Scale grating, grating ruler and preparation method of scale grating

Abstract

The invention provides a scale grating, a grating ruler and a preparation method of the scale grating. The scale grating comprises light modulation units and shading units which are periodically and alternately arranged along a preset direction; wherein the optical modulation unit dynamically configures an optical state through an external signal so as to adjust the pitch of the scale grating. By dynamically configuring the optical state of the light modulation unit, the pitch of the scale grating is adjusted, so that the measurement precision is adjustable.

Description

Technical Field

[0001] The present application relates to the field of position measurement, and in particular to a scale grating, a grating ruler, and a method for preparing the scale grating. Background Art

[0002] In the field of precision machining, precision displacement (angle) sensors are an indispensable and important component, and are compared to the ruler of intelligent manufacturing. Their accuracy directly determines the leading level of the machining and manufacturing links.

[0003] A grating measuring device is a precision sensor that can accurately measure displacement (or rotation angle) and is widely used in the precision manufacturing industry.

[0004] However, current optical scale gratings cannot guarantee the common requirements of precise and rough measurement in the manufacturing process. Summary of the Invention

[0005] The main technical problem solved by this application is to provide a scale grating, a grating ruler and a method for preparing a scale grating, so as to solve the problem in the prior art that optical scale gratings cannot guarantee the common requirements of accurate measurement and rough measurement in the manufacturing process.

[0006] In order to solve the above technical problems, the first technical solution provided by the present application is: providing a scale grating, which includes light modulation units and light shielding units periodically and alternately arranged along a preset direction; The optical modulation unit dynamically configures the optical state through an external signal to adjust the grating pitch of the scale grating.

[0007] Among them, the optical modulation unit includes a first electrode, a functional layer and a second electrode stacked in sequence; the first electrode is externally connected to a first voltage, and the second electrode is externally connected to a second voltage, and the optical state of the optical modulation unit is dynamically configured by controlling the first voltage and the second voltage; the optical modulation unit is configured to be independently controlled.

[0008] Wherein, the functional layer is a light-emitting layer, and the optical state includes a light-emitting state and a light-shielding state; at least one of the first electrode and the second electrode is a light-transmitting layer; or, The functional layer is a polarizing layer, and the optical states include a light-transmitting state and a light-shielding state; the first electrode and the second electrode are both light-transmitting layers.

[0009] The scale grating further includes a first substrate and a second substrate arranged opposite to each other; the light modulation unit is arranged between the first substrate and the second substrate, and the shading unit is located between the first substrate and the second substrate; at least one of the first substrate and the second substrate is a light-transmitting layer.

[0010] Wherein, in a preset direction, the width of the light modulation unit is greater than the width of the light shielding unit.

[0011] During the measurement process, the scale grating presents light and dark areas that are alternately arranged along a preset direction; The light modulation units and light shielding units periodically and alternately arranged along a preset direction are divided into a plurality of continuously arranged basic units, each basic unit including an adjacent light modulation unit and a light shielding unit; in the preset direction, the width of the basic unit is equal to the length; In response to the grating pitch of the scale grating being n times of the equally divided length; each bright area includes n basic units arranged continuously, and each dark area includes n basic units arranged continuously; n is an integer greater than 0; the light modulation unit in the bright area is configured to be in a light-transmitting state or a light-emitting state; and the light modulation unit in the dark area is configured to be in a light-shielding state.

[0012] In order to solve the above technical problems, the second technical solution provided by this application is to provide a grating ruler, which includes: The scale grating is the scale grating mentioned above; The counter is displaced relative to the scale grating and is used to read the light signal on the scale grating and output displacement data.

[0013] The functional layer of the scale grating is a light-emitting layer, and the light modulation unit of the scale grating is dynamically configured to be in a light-emitting state or a light-shielding state; the counter includes a reading head, which is arranged on one side of the working surface of the scale grating; or, The functional layer of the scale grating is a polarizing layer, and the light modulation unit of the scale grating is dynamically configured to be a light-transmitting state or a light-shielding state; the counter includes a reading head and a light source, the reading head is arranged on the working surface side of the scale grating, and the light source is arranged on the back side of the scale grating, and the back side is arranged opposite to the working surface.

[0014] In order to solve the above technical problems, the third technical solution provided by the present application is to provide a method for preparing a scale grating, wherein the method for preparing the above scale grating comprises: preparing light modulation units, and arranging the light modulation units at intervals; A light shielding unit is prepared on the side of the light modulation unit.

[0015] In order to solve the above technical problems, the fourth technical solution provided by the present application is to provide a method for preparing a scale grating, wherein the method is used to prepare the above scale grating; the method comprises: A first electrode and a first light-shielding layer are sequentially formed on a first substrate; the first light-shielding layer is located on a side of the first electrode; A second electrode and a second light-shielding layer are sequentially formed on the second substrate; the second light-shielding layer is located on the side of the second electrode; preparing a functional layer on the surface of the first electrode or the second electrode; The first substrate and the second substrate are aligned so that the first electrode, the functional layer and the second electrode are stacked in sequence to form a light modulation unit, and the first light shielding layer and the second light shielding layer are attached to form a light shielding unit.

[0016] Beneficial effects of this application: Different from the prior art, this application provides a scale grating, a grating ruler, and a method for manufacturing a scale grating. The scale grating includes light modulation units and light shielding units periodically and alternately arranged along a preset direction. The light modulation units dynamically configure their optical states via external signals to adjust the scale grating pitch. By dynamically configuring the optical states of the light modulation units to adjust the scale grating pitch, adjustable measurement accuracy is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technical workers in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the grating ruler provided in this application; Figure 2 This is a schematic diagram of the three-dimensional structure of the scale grating provided in this application; Figure 3 This is a schematic structural diagram of an embodiment of a scale grating provided by the present application; Figure 4 This is a schematic diagram of a structural state of the scale grating provided by this application; Figure 5 This is a schematic diagram of another structural state of the scale grating provided by this application; Figure 6 This is a schematic structural diagram of an embodiment of a grating ruler provided by the present application; Figure 7 This is a schematic structural diagram of another embodiment of the grating ruler provided by the present application; Figure 8 This is a schematic flow chart of an embodiment of a method for preparing a scale grating provided in this application; Figure 9 yes Figure 8 A schematic flow chart of an embodiment corresponding to step S11; Figure 10 yes Figure 9 Schematic diagram of the structure corresponding to steps S111-S113; Figure 11 yes Figure 8 Schematic diagram of the structure corresponding to steps S12 and S13; Figure 12 This is a schematic flow chart of another embodiment of the method for preparing a scale grating provided in this application; Figure 13 yes Figure 12 Flow chart corresponding to step S21; Figure 14 yes Figure 13 Schematic diagram of the structure corresponding to step S211 and step S212; Figure 15 yes Figure 12 Flow chart corresponding to step S22; Figure 16 yes Figure 15 Schematic diagram of the structure corresponding to step S221 and step S222; Figure 17 yes Figure 12 Schematic diagram of the structure corresponding to step S23 and step S24.

[0019] Description of Figure Numbers: 1. Scale grating; 101. Working surface; 102. Back surface; 103. Dark area; 104. Bright area; 10. Light modulation unit; 11. First electrode; 111. First lead; 12. Second electrode; 121. Second lead; 13. Functional layer; 20. Shading unit; 201. First shading layer; 202. Second shading layer; 30. First substrate; 40. Second substrate; 50. Base unit; 2. Counter; 21. Reading head; 22. Light source; 100. Grating ruler; P, grating pitch; L, equally divided length; x1, first width; x2, second width. DETAILED DESCRIPTION

[0020] The following describes the embodiments of the present application in detail with reference to the accompanying drawings.

[0021] In the following description, for the purpose of explanation rather than limitation, specific details such as specific system structures, interfaces, and technologies are provided to facilitate a thorough understanding of the present application.

[0022] The following will be combined with the accompanying drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0023] The terms "first," "second," and "third" in this application are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features identified. Therefore, features identified as "first," "second," or "third" may explicitly or implicitly include at least one of such features. In the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined. All directional designations in the embodiments of this application (such as up, down, left, right, front, back, etc.) are intended only to illustrate the relative positional relationships and movement of components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional designations will also change accordingly. Furthermore, the terms "including," "having," and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus comprising a series of steps or elements is not limited to the listed steps or elements but may optionally include steps or elements not listed, or may optionally include other steps or elements inherent to such process, method, product, or apparatus.

[0024] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, that the embodiments described herein may be combined with other embodiments.

[0025] See also Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the three-dimensional structure of the grating ruler provided in this application. Figure 2 It is a schematic diagram of the three-dimensional structure of the scale grating provided in this application.

[0026] Generally speaking, a set of grating rulers consists of two parts: scale grating and counter, such as Figure 1 As shown. Equal quantities of physical quantities L are depicted on the scale grating, which is an equally divided scale. For example, traditional high-precision mechanical scales have equally spaced contrast substrates. The scale grating includes alternating bright and dark substrates, with the width of the bright substrate being L2 and the width of the dark substrate being L1, where L = L1 + L2. When the scale grating moves or rotates with the mechanical device, the number of repetitions of the equal physical quantity L, N, is captured by a counter, and the displacement X = L*N is calculated. However, the equal quantity L of current equally divided scale gratings is a fixed value.

[0027] When fine measurement of the moving distance is required, the scale grating steps according to the minimum gradient, and the counter collects the number of repetitions N to complete the moving distance measurement X. When rough measurement of the moving distance is required, the measurement time increases due to the high precision of L.

[0028] See also Figures 3 to 5 , Figure 3 This is a schematic structural diagram of an embodiment of a scale grating provided by this application. Figure 4 This is a schematic diagram of the structural state of the scale grating provided by this application. Figure 5 This is a schematic diagram of another structural state of the ruler grating provided in this application.

[0029] To solve the above technical problems, the present application provides a scale grating 1. The scale grating 1 includes light modulation units 10 and light shielding units 20 periodically and alternately arranged along a preset direction. The light modulation units 10 dynamically configure their optical states according to external signals to adjust the grating pitch P of the scale grating 1.

[0030] By dynamically configuring the optical state of the light modulation unit 10 to adjust the grating pitch P of the scale grating 1 , the measurement accuracy can be adjusted.

[0031] Exemplarily, the preset direction is the relative displacement direction of the scale grating 1 along the straight line.

[0032] The grating pitch P determines the original resolution of the scale grating 1 and is the minimum reference unit for measuring displacement. Figure 6 ) When relative displacement occurs, the number of repetitions of pitch P is captured by counter 2, and the displacement is calculated as pitch P multiplied by the number of repetitions, i.e., X = P * N. N represents the number of repetitions of pitch P, and X represents the displacement.

[0033] The shading unit 20 is used to block or shield light.

[0034] In some embodiments, the optical modulation unit 10 includes a first electrode 11, a functional layer 13, and a second electrode 12 stacked in sequence; the first electrode 11 is externally connected to a first voltage, and the second electrode 12 is externally connected to a second voltage, and the optical state of the optical modulation unit 10 is dynamically configured by controlling the first voltage and the second voltage; the optical modulation unit 10 is configured to be independently controlled.

[0035] The light modulation unit 10 dynamically regulates the optical properties of the functional layer 13 through the voltage difference between the first electrode 11 and the second electrode 12 to change its optical state.

[0036] Each light modulation unit 10 can be controlled individually, so that the optical states of the light modulation units 10 can be differentiated, thereby achieving adjustable grating pitch P of the scale grating 1 .

[0037] In some embodiments, the functional layer 13 is a light-emitting layer, and the optical state includes a light-emitting state and a light-shielding state; at least one of the first electrode 11 and the second electrode 12 is a light-transmitting layer.

[0038] For example, by regulating the voltage difference between the first electrode 11 and the second electrode 12, in response to the voltage difference being greater than or equal to a preset voltage, the functional layer 13 emits light, and the light modulation unit 10 is in a light-emitting state; in response to the voltage difference being less than the preset voltage, the functional layer 13 does not emit light, and the light modulation unit 10 is in a light-shielding state. In other words, by regulating the voltage difference between the first electrode 11 and the second electrode 12, the light modulation unit 10 can be switched between a light-emitting state and a light-shielding state.

[0039] The preset voltage is related to the functional layer 13 , and is not limited here, and can be selected according to actual needs.

[0040] The scale grating 1 has a working surface 101. The working surface 101 is the surface of the scale grating 1 that directly participates in optical signal modulation.

[0041] The electrode of the first electrode 11 and the second electrode 12 located on the side of the functional layer 13 facing the working surface 101 is a light-transmitting layer to ensure that light emitted by the functional layer 13 can penetrate the working surface 101 .

[0042] Exemplarily, the second electrode 12 is a light-transmitting layer and is located on a side of the functional layer 13 facing the working surface 101 .

[0043] There is no restriction on the material of the light-emitting layer, and it can be selected according to the needs.

[0044] In other embodiments, the functional layer 13 is a polarizing layer, and the optical state includes a light-transmitting state and a light-shielding state; the first electrode 11 and the second electrode 12 are both light-transmitting layers.

[0045] By adjusting the voltage difference between the first electrode 11 and the second electrode 12 , the polarization angle of the light irradiated to the functional layer 13 is changed, thereby realizing the switching of the light modulation unit 10 between the light-transmitting state and the light-shielding state.

[0046] The first electrode 11 and the second electrode 12 are both light-transmitting layers to ensure that the incident light can be emitted from the working surface 101 through the light modulation unit 10 .

[0047] In some embodiments, the scale grating 1 also includes a first substrate 30 and a second substrate 40 arranged opposite to each other; the light modulation unit 10 is arranged between the first substrate 30 and the second substrate 40, and the shading unit 20 is located between the first substrate 30 and the second substrate 40; at least one of the first substrate 30 and the second substrate 40 is a light-transmitting layer.

[0048] Exemplarily, the functional layer 13 is a light-emitting layer, and the substrate of the first substrate 30 and the second substrate 40 located on the side of the functional layer 13 facing the working surface 101 is a light-transmitting layer.

[0049] Exemplarily, the functional layer 13 is a polarizing layer, and the first substrate 30 and the second substrate 40 are both light-transmitting layers.

[0050] In some embodiments, in a predetermined direction, the width of the light modulation unit 10 is greater than the width of the light shielding unit 20 .

[0051] In the preset direction, the width of each light modulation unit 10 is equal, and the width of each light shielding unit 20 is equal. In the preset direction, the width of each light modulation unit 10 is the first width x1, and the width of the light shielding unit 20 is x2.

[0052] In a preset direction, the width of the light modulation unit 10 is much larger than the width of the light shielding unit 20. By limiting the width of the light modulation unit 10, the microscopic arrangement (the distribution of the light shielding unit 20 and the light modulation unit 10) can achieve a macroscopic optical effect.

[0053] The macroscopic optical effect is that sparse shading units 20 will be submerged in the bright background. Dense shading units 20 will form a continuous dark area. That is, when the proportion of shading units 20 is low, the macroscopic appearance is bright; when the proportion of shading units 20 is high, the macroscopic appearance is dark. For example, when the light modulation units 10 on both sides of a shading unit 20 are in the non-shading state (transmitting state or luminous state), the area where the shading unit 20 and the light modulation units 10 on both sides are located will appear as a bright area (see Figure 5 ).

[0054] By controlling the light-shielding or non-light-shielding state of each light modulation unit 10, a macroscopic light-dark distribution is achieved to adjust the grating pitch P of the scale grating 1.

[0055] The non-light-shielding state of the light modulation unit 10 refers to a light-transmitting state or a light-emitting state.

[0056] In some embodiments, during the measurement process, the scale grating 1 presents bright areas 104 and dark areas 103 arranged alternately along a preset direction; the light modulation units 10 and shading units 20 periodically arranged alternately along the preset direction are divided into a plurality of continuously arranged basic units 50, each basic unit 50 includes an adjacent light modulation unit 10 and a shading unit 20; in the preset direction, the width of the basic unit 50 is an equal-division length L; in response to the pitch of the scale grating 1 being n times the equal-division length L; each bright area 104 includes n continuously arranged basic units 50, and each dark area 103 includes n continuously arranged basic units 50; n is an integer greater than 0; the light modulation units 10 in the bright area 104 are configured to be in a light-transmitting state or a light-emitting state; the light modulation units 10 in the dark area 103 are configured to be in a light-shielding state.

[0057] The bright area 104 refers to an area that appears bright macroscopically, and the dark area 103 refers to an area that appears dark macroscopically.

[0058] In one embodiment, n is 1, and the grating pitch P of the scale grating 1 is equal to the length L (i.e., the minimum grating pitch P). In other words, P = L. Each bright region 104 includes one basic unit 50, and each dark region 103 includes one basic unit 50. When precise measurement of movement distance is required, the relative displacement of the scale grating 1 is stepped according to the equal length L.

[0059] In another specific embodiment, n is 2, and the grating pitch P of the scale grating 1 is twice the equal-division length L. That is, P = 2L. Each bright region 104 includes two basic units 50, and each dark region 103 includes two basic units 50. When a rough measurement of the movement distance is required, the relative displacement of the scale grating 1 is stepped at twice the equal-division length L, which can save measurement time and improve production efficiency.

[0060] By properly dividing the bright area 104 and the dark area 103 and configuring the light modulation unit 10 in the bright area 104 in a non-shielding state, the adjustment of different grating pitches P is achieved, thereby achieving adjustable precision. For fine adjustment, the smallest grating pitch P is selected; for coarse adjustment, the grating pitch P can be increased, thereby saving measurement time and improving production efficiency.

[0061] See also Figure 6 and Figure 7 , Figure 6 This is a schematic structural diagram of an embodiment of a grating ruler provided by this application. Figure 7 It is a structural schematic diagram of another embodiment of the grating ruler provided in this application.

[0062] The present application provides a grating ruler 100. The grating ruler 100 includes a scale grating 1 and a counter 2. The scale grating 1 is the scale grating 1 described above. The counter 2 is displaced relative to the scale grating 1 and is used to read the optical signal on the scale grating 1 and output displacement data.

[0063] In some embodiments, as Figure 6 As shown, the functional layer 13 of the scale grating 1 is a light-emitting layer, and the light modulation unit 10 of the scale grating 1 is dynamically configured to be in a light-emitting state or a light-shielding state; the counter 2 includes a reading head 21, which is arranged on one side of the working surface 101 of the scale grating 1.

[0064] The light modulation unit 10 is self-luminous, eliminating the need for the light source 22 in the counter 2 and simplifying its structure. The light source is internally embedded in the scale grating 1, which actively provides light signals. Direct interaction with the readhead 21 reduces signal latency. Furthermore, the scale grating 1's self-luminous nature provides strong resistance to ambient light interference, making it suitable for dark environments or complex working conditions.

[0065] During the measurement process, the scale grating 1 presents bright areas 104 arranged alternately along a preset direction (see Figure 4 and Figure 5 ) and dark area 103 (see Figure 4 and Figure 5 ). The light modulation unit 10 in the bright area 104 is in the light-emitting state, emitting a light signal. Counter 2 receives the light signal, and counter 2 counts once. Counter 2 moves to the next interval (i.e., the next dark area 103 adjacent to the bright area 104). The light modulation unit 10 in the dark area 103 is in the light-shielding state. Counter 2 cannot receive the light signal, and counter 2 counts once again. Counter 2 continues to move to the next interval (i.e., the next bright area 104 adjacent to the dark area 103). The light modulation unit 10 in the bright area 104 is in the light-emitting state, emitting a light signal. Counter 2 can receive the light signal, and counter 2 counts once again.

[0066] In other embodiments, Figure 7 As shown, the functional layer 13 of the scale grating 1 is a polarizing layer, and the light modulation unit 10 of the scale grating 1 is dynamically configured to be a light-transmitting state or a light-shielding state; the counter 2 includes a reading head 21 and a light source 22, the reading head 21 is arranged on the side of the working surface 101 of the scale grating 1, and the light source 22 is arranged on the side of the back surface 102 of the scale grating 1, and the back surface 102 is arranged opposite to the working surface 101.

[0067] The light source 22 emits light of a specific wavelength (such as infrared light or visible light) to form a uniform light beam, which illuminates the back side 102 of the scale grating 1 .

[0068] Exemplarily, the light source 22 is a light emitting diode or a laser diode.

[0069] The scale grating 1 converts continuous light into periodically changing light and dark fringes (moire fringes), providing a recognizable optical signal for the reading head 21.

[0070] During the measurement process, the scale grating 1 presents bright areas 104 arranged alternately along a preset direction (see Figure 4 and Figure 5 ) and dark area 103 (see Figure 4 and Figure 5 ). Light source 22 emits a light signal, and the light modulation unit 10 of bright area 104 is in a light-transmitting state. Counter 2 receives the light signal through light modulation unit 10, and counter 2 counts once. Counter 2 moves to the next interval (i.e., the next dark area 103 adjacent to bright area 104). The light modulation unit 10 of dark area 103 is in a light-blocking state, and counter 2 does not receive the light signal. Counter 2 counts once again. Counter 2 continues to move to the next interval (i.e., the next bright area 104 adjacent to dark area 103). The light modulation unit 10 of bright area 104 is in a light-transmitting state, and counter 2 can receive the light signal. Counter 2 counts once again.

[0071] The internal structure of counter 2 is not particularly limited and may be selected based on actual needs. For example, counter 2 may also include a photoelectric sensor (not shown) that receives light signals from scale grating 1 and converts them into electrical signals, thereby enabling displacement measurement and reading.

[0072] See also Figure 6 , Figures 8 to 10 , Figure 8 This is a flow chart of an embodiment of a method for preparing a scale grating provided in this application. Figure 9 yes Figure 8 A flow chart of an embodiment corresponding to step S11 in FIG. Figure 10 yes Figure 9 Schematic diagram of the structure corresponding to steps S111-S113.

[0073] The present application provides a method for preparing a scale grating, which is used to prepare the above-mentioned scale grating 1.

[0074] The preparation method of the ruler grating includes: S11: preparing light modulation units, and arranging the light modulation units at intervals.

[0075] Specifically, the light modulation unit 10 is prepared on the first substrate 30 .

[0076] In a specific embodiment, step S11 includes: S111: preparing a first electrode on a first substrate.

[0077] Specifically, the first electrodes 11 are arranged at equal intervals. In a preset direction, the width of the first electrodes 11 is a first width x1, and the spacing between the first electrodes 11 is a second width x2. The first width x1 is greater than the second width x2.

[0078] The first lead 111 is prepared at the same time as the first electrode 11 is prepared. The first electrode 11 is connected to an external power source through the first lead 111 .

[0079] The extending direction of the first lead line 111 intersects with the preset direction.

[0080] Specifically, the extension direction of the first lead 111 is perpendicular to the preset direction.

[0081] S112: preparing a functional layer on a side of the first electrode away from the first substrate.

[0082] Specifically, the orthographic projection of the functional layer 13 on the first substrate 30 coincides with the orthographic projection of the first electrode 11 on the first substrate 30. In a preset direction, the width of the functional layer 13 is a first width x1, and the spacing between the functional layers 13 is a second width x2.

[0083] The functional layer 13 is a light-emitting layer or a polarizing layer. The specific material of the light-emitting layer or the polarizing layer is not limited here and can be selected according to actual needs.

[0084] S113: preparing a second electrode on a side of the functional layer away from the first substrate.

[0085] Specifically, the orthographic projection of the second electrode 12 on the first substrate 30 coincides with the orthographic projection of the first electrode 11 on the first substrate 30. In a preset direction, the width of the second electrode 12 is the first width x1, and the spacing between the second electrodes 12 is the second width x2.

[0086] At least one of the first electrode 11 and the second electrode 12 is a light-transmitting layer.

[0087] The second lead 121 is also prepared when the second electrode 12 is prepared. The second electrode 12 is connected to an external power source through the second lead 121 .

[0088] The extending direction of the second lead line 121 intersects with the preset direction.

[0089] Specifically, the extension direction of the second lead 121 is perpendicular to the preset direction.

[0090] The first electrode 11 , the functional layer 13 , and the second electrode 12 stacked in this order constitute the light modulation cell 10 .

[0091] See also Figure 6 、 Figure 10 and Figure 11 , Figure 11 yes Figure 8 Schematic diagram of the structure corresponding to steps S12 and S13.

[0092] S12: preparing a light shielding unit on the side of the light modulation unit.

[0093] Specifically, the light shielding unit 20 is located on a side of the light modulation unit 10 .

[0094] In the preset direction, the width of the light shielding unit 20 is the second width x2.

[0095] In some embodiments, a surface of the light shielding unit 20 away from the first substrate 30 is flush with a surface of the light modulation unit 10 away from the first substrate 30 .

[0096] In some other embodiments, a surface of the light shielding unit 20 away from the first substrate 30 is higher than a surface of the light modulation unit 10 away from the first substrate 30 .

[0097] In one embodiment, the surface of the light shielding unit 20 facing away from the first substrate 30 is flush with the surface of the light modulating unit 10 facing away from the first substrate 30, facilitating the preparation of the second substrate 40. Specifically, a light shielding layer (not shown) is formed on the side of the second electrode 12 facing away from the first substrate 30. The light shielding layer covers the second electrode 12 and fills the space between the light modulating units 10. The light shielding layer is patterned to form the light shielding unit 20.

[0098] After step S12, the method further includes: S13: preparing a second substrate on a side of the second electrode away from the first substrate.

[0099] At least one of the first substrate 30 and the second substrate 40 is a light-transmitting layer.

[0100] Specifically, when the functional layer 13 is a light-emitting layer, it is sufficient to ensure that the portion located between the working surface 101 and the functional layer 13 and facing the functional layer 13 is a light-transmitting layer, so that light emitted by the functional layer 13 can be emitted through the working surface 101. When the functional layer 13 is a polarizing layer, it is sufficient to ensure that the portion located between the working surface 101 and the functional layer 13 and facing the functional layer 13 is a light-transmitting layer, and that the portion located between the back surface 102 and the functional layer 13 and facing the functional layer 13 is a light-transmitting layer, so that light irradiated on the back surface 102 can be transmitted through the light modulation unit 10 and out of the working surface 101.

[0101] In one embodiment, the functional layer 13 is a light-emitting layer, and the second electrode 12 and the second substrate 40 are both light-transmitting layers. A surface of the second substrate 40 that is away from the first substrate 30 is a working surface 101 .

[0102] See also Figures 12 to 14 , Figure 12 This is a flow chart of another embodiment of the method for preparing a scale grating provided in this application. Figure 13 yes Figure 12 The flowchart corresponding to step S21 is as follows: Figure 14 yes Figure 13 Schematic diagram of the structure corresponding to step S211 and step S212.

[0103] The present application provides a method for preparing a scale grating, which is used to prepare the above-mentioned scale grating 1.

[0104] The preparation method of the ruler grating includes: S21: preparing a first electrode and a first light-shielding layer in sequence on a first substrate; the first light-shielding layer is located on a side of the first electrode.

[0105] Specifically, in the preset direction, the width of the first electrode 11 is the first width x1, the spacing between the first electrodes 11 is the second width x2, and the width of the first light shielding layer 201 is the second width x2. The first width x1 is greater than the second width x2.

[0106] In a specific embodiment, step S21 includes: S211: preparing a first electrode on a first substrate.

[0107] Specifically, the first electrodes 11 are prepared on the first substrate 30 , and the first electrodes 11 are arranged at equal intervals.

[0108] The first lead 111 is prepared at the same time as the first electrode 11 is prepared. The first electrode 11 is connected to an external power source through the first lead 111 .

[0109] The extending direction of the first lead line 111 intersects with the preset direction.

[0110] Specifically, the extension direction of the first lead 111 is perpendicular to the preset direction.

[0111] S212: preparing a first light shielding layer on the side of the first electrode.

[0112] Specifically, a first light-shielding layer 201 is formed on the side of the first electrode 11. The surface of the first light-shielding layer 201 away from the first substrate 30 is flush with the surface of the first electrode 11 away from the first substrate 30, or the surface of the first light-shielding layer 201 away from the first substrate 30 is higher than the surface of the first electrode 11 away from the first substrate 30.

[0113] Illustratively, the surface of the first light-shielding layer 201 facing away from the first substrate 30 is higher than the surface of the first electrodes 11 facing away from the first substrate 30. Specifically, a light-shielding layer (not shown) is formed on the side of the first electrodes 11 facing away from the first substrate 30. The light-shielding layer covers the first electrodes 11 and fills the gaps between the first electrodes 11. The light-shielding layer is patterned so that it exposes the first electrodes 11, thereby obtaining the first light-shielding layer 201.

[0114] See also Figures 16 and 17 , Figure 15 yes Figure 12 The flowchart corresponding to step S22 is as follows: Figure 16 yes Figure 15 The structural diagram corresponding to step S221 and step S222 in FIG. Figure 17 yes Figure 12 Schematic diagram of the structure corresponding to step S23 and step S24.

[0115] S22: preparing a second electrode and a second light-shielding layer in sequence on the second substrate; the second light-shielding layer is located on the side of the second electrode.

[0116] Specifically, in the preset direction, the width of the second electrode 12 is the first width x1, the spacing between the second electrodes 12 is the second width x2, and the width of the second light shielding layer 202 is the second width x2. The first width x1 is greater than the second width x2.

[0117] S221: preparing a second electrode on a second substrate.

[0118] Specifically, the second electrodes 12 are prepared on the second substrate 40 , and the second electrodes 12 are arranged at equal intervals.

[0119] The second lead 121 is also prepared when the second electrode 12 is prepared. The second electrode 12 is connected to an external power source through the second lead 121 .

[0120] The extending direction of the second lead line 121 intersects with the preset direction.

[0121] Specifically, the extension direction of the second lead 121 is perpendicular to the preset direction.

[0122] S222: preparing a second light shielding layer on the side of the second electrode.

[0123] Specifically, the side surface of the second shading layer 202 away from the second substrate 40 is arranged flush with the side surface of the second electrode 12 away from the second substrate 40, or the side surface of the second shading layer 202 away from the second substrate 40 is higher than the side surface of the second electrode 12 away from the second substrate 40.

[0124] Exemplarily, a surface of the second light shielding layer 202 away from the second substrate 40 is flush with a surface of the second electrode 12 away from the second substrate 40 .

[0125] It should be noted that step S21 and step S22 may be performed in any order.

[0126] S23: preparing a functional layer on the surface of the first electrode or the second electrode.

[0127] Specifically, when the functional layer 13 is formed on the surface of the first electrode 11 , the orthographic projection of the functional layer 13 on the first substrate 30 coincides with the orthographic projection of the first electrode 11 on the first substrate 30 .

[0128] When the functional layer 13 is formed on the surface of the second electrode 12 , the orthographic projection of the functional layer 13 on the second substrate 40 coincides with the orthographic projection of the second electrode 12 on the second substrate 40 .

[0129] In a preset direction, the width of the functional layer 13 is a first width x1, and the spacing between the functional layers 13 is a second width x2.

[0130] The functional layer 13 is a light-emitting layer or a polarizing layer.

[0131] Exemplarily, the functional layer 13 is formed on the surface of the first electrode 11 .

[0132] S24: Aligning the first substrate and the second substrate so that the first electrode, the functional layer, and the second electrode are sequentially stacked to form a light modulation unit, and the first light shielding layer and the second light shielding layer are laminated to form a light shielding unit.

[0133] Specifically, at least one of the first substrate 30 and the second substrate 40 is a light-transmitting layer. At least one of the first electrode 11 and the second electrode 12 is a light-transmitting layer.

[0134] Exemplarily, the orthographic projection of the first electrode 11 on the first substrate 30 is arranged to coincide with the orthographic projection of the second electrode 12 on the first substrate 30 .

[0135] In a specific embodiment, the functional layer 13 is a polarizing layer, and the first electrode 11 , the second electrode 12 , the first substrate 30 , and the second substrate 40 are all light-transmitting layers.

[0136] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0137] The above is only an implementation method of the present application and does not limit the scope of patent protection of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the scope of patent protection of the present application.

Claims

1. A scale grating, characterized in that: It includes light modulation units and light shielding units that are periodically and alternately arranged along a preset direction; The optical modulation unit dynamically configures the optical state through an external signal to adjust the grating pitch of the scale grating.

2. The scale grating according to claim 1, characterized in that The optical modulation unit includes a first electrode, a functional layer, and a second electrode stacked in sequence; the first electrode is externally connected to a first voltage, and the second electrode is externally connected to a second voltage, and the optical state of the optical modulation unit is dynamically configured by controlling the first voltage and the second voltage; the optical modulation unit is configured to be independently controlled.

3. The scale grating according to claim 2, characterized in that: The functional layer is a light-emitting layer, and the optical state includes a light-emitting state and a light-shielding state; at least one of the first electrode and the second electrode is a light-transmitting layer; or, The functional layer is a polarizing layer, the optical state includes a light-transmitting state and a light-shielding state; the first electrode and the second electrode are both light-transmitting layers.

4. The scale grating according to claim 1, characterized in that The scale grating also includes a first substrate and a second substrate arranged opposite to each other; the light modulation unit is arranged between the first substrate and the second substrate, and the shading unit is located between the first substrate and the second substrate; at least one of the first substrate and the second substrate is a light-transmitting layer.

5. The scale grating according to claim 1, characterized in that: In the preset direction, the width of the light modulation unit is greater than the width of the light shielding unit.

6. The scale grating according to claim 5, characterized in that: During the measurement process, the scale grating presents light areas and dark areas alternately arranged along the preset direction; Dividing the light modulation units and the light shielding units that are periodically and alternately arranged along the preset direction into a plurality of continuously arranged basic units, each of the basic units comprising an adjacent light modulation unit and a adjacent light shielding unit; in the preset direction, the width of the basic unit is equal to the length; In response to the grating pitch of the scale grating being n times the equally divided length; each of the bright areas comprises n continuously arranged basic units, and each of the dark areas comprises n continuously arranged basic units; n is an integer greater than 0; the light modulation unit in the bright area is configured to be in a light-transmitting state or a light-emitting state; and the light modulation unit in the dark area is configured to be in a light-shielding state.

7. A grating ruler, characterized in that: include: A scale grating, which is the scale grating according to any one of claims 1 to 6; The counter is displaced relative to the scale grating and is used to read the optical signal on the scale grating and output displacement data.

8. The grating ruler according to claim 7, characterized in that: The functional layer of the scale grating is a light-emitting layer, and the light modulation unit of the scale grating is dynamically configured to be in a light-emitting state or a light-shielding state; the counter includes a reading head, and the reading head is arranged on one side of the working surface of the scale grating; or, The functional layer of the scale grating is a polarizing layer, and the light modulation unit of the scale grating is dynamically configured to be a light-transmitting state or a light-shielding state; the counter includes a reading head and a light source, the reading head is arranged on the working surface side of the scale grating, and the light source is arranged on the back side of the scale grating, and the back side is arranged opposite to the working surface.

9. A method for preparing a scale grating, characterized in that: Used to prepare the scale grating according to any one of claims 1 to 6; comprising: preparing light modulation units, wherein the light modulation units are arranged at intervals; A light shielding unit is prepared on the side of the light modulation unit.

10. A method for preparing a scale grating, characterized in that: Used to prepare the scale grating according to any one of claims 1 to 6; comprising: A first electrode and a first light-shielding layer are sequentially formed on a first substrate; the first light-shielding layer is located on a side of the first electrode; A second electrode and a second light-shielding layer are sequentially formed on a second substrate, wherein the second light-shielding layer is located on a side of the second electrode; preparing a functional layer on the surface of the first electrode or the second electrode; The first substrate and the second substrate are aligned so that the first electrode, the functional layer and the second electrode are stacked in sequence to form a light modulation unit, and the first light shielding layer and the second light shielding layer are attached to form a light shielding unit.

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