Radio frequency power synthesis device, radio frequency power supply equipment and radio frequency power supply system

Abstract

The invention provides a radio frequency power synthesis device, radio frequency power supply equipment and a radio frequency power supply system. The radio frequency power synthesis device comprises N input ends, M impedance adjusting units and an output end, the N input ends comprise M first input ends and N-M second input ends, the N input ends are all connected to a power synthesis point, each input end is used for inputting radio frequency electric energy, and M is an integer greater than or equal to 1. The radio frequency electric energy input by each input end is mixed at the power synthesis point to obtain target radio frequency electric energy, the power synthesis point is connected with the output end, and the output end is used for outputting the target radio frequency electric energy. The M impedance adjusting units are connected between the M first input ends and the power synthesis point in a one-to-one correspondence mode, and each impedance adjusting unit is used for adjusting the equivalent impedance value of a part of transmission paths of the radio frequency electric energy input by the corresponding first input end so as to adjust the power value of the radio frequency electric energy input by the corresponding first input end. Therefore, the power value of the target radio frequency electric energy is adjusted. The power value of the target radio frequency electric energy can be flexibly adjusted.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to a radio frequency power combining device, radio frequency power supply equipment and radio frequency power supply system. Background Technology

[0002] Currently, with the development of RF power supply technology, multi-RF source RF power supply equipment has been widely used. This has placed higher demands on obtaining the target RF power after power combining of multiple RF sources, especially on the power regulation of the target RF power. The RF source outputting the RF power is generally an RF power amplifier, each with a fixed power amplification factor. The RF power is then obtained based on this fixed factor. However, since the power amplification factor of the RF power amplifier is fixed, it is generally difficult to adjust. Therefore, how to flexibly adjust the power value of the target RF power has become a problem that needs to be considered. Summary of the Invention

[0003] This application provides an RF power combining device, an RF power supply device, and an RF power supply system, which can flexibly adjust the power value of the target RF power without adjusting any RF source of the output RF power.

[0004] In a first aspect, a radio frequency (RF) power combining device is provided. The RF power combining device includes N input terminals, M impedance adjustment units, and an output terminal. The N input terminals include M first input terminals and NM second input terminals. Each of the N input terminals is connected to a power combining point. Each input terminal is used to input RF power. The RF power input at each input terminal is mixed at the power combining point to obtain a target RF power. The power combining point is connected to the output terminal, which is used to output the target RF power. The M impedance adjustment units are connected one-to-one between the M first input terminals and the power combining point. Each impedance adjustment unit is used to adjust the equivalent impedance value of a portion of the transmission path of the RF power input at the corresponding first input terminal, thereby adjusting the power value of the RF power input at the corresponding first input terminal, and thus adjusting the power value of the target RF power, where N > M ≥ 1.

[0005] In one possible implementation, the transmission path of the radio frequency (RF) power input at each first input terminal is a transmission path from the corresponding first input terminal to the power combining point, and each transmission path includes a first sub-transmission path and a second sub-transmission path. The first sub-transmission path is a transmission path including the impedance adjustment unit from the corresponding impedance adjustment unit to the power combining point, and the second sub-transmission path is a transmission path excluding the impedance adjustment unit from the corresponding first input terminal to the impedance adjustment unit. Each impedance adjustment unit is used to adjust the equivalent impedance value of the first sub-transmission path of the RF power input at the corresponding first input terminal, and the equivalent impedance values ​​of the second sub-transmission paths of the RF power input at each first input terminal are equal.

[0006] In one possible implementation, the equivalent impedance values ​​of the transmission paths of the radio frequency power input at each second input terminal are equal, and the equivalent impedance values ​​of the second sub-transmission paths of the radio frequency power input at each first input terminal and the equivalent impedance values ​​of the transmission paths of the radio frequency power input at each second input terminal are preset characteristic impedance values.

[0007] In one possible implementation, the power values ​​of the radio frequency power input to each first input terminal are equal, and the ratio of the power values ​​of the M radio frequency power transmitted to the power combining point is the ratio of the equivalent impedance values ​​of the corresponding M first sub-transmission paths.

[0008] In one possible implementation, each impedance adjustment unit includes a coupling module for coupling a corresponding first sub-transmission path and a second sub-transmission path. Each coupling module has an adjustable coupling ratio, and the equivalent impedance of each first sub-transmission path varies according to the corresponding coupling ratio. Each coupling module is used to adjust the corresponding coupling ratio to adjust the equivalent impedance of the first sub-transmission path of the radio frequency power input to the corresponding first input terminal.

[0009] In one possible implementation, each coupling module is a transformer, each transformer including a coupled first winding and a second winding. One end of each first winding is connected to a corresponding first input terminal, one end of each second winding is connected to the power combining point, and the other ends of each first winding and each second winding are grounded. The coupling ratio of each transformer is the ratio of the number of turns in the corresponding first winding to the number of turns in the corresponding second winding. The number of turns in each first winding and / or each second winding is adjustable, so that the coupling ratio of each transformer is adjustable.

[0010] In one possible implementation, the radio frequency power combining device further includes an impedance matching unit connected between the power combining point and the output terminal. The impedance matching unit adjusts the equivalent impedance value of a portion of the transmission path of the target radio frequency power so that the equivalent impedance value of the portion of the transmission path of the target radio frequency power is equal to a preset characteristic impedance value.

[0011] In one possible implementation, the transmission path of the target radio frequency power is a transmission path from the power combining point to the output terminal, and the transmission path includes a third sub-transmission path and a fourth sub-transmission path. The third sub-transmission path is a transmission path from the power combining point to the impedance matching unit excluding the impedance matching unit, and the fourth sub-transmission path is a transmission path from the impedance matching unit to the output terminal including the impedance matching unit. The impedance matching unit is used to adjust the equivalent impedance value of the fourth sub-transmission path of the target radio frequency power to the preset characteristic impedance value.

[0012] Secondly, a radio frequency (RF) power supply device is also provided, comprising N RF sources and an RF power combining device. The RF power combining device includes N input terminals, M impedance adjustment units, and an output terminal. The N input terminals include M first input terminals and NM second input terminals. Each input terminal is connected to a power combining point, and each input terminal is used to input RF power. The RF power input at each input terminal is mixed at the power combining point to obtain a target RF power. The power combining point is connected to the output terminal, and the output terminal is used to output the target RF power. The M impedance adjustment units are connected one-to-one between the M first input terminals and the power combining point. Each impedance adjustment unit is used to adjust the equivalent impedance value of a portion of the transmission path of the RF power input at the corresponding first input terminal, thereby adjusting the power value of the RF power input at the corresponding first input terminal, and thus adjusting the power value of the target RF power, where N > M ≥ 1.

[0013] Thirdly, a radio frequency (RF) power supply system is also provided, the RF power supply system including an RF power supply device. The RF power supply device includes N RF sources and an RF power combining device.

[0014] The radio frequency power combining device, radio frequency power supply equipment, and radio frequency power supply system of this application, by setting up M impedance adjustment units that are connected one-to-one between M first input terminals and power combining points, and configuring each impedance adjustment unit to adjust the equivalent impedance value of part of the transmission path of the radio frequency power input to the corresponding first input terminal, can flexibly adjust the power value of the radio frequency power input to the corresponding first input terminal, thereby flexibly adjusting the power value of the target radio frequency power without adjusting any radio frequency source of the output radio frequency power. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1 This is a schematic diagram of a radio frequency power combining device in some embodiments of this application.

[0017] Figure 2 This is another schematic diagram of a radio frequency power combining apparatus in some embodiments of this application.

[0018] Figure 3 This is yet another schematic diagram of a radio frequency power combining apparatus in some embodiments of this application.

[0019] Figure 4 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.

[0020] Figure 5 This is a schematic diagram of a radio frequency power supply system in some embodiments of this application.

[0021] Explanation of reference numerals in the attached figures: 1000, RF power supply system; 1, RF power supply equipment; 10, RF power combining device; 100, input terminal; 110, first input terminal; RFP, RF power; 120, second input terminal; A, power combining point; 200, impedance adjustment unit; 210, coupling module; T1, first winding; T2, second winding; 300, output terminal; RFM, target RF power; 400, impedance matching unit; 410, second sub-transmission path; 420, first sub-transmission path; 430, third sub-transmission path; 440, fourth sub-transmission path; GND, ground; 20, RF source; RF, load. Detailed Implementation

[0022] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0023] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] Hereinafter, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this application, unless otherwise stated, "a plurality of" means two or more.

[0025] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0026] See also Figure 1 , Figure 1 This is a schematic diagram of a radio frequency power combining device in some embodiments of this application. For example... Figure 1As shown, this application provides a radio frequency power combining device 10, which includes N input terminals 100, M impedance adjustment units 200, and an output terminal 300. The N input terminals 100 include M first input terminals 110 and NM second input terminals 120. All N input terminals 100 are connected to a power combining point A. Each input terminal 100 is used to input a radio frequency power RFP. The radio frequency power RFP input by each input terminal 100 is mixed at the power combining point A to obtain a target radio frequency power RFM. The power combining point A is connected to the output terminal 300, and the output terminal 300 is used to output the target radio frequency power RFM. Among them, M impedance adjustment units 200 are connected one-to-one between M first input terminals 110 and power combining point A. Each impedance adjustment unit 200 is used to adjust the equivalent impedance value of part of the transmission path of the radio frequency power RFP input to the corresponding first input terminal 110, so as to adjust the power value of the radio frequency power RFP input to the corresponding first input terminal 110, thereby adjusting the power value of the target radio frequency power RFM, N>M≥1.

[0027] Therefore, the radio frequency power combining device 10 described above in this application, by setting up M impedance adjustment units 200 that are connected one-to-one between the M first input terminals 110 and the power combining point A, and configuring each impedance adjustment unit 200 to adjust the equivalent impedance value of a portion of the transmission path of the radio frequency power RFP input to the corresponding first input terminal 110, can flexibly adjust the power value of the radio frequency power RFP input to the corresponding first input terminal 110, thereby flexibly adjusting the power value of the target radio frequency power RFM without adjusting any radio frequency source of the output radio frequency power RFP.

[0028] like Figure 1 As shown, the transmission path of the radio frequency power RFP input to each first input terminal 110 is a transmission path from the corresponding first input terminal 110 to the power combining point A, and each transmission path includes a first sub-transmission path 420 and a second sub-transmission path 410. The first sub-transmission path 420 is a transmission path including the impedance adjustment unit 200 from the corresponding impedance adjustment unit 200 to the power combining point A, and the second sub-transmission path 410 is a transmission path excluding the impedance adjustment unit 200 from the corresponding first input terminal 110 to the impedance adjustment unit 200. Each impedance adjustment unit 200 is used to adjust the equivalent impedance value of the first sub-transmission path 420 of the radio frequency power RFP input to the corresponding first input terminal 110, and the equivalent impedance values ​​of the second sub-transmission path 410 of the radio frequency power RFP input to each first input terminal 110 are equal.

[0029] Therefore, the radio frequency power combining device 10 described above in this application is configured such that the equivalent impedance values ​​of the second sub-transmission paths 410 of the radio frequency power RFP input to each first input terminal 110 are equal, so that the power value of the radio frequency power RFP does not change when it is transmitted in the corresponding second sub-transmission path 410. Furthermore, by adjusting the equivalent impedance value of the corresponding first sub-transmission path 420 of the radio frequency power RFP, the power value of the radio frequency power can change when it is transmitted in the corresponding first sub-transmission path 420, thereby flexibly adjusting the power value of the radio frequency power RFP input to the corresponding first input terminal 110 at the power combining point A.

[0030] Specifically, the first sub-transmission path 420 may also be a transmission path excluding the impedance adjustment unit 200 between the corresponding impedance adjustment unit 200 and the power combining point A, and the second sub-transmission path 410 may also be a transmission path including the impedance adjustment unit 200 between the corresponding first input terminal 110 and the impedance adjustment unit 200. This application is not limited thereto.

[0031] In some embodiments, the equivalent impedance values ​​of the transmission paths of the radio frequency power RFP input to each second input terminal 120 are equal, and the equivalent impedance values ​​of the second sub-transmission paths 410 of the radio frequency power RFP input to each first input terminal 110 and the equivalent impedance values ​​of the transmission paths of the radio frequency power RFP input to each second input terminal 120 are preset characteristic impedance values.

[0032] Therefore, the radio frequency power combining device 10 described above in this application, by configuring the equivalent impedance value of the second sub-transmission path 410 of the radio frequency power RFP input at each first input terminal 110 and the equivalent impedance value of the transmission path of the radio frequency power RFP input at each second input terminal 120 as a preset characteristic impedance value, can avoid the generation of reflected power when the radio frequency power RFP input at each first input terminal 110 is transmitted in the corresponding second sub-transmission path 410, and also avoid the generation of reflected power when the radio frequency power RFP input at each second input terminal 120 is transmitted in the corresponding transmission path, thereby avoiding adverse effects on the radio frequency source.

[0033] In some embodiments, the power values ​​of the radio frequency power RFP input to each first input terminal 110 are equal, and the ratio of the power values ​​of the M radio frequency power RFPs transmitted to the power combining point A is the ratio of the equivalent impedance values ​​of the corresponding M first sub-transmission paths 420.

[0034] Therefore, the radio frequency power combining device 10 described above in this application, when the power values ​​of the radio frequency power RFP input to each first input terminal 110 are equal, can adjust the equivalent impedance values ​​of the M first sub-transmission paths 420 so that the ratio of the power values ​​of the M radio frequency power RFPs transmitted to the power combining point A is the ratio of the equivalent impedance values ​​of the corresponding M first sub-transmission paths 420. Thus, the equivalent impedance values ​​of the corresponding first sub-transmission paths 420 can be adjusted according to specific needs, and the ratio of the power values ​​of the M radio frequency power RFPs transmitted to the power combining point A can be obtained based on the ratio of the equivalent impedance values ​​of the corresponding M first sub-transmission paths 420.

[0035] In some embodiments, the frequencies of the radio frequency power RFP input to each first input terminal 110 are also equal, so that the radio frequency power RFP input to each input terminal 100 can be better mixed at the power combining point A to obtain the target radio frequency power RFM.

[0036] See also Figure 2 , Figure 2 This is another schematic diagram of a radio frequency power combining apparatus in some embodiments of this application. For example... Figure 2 As shown, each impedance adjustment unit 200 includes a coupling module 210, which is used to couple the corresponding first sub-transmission path 420 and second sub-transmission path 410. Each coupling module 210 has an adjustable coupling ratio, and the equivalent impedance value of each first sub-transmission path 420 changes according to the corresponding coupling ratio. Each coupling module 210 is used to adjust the corresponding coupling ratio to adjust the equivalent impedance value of the first sub-transmission path 420 of the corresponding radio frequency power RFP input to the first input terminal 110.

[0037] Therefore, the RF power combining device 10 described above in this application, by setting each impedance adjustment unit 200 to include a coupling module 210, and each coupling module 210 coupling the corresponding first sub-transmission path 420 and second sub-transmission path 410, enables the equivalent impedance value of each first sub-transmission path 420 to change according to the change of the corresponding coupling ratio. In turn, by adjusting the corresponding coupling ratio, the equivalent impedance value of the first sub-transmission path 420 of the RF power RFP input to the corresponding first input terminal 110 can be flexibly adjusted. Furthermore, the reflected power generated when the RF power RFP input to the corresponding first input terminal 110 is transmitted through the first sub-transmission path 420 will not have an adverse effect on the corresponding RF source due to the isolation of the corresponding coupling module 210.

[0038] like Figure 2As shown, each coupling module 210 is a transformer, and each transformer includes a first winding T1 and a second winding T2 coupled together. One end of each first winding T1 is connected to the corresponding first input terminal 110, and one end of each second winding T2 is connected to the power combining point A. The other ends of each first winding T1 and each second winding T2 are grounded to GND. The coupling ratio of each transformer is the ratio of the number of turns of the corresponding first winding T1 to the number of turns of the corresponding second winding T2. The number of turns of each first winding T1 and / or each second winding T2 is adjustable, so that the coupling ratio of each transformer is adjustable.

[0039] Therefore, the radio frequency power combining device 10 described above in this application can couple the corresponding first sub-transmission path 420 and second sub-transmission path 410 through the coupling of the first winding T1 and the second winding T2 of each transformer, and can adjust the coupling ratio of each coupling module 210 by adjusting the number of turns of each first winding T1 and / or the number of turns of each second winding T2.

[0040] See also Figure 3 , Figure 3 This is yet another schematic diagram of a radio frequency power combining apparatus in some embodiments of this application. For example... Figure 3 As shown, the radio frequency power combining device 10 also includes an impedance matching unit 400, which is connected between the power combining point A and the output terminal 300. The impedance matching unit 400 is used to adjust the equivalent impedance value of a portion of the transmission path of the target radio frequency power RFM, so that the equivalent impedance value of the portion of the transmission path of the target radio frequency power RFM is equal to a preset characteristic impedance value.

[0041] Therefore, the radio frequency power combining device 10 described above in this application, by setting the impedance matching unit 400, can perform impedance matching on the equivalent impedance value of the first sub-transmission path 420 corresponding to the radio frequency power RFP, so as to adjust the equivalent impedance value of a portion of the transmission path of the target radio frequency power RFM, so that the equivalent impedance value of a portion of the transmission path of the target radio frequency power RFM is equal to the preset characteristic impedance value, and can avoid the equivalent impedance value of the first sub-transmission path 420 corresponding to the radio frequency power RFP not being equal to the preset characteristic impedance value, thus avoiding the generation of reflected power, and the resulting reflected power having an adverse effect on the electrical equipment connected to the output terminal 300.

[0042] In some embodiments, the preset characteristic impedance value can be 50Ω, 75Ω, 100Ω, etc.

[0043] In some embodiments, the impedance matching unit 400 may include at least resistive devices, such as adjustable resistors. This allows adjustment of the equivalent impedance value of a portion of the transmission path of the target radio frequency power (RFM) by adjusting the resistance value of the resistive devices.

[0044] In some embodiments, the impedance matching unit 400 may also include inductive and capacitive devices, such as adjustable inductors and adjustable capacitors. This allows adjustment of the equivalent impedance of a portion of the transmission path of the target radio frequency power (RFM) by adjusting the inductance value of the inductive device and / or the capacitance value of the capacitive device.

[0045] like Figure 3 As shown, the transmission path of the target radio frequency power RFM is from the power combining point A to the output terminal 300, and the transmission path includes a third sub-transmission path 430 and a fourth sub-transmission path 440. The third sub-transmission path 430 is the transmission path from the power combining point A to the impedance matching unit 400, excluding the impedance matching unit 400. The fourth sub-transmission path 440 is the transmission path from the impedance matching unit 400 to the output terminal 300, including the impedance matching unit 400. The impedance matching unit 400 is used to adjust the equivalent impedance value of the fourth sub-transmission path 440 of the target radio frequency power RFM to a preset characteristic impedance value.

[0046] Therefore, the radio frequency power combining device 10 described above in this application can achieve impedance matching between the radio frequency source connected to each input terminal 100 and the electrical device connected to the output terminal 300 by adjusting the equivalent impedance value of the fourth sub-transmission path 440 of the target radio frequency power RFM to a preset characteristic impedance value, thereby avoiding the generation of large reflected power during the power adjustment process of the target radio frequency power RFM.

[0047] In particular, the third sub-transmission path 430 may also be a transmission path including the impedance matching unit 400 from the power combining point A to the impedance matching unit 400, and the fourth sub-transmission path 440 may also be a transmission path excluding the impedance matching unit 400 from the impedance matching unit 400 to the output terminal 300. This application is not limited thereto.

[0048] In some embodiments, the impedance matching unit 400 may further include a coupling device for coupling the third sub-transmission path 430 and the fourth sub-transmission path 440. This isolates the third sub-transmission path 430 and the fourth sub-transmission path 440, preventing the reflected power generated by the target radio frequency power RFM during transmission in the third sub-transmission path 430 from affecting the electrical equipment connected to the output terminal 300.

[0049] The radio frequency power combining device 10 of this application, through the above structure, can flexibly adjust the power value of the radio frequency power RFP input to the corresponding first input terminal 110, thereby flexibly adjusting the power value of the target radio frequency power RFM without adjusting any radio frequency source of the output radio frequency power RFP, and can avoid generating large reflected power, thereby avoiding adverse effects on any radio frequency source and electrical equipment.

[0050] Please see Figure 4 , Figure 4 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 4 As shown, this application also provides an RF power supply device 1, which includes N RF sources 20 and the RF power combining device 10 in any of the foregoing embodiments.

[0051] Please refer to it again. Figure 1 .like Figure 1 As shown, the radio frequency power combining device 10 includes N input terminals 100, M impedance adjustment units 200, and an output terminal 300. The N input terminals 100 include M first input terminals 110 and NM second input terminals 120. All N input terminals 100 are connected to a power combining point A. Each input terminal 100 is used to input a radio frequency power RFP. The radio frequency power RFP input from each input terminal 100 is mixed at the power combining point A to obtain the target radio frequency power RFM. The power combining point A is connected to the output terminal 300, which is used to output the target radio frequency power RFM. The M impedance adjustment units 200 are connected one-to-one between the M first input terminals 110 and the power combining point A. Each impedance adjustment unit 200 is used to adjust the equivalent impedance value of a portion of the transmission path of the radio frequency power RFP input from the corresponding first input terminal 110, thereby adjusting the power value of the radio frequency power RFP input from the corresponding first input terminal 110, and thus adjusting the power value of the target radio frequency power RFM, where N > M ≥ 1.

[0052] For a more specific description of the structure of the radio frequency power combining device 10, please refer to the relevant content of the radio frequency power combining device 10 in any of the foregoing embodiments, which will not be repeated here.

[0053] In some embodiments, N radio frequency sources 20 may all be connected to the radio frequency power combining device 10, and the radio frequency power combining device 10 may be used to connect to the load RF.

[0054] The radio frequency power combining device 10 and radio frequency power supply system 1000 of this application, through the above structure, can flexibly adjust the power value of the radio frequency power RFP input to the corresponding first input terminal 110, thereby flexibly adjusting the power value of the target radio frequency power RFM without adjusting any radio frequency source 20 of the output radio frequency power RFP, and can avoid generating large reflected power, thereby avoiding adverse effects on any radio frequency source 20 and the load RF as the power-consuming equipment.

[0055] Please see Figure 5 , Figure 5 This is a schematic diagram of a radio frequency power supply system in some embodiments of this application. For example... Figure 5As shown, this application also provides an RF power supply system 1000, which includes the RF power supply device 1 in any of the foregoing embodiments.

[0056] Please refer to it again. Figure 4 .like Figure 4 As shown, the radio frequency power supply device 1 includes N radio frequency sources 20 and a radio frequency power combining device 10.

[0057] For a more specific description of the structure of the RF power supply device 1, please refer to the relevant content of the RF power supply device 1 in any of the foregoing embodiments, which will not be repeated here.

[0058] In some embodiments, the radio frequency power supply device 1 can be used to connect to a load RF.

[0059] In some embodiments, the radio frequency power supply device 1 may also include electronic devices such as a crystal oscillator and a controller.

[0060] The radio frequency power combining device 10, radio frequency power supply device 1, and radio frequency power supply system 1000 of this application, through the above-described structure, can flexibly adjust the power value of the radio frequency power RFP input to the corresponding first input terminal 110, thereby flexibly adjusting the power value of the target radio frequency power RFM without adjusting any radio frequency source 20 of the output radio frequency power RFP, and can avoid generating large reflected power, thereby avoiding adverse effects on any radio frequency source 20 and the load RF of the power-consuming equipment.

[0061] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A radio frequency power combining device, characterized in that, It includes N input terminals, M impedance adjustment units, and an output terminal. The N input terminals include M first input terminals and NM second input terminals. All N input terminals are connected to a power combining point. Each input terminal is used to input a radio frequency (RF) power. The RF power input from each input terminal is mixed at the power combining point to obtain the target RF power. The power combining point is connected to the output terminal, and the output terminal is used to output the target RF power. The M impedance adjustment units are connected one-to-one between the M first input terminals and the power combining point. Each impedance adjustment unit is used to adjust the equivalent impedance value of a portion of the transmission path of the radio frequency power input to the corresponding first input terminal, so as to adjust the power value of the radio frequency power input to the corresponding first input terminal, thereby adjusting the power value of the target radio frequency power, where N > M ≥ 1.

2. The radio frequency power combining device according to claim 1, characterized in that, The transmission path of the radio frequency power input at each first input terminal is the transmission path from the corresponding first input terminal to the power combining point, and each transmission path includes a first sub-transmission path and a second sub-transmission path. The first sub-transmission path is the transmission path from the corresponding impedance adjustment unit to the power combining point, including the impedance adjustment unit. The second sub-transmission path is the transmission path from the corresponding first input terminal to the impedance adjustment unit, excluding the impedance adjustment unit. Each impedance adjustment unit is used to adjust the equivalent impedance value of the first sub-transmission path of the radio frequency power input to the corresponding first input terminal, and the equivalent impedance value of the second sub-transmission path of the radio frequency power input to each first input terminal is equal.

3. The radio frequency power combining device according to claim 2, characterized in that, The equivalent impedance values ​​of the transmission paths of the radio frequency power input to each second input terminal are equal, and the equivalent impedance values ​​of the second sub-transmission paths of the radio frequency power input to each first input terminal and the equivalent impedance values ​​of the transmission paths of the radio frequency power input to each second input terminal are preset characteristic impedance values.

4. The radio frequency power combining device according to claim 2, characterized in that, The power values ​​of the radio frequency power input to each of the first input terminals are equal, and the ratio of the power values ​​of the M radio frequency power transmitted to the power combining point is the ratio of the equivalent impedance values ​​of the corresponding M first sub-transmission paths.

5. The radio frequency power combining device according to claim 2, characterized in that, Each impedance adjustment unit includes a coupling module, and each coupling module is used to couple the corresponding first sub-transmission path and second sub-transmission path. Each coupling module has an adjustable coupling ratio, and the equivalent impedance of each first sub-transmission path changes according to the corresponding coupling ratio. Each coupling module is used to adjust the corresponding coupling ratio to adjust the equivalent impedance of the first sub-transmission path of the radio frequency power input to the corresponding first input terminal.

6. The radio frequency power combining device according to claim 5, characterized in that, Each coupling module is a transformer, and each transformer includes a first winding and a second winding coupled in phase. One end of each first winding is connected to the corresponding first input terminal, one end of each second winding is connected to the power combining point, and the other end of each first winding and the other end of each second winding are grounded. The coupling ratio of each transformer is the ratio of the number of turns in the first winding to the number of turns in the second winding. The number of turns in each first winding and / or each second winding is adjustable so that the coupling ratio of each transformer is adjustable.

7. The radio frequency power combining device according to claim 1, characterized in that, The radio frequency power combining device further includes an impedance matching unit, which is connected between the power combining point and the output terminal; The impedance matching unit is used to adjust the equivalent impedance value of a portion of the transmission path of the target radio frequency power so that the equivalent impedance value of the portion of the transmission path of the target radio frequency power is equal to the preset characteristic impedance value.

8. The radio frequency power combining apparatus according to claim 7, characterized in that, The transmission path of the target radio frequency power is a transmission path from the power combining point to the output terminal, and the transmission path includes a third sub-transmission path and a fourth sub-transmission path. The third sub-transmission path is a transmission path from the power combining point to the impedance matching unit excluding the impedance matching unit, and the fourth sub-transmission path is a transmission path from the impedance matching unit to the output terminal including the impedance matching unit. The impedance matching unit is used to adjust the equivalent impedance value of the fourth sub-transmission path of the target radio frequency power to the preset characteristic impedance value.

9. A radio frequency power supply device, characterized in that, It includes N radio frequency sources and a radio frequency power combining device as described in any one of claims 1-8.

10. A radio frequency power supply system, characterized in that, Includes the radio frequency power supply device as described in claim 9.

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