Induction heater of single crystal furnace

Abstract

The invention discloses a single crystal furnace induction heater which is characterized by comprising a melt, a quartz crucible, a crucible side, an induction heater coil, a crucible core, a support rod and a furnace chassis, the melting body is supported in the quartz crucible, the quartz crucible is supported in the crucible side, the crucible side is provided with the crucible core, the induction heater coil is arranged on the peripheral wall of the crucible side, the furnace base plate is provided with a support rod hole, and a support rod is connected with a lower shaft through the furnace base plate. Eddy current heating is directly generated in a workpiece through electromagnetic induction, the target temperature can be achieved within a few minutes, the energy utilization rate can reach 90% or above, energy consumption is reduced, contact-free heating is achieved, safety performance is improved, easily-damaged and easily-consumed parts are avoided, the operation and maintenance service life is long, and the use cost of a single crystal thermal field is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnace heating, and in particular to an induction heater for a single crystal furnace. Background Art

[0002] Existing single crystal furnaces mainly rely on graphite heaters to melt silicon materials, using resistance heating to convert electrical energy into thermal energy. It usually takes a certain amount of time to achieve target stability, which greatly reduces heating efficiency and causes serious energy waste. There is also a risk of graphite electrode ignition, and the lifespan and maintenance time are short. Graphite heaters and graphite electrodes need to be replaced regularly, and the cost of using single crystal thermal fields is high.

[0003] Therefore, it is necessary to provide a single crystal furnace induction heater to solve the above technical problems. Summary of the Invention

[0004] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the title of the invention of this application to avoid blurring the purpose of this section, the abstract of the specification and the title of the invention, and such simplifications or omissions cannot be used to limit the scope of the invention.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: an induction heater for a single crystal furnace, characterized in that it includes a melt, a quartz crucible, a crucible side, an induction heater coil, a crucible core, a support rod and a furnace bottom plate; the melt is carried in the quartz crucible, the quartz crucible is carried in the crucible side, the crucible side is provided with the crucible core, the induction heater coil is arranged and installed on the outer peripheral wall of the crucible side, the furnace bottom plate is provided with a support rod hole, and the support rod is connected to the lower shaft through the furnace bottom plate.

[0006] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the crucible core is arranged at the center of the bottom of the crucible side.

[0007] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the crucible side is mounted on a crucible support, and the crucible support is supported on a support rod.

[0008] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the support rod is located at the center of the crucible support and the crucible core.

[0009] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the induction heating coil is a spiral coil.

[0010] As a preferred embodiment of the single crystal furnace induction heater of the present invention, an induction coil interface is provided on the furnace chassis, and the induction heater coil is installed on the furnace chassis through the induction coil interface.

[0011] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the induction heater coil is connected to the power output terminal through a copper tube or cable; the induction heater coil adjusts the circuit resonant frequency through a series / parallel capacitor group to match the coil impedance with the power output characteristics.

[0012] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the circulating water interface of the induction heater coil is sealedly connected to an external cooling tower or chiller, and a flow alarm is configured to monitor abnormalities in real time.

[0013] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the induction heater coil generally has 2-10 turns, and the coil diameter is 1.05-1.20 times the crucible diameter.

[0014] As a preferred embodiment of the single crystal furnace induction heater of the present invention, the induction heater coil is wound with a hollow copper tube, and cooling water is circulated inside.

[0015] The beneficial effects of the present invention are as follows: the single crystal furnace induction heater of the present invention replaces the graphite heater, and the induction heating energy utilization rate is higher. The induction heating of the induction heater directly generates eddy current heating in the workpiece through electromagnetic induction, and can reach the target temperature in just a few minutes. The energy utilization rate can reach more than 90%, which reduces energy consumption, non-contact heating, increased safety performance, no vulnerable and consumable parts, long operation and maintenance life, and reduces the use cost of the single crystal thermal field. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0017] in:

[0018] Figure 1 A cross-sectional view of the structure of the single crystal furnace induction heater according to an embodiment of the present invention;

[0019] Figure 2 This is a three-dimensional structural diagram of the single crystal furnace induction heater described in an embodiment of the present invention. DETAILED DESCRIPTION

[0020] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0022] Next, the present invention is described in detail with reference to schematic diagrams. For ease of illustration, when describing embodiments of the present invention, cross-sectional views illustrating device structures may be partially enlarged and not to scale. Furthermore, these schematic diagrams are merely illustrative and should not limit the scope of protection of the present invention. Furthermore, in actual production, three-dimensional dimensions, including length, width, and depth, should be included.

[0023] Furthermore, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive with other embodiments.

[0024] Example 1

[0025] Reference Figures 1-2The first embodiment of the present invention is an induction heater for a single crystal furnace, characterized in that it includes a melt 2, a quartz crucible 3, a crucible side 4, an induction heater coil 1, a crucible core 5, a support rod 7, and a furnace bottom plate 8. The melt 2 is carried in the quartz crucible 3, which is carried in the crucible side 4. The crucible side 4 is provided with the crucible core 5. The induction heater coil 1 is mounted on the outer peripheral wall of the crucible side 4. The furnace bottom plate 8 is provided with a support rod hole, and the support rod 7 is connected to the lower shaft through the furnace bottom plate 8. Specifically, the induction heater coil 1 is connected to the power output terminal via a copper tube or cable to convert industrial frequency alternating current into medium and high frequency current. The furnace bottom plate 8 is provided with an induction coil interface 9, and the induction heater coil 1 is mounted on the furnace bottom plate 8 through the induction coil interface 9. The crucible core 5 is located at the center of the bottom of the crucible side 4. The crucible side 4 is mounted on the crucible support 6, and the crucible support 6 is supported by the support rod 7. To enhance the stability of the quartz crucible 3, the crucible 3 is mounted in a crucible side 4. A crucible core 5 is located at the bottom center of the crucible side 4. The crucible side 4 is mounted in a crucible support 6, which is connected to a support rod 7 and supported by the support rod 7. The crucible core 5 is perpendicular to the support rod 7. Furthermore, the furnace bottom 8 is provided with a support rod hole, through which the support rod 7 is connected to the lower shaft. The furnace bottom 8 is provided with an induction coil interface 9. The melt 2 is supported in the quartz crucible 3. The quartz crucible 3 is supported in the crucible side 4. The crucible core 5 is located in the crucible side 4. The crucible core 5 is located in the crucible side 4. The furnace bottom 8 is provided with a support rod hole, through which the support rod 7 is connected to the lower shaft. The crucible support 6 is supported by the support rod 7. The crucible side 4 and the crucible core 5 are supported on the crucible support 6. The induction heater coil 1 is connected to the power output terminal via a copper tube or cable. The induction heating coil 1 is a spiral coil. The furnace bottom 8 is provided with an induction coil interface 9. The induction heater coil 1 adjusts the circuit resonant frequency by connecting a series / parallel capacitor group so that the coil impedance matches the power supply output characteristics and maximizes the energy transmission efficiency. The induction heater coil 1 is usually 2-10 turns, and the coil diameter is 1.05-1.20 times the crucible diameter. The circulating water interface of the induction heater coil 1 is sealed and connected to an external cooling tower or chiller, and a flow alarm is configured to monitor abnormalities in real time. The induction heater coil 1 is preferably wound with a hollow copper tube, and circulating cooling water is passed through the inside. The cross-sectional shape of the induction heater coil 1 can be circular, square, or rectangular. The present invention does not impose any restrictions. In order to make the heating effect of the induction heater coil 1 better, the induction heater coil 1 is concentric with the crucible side 4; the crucible side 4 is concentric with the quartz crucible 3.

[0026] In summary, the present application overcomes the energy waste and ignition risk caused by relying on graphite heaters or resistance heating in the prior art, can improve energy utilization, reduce energy consumption, non-contact heating, increase safety performance, no vulnerable and consumable parts, long operation and maintenance life, and reduce the cost of using single crystal thermal fields.

[0027] It is important to note that the construction and arrangement of the present application shown in a number of different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, directional changes, etc.) without departing substantially from the novel teachings and advantages of the subject matter described in this application. For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of the element may be inverted or otherwise changed, and the nature or number or position of the discrete elements may be altered or changed. Therefore, all such modifications are intended to be included within the scope of the present invention. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "means plus function" clause is intended to cover the structure described herein that performs the function, and is not only structurally equivalent but also equivalent structures. Other replacements, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the present invention. Therefore, the invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0028] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0029] It will be appreciated that in the development of any actual embodiment, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will, for those of ordinary skill having the benefit of this disclosure, be a routine undertaking of design, fabrication, and production without undue experimentation.

[0030] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A single crystal furnace induction heater, characterized in that: The invention comprises a melt (2), a quartz crucible (3), a crucible side (4), an induction heater coil (1), a crucible core (5), a supporting rod (7) and a furnace bottom plate (8); the melt (2) is carried in the quartz crucible (3), the quartz crucible (3) is carried in the crucible side (4), the crucible core (5) is provided on the crucible side (4), the induction heater coil (1) is arranged and mounted on the outer peripheral wall of the crucible side (4), a supporting rod hole is provided on the furnace bottom plate (8), and the supporting rod (7) is connected to the lower shaft through the furnace bottom plate (8).

2. The single crystal furnace induction heater according to claim 1, characterized in that: The crucible core (5) is arranged at the center of the bottom of the crucible side (4).

3. The single crystal furnace induction heater according to claim 1, characterized in that: The crucible side (4) is mounted on a crucible support (6), and the crucible support (6) is supported on a support rod (7).

4. The single crystal furnace induction heater according to claim 3, characterized in that: The supporting rod (7) is located at the center of the crucible support (6) and the crucible core (5).

5. The single crystal furnace induction heater according to claim 1, characterized in that: The induction heater coil (1) is a spiral coil.

6. The single crystal furnace induction heater according to claim 1, characterized in that: An induction coil interface (9) is provided on the furnace bottom plate (8), and the induction heater coil (1) is installed on the furnace bottom plate (8) through the induction coil interface (9).

7. The single crystal furnace induction heater according to claim 1, characterized in that: The induction heater coil (1) is connected to the power output terminal through a copper tube or a cable; the induction heater coil (1) adjusts the circuit resonant frequency through a series / parallel capacitor group to match the coil impedance with the power output characteristics.

8. The single crystal furnace induction heater according to claim 1, characterized in that: The circulating water channel interface of the induction heater coil (1) is sealed and connected to an external cooling tower or a chiller, and is equipped with a flow alarm to monitor abnormalities in real time.

9. The single crystal furnace induction heater according to claim 1, characterized in that: The induction heater coil (1) usually has 2 to 10 turns, and the coil diameter is 1.05 to 1.20 times the crucible diameter.

10. The single crystal furnace induction heater according to claim 1, characterized in that: The induction heater coil (1) is wound with a hollow copper tube, and cooling water circulates inside.

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