A single crystal furnace anti-oxidation material supply device

Abstract

The application discloses a single crystal furnace anti-oxidation material supply device and belongs to the technical field of single crystal silicon production equipment. The single crystal furnace anti-oxidation material supply device comprises a single crystal furnace body, a mounting support block is fixedly connected to one side of the upper end of the single crystal furnace body, a furnace top cover is rotatably arranged above the single crystal furnace body, a bottom shell is fixedly connected to the lower end of the single crystal furnace body, a lock catch assembly is arranged on one side of the upper end of the single crystal furnace body and the furnace top cover, a stirring assembly is fixedly connected to the lower end of the bottom shell, an intermittent discharging assembly is fixedly installed at the upper end in the single crystal furnace body, and a lifting reset assembly is arranged above the intermittent discharging assembly. The intermittent discharging assembly is designed, the supply is completed under the premise that the crystal pulling is not stopped and the furnace environment is not damaged, the production efficiency is greatly improved, and the intermittent discharging assembly and the lifting reset assembly are designed in a matched mode, material can be sequentially added into raw materials, and the material can be conveniently replenished in the supply box body.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of single crystal silicon production equipment, and particularly relates to a single crystal furnace anti-oxidation material supply device. BACKGROUND

[0002] In the field of single crystal silicon production, the single crystal furnace, as the core equipment for crystal growth, directly determines the purity, lattice integrity and production efficiency of single crystal silicon through the stability and continuity of its operating environment. With the rapid development of the photovoltaic industry and the semiconductor industry, the market demand for large-size, high-purity single crystal silicon continues to grow. The single crystal furnace is a special core equipment for growing single crystal materials such as single crystal silicon, sapphire and silicon carbide. By simulating specific temperature, pressure and atmosphere environment, the raw material in a molten state is grown according to the preset crystal structure rule, and finally a single crystal rod with complete lattice and low defect rate is formed.

[0003] The existing material supply of the single crystal furnace mostly adopts the mode of stopping and opening the cover for feeding. When the liquid level of the polycrystalline silicon material in the furnace drops to a critical value due to melting consumption, the crystal pulling operation needs to be stopped first, and then the material supply is completed by opening the furnace cover to supply material inside. The single crystal silicon growth has very high requirements for the cleanliness of the furnace environment, and needs to maintain strict conditions of no oxygen, no particles and no metal impurities. The traditional stop and open cover supply mode will directly destroy the closed environment in the furnace. In the moment of opening the cover, air and water vapor will quickly flow into the furnace. Oxygen reacts with molten silicon to generate impurities. These impurities will be embedded in the single crystal lattice, resulting in a large deviation of the crystal rod resistivity, which cannot meet the requirements of semiconductor chips for resistivity uniformity, and makes the crystal quality unstable. At the same time, the traditional material supply mode takes a long time, which makes the production efficiency of the device low. SUMMARY

[0004] The technical problem to be solved by the present application is to overcome the shortcomings of the prior art and provide a single crystal furnace anti-oxidation material supply device.

[0005] The technical solution adopted to solve the above technical problems is: a single crystal furnace anti-oxidation material supply device, comprising a single crystal furnace body, a mounting support block is fixedly connected to one side of the upper end of the single crystal furnace body, a furnace top cover is rotatably arranged above the single crystal furnace body, a connecting seat is fixedly connected to one end of the furnace top cover, a rotating shaft is fixedly connected in the connecting seat, the rotating shaft is rotatably connected between the mounting support block and the single crystal furnace body, a bottom shell is fixedly connected to the lower end of the single crystal furnace body, a lock catch assembly is arranged on one side of the upper end of the furnace top cover and the single crystal furnace body, a material supply pipeline is fixedly installed above the furnace top cover, and valves are respectively arranged on the pipeline; a stirring assembly is fixedly connected to the lower end of the bottom shell, an intermittent material discharging assembly is fixedly installed at the upper end in the single crystal furnace body, a lifting and resetting assembly is arranged above the intermittent material discharging assembly, a plurality of material discharging pipelines are circumferentially arranged at the lower end of the bottom shell, and one end of each material discharging pipeline is communicated with a crystal pulling device.

[0006] By the above technical scheme, the feeding pipe arranged above the furnace top cover can be connected with the feeding device, the upper end of the feeding pipe is a vacuum sealing interface flange, before feeding, the worker carries the feeding device filled with the high-purity silicon material to be supplemented to the work station, aligns the outlet at the lower end of the feeding bin with the vacuum sealing interface flange on the feeding pipe, and tightly connects the two by using a quick vacuum clamp to ensure the sealing of the connection, after the quick vacuum clamp is locked, the valve below the feeding pipe is opened to supply the material to the box body, and meanwhile, after the material in the single crystal furnace body is mixed in the furnace, the discharge pipe at the lower end of the bottom shell is opened, and the mixed raw material enters the crystal pulling device through the discharge pipe, thereby facilitating the subsequent crystal pulling.

[0007] Further, the stirring assembly comprises a motor fixing box fixedly installed at the lower end of the bottom shell, a first driving motor is fixedly connected in the motor fixing box, a rotating seat is fixedly connected to the output end of the first driving motor, the rotating seat is rotatably connected with the bottom shell, a stirring rod is fixedly connected in the rotating seat, a second fixing sleeve is fixedly connected to the upper end of the stirring rod, a first fixing sleeve is fixedly connected to the lower end of the stirring rod, first stirring vanes are fixedly connected to the two sides of the first fixing sleeve in symmetry, and second stirring vanes are fixedly connected to the two sides of the second fixing sleeve in symmetry.

[0008] By the above technical scheme, the rotating seat is driven to rotate by the first driving motor output end, the rotating seat drives the second fixing sleeve and the first fixing sleeve to rotate through the stirring rod, so that the second fixing sleeve and the first fixing sleeve respectively drive the second stirring vanes and the first stirring vanes to rotate to stir and mix the raw material in the single crystal furnace body.

[0009] Further, the locking assembly comprises support shafts fixedly connected between the furnace top cover, a U-shaped buckle is rotatably connected between the two support shafts, a screw rod is threadedly connected to the lower end of the U-shaped buckle, a nut is fixedly connected to the lower end of the screw rod, a positioning washer is fixedly connected to the end of the screw rod away from the nut, and a plurality of anti-skid lines are formed on the outer circumference of the nut.

[0010] By the above technical scheme, when the furnace top cover needs to be opened, the nut is rotated, the positioning washer at the upper end of the screw rod is driven downward by the nut to release the locking between the single crystal furnace body and the furnace top cover, when the sealing device needs to be closed, the U-shaped buckle is rotated downward, and the nut is reversely rotated to move the positioning washer upward to fix the positions of the single crystal furnace body and the furnace top cover.

[0011] Further, the intermittent feeding assembly comprises a fixed seat fixedly connected with the single crystal furnace body, a fixed frame fixedly connected with the fixed seat, a mounting ring rotatably connected with the upper surface of the fixed seat, a sliding groove formed in the lower surface of the mounting ring, a sliding ring rotatably connected in the sliding groove, the sliding ring being fixed with the upper end of the fixed seat, a gear ring fixedly connected with the upper end of the mounting ring, a driving gear meshingly arranged on one side of the gear ring, the upper end of the driving gear being fixedly connected with the output end of a second driving motor, the second driving motor being fixedly connected with a motor fixing block, and the motor fixing block being fixedly installed with the fixed frame.

[0012] Through the above technical scheme, the output end of the second driving motor can drive the driving gear to rotate, the driving gear drives the gear ring to rotate through meshing, the gear ring can transmit power to the first magnetic attraction block on the mounting ring to drive the first magnetic attraction block to rotate, and then the material can be sequentially added into the raw material.

[0013] Further, the fixed seat is fixedly connected with a supply seat, a plurality of installation grooves are formed in the supply seat, a plurality of supply box bodies are fixedly connected with the inner wall of the supply seat, a plurality of supply bottom plates are respectively arranged at the lower ends of the plurality of supply box bodies, a plurality of limiting protrusions are respectively fixedly connected with one side of the plurality of supply bottom plates, the limiting protrusions are rotatably connected between one side and the supply seat, and a connecting cover is rotatably connected with the upper end of the supply box body.

[0014] Through the above technical scheme, under the rotation of the first magnetic attraction block, the supply bottom plate can be sequentially opened, so that the material can be sequentially added into the raw material. In any stage of single crystal growth, the supply is completed without stopping crystal pulling and without damaging the environment in the furnace, which greatly improves the production efficiency. The lower end of the feeding pipeline extends above the supply box body, the connecting cover above the connecting pipeline is aligned with the lower end of the feeding pipeline, and the diameter of the connecting pipeline above the connecting cover is greater than that of the feeding pipeline, so as to prevent the material from spilling during transportation.

[0015] Further, a moving rod is slidably connected in the installation groove, a wedge-shaped block is fixedly connected with one end of the moving rod close to the limiting protrusion, a limiting plate is fixedly connected with the other end of the moving rod away from the wedge-shaped block, a second magnetic attraction block is fixedly connected with one side of the limiting plate, a reset spring is symmetrically fixedly connected with one side of the wedge-shaped block, the other end of the reset spring is fixedly connected with the supply seat, and a first magnetic attraction block is fixedly connected with one side of the outer wall of the mounting ring.

[0016] Through the above technical scheme, when the first magnetic attraction block is close to the second magnetic attraction block on one side of the supply seat, the second magnetic attraction block moves towards the first magnetic attraction block under the action of magnetic force, the wedge-shaped block moves outwardly through the moving rod, at this time, the wedge-shaped block moves away to release the locking of the position of the limiting protrusion, under the gravity of the material, the material drives the supply bottom plate to flip downwardly to open, and then the material falls into the raw material.

[0017] Further, the lifting reset assembly comprises a positioning seat fixedly connected with the supply box body, a wire hole is formed in the positioning seat, a traction wire is arranged in the wire hole, one end of the traction wire is fixed with an inner end of the supply bottom plate, the other end of the traction wire is fixedly connected with the lifting line seat, the lifting line seat is fixedly connected with the output end of the hydraulic cylinder, the upper end of the hydraulic cylinder is fixed with the connecting frame, and the connecting frame is fixedly connected with the upper end of the fixing frame.

[0018] Through the above technical scheme, after the finished product is taken out after the in-furnace processing is completed, the hydraulic cylinder is started, the output end of the hydraulic cylinder drives the lifting line seat to move upwards, the lifting line seat drives one end of the supply bottom plate to rotate through the traction wire, so that the supply bottom plate can be turned up to be closed, at this time, when the supply bottom plate rotates again, the limiting protruding block rotates downwards and interacts with the inclined surface of the wedge-shaped block, so that the wedge-shaped block compresses the reset spring and pushes the moving rod to move outward, and then the wedge-shaped block is reset under the pushing of the reset spring, the position of the limiting protruding block is clamped, the supply bottom plate is fixed, and it is convenient to subsequently put the material in the supply box body.

[0019] Further, the single crystal furnace body is fixedly provided with an exhaust pipeline on one side, and a plurality of support legs are uniformly fixedly installed at the lower end of the bottom shell.

[0020] Through the above technical scheme, the setting of the exhaust pipeline can maintain the circulation and pressure dynamic balance of the inert gas, and also can assist in the cooling and pressure relief in the furnace, and prepare for the material taking.

[0021] The beneficial effects of the present application are as follows: (1) the intermittent feeding assembly is designed, the supply bottom plate can be opened in turn under the rotation of the first magnetic attraction block through the magnetic attraction between the second magnetic attraction block and the first magnetic attraction block, so that the material can be added into the raw material in turn, and the feeding is completed under the premise that the crystal pulling is not stopped and the furnace environment is not damaged in any stage of single crystal growth, the production efficiency is greatly improved, and the oxidation pollution can be eliminated through this feeding mode, and the purity and quality of the crystal are ensured; (2) the intermittent feeding assembly and the lifting reset assembly are designed, under the action of the gravity of the material, the material can drive the supply bottom plate to turn down and open, and then the material falls into the raw material, so that the material is added into the raw material in turn, after the finished product is taken out by the worker after the processing is completed, the output end of the hydraulic cylinder can drive the lifting line seat to move upwards, the lifting line seat drives one end of the supply bottom plate to rotate through the traction wire, so that the supply bottom plate can be turned up to be closed, the wedge-shaped block is reset under the pushing of the reset spring, the position of the limiting protruding block is clamped, the supply bottom plate is fixed, and it is convenient to subsequently put the material in the supply box body. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is the first perspective view of the present application;

[0023] Figure 2 is a second perspective view of the present application;

[0024] Figure 3 is a sectional view of the present application;

[0025] Figure 4 is a perspective view of the intermittent material feeding assembly of the present application;

[0026] Figure 5 is an internal structure view of the supply box of the present application;

[0027] Figure 6 is a sectional view of the intermittent material feeding assembly of the present application;

[0028] Figure 7 is an exploded view of the intermittent material feeding assembly of the present application;

[0029] Figure 8 is a partial enlarged view of A in the present application Figure 5

[0030] Figure 9 is a partial enlarged view of B in the present application Figure 6

[0031] Figure 10 is a partial enlarged view of C in the present application Figure 3

[0032] Reference signs: 1, single crystal furnace body; 11, furnace top cover; 12, bottom shell; 13, support foot; 14, exhaust duct; 15, mounting support block; 16, connecting seat; 17, rotating shaft; 2, lock catch assembly; 21, support shaft; 22, U-shaped buckle; 23, screw rod; 24, nut; 25, positioning gasket; 3, stirring assembly; 30, motor fixing box; 31, first driving motor; 32, rotating seat; 33, stirring rod; 34, first fixing sleeve; 35, second fixing sleeve; 36, first stirring vane; 37, second stirring vane; 4, intermittent material feeding assembly; 40, fixing seat; 41, fixing frame; 42, mounting ring; 43, sliding groove; 44, sliding ring; 45, gear ring; 46, first magnetic attraction block; 47, motor fixing block; 48, second driving motor; 49, driving gear; 410, supply seat; 411, mounting groove; 412, supply box; 413, supply bottom plate; 414, connecting cover; 415, limiting protrusion; 416, moving rod; 417, wedge block; 418, limiting plate; 419, second magnetic attraction block; 420, return spring; 5, lifting and resetting assembly; 50, connecting frame; 51, hydraulic cylinder; 52, lifting line seat; 53, positioning seat; 54, wire hole; 55, traction line. DETAILED DESCRIPTION

[0033] ​​​To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0034] like Figures 1-3 As shown, this embodiment of a single crystal furnace anti-oxidation material replenishment device includes a single crystal furnace body 1. A mounting support block 15 is fixedly connected to one side of the upper end of the single crystal furnace body 1. A furnace top cover 11 is rotatably mounted on the top of the single crystal furnace body 1. A connecting seat 16 is fixedly connected to one end of the furnace top cover 11. A rotating shaft 17 is fixedly connected inside the connecting seat 16 and rotatably connected to the mounting support block 15. A bottom shell 12 is fixedly connected to the lower end of the single crystal furnace body 1. A locking assembly 2 is provided on the furnace top cover 11 and one side of the upper end of the single crystal furnace body 1. A stirring assembly 3 is fixedly connected to the lower end of the bottom shell 12. An intermittent feeding assembly 4 is fixedly installed inside the upper end of the single crystal furnace body 1. A lifting and resetting assembly 5 is provided above the intermittent feeding assembly 4. The stirring assembly 3 includes a motor fixing box 30 fixedly installed to the lower end of the bottom shell 12. A motor fixing box 30 is fixedly connected to... A first drive motor 31 is connected to the bottom shell 12. A rotating base 32 is fixedly connected to the output end of the first drive motor 31. The rotating base 32 is rotatably connected to the bottom shell 12. A stirring rod 33 is fixedly connected inside the rotating base 32. A second fixing sleeve 35 is fixedly connected to the upper end of the stirring rod 33. A first fixing sleeve 34 is fixedly connected to the lower end of the stirring rod 33. A first stirring blade 36 is symmetrically fixedly connected to both sides of the first fixing sleeve 34. A second stirring blade 37 is symmetrically fixedly connected to both sides of the second fixing sleeve 35. The output end of the first drive motor 31 drives the rotating base 32 to rotate. The rotating base 32 drives the second fixing sleeve 35 and the first fixing sleeve 34 to rotate through the stirring rod 33. This causes the second fixing sleeve 35 and the first fixing sleeve 34 to drive the second stirring blade 37 and the first stirring blade 36 to rotate, thereby stirring and mixing the raw materials in the single crystal furnace body 1.

[0035] like Figures 1-10 As shown, the locking assembly 2 includes a support shaft 21 fixedly connected to the furnace top cover 11. A U-shaped buckle 22 is rotatably connected between the two support shafts 21. A screw 23 is threadedly connected to the lower end of the U-shaped buckle 22. A nut 24 is fixedly connected to the lower end of the screw 23. A positioning washer 25 is fixedly connected to the end of the screw 23 away from the nut 24. Multiple anti-slip textures are formed on the outer circumference of the nut 24. When the furnace top cover 11 needs to be opened, the nut 24 is rotated, and the nut 24 drives the positioning washer 25 at the upper end of the screw 23 to move down, thereby unlocking the single crystal furnace body 1 and the furnace top cover 11. When the sealing device needs to be closed, the U-shaped buckle 22 is rotated downward, and then the nut 24 is rotated in the opposite direction, so that the positioning washer 25 moves upward, thereby fixing the position of the single crystal furnace body 1 and the furnace top cover 11.

[0036] like Figures 1-7As shown, intermittent blanking assembly 4 includes a fixed seat 40 fixedly connected with the single crystal furnace body 1, a fixed frame 41 fixedly connected with the fixed seat 40, a mounting ring 42 rotatably connected with the upper surface of the fixed seat 40, a sliding groove 43 formed in the lower surface of the mounting ring 42, a sliding ring 44 rotatably connected in the sliding groove 43, the sliding ring 44 being fixed with the upper end of the fixed seat 40, a gear ring 45 fixedly connected with the upper end of the mounting ring 42, a driving gear 49 meshingly arranged on one side of the gear ring 45, the driving gear 49 being fixedly connected with the output end of a second driving motor 48, the second driving motor 48 being fixedly connected between a motor fixing block 47 and the fixed frame 41, the motor fixing block 47 being fixedly installed with the fixed frame 41, the output end of the second driving motor 48 being capable of driving the driving gear 49 to rotate, the driving gear 49 driving the gear ring 45 to rotate through meshing, the gear ring 45 being capable of transmitting power to the first magnetic block 46 on the mounting ring 42 to drive the first magnetic block 46 to rotate, thereby enabling the material to be sequentially added into the raw material.

[0037] As shown in Figures 1-6 The fixed seat 40 is fixedly connected with a supply seat 410, a plurality of installation grooves 411 are formed in the supply seat 410, a plurality of supply box bodies 412 are fixedly connected to the inner wall of the supply seat 410, a plurality of supply bottom plates 413 are arranged at the lower end of the plurality of supply box bodies 412, respectively, a limiting protrusion 415 is fixedly connected to one side of each of the plurality of supply bottom plates 413, respectively, the limiting protrusion 415 is rotatably connected between one side and the supply seat 410, and a connecting cover 414 is rotatably connected to the upper end of the supply box body 412. Under the rotation of the first magnetic block 46, the supply bottom plate 413 can be sequentially opened, so that the material can be sequentially added into the raw material. At any stage of single crystal growth, the supply can be completed without stopping crystal pulling and without damaging the environment in the furnace, thereby greatly improving the production efficiency.

[0038] As shown in Figures 1-8 A moving rod 416 is slidably connected in the installation groove 411, a wedge-shaped block 417 is fixedly connected to the end of the moving rod 416 close to the limiting protrusion 415, a limiting plate 418 is fixedly connected to the end of the moving rod 416 away from the wedge-shaped block 417, a second magnetic block 419 is fixedly connected to one side of the limiting plate 418, a return spring 420 is symmetrically fixedly connected to one side of the wedge-shaped block 417, the other end of the return spring 420 is fixedly connected with the supply seat 410, and the outer wall of the mounting ring 42 is fixedly connected with the first magnetic block 46. When the first magnetic block 46 is close to the second magnetic block 419 on the side close to the supply seat 410, the second magnetic block 419 moves in the direction close to the first magnetic block 46 under the action of magnetic force, and the moving rod 416 drives the wedge-shaped block 417 to move outward. At this time, the wedge-shaped block 417 moves away to release the locking of the position of the limiting protrusion 415. Under the action of the gravity of the material, the material drives the supply bottom plate 413 to flip down and open, thereby enabling the material to fall into the raw material.

[0039] As shown in Figures 1-9As shown, the lifting reset assembly 5 includes a positioning seat 53 fixedly connected with the supply box body 412, a wire hole 54 is formed in the positioning seat 53, a traction line 55 is arranged through the wire hole 54, one end of the traction line 55 is fixed with the supply base plate 413, the other end of the traction line 55 is fixedly connected with the lifting seat 52, the lifting seat 52 is fixedly connected with the output end of the hydraulic cylinder 51, the upper end of the hydraulic cylinder 51 is fixed with the connecting frame 50, the connecting frame 50 is fixedly connected with the upper end of the fixed frame 41, after the finished product is taken out after the in-furnace processing is completed, the hydraulic cylinder 51 is started, the output end of the hydraulic cylinder 51 drives the lifting seat 52 to move upwards, the lifting seat 52 drives one end of the supply base plate 413 to rotate through the traction line 55, so that the supply base plate 413 can be flipped upwards to be closed, at this time, when the supply base plate 413 rotates again, the limiting protrusion 415 rotates downwards and interacts with the inclined surface between the wedge block 417, so that the wedge block 417 compresses the reset spring 420 and pushes the moving rod 416 to move outward, then the wedge block 417 is reset under the pushing of the reset spring 420, the position of the limiting protrusion 415 is clamped, so that the supply base plate 413 is fixed, which is convenient for placing the material in the supply box body 412 subsequently; the exhaust pipeline 14 is fixedly installed on one side of the single crystal furnace body 1, a plurality of support legs 13 are uniformly fixedly installed at the lower end of the bottom shell 12, the setting of the exhaust pipeline 14 can maintain the circulation and pressure dynamic balance of the inert gas, and can also assist in the in-furnace cooling and pressure relief, so as to prepare for the material taking.

[0040] The working principle of the embodiment is as follows: in use, the power supply of the first driving motor 31 is started, the output end of the first driving motor 31 drives the rotating seat 32 to rotate, the rotating seat 32 drives the second fixed sleeve 35 and the first fixed sleeve 34 to rotate through the stirring rod 33, so that the second stirring fan blade 37 and the first stirring fan blade 36 are driven to rotate by the second fixed sleeve 35 and the first fixed sleeve 34 respectively, so as to stir and mix the raw materials in the single crystal furnace body 1;

[0041] When the material needs to be supplied, the output end of the second driving motor 48 drives the driving gear 49 to rotate, the driving gear 49 drives the gear ring 45 to rotate through the meshing, the gear ring 45 transmits the power to the first magnetic attraction block 46 on the mounting ring 42 to drive the first magnetic attraction block 46 to rotate, when the first magnetic attraction block 46 is close to the second magnetic attraction block 419 on the one side of the supply seat 410, the second magnetic attraction block 419 moves towards the first magnetic attraction block 46 under the action of the magnetic force, the wedge block 417 is driven to move outward through the moving rod 416, at this time, the wedge block 417 moves away to unlock the position of the limiting protrusion 415, under the gravity of the material, the material drives the supply base plate 413 to flip downwards to be opened, and then the material falls into the raw materials and is stirred and mixed by the second stirring fan blade 37 and the first stirring fan blade 36, under the rotation of the first magnetic attraction block 46, the supply base plate 413 can be opened in turn, so that the material can be added into the raw materials in turn;

[0042] After the finished product is taken out after the in-furnace processing is completed, the hydraulic cylinder 51 is started, the output end of the hydraulic cylinder 51 drives the wire lifting seat 52 to move upwards, the wire lifting seat 52 drives one end of the replenishment bottom plate 413 to rotate through the traction wire 55, so that the replenishment bottom plate 413 can be turned up to be closed, at this time, when the replenishment bottom plate 413 rotates again, the limiting protruding block 415 rotates downwards and interacts with the inclined surface between the wedge-shaped block 417, so that the wedge-shaped block 417 compresses the reset spring 420 and pushes the moving rod 416 to move outward, then the wedge-shaped block 417 is reset under the pushing of the reset spring 420, the position of the limiting protruding block 415 is clamped, so that the replenishment bottom plate 413 is fixed, and the material can be placed in the replenishment box body 412 subsequently;

[0043] Before the device is formally started, the furnace top cover 11 is turned over by opening the lock catch assembly 2, workers can sequentially feed the replenishment box body 412 according to the required raw materials of the single crystal material to be produced, when the raw materials need to be continuously replenished in the process of single crystal material processing, the workers transport the butt joint material replenishing device containing the high-purity silicon material to be replenished to the working position, so that the outlet at the lower end of the material replenishing bin is aligned with the vacuum sealing interface flange on the material replenishing pipeline, the two are tightly connected by using the quick vacuum clamp, the sealing property of the connection place is ensured, after the quick vacuum clamp is locked, the valve below the material replenishing pipeline is opened to supply the material to the replenishment box body.

[0044] The above is only a preferred embodiment of the present application, and is not used to limit the protection scope of the present application.

Claims

1. A device for supplying oxide-resistant materials to a single crystal furnace, comprising a single crystal furnace body (1), characterized in that, A mounting support block (15) is fixedly connected to one side of the upper end of the single crystal furnace body (1). A furnace top cover (11) is rotatably installed above the single crystal furnace body (1). A connecting seat (16) is fixedly connected to one end of the furnace top cover (11). A rotating shaft (17) is fixedly connected inside the connecting seat (16). The rotating shaft (17) is rotatably connected to the mounting support block (15). A bottom shell (12) is fixedly connected to the lower end of the single crystal furnace body (1). A locking assembly (2) is provided on one side of the upper end of the furnace top cover (11) and the single crystal furnace body (1). A feeding pipe is fixedly installed above the furnace top cover (11), and valves are respectively provided on the pipe. The bottom shell (12) is fixedly connected to a stirring assembly (3), the upper part of the single crystal furnace body (1) is fixedly installed with an intermittent feeding assembly (4), a lifting and resetting assembly (5) is provided above the intermittent feeding assembly (4), and multiple sets of discharge pipes are provided around the lower circumference of the bottom shell (12), and one end of the discharge pipe is connected to the crystal pulling device. The intermittent feeding assembly (4) includes a fixed base (40) fixedly connected to the single crystal furnace body (1), a fixed frame (41) fixedly connected to the fixed base (40), an mounting ring (42) rotatably connected to the upper surface of the fixed base (40), a sliding groove (43) opened on the lower surface of the mounting ring (42), a sliding ring (44) rotatably connected in the sliding groove (43), the sliding ring (44) fixed to the upper end of the fixed base (40), a gear ring (45) fixedly connected to the upper end of the mounting ring (42), a drive gear (49) meshing and driving on one side of the gear ring (45), the upper end of the drive gear (49) fixedly connected to the output end of the second drive motor (48), the second drive motor (48) fixedly connected to the motor fixing block (47), and the motor fixing block (47) fixedly installed to the fixed frame (41). A supply seat (410) is fixedly connected to the fixed seat (40). Multiple sets of mounting slots (411) are opened in the supply seat (410). Multiple sets of supply boxes (412) are evenly fixedly connected to the inner wall of the supply seat (410). A supply base plate (413) is provided at the lower end of each set of supply boxes (412). A limiting protrusion (415) is fixedly connected to one side of each set of supply base plates (413). One side of the limiting protrusion (415) is rotatably connected to the supply seat (410). A connecting cover (414) is rotatably connected to the upper end of the supply box (412). A movable rod (416) is slidably connected in the mounting groove (411). A wedge block (417) is fixedly connected to one end of the movable rod (416) near the limiting protrusion (415). A limiting plate (418) is fixedly connected to one end of the movable rod (416) away from the wedge block (417). A second magnetic block (419) is fixedly connected to one side of the limiting plate (418). A return spring (420) is symmetrically fixedly connected to one side of the wedge block (417). The other end of the return spring (420) is fixedly connected to the supply seat (410). A first magnetic block (46) is fixedly connected to one side of the outer wall of the mounting ring (42). The lifting and resetting assembly (5) includes a positioning seat (53) fixedly connected to the supply box (412). The positioning seat (53) has a wire hole (54) and a traction wire (55) is inserted through the wire hole (54). One end of the traction wire (55) is fixed to the inner end of the supply base plate (413), and the other end of the traction wire (55) is fixedly connected to the lifting seat (52). The lifting seat (52) is fixedly connected to the output end of the hydraulic cylinder (51). The upper end of the hydraulic cylinder (51) is fixedly connected to the connecting frame (50), and the connecting frame (50) is fixedly connected to the upper end of the fixing frame (41). When materials need to be replenished, the output end of the second drive motor (48) drives the drive gear (49) to rotate. The drive gear (49) drives the gear ring (45) to rotate through meshing. The gear ring (45) transmits power to the mounting ring (42), which drives the first magnetic block (46) on the mounting ring (42) to rotate. The first magnetic block (46) is on the side of the second magnetic block (419) near the supply seat (410). The second magnetic block (419) moves towards the first magnetic block (46) under the action of magnetic force. The moving rod (416) drives the wedge block (417) to move outward. The wedge block (417) moves away to release the locking of the position of the limiting protrusion (415).

2. The single crystal furnace anti-oxide material supply device according to claim 1, characterized in that, The stirring assembly (3) includes a motor mounting box (30) fixedly installed at the lower end of the bottom shell (12). A first drive motor (31) is fixedly connected inside the motor mounting box (30). A rotating seat (32) is fixedly connected to the output end of the first drive motor (31). The rotating seat (32) is rotatably connected to the bottom shell (12). A stirring rod (33) is fixedly connected inside the rotating seat (32). A second fixing sleeve (35) is fixedly connected to the upper end of the stirring rod (33). A first fixing sleeve (34) is fixedly connected to the lower end of the stirring rod (33). A first stirring blade (36) is symmetrically fixedly connected to both sides of the first fixing sleeve (34). A second stirring blade (37) is symmetrically fixedly connected to both sides of the second fixing sleeve (35).

3. The single crystal furnace anti-oxide material supply device according to claim 1, characterized in that, The locking assembly (2) includes a support shaft (21) fixedly connected to the furnace top cover (11), and a U-shaped buckle (22) rotatably connected between the two support shafts (21). The lower end of the U-shaped buckle (22) is threadedly connected to a screw (23), and the lower end of the screw (23) is fixedly connected to a nut (24). The end of the screw (23) away from the nut (24) is fixedly connected to a positioning washer (25), and the outer circumference of the nut (24) has multiple sets of anti-slip textures.

4. The single crystal furnace anti-oxide material supply device according to claim 1, characterized in that, An exhaust pipe (14) is fixedly installed on one side of the single crystal furnace body (1), and multiple sets of support legs (13) are evenly fixedly installed at the lower end of the bottom shell (12).

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