Reel room operation method and reel room operation equipment

Abstract

The invention relates to the field of semiconductor manufacturing equipment, in particular to operation equipment between reels. The multiple stations are distributed at equal intervals in one direction according to a first interval; a plurality of carrying ends used for transferring the chips are arranged, and a second interval which is twice of the first interval is formed between every two adjacent carrying ends; and the plurality of chips are synchronously transferred among different stations along the same direction by the same or different carrying ends. And the chip can rotate around the axis of the chip under the driving of the carrying end, so that the chip can fall into different stations in a preset posture. A plurality of stations distributed at equal intervals in the first direction are adopted, and two carrying ends with a specific distance are arranged, so that synchronous carrying operation of a chip between the first half station of tape opening, angle detection and testing and the second half station of testing, bottom detection and braiding is realized, and the carrying path and the cycle time are greatly shortened.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing equipment, and in particular to a reel-to-reel operating device. Background Art

[0002] In the field of chip manipulation between reels, existing methods usually equip multiple feeding stations to load the original reel, and pick up bare chips or packaged chips from them, load them onto the target reel or send them into the test device for classified storage. In this process, the chip needs to be transported in sequence between multiple stations by the transport end, and it is necessary to ensure that it falls accurately into the target station with the correct posture so that the station can identify and load it. The existing technology relies on a special posture correction mechanism to correct the chip posture. The mechanism usually clamps the chip side through a pair of opening and closing correction ends so that the end is parallel to the correction end. However, this mechanism has significant defects: first, it needs to occupy the spacing space between adjacent stations, resulting in a less compact equipment layout and increased floor space; second, direct contact between the correction end and the end of the chip poses a risk of damaging the chip. Summary of the Invention

[0003] The purpose of the present invention is to provide a reel-to-reel operation method and equipment to solve the problems existing in the prior art.

[0004] The technical solution of the present invention is: a reel-to-reel operation method, wherein a plurality of workstations are equally spaced along a direction at a first spacing; a plurality of transfer ends for transferring chips are provided, and a second spacing between adjacent transfer ends is twice the first spacing; Multiple chips are transferred synchronously along the same direction between different workstations by the same or different transfer ends.

[0005] Preferably, the chip can rotate around its own axis under the drive of the transport end, so that the chip can fall into different workstations in a preset posture.

[0006] A reel-to-reel operating device includes a base plate, on which is provided: The main transfer device comprises a pair of nozzle assemblies, wherein any of the nozzle assemblies is arranged in a vertical direction, and the two nozzle assemblies maintain a first spacing in the horizontal direction; a transfer base is provided to connect the two nozzle assemblies, and the transfer base is capable of moving in a first direction; A tape-opening component, and a detection component and a braiding component arranged along a first direction relative to the tape-opening component; the detection components are provided in plurality, the plurality of detection components are arranged along the first direction, and there is a second spacing between adjacent detection components, the second spacing is set to half of the first spacing, and there is also a second spacing between the braiding component and the adjacent detection component.

[0007] Preferably, the suction nozzle assembly includes a suction nozzle, and the suction nozzle is connected to a suction nozzle driver, and the suction nozzle driver can drive the suction nozzle to rotate around the axis of the suction nozzle.

[0008] Preferably, the suction nozzle assembly includes a suction nozzle mounting plate, the suction nozzle mounting plate is arranged in the horizontal direction, and the suction nozzle is vertically mounted on one end of the suction nozzle mounting plate; the interior of the suction nozzle mounting plate is hollow, and is provided with a transmission connected to the tail end of the suction nozzle, and the end of the transmission away from the suction nozzle is transmission-connected to the suction nozzle driver.

[0009] Preferably, a pair of the suction nozzle assemblies are installed on the suction nozzle base plate through a connecting plate, and a sliding mechanism is provided on the suction nozzle base plate in the vertical direction. The sliding mechanism includes a slide rail and a slider that are slidingly matched. The slide rail is fixed to the suction nozzle base plate in the vertical direction, and the slider is fixed to the connecting plate; a lifting drive is provided on the suction nozzle base plate, and the lifting drive can drive the suction nozzle assembly to move up and down along the slide rail.

[0010] Preferably, a lifting screw is coaxially fixed to the execution end of the lifting driver, and a lifting connecting block is provided on the connecting plate toward the direction of the nozzle base. The lifting connecting block enters the interior of the nozzle base and cooperates with the lifting screw thread. A lifting limit block is fixed to the bottom end of the lifting screw; an angular contact ball bearing is provided on the top end of the lifting screw, and the angular contact ball bearing is embedded in the bottom plate of the nozzle.

[0011] Preferably, a nozzle transfer base is provided on the transfer base, and the nozzle transfer base is connected to a transfer driver. The nozzle assembly is fixed on the nozzle transfer base and reciprocates along a straight line formed by multiple parallel workstations under the drive of the transfer driver.

[0012] Preferably, the plurality of detection components are respectively configured as an angle detection mechanism, a testing mechanism and a bottom detection mechanism; The testing mechanism includes a test seat, which is provided with an interface that can be electrically connected to the chip, and the test seat is detachably connected to the mobile platform; the mobile platform has a first driver and a second driver, and the test seat moves in a horizontal direction under the drive of the first driver and the second driver respectively.

[0013] A reel-to-reel handling device comprises a plurality of workstations arranged equidistantly along a straight line, a main transfer device disposed parallel to the plurality of workstations, the main transfer device being provided with at least two suction nozzles, the horizontal spacing between the at least two suction nozzles being set to twice that of any adjacent workstations; the at least two suction nozzles being driven by the same lifting drive device, so that at least two chips can be transferred simultaneously between different workstations; The nozzle can rotate around its own axis, so that the chip can be in a preset position in any work station.

[0014] Compared with the prior art, the advantages of the present invention are: (1) This method and equipment adopts a layout of multiple workstations equidistantly distributed along the first direction and is equipped with two handling ends with a specific spacing, which realizes the synchronous handling of chips between the first half of the workstations of tape unwinding, angle detection, and testing and the second half of the workstations of testing, bottom detection, and taping, greatly shortening the handling path and cycle time.

[0015] (2) By integrating the self-rotation function at the transport end, the posture of the adsorbed chip can be directly adjusted according to the information fed back from the angle detection station, so that it can fall into the target station in the preset correct posture. The traditional independent posture correction mechanism that is easy to damage the chip and takes up space is discarded, making the equipment layout more compact and effectively reducing the floor space. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments: Figure 1 This is a structural diagram of a reel room operating device according to the present invention; Figure 2 This is a structural diagram of the detection mechanism of the present invention; Figure 3 This is a structural diagram of the main transfer device of the present invention; Figure 4 This is a structural diagram of the nozzle assembly of the present invention; Figure 5 This is a cross-sectional view of the nozzle assembly of the present invention; Among them: 1. Tape opening assembly, 2. Tape bag opening camera, 3. Angle detection station, 4. Main transfer device, 41. Nozzle assembly, 411. Nozzle, 412. Nozzle driver, 413. Nozzle mounting plate, 414. Nozzle base plate, 415. Sliding mechanism, 416. Connecting plate, 417. Lifting driver, 42. Transmission mechanism, 421. Lifting screw, 422. Lifting connecting block, 423. Lifting limit block, 424. Angular contact ball bearing, 43. Transfer base, 44. Nozzle transfer base, 45. Transfer driver, 5. Testing mechanism, 501. Mobile platform, 502. Test seat, 503. Interface, 6. Bottom detection mechanism, 7. Tape assembly, 8. Throwing assembly. DETAILED DESCRIPTION

[0017] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "clockwise", "counterclockwise" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this application.

[0018] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more, unless otherwise explicitly specified.

[0019] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0020] In this application, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0021] The present invention is further described in detail below with reference to specific embodiments: A reel-to-reel operation method is provided with multiple feeding positions, which can simultaneously load several original reels. The method is used to pick up bare chips or packaged chips from these original reels one by one and load the picked chips into an empty target reel; or to remove chips from the original reel and place them into a test device, and then classify and store chips with different test results in their respective target reels.

[0022] During the above work, the chip needs to be transported from the transport end to multiple stations in sequence, and it is necessary to ensure that the chip falls into the target station in a correct posture so that it can be recognized and loaded by the corresponding station.

[0023] To improve chip handling efficiency, the preferred solution of this application distributes multiple workstations equally along the first direction at a second spacing, and provides multiple transfer ends for transferring chips, with a first spacing between adjacent transfer ends being twice the second spacing. In this embodiment, two transfer ends are provided for transferring chips, one of which is responsible for transferring chips between workstations in the first half of the process, and the other is responsible for transferring chips between workstations in the second half of the process, and the two transfer ends transfer chips synchronously.

[0024] In the prior art, the position of the chip falling into the target workstation is implemented by a special posture correction mechanism. Usually, the posture correction mechanism is achieved by a pair of opening and closing correction ends that clamp and abut the peripheral side of the chip, so that the end of the chip is parallel to the correction end, thereby achieving the correction effect. However, this posture correction mechanism needs to be placed within the second spacing between adjacent workstations, resulting in a non-compact layout and easily expanding the equipment's footprint. In addition, the direct contact between the posture correction mechanism and the chip end can easily damage the chip.

[0025] To this end, the transfer end of the present application can rotate around its own axis, so that the chip connected thereto can fall into the target station in a preset posture, thereby eliminating the need for a separate posture correction mechanism.

[0026] The present application provides a reel-to-reel operating device, including a base plate, on which a main transfer shaft device, a tape unwinding component 1, a detection component and a tape braiding component 7 are arranged.

[0027] The main transfer mechanism 4 comprises a pair of nozzle assemblies 41. Each nozzle assembly 41 is arranged vertically, with its bottom end serving as a transfer end for picking up chips. The two nozzle assemblies 41 are maintained at a constant first horizontal spacing. A transfer base 43 is provided to connect the two nozzle assemblies 41. The transfer base 43 can drive the pair of nozzle assemblies 41 in a first direction, and combined with the lifting and lowering motion of the nozzle assemblies 41, it can simultaneously transfer chips at two different workstations.

[0028] The opening tape assembly 1 is located in the first of the plurality of stations, and is used to open the tape of the reel, so that the suction nozzle assembly 41 can suck the chip in the reel. In actual application scenarios, the reel is driven by a ratchet mechanism to run along its own length direction, so there is a positioning error in the length direction of the reel. Therefore, the opening tape assembly 1 is provided with an opening tape bag opening camera 2 above for detecting the actual position of the chip that needs to be opened, and comparing the difference between the actual position of the chip and the preset position of the chip. The opening tape assembly 1 has a motion compensation mechanism that adjusts the position of the chip according to the comparison result, so that the actual position of the chip is the same as the preset position.

[0029] In the embodiment, three detection assemblies are provided, one of which is configured as an angle detection station 3 corresponding to the opening tape assembly 1. The angle detection station 3 can detect the angle of the chip adsorbed on the conveying end, so that the suction nozzle assembly 41 can adjust the pose of the chip according to the angle. Specifically, the angle detection station 3 is provided with an angle detection camera, which reads the angle of the chip by taking a picture.

[0030] Another detection assembly is configured as a test mechanism 5 provided on the side of the angle detection station 3 away from the opening tape assembly 1. The test mechanism 5 is used to detect the parameter performance of the chip, so as to facilitate subsequent processes to classify and store the chip in different reels according to different detection results.

[0031] The test mechanism 5 includes a test seat 502, which is provided with an interface 503 capable of electrically connecting with the pins on the chip, and performs performance test on the chip through the interface 503. The test seat 502 is connected with the base plate through a moving platform 501, and is detachably connected with the moving platform 501. Because of different specifications of chips, in actual application scenarios, the test seat 502 is provided in multiple, so that different test seats 502 can be replaced to correspondingly plug with the pins of different chips, realizing the test function of different chips. The moving platform 501 can drive the test seat 502 to move in the horizontal direction through a first driver and a second driver composed of two sets of servo mechanisms. When the position of the chip adsorbed by the suction nozzle assembly 41 deviates from the test seat 502, the first driver and the second driver can drive the test seat 502 to move, so as to compensate for the deviation.

[0032] The last detection component is configured as a bottom detection mechanism 6 arranged at the end of the test mechanism 5 away from the angle detection station 3, and the bottom detection mechanism 6 is provided with a bottom detection camera. When the chip is carried by the suction nozzle assembly 41 to the top of the bottom detection camera, the bottom detection camera detects defects on the bottom of the chip by taking a photo, and the chip without defects is placed in the taping assembly 7 by the suction nozzle assembly 41. In addition, the deviation of the chip in the angle and horizontal directions also needs to be fed back to prevent the position of the chip from changing when it is sucked again. The deviation in the angle direction is compensated by the suction nozzle assembly 41, and the deviation in the horizontal direction is compensated by the taping assembly 7.

[0033] When the chip is released from the suction nozzle assembly 41 into the taping assembly 7, the top of the chip will be exposed, so that the top detection camera arranged in the taping assembly 7 can detect defects on the top of the chip, and the chip without defects will be molded into the target reel. If there is a defect, it will be sucked out by the suction nozzle assembly 41 and placed in the material throwing assembly 8.

[0034] The distance between the angle detection station 3, the test mechanism 5 and the bottom detection mechanism 6 is set as the second distance, and the distance between the taping assembly 1 and the angle detection station 3 and the distance between the bottom detection mechanism 6 and the taping assembly 7 are also set as the second distance. In this way, when one of the suction nozzle assemblies 41 carries the chip to transfer between the taping assembly 1, the angle detection station 3 and the test mechanism 5, the other suction nozzle assembly 41 can carry the chip to transfer between the test mechanism 5, the bottom detection mechanism 6 and the taping assembly 7 at the same time.

[0035] The suction nozzle assembly 41 includes a suction nozzle 411, and the suction nozzle 411 is connected with a suction nozzle driver 412. The suction nozzle driver 412 can drive the suction nozzle 411 to rotate around the axis of the suction nozzle 411, so as to realize the posture correction function of the chip adsorbed by the suction nozzle 411. Specifically, the suction nozzle assembly 41 includes a suction nozzle mounting plate 413, which is arranged in the horizontal direction. The suction nozzle 411 is vertically mounted at one end of the suction nozzle mounting plate 413, and the suction nozzle driver 412 is also vertically mounted on the suction nozzle mounting plate 413. The suction nozzle mounting plate 413 is hollow inside, and the output end of the suction nozzle driver 412 and the tail end of the suction nozzle 411 away from the adsorption end are both placed inside the suction nozzle mounting plate 413. A transmission device is arranged to transmit the output end of the suction nozzle driver 412 and the tail end of the suction nozzle 411, so that the action of the suction nozzle driver 412 can be transmitted to the suction nozzle 411 through the transmission device. In this embodiment, the transmission device is a synchronous belt.

[0036] The lifting and lowering movement of the nozzle assembly 41 is achieved through the following structure: a pair of nozzle assemblies 41 are mounted on the same nozzle base plate 414, and a sliding mechanism 415 is provided on the nozzle base plate 414 in the vertical direction. The sliding mechanism 415 includes a sliding rail and a slider that slide together. The slide rail is fixed to the nozzle base plate 414 in the vertical direction, and the slider is fixed to the nozzle assembly 41. A lifting driver 417 is also provided on the nozzle base plate 414. The lifting driver 417 is connected to the pair of nozzle assemblies 41 through a transmission mechanism 42, driving the pair of nozzle assemblies 41 to perform synchronous lifting and lowering movements. Furthermore, in order to increase the synchronization of the movement of the pair of nozzle assemblies 41, in this embodiment, the pair of nozzle assemblies 41 are fixedly mounted on the connecting plate 416, and the slider is mounted on the connecting plate 416, so that the lifting driver 417 drives the connecting plate 416 to drive the pair of nozzle assemblies 41 to move.

[0037] The transmission mechanism 42 includes a lifting screw 421 mounted on the actuator end of the lifting actuator 417. The lifting screw 421 is coaxially fixed to the actuator end of the lifting actuator 417. A lifting connection block 422 is provided on the connecting plate 416, facing the base of the suction nozzle 411. The lifting connection block 422 extends into the base of the suction nozzle 411 and engages with the lifting screw 421. When the lifting actuator 417 is in operation, the lifting screw 421 cooperates with the sliding mechanism 415 to enable the connecting plate 416 to drive the pair of suction nozzle assemblies 41 to move upward and downward.

[0038] Furthermore, a lifting stop block 423 is fixed to the bottom end of the lifting screw 421. This stop block 423 has a diameter larger than that of the lifting screw 421 and is used to limit the lifting stroke and prevent the lifting screw 421 from being disconnected from the lifting connection block 422. An angular contact ball bearing 424 is provided at the top end of the lifting screw 421. This angular contact ball bearing 424 is embedded in the inner wall of the nozzle bottom plate 414 and is used to reduce sliding resistance when the connecting plate 416 is raised or lowered.

[0039] A nozzle transfer base 44 is provided on the transfer base 43, and a transfer driver 45 is connected to the nozzle transfer base 44. The nozzle assembly 41 is fixed to the nozzle transfer base 44 and reciprocates along a direction parallel to the first direction under the drive of the transfer driver 45. In this embodiment, the transfer driver 45 is a linear motor.

[0040] While working: The spacing between the five components, namely, the tape opening component 1, the angle detection camera, the testing mechanism 5, the bottom detection camera, and the braiding component 7, is consistent, which is the second spacing. The spacing between the two suction nozzle components 41 on the connecting plate 416 is the first spacing, which is twice the second spacing. When one of the suction nozzles 411 (the first suction nozzle 411) is located above the tape opening component 1, the other suction nozzle 411 (the second suction nozzle 411) is located above the detection mechanism. When the first suction nozzle 411 is located above the angle detection camera, the second suction nozzle 411 is located above the bottom detection camera. When the first suction nozzle 411 is located above the testing mechanism 5, the second suction nozzle 411 is located above the braiding component 7. That is, the first suction nozzle 411 is used to open the braiding component to absorb the product and place the product into the testing mechanism 5, and the second suction nozzle 411 is used to place the tested product into the braid.

[0041] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it accordingly, and they are not intended to limit the scope of protection of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present invention.

Claims

1. A reel-to-reel operation method, characterized in that: Distributing a plurality of workstations at equal intervals along a direction at a first spacing; providing a plurality of transfer ends for transferring chips, with a second spacing between adjacent transfer ends being twice the first spacing; Multiple chips are transferred synchronously along the same direction between different workstations by the same or different transfer ends.

2. A reel-to-reel operation method according to claim 1, characterized in that: The chip can rotate around its own axis under the drive of the transport end, so that the chip can fall into different stations in a preset posture.

3. A reel room operation device, characterized in that: The invention comprises a substrate, on which is provided: The main transfer device (4) has a pair of suction nozzle assemblies (41), wherein any of the suction nozzle assemblies (41) is arranged in a vertical direction, and the two suction nozzle assemblies (41) maintain a first spacing in the horizontal direction; a transfer base (43) is provided to connect the two suction nozzle assemblies (41), and the transfer base (43) is capable of moving in the first direction; A tape opening component (1), and a detection component and a braiding component (7) arranged along a first direction relative to the tape opening component (1); the detection components are provided in plurality, the plurality of detection components are arranged along the first direction, and a second spacing is provided between adjacent detection components, the second spacing is set to half of the first spacing, and the braiding component (7) and the adjacent detection components also have a second spacing.

4. The reel room operation equipment according to claim 3, characterized in that: The suction nozzle assembly (41) comprises a suction nozzle (411), wherein the suction nozzle (411) is connected to a suction nozzle driver (412), and the suction nozzle driver (412) is capable of driving the suction nozzle (411) to rotate around the axis of the suction nozzle (411).

5. The reel room operation equipment according to claim 4, characterized in that: The suction nozzle assembly (41) includes a suction nozzle mounting plate (413), the suction nozzle mounting plate (413) is arranged in a horizontal direction, and the suction nozzle (411) is vertically mounted on one end of the suction nozzle mounting plate (413); the interior of the suction nozzle mounting plate (413) is hollow, and a transmission device connected to the tail end of the suction nozzle (411) is provided, and the end of the transmission device away from the suction nozzle (411) is transmission-connected to the suction nozzle driver (412).

6. The reel room operation equipment according to claim 5, characterized in that: A pair of the suction nozzle assemblies (41) are mounted on a suction nozzle base plate (414) via a connecting plate (416); a sliding mechanism (415) is provided on the suction nozzle base plate (414) in a vertical direction; the sliding mechanism (415) comprises a slide rail and a slider that are slidably matched; the slide rail is fixed to the suction nozzle base plate (414) in a vertical direction, and the slider is fixed to the connecting plate (416); a lifting driver (417) is provided on the suction nozzle base plate (414); the lifting driver (417) can drive the suction nozzle assembly (41) to move up and down along the slide rail.

7. The reel room operation equipment according to claim 6, characterized in that: A lifting screw (421) is coaxially fixed to the execution end of the lifting driver (417); a lifting connection block (422) is provided on the connecting plate (416) in the direction toward the base of the suction nozzle (411); the lifting connection block (422) enters the interior of the base of the suction nozzle (411) and is threadedly engaged with the lifting screw (421); a lifting limit block (423) is fixed to the bottom end of the lifting screw (421); an angular contact ball bearing (424) is provided at the top end of the lifting screw (421); the angular contact ball bearing (424) is embedded in the bottom plate (414) of the suction nozzle.

8. The reel room operation equipment according to claim 4, characterized in that: A nozzle transfer base plate (44) is provided on the transfer base (43), and the nozzle transfer base plate (44) is connected to a transfer driver (45). The nozzle assembly (41) is fixed on the nozzle transfer base plate (44) and is driven by the transfer driver (45) to reciprocate along a straight line formed by a plurality of parallel workstations.

9. The reel room operation equipment according to claim 3, characterized in that: The plurality of detection components are respectively configured as an angle detection mechanism, a testing mechanism (5) and a bottom detection mechanism (6); The testing mechanism (5) comprises a testing seat (502), the testing seat (502) being provided with an interface (503) capable of being electrically connected to a chip, the testing seat (502) being detachably connected to a moving platform (501); the moving platform (501) having a first driver and a second driver, the testing seat (502) being driven by the first driver and the second driver to move in a horizontal direction.

10. A reel room operation device, characterized in that: A plurality of workstations are arranged equidistantly along a straight line, a main transfer device (4) is provided in parallel with the plurality of workstations, at least two suction nozzles (411) are provided on the main transfer device (4), and the horizontal spacing between the at least two suction nozzles (411) is set to twice that of any adjacent workstations; the at least two suction nozzles (411) are driven by the same lifting drive device, so that at least two chips can be transferred between different workstations at the same time; The suction nozzle (411) can rotate around its own axis, so that the chip can be in a preset posture in any work station.

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