A crystal profile measuring device and a measuring method

Abstract

The present application relates to profile detection device technical field, disclose a kind of crystal profile measurement device and measurement method, including transverse moving carrier, and the lateral sliding of carrier front side is provided with the compensation seat supported by elastic member, gear is rotatably installed on the compensation seat, the rack meshing with gear is laterally arranged on the front side of carrier, gear front side is installed with pivot seat, probe is installed in one end of pivot seat, the other end of pivot seat is connected with magnet by traction rope through downside, and metal tube for the vertical movement of magnet is arranged outside magnet;Probe is moved along the surface of crystal by carrier, when probe clamping position is blocked, make compensation seat compress elastic member and move, gear is cooperated with rack, and probe is overturned upward, so as to cross the groove on the surface of crystal;By the cooperation of magnet and metal tube, steep drop resistance of probe is provided, and steep drop impact of probe is slowed down;The present application can smoothly enter and exit groove, protect probe and crystal, realize continuous measurement, guarantee measurement efficiency, improve measurement result.

Description

Technical Field

[0001] This invention relates to the field of contour detection equipment technology, specifically to a crystal contour measuring device and method. Background Technology

[0002] Contour detection is a technology that acquires geometric information such as the shape, undulation, and size of an object's surface or edges. It is widely used in manufacturing, materials science, semiconductors, optics, crystals, and other fields. Based on the measurement principle and whether it involves contact with the object being measured, it can be divided into two main categories: contact detection and non-contact detection.

[0003] A contact profilometer is a precision instrument that measures the microscopic or macroscopic contour shape of a surface by having a probe directly contact the surface of the object being measured. It is widely used in surface quality inspection (such as the measurement of parameters like roughness, step height, and groove depth). Its core principle can be summarized as "contact sensing - displacement conversion - data processing".

[0004] A profilometer consists of a probe, a carrier, and a sensor. The carrier moves the probe along the workpiece being measured. When measuring the profile of a crystal, the profilometer works as follows: the probe tip contacts the surface of the crystal being measured. As the crystal on the stage moves relative to the probe, the changes in the surface contour of the crystal cause the probe to float up and down. The sensor detects these changes. Taking a profilometer using a grating ruler as an example: the probe (with a tip radius in the micrometer range) lightly touches the surface being measured. As the surface undulates, the probe moves up and down with the height change. The grating sensor records the Z-axis displacement, which is synchronized with the X-axis scanning position to generate a two-dimensional profile curve. Essentially, a grating profilometer precisely records the scanning position using a grating ruler while simultaneously sensing changes in surface height through a detection system. Finally, the two are combined to generate a complete profile curve (X-axis represents the scanning position, Z-axis represents the surface height).

[0005] During the movement of the probe on the crystal surface, if the depth of the groove or the height of the protrusion on the crystal surface exceeds the range of the selected probe, or if the side inclination of the groove or protrusion on the crystal surface is too large, the probe tip cannot pass the obstacle through its conical surface guide. The carrier continuously applies the moving force, causing the probe to be continuously subjected to lateral tension, resulting in probe damage. Probe replacement and calibration are complicated, affecting test efficiency and test results.

[0006] In the prior art, the probe limiting seat and contour measuring instrument with patent publication number CN222528604U uses a probe limiting seat without replacing the calibration probe. By adding a limiting seat, it supports the probe on the surface of the object to be measured, limiting the depth of the probe tip in the recesses on the surface of the object, thereby protecting the probe and preventing it from getting stuck in the recesses and being damaged. However, adding a limiting seat causes the probe to go beyond part of the contour of the object surface, resulting in incomplete contour measurement. A contour measuring instrument with patent publication number CN118816684B stops the measurement when the force on the probe is greater than or equal to a preset value, avoiding probe damage and thus avoiding probe replacement, ensuring testing efficiency and results. However, the measurement stoppage causes measurement interruption, which cannot guarantee continuity and limits the improvement of measurement efficiency. Manually calibrating and resetting the probe and re-measuring, due to the discontinuity of the measurement before and after, can easily cause measurement errors and affect the measurement results. Furthermore, when the probe encounters pits or crystal edges with little or no resistance during its movement, it experiences a sudden drop. During the return process, the probe impacts the workpiece, causing impact damage to the probe tip, affecting the probe's service life, and also causing impact damage to the crystal surface. Summary of the Invention

[0007] The purpose of this invention is to solve at least one of the problems in the prior art and to provide a crystal profile measuring device and method.

[0008] To achieve the above objectives, the present invention provides the following technical solution:

[0009] A crystal profile measuring device includes a laterally movable carrier, a compensation seat supported by an elastic element that is laterally slidably disposed on the front side of the carrier, a gear that is rotatably mounted on the compensation seat, a rack that meshes with the gear that is laterally disposed on the front side of the carrier, a pivot seat that is mounted on the front side of the gear, a probe that is mounted on one end of the pivot seat, and a magnet that is connected to the other end of the pivot seat via a traction rope through its lower side, and a metal tube that allows the magnet to move vertically is disposed on the outside of the magnet.

[0010] Furthermore, the carrier has a guide groove on its front side, and the rear part of the compensation seat slides along the guide groove; the elastic element is a helical spring, the helical spring is located in the guide groove and the compensation seat is located at the end of the guide groove away from the probe, and the end of the guide groove is provided with a distance sensor for detecting the position of the compensation seat.

[0011] Furthermore, the pivot seat is connected to the gear in the middle via a cross spring bearing; a disc is provided on the rear side of the pivot seat that rotates synchronously with the pivot seat, and the edge of the disc is provided with a protrusion extending away from its own center, and a stop bar is provided on the front side of the gear that corresponds to the rotation of the protrusion.

[0012] Furthermore, the stop lever is detachably connected to the gear; the gear has a plurality of mounting holes evenly distributed around its circumference for mounting the stop lever.

[0013] Furthermore, a balance bar is connected to the end of the pivot seat away from the probe, the magnet is connected to the lower side of the balance bar, a grating ruler is connected to the end of the balance bar, and a grating reading head corresponding to the grating ruler is provided on the front side of the carrier.

[0014] Furthermore, the grating reading head is connected to the compensation seat via a connecting rod.

[0015] Furthermore, a counterweight is provided at one end of the pivot seat near the probe.

[0016] Furthermore, the lower side of the traction rope carries a movable pulley; a speed-increasing rope is connected between the magnet and the lower part of the carrier, and the speed-increasing rope passes around the movable pulley.

[0017] Furthermore, the magnet is connected to a ring-shaped balancing rope, and a balancing block symmetrical to the magnet is connected to the balancing rope. Fixed pulleys supporting the rotation of the balancing rope are provided on the inner sides of both the upper and lower ends of the balancing rope.

[0018] This invention also provides the following technical solutions:

[0019] A measurement method for a crystal profile measuring device, the measurement method comprising: profile measurement based on the lateral displacement M of the carrier; when the compensation seat generates a displacement N, the actual lateral displacement of the carrier is M-N.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0021] This invention uses a carrier to move a probe along the crystal surface. When the probe is blocked, the compensating seat compresses the elastic element and moves. The gear, through its cooperation with the rack, causes the probe to flip upward, thus passing over the groove on the crystal surface, achieving continuous measurement, ensuring measurement efficiency and improving measurement results.

[0022] This invention utilizes the combination of a magnet and a metal tube. According to Lenz's law, the metal tube impedes the movement of the magnet within it. The movement of the magnet within the metal tube generates a changing magnetic field, causing a change in the magnetic flux of the metal tube, which in turn induces a current and a magnetic field. The magnetic field of the induced current impedes the movement of the magnet that causes the change in magnetic flux. The faster the magnet moves, the greater the resistance it experiences, thus providing resistance to the steep descent of the probe, mitigating the impact of the probe's steep descent, and protecting the probe and the crystal. When the probe undulates at a low speed on the crystal surface, the change in the magnet's position is small, the impeding effect is small, and it does not interfere with the probe measurement.

[0023] This invention utilizes the cooperation of a raised disc and a stop lever, allowing the gear to force the probe to swing. When the cross spring bearing is insufficient to make the probe swing upward, it ensures that the probe can smoothly overcome obstacles. The position of the stop lever in this invention can be adjusted, thereby changing the initial angle of the forced probe swing.

[0024] When the probe is displaced relative to the carrier, the compensation seat of the present invention drives the grating reading head to move synchronously through the connecting rod, thereby ensuring that the relative position of the grating reading head and the grating ruler remains unchanged, and ensuring the accuracy of the reading and measurement results.

[0025] This invention balances the pivot seat by using a counterweight, which can balance the additional resistance caused by the gravity of the movable pulley, ensuring the stability of the pivot seat and probe swing, and reducing the rotational resistance of the pivot seat.

[0026] This invention balances the resistance of the magnet by using a balance block and a ring-shaped balance rope, thereby reducing the influence of the magnet on the pivot and probe oscillation when the magnet is being moved and lifted.

[0027] This invention uses a movable pulley to double the speed of the magnet during the steep descent of the probe, thereby providing greater resistance to the steep descent. The movable pulley doubles the resistance, greatly enhancing the hindering effect. Thus, the magnet and the metal tube can truly hinder the short and rapid steep descent of the probe, protecting the probe and the crystal surface. Similarly, when the probe moves slowly, the magnet displacement fluctuation is small and the speed is slow, so it does not interfere with the probe measurement. Attached Figure Description

[0028] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0029] Figure 2 This is a front view schematic diagram of the present invention.

[0030] Figure 3 This is a schematic diagram of the probeless and pivot state of the present invention.

[0031] Figure 4 This is a schematic diagram of the pivot support structure of the present invention.

[0032] Figure 5 This is a three-dimensional schematic diagram of the compensating seat and gear of the present invention.

[0033] Figure 6 This is a side view schematic diagram of the compensation seat and gear engagement of the present invention.

[0034] Figure 7 This is a three-dimensional schematic diagram of the steep drop protection structure of the present invention.

[0035] Figure 8 This is a side view schematic diagram of the steep drop protection structure of the present invention.

[0036] Figure 9 This is a schematic diagram of the internal structure of the steep drop protection structure of the present invention.

[0037] In the diagram: 1. Carrier; 2. Compensation seat; 3. Gear; 4. Rack; 5. Pivot seat; 6. Probe; 7. Magnet; 8. Metal tube; 9. Guide groove; 10. Helical spring; 11. Shaft seat; 12. Cross spring bearing; 13. Disc; 14. Protrusion; 15. Stop bar; 16. Mounting hole; 17. Balance bar; 18. Grating ruler; 19. Grating reading head; 20. Connecting rod; 21. Guide seat; 22. Counterweight; 23. Speed-increasing rope; 24. Movable pulley; 25. Traction rope; 26. Inner support frame; 27. Secondary tube; 28. Fixed pulley; 29. ​​Balance rope; 30. Balance block; 31. Distance sensor. Detailed Implementation

[0038] The present invention will now be described in further detail. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention; that is, the described embodiments are merely some, not all, of the embodiments of the present invention.

[0039] Specific embodiments of the crystal profile measuring device and method provided by the present invention are as follows:

[0040] This embodiment is used for profile measurement of crystal surfaces with grooves, based on a grating contact profilometer. Please refer to [link to documentation]. Figures 1-9 A crystal profile measuring device includes a laterally moving carrier 1, which is driven by a profiler drive mechanism.

[0041] A compensation seat 2, supported by an elastic element, is laterally slidably mounted on the front side of the carrier 1. Specifically, a guide groove 9 is provided on the front side of the carrier 1, and the extension direction of the guide groove 9 is parallel to the moving direction of the carrier 1. The rear part of the compensation seat 2 slides along the guide groove 9, and the front part of the compensation seat 2 protrudes to the front side of the carrier 1. A guide rod is provided in the guide groove 9, and the guide rod slides through the rear part of the compensation seat 2. The rear part of the compensation seat 2 has a through hole for the guide rod to pass through.

[0042] In this embodiment, the elastic element is a helical spring 10. The helical spring 10 is located in the guide groove 9 and positions the compensation seat 2 at the end of the guide groove 9 away from the probe 6. A distance sensor 31 for detecting the position of the compensation seat 2 is provided at this end of the guide groove 9. The distance sensor 31 is embedded in the side wall of the end of the guide groove 9 and is located on one side of the end of the guide rod. The distance sensor 31 detects the displacement of the compensation seat 2 relative to the end of the guide groove 9. Under normal conditions, the helical spring 10 positions the compensation seat 2 at one end of the guide groove 9, and the distance detected by the distance sensor 31 is zero.

[0043] A helical spring 10 is sleeved on the outside of the guide rod, and both ends of the helical spring 10 are connected to one side wall of the guide groove 9 and the compensation seat 2, respectively. There is frictional damping between the guide rod and the compensation seat 2, which reduces the speed and sway when the helical spring 10 drives the compensation seat 2 to move.

[0044] A gear 3 is rotatably mounted on the compensation seat 2. The gear 3 rotates vertically and its axle is set horizontally. The front end of the compensation seat 2 is provided with a bearing seat 11 to support the rotation of the gear 3.

[0045] A rack 4 that meshes with the gear 3 is arranged laterally on the front side of the carrier 1. In this embodiment, the rack 4 is arranged laterally and located above the gear 3. When the compensation seat 2 compresses the helical spring 10 and moves along the guide groove 9, the gear 3 moves laterally with the compensation seat 2. During the movement of the gear 3, the gear 3 rotates simultaneously under the meshing action of the rack 4.

[0046] A pivot seat 5 is mounted on the front side of gear 3. The pivot seat 5 is connected to gear 3 through a cross spring bearing 12 in the middle. The cross spring bearing 12 is located in the middle of gear 3. A rotating shaft is connected to the middle of pivot seat 5. The rotating shaft is fixedly connected to pivot seat 5 and is supported by cross spring bearing 12 to rotate.

[0047] The cross spring bearing 12 is a reset element, comprising an inner ring sleeve, an outer ring sleeve, and three spring plates. The three spring plates are perpendicular to each other in pairs. When an external force applies a tangential force to the inner ring sleeve, the relative positions of the spring plates change, causing the inner ring sleeve to rotate relative to the outer ring sleeve. When there is no external driving force, the spring plates reset, and thus the inner ring sleeve resets relative to the outer ring sleeve.

[0048] A probe 6 is mounted on one end of the pivot seat 5. The pivot shaft of the pivot seat 5 is connected to the inner ring sleeve of the cross spring bearing 12. The cross spring bearing 12 supports the pivot seat 5 and the probe 6. When the probe 6 moves along the undulating surface of the crystal, the cross spring bearing 12 ensures that the tip of the probe 6 is always attached to the crystal surface, thus guaranteeing the accuracy of the detection. In this embodiment, the spring force of the helical spring 10 is greater than the return spring force of the cross spring bearing 12.

[0049] The rotation center line of gear 3 and the rotation center line of pivot seat 5 are located on the same horizontal straight line. A disk 13 is provided on the rear side of pivot seat 5, which rotates synchronously with pivot seat 5. The disk 13 is located outside the pivot seat 5's rotation axis. A protrusion 14 extending away from its own center is provided on the edge of the disk 13. A stop lever 15 corresponding to the rotation of the protrusion 14 is provided on the front side of gear 3. Under normal conditions, there is an annular gap between the stop lever 15 and the protrusion 14. When the gear 3 rotates, the probe 6 is flipped upwards through the cross spring bearing 12. If the resistance of the probe 6 is too great to overcome the force of the cross spring bearing 12 and it flips, the gear 3 drives the stop lever 15 to rotate until the stop lever 15 contacts the protrusion 14. The gear 3 forces the disc 13 and the pivot seat 5 to rotate through the stop lever 15 and the protrusion 14, thereby causing the probe 6 to flip upwards and allowing the tip of the probe 6 to pass over the obstacle. During this process, the cross spring bearing 12 keeps the probe 6 in constant contact with the crystal being measured. When the obstruction of the probe 6 is released, the pressure of the helical spring 10 will disappear, and the compensation seat 2 and the gear 3 will reset, preventing the probe 6 from detaching from the crystal surface. This ensures that the probe 6 can continuously measure while passing over obstacles such as grooves, improving measurement efficiency and eliminating measurement errors caused by manual adjustment during downtime.

[0050] In this embodiment, the stop lever 15 is detachably connected to the gear 3; a plurality of mounting holes 16 for mounting the stop lever 15 are evenly distributed around the circumference of the gear 3. By installing the stop lever 15 in different positions, the initial annular rotation gap between the stop lever 15 and the protrusion 14 can be different. The reservation of the initial annular rotation gap is to ensure the swing space of the pivot seat 5, that is, when the probe 6 moves normally on the crystal surface, the probe 6 and the pivot seat 5 will swing.

[0051] The stop lever 15 and the gear 3 can be connected by threads. The rear end of the stop lever 15 is provided with an external thread, and the mounting hole 16 is provided with an internal thread. Flat surfaces are machined on both sides of the middle part of the stop lever 15 to facilitate the rotation and disassembly of the stop lever 15. In some embodiments, the stop lever 15 and the mounting hole 16 can be connected by an interference fit.

[0052] A balance bar 17 is connected to the end of the pivot 5 away from the probe 6. The probe 6 is L-shaped and includes a horizontal section and a vertical section. The lower end of the vertical section has a pointed tip. The center line of the balance bar 17 and the horizontal section of the probe 6 are on the same straight line. An arc-shaped grating ruler 18 is connected to the end of the balance bar 17. A grating reading head 19 corresponding to the grating ruler 18 is provided on the front side of the carrier 1. The grating reading head 19 reads the data of the grating ruler 18 and records the Z-axis displacement.

[0053] Since the pivot seat 5 and probe 6 move laterally with the compensation seat 2, in order to ensure the continuity of measurement and result acquisition, the grating reading head 19 is connected to the front of the compensation seat 2 through the connecting rod 20. The grating reading head 19 is not connected to the carrier 1. In this way, the relative position of the grating reading head 19 and the compensation seat 2 remains unchanged, thereby ensuring that the relative position of the grating reading head 19 and the rotation axis of the pivot seat 5 remains unchanged, so that the grating reading head 19 and the grating ruler 18 are always in coordination to achieve continuous reading.

[0054] To ensure the stability of the grating reading head 19 during movement, a guide seat 21 is provided on the front side of the carrier 1, and the connecting rod 20 passes through the guide seat 21 and is laterally slidably connected to the guide seat 21.

[0055] Measurement method of crystal profile measuring device, establishing X and Z plane coordinate system;

[0056] The carrier 1 drives the probe 6 to move laterally. The sensor of the profilometer detects the position of the carrier 1. The lateral displacement of the carrier 1 is the X-axis position. The probe 6 floats on the crystal surface. The grating sensor (including the grating ruler 18 and the grating reading head 19) records the Z-axis displacement detected by the probe 6.

[0057] The contour measurement is based on the lateral displacement M of the carrier 1; when the compensation seat 2 generates a displacement N (data detected by the distance sensor 31), the actual lateral displacement of the carrier 1 is M-N, which is used as the X-axis position.

[0058] Working process: The carrier 1 drives the probe 6 to move laterally. Under normal conditions, the helical spring 10 keeps the compensation seat 2 at one end of the guide groove 9. The rotation of the pivot seat 5 cannot deform the helical spring 10, and the probe 6 moves undulatingly on the crystal surface.

[0059] When the tip of probe 6 is stuck in the groove on the crystal surface, the helical spring 10 deforms and the compensation seat 2 moves relative to the carrier 1. At this time, although the carrier 1 moves, the relative movement of the compensation seat 2 (detected by the distance sensor 31) needs to be subtracted to get the lateral position of probe 6.

[0060] The movement of the compensation seat 2 causes the gear 3 to rotate. If the resistance of the probe 6 is small, the pivot seat 5 and the probe 6 can be flipped upward and disengaged from the groove by the cross spring bearing 12. If the resistance of the probe 6 is large, the cross spring bearing 12 cannot make the probe 6 flip upward. Then, as the stop lever 15 contacts the protrusion 14, the pivot seat 5 and the probe 6 are forced to flip upward and disengage from the groove.

[0061] When the resistance of probe 6 is released, the helical spring 10 causes the compensation seat 2 to return smoothly to its original position under the action of frictional damping of the guide rod, and the cross spring bearing 12 ensures that probe 6 is in constant contact with the crystal to measure the Z-axis displacement.

[0062] The controller combines the detected X-axis and Z-axis data to produce a complete contour curve.

[0063] This embodiment is suitable for the contour inspection of crystals with large-pitch grooves, but cannot be used for the inspection of workpieces with continuous excessively deep grooves, such as lead screws.

[0064] When probe 6 enters the groove, it is subjected to the elastic force of the cross spring bearing 12, which accelerates its impact on the bottom surface of the crystal groove. To suppress this accelerated steep descent phenomenon of probe 6, which is different from the normal surface undulation, in this embodiment, the other end of the pivot seat 5 is connected to a magnet 7 via a traction rope 25. The magnet 7 and the traction rope 25 are connected to the lower side of the middle part of the balance bar 17. A metal tube 8 is provided on the outside of the magnet 7 for vertical movement of the magnet 7. The magnet 7 is cylindrical in shape, and the metal tube 8 is preferably a copper tube.

[0065] According to Lenz's law, the metal tube 8 impedes the movement of the magnet 7 within it. The movement of the magnet 7 within the metal tube 8 generates a changing magnetic field, causing a change in the magnetic flux of the metal tube 8, which in turn induces a current and a magnetic field. The magnetic field of the induced current impedes the movement of the magnet 7, which causes the change in magnetic flux. The greater the speed of the magnet 7, the greater the resistance it experiences. When the tip of the probe 6 drops sharply, the balance rod 17 accelerates upward, thereby causing the magnet 7 to accelerate upward within the metal tube 8. The metal tube 8 impedes the upward movement of the magnet 7, thus preventing the balance rod 17 from rising further, providing resistance to the sharp drop of the probe 6, mitigating the impact of the sharp drop, and protecting the probe 6 and the crystal.

[0066] The steep descent of probe 6 is characterized by its short and rapid speed, requiring a fast response to the obstruction effect. Sometimes, simply using magnet 7 in conjunction with metal tube 8 is not enough to provide a fast enough obstruction effect.

[0067] The lower side of the traction rope 25 carries a movable pulley 24. Specifically, the lower side of the traction rope 25 is connected to a pulley seat, and the movable pulley 24 is mounted on the pulley seat. A speed-increasing rope 23 is connected between the magnet 7 and the lower part of the carrier 1. The speed-increasing rope 23 is in an inverted V shape and passes around the movable pulley 24.

[0068] This embodiment cleverly reverses the use of the movable pulley 24. During the steep descent of the probe 6, the speed of the magnet 7 can be doubled. This is because the lifting of the movable pulley 24 causes the magnet 7 inside the metal tube 8 to rise to nearly twice the height of the movable pulley 24. The faster the speed, the greater the resistance, thus providing greater resistance during the steep descent. The movable pulley 24 doubles the resistance, forming a force-multiplying mechanism, so that the resistance experienced by the magnet 7 is nearly doubled and transmitted to the balance rod 17. The response speed is fast; even with a short-span steep descent of the probe 6, the magnet 7 can quickly provide a hindering effect. Therefore, the magnet 7 and the metal tube 8 can truly hinder the short and rapid steep descent of the probe 6, protecting the probe 6 and the crystal surface. When the probe 6 undulates slowly in a small range on the crystal surface without grooves, the positional change of the magnet 7 is small, the speed is slow, and the hindering effect is small, so it does not interfere with the measurement of the probe 6.

[0069] A counterweight 22 is provided at one end of the pivot 5 near the probe 6. The counterweight 22 is bolted to the pivot 5. In this embodiment, the counterweight 22 is composed of several rectangular lead plates, each with a through hole in the center for the bolt to pass through. The counterweight effect can be adjusted by adding or removing lead plates. The counterweight 22 balances the gravity of the movable pulley 24 and the traction rope 25, thus balancing the forces on both sides of the pivot 5 and reducing interference with the elastic effect of the cross spring bearing 12.

[0070] To eliminate the interference of magnet 7 on the balance of pivot 5 and to ensure the stability of magnet 7 so that it can descend automatically, magnet 7 is connected to a ring-shaped vertical balance rope 29. Balance blocks 30 symmetrical to magnet 7 are connected to balance rope 29. Fixed pulleys 28 supporting the rotation of balance rope 29 are provided on the inner side of both the upper and lower ends of balance rope 29. A secondary tube 27 is provided on the outer side of balance block 30 for stable raising and lowering of balance block 30. Both secondary tube 27 and balance block 30 are iron blocks, and their relative movement is undisturbed.

[0071] The front side of the carrier 1 is connected to the inner support frame 26 by bolts. The front end of the inner support frame 26 extends between the metal pipe 8 and the secondary pipe 27. The front end of the inner support frame 26 not only supports the metal pipe 8 and the secondary pipe 27, but also supports the rotation of two fixed pulleys 28.

[0072] The weight of the counterweight 30 is slightly lower than that of the magnet 7. Since the magnet 7 is not subjected to the force of the speed-increasing rope 23, it can move downwards. The weight difference between the magnet 7 and the counterweight 30 is very small and insufficient to overcome the force of the cross-spring bearing 12. The cross-spring bearing 12 still allows the probe 6 to adhere to the surface of the crystal being measured. While achieving steep drop protection, the balance and stability of the device are ensured as much as possible to avoid affecting the measurement results.

[0073] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make modifications to the technical solutions described in the foregoing embodiments without creative effort, or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A crystal profile measuring device characterized by comprising: The application relates to a measuring device, which comprises a carrier (1) capable of moving laterally, a compensation seat (2) supported by elastic members arranged on the front side of the carrier (1) and capable of moving laterally, a gear (3) rotatably arranged on the compensation seat (2), a rack (4) arranged on the front side of the carrier (1) and capable of engaging with the gear (3), a pivot seat (5) arranged on the front side of the gear (3), a probe (6) arranged on one end of the pivot seat (5), a magnet (7) connected to the other end of the pivot seat (5) through a traction rope (25), and a metal tube (8) arranged on the outer side of the magnet (7) and capable of vertically moving the magnet (7). The middle part of the pivot seat (5) is connected with the gear (3) through a cross spring bearing (12), the rear side of the pivot seat (5) is provided with a disc (13) capable of rotating concentrically and synchronously with the pivot seat (5), the edge of the disc (13) is provided with a protrusion (14) extending away from the center of the disc (13), and the front side of the gear (3) is provided with a stop lever (15) corresponding to the rotation of the protrusion (14).

2. The crystal contour measuring apparatus according to claim 1, characterized by The front side of the carrier (1) is provided with a guide groove (9), and the rear part of the compensation seat (2) slides along the guide groove (9); the elastic members are spiral springs (10), the spiral springs (10) are located in the guide groove (9) and make the compensation seat (2) located at the end of the guide groove (9) away from the probe (6), and the end of the guide groove (9) is provided with a distance sensor (31) for detecting the position of the compensation seat (2).

3. The crystal contour measuring apparatus according to claim 1, wherein The stop lever (15) is detachably connected with the gear (3), and a plurality of mounting holes (16) for mounting the stop lever (15) are uniformly distributed on the gear (3).

4. The crystal contour measuring apparatus according to claim 1, characterized by The end of the pivot seat (5) away from the probe (6) is connected with a balance lever (17), the lower side of the balance lever (17) is connected with the magnet (7), the tail end of the balance lever (17) is connected with an optical grating ruler (18), and the front side of the carrier (1) is provided with an optical grating reading head (19) corresponding to the optical grating ruler (18).

5. The crystal contour measuring apparatus according to claim 4, wherein The optical grating reading head (19) is connected with the compensation seat (2) through a connecting rod (20).

6. The crystal contour measuring apparatus according to claim 1, wherein The end of the pivot seat (5) close to the probe (6) is provided with a counterweight (22).

7. The crystal contour measuring apparatus according to claim 1, wherein The lower side of the traction rope (25) carries a driving pulley (24), a speed-increasing rope (23) is connected between the magnet (7) and the lower part of the carrier (1), and the speed-increasing rope (23) passes through the driving pulley (24).

8. The crystal contour measuring apparatus according to claim 1, wherein The magnet (7) is connected with an annular balance rope (29), the balance rope (29) is connected with a balance block (30) symmetrical to the magnet (7), and the inner sides of the upper and lower ends of the balance rope (29) are provided with fixed pulleys (28) for supporting the rotation of the balance rope (29).

9. The measurement method of the crystal profile measuring apparatus according to any one of claims 1 to 8, characterized by, The measuring method comprises the following steps: profile measurement according to the lateral displacement amount M of the carrier (1); when the displacement amount N of the compensation seat (2) is generated, the actual lateral displacement amount of the carrier (1) is M-N.

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