Planar motor rotor and planar motor

Abstract

The invention relates to the technical field of planar motors, and provides a planar motor mover and a planar motor, the planar motor mover comprises a central magnet array and a first edge magnet array, the central magnet array is used for cooperating with a planar motor stator to make the planar motor mover suspend and move on the stator, the first edge magnet arrays are used for balancing interaction force between the adjacent rotors, the first edge magnet arrays are arranged on the two sides of the center magnet array in the length direction of the rotors, each first edge magnet array comprises a first edge magnet set and a second edge magnet set, each first edge magnet set comprises a plurality of first magnets, and each second edge magnet set comprises a plurality of second magnets; the second edge magnet group comprises a plurality of second magnets, the first magnets and the second magnets are alternately arranged, the polarities of the adjacent first magnets are alternately arranged, and the polarities of the adjacent second magnets are alternately arranged. When the two rotors are close to each other, the attractive force and the repulsive force formed between the two rotors are counteracted, so that almost no interaction force exists between the two rotors, mutual movement is prevented from being influenced, and the movement precision is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of planar motors, and in particular relates to a planar motor mover and a planar motor. Background Art

[0002] Planar motors are currently widely used in high-precision positioning, automation equipment, and other applications requiring efficient motion control. Their basic structure typically consists of a stator and a mover. Through electromagnetic forces, the mover is suspended above the stator and moves relative to it. This design significantly reduces mechanical friction while improving motion smoothness and positioning accuracy, making it valuable for applications in precision manufacturing, semiconductor processing, and other fields.

[0003] However, in existing planar motor technology, when a system includes multiple movers, each of which is equipped with a magnetic array. When two movers move relatively close together, the magnets between them will attract or repel each other. This magnetic interference can adversely affect the movers' motion trajectory, causing them to deviate from the preset path, thereby reducing the system's motion accuracy and stability. Furthermore, this magnetic interference increases the design complexity of the control system, making real-time adjustments and precise control more difficult.

[0004] Existing technologies usually rely on simple path planning or passive isolation measures, but these methods are difficult to fundamentally eliminate the magnetic influence between movers, especially in high-density arrangements or multi-motor collaborative operation scenarios, where the problem is particularly prominent.

[0005] In order to solve the above technical problems, the present invention designs a planar motor mover and a planar motor. Summary of the Invention

[0006] The present invention provides a planar motor mover and a planar motor, aiming to solve the problem that the mutual attraction or repulsion between two movers affects the movement of the movers when the two movers are close to each other.

[0007] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a planar motor rotor, comprising a central magnet array and a first edge magnet array, the central magnet array being used to cooperate with the planar motor stator so that the planar motor rotor can be suspended and move on the stator, the first edge magnet array being used to balance the interaction force between adjacent rotors, the first edge magnet array being arranged on both sides of the central magnet array along the length direction of the rotor, the first edge magnet array comprising a first edge magnet group and a second edge magnet group, the first edge magnet group comprising a plurality of first magnets, the second edge magnet group comprising a plurality of second magnets, the first magnets and the second magnets being arranged alternately, the polarities of adjacent first magnets being arranged alternately, and the polarities of adjacent second magnets being arranged alternately.

[0008] Based on the above technical solution, the first magnet and the second magnet are both rectangular magnets, the volume of the second magnet is 2a, the volume of the first magnet between adjacent second magnets is 2a, and the volume of the first magnet arranged at the end of the edge magnet array along the width direction of the mover is a.

[0009] Optionally, the first edge magnet array is centrally symmetric with respect to the central magnet array.

[0010] Based on the above technical solution, it further includes a second edge magnet array, which is arranged on both sides of the central magnet array along the width direction of the mover. The composition of the second edge magnet array is the same as that of the first edge magnet array.

[0011] Furthermore, the second edge magnet array is centrosymmetric with respect to the central magnet array.

[0012] Based on the above technical solution, a magnetic separator is provided between the central magnet array and the first edge magnet array and the second edge magnet array, and the surface of the magnetic separator is coated with an insulating coating.

[0013] Furthermore, the thicknesses of the first edge magnet array and the second edge magnet array decrease linearly from the center of the mover to the edge of the mover.

[0014] Based on the above technical solution, the central magnet array includes a plurality of rectangular magnets uniformly arranged along the length direction of the mover, and the polarities of adjacent rectangular magnets in the plurality of rectangular magnets in the central magnet array are alternately arranged.

[0015] Furthermore, the central magnet array is a Halbach array.

[0016] In a second aspect, the present invention provides a planar motor comprising a planar motor mover as described in any one of the above embodiments.

[0017] Compared with the related art, the present invention has the following beneficial effects: The present invention provides the main suspension force for the movement of the mover by setting a central magnet array, so that the mover is suspended above the stator and can move relative to the stator. By setting a first edge magnet array, the first magnet and the second magnet are alternately arranged, the polarities of adjacent first magnets are alternately arranged, and the polarities of adjacent second magnets are alternately arranged. When there are two planar motor movers on the stator, when the two movers are close to each other, multiple attraction action areas and repulsion action areas are formed between the two movers. The attraction and repulsion forces offset each other, so that there is almost no interaction force between the two movers, avoiding mutual influence on each other's movement and improving movement accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only one embodiment of the present invention. Those skilled in the art can also derive other implementation drawings based on the provided drawings without inventive effort.

[0019] Figure 1 This is a schematic structural diagram of the force generated between the two movers when they approach each other in Example 1 provided by the present invention; Figure 2 1 is a schematic cross-sectional view of a planar motor rotor according to Example 1 of the present invention; Figure 3 1 is a schematic structural diagram of the force generated between the first edge magnet arrays and the second edge magnet arrays of the two planar motor rotors when they are close to each other in Example 2 provided by the present invention; Figure 4 This is a schematic structural diagram of the force generated between the two planar motor movers when they are close to each other, with the addition of the first corner magnet and the second corner magnet provided in Example 2 of the present invention; Figure 5 The present invention provides Figure 4 Schematic diagram of the structure of the force generated between the two planar motor rotors when they approach each other after the right-side rotor rotates 90° counterclockwise; Figure 6 Schematic diagram of the structure of the planar motor in Example 3 provided by the present invention; Figure 7 It is a schematic structural diagram of a one-dimensional Halbach array in the prior art; Figure 8 It is a structural schematic diagram of a two-dimensional Halbach array in the prior art.

[0020] In the figure: 1. Center magnet array; 2. First edge magnet array; 21. First edge magnet group; 211. First magnet; 22. Second edge magnet group; 221. Second magnet; 3. Magnetic partition; 5. Stator; 6. Second edge magnet array; 7. First corner magnet; 8. Second corner magnet; 9. Sensor. DETAILED DESCRIPTION

[0021] The present invention will be further described below with reference to the accompanying drawings and examples: The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0022] In the description of the present invention, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0023] In the description of the present invention, it should be understood that the terms "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0024] Example 1 Combine Figure 1 As shown, an embodiment of the present disclosure provides a planar motor rotor, including a central magnet array 1 and a first edge magnet array 2, wherein the central magnet array 1 is used to cooperate with the planar motor stator to make the planar motor rotor suspend and move on the stator, and the first edge magnet array 2 is used to balance the interaction force between adjacent rotors. The first edge magnet array 2 is arranged on both sides of the central magnet array 1 along the length direction of the rotor, and the first edge magnet array 2 includes a first edge magnet group 21 and a second edge magnet group 22, the first edge magnet group 21 includes a plurality of first magnets 211, and the second edge magnet group 22 includes a plurality of second magnets 221, the first magnets 211 and the second magnets 221 are alternately arranged, the polarities of adjacent first magnets 211 are alternately arranged, and the polarities of adjacent second magnets 221 are alternately arranged.

[0025] The planar motor rotor provided by the embodiment of the present disclosure is used, such as Figure 6 As shown, by setting the central magnet array 1 to provide the main suspension force for the movement of the mover, the mover is suspended above the stator 5 and can move relative to the stator 5. By setting the first edge magnet array 2, the first magnet 211 and the second magnet 221 are alternately arranged, the polarities of adjacent first magnets 211 are alternately arranged, and the polarities of adjacent second magnets 221 are alternately arranged. When there are two planar motor movers on the stator 5 and the two movers are close to each other, as shown in FIG. Figure 1 As shown, Figure 1A schematic diagram shows the mutual force generated between the two movers when they approach each other. Multiple attractive and repulsive force areas are formed between the two movers. The attractive and repulsive forces offset each other, resulting in almost no interaction force between the two movers, avoiding mutual influence on each other's movement and improving movement accuracy.

[0026] Based on the above technical solution, Figure 1 As shown, the first magnet 211 and the second magnet 221 are both rectangular magnets, the volume of the second magnet 221 is 2a, the volume of the first magnet 211 between adjacent second magnets 221 is 2a, and the volume of the first magnet 211 arranged at the end of the edge magnet array 2 along the width direction of the mover is a.

[0027] Specifically, if Figure 1 As shown, the magnetic poles of the first magnet 211 are sequentially arranged as the S pole, the N pole, and the S pole along the width direction of the mover, and the magnetic poles of the second magnet 221 are sequentially arranged as the N pole and the S pole along the width direction of the mover. The first magnet 211 and the second magnet 221 are alternately arranged along the width direction of the mover. When there are two movers, the two movers are close to each other, and the edge magnet arrays 2 of the two movers will interact with each other. Figure 1 The dotted lines are used to divide the interaction forces generated between the corresponding magnets. Along the width direction of the mover, they are SS repulsive force, NS attractive force, NN repulsive force, SN attractive force and SS repulsive force. The volume of the second magnet 221 is 2a, the volume of the first magnet 211 between adjacent second magnets 221 is 2a, and the volume of the first magnet 211 located at the end of the edge magnet array 2 along the width direction of the mover is a. In other words, Figure 1 The volumes of the magnets along the width direction of the mover are a, 2a, 2a, 2a and a respectively. The total volume of the attractive force is 4a, and the total volume of the repulsive force is 4a. The attractive force and the repulsive force are balanced. Moreover, the repulsive force action area and the attractive force action area act alternately along the width direction of the mover, and the force between the two movers is relatively uniform. In this way, when the two movers are close to each other, the force between the two is balanced, thereby ensuring that the movement between the two movers is not disturbed.

[0028] Optionally, the first edge magnet array 2 is centrosymmetric with respect to the central magnet array.

[0029] The first edge magnet array is centrally symmetrical. When one mover remains in the same direction and the other moves 180°, the force between the two movers is the same as before the movers rotate, and a balance can be achieved to ensure the smooth movement of the two movers.

[0030] Based on the above technical solution, Figure 2As shown, a magnetic separator 3 is provided between the central magnet array 1 and the first edge magnet array 2 and the second edge magnet array 6 , and the surface of the magnetic separator 3 is coated with an insulating coating.

[0031] Specifically, the magnetic partition 3 is made of stainless steel or titanium alloy and is used to reduce the magnetic coupling between the central magnet array 1 and the edge magnet array 2. An insulating coating is applied on the surface of the magnetic partition 3 to further reduce eddy current loss.

[0032] Further, if Figure 2 As shown, the thickness of the first edge magnet array 2 and the second edge magnet array 6 decreases linearly from the center of the mover to the edge of the mover.

[0033] When the thickness of the first magnet 211 and the second magnet 221 gradually decreases from the center to the edge, the magnetic field strength and range of each magnet relative to the magnetic field of the corresponding magnet will be reduced, so that the superposition effect of the two magnetic fields is weakened, and the force between the two magnets is reduced accordingly. When the two movers approach each other, the attractive and repulsive forces are relatively weakened, which can make the force between the two movers more balanced.

[0034] Based on the above technical solution, the central magnet array 1 can be composed of a plurality of rectangular magnets uniformly arranged along the length direction of the mover, and the polarities of adjacent rectangular magnets in the plurality of rectangular magnets of the central magnet array 1 are alternately arranged. The central magnet array 1 can also be as follows Figure 7 The one-dimensional Halbach array in can also be Figure 8 The two-dimensional Halbach array is not limited here, and can be matched with the planar motor stator to make the mover levitate and move on the stator.

[0035] Example 2 Combine Figure 1 As shown, an embodiment of the present disclosure provides a planar motor rotor, including a central magnet array 1 and an edge magnet array 2, wherein the central magnet array 1 is used to cooperate with the planar motor stator to make the planar motor rotor suspend and move on the stator, and the first edge magnet array 2 is used to balance the interaction force between adjacent rotors, and the edge magnet array 2 is arranged on both sides of the central magnet array 1 along the length direction of the rotor, and the edge magnet array 2 includes a first edge magnet group 21 and a second edge magnet group 22, the first edge magnet group 21 includes a plurality of first magnets 211, and the second edge magnet group 22 includes a plurality of second magnets 221, the first magnets 211 and the second magnets 221 are alternately arranged, the polarities of adjacent first magnets 211 are alternately arranged, and the polarities of adjacent second magnets 221 are alternately arranged.

[0036] By setting a central magnet array 1 to provide the main suspension force for the movement of the mover, the mover is suspended above the stator 5 and can move relative to the stator 5. By setting a first edge magnet array 2, the first magnet 211 and the second magnet 221 are alternately arranged, the polarities of adjacent first magnets 211 are alternately arranged, and the polarities of adjacent second magnets 221 are alternately arranged. When there are two planar motor movers on the stator 5, when the two movers are close to each other, multiple attraction action areas and repulsion action areas are formed between the two movers. The attraction and repulsion forces offset each other, so that there is almost no interaction force between the two movers, avoiding mutual influence on each other's movement and improving movement accuracy.

[0037] Based on the above technical solution, Figure 3 As shown, the planar motor rotor further includes a second edge magnet array 6 , which is arranged on both sides of the central magnet array 1 along the width direction of the rotor. The composition of the second edge magnet array 6 is the same as that of the first edge magnet array 2 .

[0038] Furthermore, the second edge magnet array 6 is centrosymmetric with respect to the central magnet array 1 .

[0039] Figure 3 The diagram below illustrates the structure of two planar motor rotors generating forces when their first and second edge magnet arrays are brought into proximity. Specifically, the first edge magnet array 2 and the second edge magnet array 6 are positioned around the central magnet array and are centrally symmetrical with respect to the central magnet array 1. This allows for the force between the two rotors to remain the same as before the rotation, achieving equilibrium, ensuring virtually no interaction between the two rotors and preventing interference in their motion.

[0040] Furthermore, in order to avoid a large interaction force between the first magnets 21 at the corners of the planar motor, as shown in FIG. Figure 4 As shown, the planar motor rotor also includes a first corner magnet 7 and a second corner magnet 8. The first corner magnet 7 and the second corner magnet 8 are both arranged at the four corners between the first edge magnet array 2 and the second edge magnet array 6. The first corner magnet 7 and the second corner magnet 8 are staggered, and the two first corner magnets 7 are diagonally arranged, and the two second corner magnets 8 are diagonally arranged.

[0041] Figure 4To illustrate the structural diagram of the forces generated between the two planar motor rotors (first and second corner magnets) when they approach each other, the first and second corner magnets 7 and 8 generate relatively close attractive and repulsive forces with the corresponding first magnets 21. These forces essentially cancel each other out, creating a similar force at the upper and lower corners. This significantly reduces the repulsive force generated between the rotor corners and improves the operational stability of the two rotors. When the rotors rotate 180°, the forces acting on them are similar to those before the rotation and are not further described here.

[0042] In order to ensure that the forces between the two movers can still be basically balanced after the mover rotates 90 degrees, the first corner magnet 7 and the second corner magnet 8 are electromagnets. The electromagnets include a coil, an iron core and a power supply. The planar motor mover also includes connected sensors 9 and a controller. The sensors 9 are arranged at the four corners of the mover, such as Figure 5 As shown, Figure 5 for Figure 4 Schematic diagram of the structure of the force generated between the two planar motor rotors when the right-side rotor rotates 90° counterclockwise. The sensor 9 can detect the rotation angle of the rotor. When the direction of one rotor remains unchanged and the other rotor rotates 90°, the sensor 9 transmits the rotation angle signal to the controller. The controller changes the polarity of the first corner magnet 7 and the second corner magnet 8 of one of the rotors by changing the direction of the current in the coil of the electromagnet, as shown in FIG. Figure 5 As shown, the attractive and repulsive forces between the two movers are essentially offset. When the mover rotates 270°, similar to a 90° rotation, the polarity of the magnets at the two corners must be changed. The sensor 9 can be either a Hall effect sensor or an eddy current sensor.

[0043] When two planar motor rotors move in parallel and side-by-side motion, the attractive and repulsive forces between them are almost completely offset, achieving optimal results. In non-parallel motion, such as when the two rotors are offset from each other, or in situations with small angular deviations, while the forces acting on each other cannot be completely offset, the interference force between the two rotors can be reduced by more than an order of magnitude compared to existing technologies, significantly improving the overall stability of the planar motor's operation. Furthermore, in scenarios where the two rotors are not aligned but fixed in position, or when multiple rotors operate collaboratively, the reduction in interference force between the rotors can be achieved by providing a first edge magnet array and a second edge magnet array.

[0044] Furthermore, the planar motor rotor also includes a base plate, which is provided with multiple grooves. The central magnet array, the first edge magnet array and the second edge magnet array are all arranged in the corresponding grooves and are encapsulated with high-strength epoxy resin glue to resist the repulsive force between the magnets and ensure structural stability.

[0045] Example 3 Combine Figure 6 As shown, an embodiment of the present disclosure provides a planar motor, comprising a planar motor mover as described in any one of the above embodiments.

[0046] The planar motor provided by the embodiment of the present disclosure is used, and a central magnet array 1 is set to provide the main suspension force for the movement of the mover, so that the mover is suspended above the stator 5 and can move relative to the stator 5. By setting the edge magnet array 2, the first magnet 211 and the second magnet 221 are alternately arranged, the polarities of adjacent first magnets 211 are alternately arranged, and the polarities of adjacent second magnets 221 are alternately arranged. When there are two planar motor movers on the stator 5 and the two movers are close to each other, multiple attraction action areas and repulsion action areas are formed between the two movers. The attraction and repulsion forces offset each other, so that there is almost no interaction force between the two movers, avoiding mutual influence on each other's movement and improving the movement accuracy.

[0047] The present invention has been described above by way of examples, but the present invention is not limited to the above specific embodiments. Any changes or modifications based on the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A planar motor rotor, characterized in that: It includes a central magnet array and a first edge magnet array, the central magnet array is used to cooperate with the planar motor stator to make the planar motor move and suspend on the stator, the first edge magnet array is used to balance the interaction force between adjacent movers, the first edge magnet array is arranged on both sides of the central magnet array along the length direction of the mover, the first edge magnet array includes a first edge magnet group and a second edge magnet group, the first edge magnet group includes a plurality of first magnets, the second edge magnet group includes a plurality of second magnets, the first magnets and the second magnets are arranged alternately, the polarities of adjacent first magnets are arranged alternately, and the polarities of adjacent second magnets are arranged alternately.

2. The planar motor rotor according to claim 1, characterized in that: The first magnet and the second magnet are both rectangular magnets. The volume of the second magnet is 2a, the volume of the first magnet between adjacent second magnets is 2a, and the volume of the first magnet located at the end of the edge magnet array along the width direction of the mover is a.

3. The planar motor rotor according to claim 1, characterized in that: The first edge magnet array is centrally symmetric with respect to the central magnet array.

4. The planar motor rotor according to claim 3, characterized in that: It also includes a second edge magnet array, which is arranged on both sides of the central magnet array along the width direction of the mover. The composition of the second edge magnet array is the same as that of the first edge magnet array.

5. The planar motor rotor according to claim 4, characterized in that: The second edge magnet array is centrally symmetric with respect to the central magnet array.

6. The planar motor mover according to claim 4, characterized in that: A magnetic separator is provided between the central magnet array, the first edge magnet array and the second edge magnet array, and a surface of the magnetic separator is coated with an insulating coating.

7. The planar motor mover according to claim 4, characterized in that: The thicknesses of the first edge magnet array and the second edge magnet array decrease linearly from the center of the mover to the edge of the mover.

8. The planar motor rotor according to any one of claims 1 to 7, characterized in that: The central magnet array includes a plurality of rectangular magnets uniformly arranged along the length direction of the mover, and the polarities of adjacent rectangular magnets in the plurality of rectangular magnets in the central magnet array are alternately arranged.

9. The planar motor rotor according to any one of claims 1 to 7, characterized in that: The central magnet array is a Halbach array.

10. A planar motor, characterized in that: The invention comprises the planar motor rotor according to any one of claims 1 to 9.

Images