvement of the present invention, the balancing member includes: A sleeve is arranged on the machine frame, and a balance bar is slidably arranged in the sleeve; a third spring, which is sleeved on the balance bar; an incomplete column wheel slidably disposed in the sleeve and connected to the balance bar; A gear is disposed on the follower rod, the gear being capable of meshing with the rack segment of the push plate, and a driving rod is provided on the gear; The pressure control plate is arranged on the balance bar.

[0011] As a further improvement of the present invention, the incomplete column wheel has a first flat groove, a transition groove and a second flat groove, and the first flat groove is located above the second flat groove. In the initial position, the driving rod and the first flat groove are in contact with each other. When the gear rotates, the driving rod can be driven to pass through the first flat groove, the transition groove and the second flat groove in sequence.

[0012] As a further improvement of the present invention, the pressure control plate can pass through the voltage-stabilizing tube. A first through hole and a second through hole are provided in the pressure control plate. The diameter of the first through hole is larger than the diameter of the second through hole. When the first through hole is converted to the second through hole, the airflow passing through the voltage-stabilizing tube can be reduced.

[0013] As a further improvement of the present invention, the deflation component comprises: A base plate, which is arranged on the frame; a swing rod rotatably mounted on the base plate, wherein a fourth spring is mounted on the swing rod and connected to the base plate; A boss is disposed on the rocker arm, with a stepped surface formed between the boss and the rocker arm; The runner is rotatably arranged on the base plate, and is connected to a tail support and a lower support. In the initial position, the tail support is in contact with the stepped surface, and the lower support is located on one side of the push plate; The linkage rod is rotatably arranged on the base plate. A pressure rod is rotatably arranged on the linkage rod. When in the initial position, the pressure rod is located above the handle end of the pressure relief valve.

[0014] Another technical problem to be solved by the present invention is a growth method of a silicon carbide crystal growth device. S1. Loading the silicon carbide crystal: placing the silicon carbide crystal in the lower furnace body, and opening the conveying member to close the upper furnace body and the lower furnace body; S2. Heating and pressurizing the lower furnace body and the upper furnace body: heating the upper furnace body by turning on the heating component and gasifying and pressurizing the upper furnace body by turning on the gas box; S3. Triggering the driving component: After the furnace body is heated and pressurized, the air pressure increases sharply, which can push the connecting component to move left, thereby driving the gear plate and the driving ring to rotate; S4. Triggering the air pressure balancing member: When the driving ring rotates, it drives the first protrusion to rotate. When the first protrusion abuts against the air pressure balancing member, the air pressure balancing member acts on the pressure regulator tube to complete the air pressure balancing control operation of the pressure regulator tube; S5. Triggering the degassing member: When the air pressure balancing member is pushed back, the degassing member can be triggered to operate, and can act on the pressure relief valve, so that the pressure relief valve relieves pressure in the entire upper furnace body to balance the air pressure; S6. Pushing operation of the entire heating component: after the rotating drum rotates, the heating component can be pushed upward, so that the heating component is separated upward from the upper furnace body, thereby reducing the heating operation of the upper furnace body.

[0015] In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art: The silicon carbide crystal growth equipment and the growth method thereof of the present invention can trigger the driving component to rotate to act on the heating component when the air pressure in the upper furnace body is increased, so as to make the heating ring part stop heating the upper furnace body and reduce the temperature of the upper furnace body. According to the principle of thermal expansion and contraction, when the temperature in the upper furnace body is reduced, the expansion speed of the gas in the upper furnace body can be slowed down. When balancing the air pressure for the first time, when the driving component rotates, the air intake volume in the pressure-stabilizing tube can be quickly adjusted by the air pressure balancing component to reduce the air intake volume in the pressure-stabilizing tube and achieve the balance of the air pressure in the upper furnace body. If the first pressure balancing operation fails, the second pressure balancing operation can be automatically started. The second pressure balancing operation can be achieved on the basis of the first pressure balancing operation to quickly open the pressure relief valve to complete the pressure reduction balance. The pressure stabilization of the upper and lower furnace bodies can be kept at a constant value at all times, which is beneficial to the growth operation of silicon carbide crystals. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Schematic diagram of the overall structure of the silicon carbide crystal growth equipment of the present invention; Figure 2 This is a schematic structural diagram of the silicon carbide crystal growth apparatus according to the present invention viewed from another angle; Figure 3 This is a schematic structural diagram of the present invention when the lower furnace body and the heating component are combined; Figure 4 It is a structural schematic diagram of the connecting component of the present invention; Figure 5 This is a schematic structural diagram of the present invention when the driving component and the air pressure balance component conflict with each other; Figure 6 It is a schematic structural diagram of the entire driving component of the present invention; Figure 7 It is a schematic structural diagram of the air pressure balancing component and the air-deflation component of the present invention when combined; Figure 8 FIG1 is a structural diagram of the combination of the air pressure balancing component and the air-deflating component according to the present invention from another perspective; Figure 9 It is a schematic structural diagram of the present invention when the air pressure balancing component and the air releasing component are separated from each other; Figure 10 It is a schematic structural diagram of the overall balancing member of the present invention.

[0017] In all the drawings, the same reference numerals represent the same technical features, specifically: 1. Chassis; 2. Conveying member; 21. Frame; 22. First pushing module; 23. Second pushing module; 3. Lower furnace body; 31. Upper furnace body; 32. Pressure relief valve; 4. Heating element; 41. Support rod; 42. Sliding rod; 43. Heating ring; 44. Screw cylinder; 45. Screw; 5. Gas tank; 51. Pressure regulator; 52. Hose; 6. Driving member; 61. Base; 62. Rotating drum; 63. Toothed disc; 64. Driving ring; 65. First raised section; 66. Second raised section; 7. Connecting member; 71. Connecting pipe; 72. Inset block; 73. Push rod; 74. First spring; 75. Tooth plate; 8. Air pressure balance member; 81. Frame; 82. Push plate; 83. Roller; 84. Embedded rod; 85. Second spring; 86. Follower rod; 87. Balance piece; 871. Sleeve; 872. Balance rod; 873. Third spring; 874. Incomplete column wheel; 875. Gear; 876. Drive rod; 877. Pressure control plate; 9. Deflating component; 91. Base plate; 92. Rocker arm; 93. Fourth spring; 94. Boss; 95. Rotor; 96. Tail support; 97. Lower support; 98. Linkage rod; 99. Pressure rod. DETAILED DESCRIPTION

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "comprise", "include", etc. used herein indicate the presence of the features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0020] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0021] In the embodiment, Figure 1-10 A silicon carbide crystal growth device is provided, comprising a chassis 1, in which a conveying member 2, a lower furnace body 3 and a gas filling box 5 are arranged, the conveying member 2 is composed of a frame 21, a first pushing module 22 connected to the frame 21, and a second pushing module 23 connected to the first pushing module 22. An upper furnace body 31 is provided on the second pushing module 23, a voltage-stabilizing tube 51 is provided on the gas filling box 5, and a hose 52 capable of penetrating into the upper furnace body 31 is provided at one end of the voltage-stabilizing tube 51. The device also includes: a heating member 4, which is provided on the upper furnace body 31; a driving member 6, which is provided on the chassis 1, and the driving member 6 includes a base 61 provided on the chassis 1, and a rotating drum 62 is provided on the base 61. A gear disc 63 and a drive ring 64 are provided on the rotating drum 62, and a first protrusion section 65 and a second protrusion section 66 are provided on the drive ring 64; a connecting member 7 is provided on the lower furnace body 3; an air pressure balance member 8 is provided on the drive member 6, and the air pressure balance member 8 includes: a machine frame 81, which is provided on the drive member 6, and a push plate 82 is slidingly provided in the machine frame 81, and a rack section is provided at one end of the push plate 82, a roller 83 and an embedded rod 84 are provided on the push plate 82, and a second spring 85 is provided on the embedded rod 84; a follower rod 86 is provided in the machine frame 81, and a balance member 87 is provided on the follower rod 86; a degassing member 9 is provided on the machine frame 81, which can be driven when the push plate 82 moves.

[0022] The present invention is based on an overall idea that, through the arrangement of the connecting member 7, since the connecting pipe 71 is connected to the lower furnace body 3 at the initial stage, when the air pressure in the lower furnace body 3 increases, the embedded block 72 can be pushed to the left, and when the embedded block 72 moves to the left, the push rod 73 can be driven to the left, and the tooth plate 75 can be moved to the left, and when the tooth plate 75 moves to the left, the rotating drum 62 and the toothed disc 63 can be driven to rotate, and then the screw rod 45 can be driven to rotate, and when the screw rod 45 rotates, the screw rod barrel 44 can be driven to rotate and move upward in the screw rod 45, and then the heating ring 43 can be driven to move upward, so that the heating ring 43 is partially separated from the heating of the upper furnace body 31, so as to reduce the temperature in the upper furnace body 31, according to the principle of thermal expansion and contraction. In principle, when the temperature in the upper furnace body 31 is reduced, the expansion speed of the gas in the upper furnace body 31 can be slowed down so that the gas pressure in the upper furnace body 31 is in a balanced state. Through the arranged gas pressure balance component 8, when the driving ring 64 rotates, the first protrusion section 65 can be driven to rotate. When the first protrusion section 65 contacts the roller 83 so that the roller 83 moves backward quickly, when the roller 83 moves backward, it can push the rack section of the push plate 82 to pull the gear 875 to rotate. In the initial position, it is the first through hole of the pressure control plate 877 that is ventilated. As the driving rod 876 rotates, it can pass along the first smooth groove and the transition groove. When the driving rod 876 passes along the second smooth groove, it can By pushing the pressure control plate 877 upward, part of the first through hole can be blocked to reduce the gas injected into the upper furnace body 31 by the voltage-stabilizing tube 51 to maintain the gas balance in the upper furnace body 31. If the pressure balance in the upper furnace body 31 cannot be maintained, the driving ring 64 will continue to rotate so that the second protruding section 66 continues to touch the roller 83 to accelerate the movement of the gear 875, so that the driving rod 876 can move to the second flat groove, so that the incomplete column wheel 874 continues to move upward, and the first through hole is completely converted to the second through hole, so as to reduce the gas injected into the upper furnace body 31 again. In addition, when the push plate 82 is retreated as a whole, it can also push the degassing member 9 to move as a whole, through The arranged air-deflation component 9 can quickly push the lower support 97 to move to the right when the push plate 82 is retreated as a whole to push the air-deflation component 9 to move. After the lower support 97 moves to the right, the rotary wheel 95 can be flipped. After the rotary wheel 95 is flipped, the tail support 96 can be pushed to press the stepped surface to flip the rocker arm 92. After the rocker arm 92 is flipped, the linkage rod 98 can be pushed and pulled to flip to the right, so that the pressure rod 99 presses the handle end of the pressure relief valve 32 and the pressure relief valve 32 releases gas to reduce the air pressure in the upper furnace body 31, so as to achieve air pressure balance in the upper furnace body 31. After the air pressure is balanced, the connecting component 7, the air pressure balance component 8, and the air-deflation component 9 can be restored to their initial positions as a whole.

[0023] Next, the connecting member 7 is given a more specific structure and construction as a whole for further explanation. The connecting member 7 includes: a connecting pipe 71, which is arranged on the lower furnace body 3, and the connecting pipe 71 and the lower furnace body 3 are connected to each other; an embedded block 72, which is slidably arranged in the connecting pipe 71, and a push rod 73 that can pass through the connecting pipe 71 is provided on the embedded block 72; a first spring 74, which is sleeved on the push rod 73, and the first spring 74 is located between the embedded block 72 and the connecting pipe 71; a tooth plate 75, which is arranged at one end of the push rod 73. In the initial position, the tooth plate 75 and the tooth disc 63 are engaged with each other; Then, the overall usage principle and specific effects of the connecting component 7 are further explained. Since the connecting pipe 71 is connected to the lower furnace body 3 at the initial stage, after the air pressure in the lower furnace body 3 increases, it can push the embedded block 72 to move left. After the embedded block 72 moves left, it can drive the push rod 73 to move left, which can make the tooth plate 75 move left. After the tooth plate 75 moves left, it can drive the rotating drum 62 and the toothed disc 63 to rotate, and then drive the screw rod 45 to rotate. After the screw rod 45 rotates, it can drive the screw rod barrel 44 to rotate and move upward in the screw rod 45, and then drive the heating ring 43 to move upward, so that the heating ring 43 is partially separated from the heating of the upper furnace body 31, so as to reduce the temperature in the upper furnace body 31. According to the principle of thermal expansion and contraction, when the temperature in the upper furnace body 31 is reduced, the expansion rate of the gas in the upper furnace body 31 can be slowed down, so that the air pressure in the upper furnace body 31 is in a balanced state.

[0024] Next, the heating component 4 is given a more specific structure and construction as a whole for further explanation. The heating component 4 includes: a support rod 41, which is arranged on the chassis 1, a slide rod 42 is slidably sleeved on the support rod 41, a heating ring 43 is provided on the slide rod 42, and the heating ring 43 can be sleeved on the upper furnace body 31; a screw barrel 44, which is arranged on the heating ring 43; a screw rod 45, which is arranged on the rotating drum 62, and the screw rod 45 can be rotatably inserted into the screw barrel 44; Next, the overall usage principle and effect of the heating component 4 are further explained. When the rotating drum 62 rotates, it can drive the screw 45 to rotate, so that the screw drum 44 and the heating ring 43 move upward as a whole, and the heating ring 43 can be partially separated from the upper furnace body 31 so that the temperature in the upper furnace body 31 can drop within a unit time, which can reduce the expansion efficiency of the gas in the upper furnace body 31 and make the gas pressure in the upper furnace body 31 in a balanced state.

[0025] In some embodiments, in order to further improve the sealing effect between the upper furnace body 31 and the lower furnace body 3, an annular sealing gasket is provided at the bottom of the upper furnace body 31. When the upper furnace body 31 and the lower furnace body 3 are closed, the annular sealing gasket can penetrate into the lower furnace body 3. A pressure relief valve 32 is also detachably installed on the upper furnace body 31. A baffle is provided on the main body of the pressure relief valve 32, and a tension spring is provided on the baffle. The tension spring and the handle end of the pressure relief valve 32 are connected to each other.

[0026] In some embodiments, more specifically, in order to enable the roller 83 to be displaced when the first protruding section 65 contacts the roller 83, the smooth section of the drive ring 64 and the roller 83 are in contact with each other in the initial position, and the diameter of the second protruding section 66 is larger than the diameter of the first protruding section 65. Next, the structure and construction of the air pressure balance member 8 will be further explained in more detail. The balance member 87 includes: a sleeve 871 disposed on the frame 81, with a balance rod 872 slidably disposed within the sleeve 871; a third spring 873 sleeved on the balance rod 872; an incomplete column wheel 874 slidably disposed within the sleeve 871 and connected to the balance rod 872; a gear 875 disposed on the follower rod 86, capable of meshing with the rack segment of the push plate 82, and having a drive rod 876 disposed on the gear 875; and a pressure control plate 877 disposed on the balance rod 872. It should be noted that when the drive ring 64 rotates, it can drive the first protruding section 65 to rotate. When the first protruding section 65 contacts the roller 83 to make the roller 83 move backward quickly, when the roller 83 moves backward, it can push the rack section of the push plate 82 to pull the gear 875 to rotate. In the initial position, it is the first through hole of the pressure control plate 877 that is ventilated. As the drive rod 876 rotates, it can pass along the first smooth groove and the transition groove. When the drive rod 876 passes along the second smooth groove, it can push the pressure control plate 877 to move upward, so that part of the first through hole can be blocked to reduce The voltage-stabilizing tube 51 injects gas into the upper furnace body 31 to maintain the gas balance in the upper furnace body 31. If the gas pressure balance in the upper furnace body 31 cannot be maintained, the drive ring 64 will continue to rotate, so that the second protrusion section 66 continues to touch the roller 83 to accelerate the movement of the gear 875, and can move the drive rod 876 to the second flat groove, so that the incomplete column wheel 874 continues to move upward, and the first through hole is completely converted to the second through hole, so as to reduce the gas injected into the upper furnace body 31 again. In addition, when the push plate 82 retreats as a whole, it can also push the degassing member 9 to move as a whole.

[0027] In some embodiments, in order to further promote the movement of the driving rod 876 along the incomplete column wheel 874, the incomplete column wheel 874 has a first flat groove, a transition groove and a second flat groove, and the first flat groove is located above the second flat groove. In the initial position, the driving rod 876 and the first flat groove are in contact with each other, and when the gear 875 rotates, it can drive the driving rod 876 through the first flat groove, the transition groove and the second flat groove in sequence.

[0028] In some embodiments, more specifically, in order to control the amount of gas rushing into the voltage regulator tube 51, the pressure control plate 877 can pass through the voltage regulator tube 51. There is a first through hole and a second through hole in the pressure control plate 877. The diameter of the first through hole is larger than the diameter of the second through hole. When the first through hole is converted to the second through hole, the airflow passing through the voltage regulator tube 51 can be reduced.

[0029] Next, the deflation component 9 is given a more specific structure and construction as a whole for further explanation. The deflation component 9 includes: a base plate 91, which is arranged on the machine frame 81; a rocker arm 92, which is rotatably arranged on the base plate 91, and a fourth spring 93 is provided on the rocker arm 92, and the fourth spring 93 is connected to the base plate 91; a boss 94, which is arranged on the rocker arm 92, and a step surface is formed between the boss 94 and the rocker arm 92; a rotating wheel 95, which is rotatably arranged on the base plate 91, and a tail support 96 and a lower support 97 are connected to the rotating wheel 95. In the initial position, the tail support 96 is in conflict with the step surface, and the lower support 97 is located on one side of the push plate 82; a linkage rod 98, which is rotatably arranged on the base plate 91, and a pressure rod 99 is rotatably provided on the linkage rod 98. In the initial position, the pressure rod 99 is located above the handle end of the pressure relief valve 32; Next, the overall use principle and effect of the air-deflation component 9 are further explained. When the push plate 82 is retreated as a whole to push the air-deflation component 9 to move, the lower support 97 can be quickly pushed to move to the right. After the lower support 97 moves to the right, the rotary wheel 95 can be flipped. After the rotary wheel 95 is flipped, the tail support 96 can be pushed to press the stepped surface to flip the rocker 92. After the rocker 92 is flipped, the push-pull linkage rod 98 can be pushed and pulled to flip to the right, so that the pressure rod 99 presses the handle end of the pressure relief valve 32 and the pressure relief valve 32 releases gas to reduce the air pressure in the upper furnace body 31, so as to achieve air pressure balance in the upper furnace body 31. After the air pressure is balanced, the connecting component 7, the air pressure balance component 8, and the air-deflation component 9 can be restored to their initial positions as a whole. After a constant temperature and pressure environment is achieved in the upper furnace body 31 and the lower furnace body 3, the silicon carbide crystals in the upper furnace body 31 and the lower furnace body 3 can be efficiently grown.

[0030] Another technical problem to be solved by the present invention is a growth method of a silicon carbide crystal growth device. S1. Loading silicon carbide crystals: placing the silicon carbide crystals in the lower furnace body 3, and opening the conveying member 2 to close the upper furnace body 31 and the lower furnace body 3; S2. Heating and pressurizing the lower furnace body 3 and the upper furnace body 31: heating the upper furnace body 31 by turning on the heating member 4, and gasifying and pressurizing the upper furnace body 31 by turning on the gas box 5; S3. Triggering the driving member 6: After the furnace body 3 is heated and pressurized, the air pressure increases sharply, which can push the connecting member 7 to move left, thereby driving the gear plate 63 and the driving ring 64 to rotate; S4. Triggering the air pressure balance member 8: When the drive ring 64 rotates, it drives the first protrusion 65 to rotate. When the first protrusion 65 abuts against the air pressure balance member 8, the air pressure balance member 8 acts on the pressure regulator tube 51 to complete the air pressure balance control operation of the pressure regulator tube 51; S5. Triggering the degassing member 9: When the air pressure balancing member 8 is pushed back, the degassing member 9 can be triggered to operate, and can act on the pressure relief valve 32, so that the pressure relief valve 32 relieves the entire pressure in the upper furnace body 31 to balance the air pressure; S6. Pushing operation of the heating component 4 as a whole: after the rotating drum 62 rotates, it can push the heating component 4 upward, so that the heating component 4 is separated upward from the upper furnace body 31, thereby reducing the heating operation of the upper furnace body 31.

[0031] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide crystal growth device, comprising a chassis, a conveying member, a lower furnace body, and a gas box disposed within the chassis, wherein the conveying member comprises a frame, a first push module connected to the frame, a second push module connected to the first push module, an upper furnace body disposed on the second push module, a voltage regulator tube disposed on the gas box, and a hose disposed at one end of the voltage regulator tube capable of being inserted into the upper furnace body, characterized in that: Also includes: a heating member disposed on the upper furnace body; A driving member is provided on the chassis, the driving member comprising a base provided on the chassis, a rotating drum provided on the base, a gear disc and a driving ring provided on the rotating drum, and a first protruding section and a second protruding section provided on the driving ring; a connecting member, which is provided on the lower furnace body; A gas pressure balancing component is provided on the driving component, and the gas pressure balancing component comprises: A machine frame is provided on the driving member, a push plate is slidably provided in the machine frame, a rack section is provided at one end of the push plate, a roller and an embedded rod are provided on the push plate, and a second spring is provided on the embedded rod; A follower rod is arranged in the machine frame and has a balancing piece on the follower rod; The air-deflating component is arranged on the machine frame and can be driven when the push plate moves.

2. The silicon carbide crystal growth apparatus according to claim 1, wherein The communication component includes: a connecting pipe disposed on the lower furnace body, wherein the connecting pipe and the lower furnace body are in communication with each other; An inner block is slidably disposed in the communicating tube, and a push rod capable of passing through the communicating tube is provided on the inner block; a first spring sleeved on the push rod and located between the inner block and the connecting pipe; The tooth plate is arranged at one end of the push rod. When in the initial position, the tooth plate and the tooth disc are meshed with each other.

3. The silicon carbide crystal growth apparatus according to claim 2, wherein: The heating member comprises: A support rod is arranged on the chassis, a slide rod is slidably sleeved on the support rod, a heating ring is provided on the slide rod, and the heating ring can be sleeved on the upper furnace body; The screw barrel is arranged on the heating ring The screw rod is arranged on the rotating drum and can be rotated and inserted into the screw rod barrel.

4. The silicon carbide crystal growth apparatus according to claim 3, wherein: There is an annular sealing gasket at the bottom of the upper furnace body. When the upper furnace body and the lower furnace body are closed, the annular sealing gasket can penetrate into the lower furnace body. A pressure relief valve is also detachably installed on the upper furnace body. The main body of the pressure relief valve is provided with a baffle, and the baffle is provided with a tension spring, and the tension spring is connected to the handle end of the pressure relief valve.

5. The silicon carbide crystal growth apparatus according to claim 4, wherein: in, In the initial position, the smooth section of the driving ring and the roller are in contact with each other, and the diameter of the second protruding section is larger than that of the first protruding section.

6. The silicon carbide crystal growth apparatus according to claim 4, wherein: The balancing element includes: A sleeve is arranged on the machine frame, and a balance bar is slidably arranged in the sleeve; a third spring, which is sleeved on the balance bar; an incomplete column wheel slidably disposed in the sleeve and connected to the balance bar; A gear is disposed on the follower rod, the gear being capable of meshing with the rack segment of the push plate, and a driving rod is provided on the gear; The pressure control plate is arranged on the balance bar.

7. The silicon carbide crystal growth apparatus according to claim 6, wherein: The incomplete column wheel has a first flat groove, a transition groove and a second flat groove, and the first flat groove is located above the second flat groove. In the initial position, the driving rod is in contact with the first flat groove. When the gear rotates, the driving rod can be driven to pass through the first flat groove, the transition groove and the second flat groove in sequence.

8. The silicon carbide crystal growth apparatus according to claim 6, wherein: The pressure control plate can pass through the voltage-stabilizing tube. A first through hole and a second through hole are provided in the pressure control plate. The diameter of the first through hole is larger than the diameter of the second through hole. When the first through hole is converted to the second through hole, the airflow passing through the voltage-stabilizing tube can be reduced.

9. The silicon carbide crystal growth apparatus according to claim 6, wherein: The deflation member comprises: A base plate, which is arranged on the frame; a swing rod rotatably mounted on the base plate, wherein a fourth spring is mounted on the swing rod and connected to the base plate; A boss is disposed on the rocker arm, with a stepped surface formed between the boss and the rocker arm; The runner is rotatably arranged on the base plate, and is connected to a tail support and a lower support. In the initial position, the tail support is in contact with the stepped surface, and the lower support is located on one side of the push plate; The linkage rod is rotatably arranged on the base plate. A pressure rod is rotatably arranged on the linkage rod. When in the initial position, the pressure rod is located above the handle end of the pressure relief valve.

10. A method for growing a silicon carbide crystal according to any one of claims 1 to 9, characterized in that: S1. Loading the silicon carbide crystal: placing the silicon carbide crystal in the lower furnace body, and opening the conveying member to close the upper furnace body and the lower furnace body; S2. Heating and pressurizing the lower furnace body and the upper furnace body: heating the upper furnace body by turning on the heating component and gasifying and pressurizing the upper furnace body by turning on the gas box; S3. Triggering the driving component: After the furnace body is heated and pressurized, the air pressure increases sharply, which can push the connecting component to move left, thereby driving the gear plate and the driving ring to rotate; S4. Triggering the air pressure balancing member: When the driving ring rotates, it drives the first protrusion to rotate. When the first protrusion abuts against the air pressure balancing member, the air pressure balancing member acts on the pressure regulator tube to complete the air pressure balancing control operation of the pressure regulator tube; S5. Triggering the degassing member: When the air pressure balancing member is pushed back, the degassing member can be triggered to operate, and can act on the pressure relief valve, so that the pressure relief valve relieves pressure in the entire upper furnace body to balance the air pressure; S6. Pushing operation of the entire heating component: after the rotating drum rotates, the heating component can be pushed upward, so that the heating component is separated upward from the upper furnace body, thereby reducing the heating operation of the upper furnace body.

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