A mist separation filtering device for cutting fluid used in photovoltaic silicon wafer production

Abstract

The present application relates to cutting fluid separation filtering technical field, disclose a kind of cutting fluid mist separation filtering equipment for photovoltaic silicon wafer production, including rack, centrifugal tank, feed shaft, servo motor and filter cartridge;Locking sleeve is installed on feed shaft, multiple fixed sleeve are fixedly installed on locking sleeve, sliding shaft body is installed in each fixed sleeve, annular disc holder is fixedly installed on sliding shaft body, and multiple intercepting components are provided between annular disc holder and fixed sleeve, this cutting fluid mist separation filtering equipment for photovoltaic silicon wafer production, by the radius of intercepting component is dynamically adjusted, can effectively change flow field parameter, realize the optimization processing of different concentration oil mist, by intercepting component can make that particle residence time increases, so as to ultrafine particle and big particle between collision polymerization, so that big particle can carry ultrafine particle and filter cartridge contact, and separate filtering under the action of filter cartridge.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of cutting fluid separation and filtration, in particular to a mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production. BACKGROUND

[0002] In the process of cutting photovoltaic silicon wafers, the diamond wire rubs against the silicon ingot at high speed (usually ≥ 15 m / s), and needs to be continuously injected with polyethylene glycol (PEG) based cutting fluid for cooling and lubrication. This process generates a large amount of sub-micron oil mist, the core characteristics of which include particle ultra-fining, i.e. more than 80% of the oil mist particles have a particle size < 5 µm, of which about 30% are ultra-fine particles (< 1 µm) containing silicon carbide abrasive, silicon powder and PEG droplets; high temperature diffusion, i.e. the local temperature at the cutting point can reach more than 80℃, which intensifies the evaporation and diffusion of the oil mist; and according to the separation principle and structural design, the existing separation and filtration technologies are mainly divided into mechanical filtration type, electrostatic adsorption type and centrifugal separation type. The mechanical filtration type directly intercepts the oil mist particles through multiple layers of filter screens (such as metal wire screens and non-woven fabrics); the electrostatic adsorption type makes the oil mist particles charged by using a high-voltage electric field, so that they are adsorbed to the dust collecting plate; and the centrifugal separation type makes the oil mist enter a high-speed rotating device, and the particles are coalesced and settled after being impacted on the filter wall by centrifugal force.

[0003] The centrifugal separation type filtration equipment can effectively capture 1 µm-10 µm particles, especially suitable for silicon carbide abrasive and silicon powder in PEG based cutting fluid. By adjusting the rotational speed (2000-8000 rpm), it can adapt to different working conditions, and the rotational speed can be increased to prevent clogging at high concentration. However, in the process of cutting photovoltaic silicon wafers, a large amount of oil mist containing sub-micron particles (< 1 µm) is generated under the action of high-speed wire saws in polyethylene glycol (PEG) based cutting fluid, and then the ultra-fine particles are affected by random Brownian motion in the centrifugal field, so that the centrifugal force cannot effectively drive them to impact the filter wall, thereby affecting the separation and filtration effect. Therefore, we propose a mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production. SUMMARY

[0004] The present application aims to provide a mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production to solve the problems raised in the background.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical solution: a mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production, comprising a rack, a centrifugal tank body fixedly installed on the rack, a feed shaft with a through hole being installed inside the centrifugal tank body, a servo motor with an output end connected to the end of the feed shaft being fixedly installed on the top of the centrifugal tank body, and a filter cartridge being installed inside the centrifugal tank body.

[0006] A locking sleeve is fixedly installed on the feed shaft, and the locking sleeve is threadedly connected to the surface of the feed shaft. Multiple fixed sleeves are fixedly installed on the locking sleeve. Each fixed sleeve has a sliding shaft that is slidably connected to its inner wall. An annular disc frame is fixedly installed on the sliding shaft, and multiple intercepting components are provided between the annular disc frame and the fixed sleeve.

[0007] Each of the intercepting components includes an arc-shaped metal rod frame one mounted on an annular disc and an arc-shaped metal rod frame two mounted on the surface of a fixed sleeve. A connecting sleeve is fixedly installed at one end of the arc-shaped metal rod frame one, and the connecting sleeve is rotatably connected to one end of the arc-shaped metal rod frame two. Multiple flow guide grooves are formed on the surfaces of both the arc-shaped metal rod frame one and the arc-shaped metal rod frame two, and the groove depth in the middle region of the flow guide grooves is less than the groove depth at both ends. Multiple electromagnetic components corresponding to the fixed sleeve one are installed inside the locking sleeve. An annular iron plate is fixedly installed at one end of the sliding shaft inside the fixed sleeve. The annular iron plate is located on one side of the electromagnetic component, and the electromagnetic component is energized to generate an attractive force on the annular iron plate. A plastic spring is connected between the annular iron plate and the inner wall of the fixed sleeve.

[0008] Preferably, both the first and second arc-shaped metal rods are movably mounted with telescopic shafts, and the ends of the telescopic shafts are mounted with supporting shafts that are rotatably connected to them, and the supporting shafts are mounted with turbulence sleeves that are rotatably connected to them.

[0009] Preferably, a variable pitch helical blade is fixedly installed on the turbulence sleeve, which induces turbulent diffusion and collision of particles.

[0010] Preferably, the fixed sleeve is further provided with a plurality of spoiler frames, and each of the spoiler frames is provided with a connecting shaft that is threadedly connected to the fixed sleeve at both ends, and the spoiler frame is rotatably connected to the connecting shaft.

[0011] Preferably, a plurality of detachable sleeves are fixedly installed on the spoiler frame, and a spherical connecting rod frame that is movably connected to the detachable sleeves is installed on the detachable sleeves. A conical spoiler block is fixedly installed on the spherical connecting rod frame, and a spiral spoiler blade is fixedly installed on the surface of the conical spoiler block.

[0012] Preferably, the spoiler frame has a wave-like design.

[0013] Preferably, the ends of both the first and second arc-shaped metal rods are spherical, the first arc-shaped metal rod is movably connected to the annular disc frame, and the second arc-shaped metal rod is movably connected to the surface of the fixed sleeve.

[0014] Preferably, the plurality of fixed sleeves have length differences.

[0015] Preferably, the sliding shaft body is provided with a plurality of retractable balls, and a groove is formed in the fixed sleeve, and the balls slide in the groove.

[0016] Compared with the prior art, the present application has the following advantages:

[0017] The present application can effectively change the flow field parameters by dynamically adjusting the radius of the interception component, realize the optimal treatment of different concentration oil mist, and increase the particle residence time through the interception component, so as to make the ultrafine particles collide and aggregate with the large particles, and the large particles can carry the ultrafine particles to contact the filter cartridge, and separate and filter under the action of the filter cartridge.

[0018] The present application utilizes the rotation of the variable pitch helical blade to form a non-uniform shear field on the support type shaft body, induce the ultrafine particles to occur turbulent diffusion collision, and rotate the variable pitch helical blade to generate vortex flow, force the ultrafine particles to deviate from the original motion trajectory, and collide and aggregate with the large particles on the arc-shaped metal rod frame one and the arc-shaped metal rod frame two, effectively control the random diffusion of the ultrafine particles caused by Brownian motion, and increase the collision probability of the ultrafine particles and the large particles.

[0019] The spoiler frame in the present application rotates under the action of cutting fluid, forms a periodic fluctuating flow channel in the rotating state, forces the fluid to generate longitudinal vortex, changes the motion trajectory of the ultrafine particles on one hand, and makes them move to the arc-shaped metal rod frame one and the arc-shaped metal rod frame two, on the other hand, can effectively prolong the migration path of the oil mist particles, increase the collision probability of the ultrafine particles and the large particles, and under the action of the helical spoiler blade, enhance the interference to the ultrafine particles, reconfigure the migration path of the ultrafine particles in the range, make the arc-shaped metal rod frame one and the arc-shaped metal rod frame two become high-efficiency target capture zones, facilitate the ultrafine particles on the conical spoiler and the helical spoiler blade to move to the arc-shaped metal rod frame one and the arc-shaped metal rod frame two, increase the collision probability of the ultrafine particles and the large particles, so that the large particles can carry the ultrafine particles to contact the filter cartridge, and separate and filter under the action of the filter cartridge. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0021] Figure 2 It is a schematic diagram of the centrifugal tank structure of the present application;

[0022] Figure 3 It is a separation schematic diagram of the centrifugal tank structure of the present application;

[0023] Figure 4 It is a schematic diagram of the feed shaft structure of the present application;

[0024] Figure 5 Fig. 2 is a top view of the internal partial structure of the centrifugal tank of the present application;

[0025] Figure 6 Fig. 3 is a schematic view of the internal structure of the fixed sleeve of the present application;

[0026] Figure 7 Fig. 4 is a schematic view of the structure of the arc-shaped metal rod frame one and the arc-shaped metal rod frame two of the present application;

[0027] Figure 8 Fig. 5 is a schematic view of the structure of the flow guide groove of the present application;

[0028] Figure 9 Fig. 6 is a schematic view of the structure of the telescopic shaft body and the supporting shaft body of the present application;

[0029] Figure 10 Fig. 7 is a schematic view of the structure of the supporting shaft body and the variable-pitch helical blade of the present application;

[0030] Figure 11 Fig. 8 is a schematic view of the structure of the spoiler frame of the present application;

[0031] Figure 12 Fig. 9 is a schematic view of the structure of the conical spoiler block of the present application;

[0032] Figure 13 Fig. 10 is a schematic view of the structure of the intercepting component of the present application.

[0033] In the figure: 1, frame; 2, centrifugal tank; 21, discharge sleeve; 22, scraper disc frame; 23, belt drive mechanism; 24, material conveying pipeline; 3, feeding shaft; 31, locking sleeve; 32, fixed sleeve; 321, slot; 33, sliding shaft body; 331, ball; 34, annular disc frame; 35, electromagnetic assembly; 36, annular iron sheet; 37, plastic spring; 4, servo motor; 5, filter cartridge; 6, intercepting component; 61, arc-shaped metal rod frame one; 62, arc-shaped metal rod frame two; 63, connecting sleeve; 64, flow guide groove; 7, telescopic shaft body; 71, supporting shaft body; 72, spoiler sleeve; 73, variable-pitch helical blade; 8, spoiler frame; 81, connecting shaft body; 82, detachable sleeve; 83, spherical connecting rod frame; 84, conical spoiler block; 85, helical spoiler blade. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0035] Please see Figures 1-13 This invention provides a technical solution: a mist separation and filtration device for cutting fluid in photovoltaic silicon wafer production. This invention addresses the technical problems in the background art by inducing collision and aggregation of ultrafine particles with large particles, overcoming the problem of ultrafine particle escape in a centrifugal field. Based on this, this invention is designed as follows: (in conjunction with the attached...) Figure 1 Appendix Figure 2 and attached Figure 3 As shown, the system includes a frame 1, a centrifugal tank 2 fixedly mounted on the frame 1, a detachable discharge sleeve 21 installed at the bottom of the centrifugal tank 2, a telescopic scraper disc frame 22 installed inside the discharge sleeve 21, a feed shaft 3 with a through hole installed inside the centrifugal tank 2, a servo motor 4 whose output end is connected to the end of the feed shaft 3 fixedly mounted at the top of the centrifugal tank 2, and a filter cartridge 5 installed inside the centrifugal tank 2. The filter cartridge 5 rotates via a belt drive mechanism 23. A conveying pipe 24 for conveying coolant is installed inside the frame 1, and the feed shaft 3 is connected to the conveying pipe 24. The above design principle is as follows. All of these are existing technologies, and therefore, this invention will briefly describe them as follows: In the specific working process, the conveying pipe 24 delivers the cutting fluid to the feed shaft 3. During this process, the scraper disc frame 22 seals the bottom of the centrifugal tank 2, and the output of the servo motor 4 controls the feed shaft 3 to rotate. The coolant in the conveying pipe 24 enters the feed shaft 3 and flows out along the through hole on the feed shaft 3, causing the coolant to be thrown against the inner wall of the filter cartridge 5. During this process, the filter cartridge 5 rotates under the action of the belt drive mechanism 23. Since the above components and centrifugal separation filter are existing technologies, this invention will not describe them in detail. (See attached diagram) Figure 4 Appendix Figure 5 Appendix Figure 6 and appendix Figure 7 As shown, a locking sleeve 31 is fixedly installed on the feed shaft 3, and the locking sleeve 31 is threadedly connected to the surface of the feed shaft 3. Multiple fixed sleeves 32 are fixedly installed on the locking sleeve 31, in conjunction with the attached... Figure 5 As shown, there are length differences between the multiple fixed sleeves 32. Each fixed sleeve 32 has a sliding shaft 33 that is slidably connected to its inner wall. An annular disc frame 34 is fixedly installed on the sliding shaft 33, and multiple intercepting components 6 are arranged between the annular disc frame 34 and the fixed sleeves 32. The multiple intercepting components 6 form a dynamically adjustable double cone flow channel. Under low concentration conditions, the sliding shaft 33 shrinks inward, which increases the cross-sectional area of ​​the intercepting components 6 in the double cone flow channel structure, thereby increasing the residence time of oil droplets and providing more Brownian diffusion collision opportunities for ultrafine particles.

[0036] Further, as a further limitation in the application, each intercepting component 6 comprises an arc-shaped metal rod holder one 61 arranged on the annular disc holder 34 and an arc-shaped metal rod holder two 62 arranged on the surface of the fixed sleeve 32, the end of the arc-shaped metal rod holder one 61 and the arc-shaped metal rod holder two 62 are arranged in a spherical shape, and the arc-shaped metal rod holder one 61 is movably connected between the annular disc holder 34, and the arc-shaped metal rod holder two 62 is movably connected between the surface of the fixed sleeve 32, the end of the arc-shaped metal rod holder one 61 is fixedly installed with a connecting sleeve 63, and the connecting sleeve 63 is rotatably connected with one end of the arc-shaped metal rod holder two 62; it should be noted that the plurality of arc-shaped metal rod holders one 61 and the arc-shaped metal rod holders two 62 in the application are of rigid material, a plurality of electromagnetic assemblies 35 corresponding to the fixed sleeve 32 are installed inside the locking sleeve 31, the annular iron sheet 36 is fixedly installed at one end of the sliding shaft body 33 inside the fixed sleeve 32, the annular iron sheet 36 is located on one side of the electromagnetic assembly 35, and the electromagnetic assembly 35 is energized to generate an attractive force on the annular iron sheet 36, wherein the annular iron sheet 36 is connected with the plastic spring 37 between the inner wall of the fixed sleeve 32.

[0037] And a plurality of telescopic balls 331 are installed on the surface of the sliding shaft body 33, and a groove 321 is formed in the fixed sleeve 32, and the balls 331 are limited to slide in the groove 321, and the balls 331 are limited by the groove 321, so as to limit the movement stroke of the sliding shaft body 33, and avoid the condition that the flow passage cross-sectional area of the intercepting component 6 is too large or too small; further, the arc-shaped metal rod holder one 61 and the adjacent arc-shaped metal rod holder one 61, and the arc-shaped metal rod holder two 62 and the adjacent arc-shaped metal rod holder two 62, together constitute the flow passage cross-sectional area, the size of the flow passage cross-sectional area directly affects the flow rate of the cutting fluid and the movement trajectory and collision probability of the particles in the flow passage; as shown in the drawings, since the flow passage cross-sectional area formed between the adjacent arc-shaped metal rod holders one 61 (or between the adjacent arc-shaped metal rod holders two 62) is triangular, based on the area formula of the triangle, S=1 / 2ah (a is the length of the base, h is the height, that is, a is the distance between the connecting sleeves 63, and h is the distance between the connecting sleeves 63 and the surface of the sliding shaft body 33), combined with the drawings, Figure 13 and the drawings, Figure 7 and the drawings, Figure 13 when the sliding shaft body 33 moves outwardly relative to the fixed sleeve 32, since the arc-shaped metal rod holder one 61 and the arc-shaped metal rod holder two 62 are of rigid material, the distance between the arc-shaped metal rod holder one 61, the arc-shaped metal rod holder two 62, the connecting sleeve 63 and the surface of the sliding shaft body 33 is reduced, as shown in the drawings, Figure 13As shown, as the sliding shaft body 33 moves outwardly relative to the fixed sleeve 32, the values of a and h decrease, and accordingly, the flow passage cross-sectional area of the interception component 6 decreases as the sliding shaft body 33 moves outwardly relative to the fixed sleeve 32, and vice versa.

[0038] Specifically, in the high concentration condition, the electromagnetic assembly 35 is in the power-off state, and when the feed shaft 3 rotates, the plurality of fixed sleeves 32 on the surface locking sleeve 31 rotates along with the feed shaft 3, and the sliding shaft body 33 in the fixed sleeve 32 is subjected to the centrifugal force and moves outwardly, the annular disc holder 34 synchronously moves one end of the arc-shaped metal rod holder one 61, and the connecting sleeve 63 synchronously moves the arc-shaped metal rod holder two 62, so that the interception component 6 composed of the arc-shaped metal rod holder one 61 and the arc-shaped metal rod holder two 62 has a radius reduction condition, that is, the radius of the double-cone structure composed of the plurality of interception components 6 is reduced, the flow field parameters can be effectively changed by dynamically adjusting the radius of the interception component 6 in the double-cone structure, and the optimization processing of different concentration oil mists can be realized, when the radius of the interception component 6 is reduced, the flow passage cross-sectional area of the interception component 6 is reduced, the dispersed oil mist is forced to be compressed to a smaller flow passage cross-section, and when the oil mist particles pass through the narrow area, a high-speed shear flow is formed, the high-speed shear flow affects the flow trajectory of the ultra-fine particles, and the ultra-fine particles can be effectively guided to collide and aggregate with large particles.

[0039] In the low concentration condition, when the electromagnetic assembly 35 is powered on, the annular iron sheet 36 is subjected to an attractive force, the annular iron sheet 36 pulls the plastic spring 37, in the process, the sliding shaft body 33 shrinks inwardly relative to the fixed sleeve 32, at this time, the annular disc holder 34 synchronously moves one end of the arc-shaped metal rod holder one 61, in the process, the connecting sleeve 63 synchronously moves the arc-shaped metal rod holder two 62, so that the interception component 6 composed of the arc-shaped metal rod holder one 61 and the arc-shaped metal rod holder two 62 has a radius expansion condition, and the radius of the double-cone structure composed of the plurality of interception components 6 is expanded, so that the flow passage cross-sectional area of the interception component 6 in the double-cone structure is increased, the residence time of the oil droplet particles is increased, more Brownian diffusion collision opportunities are provided for the ultra-fine particles, more collision targets are provided for the ultra-fine particles in the low concentration condition, the ultra-fine particles are more likely to collide and aggregate with large particles, and the ultra-fine particles are more easily separated and filtered by the filter cartridge 5.

[0040] The interception component 6 designed in the application can increase the particle residence time, so that the ultra-fine particles collide and aggregate with the large particles, and the large particles can carry the ultra-fine particles to contact the filter cartridge 5, and the ultra-fine particles are separated and filtered under the action of the filter cartridge 5.

[0041] Further, in order to effectively increase the residence time of particles in the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, the present application is provided with a plurality of flow guide grooves 64 on the surface of the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, and the groove depth of the middle region of the flow guide groove 64 is smaller than that of the two ends. The flow guide groove 64 is used to increase the residence time of large particles, facilitate the collision of ultrafine particles, and combine with the drawings Figure 7 and the drawings Figure 8 As shown in the drawings, when the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62 perform circumferential motion with the feed shaft 3, the particles enter from both ends of the flow guide groove 64. Due to the groove depth of the flow guide groove 64 at both ends being greater than that of the middle region, the particles flow to the middle region under the action of the flow guide groove 64, and finally flow out at the middle region. Combine with the drawings Figure 5 As shown in the drawings, the fixed sleeve 32 in the present application has a length difference, and the corresponding interception component 6 of the plurality of fixed sleeves 32 can process the cooling liquid in each region of the centrifugal tank 2 to increase the processing range and improve the filtering effect.

[0042] Due to the influence of random Brownian motion on ultrafine particles in the centrifugal field, the centrifugal force cannot effectively drive them to collide with the inner wall of the filter cylinder 5. In order to guide the ultrafine particles to collide with the surface of the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, that is, the ultrafine particles collide with the surface of the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, so that the ultrafine particles collide with the large particles retained on the surface of the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, thereby achieving the effect of polymerization. Further, the present application is designed as follows: the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62 are movably installed with a telescopic shaft body 7, and the end of the telescopic shaft body 7 is installed with a support shaft body 71 rotatably connected thereto, and the support shaft body 71 is installed with a turbulence sleeve 72 rotatably connected thereto, wherein the turbulence sleeve 72 is fixedly installed with a variable pitch helical blade 73, which induces the particles to collide in turbulent diffusion.

[0043] Specifically, when the sliding shaft body 33 is adjusted in position, the telescopic shaft body 7 movably connected with the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62 is adjusted in angle and position accordingly, so that the turbulence sleeve 72 and the variable pitch helical blade 73 thereon are adjusted in position and angle under the action of the supporting shaft body 71, and the variable pitch helical blade 73 performs circular motion during the rotation of the feeding shaft 3, and under the action of the cutting fluid in the centrifugal tank 2, the variable pitch helical blade 73 rotates on the supporting shaft body 71, the rotation of the variable pitch helical blade 73 forms a non-uniform shear field on the supporting shaft body 71, induces turbulent diffusion collision of ultra-fine particles, the rotation of the variable pitch helical blade 73 generates vortex flow, forces the ultra-fine particles to deviate from the original trajectory, and collide with large particles on the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, and the random diffusion of ultra-fine particles caused by Brownian motion is effectively controlled to increase the collision probability of ultra-fine particles and large particles.

[0044] In the rotating state, the axial pitch change of the variable pitch helical blade 73 can induce the fluid to generate a radial velocity component, and the pressure gradient on the blade surface forces the fluid to move along the helical trajectory; a three-dimensional vortex structure is formed instead of one-way flow; this design reduces local shear force, increases the residence time of particles in the vortex core area, and promotes the collision and aggregation of ultra-fine particles and large particles; it should be noted that when processing special materials prone to disaggregation (such as PEG-silicon powder), the rotation speed of the feeding shaft can be appropriately reduced, and the flow rate can be correspondingly reduced through the above-mentioned components to avoid the disaggregation of the aggregates. For special materials prone to disaggregation, existing electrostatic adsorption methods can be used for processing. The electrostatic adsorption method uses a high-voltage electric field to charge oil mist particles, thereby adsorbing them to the dust collection plate (existing technology processing component).

[0045] Further, in actual application, ultra-fine particles are usually located near the feeding shaft 3 due to the influence of random Brownian motion in the centrifugal field. In order to enable the ultra-fine particles to effectively move to the area where the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62 are located, the present application further provides a plurality of turbulence plate frames 8 on the fixed sleeve 32, wherein the turbulence plate frame 8 is designed in a wave shape, both ends of each turbulence plate frame 8 are provided with a connecting shaft body 81 threadedly connected with the fixed sleeve 32, the turbulence plate frame 8 is rotatably connected with the connecting shaft body 81, a plurality of detachable sleeves 82 are fixedly installed on the turbulence plate frame 8, a spherical connecting rod frame 83 movably connected with the detachable sleeve 82 is installed on the detachable sleeve 82, and a conical turbulence block 84 is fixedly installed on the spherical connecting rod frame 83, and a helical turbulence blade 85 is fixedly installed on the surface of the conical turbulence block 84. It should be noted that the above-mentioned movably connected components are provided with sealing gaskets. Since the sealing effect of the sealing gasket is a common component in the prior art, the present application does not describe it in detail.

[0046] Specifically, when the wave-shaped spoiler frame 8 performs circumferential movement with the axis of the feed shaft 3 as the center line, it will be rotated under the action of the cutting fluid, and a periodic undulating flow channel is formed in the rotating state, forcing the fluid to generate longitudinal vortex, on the one hand, changing the motion trajectory of the ultra-fine particles, making them move to the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, on the other hand, the oil mist particle migration path can be effectively prolonged, and the collision probability of the ultra-fine particles and the large particles is increased. At the same time, the conical spoiler block 84 on the spoiler frame 8 and the spiral spoiler blade 85 thereon will rotate under the action of the cutting fluid when moving with the spoiler frame 8. Since the spherical connecting rod frame 83 is movably connected with the detachable sleeve 82, the conical spoiler block 84 can swing and sway under the action of the cutting fluid. The streamlined structure of the conical spoiler block 84 at both ends and the bulge at the middle part forms a "strong-weak-strong" three-section centrifugal force gradient when rotating at high speed, and the spiral spoiler blade 85 enhances the disturbance to the ultra-fine particles, and the migration path of the ultra-fine particles in the reconstruction range is changed, so that the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62 become high-efficiency targeted capture zones, and the ultra-fine particles on the conical spoiler block 84 and the spiral spoiler blade 85 move to the arc-shaped metal rod frame one 61 and the arc-shaped metal rod frame two 62, so as to increase the collision probability of the ultra-fine particles and the large particles, so that the large particles can carry the ultra-fine particles to contact the filter cartridge 5, and the ultra-fine particles are separated and filtered under the action of the filter cartridge 5.

[0047] It should be noted that the relational terms herein such as first and second and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0048] Although embodiments of the present application have been shown and described, it is to be understood that various modifications, substitutions, replacements and changes can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A mist separation filtration apparatus for cutting fluid used in photovoltaic silicon wafer production, characterized by, Including frame (1), centrifugal tank body (2) fixedly installed on frame (1), the inside of centrifugal tank body (2) is installed with the feeding shaft (3) of opening through hole, and the top of centrifugal tank body (2) is fixedly installed with servo motor (4) with the end of feeding shaft (3) is connected, and the inside of centrifugal tank body (2) is installed with filter cartridge (5); The feeding shaft (3) is fixedly installed with locking sleeve (31), and the locking sleeve (31) is threadedly connected with the surface of feeding shaft (3), a plurality of fixed sleeves (32) are fixedly installed on the locking sleeve (31), each fixed sleeve (32) is internally installed with sliding shaft body (33) slidably connected with the inner wall thereof, annular disc holder (34) is fixedly installed on the sliding shaft body (33), and a plurality of intercepting components (6) are arranged between the annular disc holder (34) and the fixed sleeve (32). Each intercepting component (6) comprises an arc-shaped metal pole frame one (61) arranged on the annular disc holder (34) and an arc-shaped metal pole frame two (62) arranged on the surface of the fixed sleeve (32), the arc-shaped metal pole frame one (61) is fixedly installed with a connecting sleeve (63) at the end thereof, and the connecting sleeve (63) is rotatably connected with one end of the arc-shaped metal pole frame two (62); a plurality of guide grooves (64) are formed in the surfaces of the arc-shaped metal pole frame one (61) and the arc-shaped metal pole frame two (62), and the groove depth of the middle region of the guide grooves (64) is smaller than the groove depths of the two ends; a plurality of electromagnetic assemblies (35) corresponding to the fixed sleeves (32) are installed in the locking sleeve (31), an annular iron sheet (36) is fixedly installed at one end of the sliding shaft body (33) located in the fixed sleeve (32), the annular iron sheet (36) is located on one side of the electromagnetic assembly (35), and the electromagnetic assembly (35) is energized to generate an attractive force on the annular iron sheet (36), wherein a plastic spring (37) is connected between the annular iron sheet (36) and the inner wall of the fixed sleeve (32).

2. The mist separation filtering device for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: The arc-shaped metal pole frame one (61) and the arc-shaped metal pole frame two (62) are movably installed with telescopic shaft bodies (7), the end of each telescopic shaft body (7) is installed with a support shaft body (71) rotatably connected therewith, and a turbulence sleeve (72) is rotatably connected with the support shaft body (71).

3. The mist separation filtering device for cutting fluid used in photovoltaic silicon wafer production according to claim 2, characterized in that: The turbulence sleeve (72) is fixedly installed with variable pitch helical blades (73), which induce turbulent diffusion collision of particles.

4. The mist separation filtering device for cutting fluid used in photovoltaic silicon wafer production according to any one of claims 1-3, characterized in that: A plurality of turbulence plate racks (8) are arranged on the fixed sleeve (32), and a connecting shaft body (81) is threadedly connected with the fixed sleeve (32) at both ends of each turbulence plate rack (8), and the turbulence plate rack (8) is rotatably connected with the connecting shaft body (81).

5. The mist separation filtration apparatus for cutting fluid used in photovoltaic silicon wafer production according to claim 4, characterized in that: A plurality of detachable sleeves (82) are fixedly installed on the spoiler frame (8), a spherical connecting rod frame (83) is movably connected to the detachable sleeves (82), a conical spoiler block (84) is fixedly installed on the spherical connecting rod frame (83), and helical spoiler blades (85) are fixedly installed on the surface of the conical spoiler block (84).

6. The mist separation filtering device for cutting fluid used in photovoltaic silicon wafer production according to claim 4, characterized in that: The spoiler frame (8) is designed in a wave shape.

7. The mist separation filtration apparatus for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: The end portions of the arc-shaped metal rod frame one (61) and the arc-shaped metal rod frame two (62) are provided in a spherical shape, the arc-shaped metal rod frame one (61) is movably connected to the annular disc frame (34), and the arc-shaped metal rod frame two (62) is movably connected to the surface of the fixed sleeve (32).

8. The mist separation filtration apparatus for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: The plurality of fixed sleeves (32) have length differences.

9. The mist separation filtration apparatus for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: A plurality of telescopic balls (331) are installed on the surface of the sliding shaft body (33), and a slot (321) is formed in the fixed sleeve (32), and the balls (331) are limited to slide in the slot (321).

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