Coaxiality tester, test system and coaxiality test method

Abstract

The invention discloses a coaxiality tester, a test system and a coaxiality test method, relates to the technical field of semiconductor equipment, and aims to solve the problem of coaxiality measurement of hollow annular assembly parts, the coaxiality tester is used for detecting the coaxiality of at least one hollow annular part arranged around a chuck, and comprises a base assembly, the connecting piece is detachably and fixedly connected with a chuck; the at least one measurer is mounted on the periphery of the base assembly and is used for measuring a plurality of radial distances between the measurer and each hollow annular component; and the data processor is used for obtaining the circle center position of each hollow annular part according to the plurality of radial distances so as to determine the coaxiality of each hollow annular part and the chuck or the coaxiality among the plurality of hollow annular parts, so that the coaxiality of a single hollow annular part and the chuck can be detected with high precision, and single-ring or multi-ring synchronous detection can be supported.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and more specifically, to a coaxiality tester, a test system, and a coaxiality test method. Background Art

[0002] In semiconductor manufacturing equipment, wafers must be precisely positioned on the center of the chuck for processes such as chemical vapor deposition, atomic layer deposition, physical vapor deposition, or etching. These processes place extremely high demands on the coaxiality between the chuck and components such as the edge ring, shadow ring, and chamber / liner. The accuracy of this coaxiality directly impacts the uniformity of the process flow field and the ultimate process results, making it crucial to ensure the coaxiality of these process kits.

[0003] However, the existing technology lacks a coaxiality measurement device specifically for hollow annular assemblies (such as chucks and related process kits), and there is no complete solution for coaxiality measurement of chucks and process kits in semiconductor manufacturing equipment.

[0004] Therefore, how to solve the problem of coaxiality measurement for hollow annular assembly parts is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] The present application discloses a coaxiality tester, a test system and a coaxiality test method, which are used to solve the problem of coaxiality measurement of hollow annular assemblies and realize coaxiality measurement of hollow annular assemblies at different angles and heights.

[0006] In a first aspect, the present application provides a coaxiality tester for detecting the coaxiality of at least one hollow annular component disposed around a chuck. The tester comprises a base assembly, at least one measuring device, and a data processor. The base assembly is removably fixedly connected to the chuck; the at least one measuring device is mounted on the outer periphery of the base assembly and is configured to measure multiple radial distances between the measuring device and each hollow annular component; and the data processor is configured to determine the center position of each hollow annular component based on the multiple radial distances to determine the coaxiality of each hollow annular component with the chuck or the coaxiality between multiple hollow annular components. By directly measuring the multiple radial distances from the hollow annular component by the measuring device mounted on the outer periphery of the base assembly, combined with the center position calculation by the data processor, the coaxiality of a single hollow annular component with the chuck or the coaxiality between multiple hollow annular components can be detected with high precision. The tester can flexibly adapt to chucks and hollow annular components of different sizes (such as preheating rings and focus rings), meeting the diverse testing needs of semiconductor devices. Furthermore, by increasing or decreasing the number of measuring devices or adjusting their layout, the tester can support simultaneous testing of single or multiple rings, providing strong scalability.

[0007] In one possible embodiment, the base assembly includes a mounting seat, a fixing seat, and a driving device mounted on the fixing seat, at least one measuring device is mounted on the outer periphery of the mounting seat, the output shaft of the driving device is connected to the mounting seat, and the driving device is used to drive the mounting seat to rotate around the output shaft and / or to rise and fall along the axial direction of the output shaft.

[0008] Exemplarily, the driving device is used to drive the mounting seat to rotate around the output shaft, so that the measuring device can measure the hollow annular component from multiple different angles, thereby obtaining more comprehensive radial distance data and improving measurement accuracy.

[0009] Exemplarily, the driving device is used to drive the mounting seat to rise and fall along the axial direction of the output shaft, so that the measuring instrument can be flexibly adjusted according to the height position of the hollow annular component, ensuring that the measuring instrument can adapt to the coaxiality measurement of hollow annular components of different heights, thereby improving the measurement accuracy.

[0010] Exemplarily, the drive device is used to drive the mounting seat to rotate around the output shaft and to rise and fall axially along the output shaft, so that the measuring instrument can measure the hollow annular component from multiple different angles and multiple different heights, and can adapt to hollow annular components of different sizes and heights, thereby improving the versatility and practicality of the equipment and facilitating users to perform coaxiality tests on various types of components.

[0011] In one possible embodiment, a drive device is used to drive the mounting seat to rotate about the output shaft, and at least one measuring device is multiple, with at least two measuring devices being distributed along the axial direction of the output shaft at intervals, and the position of each measuring device corresponds to the height of the hollow annular component to synchronously measure the radial distance of each hollow annular component. Multiple measuring devices are distributed along the axial direction of the output shaft at intervals, and their positions correspond to the height of the hollow annular component. They can simultaneously measure the radial distance of the hollow annular component at different heights. Through a multi-point synchronous measurement method, all height sections of the hollow annular component can be fully covered, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component. The drive device drives the mounting seat to rotate about the output shaft, so that each measuring device can measure the hollow annular component at a corresponding height from different angles. Through multi-angle measurement combined with multi-point measurement, richer data can be obtained, further improving the measurement accuracy and ensuring the reliability of the measurement results.

[0012] In one possible embodiment, at least two measuring devices are staggered along the axial direction of the mounting base. The axial staggering of the measuring devices makes the measuring points of the measuring devices not completely overlap, further improving the comprehensiveness and accuracy of the measurement and ensuring the uniformity and consistency of the measurement results.

[0013] In one possible embodiment, the drive device is used to drive the mounting seat to rise and fall axially along the output shaft, and at least one measuring device is multiple, with at least two measuring devices distributed circumferentially along the mounting seat to synchronously measure the radial distances of the same hollow annular component at different circumferential positions. The multiple measuring devices are distributed circumferentially along the mounting seat, and can synchronously measure the radial distances of the same hollow annular component at different circumferential positions. The circumferential cross-section of the hollow annular component can be fully covered through multi-point measurement, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component. The drive device drives the mounting seat to rise and fall axially along the output shaft, so that the measuring device can be flexibly adjusted according to the height position of the hollow annular component, ensuring that the measuring device and the measuring point of the component always maintain an optimal measuring distance, thereby improving the measurement accuracy and reliability. In particular, for components with different heights or layered structures, it can ensure that the measuring device is always in the optimal measuring position, thereby improving the accuracy of the measurement.

[0014] In one possible embodiment, at least two measuring devices are located on the same horizontal plane of the mounting base. Multiple measuring devices on the same horizontal plane can simultaneously measure radial distances at different circumferential locations of the same hollow annular component, significantly reducing measurement time. Placing multiple measuring devices on the same horizontal plane of the mounting base significantly improves measurement accuracy.

[0015] In one possible embodiment, the driving device is used to drive the mounting seat to rotate around the output shaft and to rise and fall along the axial direction of the output shaft;

[0016] At least one measuring device is provided, and the single measuring device is used to align with each hollow annular component in sequence under the rotation and lifting movement of the driving device to measure the radial distance of each hollow annular component;

[0017] or,

[0018] There are multiple at least one measuring device, wherein at least two measuring devices are distributed along the axial direction of the output shaft, and / or at least two measuring devices are distributed along the circumference of the mounting seat to measure the radial distance of each hollow annular component synchronously or in a time-sharing manner.

[0019] It should be noted that the drive's rotation and lifting capabilities, combined with the flexible layout of a single or multiple measuring devices, enable multi-dimensional measurement of hollow annular components. Driven by the drive, a single measuring device can sequentially align with different locations on each hollow annular component. Multiple measuring devices can simultaneously or time-share the radial distances of hollow annular components at different axial or circumferential positions, thus comprehensively covering all critical locations of the hollow annular component and improving measurement accuracy.

[0020] Exemplarily, there is one measuring device, and the rotation function of the driving device enables the single measuring device to measure the hollow annular component from multiple different angles to fully cover all orientations of the hollow annular component, thereby more accurately determining the center position and coaxiality of the hollow annular component; the axial lifting function of the driving device enables the single measuring device to be flexibly adjusted according to the height position of the hollow annular component to improve the measurement accuracy and reliability.

[0021] Exemplarily, there are multiple measuring devices, and at least two measuring devices are distributed along the axial direction of the output shaft, which can simultaneously measure the radial distance of the hollow annular component at different height positions to fully cover various height sections of the hollow annular component, thereby more accurately reflecting the overall shape characteristics and coaxiality of the hollow annular component.

[0022] Exemplarily, there are multiple measuring devices, and at least two measuring devices are distributed along the circumference of the mounting seat, which can simultaneously measure the radial distance of the same hollow annular component at different circumferential positions to fully cover the circumferential cross-section of the hollow annular component, thereby improving measurement accuracy.

[0023] Exemplarily, there are multiple measuring devices, and at least two measuring devices are distributed along the axial direction of the output shaft, and at least two measuring devices are distributed along the circumference of the mounting seat. This can simultaneously measure the radial distance of the hollow annular component at different height positions and different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle.

[0024] In one possible embodiment, at least two measuring devices are offset along the axial direction of the mounting base, and / or at least two measuring devices are located on the same horizontal plane of the mounting base. The mounting base can rotate about the output shaft and rise and fall along the axial direction of the output shaft. The measuring devices are offset along the axial direction of the mounting base, so that radial distances of hollow annular components at different heights can be measured synchronously. The measuring devices are arranged on the same horizontal plane of the mounting base, so that radial distances of different circumferential positions of the same hollow annular component can be measured synchronously. The positions of the measuring devices can be dynamically adjusted according to actual measurement requirements. By adjusting the positions of the measuring devices, multi-point measurements of the hollow annular component at different heights and circumferential positions can be performed, ensuring that the measuring devices are always aligned with key positions of the hollow annular component, thereby improving the accuracy of the measurement results.

[0025] In one possible embodiment, at least one measuring device is provided in multiple locations. At least two measuring devices are distributed axially along the base assembly to measure the hollow annular component at different heights, and at least two measuring devices are distributed circumferentially along the base assembly to measure radial distances at different circumferential locations within the same hollow annular component. The positions of the multiple measuring devices are fixed. The multiple measuring devices are distributed axially and circumferentially, enabling simultaneous measurement of radial distances at different heights and circumferential locations. This multi-point measurement approach comprehensively covers all key locations of the hollow annular component, thereby more accurately reflecting the overall shape characteristics and coaxiality of the hollow annular component.

[0026] In one possible embodiment, at least two measuring devices are staggered along the axial direction of the mounting base, and / or at least two measuring devices are located on the same horizontal plane of the mounting base. In the embodiment of the present application, since the at least two measuring devices are mounted on the mounting base and staggered along the axial direction of the mounting base, the measuring devices can partially overlap in the axial direction, thereby reducing the axial height of the mounting base and the axial size of the coaxiality tester. Moreover, since the at least two measuring devices are located at different positions on the same horizontal plane, the driving device can measure the distance around the hollow annular component without rotating 360 degrees, thereby improving the efficiency of the coaxiality test of the hollow annular component.

[0027] In one possible embodiment, at least two measuring devices are evenly distributed along the circumference of the mounting base. The evenly distributed measuring devices ensure uniformity of the measuring points along the circumference, more accurately reflecting the shape changes of the hollow annular component along the circumference, thereby improving the overall accuracy of the measurement results.

[0028] In one possible embodiment, the driving device includes a lifting device for driving the mounting base to rise and fall, and a rotating device for driving the mounting base to rotate, wherein the lifting device is connected to the rotating device. The lifting device drives the mounting base and the measuring device thereon to move in synchronous elevation, while the rotating device drives the mounting base and the measuring device thereon to move in synchronous rotation. The cooperation of the lifting device and the rotating device enables coaxiality measurement of hollow annular assemblies at different angles and heights.

[0029] In one possible embodiment, the lifting device includes a screw and a screw nut, the screw nut being fixed to a fixing base, the screw being connected to the mounting base, and a locking nut being provided on the screw. By rotating the screw, the threads of the screw and the screw nut engage, converting the screw's rotational motion into its own linear lifting motion, thereby achieving the lifting and lowering of the mounting base. To ensure the height stability of the screw after it is lifted into position, a locking nut is added to the screw so that the screw can be locked in its current position by the locking nut after it is lifted into position, and the screw will not float up and down due to the rotational motion of the mounting base.

[0030] For example, the lead screw is engraved with spiral teeth (also known as threads), and the lead nut is embedded with spiral grooves that match the lead screw threads. When the lead screw rotates, the lead nut moves linearly along the lead screw's axial direction. However, in this application, the lead screw nut is fixed to a fixed seat, so the lead screw moves up and down along its own axial direction. By controlling the direction and speed of the lead screw's rotation, precise control of the lifting motion can be achieved.

[0031] In one possible embodiment, the rotating device includes a sliding bearing, and the mounting base is rotatably connected to the end of the first screw distal from the fixed base via the sliding bearing. The provision of the sliding bearing for rotatably connecting the mounting base to the screw can reduce noise and wear during rotation of the mounting base, thereby extending its lifespan.

[0032] In a second aspect, the present application provides a coaxiality testing system, comprising:

[0033] A coaxiality tester as described in any one of the above items;

[0034] The correction tool is used to install the coaxiality tester in the correction tool before the coaxiality tester detects the coaxiality of at least one hollow annular component arranged around the chuck, so as to calibrate the coaxiality tester.

[0035] Calibrating the coaxiality tester by means of the calibration fixture can ensure that the coaxiality tester has more accurate measurement results when detecting the coaxiality of hollow annular components.

[0036] In one possible embodiment, one of the calibration fixture and the coaxiality tester is provided with a locating hole, and the other is provided with a removable second locating pin, which is insertable and removable in the locating hole. The combination of the locating hole and the second locating pin enables quick and accurate positioning. When installing the coaxiality tester on the calibration fixture, the operator simply aligns the second locating pin with the locating hole and inserts it to ensure precise spatial connection between the two.

[0037] In a third aspect, the present application provides a coaxiality testing method for detecting the coaxiality of at least one hollow annular component disposed around a chuck using a coaxiality tester as described above, comprising:

[0038] Install the coaxiality tester on the chuck through the base assembly;

[0039] measuring a plurality of radial distances between itself and each hollow annular component by at least one measuring device in a coaxiality tester;

[0040] The data processor processes multiple radial distances to obtain the center position of each hollow annular component, and based on the center position of each hollow annular component, determines the coaxiality of each hollow annular component and the chuck or the coaxiality between multiple hollow annular components.

[0041] Through multi-point measurement and data processing, the center position of the circle is accurately calculated, measurement errors are reduced, and the reliability of the coaxiality measurement results is ensured. The measuring device of the coaxiality tester automatically measures multiple radial distances, and the data processor automatically processes the data, reducing the manual operation links and improving measurement efficiency. It can flexibly adapt to chucks and hollow ring parts of different sizes and shapes.

[0042] In a possible embodiment, before the coaxiality tester is mounted on the chuck through the base assembly, the method further includes:

[0043] Install the coaxiality tester in the calibration fixture;

[0044] Measure multiple radial distances between itself and the calibration fixture using a coaxiality tester;

[0045] The test results of the coaxiality tester are corrected based on multiple radial distances.

[0046] By correcting the measurement deviation of the coaxiality tester used in the tooling measurement, the test results of the coaxiality tester are corrected, thereby ensuring that the measurement results of the tester are more accurate when subsequently measuring hollow annular components. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0048] Figure 1 A schematic structural diagram of the first coaxiality tester provided in an embodiment of the present application;

[0049] Figure 2 for Figure 1 sectional view of

[0050] Figure 3 A schematic structural diagram of a second coaxiality tester provided in an embodiment of the present application;

[0051] Figure 4 A schematic diagram of the third coaxiality tester provided in an embodiment of the present application when in use;

[0052] Figure 5for Figure 4 A schematic structural diagram of another embodiment;

[0053] Figure 6 for Figure 1 A schematic structural diagram of a second embodiment;

[0054] Figure 7 for Figure 1 A schematic structural diagram of a third embodiment;

[0055] Figure 8 for Figure 1 A schematic structural diagram of a fourth embodiment;

[0056] Figure 9 for Figure 1 A schematic structural diagram of a fifth embodiment;

[0057] Figure 10 for Figure 1 A schematic structural diagram of a sixth embodiment;

[0058] Figure 11 for Figure 1 A schematic structural diagram of a seventh embodiment;

[0059] Figure 12 for Figure 1 Schematic diagram of calibration before use;

[0060] Figure 13 A schematic diagram of the structure of the coaxiality testing system provided in an embodiment of the present application;

[0061] Figure 14 A diagram showing the steps of the coaxiality testing method provided in an embodiment of the present application;

[0062] Figure 15 A diagram showing the steps for calibrating the coaxiality tester provided in an embodiment of the present application.

[0063] Description of reference numerals:

[0064] 100-coaxiality tester; 200-coaxiality test system;

[0065] 1-base assembly; 2-measurement device; 3-data processor; 4-first positioning pin; 5-lifting device; 6-battery module; 7-Bluetooth module; 8-driving device;

[0066] 10-chuck; 11-fixed seat; 12-mounting seat; 20-hollow annular component; 30-vacuum chamber; 40-calibration tool; 50-second positioning pin; 51-screw; 52-screw nut; 53-sliding bearing; 54-locking nut; 55-dual-rotor motor; 56-output shaft. DETAILED DESCRIPTION

[0067] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0068] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0069] The present application provides a coaxiality tester, a test system and a coaxiality test method, which are mainly used in semiconductor manufacturing equipment, including but not limited to semiconductor manufacturing and precision engineering.

[0070] Semiconductor manufacturing equipment is a core tool in the modern microelectronics industry, widely used in all aspects of chip manufacturing. These devices typically include etchers, chemical vapor deposition (CVD) equipment, physical vapor deposition (PVD) equipment, and ion implanters. While their structure and functionality are complex, they typically include the following core components: a reaction chamber, a chuck 10, an edge ring, a shadow ring, and chamber liners, a gas delivery system, a vacuum system, and a radio frequency / power supply system. Specifically, in one type of semiconductor manufacturing equipment, a chuck 10, an edge ring, a shadow ring, and chamber liners surrounding the chuck 10 are located within the reaction chamber. The reaction chamber is the core area of ​​the semiconductor manufacturing equipment and is typically located in a vacuum or low-pressure environment. This environment helps reduce impurity interference and ensures process accuracy and stability. The interior of the reaction chamber is the primary location for wafer processing, where critical processes such as thin film deposition and etching are performed. The chuck 10 is a critical component within the reaction chamber, primarily used to hold and secure the wafer. It is typically equipped with heating and cooling functions to precisely control the wafer temperature to meet the stringent temperature requirements of various processes. The stability of the chuck 10 directly impacts the quality and precision of wafer processing. The edge ring is an annular component surrounding the chuck 10. Its primary function is to homogenize plasma distribution. During plasma etching or deposition, the edge ring ensures uniform plasma energy distribution, thereby improving process uniformity and consistency. It also protects the edge of the chuck 10 from plasma erosion. The shadow ring and chamber liner are also annular components surrounding the chuck 10. The shadow ring primarily regulates the flow of process gases, ensuring uniform gas distribution across the wafer surface and improving process uniformity. The chamber liner prevents byproduct deposition on the chamber walls, preventing wafer contamination, while also maintaining the cleanliness and stability of the chamber interior. The gas delivery system is a crucial component of semiconductor manufacturing equipment, responsible for injecting process gases into the reaction chamber. These gases, such as argon (Ar) and carbon tetrafluoride (CF4), support processes like thin film deposition and etching. The precision and stability of the gas delivery system directly impact process efficiency and quality. The vacuum system maintains the low-pressure environment within the reaction chamber. Vacuuming the chamber reduces impurities and gas molecules, thereby improving process purity and precision. The performance of the vacuum system directly impacts the stability of the reaction chamber and process repeatability. The RF / power system is the energy supply component of semiconductor manufacturing equipment, primarily used to ignite the plasma or provide energy for the process. In plasma etching and certain deposition processes, the RF / power system provides high-energy plasma, enabling efficient material removal or deposition.

[0071] Since the coaxiality between the chuck 10 and components such as the edge ring, shadow ring, and cavity / liner directly affects the quality and accuracy of wafer processing, the present application provides a coaxiality tester 100 for measuring the coaxiality between the chuck 10 and components such as the edge ring, shadow ring, and cavity / liner. In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0072] Example 1

[0073] Please refer to Figure 1 A coaxiality tester 100 is used to detect the coaxiality of at least one hollow annular component 20 arranged around a chuck 10, including a base assembly 1, at least one measuring device 2 and a data processor 3. The base assembly 1 is used to be detachably fixedly connected to the chuck 10, and the at least one measuring device 2 is installed on the outer circumference of the base assembly 1, and is used to measure multiple radial distances between itself and each hollow annular component 20; the data processor 3 is used to obtain the center position of each hollow annular component 20 according to the multiple radial distances to determine the coaxiality of each hollow annular component 20 and the chuck 10 or the coaxiality between multiple hollow annular components 20. By directly measuring multiple radial distances from the hollow annular component 20 through a measuring instrument 2 installed on the outer periphery of the mounting seat 12 and combining it with the calculation of the center position of the circle by the data processor 3, the coaxiality of a single hollow annular component 20 and the chuck 10 can be detected with high precision. This method can flexibly adapt to chucks 10 and hollow annular components 20 of different sizes (such as preheating rings, focusing rings, etc.) to meet the diverse testing needs of semiconductor equipment. In addition, by increasing or decreasing the number of measuring instruments 2 or adjusting their layout, it can support single-ring or multi-ring synchronous testing, and has strong scalability.

[0074] In some embodiments, the base assembly 1 includes a fixed seat 11, the bottom of the fixed seat 11 is provided with a detachable first locating pin 4, and the chuck 10 is provided with a locating hole that cooperates with the first locating pin 4. When in use, the first locating pin 4 is installed in the mounting hole at the bottom of the fixed seat 11, and then the first locating pin 4 of the installed fixed seat 11 is inserted into the locating hole of the chuck 10, so that the two can be effectively connected. This connection method is convenient and fast, and the connection efficiency is high. In some embodiments, the chuck 10 is provided with a detachable first locating pin 4, the bottom of the fixed seat 11 is provided with a locating hole that cooperates with the first locating pin 4. When in use, the first locating pin 4 is installed in the mounting hole of the chuck 10, and then the first locating pin 4 of the installed chuck 10 is inserted into the locating hole of the fixed seat 11, so that the two can be effectively connected. In some embodiments, the fixed seat 11 and the chuck 10 can also be connected by bolts, or by flanges, etc., which can achieve a detachable connection between the two. Other detachable connection methods can also be used, and there is no limitation on this.

[0075] It should be noted that at least one measuring device 2 is installed on the outer surface of the base assembly 1, at least one measuring device 2 is fixedly connected to the base assembly 1, the measuring direction of the measuring device 2 is toward each hollow annular component 20, and the minimum distance between at least one measuring device 2 and each hollow annular component 20 is not less than the limit measuring distance of the measuring device 2.

[0076] It should be noted that the data processor 3 first converts the collected multiple radial distance data into distance data in a rectangular coordinate system, and then solves the center position of each hollow annular component 20; based on the difference between the center position of each hollow annular component 20 and the center position of the chuck 10, the coaxiality of each hollow annular component 20 and the chuck 10 is determined, or based on the difference in the center position of each hollow annular component 20, the coaxiality between each hollow annular component 20 is determined.

[0077] In some embodiments, please refer to Figure 2 The base assembly 1 also includes a mounting seat 12 and a driving device 8 mounted on the fixed seat 11. The output shaft 56 of the driving device 8 is connected to the mounting seat 12. At least one measuring device 2 is mounted on the outer periphery of the mounting seat 12. By setting the mounting seat 12, a basis is provided for the installation of the measuring device 2, and the connection between the measuring device 2 and the chuck 10 is realized. The measuring device 2 can monitor in real time the multiple radial distances between the chuck 10 and the various hollow annular components 20 surrounding the outer periphery of the chuck 10. The data processor 3 is used to obtain the center position of each hollow annular component 20 based on the multiple radial distances to determine the coaxiality of each hollow annular component 20 and the chuck 10 or the coaxiality between multiple hollow annular components 20.

[0078] It should be noted that the coaxial arrangement of the fixed base 11, the mounting base 12, and the output shaft 56 of the drive device 8 can ensure smooth movement between the output shaft 56 of the drive device 8 and the mounting base 12, reduce vibration and noise caused by eccentricity or misalignment, and significantly improve positioning accuracy. In equipment that requires high-precision positioning, such as CNC machine tools or high-precision testing equipment, the coaxial arrangement can ensure the positioning accuracy of the equipment and meet strict process requirements. In equipment with high requirements for the operating environment, such as precision measuring instruments or semiconductor processing equipment, the coaxial arrangement can provide a quieter and more stable operating environment.

[0079] Furthermore, the first locating pins 4 can be set to three. The triangular structure formed between the three first locating pins 4 can ensure that the connection between the fixed seat 11 and the chuck 10 is more stable, and effectively reduce the shaking or displacement caused by external force or vibration. If only one or two first locating pins 4 are set, too few connection points may cause structural instability, which is prone to rotation or shaking. Although setting more than three first locating pins 4 can also provide stability, it will increase the complexity of the structure and the processing cost, and in some cases may lead to excessive constraints, which in turn affects the flexibility of installation. At the same time, the number, size and setting position of the locating holes are set according to the specifications of the first locating pins 4.

[0080] It should be noted that the cross-sectional shape of the fixing seat 11 can be circular, rectangular, polygonal, etc., without limitation. Preferably, the fixing seat 11 is disc-shaped. The disc-shaped structure has a high degree of symmetry. This symmetry enables the fixing seat 11 to evenly distribute stress when subjected to force, avoiding local stress concentration caused by structural asymmetry. When connected to the chuck 10, no matter what the shape of the chuck 10 is, the disc-shaped fixing seat 11 can provide stable support, reduce shaking or vibration caused by shape mismatch, and thus ensure the accuracy of measurement. Moreover, the chuck 10 is generally used to clamp circular or annular parts. The disc-shaped fixing seat 11 is highly matched with the circular cross-sectional shape of the chuck 10, and can better cooperate with the chuck 10 to achieve fast and accurate connection. Especially in semiconductor equipment, the chuck 10 is used to fix wafers or other circular parts. The disc-shaped fixing seat 11 can better adapt to this circular structure and ensure the tightness and stability of the connection.

[0081] Furthermore, the drive device 8 is used to drive the mounting seat 12 to rotate about the output shaft 56 and / or to elevate and lower the mounting seat 12 axially along the output shaft 56. Exemplarily, the drive device 8 is used to drive the mounting seat 12 to rotate about the output shaft 56, enabling the measuring device 2 to measure the hollow annular component 20 from multiple different angles, thereby obtaining more comprehensive radial distance data and improving measurement accuracy. Exemplarily, the drive device 8 is used to drive the mounting seat 12 to elevate and lower the mounting seat 12 axially along the output shaft 56, enabling the measuring device 2 to flexibly adjust according to the height position of the hollow annular component 20, ensuring that the measuring device 2 can adapt to the coaxiality measurement of hollow annular components 20 at different heights, thereby improving measurement accuracy. Exemplarily, the drive device 8 is used to drive the mounting seat 12 to rotate about the output shaft 56 and to elevate and lower the mounting seat 12 axially along the output shaft 56, enabling the measuring device 2 to measure the hollow annular component 20 from multiple different angles and multiple different heights, adapting to hollow annular components 20 of different sizes and heights, improving the versatility and practicality of the device, and facilitating the user to perform coaxiality testing on various types of components.

[0082] In one possible implementation, please refer to Figure 3The drive device 8 is only used to drive the mounting base 12 to rotate about the output shaft 56. There are at least one measuring device 2, or multiple measuring devices 2, with at least two measuring devices 2 spaced apart along the axial direction of the output shaft 56. The position of each measuring device 2 corresponds to the height of the hollow annular component 20, so as to synchronously measure the radial distance of each hollow annular component 20. By driving the mounting base 12 to rotate about the output shaft 56 via the drive device 8, the measuring devices 2 can measure the hollow annular component 20 from multiple different angles, fully covering all directions of the hollow annular component 20 and obtaining more comprehensive radial distance data, thereby more accurately determining the center position and coaxiality of the hollow annular component 20 and improving measurement accuracy. In this embodiment, the measuring device 2 can be set to be multiple, and the multiple measuring devices 2 are distributed axially along the output shaft 56 at intervals, and the positions correspond to the height of the hollow annular component 20. The radial distance of the hollow annular component 20 at different height positions can be measured simultaneously. Through the multi-point synchronous measurement method, the various height sections of the hollow annular component 20 can be fully covered, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component.

[0083] In some embodiments, the mounting base 12 is a cylindrical structure with a plurality of measuring devices 2 disposed on its outer periphery. The measuring devices 2 are spaced apart along the axial direction of the mounting base 12 (i.e., the direction of the central axis of the mounting base 12). For example, there are three hollow annular components 20 whose coaxiality is to be measured, and the mounting heights are 20 mm, 50 mm, and 80 mm, respectively. To facilitate simultaneous coaxiality measurement of the three hollow annular components 20, three measuring devices 2 corresponding to the heights of the hollow annular components 20 are mounted on the mounting base 12, with the first measuring device 2 mounted at a height of 20 mm, the second measuring device 2 mounted at a height of 50 mm, and the third measuring device 2 mounted at a height of 80 mm. This allows simultaneous coaxiality measurement of the three hollow annular components 20. By driving the mounting base 12 to rotate about the output shaft 56 via the drive device 8, the three measuring devices 2 can measure their respective hollow annular components 20 from multiple different angles. This fully covers all aspects of the hollow annular component 20, acquiring more comprehensive radial distance data. This allows for more accurate determination of the center position and coaxiality of the hollow annular component 20, thereby improving measurement accuracy. For example, if the hollow annular component 20 whose coaxiality is to be measured varies in height, multiple measuring devices 2 can be positioned axially along the mounting base 12, with the first measuring device 2 measuring the radial distance at a height of 20 mm, the second measuring device 2 measuring the radial distance at a height of 50 mm, and the third measuring device 2 measuring the radial distance at a height of 80 mm. This multi-height coverage method comprehensively reflects the overall shape characteristics of the hollow annular component 20, avoiding the biased nature of single-height measurements.

[0084] Furthermore, the measuring devices 2 can be staggered along the axial direction of the mounting base 12 so that the measurement points of each measuring device 2 do not completely overlap, further improving the comprehensiveness and accuracy of the measurement and ensuring the uniformity and consistency of the measurement results. In some embodiments, the mounting base 12 is a cylindrical structure with multiple measuring devices 2 disposed on its outer circumference. The measuring devices 2 are staggered along the axial direction of the mounting base 12 (i.e., along the central axis of the mounting base 12). For example, the height of the mounting base 12 is 100 mm, and the number of measuring devices 2 is 3. The first measuring device 2 is installed at a height position H1 = 20 mm, the second measuring device 2 is installed at a height position H2 = 50 mm, and the third measuring device 2 is installed at a height position H3 = 80 mm. The projections of the three measuring devices 2 along the axial direction of the mounting base 12 do not overlap, resulting in a staggered distribution. However, in actual applications, the three measuring devices 2 can also be arranged so that their projections along the axial direction of the mounting base 12 overlap.

[0085] On this basis, multiple measuring devices 2 can be installed on the same horizontal surface of the mounting base 12. These multiple measuring devices 2 on the same horizontal surface can simultaneously measure the radial distances at different circumferential locations of the same hollow annular component 20, significantly reducing measurement time. Furthermore, by having multiple measuring devices 2 operating simultaneously, the error that might be introduced by a single measuring device 2 can be reduced, thereby improving overall measurement accuracy. For example, three measuring devices 2 can be installed on the same horizontal surface of the mounting base 12, with the three measuring devices 2 equally spaced so that the angle between adjacent measuring devices 2 is 60°. Alternatively, the three measuring devices 2 can be unequally spaced and distributed on the same horizontal surface of the mounting base 12.

[0086] In another possible implementation, please refer to Figure 4 and Figure 5The drive device 8 is used to drive the mounting seat 12 to rise and fall axially along the output shaft 56. At least one measuring device 2 is provided in a plurality, and at least two measuring devices 2 are distributed circumferentially along the mounting seat 12 to synchronously measure the radial distances at different circumferential positions of the same hollow annular component 20. By driving the mounting seat 12 to rise and fall axially along the output shaft 56 by the drive device 8, the measuring device 2 can be flexibly adjusted according to the height position of the hollow annular component 20, ensuring that the measuring device 2 can adapt to the coaxiality measurement of hollow annular components 20 at different heights, thereby improving the accuracy of the measurement. In this embodiment, the measuring device 2 can be provided in a plurality, and the plurality of measuring devices 2 are distributed at intervals along the circumference of the mounting seat 12, so as to synchronously measure the radial distances at different circumferential positions of the same hollow annular component 20, greatly reducing the measurement time. The circumferential cross-section of the hollow annular component 20 can be fully covered by the multi-point measurement method, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component. The driving device 8 drives the mounting seat 12 to rise and fall axially along the output shaft 56, so that the measuring instrument 2 can be flexibly adjusted according to the height position of the hollow annular component 20, ensuring that the measuring instrument 2 and the measuring point of the component always maintain the optimal measuring distance, thereby improving the measurement accuracy and reliability, especially for components with different heights or layered structures, it can ensure that the measuring instrument 2 is always in the optimal measuring position, thereby improving the accuracy of the measurement.

[0087] In some embodiments, the mounting base 12 is a cylindrical structure with a plurality of measuring devices 2 disposed on its outer circumference. The measuring devices 2 are spaced apart along the circumference of the mounting base 12. For example, the diameter of the mounting base 12 is 150 mm, and the number of measuring devices 2 is four. The measuring devices 2 are evenly distributed along the circumference of the mounting base 12, with the angle between adjacent measuring devices 2 being 90°. The specific positions are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting base 12), the second measuring instrument 2 is installed at the 90° position (i.e., to the right of the mounting base 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting base 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., to the left of the mounting base 12). The four measuring instruments 2 respectively measure the radial distances at the 0°, 90°, 180°, and 270° positions, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring the uniformity of the measurement points in the circumferential direction, and more accurately reflecting the shape changes of the hollow annular component 20 in the circumferential direction, thereby avoiding errors caused by insufficient measurement points. By driving the mounting base 12 to rise and fall axially along the output shaft 56 via the drive device 8, the measuring instruments 2 can perform measurements at different height positions, further covering all height cross-sections of the hollow annular component 20 and ensuring the comprehensiveness of the measurement results.

[0088] Furthermore, the measuring device 2 is located on the same horizontal plane of the mounting base 12, and can simultaneously measure the radial distances of different circumferential positions at the same height position. This synchronous measurement method greatly reduces the measurement time and improves the measurement efficiency and measurement accuracy.

[0089] In another possible implementation, please refer to Figures 6 to 9 , the driving device 8 is used to drive the mounting seat 12 to rotate around the output shaft 56 and to rise and fall along the axial direction of the output shaft 56;

[0090] There is at least one measuring device 2, and the single measuring device 2 is used to align with each hollow annular component 20 in sequence under the rotation and lifting movement of the driving device 8 to measure the radial distance of each hollow annular component 20;

[0091] or,

[0092] There are multiple measuring devices 2, wherein at least two measuring devices 2 are distributed along the axial direction of the output shaft 56, and / or at least two measuring devices 2 are distributed along the circumferential direction of the mounting seat 12, so as to measure the radial distance of each hollow annular component 20 synchronously or in a time-sharing manner.

[0093] It should be noted that the driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and move up and down along the axial direction of the output shaft 56, so that the measuring device 2 can measure the hollow annular component 20 from multiple different angles and multiple different heights, and can adapt to hollow annular components 20 of different sizes and heights, thereby improving the versatility and practicality of the equipment and facilitating users to perform coaxiality tests on various types of components.

[0094] Further, in a possible implementation, please refer to Figure 6The driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56, and the measuring instrument 2 can be set as one. The mounting seat 12 is a cylindrical structure, and a single measuring instrument 2 is installed on the outer periphery of the mounting seat 12. In order to facilitate the single measuring instrument 2 to measure the hollow annular component 20 with the lowest installation height, the measuring instrument 2 is installed in a position that can cover the hollow annular component 20 with the lowest installation height, and at the same time ensure that the driving device 8 can drive the measuring instrument 2 to rise to the position of the hollow annular component 20 with the highest installation height. Driven by the rotation and lifting motion of the drive unit 8, a single measuring device 2 is used to sequentially align with each hollow annular component 20 to measure the radial distance of each hollow annular component 20. Specifically, the rotation function of the drive unit 8 enables the single measuring device 2 to measure the same hollow annular component 20 from multiple different angles, comprehensively covering all aspects of the same hollow annular component 20, accurately reflecting the overall shape characteristics and coaxiality of the component, and thus more accurately determining the center position and coaxiality of the hollow annular component 20. The axial lifting function of the drive unit 8 enables the single measuring device 2 to be flexibly adjusted according to the height position of each hollow annular component 20, sequentially measuring the radial distance of the hollow annular component 20 at different height positions, comprehensively covering all height sections of the hollow annular component 20, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component, and improving the measurement accuracy and reliability. At the same time, the single-sensor solution avoids the complex calibration issues inherent in multi-sensor systems while ensuring measurement accuracy by optimizing the measurement path and algorithm compensation. The streamlined hardware configuration reduces the number of mechanical components, lowers assembly difficulty and maintenance costs, and makes the entire measurement system more economical and reliable.

[0095] In one possible implementation, please refer to Figure 7The driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56, and the measuring device 2 can be set to multiple. The mounting seat 12 is a cylindrical structure, wherein at least two measuring devices 2 are distributed at intervals along the axial direction of the output shaft 56. In order to facilitate the two measuring devices 2 to measure the hollow annular component 20 at the lowest installation height and the highest installation height, the measuring device 2 is installed at a position where the hollow annular component 20 at the lowest installation height and the highest installation height can be measured by the driving device 8. By setting up two measuring devices 2, the radial distance of the hollow annular component 20 at different height positions can be measured simultaneously. The multi-point synchronous measurement method can fully cover the various height sections of the hollow annular component 20, thereby more accurately reflecting the parts. The overall shape characteristics and coaxiality of the component are measured; the rotation function of the drive device 8 enables multiple measuring instruments 2 to simultaneously measure the hollow annular component 20 at different heights from multiple different angles, comprehensively covering all directions of each hollow annular component 20, accurately reflecting the overall shape characteristics and coaxiality of the component, and thus more accurately determining the center position and coaxiality of each hollow annular component 20; the axial lifting function of the drive device 8 enables multiple measuring instruments 2 to be flexibly adjusted according to the height position of each hollow annular component 20, sequentially measuring the radial distance of the hollow annular component 20 at different height positions, and comprehensively covering all height cross-sections of the hollow annular component 20, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component, thereby improving the accuracy and reliability of the measurement. Furthermore, each measuring instrument 2 can be axially offset along the mounting base 12, so that the projections of each measuring instrument 2 along the axial direction of the mounting base 12 do not completely overlap, further improving the comprehensiveness and accuracy of the measurement and ensuring the uniformity and consistency of the measurement results.

[0096] In one possible implementation, please refer to Figure 8The driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56, and the measuring device 2 can be set to multiple. The mounting seat 12 is a cylindrical structure, wherein at least two measuring devices 2 are distributed along the circumference of the mounting seat 12, and can synchronously measure the radial distance of the same hollow annular component 20 at different circumferential positions to fully cover the circumferential cross-section of the hollow annular component 20, thereby greatly reducing the measurement time. Through multi-point measurement, the circumferential section of the hollow annular component 20 can be fully covered, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component; the rotation function of the drive device 8 enables multiple measuring instruments 2 to measure the hollow annular component 20 at the same height from multiple different angles at the same time, so as to fully cover all directions of the hollow annular component 20, accurately reflect the overall shape characteristics and coaxiality of the component, and thus more accurately determine the center position and coaxiality of the hollow annular component 20; the axial lifting function of the drive device 8 enables multiple measuring instruments 2 to be flexibly adjusted according to the height position of each hollow annular component 20, and measure the radial distance of the hollow annular component 20 at different height positions in turn, which can fully cover all height sections of the hollow annular component 20, thereby more accurately reflecting the overall shape characteristics and coaxiality of the component, so as to improve the measurement accuracy and reliability. Furthermore, each measuring device 2 can be set on the same horizontal plane of the mounting seat 12. Multiple measuring devices 2 on the same horizontal plane can synchronously measure the radial distances of different circumferential positions of the same hollow annular component 20, which greatly reduces the measurement time. Multiple measuring devices 2 are set on the same horizontal plane of the mounting seat 12, which significantly improves the measurement accuracy.

[0097] In one possible implementation, please refer to Figure 9The driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56. The measuring device 2 can be set to multiple, and at least two measuring devices 2 are distributed along the axial direction of the output shaft 56, and at least two measuring devices 2 are distributed along the circumference of the mounting seat 12. For example, the mounting seat 12 is a cylindrical structure with a diameter of 150 mm and a height of 100 mm. The measuring devices 2 are set to two groups, which are located at different height positions of the mounting seat 12. The first group of measuring devices 2 is located at a height of H1 = 30 mm. The second group of measuring devices 2 is located at a height of H2 = 70 mm. Each group of measuring devices 2 is evenly distributed along the circumference of the mounting seat 12, and each group contains 4 measuring devices 2. The angle between adjacent measuring devices 2 is 90°. The specific positions of the first group of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting seat 12), the second measuring instrument 2 is installed at the 90° position (i.e., on the right side of the mounting seat 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting seat 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., on the left side of the mounting seat 12). The four measuring instruments 2 measure the radial distances at the 0°, 90°, 180°, and 270° positions respectively, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring the uniformity of the measuring points in the circumferential direction, and more accurately reflecting the shape changes of the hollow annular component 20 in the circumferential direction, thereby avoiding errors caused by insufficient measurement points. The specific positions of the second set of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting base 12); the second measuring instrument 2 is installed at the 90° position (i.e., to the right of the mounting base 12); the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting base 12); and the fourth measuring instrument 2 is installed at the 270° position (i.e., to the left of the mounting base 12). The four measuring instruments 2 respectively measure the radial distance at the 0°, 90°, 180°, and 270° positions, fully covering the circumferential cross-section of the hollow annular component 20. This ensures uniformity of the measurement points along the circumference and more accurately reflects the circumferential shape changes of the hollow annular component 20. The two sets of measuring instruments 2 can simultaneously measure the radial distance of the hollow annular component 20 at different heights and different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle.

[0098] In some embodiments, please refer to Figure 10The driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56. The measuring device 2 can be set to multiple, and at least two measuring devices 2 are distributed along the axial direction of the output shaft 56, at least two measuring devices 2 are distributed along the circumference of the mounting seat 12, and at least two measuring devices 2 can be set to be axially staggered along the mounting seat 12. For example, the mounting seat 12 is a cylindrical structure with a diameter of 150 mm and a height of 100 mm. The measuring devices 2 are set to two groups, which are located at different height positions of the mounting seat 12. The first group of measuring devices 2 is located at a height of H1 = 30 mm. The second group of measuring devices 2 is located at a height of H2 = 70 mm. Each group of measuring devices 2 is evenly distributed along the circumference of the mounting seat 12, and each group contains 4 measuring devices 2, and the angle between adjacent measuring devices 2 is 90°. The specific positions of the first group of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting seat 12), the second measuring instrument 2 is installed at the 90° position (i.e., on the right side of the mounting seat 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting seat 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., on the left side of the mounting seat 12). The four measuring instruments 2 measure the radial distances at the 0°, 90°, 180°, and 270° positions respectively, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring the uniformity of the measuring points in the circumferential direction, and more accurately reflecting the shape changes of the hollow annular component 20 in the circumferential direction, thereby avoiding errors caused by insufficient measurement points. The specific positions of the second set of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 45° position (i.e., directly in front of the mounting base 12 to the right); the second measuring instrument 2 is installed at the 135° position (i.e., directly behind the mounting base 12 to the right); the third measuring instrument 2 is installed at the 215° position (i.e., directly behind the mounting base 12 to the left); and the fourth measuring instrument 2 is installed at the 305° position (i.e., directly in front of the mounting base 12 to the left). These four measuring instruments 2 measure radial distances at the 45°, 135°, 215°, and 305° positions, respectively. This fully covers the circumferential cross-section of the hollow annular component 20, ensuring uniformity of the measurement points along the circumference and more accurately reflecting the circumferential shape changes of the hollow annular component 20. The two sets of measuring instruments 2 can simultaneously measure the radial distances of the hollow annular component 20 at different heights and at different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle.

[0099] In some embodiments, the driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56. The measuring device 2 can be set to multiple, and at least two measuring devices 2 are distributed along the axial direction of the output shaft 56, and at least two measuring devices 2 are distributed along the circumference of the mounting seat 12. At least two measuring devices 2 can be set on the same horizontal plane of the mounting seat 12. For example, the mounting seat 12 is a cylindrical structure with a diameter of 150 mm and a height of 100 mm. The measuring devices 2 are set to two groups, which are located at different height positions of the mounting seat 12. The first group of measuring devices 2 is located at a height of H1=30 mm. The second group of measuring devices 2 is located at a height of H2=70 mm. Each group contains 4 measuring devices 2, and the 4 measuring devices 2 of each group are distributed on the same horizontal plane of the mounting seat 12, and can simultaneously measure the radial distances of different circumferential positions at the same height position, thereby reducing the measurement time and improving the measurement efficiency and measurement accuracy.

[0100] In some embodiments, the driving device 8 is used to drive the mounting seat 12 to simultaneously rotate around the output shaft 56 and lift and lower along the axial direction of the output shaft 56. The measuring device 2 can be set in multiple numbers, and at least two measuring devices 2 are distributed along the axial direction of the output shaft 56, and at least two measuring devices 2 are distributed along the circumference of the mounting seat 12. At least two measuring devices 2 can be set in an axially staggered manner along the mounting seat 12, and at least two measuring devices 2 can be set on the same horizontal plane of the mounting seat 12. For example, the mounting seat 12 is a cylindrical structure with a diameter of 150 mm and a height of 100 mm. The measuring devices 2 are set in two groups, which are respectively located at different height positions of the mounting seat 12. The first group of measuring devices 2 is located at a height of H1=30 mm. The second group of measuring devices 2 is located at a height of H2=70 mm. Each group contains 4 measuring devices 2, and the 4 measuring devices 2 of each group are distributed on the same horizontal plane of the mounting seat 12. The specific positions of the first group of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting seat 12), the second measuring instrument 2 is installed at the 90° position (i.e., on the right side of the mounting seat 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting seat 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., on the left side of the mounting seat 12). The four measuring instruments 2 measure the radial distances at the 0°, 90°, 180°, and 270° positions respectively, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring the uniformity of the measuring points in the circumferential direction, and more accurately reflecting the shape changes of the hollow annular component 20 in the circumferential direction, thereby avoiding errors caused by insufficient measurement points. The specific positions of the second set of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 45° position (i.e., directly in front of the mounting base 12 to the right); the second measuring instrument 2 is installed at the 135° position (i.e., directly behind the mounting base 12 to the right); the third measuring instrument 2 is installed at the 215° position (i.e., directly behind the mounting base 12 to the left); and the fourth measuring instrument 2 is installed at the 305° position (i.e., directly in front of the mounting base 12 to the left). These four measuring instruments 2 measure radial distances at the 45°, 135°, 215°, and 305° positions, respectively. This fully covers the circumferential cross-section of the hollow annular component 20, ensuring uniformity of the measurement points along the circumference and more accurately reflecting the circumferential shape changes of the hollow annular component 20. The two sets of measuring instruments 2 can simultaneously measure the radial distances of the hollow annular component 20 at different heights and at different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle. When the driving device 8 drives the mounting seat 12 to rotate around the output shaft 56 and rise and fall along the axial direction of the output shaft 56, the measuring device 2 can synchronously measure the radial distances of the hollow annular components 20 at different heights and the radial distances of the same hollow annular component 20 at different circumferential positions.Among them, the position of the measuring instrument 2 can be dynamically adjusted according to actual measurement requirements. By adjusting the position of the measuring instrument 2, multi-point measurements of the hollow annular component 20 can be performed at different heights and circumferential positions, ensuring that the measuring instrument 2 is always aligned with the key position of the hollow annular component 20, which can improve the accuracy of the measurement results.

[0101] Based on the above embodiment, when multiple measuring instruments 2 are provided on the same horizontal plane of the mounting seat 12, the multiple measuring instruments 2 can be evenly distributed along the circumference of the mounting seat 12 to ensure the uniformity of the measuring points in the circumferential direction, which can more accurately reflect the shape changes of the hollow annular component 20 in the circumferential direction, thereby improving the overall accuracy of the measurement results. For example, when two measuring instruments 2 are provided on the same horizontal plane of the mounting seat 12, the two measuring instruments 2 are evenly distributed along the circumference of the mounting seat 12, and the angle between the two measuring instruments 2 on the same horizontal plane of the mounting seat 12 is 180 degrees; when four measuring instruments 2 are provided on the same horizontal plane of the mounting seat 12, the four measuring instruments 2 are evenly distributed along the circumference of the mounting seat 12, and the angle between two adjacent measuring instruments 2 on the same horizontal plane of the mounting seat 12 is 90 degrees; and so on. The number of measuring instruments 2 can also be three, five, etc., and there is no limitation on this.

[0102] It should be noted that the rotation and lifting functions of the drive device 8, combined with the flexible layout of a single or multiple measuring devices 2, enable multi-dimensional measurement of the hollow annular component 20. Driven by the drive device 8, a single measuring device 2 can be aligned sequentially with different positions of each hollow annular component 20. Multiple measuring devices 2 can simultaneously or time-sharedly measure the radial distances of the hollow annular component 20 at different axial or circumferential positions, thereby comprehensively covering all key locations of the hollow annular component 20 and improving measurement accuracy. When multiple measuring devices 2 are configured to operate simultaneously, the error that could be introduced by a single measuring device 2 can be reduced, improving overall measurement accuracy. The use of multiple measuring devices 2 can also mitigate the risk of failure of a single measuring device 2, enhancing system stability. Furthermore, the use of multiple measuring devices 2 is more suitable for rapid testing on production lines, helping to improve production efficiency. Using multiple measuring devices 2 to measure the coaxiality of hollow annular components 20 not only improves measurement accuracy and stability, but also simplifies the operational process and better meets the efficiency requirements of modern industrial production.

[0103] In one possible implementation, please refer to Figure 11At least one measuring device 2 is provided in multiple configurations, with at least two measuring devices 2 distributed axially along the base assembly 1 to measure the hollow annular component 20 at different heights. Furthermore, at least two measuring devices 2 are distributed circumferentially along the base assembly 1 to measure radial distances at different circumferential locations within the same hollow annular component 20. In this embodiment, the measuring devices 2 are fixed in position and distributed axially and circumferentially along the base assembly 1, enabling rapid and simultaneous measurement of radial distances at different heights and circumferential locations. This multi-dimensional coverage approach comprehensively reflects the overall shape characteristics of the hollow annular component 20, avoiding the biased nature of measurements taken at a single height or angle. In this embodiment, the fixed measuring devices 2 remain in the same position for each measurement, ensuring consistent and repeatable measurement data and improving the reliability and credibility of the measurement results. Furthermore, the fixed position of the measuring devices 2 avoids mechanical errors caused by the movement of the drive device 8. For example, without errors from lifting or rotating motion, the measuring devices 2 remain in a stable position, enabling more accurate radial distance measurements. This also reduces the number of mechanical components, complexity, and manufacturing costs of the device.

[0104] In some embodiments, the base assembly 1 includes a fixed base 11 and a mounting base 12 disposed on the fixed base 11. The mounting base 12 is coaxially disposed with the fixed base 11 and is cylindrical with a diameter of 150 mm and a height of 100 mm. Two sets of measuring instruments 2 are provided, each located at different heights of the mounting base 12. The first set of measuring instruments 2 is located at a height H1 = 30 mm. The second set of measuring instruments 2 is located at a height H2 = 70 mm. The specific positions of the first group of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting seat 12), the second measuring instrument 2 is installed at the 90° position (i.e., on the right side of the mounting seat 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting seat 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., on the left side of the mounting seat 12). The four measuring instruments 2 measure the radial distances at the 0°, 90°, 180°, and 270° positions respectively, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring the uniformity of the measuring points in the circumferential direction, and more accurately reflecting the shape changes of the hollow annular component 20 in the circumferential direction, thereby avoiding errors caused by insufficient measurement points. The specific positions of the second set of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting base 12); the second measuring instrument 2 is installed at the 90° position (i.e., to the right of the mounting base 12); the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting base 12); and the fourth measuring instrument 2 is installed at the 270° position (i.e., to the left of the mounting base 12). The four measuring instruments 2 respectively measure the radial distance at the 0°, 90°, 180°, and 270° positions, fully covering the circumferential cross-section of the hollow annular component 20. This ensures uniformity of the measurement points along the circumference and more accurately reflects the circumferential shape changes of the hollow annular component 20. The two sets of measuring instruments 2 can simultaneously measure the radial distance of the hollow annular component 20 at different heights and different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle.

[0105] In some embodiments, at least one measuring device 2 is provided in a plurality of configurations, with at least two measuring devices 2 distributed axially along the base assembly 1 to measure hollow annular components 20 at different heights. Furthermore, at least two measuring devices 2 are distributed circumferentially along the base assembly 1 to measure radial distances at different circumferential positions of the same hollow annular component 20, and at least two measuring devices 2 are axially offset relative to the mounting base 12. In this embodiment of the present application, at least two measuring devices 2 are axially offset relative to the mounting base 12, allowing each measuring device 2 to partially overlap axially, thereby reducing the axial height of the mounting base 12 and the axial dimensions of the coaxiality tester 100. For example, the mounting base 12 is cylindrical with a diameter of 150 mm and a height of 100 mm. The measuring devices 2 are arranged in two groups, each located at different heights relative to the mounting base 12. The first group of measuring devices 2 is located at a height H1 = 30 mm. The second group of measuring devices 2 is located at a height H2 = 70 mm. Each group of measuring instruments 2 is evenly distributed along the circumference of the mounting base 12, with each group containing four measuring instruments 2, and the angle between adjacent measuring instruments 2 is 90°. The specific positions of the first group of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting base 12), the second measuring instrument 2 is installed at the 90° position (i.e., to the right of the mounting base 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting base 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., to the left of the mounting base 12). The four measuring instruments 2 measure the radial distance at the 0°, 90°, 180°, and 270° positions, respectively, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring uniformity of measurement points along the circumference, and more accurately reflecting the shape changes of the hollow annular component 20 along the circumference, avoiding errors caused by insufficient measurement points. The specific positions of the second set of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 45° position (i.e., directly in front of the mounting base 12 to the right); the second measuring instrument 2 is installed at the 135° position (i.e., directly behind the mounting base 12 to the right); the third measuring instrument 2 is installed at the 215° position (i.e., directly behind the mounting base 12 to the left); and the fourth measuring instrument 2 is installed at the 305° position (i.e., directly in front of the mounting base 12 to the left). These four measuring instruments 2 measure radial distances at the 45°, 135°, 215°, and 305° positions, respectively. This fully covers the circumferential cross-section of the hollow annular component 20, ensuring uniformity of the measurement points along the circumference and more accurately reflecting the circumferential shape changes of the hollow annular component 20. The two sets of measuring instruments 2 can simultaneously measure the radial distances of the hollow annular component 20 at different heights and at different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle.

[0106] In some embodiments, at least one measuring device 2 is provided in multiple configurations. At least two measuring devices 2 are distributed axially along the base assembly 1 to measure the radial distances of the hollow annular component 20 at different heights. Furthermore, at least two measuring devices 2 are distributed circumferentially along the base assembly 1 to measure radial distances at different circumferential locations within the same hollow annular component 20. Furthermore, at least two measuring devices 2 are located on the same horizontal plane as the mounting base 12. In this embodiment, since the at least two measuring devices 2 are mounted on the mounting base 12 and located on the same horizontal plane, the drive device 8 can measure the distances around the hollow annular component 20 without rotating 360 degrees, thereby improving the efficiency of measuring the coaxiality of the hollow annular component 20. For example, the mounting base 12 is cylindrical with a diameter of 150 mm and a height of 100 mm. Two groups of measuring devices 2 are provided, each located at different heights within the mounting base 12. The first group of measuring devices 2 is located at a height H1 = 30 mm. The second group of measuring devices 2 is located at a height H2 = 70 mm. Each group includes four measuring devices 2, and the four measuring devices 2 in each group are distributed on the same horizontal plane of the mounting seat 12, and can simultaneously measure the radial distances of different circumferential positions at the same height position, thereby reducing measurement time and improving measurement efficiency and measurement accuracy.

[0107] In some embodiments, at least one measuring device 2 is provided in a plurality of configurations, with at least two measuring devices 2 being distributed axially along the base assembly 1 for measuring hollow annular components 20 at different heights. Furthermore, at least two measuring devices 2 are distributed circumferentially along the base assembly 1 for measuring radial distances at different circumferential positions of the same hollow annular component 20. Furthermore, the at least two measuring devices 2 are axially offset along the mounting base 12 and are located on the same horizontal plane of the mounting base 12. In this embodiment of the present application, since the at least two measuring devices 2 are mounted on the mounting base 12 and axially offset along the mounting base 12, the measuring devices 2 can partially overlap in the axial direction, thereby reducing the axial height of the mounting base 12 and the axial dimension of the coaxiality tester 100. Furthermore, since the at least two measuring devices 2 are located on the same horizontal plane, the driving device 8 can measure the distances around the hollow annular component 20 without rotating 360 degrees, thereby improving the efficiency of the coaxiality test of the hollow annular component 20. For example, the mounting base 12 is cylindrical with a diameter of 150 mm and a height of 100 mm. Two groups of measuring instruments 2 are provided, each located at different heights on the mounting base 12. The first group of measuring instruments 2 is located at a height H1 = 30 mm. The second group of measuring instruments 2 is located at a height H2 = 70 mm. Each group contains four measuring instruments 2, and the four measuring instruments 2 in each group are distributed on the same horizontal plane of the mounting base 12. The specific positions of the first group of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 0° position (i.e., directly in front of the mounting seat 12), the second measuring instrument 2 is installed at the 90° position (i.e., on the right side of the mounting seat 12), the third measuring instrument 2 is installed at the 180° position (i.e., directly behind the mounting seat 12), and the fourth measuring instrument 2 is installed at the 270° position (i.e., on the left side of the mounting seat 12). The four measuring instruments 2 measure the radial distances at the 0°, 90°, 180°, and 270° positions respectively, fully covering the circumferential cross-section of the hollow annular component 20, reducing measurement blind spots, ensuring the uniformity of the measuring points in the circumferential direction, and more accurately reflecting the shape changes of the hollow annular component 20 in the circumferential direction, thereby avoiding errors caused by insufficient measurement points. The specific positions of the second set of measuring instruments 2 are as follows: the first measuring instrument 2 is installed at the 45° position (i.e., directly in front of the mounting base 12 to the right); the second measuring instrument 2 is installed at the 135° position (i.e., directly behind the mounting base 12 to the right); the third measuring instrument 2 is installed at the 215° position (i.e., directly behind the mounting base 12 to the left); and the fourth measuring instrument 2 is installed at the 305° position (i.e., directly in front of the mounting base 12 to the left). These four measuring instruments 2 measure radial distances at the 45°, 135°, 215°, and 305° positions, respectively. This fully covers the circumferential cross-section of the hollow annular component 20, ensuring uniformity of the measurement points along the circumference and more accurately reflecting the circumferential shape changes of the hollow annular component 20. The two sets of measuring instruments 2 can simultaneously measure the radial distances of the hollow annular component 20 at different heights and at different circumferential positions, reducing measurement time, improving measurement efficiency, and shortening the test cycle.

[0108] In practical applications, please refer to Figure 12 Before using the coaxiality tester 100, it is necessary to calibrate the coaxiality tester 100 to ensure the coaxiality of the coaxiality tester 100 itself, thereby ensuring the accuracy of the detection results of the coaxiality tester 100. Specifically, the bottom of the fixed seat 11 is detachably connected to the correction fixture 40, and the correction fixture 40 is a cylindrical structure with a bottom. The bottom of the correction fixture 40 is provided with a positioning hole for correction. The positioning holes can be set to three, and the centers of the three positioning holes are connected in sequence on the bottom end face of the correction fixture 40 to form an equilateral triangle structure, and the center of the equilateral triangle is the center of the correction fixture 40. Before measuring the coaxiality of the hollow annular component 20, it is necessary to use the correction fixture 40 to calibrate the coaxiality tester 100 first to ensure the accuracy of the detection results of the coaxiality tester 100. Specifically, the first locating pin 4 on the mounting base 11 of the assembled coaxiality tester 100 is inserted into the locating hole of the calibration fixture 40. The measuring device 2 measures multiple radial distances between itself and the inner wall of the calibration fixture 40. Combined with the calculation of the center position of the circle by the data processor 3, the coaxiality of the coaxiality tester 100 can be detected with high precision, eliminating errors caused by the structural installation of the coaxiality tester 100 and ensuring the accuracy of the measurement results. By providing a removable first locating pin 4 at the bottom of the mounting base 11, in conjunction with the locating hole on the calibration fixture 40, it helps to reduce shaking and swinging during the measurement process, thereby improving measurement accuracy. The first locating pin 4 is configured as a removable structure to adapt to different measurement environments. After self-calibration of the coaxiality tester 100, the first positioning pin 4 on the fixing seat 11 can be directly inserted into the positioning hole of the chuck 10 to further measure the coaxiality of the chuck 10 and the hollow annular component 20; when there is no positioning hole on the workpiece to be measured, the first positioning pin 4 on the calibrated fixing seat 11 can be removed, and the fixing seat 11 can be placed on any plane of the workpiece to be measured to measure its coaxiality with the hollow annular component 20.

[0109] A first positioning pin 4 for calibration may also be provided at the bottom of the calibration fixture 40. A positioning hole is provided at the bottom of the fixing seat 11, and the first positioning pin 4 is pluggable in the positioning hole. The location of the first positioning pin 4 is similar to the location of the positioning hole on the calibration fixture 40 mentioned in the above embodiment.

[0110] It should be noted that measuring instrument 2 can be at least one of a micrometer and a laser rangefinder. This is chosen because both offer high measurement accuracy. However, in practical applications, the type of measuring instrument 2 is not limited, as long as it can achieve the aforementioned technical effects.

[0111] For example, please refer to Figure 1 When the measuring device 2 is set to a micrometer, this measurement method is contact type with high accuracy; it can be used to measure workpieces of various shapes; and the operation is simple.

[0112] Furthermore, when the measuring device 2 is configured as a micrometer, the micrometer can be fixed to the mounting base 12 by a double clamp fixing method. Preferably, two micrometers are provided, which are arranged on the same horizontal plane of the mounting base 12 and are symmetrically arranged to ensure verticality when the micrometer is fixed. During use, the micrometer is pointed at the hollow annular component 20 to be measured. By raising and lowering and rotating the micrometer to point to different positions and directions of the hollow annular component 20 to be measured, the coaxiality between the hollow annular components 20 to be measured can be measured. The principle of distance measurement with a micrometer is that the tiny linear movement of the measuring rod caused by the measured dimension is amplified by the gear transmission and converted into the rotation of the pointer on the dial, thereby reading the size of the measured dimension.

[0113] For example, please refer to Figure 2 、 Figure 3 and Figure 4 When the measuring device 2 is set as a laser distance measuring sensor, this measurement method is non-contact and will not cause damage to the hollow annular component 20 being measured; the measurement range is very wide; the laser distance measuring sensor adopts a laser straight line design, which directly reflects back to the receiver after detecting the distance, so the measured value is often error-free and has extremely high accuracy; the size is relatively small, and it does not take up a lot of space when working; it is cost-effective.

[0114] Among them, the laser ranging sensor is a contactless measurement, which can be used for the centering measurement of non-fixed parts / wearing parts, and can realize the coaxiality measurement of hollow annular parts 20 in various shapes such as square rings and circular rings.

[0115] In one possible embodiment, the drive device 8 includes a lifting device 5 for driving the mounting base 12 to rise and fall, and a rotating device for driving the mounting base 12 to rotate, with the lifting device 5 being connected to the rotating device. Specifically, the lifting device 5 drives the rotating device, the mounting base 12, and the measuring instrument 2 thereon to move in synchronous elevation, while the rotating device drives the mounting base 12 and the measuring instrument 2 thereon to move in synchronous rotation. The cooperation between the lifting device 5 and the rotating device enables coaxiality measurement of the hollow annular component 20 at various angles and heights.

[0116] In the above situation, if the measuring instrument 2 is a micrometer, the calibrated coaxiality tester 100 is directly mounted on the workpiece to be tested or the chuck 10, and the micrometer on the mounting base 12 is controlled by a rotating device to rotate, so that the measuring rod of the micrometer is moved to different positions of the hollow annular component 20 to be tested. The measuring rod will telescope due to the change in distance, which is converted into the rotation of the pointer on the dial through the gear transmission to display the size of the measured distance. Specifically, the mounting base 12 is first controlled to rotate 90 degrees, and the micrometer is used to measure the coaxiality of the workpiece to be tested or the chuck 10 and the hollow annular component 20 at the current position, and the coaxiality is manually observed and recorded; then the mounting base 12 is controlled to rotate 45 degrees, and the micrometer is used to measure the coaxiality of the workpiece to be tested or the chuck 10 and the hollow annular component 20 at the current position, and the coaxiality is manually observed and recorded. In this way, the coaxiality of the workpiece to be tested or the chuck 10 and the hollow annular component 20 is obtained.

[0117] There is no limitation on the angle of each rotation of the mounting seat 12 controlled by the rotating device, and the above is just an example.

[0118] Furthermore, when there are two or more hollow annular components 20 and they are distributed at different heights, it is necessary to control the lifting device 5 to perform lifting motion to drive the mounting base 12 to perform synchronous lifting. First, the coaxiality tester 100 is calibrated and the calibrated coaxiality tester 100 is directly mounted on the workpiece to be tested or the chuck 10 so that the micrometer contacts the inner wall of the first hollow annular component 20. The measuring rod of the micrometer will telescope due to the change in distance, which is then converted into the rotation of the pointer on the dial through the gear transmission to display the current distance size, which is manually observed and recorded. After the micrometer measures the coaxiality of the workpiece to be tested or the chuck 10 and the first hollow annular component 20, the lifting device 5 is controlled to operate to drive the mounting base 12 to rise. The mounting base 12 stops when it rises to the same height as the micrometer and the second hollow annular component 20. The above measurement process is repeated to measure the coaxiality of the workpiece to be tested or the chuck 10 and the second hollow annular component 20. Among them, if the diameter of the second hollow annular component 20 is too large, the rising micrometer measuring rod cannot contact the inner wall of the second hollow annular component 20, then the mounting seat 12 with a larger diameter can be replaced according to the inner wall diameter of the second hollow annular component 20 to complete the measurement.

[0119] In the above situation, if the measuring device 2 is a laser ranging sensor, the calibrated coaxiality tester 100 is directly installed on the workpiece to be tested or the chuck 10, and the laser ranging sensor on the mounting seat 12 is controlled by the rotating device to rotate. The laser emitted by the laser ranging sensor will be directed to different positions of the hollow annular component 20 to be measured. The target distance is determined by measuring the time required for the laser to travel back and forth to the target, and the real-time measured distance information is sent to the data processor 3, and the coaxiality of the workpiece to be tested or the chuck 10 and the hollow annular component 20 to be measured is judged by the data processor 3.

[0120] Furthermore, when there are two or more hollow annular components 20 and they are distributed at different heights, it is necessary to control the lifting device 5 to perform lifting motion to drive the mounting base 12 to perform synchronous lifting and lowering. First, the coaxiality tester 100 is calibrated and the calibrated coaxiality tester 100 is directly mounted on the workpiece to be tested or the chuck 10. At the same time, the rotation device is controlled to operate so that the laser distance sensor measures the distance between itself and the inner wall of the first hollow annular component 20 and feeds back to the data processor 3, which determines the coaxiality. After the laser distance sensor measures the coaxiality between the workpiece to be tested or the chuck 10 and the first hollow annular component 20, the lifting device 5 is controlled to operate to drive the mounting base 12 to rise. The mounting base 12 stops when it rises to the same height as the laser distance sensor and the second hollow annular component 20. The above measurement process is repeated to measure the coaxiality between the workpiece to be tested or the chuck 10 and the second hollow annular component 20.

[0121] In one possible implementation, please refer to Figure 4 The lifting device 5 includes a screw rod 51 and a screw rod nut 52. The screw rod nut 52 is fixed to the fixing base 11, and the screw rod 51 is connected to the mounting base 12. A locking nut 54 is provided on the screw rod 51. By rotating the screw rod 51, the threads of the screw rod 51 and the screw rod nut 52 are engaged, and the rotational motion of the screw rod 51 is converted into its own linear lifting motion, thereby realizing the lifting and lowering of the mounting base 12. In order to ensure the height stability of the screw rod 51 after it is lifted into place, a locking nut 54 is added to the screw rod 51 so that the screw rod 51 can be locked in its current position by the locking nut 54 after it is lifted into place, and will not float up and down due to the rotational motion of the mounting base 12.

[0122] For example, the screw 51 is engraved with spiral teeth (or threads), and the screw nut 52 is embedded with a spiral groove that matches the threads of the screw 51. When the screw 51 rotates, the screw nut 52 will move linearly along the axial direction of the screw 51. However, in the present application, the screw nut 52 is fixed to the fixed seat 11 and does not move, so the screw 51 will move up and down along its own axial direction. By controlling the rotation direction and speed of the screw 51, precise control of the lifting motion can be achieved. In addition, the lifting of the screw 51 generally has a large load-bearing capacity and can withstand large loads. This is mainly due to the spiral transmission structure between the screw 51 and the screw nut 52, as well as the close fit and strong friction between them. It should be noted that this solution is only applicable to some scenarios where the lifting motion is achieved manually. This solution has a simple structure and low cost, and is suitable for non-high-precision measurement scenarios.

[0123] In one possible embodiment, the rotating device includes a sliding bearing 53, and the mounting base 12 is rotatably connected to the end of the screw rod 51 away from the fixed base 11 via the sliding bearing 53. By providing the sliding bearing 53, the mounting base 12 and the screw rod 51 are rotatably connected, which can reduce the noise and wear generated by the mounting base 12 during rotation, thereby extending the service life. The mounting base 12 is connected to the screw rod 51 via the sliding bearing 53, and the mounting base 12 will not undergo synchronous rotational motion during the manual raising and lowering of the screw rod 51. Even if relative rotational motion occurs between the mounting base 12 and the screw rod 51, it will not affect the measurement.

[0124] It should be noted that the rotatable connection between the mounting base 12 and the screw 51 via the sliding bearing 53 can reduce noise: the sliding bearing 53 does not produce rolling noise during operation, so the noise level is low; it can improve the load-bearing capacity: the sliding bearing 53 has a high load-bearing capacity and can withstand large loads; it can extend the service life: due to the low friction coefficient of the sliding bearing 53, it has less wear and a longer service life; it can adapt to high-speed rotation: under the condition of ensuring liquid lubrication, the sliding bearing 53 can operate at high speed for a long time; it has a compact structure: the sliding bearing 53 has a small radial dimension, which can make the structure of the machine more compact; it is suitable for heavy loads: for large bearings that bear heavy loads, sliding bearings 53 are often used; it has good vibration absorption ability: the oil film of the sliding bearing 53 has good vibration absorption ability and is suitable for situations where it withstands vibration and impact loads. Connecting the mounting base 12 and the screw 51 via the sliding bearing 53 can meet the performance requirements under different working conditions.

[0125] In one possible embodiment, a locking nut 54 is provided on the screw rod 51. After the screw rod 51 is manually raised and lowered, the locking nut 54 is provided on the screw rod 51 to ensure the height stability of the screw rod 51 when the mounting base 12 is rotated. This locks the screw rod 51 in place and prevents it from floating up and down due to the rotation of the mounting base 12. In practical applications, other locking methods may also be used, and this is not limited to this.

[0126] In one possible implementation, please refer to Figure 1 and Figure 2 The lifting device 5 includes a dual-rotor motor 55 connected to the data processor 3 by signal. The dual-rotor motor 55 has two output shafts 56, and the rotation axes of the two output shafts 56 are collinear with the rotation axis of the mounting base 12. Setting the rotation axes of the two output shafts 56 of the dual-rotor motor 55 and the rotation axis of the mounting base 12 to be collinear can ensure the coaxiality of the mounting base 12 and the fixed base 11, providing a basis for measuring the measuring instrument 2 on the mounting base 12. The output shaft 56 of the dual-rotor motor 55 close to the fixed base 11 is connected to one end of the respective transmission shaft through a dual diverter, and the other end of the transmission shaft is connected to the respective screw rod 51 assembly through the diverter. The screw rod 51 assembly is driven by the drive device 8 to perform linear lifting motion, thereby driving the dual-rotor motor 55 and the mounting base 12 to synchronously lift and lower. The output shaft 56 of the dual-rotor motor 55 away from the fixed base 11 is connected to the mounting base 12. The output shaft 56 is driven by the dual-rotor motor 55 to rotate, thereby driving the mounting base 12 and the measuring instrument 2 thereon to synchronously rotate. By setting up a dual-rotor motor 55 to synchronously drive the two sets of screw rod 51 components to perform synchronous lifting and lowering movements, and at the same time drive the mounting base 12 to perform rotational movement, the overall number of parts and structure can be simplified. The lifting and rotational movements of the mounting base 12 can be controlled by simply controlling the operating state of a dual-rotor motor 55.

[0127] In the above embodiment, the coaxiality of the test piece or chuck 10 and the hollow annular component 20 to be measured is measured automatically. The data processor 3 controls the operating state of the dual-rotor motor 55, so that one output shaft 56 of the dual-rotor motor 55 drives the screw 51 to move up and down, thereby driving the dual-rotor motor 55 and the mounting base 12 thereon to move up and down synchronously. The other output shaft 56 drives the mounting base 12 to rotate, thereby achieving the coaxiality measurement of the hollow annular component 20 at different heights and angles. In this embodiment, the measuring device 2 is a laser ranging sensor. The laser ranging sensor detects the distance between itself and the inner wall of the hollow annular component 20 in real time and feeds the real-time measured distance information back to the data processor 3. The data processor 3 records and calculates the distance information measured by the laser ranging sensor to determine the coaxiality of the hollow annular component 20. When multiple hollow annular components 20 are provided, the data processor 3 can control the operation of the dual-rotor motor 55, which, in conjunction with the screw rod 51, drives the entire assembly to move up and down, thereby enabling coaxiality measurement of hollow annular components 20 at different heights. This arrangement enables coaxiality measurement between hollow assemblies at different angles and heights; the motor-driven approach offers higher precision, smaller errors, and simpler operation.

[0128] In one possible embodiment, a battery module 6 is further included. The battery module 6 is mounted on the fixing base 11 and is electrically connected to the data processor 3, the dual-rotor motor 55, and the laser ranging sensor. The battery module 6 provides power to the data processor 3, the dual-rotor motor 55, and the laser ranging sensor, thereby ensuring their normal operation.

[0129] In one possible embodiment, a Bluetooth module 7 is further included for signal connection with an external device. The Bluetooth module 7 is mounted on a fixing base 11 and is signal-connected to the data processor 3. The Bluetooth module 7 is provided to achieve a signal connection between the data processor 3 and the external device. The external device sends instructions to the Bluetooth module 7, which then sends the received instructions to the data processor 3. The data processor 3 then controls the operating status of the dual-rotor motor 55 and the laser ranging sensor.

[0130] When using the coaxiality tester 100 to measure the coaxiality of the chuck 10 and the hollow annular component 20 in a vacuum environment, the first positioning pin 4 of the self-calibrated coaxiality tester 100 is inserted into the positioning hole of the chuck 10 (or the first positioning pin 4 of the chuck 10 is inserted into the positioning hole of the coaxiality tester 100), and the driving device 8 is driven so that the output end of the driving device 8 only performs rotational movement or only performs lifting movement or performs rotational movement and lifting movement at the same time, thereby driving the mounting seat 12 to perform rotational movement or lifting movement or perform rotational movement and lifting movement at the same time, and then driving the measuring instrument 2 on the mounting seat 12 to perform rotational movement or lifting movement or perform rotational movement and lifting movement at the same time, so as to realize the measurement of the coaxiality of the chuck 10 and each hollow annular component 20 in the vacuum chamber 30.

[0131] The above embodiment can be applied in a vacuum environment. By configuring the coaxiality tester 100 to be fully automatic, the coaxiality of the hollow annular component 20 can be measured in a vacuum environment with high accuracy and ease of operation. By combining a laser ranging sensor with a dual-axis motion dual-rotor motor 55, the coaxiality of various hollow annular components 20 can be measured in complex cavity scenarios. Using Bluetooth wireless transmission, measurements can be performed under vacuum. The distance between the chuck 10 and different hollow annular components 20 can also be acquired at high frequency, allowing for relative vibration testing between the chuck 10 and other hollow annular components 20 during the movement of the chuck 10.

[0132] Example 2

[0133] Based on the above embodiments, please refer to Figure 13 This embodiment provides a coaxiality testing system 200, including:

[0134] The coaxiality tester 100 provided in the above embodiment;

[0135] The calibration jig 40 is used to install the coaxiality tester 100 in the calibration jig 40 before the coaxiality tester 100 detects the coaxiality of at least one hollow annular component 20 disposed around the chuck 10 , so as to calibrate the coaxiality tester 100 .

[0136] Before using the coaxiality tester 100, the coaxiality tester 100 is first calibrated using the calibration fixture 40. This eliminates errors caused by the coaxiality tester 100's structural installation and ensures more accurate measurement results when the coaxiality tester 100 detects the coaxiality of the hollow annular component 20. The coaxiality testing system 200 can be used to measure the coaxiality of the hollow annular component 20 within a vacuum chamber 30.

[0137] In a feasible embodiment, the calibration fixture 40 is a cylindrical structure with a bottom (the cross-section of the calibration fixture 40 along its own axis is U-shaped), and the bottom of the calibration fixture 40 is provided with a positioning hole for calibration. The number of positioning holes can be set to three, and the centers of the three positioning holes are sequentially connected on the bottom end surface of the calibration fixture 40 to form an equilateral triangle structure, and the center of the equilateral triangle is the center of the calibration fixture 40. The positioning hole can be used to install a detachable second positioning pin 50. Before measuring the coaxiality of the hollow annular component 20, it is necessary to use the calibration fixture 40 to calibrate the coaxiality tester 100 to ensure the accuracy of the detection results of the coaxiality tester 100.

[0138] In one possible embodiment, one of the calibration fixture 40 and the coaxiality tester 100 is provided with a positioning hole, and the other of the calibration fixture 40 and the coaxiality tester 100 is provided with a removable second positioning pin 50. The second positioning pin 50 is pluggable and removable in the positioning hole. The combination of the positioning hole and the second positioning pin 50 enables quick and accurate positioning. When installing the coaxiality tester 100 on the calibration fixture 40, the operator simply aligns the second positioning pin 50 with the positioning hole and inserts it to ensure precise spatial connection between the two.

[0139] For example, the calibration fixture 40 is provided with a positioning hole, and the coaxiality tester 100 is provided with a detachable second positioning pin 50. Before using the coaxiality tester 100, the second positioning pin 50 of the coaxiality tester 100 is first inserted into the positioning hole of the calibration fixture 40, and the installation position of the measuring instrument 2 on the coaxiality tester 100 is corrected by the calibration fixture 40. Specifically, the second positioning pin 50 on the fixing seat 11 of the assembled coaxiality tester 100 is inserted into the positioning hole of the calibration fixture 40, and the measuring instrument 2 measures multiple radial distances between itself and the inner wall of the calibration fixture 40. Combined with the calculation of the center position of the circle by the data processor 3, the coaxiality of the coaxiality tester 100 itself can be detected with high precision, which can eliminate the error caused by the structural installation of the coaxiality tester 100 and ensure the accuracy of the measurement results. By providing a detachable second locating pin 50 at the bottom of the fixing base 11 and cooperating with the locating hole on the calibration tool 40, it helps to reduce shaking and swinging during the measurement process, thereby improving the measurement accuracy. The second locating pin 50 is provided as a detachable structure to be suitable for different measurement environments. After the coaxiality tester 100 is self-calibrated, the second locating pin 50 on the fixing base 11 can be directly inserted into the locating hole of the chuck 10 to further measure the coaxiality between the chuck 10 and the hollow annular component 20. When there is no locating hole on the workpiece to be measured, the second locating pin 50 on the calibrated fixing base 11 can be removed, and the fixing base 11 can be placed on any plane of the workpiece to be measured to measure its coaxiality with the hollow annular component 20.

[0140] For example, the calibration jig 40 is provided with a second locating pin 50, and the coaxiality tester 100 is provided with a detachable locating hole. Before using the coaxiality tester 100, the second locating pin 50 of the calibration jig 40 is first inserted into the locating hole of the coaxiality tester 100, and the installation position of the measuring instrument 2 on the coaxiality tester 100 is calibrated by the calibration jig 40. Specifically, the second locating pin 50 on the calibration jig 40 is inserted into the locating hole on the fixing seat 11 of the assembled coaxiality tester 100, and the measuring instrument 2 measures multiple radial distances between itself and the inner wall of the calibration jig 40. Combined with the calculation of the center position of the circle by the data processor 3, the coaxiality of the coaxiality tester 100 itself can be detected with high precision, which can eliminate the error caused by the structural installation of the coaxiality tester 100 and ensure the accuracy of the measurement results. The provision of a removable second locating pin 50 on the calibration fixture 40, coupled with the locating hole on the mounting base 11, helps reduce shaking and oscillation during measurement, thereby improving measurement accuracy. The removable second locating pin 50 is adaptable to various measurement environments. After the coaxiality tester 100 has been self-calibrated, the mounting base 11 can be placed directly on any plane of the workpiece to measure its coaxiality with the hollow annular component 20.

[0141] Example 3

[0142] Thirdly, please refer to Figure 14 The present application provides a coaxiality testing method for detecting the coaxiality of at least one hollow annular component 20 disposed around a chuck 10 using a coaxiality tester 100 as provided in the above embodiment, comprising:

[0143] Step S1: Install the coaxiality tester 100 on the chuck 10 through the base assembly 1;

[0144] Step S2: measuring multiple radial distances between the coaxiality tester 100 and each hollow annular component 20 by at least one measuring device 2 in the coaxiality tester 100;

[0145] Step S3: The data processor 3 processes multiple radial distances to obtain the center position of each hollow annular component 20, and based on the center position of each hollow annular component 20, determines the coaxiality of each hollow annular component 20 and the chuck 10 or the coaxiality between multiple hollow annular components 20.

[0146] In step S1, since the coaxiality tester 100 is provided with a base assembly 1, and the base assembly 1 is used to be detachably fixedly connected to the chuck 10, the coaxiality tester 100 is fixedly connected to the chuck 10 through the base assembly 1 to ensure that the position of the coaxiality tester 100 remains unchanged during the process of using the coaxiality tester 100 to detect the coaxiality of at least one hollow annular component 20 arranged around the chuck 10.

[0147] In step S2, the coaxiality tester 100 is activated and uses at least one measuring device 2 to measure the radial distance between itself and the inner wall of each hollow annular component 20 (edge ​​ring, shadow ring, etc.). Alternatively, the at least one measuring device 2 is driven to rotate about a drive axis, and the rotation of the at least one measuring device 2 measures the radial distance between itself and the interior of each hollow annular component 20 (edge ​​ring, shadow ring, etc.). During the measurement process, the coaxiality tester 100 can pause at preset angular intervals (e.g., every 10°), with each measuring device 2 performing distance measurements while stationary. During the test, the measurement can be repeated over the entire circumference (360°) of the same annular component to obtain multiple sets of radial distance data.

[0148] In step S3, after receiving all radial distance data, the data processor 3 calculates the actual center coordinates (x, y) of each hollow annular component 20. For each hollow annular component 20, the offset between the actual center and the theoretical center (0, 0) of the chuck 10 is compared. If the offset exceeds a preset threshold (e.g., 0.05 mm), the coaxiality of the hollow annular component 20 with the chuck 10 is determined to be unqualified. For multi-ring coaxiality testing, the maximum distance difference between the centers of each ring is calculated. If the maximum distance difference between the centers of each ring exceeds a preset threshold, the coaxiality of each ring is determined to be unqualified.

[0149] Through multi-point measurement and data processing, the center position of the circle is accurately calculated, the measurement error is reduced, and the reliability of the coaxiality measurement result is ensured. The measuring device 2 of the coaxiality tester 100 automatically measures multiple radial distances, and the data processor 3 automatically processes the data, which reduces the manual operation links and improves the measurement efficiency. It can flexibly adapt to chucks 10 and hollow annular components 20 of different sizes and shapes.

[0150] In one possible implementation, please refer to Figure 15 Before the coaxiality tester 100 is mounted on the chuck 10 through the base assembly 1, the method further includes:

[0151] Step S4: Install the coaxiality tester 100 in the calibration fixture 40;

[0152] Step S5: measuring multiple radial distances between the coaxiality tester 100 and the calibration fixture 40;

[0153] Step S6: Correcting the test results of the coaxiality tester 100 based on the multiple radial distances.

[0154] In step S4, the coaxiality tester 100 is fixedly installed in the calibration fixture 40. The coaxiality tester 100 is installed in the calibration fixture 40 using the same interface method and fixed structure as the chuck 10, ensuring the uniformity of the test benchmark. The calibration fixture 40 accurately replicates all the mechanical features on the chuck 10 for installing the tester, and the tolerance is controlled within a preset range. During installation, the tester is docked with the calibration fixture 40 through the same structure, and its contact pressure and tightening torque settings are consistent with those when the chuck 10 is installed. This mirror setting eliminates the systematic error introduced by installation differences, so that the calibration environment and the actual measurement environment have completely consistent mechanical constraints, ensuring the reliability of subsequent measurement data.

[0155] In step S5, the coaxiality tester 100 is activated and uses at least one measuring device 2 to measure the radial distance between itself and the inner wall of the calibration fixture 40. Alternatively, the coaxiality tester 100 is driven to rotate about a drive axis and uses the rotation of the at least one measuring device 2 to measure the radial distance between itself and the inner wall of the calibration fixture 40. During the measurement process, the coaxiality tester 100 can also pause at preset angular intervals (e.g., every 10°), with each measuring device 2 performing distance measurement while stationary, to ensure distance measurement stability.

[0156] In step S6, after receiving all radial distance data, data processor 3 calculates the actual center coordinates (x, y) of calibration fixture 40. These coordinates are then compared with the theoretical center position (0, 0) of calibration fixture 40 to determine the measurement deviation of coaxiality tester 100. Based on this measurement deviation, coaxiality tester 100 is calibrated and compensated, correcting the calculation results of the center position of each hollow annular component 20 in subsequent measurements. This allows for accurate assessment of the coaxiality between each hollow annular component 20 and chuck 10, as well as the coaxiality deviation between multiple hollow annular components 20. This calibration process effectively eliminates measurement system errors, resulting in higher accuracy and reliability in the final coaxiality test results.

[0157] By correcting the measurement deviation of the coaxiality tester 100 measured by the correction fixture 40 and correcting the test result of the coaxiality tester 100, it can be ensured that the tester has more accurate measurement results when measuring the hollow annular component 20 in the subsequent measurement.

[0158] The above preferred embodiments further illustrate the objectives, technical solutions and advantages of the present invention in detail. It should be understood that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A coaxiality tester for detecting the coaxiality of at least one hollow annular component arranged around a chuck, characterized in that: include: A base assembly, configured to be detachably fixedly connected to the chuck; at least one measuring device, mounted on the outer periphery of the base assembly, for measuring a plurality of radial distances between the base assembly and each of the hollow annular components; The data processor is used to obtain the center position of each hollow annular component according to the multiple radial distances to determine the coaxiality between each hollow annular component and the chuck or the coaxiality between multiple hollow annular components.

2. The coaxiality tester according to claim 1, characterized in that: The base assembly includes a mounting seat, a fixing seat, and a driving device installed on the fixing seat. The at least one measuring device is installed on the outer periphery of the mounting seat. The output shaft of the driving device is connected to the mounting seat. The driving device is used to drive the mounting seat to rotate around the output shaft and / or to rise and fall along the axial direction of the output shaft.

3. The coaxiality tester according to claim 2, characterized in that: The driving device is used to drive the mounting seat to rotate around the output shaft. The at least one measuring device is multiple, and there are at least two measuring devices distributed at intervals along the axial direction of the output shaft. The position of each measuring device corresponds to the height of the hollow annular component to synchronously measure the radial distance of each hollow annular component.

4. The coaxiality tester according to claim 3, characterized in that: At least two of the measuring devices are staggered along the axial direction of the mounting seat.

5. The coaxiality tester according to claim 2, characterized in that: The driving device is used to drive the mounting seat to rise and fall axially along the output shaft. There are multiple measuring devices, and at least two measuring devices are distributed circumferentially along the mounting seat to synchronously measure the radial distances of different circumferential positions of the same hollow annular component.

6. The coaxiality tester according to claim 5, characterized in that: At least two of the measuring devices are located on the same horizontal plane of the mounting base.

7. The coaxiality tester according to claim 2, characterized in that: The driving device is used to drive the mounting seat to rotate around the output shaft and to move up and down along the axial direction of the output shaft; The at least one measuring device is one, and the single measuring device is used to align with each of the hollow annular components in sequence under the drive of the rotation and lifting movement of the driving device to measure the radial distance of each of the hollow annular components; or, There are multiple at least one measuring device, wherein at least two of the measuring devices are distributed along the axial direction of the output shaft, and / or at least two of the measuring devices are distributed along the circumferential direction of the mounting seat, so as to measure the radial distance of each of the hollow annular components synchronously or in a time-sharing manner.

8. The coaxiality tester according to claim 7, characterized in that: There are multiple measuring devices, at least two of which are staggered along the axial direction of the mounting seat, and / or at least two of which are located on the same horizontal plane of the mounting seat.

9. The coaxiality tester according to claim 1, characterized in that: There are multiple measuring devices, at least two of which are distributed along the axial direction of the base assembly for measuring the hollow annular components at different heights respectively; and at least two of which are distributed along the circumference of the base assembly for measuring the radial distances of different circumferential positions of the same hollow annular component.

10. The coaxiality tester according to claim 9, characterized in that: At least two of the measuring devices are staggered along the axial direction of the mounting seat, and / or at least two of the measuring devices are located on the same horizontal plane of the mounting seat.

11. The coaxiality tester according to any one of claims 2 to 8, characterized in that: The driving device includes a lifting device for driving the mounting seat to rise and fall, and also includes a rotating device for driving the mounting seat to rotate, and the lifting device is connected to the rotating device.

12. The coaxiality tester according to claim 11, characterized in that: The lifting device includes a screw and a screw nut, the screw nut is fixed to the fixing seat, the screw is connected to the mounting seat, a locking nut is provided on the screw, and the rotating device includes a sliding bearing, and the mounting seat is rotatably connected to the end of the screw away from the fixing seat through the sliding bearing.

13. A coaxiality testing system, characterized in that: include: The coaxiality tester according to any one of claims 1 to 12; A calibration fixture is provided for installing the coaxiality tester in the calibration fixture before the coaxiality tester detects the coaxiality of the at least one hollow annular component arranged around the chuck, so as to calibrate the coaxiality tester.

14. A coaxiality testing method for testing the coaxiality of at least one hollow annular component disposed around a chuck using a coaxiality tester according to any one of claims 1 to 12, characterized in that: include: Mounting the coaxiality tester on the chuck through the base assembly; measuring a plurality of radial distances between the inner surface of the hollow annular member and the inner surface of the hollow annular member by using the at least one measuring device in the coaxiality tester; The data processor processes the multiple radial distances to obtain the center position of each hollow annular component, and based on the center position of each hollow annular component, determines the coaxiality of each hollow annular component and the chuck or the coaxiality between multiple hollow annular components.

15. The coaxiality testing method according to claim 14, characterized in that: Before the coaxiality tester is mounted on the chuck through the base assembly, the method further comprises: Installing the coaxiality tester in the calibration fixture; Measuring multiple radial distances between the coaxiality tester and the correction tool; The test result of the coaxiality tester is corrected based on the multiple radial distances.

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