End effectors, robotic arms, conveying equipment, and semiconductor systems

Abstract

This invention provides an end effector, a robotic arm, a conveying device, and a semiconductor system. The end effector includes an extension, an adsorption element, and a sealing element. The adsorption element is made of a shape memory alloy that expands when heated and contracts when cooled. When handling wafers in high-temperature environments such as process chambers, the ambient temperature is high, and the adsorption element expands due to the temperature, thereby increasing the distance between the wafer and the extension element and preventing the edge of the wafer from contacting the extension element when it deforms. When handling wafers in room-temperature environments such as crystal boats, the ambient temperature is lower than that of high-temperature environments such as process chambers, and the adsorption element contracts, thereby enabling the handling of wafers in high-density crystal boats. A sealing element is provided at the second opening, and the sealing element is made of a flexible material, which increases the sealing between the adsorption element and the wafer and prevents gaps from forming between the adsorption element and the wafer when the adsorption element deforms due to temperature.

Description

Technical Field

[0001] This invention relates to the field of semiconductor system technology, and more particularly to an end effector, a robotic arm, a conveying device, and a semiconductor system. Background Technology

[0002] In semiconductor manufacturing, the use of robotic arms to move wafers between different process cavities and between wafer boats is a crucial step. However, the wafers inside the process cavities operate at high temperatures, and at these high temperatures, the wafers have low rigidity and are very prone to deformation.

[0003] When using a vacuum suction robot to handle wafers, the robot's suction cups typically adhere to the center of the wafer's lower surface. The center of the high-temperature wafer is held in place by the robot's suction cups, while the edges of the high-temperature wafer lack support. Under the influence of gravity, the edges of the high-temperature wafer deform downwards, causing the high-temperature wafer to arch upwards in the center. This is especially noticeable in thinned wafers.

[0004] When the edge of a high-temperature wafer deforms downwards, it is very easy for it to come into contact with the arm of a robotic arm. This can lead to uneven force on the high-temperature wafer, which can cause the robotic arm's suction cup to fail to pick up the high-temperature wafer. Furthermore, contact between the edge of the high-temperature wafer and the robotic arm can damage the wafer.

[0005] In the prior art, in order to avoid the edge of the high-temperature wafer from contacting the robotic arm after deformation, the height of the suction cup is increased. However, the temperature of the wafers in the crystal boat is relatively low and they are not easily deformed. The requirements for the robotic arm are different from those for the high-temperature wafer. If a robotic arm adapted to the high-temperature wafer is used, the increased height of the suction cup requires an increase in the distance between the wafers in the crystal boat, which leads to a significant reduction in the number of wafers that can be stored in a crystal boat of the same volume.

[0006] Therefore, it is necessary to provide a new type of end effector, robot, conveying device, and semiconductor system to solve the above-mentioned problems existing in the prior art. Summary of the Invention

[0007] The purpose of this invention is to provide an end effector, a robotic arm, a conveying device, and a semiconductor system that facilitates wafer handling and reduces the probability of wafer adsorption failure.

[0008] To achieve the above objectives, the end effector of the present invention includes:

[0009] An extension member has a vacuum channel inside along the extension direction, and an interface for communicating with the vacuum channel is provided on the upper side of one end of the extension member.

[0010] An adsorption element includes a first opening and a second opening that communicate with each other. The adsorption element is fixedly disposed on the upper side of one end of the extension element. The first opening communicates with the connecting interface, and the second opening faces upward.

[0011] A sealing element is disposed on the second opening;

[0012] The material of the adsorption element is a shape memory alloy that expands when heated and contracts when cooled. When the ambient temperature rises, the adsorption element expands, causing the second opening to move away from the extension element. When the ambient temperature decreases, the adsorption element contracts, causing the second opening to move closer to the extension element. The material of the sealing element is a flexible material with a melting point greater than or equal to 200°C.

[0013] The beneficial effects of the end effector are as follows: the material of the adsorption element is a shape memory alloy that expands when heated and contracts when cooled. When handling wafers in high-temperature environments such as process cavities, the ambient temperature is high, and the adsorption element will expand due to the influence of the ambient temperature. This increases the distance between the wafer and the extension when adsorbing the wafer, thus preventing the edge of the wafer from contacting the extension when it deforms. When handling wafers in room-temperature environments such as crystal boats, the ambient temperature is lower than that of high-temperature environments such as process cavities, and the adsorption element will contract. This allows for the handling of wafers in high-density crystal boats. Furthermore, a sealing element is provided on the second opening, and the material of the sealing element is a flexible material with a melting point greater than or equal to 200°C. This increases the sealing between the adsorption element and the wafer, preventing gaps from appearing between the adsorption element and the wafer when the adsorption element deforms due to temperature.

[0014] Optionally, the end effector further includes an auxiliary shrinking member disposed on the extension member and connected to the adsorption member, for assisting the adsorption member in shrinking when the environment cools down.

[0015] Optionally, the auxiliary retraction member includes at least one spring, one end of which is connected to the extension member, and the other end of which is connected to a position near the second opening of the adsorption member. When the ambient temperature is room temperature, the spring is in its natural state.

[0016] Optionally, the auxiliary shrinking member includes a hollow cylindrical structure, one end of which is connected to the extension member, and the adsorption member is partially disposed inside the hollow cylindrical structure.

[0017] The present invention also provides a robotic arm, comprising:

[0018] The connector includes at least one rotating component, the rotating component having an air guide hole; and,

[0019] At least one end effector, the number of which is the same as the number of the rotating components, and the end effector and the rotating components are fixedly connected in a one-to-one correspondence, and the vacuum channel is connected to the corresponding air guide hole.

[0020] Optionally, the connector further includes a cylindrical hollow shell, which has a plurality of arc-shaped openings along the direction of the central axis. The number of arc-shaped openings is the same as the number of the rotating components. The cylindrical hollow shell has a plurality of annular plates inside, and the number of annular plates is twice the number of arc-shaped openings. An upper edge and a lower edge of one arc-shaped opening are respectively fixedly connected to an annular plate. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

[0021] Optionally, the rotating assembly is in the shape of a cylindrical tube, with its upper end face slidably and sealingly connected to the upper annular channel, and its lower end face slidably and sealingly connected to the lower annular channel.

[0022] Optionally, the connector further includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with all the air guide holes.

[0023] Optionally, the air guide includes an M-stage sleeve, an M-stage connecting pipe, an M-stage chassis, and several fixing rods. The length of the (N-1)th stage sleeve is greater than the length of the Nth stage sleeve, the outer diameter of the (N-1)th stage sleeve is smaller than the inner diameter of the Nth stage sleeve, the Nth stage sleeve is fitted over the outside of the (N-1)th stage sleeve, and an annular space is formed between the Nth stage sleeve and the (N-1)th stage sleeve. One end of the (N-1)th stage sleeve extends to the outside of the Nth stage sleeve, and the other end of the (N-1)th stage sleeve extends to the outside of the Nth stage sleeve. One end of the first stage sleeve is sealed, and one end of the Nth stage sleeve is slidably and sealingly connected to the outer wall of the (N-1)th stage sleeve. The length of the connecting tube is greater than the length of the connecting tube of the Nth stage. One end of the sleeve of the Nth stage is connected to one end of the connecting tube of the Nth stage, and the other end of the connecting tube of the Nth stage is connected to the corresponding air guide hole. The chassis of the Mth stage are all cylindrical. The upper end face of the chassis of the Nth stage is slidably and sealed to the outer wall of the other end of the sleeve of the Nth stage. The lower end face of the chassis of the Nth stage is slidably and sealed to the outer wall of the sleeve of the (N-1)th stage. The sleeve of the Nth stage is connected to the chassis of the Nth stage. The chassis is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod. Wherein, M is equal to the number of rotating components, and N is a natural number greater than or equal to 1 and less than or equal to M.

[0024] Optionally, the air guide component further includes an M-level bearing, the inner ring of the N-level bearing is fitted around the portion of the N-level sleeve located outside the (N-1)-level sleeve, and the inner ring of the N-level bearing is fixedly connected to the outer wall of the N-level sleeve, and the outer ring of the N-level bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod.

[0025] Optionally, the air guide further includes an M-stage follower, the (N-1)-stage follower being arranged around the portion of the (N-1)-stage sleeve located outside the N-stage sleeve. The manipulator further includes a drive unit, the drive unit including an M-stage drive, the (N-1)-stage drive being connected to the follower via a transmission member, the drive being used to provide driving force, driving the corresponding follower to rotate via the corresponding transmission member.

[0026] Optionally, the robotic arm further includes a vacuum generating unit, which includes an M-level vacuum generating element, and the N-level vacuum generating element is connected to the N-level chassis via a connecting pipe.

[0027] The present invention also provides a transmission device, comprising:

[0028] The robotic arm; and,

[0029] The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm.

[0030] The present invention also provides a semiconductor system including the aforementioned transmission device. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the end effector structure in some embodiments of the present invention;

[0032] Figure 2 For the present invention Figure 1 A schematic diagram of the cross-sectional structure of the end effector shown after cutting along surface a, which is enclosed by the dashed line.

[0033] Figure 3 This is a schematic diagram of the structure of the robotic arm in some embodiments of the present invention;

[0034] Figure 4 This is a schematic diagram of the structure of the rotating component in some embodiments of the present invention;

[0035] Figure 5 This is a bottom view of the annular plate in some embodiments of the present invention;

[0036] Figure 6 This is a schematic diagram of the air guide component in some embodiments of the present invention.

[0037] Explanation of reference numerals in the attached figures:

[0038] 10. End effector; 11. Extension; 111. Vacuum channel; 112. Connecting interface; 12. Adsorption element; 121. First opening; 122. Second opening; 13. Seal; 20. Connector; 21. Rotating assembly; 22. Air vent; 221. First sleeve; 222. Second sleeve; 223. Third sleeve; 224. First connecting tube; 225. Second connecting tube; 226. Third connecting tube; 227. 1. Chassis; 2271. First fixing rod; 2272. Second fixing rod; 2273. Third fixing rod; 228. Second chassis; 229. Third chassis; 2211. First bearing; 2212. Second bearing; 2213. Third bearing; 2214. Fourth fixing rod; 2215. Fifth fixing rod; 2216. Sixth fixing rod; 23. Cylindrical hollow shell; 24. Arc-shaped opening; 25. Annular plate; 251. Upper ring track. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0040] To address the problems existing in the prior art, embodiments of the present invention provide an end effector. (Refer to...) Figure 1 and Figure 2 The end effector 10 includes an extension 11, an adsorption member 12, and a sealing member 13. The extension 11 has a vacuum channel 111 inside along its extension direction, and an interface 112 communicating with the vacuum channel 111 is formed on the upper side of one end of the extension 11. The adsorption member 12 includes a first opening 121 and a second opening 122 communicating with each other. The adsorption member 12 is fixedly disposed on the upper side of one end of the extension 11, with the first opening 121 communicating with the interface 112 and the second opening 122 facing upwards. The sealing member 13 is disposed on the second opening 122.

[0041] Reference Figure 1 and Figure 2The extension 11 is elongated and can be cylindrical or prismatic. The adsorption member 12 is cylindrical. The sealing member 13 is funnel-shaped. The small end of the sealing member 13 is provided with an annular groove (not shown in the figure), and the central axis of symmetry of the annular groove coincides with the central axis of symmetry of the sealing member 13. The edge of the second opening 122 is embedded in the annular groove. The small end of the sealing member 13 communicates with the second opening 122, and the large end of the sealing member 13 faces upward.

[0042] In some embodiments, the material of the adsorption element is a shape memory alloy that expands when heated and contracts when cooled. When the ambient temperature rises, the adsorption element expands, causing the second opening to move away from the extension element. When the ambient temperature decreases, the adsorption element contracts, causing the second opening to move closer to the extension element. The material of the sealing element is a flexible material with a melting point greater than or equal to 200°C. The melting point of the sealing element material is 200°C, 300°C, 600°C, etc.

[0043] The adsorption element is made of a shape memory alloy that expands when heated and contracts when cooled. When handling wafers in high-temperature environments such as process chambers, the ambient temperature is high, and the adsorption element expands due to the temperature. This increases the distance between the wafer and the extension, preventing the wafer edge from contacting the extension when deformed. When handling wafers in room-temperature environments such as crystal boats, the ambient temperature is lower than that of the high-temperature environment such as process chambers, and the adsorption element contracts. This allows for the handling of wafers in high-density crystal boats. A sealing element is provided at the second opening, and the sealing element is made of a flexible material with a melting point greater than or equal to 200°C. This increases the sealing between the adsorption element and the wafer, preventing gaps from forming between the adsorption element and the wafer when deformed by temperature.

[0044] In some embodiments, the material of the adsorption component includes any one of nickel-titanium alloy, copper-based shape memory alloy, iron-based shape memory alloy, etc., and the material of the sealing component includes any one of polytetrafluoroethylene (PTEF), high-performance polyimide (VESPEL), etc.

[0045] In some embodiments, the end effector further includes an auxiliary shrinking member disposed on the extension and connected to the adsorption member, for assisting the adsorption member in shrinking when the environment cools down.

[0046] After the adsorption element adsorbs the wafer, it is affected by the pressure of the wafer. When the adsorption element shrinks, it may shift. Through the influence of the auxiliary shrinking element, the adsorption element can deform in a preset direction to avoid shifting during shrinkage and ensure the safety of the wafer during the handling process.

[0047] In some embodiments, the auxiliary retraction member includes at least one spring, one end of which is connected to the extension member, and the other end of which is connected to a position near the second opening of the adsorption member. When the ambient temperature is room temperature, the spring is in its natural state.

[0048] In some embodiments, the auxiliary retraction member includes two springs, a first spring and a second spring. One end of the first spring is fixedly connected to a first point on the extension member, and the other end of the first spring is fixedly connected to a second point on the adsorption member. One end of the second spring is fixedly connected to a third point on the extension member, and the other end of the second spring is fixedly connected to a fourth point on the adsorption member. The first and third points are symmetrical about the axis of the adsorption member, and the second and fourth points are also symmetrical about the axis of the adsorption member.

[0049] In other embodiments, the auxiliary shrinking member includes a hollow cylindrical structure, one end of which is connected to the extension member, and the adsorption member is partially disposed within the hollow cylindrical structure.

[0050] The present invention also provides a robotic arm, with reference to Figure 2 and Figure 3 The robotic arm includes a connector 20 and at least one end effector 10. The connector 20 includes at least one rotating component 21, which has an air guide hole 22. The number of end effectors 10 is the same as the number of rotating components 21, and each end effector 10 is fixedly connected to a corresponding rotating component 21. The vacuum channel 111 communicates with the corresponding air guide hole 22.

[0051] Reference Figure 3 , Figure 4 and Figure 5 The connector 20 further includes a cylindrical hollow shell 23. The cylindrical hollow shell 23 has a plurality of arc-shaped openings 24 along the direction of the central axis. The number of arc-shaped openings 24 is the same as the number of rotating components 21. The cylindrical hollow shell 23 has a plurality of annular plates 25 inside. The number of annular plates 25 is twice the number of arc-shaped openings 24. The upper edge and lower edge of one arc-shaped opening 24 are respectively fixedly connected to one annular plate 25. An upper annular channel 251 is provided on the lower surface of the annular plate 25 fixedly connected to the upper edge of the arc-shaped opening 24, and a lower annular channel is provided on the upper surface of the annular plate 25 fixedly connected to the lower edge of the arc-shaped opening 24.

[0052] The cylindrical hollow shell has several arc-shaped openings along its central axis. The number of arc-shaped openings is the same as the number of rotating components, which enables the connection of multiple rotating components to the cylindrical hollow shell, thereby connecting multiple end effectors and facilitating the one-time handling of multiple wafers.

[0053] Reference Figure 4 The rotating component 21 is in the shape of a cylindrical tube. The upper end face of the rotating component 21 is slidably and sealed to the upper annular channel, and the lower end face of the rotating component 21 is slidably and sealed to the lower annular channel.

[0054] The rotating component is in the shape of a cylindrical tube, which makes it easier for the rotating component to rotate within the cylindrical hollow shell, reducing the difficulty of structural design and reducing the number of related accessories.

[0055] Reference Figure 4 and Figure 5 The upper annular channel 251 is similar to a double-layered sleeve, and the upper end face of the rotating component 21 is similar to one end of a pipe. The upper annular channel 251 clamps the upper end face of the rotating component 21 to form a sliding seal connection. The lower annular channel is similar to a double-layered sleeve, and the lower end face of the rotating component 21 is similar to one end of a pipe. The lower annular channel clamps the lower end face of the rotating component 21 to form a sliding seal connection.

[0056] The cylindrical hollow shell contains several annular plates, the number of which is twice the number of arc-shaped openings. An annular plate is fixedly connected to the upper and lower edges of each arc-shaped opening. An upper annular channel is provided on the lower surface of the annular plate fixed to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixed to the lower edge of the arc-shaped opening. The upper and lower annular channels are similar to double-layered sleeves, enabling a sliding seal connection between the annular plates and the rotating assembly. This prevents gas from the cylindrical hollow shell from contaminating the process chamber and also prevents gas from the process chamber from entering the cylindrical hollow shell.

[0057] In some embodiments, a sealing ring is provided between the upper annular channel and the upper end face of the rotating assembly to enhance the sealing between the upper annular channel and the rotating assembly; a sealing ring is provided between the lower annular channel and the lower end face of the rotating assembly to enhance the sealing between the lower annular channel and the rotating assembly.

[0058] In some embodiments, the connector further includes an air guide, which is disposed within the cylindrical hollow housing and communicates with all the air guide holes.

[0059] In some embodiments, the air guide includes an M-stage sleeve, an M-stage connecting pipe, an M-stage chassis, and several fixing rods. The length of the (N-1)th stage sleeve is greater than the length of the Nth stage sleeve, the outer diameter of the (N-1)th stage sleeve is smaller than the inner diameter of the Nth stage sleeve, the Nth stage sleeve is fitted over the outside of the (N-1)th stage sleeve, and an annular space is formed between the Nth stage sleeve and the (N-1)th stage sleeve. One end of the (N-1)th stage sleeve extends to the outside of the Nth stage sleeve, and the other end of the (N-1)th stage sleeve extends to the outside of the Nth stage sleeve. One end of the first stage sleeve is sealed, and one end of the Nth stage sleeve is slidably and sealingly connected to the outer wall of the (N-1)th stage sleeve. The length of the connecting tube in stage 1 is greater than the length of the connecting tube in stage N. One end of the sleeve in stage N is connected to one end of the connecting tube in stage N, and the other end of the connecting tube in stage N is connected to the corresponding air guide hole. The base plates in stage M are all cylindrical. The upper end face of the base plate in stage N is slidably and sealingly connected to the outer wall of the other end of the sleeve in stage N, and the lower end face of the base plate in stage N is slidably and sealingly connected to the outer wall of the sleeve in stage N-1. The sleeve in stage N is connected to the base plate in stage N. The base plate is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod. Wherein, M is equal to the number of rotating components, and N is a natural number greater than or equal to 1 and less than or equal to M. The lower end face of the suction cup in stage M is sealed.

[0060] The gas guiding component includes an M-stage sleeve, with the N-stage sleeve fitted over the outer side of the (N-1)-stage sleeve. All sleeves are coaxial with the cylindrical hollow shell, and each of the M-stage sleeves can rotate around the axis of the cylindrical hollow shell. The annulus between adjacent sleeves can transport gas, and the gas in each annulus and between the first-stage sleeves is independent, allowing for different controls. The length of the (N-1)-stage sleeve is greater than the length of the N-stage sleeve, and the other end of the (N-1)-stage sleeve extends to the outer side of the N-stage sleeve, connecting to a corresponding connecting pipe to avoid obstruction of rotation by the connecting pipe.

[0061] In some embodiments, a sealing ring is further provided between one end of the Nth-level sleeve and the outer wall of the (N-1)th-level sleeve to enhance the seal between them. A sealing ring is also provided between the upper end face of the Nth-level chassis and the outer wall of the other end of the Nth-level sleeve to enhance the seal between them. A sealing ring is also provided between the lower end face of the Nth-level chassis and the outer wall of the (N-1)th-level sleeve to enhance the seal between them.

[0062] Reference Figure 6The air guide component includes a three-stage sleeve, a three-stage connecting pipe, a three-stage chassis, and several fixing rods. Specifically, the first-stage sleeve is the first sleeve 221, the second-stage sleeve is the second sleeve 222, and the third-stage sleeve is the third sleeve 223; the first-stage connecting pipe is the first connecting pipe 224, the second-stage connecting pipe is the second connecting pipe 225, and the third-stage connecting pipe is the third connecting pipe 226; the first-stage chassis is the first chassis 227, the second-stage chassis is the second chassis 228, and the third-stage chassis is the third chassis 229.

[0063] Reference Figure 6 The length of the first sleeve 221 is greater than the length of the second sleeve 222. The second sleeve 222 is fitted over the outside of the first sleeve 221. Both ends of the first sleeve 221 extend beyond the second sleeve 222. The length of the second sleeve 222 is greater than the length of the third sleeve 223. The third sleeve 223 is fitted over the outside of the second sleeve 222. Both ends of the second sleeve 222 extend beyond the third sleeve 223. An annular space is formed between the first sleeve 221 and the second sleeve 222, and an annular space is formed between the second sleeve 222 and the third sleeve 223.

[0064] Reference Figure 6 The upper end of the first sleeve 221 is sealed, and the outer wall of the other end of the first sleeve 221 is slidably and sealingly connected to the upper end face of the first chassis 227. The first sleeve 221 is connected to the first chassis 227. One end of the second sleeve 222 is slidably and sealingly connected to the outer wall of the first sleeve 221. The outer wall of the other end of the second sleeve 222 is slidably and sealingly connected to the upper end face of the second chassis 228. The second sleeve 222 is connected to the second chassis 228. The lower end face of the second chassis 228 is slidably and sealingly connected to the outer wall of the first sleeve 221. One end of the third sleeve 223 is slidably and sealingly connected to the outer wall of the second sleeve 222. The outer wall of the other end of the third sleeve 223 is slidably and sealingly connected to the upper end face of the third chassis 229. The third sleeve 223 is connected to the third chassis 229. The lower end face of the third chassis 229 is slidably and sealingly connected to the outer wall of the second sleeve 222.

[0065] Reference Figure 6The length of the first connecting pipe 224 is greater than the length of the second connecting pipe 225, the length of the second connecting pipe 225 is greater than the length of the third connecting pipe 226, one end of the first connecting pipe 224 is connected to one end of the first sleeve 221, and the other end of the first connecting pipe 224 is connected to the air guide hole on the highest rotating component, one end of the second connecting pipe 225 is connected to one end of the second sleeve 222, and the other end of the second connecting pipe 225 is connected to the air guide hole on the second highest rotating component, one end of the third connecting pipe 226 is connected to one end of the third sleeve 223, and the other end of the third connecting pipe 226 is connected to the air guide hole on the lowest rotating component.

[0066] Reference Figure 6 The first chassis 227 is fixedly connected to the inner wall of the cylindrical hollow shell through the first fixing rod 2271, the second chassis 228 is fixedly connected to the inner wall of the cylindrical hollow shell through the second fixing rod 2272, and the third chassis 229 is fixedly connected to the inner wall of the cylindrical hollow shell through the third fixing rod 2273.

[0067] In some embodiments, the air guide includes an M-level bearing, the inner ring of the N-level bearing is fitted around the portion of the N-level sleeve located outside the (N-1)-level sleeve, and the inner ring of the N-level bearing is fixedly connected to the outer wall of the N-level sleeve, and the outer ring of the N-level bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod.

[0068] Reference Figure 6 The air guide component further includes three bearings: a first bearing 2211, a second bearing 2212, and a third bearing 2213. The inner ring of the first bearing 2211 is fitted onto the portion of the first sleeve 221 located outside the second sleeve 222, and the inner ring of the first bearing 2211 is fixedly connected to the outer wall of the first sleeve 221. The inner ring of the second bearing 2212 is fitted onto the portion of the second sleeve 222 located outside the third sleeve 223, and the inner ring of the second bearing 2212 is fixedly connected to the outer wall of the second sleeve 222. The inner ring of the third bearing 2213 is fitted onto one end of the third sleeve 223, and the inner ring of the third bearing 2213 is fixedly connected to the outer wall of the third sleeve 223.

[0069] Reference Figure 6The outer ring of the first bearing 2211 is fixedly connected to the inner wall of the cylindrical hollow shell through the fourth fixing rod 2214, the outer ring of the second bearing 2212 is fixedly connected to the inner wall of the cylindrical hollow shell through the fifth fixing rod 2215, and the outer ring of the third bearing 2213 is fixedly connected to the inner wall of the cylindrical hollow shell through the sixth fixing rod 2216.

[0070] In some embodiments, the air guide further includes an M-stage follower, the (N-1)-stage follower being arranged around the portion of the (N-1)-stage sleeve located outside the N-stage sleeve. The manipulator further includes a drive unit, the drive unit including an M-stage drive member, the (N-1)-stage drive member being connected to the follower via a transmission member, the drive member being used to provide driving force, driving the corresponding follower to rotate via the corresponding transmission member.

[0071] In some embodiments, the robotic arm further includes a vacuum generating unit, which includes an M-stage vacuum generator and an N-stage vacuum generator connected to the N-stage chassis via a connecting pipe.

[0072] In some embodiments, the vacuum generating unit includes a three-stage vacuum generating element, wherein the first-stage vacuum generating element is a first vacuum generating element, the second-stage vacuum generating element is a second vacuum generating element, and the third-stage vacuum generating element is a third vacuum generating element. (Refer to...) Figure 6 The first vacuum generator is connected to the first chassis 227 through a first connecting pipe, the second vacuum generator is connected to the second chassis 228 through a second connecting pipe, and the third vacuum generator is connected to the third chassis 229 through a third connecting pipe.

[0073] In some embodiments, the robotic arm further includes a lifting mechanism, with the connecting member fixedly connected to the lifting mechanism. The lifting mechanism is used to move the connecting member in the vertical direction. The lifting mechanism can be a cylinder or a motor-driven slide rail mechanism, etc., and can be implemented using several existing technologies, which will not be described in detail here.

[0074] The present invention also provides a conveying device, including the aforementioned robotic arm and a control unit. The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm. Specifically, the control unit controls the lifting and lowering of the lifting mechanism and controls whether each stage of the vacuum generator evacuates a vacuum. The control unit is a motion controller, but can also be a programmable logic controller (PLC).

[0075] The present invention also provides a semiconductor system including the aforementioned transfer device. Of course, the semiconductor system also includes other semiconductor devices, such as etching equipment, deposition equipment, cleaning equipment, crystal boats, etc., which will not be described in detail here.

[0076] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An end effector, characterized in that, include: An extension member has a vacuum channel inside along the extension direction, and an interface for communicating with the vacuum channel is provided on the upper side of one end of the extension member. An adsorption element includes a first opening and a second opening that are connected. The adsorption element is fixedly disposed on the upper side of one end of the extension element. The first opening is connected to the docking interface, and the second opening faces upward. as well as, A sealing element is disposed on the second opening; The material of the adsorption element is a shape memory alloy that expands when heated and contracts when cooled. When the ambient temperature rises, the adsorption element expands, causing the second opening to move away from the extension element. When the ambient temperature decreases, the adsorption element contracts, causing the second opening to move closer to the extension element. The material of the sealing element is a flexible material with a melting point greater than or equal to 200°C.

2. The end effector according to claim 1, characterized in that, The end effector also includes an auxiliary shrinking member, which is disposed on the extension member and connected to the adsorption member, and is used to assist the adsorption member in shrinking when the environment cools down.

3. The end effector according to claim 2, characterized in that, The auxiliary retraction member includes at least one spring, one end of which is connected to the extension member, and the other end of which is connected to the adsorption member near the second opening. When the ambient temperature is room temperature, the spring is in its natural state.

4. The end effector according to claim 2, characterized in that, The auxiliary shrinking member includes a hollow cylindrical structure, one end of which is connected to the extension member, and the adsorption member is partially disposed inside the hollow cylindrical structure.

5. A robotic arm, characterized in that, include: The connector includes at least one rotating component, on which an air guide hole is provided; as well as, At least one end effector as described in any one of claims 1 to 4, wherein the number of end effectors is the same as the number of rotating components, and the end effectors and rotating components are fixedly connected in a one-to-one correspondence, and the vacuum channel is connected to the corresponding air guide hole.

6. The robotic arm according to claim 5, characterized in that, The connector also includes a cylindrical hollow shell, which has a plurality of arc-shaped openings along the direction of the central axis. The number of arc-shaped openings is the same as the number of rotating components. The cylindrical hollow shell has a plurality of annular plates inside, and the number of annular plates is twice the number of arc-shaped openings. An upper edge and a lower edge of one arc-shaped opening are respectively fixedly connected to an annular plate. An upper annular channel is provided on the lower surface of the annular plate fixedly connected to the upper edge of the arc-shaped opening, and a lower annular channel is provided on the upper surface of the annular plate fixedly connected to the lower edge of the arc-shaped opening.

7. The robotic arm according to claim 6, characterized in that, The rotating assembly is in the shape of a cylindrical tube. The upper end face of the rotating assembly is slidably and sealed to the upper annular channel, and the lower end face of the rotating assembly is slidably and sealed to the lower annular channel.

8. The robotic arm according to claim 6 or 7, characterized in that, The connector also includes an air guide, which is disposed inside the cylindrical hollow shell and communicates with all the air guide holes.

9. The robotic arm according to claim 8, characterized in that, The air guiding component includes an M-stage sleeve, an M-stage connecting pipe, an M-stage chassis, and several fixing rods. The length of the (N-1)th stage sleeve is greater than the length of the Nth stage sleeve, and the outer diameter of the (N-1)th stage sleeve is smaller than the inner diameter of the Nth stage sleeve. The Nth stage sleeve is fitted over the outer side of the (N-1)th stage sleeve, forming an annular space between them. One end of the (N-1)th stage sleeve extends to the outer side of the Nth stage sleeve, and the other end of the (N-1)th stage sleeve extends to the outer side of the Nth stage sleeve. One end of the (N-1)th stage sleeve is sealed, and one end of the Nth stage sleeve is slidably and sealingly connected to the outer wall of the (N-1)th stage sleeve. The length of the connecting tube is greater than the length of the connecting tube of the Nth stage. One end of the sleeve of the Nth stage is connected to one end of the connecting tube of the Nth stage, and the other end of the connecting tube of the Nth stage is connected to the corresponding air guide hole. The chassis of the Mth stage are all cylindrical. The upper end face of the chassis of the Nth stage is slidably and sealed to the outer wall of the other end of the sleeve of the Nth stage. The lower end face of the chassis of the Nth stage is slidably and sealed to the outer wall of the sleeve of the (N-1)th stage. The sleeve of the Nth stage is connected to the chassis of the Nth stage. The chassis is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod. Wherein, M is equal to the number of rotating components, and N is a natural number greater than or equal to 1 and less than or equal to M.

10. The robotic arm according to claim 9, characterized in that, The air guide component also includes an M-level bearing, the inner ring of the N-level bearing is fitted around the part of the N-level sleeve located outside the (N-1)-level sleeve, and the inner ring of the N-level bearing is fixedly connected to the outer wall of the N-level sleeve, and the outer ring of the N-level bearing is fixedly connected to the inner wall of the cylindrical hollow shell through the fixing rod.

11. The robotic arm according to claim 9, characterized in that, The air guide also includes an M-level driven member. The (N-1)-level driven member is arranged around the portion of the (N-1)-level sleeve located outside the N-level sleeve. The manipulator also includes a drive unit. The drive unit includes an M-level drive member. The (N-1)-level drive member is connected to the driven member through a transmission member. The drive member is used to provide driving force and drive the corresponding driven member to rotate through the corresponding transmission member.

12. The robotic arm according to claim 9, characterized in that, The robotic arm also includes a vacuum generating unit, which includes an M-level vacuum generating element and an N-level vacuum generating element connected to the N-level chassis via a connecting pipe.

13. A conveying device, characterized in that, include: The robotic arm as described in any one of claims 5 to 12; as well as, The control unit is electrically connected to the robotic arm and is used to control the movement of the robotic arm.

14. A semiconductor system, characterized in that, Includes the transmission device as described in claim 13.

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