Micro power device and method based on hydrogen nanobubbles

Abstract

The invention discloses a micro power device and method based on hydrogen nanobubbles, and belongs to the technical field of micro power devices. The device comprises a hydrogen nanobubble reactor with a built-in reaction chamber, the reaction chamber is internally covered with a thin film, a first electrode and a second electrode are attached to the surface of the thin film, and the contact ends of the first electrode and the second electrode are in a staggered finger shape and are located in the reaction chamber. The non-contact end is respectively connected with a first electrode contact pad and a second electrode contact pad, the first electrode contact pad is connected with an alternating power supply, and the second electrode contact pad is grounded; and the upper and lower ends of the reaction chamber are symmetrically connected with an electrolyte inflow channel and an electrolyte outflow channel. The device can generate nano bubbles under the normal condition of room temperature, the hydrogen-oxygen reaction on the micro-nano scale is realized, heat is converted into mechanical energy of the thin film, the mechanical energy is further transmitted to the outside, and the engineering application of the hydrogen-oxygen reaction in the micro-nano reaction device is powerfully promoted.

Description

Technical Field

[0001] This invention belongs to the field of micro-power device technology, specifically relating to a micro-power device and method based on hydrogen nanobubbles. Background Technology

[0002] With the growing global demand for micro / nano systems technology, the development of micro-efficient power devices has become particularly important. However, existing micro-power devices, such as electromagnetic motors and thermal expansion actuators, generally suffer from insufficient force output, slow response speed, and low energy conversion efficiency. Furthermore, thermally driven devices like internal combustion engines experience rapid heat loss at the microscale due to the increased surface area, making the reaction difficult to sustain and resulting in near-zero efficiency. Therefore, developing novel micro-power devices to overcome the bottlenecks of traditional power mechanisms has become a current research hotspot. Hydrogen energy, as a clean energy source, boasts advantages such as high energy density and zero carbon emissions, but its application in micro-systems faces challenges related to high pressure risks and energy losses. The development of nanobubble technology offers a new approach to solving these problems, as nanobubbles can promote the spontaneous reaction of hydrogen and oxygen under specific conditions, releasing a large amount of energy to power micro-power devices.

[0003] For example, Chinese invention patent CN112499730A discloses a hydrogen micro / nano bubble generator. This device uses the electrolysis of water to generate hydrogen nanobubbles as its basic technical approach. However, because the device is divided into two independent chambers, it suffers from a loose overall structure, large volume, and inability to be integrated into a micro / nano system. Furthermore, because the device uses a DC power supply, hydrogen and oxygen separate on both sides of the electrodes, resulting in low bubble generation efficiency and uneven bubble distribution, making it difficult to achieve efficient reactions. Summary of the Invention

[0004] In order to overcome the shortcomings of the prior art, the present invention aims to provide a micro-power device and method based on hydrogen nanobubbles, so as to solve the technical problems of the inability of existing devices to be micro-nano-integrated and the low efficiency of bubble generation and mixing.

[0005] To achieve the above objectives, the present invention employs the following technical solution: This invention provides a micro-power device based on hydrogen nanobubbles, including a hydrogen nanobubble reactor with a built-in reaction chamber. The interior of the reaction chamber is covered with a thin film, and a first electrode and a second electrode are attached to the surface of the thin film. The contact ends of the first electrode and the second electrode are arranged in an alternating finger shape and located inside the reaction chamber. The non-contact ends are respectively connected to the first electrode contact pad and the second electrode contact pad. The first electrode contact pad is connected to an alternating power supply, and the second electrode contact pad is grounded. Electrolyte inflow channels and electrolyte outflow channels are symmetrically connected to the upper and lower ends of the reaction chamber.

[0006] In one embodiment, a thermal sensor contact pad is provided on both the upper and lower sides of the first electrode contact pad and the second electrode contact pad.

[0007] In one embodiment, a polycrystalline silicon thermal sensor is externally connected to the thermal sensor contact pad; the polycrystalline silicon thermal sensor is used to monitor temperature changes through the thermal sensor contact pad.

[0008] In one embodiment, multiple of the aforementioned hydrogen nanobubble-based micro-power devices are connected in series.

[0009] In one embodiment, among the multiple hydrogen nanobubble-based micro-power devices arranged in series, the electrolyte outflow channel of the previous hydrogen nanobubble-based micro-power device is connected to the electrolyte inflow channel of the next hydrogen nanobubble-based micro-power device, or the electrolyte outflow channel of the previous hydrogen nanobubble-based micro-power device serves as the electrolyte inflow channel of the next hydrogen nanobubble-based micro-power device.

[0010] In one embodiment, the electrolyte inflow channel includes a fluid inlet and a first electrolyte flow channel; the electrolyte outflow channel includes a fluid outlet and a second electrolyte flow channel; the first electrolyte flow channel is located at the upper end of the reaction chamber, and the fluid inlet is located at the upper end of the first electrolyte flow channel; the second electrolyte flow channel is located at the lower end of the reaction chamber, and the fluid outlet is located at the lower end of the second electrolyte flow channel; the fluid inlet and the fluid outlet are symmetrically arranged, and the first electrolyte flow channel and the second electrolyte flow channel are symmetrically arranged.

[0011] In one embodiment, the thin film is made of silicon-rich silicon nitride and has a thickness of 530 nanometers.

[0012] In one embodiment, when electrolysis is performed by connecting an alternating power supply, the first electrode and the second electrode connected to the first electrode contact pad and the second electrode contact pad alternately serve as the reaction anode and the reaction cathode.

[0013] This invention also provides a micro-dynamic method based on hydrogen nanobubbles, comprising the following steps: Electrolytes flow into the reaction chamber of the hydrogen nanobubble reactor through the electrolyte inflow channel. An alternating power supply drives the first and second electrodes to alternately act as the reaction anode and cathode via the first and second electrode contact pads. The alternating power supply is turned on and off by pulse control. When the alternating power supply is turned on, the electrolyte rapidly electrolyzes inside the reaction chamber to generate nanobubbles. The nanobubbles contain hydrogen, oxygen, and mixtures of hydrogen and oxygen. The nanobubbles and their corresponding dissolved gases cause the pressure inside the reaction chamber to rise rapidly in a short time, pushing the membrane upward to output mechanical work. When the alternating power supply is turned off, the surface of the hydrogen and oxygen in the nanobubbles spontaneously combusts to generate water, releasing energy and causing the pressure to drop rapidly back to atmospheric pressure. The membrane returns to its downward position, and the electrolyzed electrolyte flows out through the electrolyte outflow channel.

[0014] In one embodiment, the alternating power supply has a driving frequency of 30-70 kHz, a voltage of ±10 V, and an average current density of 200 A / cm². 2 .

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention provides a micro-power device based on hydrogen nanobubbles. The electrolyte flow channel connected to the reaction chamber allows for precise control of the electrolyte flow rate while limiting excessive bubble diffusion, ensuring rapid accumulation of gas concentration within the reaction chamber. This gas drives the deformation of the thin film, generating mechanical work. The electrodes, arranged in an interlaced finger pattern, increase the reaction area, improving reaction rate and efficiency, while also resulting in more uniform film vibration and more even power output across different parts of the film. The modular design of the electrode contact pads facilitates circuit integration and debugging, supports high-frequency alternating voltage input, and enables cyclic control of pulsed electrolysis and combustion. By connecting to an alternating power supply, nanobubbles can be generated in a single chamber under normal room temperature conditions, achieving a hydrogen-oxygen reaction at the micro-nano scale. This solves the technical problems of the inability to integrate devices at the micro-nano scale and low efficiency in bubble generation and mixing. Furthermore, heat is converted into mechanical energy of the thin film and transferred to the outside, significantly promoting the engineering application of hydrogen-oxygen reactions in micro-nano reaction devices. This invention also provides a micro-power method based on hydrogen nanobubbles. Nanobubbles are generated through short-term alternating polar electrolysis of water. The surface charge of these nanobubbles induces the dissociation of hydrogen and oxygen molecules, triggering a reaction. The reaction completes in three stages: chain initiation, chain propagation, and chain termination. The released heat is used to drive the vibration of a thin film to output power. Simultaneously, this device achieves efficient energy release and conversion at the microscale, possessing advantages such as small size, high energy density, and fast response speed. It is suitable for various scenarios such as microfluidic actuation and powering microsensors, and has significant engineering application value. Attached Figure Description

[0016] Figure 1This is a schematic diagram of the structure of the micro-power device based on hydrogen nanobubbles of the present invention; Wherein: 1-fluid inlet; 2-fluid outlet; 3-first electrolyte flow channel; 4-second electrolyte flow channel; 5-reaction chamber; 6-film; 7-first electrode; 8-second electrode; 9-first electrode contact pad; 10-second electrode contact pad; 11-first thermal sensor contact pad; 12-second thermal sensor contact pad. Detailed Implementation

[0017] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0018] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0019] The present invention will now be described in further detail with reference to the accompanying drawings: This invention provides a micro-power device and method based on hydrogen nanobubbles.

[0020] One aspect provides a micro-power device based on hydrogen nanobubbles. This device mainly includes a hydrogen nanobubble reactor with a built-in reaction chamber 5, a thin film 6 covering the inside of the reaction chamber 5, a first electrode 7 and a second electrode 8 attached to the surface of the thin film 6, and several contact pads located outside the hydrogen nanobubble reactor. The upper end of the hydrogen nanobubble reactor and the reaction chamber 5 is provided with a fluid inlet 1 and a first electrolyte flow channel 3. The reaction chamber 5 is located inside the hydrogen nanobubble reactor, and the thin film 6, the first electrode 7, and the second electrode 8 are located inside the reaction chamber 5. The lower end of the hydrogen nanobubble reactor and the reaction chamber 5 is provided with a second electrolyte flow channel 4 and a fluid outlet 2. There are a total of 6 contact pads, including a first electrode contact pad 9, a second electrode contact pad 10, two first thermal sensor contact pads 11, and two second thermal sensor contact pads 12. The first electrode contact pads 9 and 10 are respectively connected to the first electrode 7 and the second electrode 8, and the first thermal sensor contact pads 11 and 12 can be connected to a four-probe thermal sensor (polycrystalline silicon thermal sensor).

[0021] Specifically, the aforementioned device includes a hydrogen nanobubble reactor and a reaction chamber 5 located inside the hydrogen nanobubble reactor. The interior of the reaction chamber 5 is covered with a thin film 6, and a first electrode 7 and a second electrode 8 are attached to the surface of the thin film 6. The contact ends of the first electrode 7 and the second electrode 8 are arranged in an alternating finger shape and located inside the reaction chamber 5. The non-contact ends are respectively connected to a first electrode contact pad 9 and a second electrode contact pad 10. The first electrode contact pad 9 is connected to an alternating power supply, and the second electrode contact pad 10 is grounded. Electrolyte inflow channels and electrolyte outflow channels are symmetrically connected to the upper and lower ends of the hydrogen nanobubble reactor. When electrolysis is performed by connecting the alternating power supply, the first electrode 7 and the second electrode 8 connected to the first electrode contact pad 9 and the second electrode contact pad 10 alternately serve as the reaction anode and the reaction cathode.

[0022] On the other hand, a micro-dynamic method based on hydrogen nanobubbles is provided, including the following steps: Electrolyte flows into reaction chamber 5 of the hydrogen nanobubble reactor through the electrolyte inflow channel. Alternating power drives first electrode 7 and second electrode 8 through first electrode contact pad 9 and second electrode contact pad 10. Driven by the alternating power, first electrode 7 and second electrode 8 alternately serve as reaction anode and reaction cathode, and the alternating power is turned on and off by pulse control.

[0023] When using the device, first turn on the alternating power supply. Under the action of the alternating power supply, the electrolyte is continuously fed into the reaction chamber 5. The electrolyte is rapidly electrolyzed inside the reaction chamber 5 to generate nanobubbles. The nanobubbles include hydrogen, oxygen and a mixture of hydrogen and oxygen. The nanobubbles and the corresponding dissolved gases cause the pressure inside the reaction chamber 5 to rise in a short time, pushing the film 6 to deform upward and output mechanical work. After the alternating power supply is turned off, the hydrogen and oxygen in the nanobubbles spontaneously combust on their surfaces to generate water, releasing energy and causing the pressure to drop rapidly back to normal. The membrane 6 then returns to its original position, and the electrolyte after electrolysis flows out through the electrolyte outflow channel.

[0024] In the above process, the driving frequency of the alternating power supply is 30-70kHz, the voltage is ±10V, and the average current density is 200 A / cm². 2 .

[0025] More specifically, in the above method, the electrolyte flows in from the upper fluid inlet 1, enters the reaction chamber 5 through the first electrolyte flow channel 3, and flows out from the lower second electrolyte flow channel 4 and fluid outlet 2 after the reaction. An external alternating power supply drives the interlaced finger-shaped first electrode 7 and second electrode 8 through the first electrode contact pad 9 and the second electrode contact pad 10. Under the action of the high-frequency alternating power supply, nanobubbles are rapidly generated in the micro-nano scale reaction chamber 5.

[0026] The H2 and O2 generated by electrolysis are uniformly distributed in the reaction chamber 5 in the form of nanobubbles. The high relative supersaturation promotes rapid nucleation of the bubbles, preventing macroscopic aggregation. The nanobubbles and dissolved gas cause the pressure in the reaction chamber 5 to rise rapidly in a short time, pushing the film 6 to deform upward. After the voltage pulse is turned off, H2 and O2 spontaneously combust on the surface of the nanobubbles to generate water, releasing energy and causing the pressure to drop rapidly back to atmospheric pressure.

[0027] Furthermore, the polycrystalline silicon thermal sensor monitors temperature changes through the first thermal sensor contact pad 11 and the second thermal sensor contact pad 12, providing data support for optimizing drive parameters.

[0028] The method provided by this invention features a micro-electrolyte flow channel with dimensions adapted to a microfluidic system, enabling precise control of electrolyte flow while limiting excessive bubble diffusion. This ensures rapid accumulation of gas concentration within the reaction chamber 5. The interconnected design between the electrolyte flow channel and the reaction chamber 5 facilitates electrolyte circulation and renewal, maintaining the continuous electrolysis reaction and preventing product accumulation that could affect efficiency. The miniaturized design of the reaction chamber 5 overcomes the limitations of traditional internal combustion engines in microscale combustion quenching, enabling microscopic combustion-driven operation. The closed chamber allows for rapid accumulation of hydrogen and oxygen generated during electrolysis, creating an additional pressure of 0.5-4 bar in a short time, driving the deformation of the film 6 to output mechanical work. The 530-nanometer-thick silicon-rich silicon nitride (SiRN) film 6 combines flexibility and electrochemical stability, allowing the film to deform rapidly under 0.5-4 bar pressure and recover quickly after pressure release, achieving high-frequency mechanical work output. The transparency of the film 6 facilitates optical monitoring, utilizing the energy released by the combustion of nanobubbles to drive the film's upward deformation, directly converting chemical energy into mechanical energy.

[0029] Furthermore, the fluid entering the reaction chamber can be a Na2SO4 solution. The hydrogen nanobubble generation and reaction device, i.e., the hydrogen nanobubble reactor, is equipped with a thin film 6, which covers the inside of the reaction chamber 5. The thin film 6 is made of silicon-rich silicon nitride (SiRN) and has a thickness of 530 nanometers.

[0030] Furthermore, the hydrogen nanobubble reactor is equipped with a first electrode 7 and a second electrode 8, which are arranged in an alternating finger pattern. This alternating finger arrangement increases the reaction area, improving the reaction rate and efficiency, while also allowing for more uniform vibration of the thin film 6 and more uniform power output across different parts of the film 6. The first electrode 7 and the second electrode 8 are preferably titanium electrodes, whose high conductivity ensures efficient electrolysis.

[0031] Furthermore, a first electrode contact pad 9 and a second electrode contact pad 10 are disposed externally on the hydrogen nanobubble reactor, with the second electrode contact pad 10 arranged symmetrically with the first electrode contact pad 9. A first thermal sensor contact pad 11 and a second thermal sensor contact pad 12 are disposed externally on the hydrogen nanobubble reactor, with the second thermal sensor contact pad 12 arranged symmetrically with the first thermal sensor contact pad 11. The modular design of the electrode contact pads in this invention facilitates circuit integration and debugging, supports high-frequency alternating voltage input, and realizes cyclic control of pulsed electrolysis and combustion.

[0032] Furthermore, the first electrode contact pad 9 is externally connected to an alternating power supply and internally connected to the first electrode 7, while the second electrode contact pad 10 is externally grounded and internally connected to the second electrode 8. Traditional water electrolysis processes require converting alternating current to direct current before electrolysis; however, this invention directly uses an alternating power supply for electrolysis. Through the synergistic optimization of electrode shape and power supply parameters, efficient generation and dynamic control of nanobubbles can be achieved, providing key conditions for the deformation of the thin film 6.

[0033] Furthermore, the first thermal sensor contact pad 11 is symmetrically arranged on the upper and lower sides of the first electrode contact pad 9, and the second thermal sensor contact pad 12 is symmetrically arranged on the upper and lower sides of the second electrode contact pad 10, and a four-probe thermal sensor can be externally connected. In this invention, the thermal sensor contact pads and thermal sensors can capture the instantaneous exothermic reaction of combustion, providing data support for analyzing reaction kinetics and optimizing working conditions, and realizing the monitoring of the thermal characteristics of the microscopic combustion process. The polycrystalline silicon thermal sensor with a four-probe structure can be embedded in a micro-device through microfabrication technology, and the probe spacing and size can be precisely controlled. Moreover, the thermo-electric signal conversion is accurate, making it suitable for thermal parameter characterization at the microscale.

[0034] In summary, this invention utilizes the rapid generation and oxidation annihilation of hydrogen nanobubbles at room temperature to drive the continuous vibration of the thin film 6, which has significant engineering application value. By integrating hydrogen nanobubble generation, reaction chamber, thin film actuation, thermal monitoring (four-probe sensor), and electrode system into a micro-device, it achieves integrated "gas generation-energy storage-work generation-monitoring," significantly improving energy density and portability.

[0035] Example In an exemplary embodiment of the present invention, a micro-power device and method based on hydrogen nanobubbles are provided.

[0036] Figure 1 This is a schematic diagram of a micro-power device based on hydrogen nanobubbles according to an embodiment of the present invention.

[0037] like Figure 1 As shown in the figure, the micro power device based on hydrogen nanobubbles provided in this embodiment includes: a hydrogen nanobubble reactor, a fluid inlet 1, a fluid outlet 2, a first electrolyte flow channel 3, a second electrolyte flow channel 4, a reaction chamber 5, a thin film 6, a first electrode 7, a second electrode 8, a first electrode contact pad 9, a second electrode contact pad 10, a first thermal sensor contact pad 11, and a second thermal sensor contact pad 12.

[0038] The reaction chamber 5 is located inside the hydrogen nanobubble reactor. The first electrolyte flow channel 3 is located at the upper end of the reaction chamber 5, and the first electrolyte flow channel 3 and the second electrolyte flow channel 4 are symmetrically arranged at both ends of the reaction chamber 5. The first electrolyte flow channel 3 and the second electrolyte flow channel 4 have the same structure.

[0039] Fluid inlet 1 is located at the upper end of the first electrolyte flow channel 3, and fluid outlet 2 is located at the lower end of the second electrolyte flow channel 4. Fluid inlet 1 and fluid outlet 2 are arranged symmetrically, and fluid inlet 1 and fluid outlet 2 have the same structure.

[0040] The fluid inlet 1, the first electrolyte flow channel 3, the reaction chamber 5, the second electrolyte flow channel 4, and the fluid outlet 2 together constitute the fluid flow and gas reaction space. Electrolytes such as Na2SO4 solution flow into the device through the fluid inlet 1, undergo hydrogen-oxygen reaction in the reaction chamber 5, and then remain at the same concentration before finally flowing out from the fluid outlet 2.

[0041] In this embodiment, multiple micro-power devices based on hydrogen nanobubbles can be connected in series. The fluid outlet 2 of one device can serve as the fluid inlet 1 of the next device, enabling the recycling of electrolyte fluid. Simultaneously, the matrix-scale amplification of the micro-power devices compensates for their relatively small output. Alternatively, the fluid outlet 2 of one device can be connected to the fluid inlet 1 of the next device.

[0042] Thin film 6 is located in the middle of reaction chamber 5, and first electrode 7 and second electrode 8 are located in the middle of reaction chamber 5 and deposited on the surface of thin film 6. First electrode 7 and second electrode are preferably titanium electrodes.

[0043] A thin film 6 made of a specific material covers the inside of the reaction chamber 5. The shape of the thin film 6 may be elliptical. A first electrode 7 and a second electrode 8 are attached to the surface of the thin film 6, and the two electrodes are arranged in an interlaced finger-like pattern.

[0044] The dimensions of reaction chamber 5 are 100×100×5 μm. 3 The enclosed space is covered by a thin film 6, forming a sealed environment with pressure accumulation. Under the action of an alternating power source, nanobubbles generated on the interlaced finger-shaped electrodes (preferably titanium electrodes) increase the air pressure in the sealed environment, pushing the thin film 6 upward. After hydrogen and oxygen undergo a chain reaction, the air pressure in the sealed environment decreases, and the thin film 6 moves downward, thereby realizing the reciprocating motion of the thin film 6 and outputting mechanical energy to the outside.

[0045] In this embodiment, the nanobubbles generated in the above process refer to H2, O2, and mixtures thereof.

[0046] Preferably, the thin film 6 is made of silicon-rich silicon nitride (SiRN) with a thickness of 530 nanometers. This material possesses certain flexibility and mechanical strength, enabling reversible deformation under pressure changes, thereby achieving energy conversion and generating mechanical motion. Furthermore, the silicon-rich silicon nitride thin film 6 exhibits good chemical stability and insulation, allowing it to operate stably in electrochemical environments. It also demonstrates good compatibility with other materials (silicon wafers, borosilicate glass, etc.), facilitating device fabrication and integration.

[0047] The first electrode 7 and the second electrode 8 are arranged in an interlaced finger shape, which increases the reaction area and improves the reaction rate and efficiency. More preferably, the first electrode 7 and the second electrode 8 are titanium electrodes. Titanium has high strength, low density, and good fatigue resistance. Its Young's modulus matches silicon-based materials (SiRN thin films) better, reducing film deformation or cracking caused by material stress differences and improving device structural stability. At the same time, titanium is much cheaper than platinum, significantly reducing device fabrication costs, making it particularly suitable for large-scale production or disposable microsystem applications.

[0048] The first electrode 7 is connected to the first electrode contact pad 9, and the second electrode 8 is connected to the second electrode contact pad 10.

[0049] The first electrode contact pad 9 is connected to the left side of the first electrode 7, and the second electrode contact pad 10 is connected to the right side of the second electrode 8. The first electrode contact pad 9 and the second electrode contact pad 10 are arranged symmetrically, and the first electrode contact pad 9 and the second electrode contact pad 10 are made of the same material.

[0050] The first electrode contact pad 9 is externally connected to an alternating power supply with a driving frequency of 30-70kHz, a voltage of ±10V, and an average current density of approximately 200 A / cm². 2 The second electrode contact pad 10 is externally grounded.

[0051] When the alternating current power supply is connected, if the power output is positive, the first electrode 7 acts as the anode, undergoing an oxidation reaction to generate O2, and the second electrode 8 acts as the cathode, undergoing a reduction reaction to generate H2. If the power output is negative, the first electrode 7 becomes the cathode, generating H2, and the second electrode 8 becomes the anode, generating O2. The alternation of the first electrode 7 and the second electrode 8, connected by the first electrode contact pad 9 and the second electrode contact pad 10, as the anode and cathode of the reaction ensures that the generated hydrogen and oxygen are evenly distributed and react completely.

[0052] The hydrogen nanobubble reactor is externally equipped with a first thermal sensor contact pad 11 and a second thermal sensor contact pad 12. The second thermal sensor contact pad 12 is symmetrically arranged with the first thermal sensor contact pad 11. The first thermal sensor contact pad 11 is symmetrically arranged on the upper and lower sides of the first electrode contact pad 9, and the second thermal sensor contact pad 12 is symmetrically arranged on the upper and lower sides of the second electrode contact pad 10, which facilitates the arrangement of the four-probe thermal sensor. The first thermal sensor contact pad 11 and the second thermal sensor contact pad 12 are symmetrically arranged and are made of the same material.

[0053] A polycrystalline silicon thermal sensor, located beneath the electrodes and connected via four contact pads, measures changes in chamber temperature. The sensor captures the instantaneous exothermic reaction of combustion (the higher the driving frequency, the more pronounced the temperature rise), providing data support for analyzing reaction kinetics and optimizing operating conditions. Although the sensor's response speed is limited by parasitic effects, the integrated design enables monitoring of the thermal characteristics of the microscopic combustion process, laying the foundation for mechanistic research.

[0054] In this embodiment, the external temperature is set to 25°C, and the additional pressure generated in reaction chamber 5 is 0.5–4 bar. When the membrane deflects by approximately 1.4 μm, the corresponding pressure increases by approximately 3.6 bar, with a maximum pressure reaching approximately 4.6 bar. Furthermore, the pressure is rapidly released within 100 ms after the pulse is turned off due to spontaneous combustion. The high-frequency pulse causes the hydrogen and oxygen generated by electrolysis to exist in the form of nanobubbles, avoiding macroscopic bubble aggregation, ensuring uniform gas distribution and rapid combustion within the chamber, and improving energy release efficiency. Under high-frequency drive, combustion heat generation is positively correlated with frequency, and localized high temperatures further promote gas reactions, forming a positive feedback loop of "high-frequency drive - rapid heat generation - accelerated combustion".

[0055] The above reaction is carried out at room temperature and standard atmospheric pressure. The reaction conditions are mild and the apparatus is not easily damaged by high temperature and high pressure.

[0056] This embodiment provides a micro-power method based on hydrogen nanobubbles. The working process of the micro-power device based on hydrogen nanobubbles is as follows: During operation, an electrolyte such as Na₂SO₄ solution flows in from the upper fluid inlet 1, enters the reaction chamber 5 through the first electrolyte flow channel 3, and flows out from the lower second electrolyte flow channel 4 and fluid outlet 2 after the reaction. An external alternating power supply (50 kHz, ±10 V) drives the interlocking finger-shaped first and second titanium electrodes through the first electrode contact pad 9 and the second electrode contact pad 10 at a high current density (200 A / cm²). 2 Electrolysis of water rapidly generates nanobubbles. The device has a duty cycle of 5% (pulse width 1 μs, cycle 20 μs). During the entire reaction process, only 1 μs per cycle is used for electrolysis to rapidly generate nanobubbles, and 19 μs is allowed for H2 / O2 diffusion and mixing to trigger spontaneous combustion.

[0057] The H2 and O2 generated by electrolysis are uniformly distributed in the reaction chamber 5 in the form of nanobubbles. The high relative supersaturation (S>1000) promotes rapid bubble nucleation and avoids macroscopic aggregation. The nanobubbles and dissolved gas cause the pressure in the reaction chamber 5 to rise to 0.5–4 bar in a short time, driving the silicon-rich silicon nitride (SiRN) film 6 to deform upwards. After the voltage pulse is turned off, H2 and O2 spontaneously combust on the surface of the nanobubbles to generate water, releasing energy and causing the pressure to drop rapidly back to atmospheric pressure within 100 ms.

[0058] Furthermore, during the reaction, the polycrystalline silicon thermal sensor monitors temperature changes through the first thermal sensor contact pad 11 and the second thermal sensor contact pad 12, providing data support for optimizing drive parameters.

[0059] In summary, this embodiment can achieve efficient energy release and conversion at the microscale, and has the advantages of small size, high energy density and fast response speed. It is suitable for various scenarios such as microfluidic drive and micro-sensor power supply, and has important engineering application value.

[0060] Furthermore, the definitions of the various components and methods described above are not limited to the specific structures, shapes, or methods mentioned in the embodiments, and those skilled in the art can easily modify or substitute them. For example, the electrolyte is not limited to Na2SO4 solution and can be replaced by K2SO4; the electrode is not limited to titanium electrode and can be replaced by platinum electrode.

[0061] The above content is only for illustrating the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made to the technical solution based on the technical concept proposed in this invention shall fall within the scope of protection of the claims of this invention.

Claims

1. A micro-power device based on hydrogen nanobubbles, characterized in that, The reactor includes a hydrogen nanobubble reactor with a built-in reaction chamber (5). The interior of the reaction chamber (5) is covered with a thin film (6). A first electrode (7) and a second electrode (8) are attached to the surface of the thin film (6). The contact ends of the first electrode (7) and the second electrode (8) are arranged in an interlaced finger shape and located inside the reaction chamber (5). The non-contact ends are respectively connected to a first electrode contact pad (9) and a second electrode contact pad (10). The first electrode contact pad (9) is connected to an alternating power supply, and the second electrode contact pad (10) is grounded. The upper and lower ends of the reaction chamber (5) are symmetrically connected to an electrolyte inflow channel and an electrolyte outflow channel.

2. The micro-power device based on hydrogen nanobubbles according to claim 1, characterized in that, A thermal sensor contact pad is provided on both the upper and lower sides of the first electrode contact pad (9) and the second electrode contact pad (10).

3. The micro-power device based on hydrogen nanobubbles according to claim 2, characterized in that, The external connection of the thermal sensor contact pad is a polycrystalline silicon thermal sensor; the polycrystalline silicon thermal sensor is used to monitor temperature changes through the thermal sensor contact pad.

4. The micro-power device based on hydrogen nanobubbles according to claim 1, characterized in that, Multiple of the aforementioned hydrogen nanobubble-based micro-power devices are connected in series.

5. The micro-power device based on hydrogen nanobubbles according to claim 4, characterized in that, In a series of multiple hydrogen nanobubble-based micro-power devices, the electrolyte outflow channel of the previous hydrogen nanobubble-based micro-power device is connected to the electrolyte inflow channel of the next hydrogen nanobubble-based micro-power device, or the electrolyte outflow channel of the previous hydrogen nanobubble-based micro-power device serves as the electrolyte inflow channel of the next hydrogen nanobubble-based micro-power device.

6. The micro-power device based on hydrogen nanobubbles according to claim 1, characterized in that, The electrolyte inflow channel includes a fluid inlet (1) and a first electrolyte flow channel (3); the electrolyte outflow channel includes a fluid outlet (2) and a second electrolyte flow channel (4); the first electrolyte flow channel (3) is located at the upper end of the reaction chamber (5), and the fluid inlet (1) is located at the upper end of the first electrolyte flow channel (3); the second electrolyte flow channel (4) is located at the lower end of the reaction chamber (5), and the fluid outlet (2) is located at the lower end of the second electrolyte flow channel (4); the fluid inlet (1) and the fluid outlet (2) are arranged symmetrically, and the first electrolyte flow channel (3) and the second electrolyte flow channel (4) are arranged symmetrically.

7. The micro-power device based on hydrogen nanobubbles according to claim 1, characterized in that, The thin film (6) is made of silicon-rich silicon nitride and has a thickness of 530 nanometers.

8. The micro-power device based on hydrogen nanobubbles according to claim 1, characterized in that, When electrolysis is performed by connecting an alternating power supply, the first electrode (7) and the second electrode (8) connected to the first electrode contact pad (9) and the second electrode contact pad (10) alternately serve as the reaction anode and the reaction cathode.

9. A micro-dynamic method based on hydrogen nanobubbles, characterized in that, The micro-power device based on hydrogen nanobubbles according to any one of claims 1 to 8 includes the following steps: Electrolytes flow into the reaction chamber (5) of the hydrogen nanobubble reactor through the electrolyte inflow channel. The alternating power supply drives the first electrode (7) and the second electrode (8) to alternately act as the reaction anode and the reaction cathode through the first electrode contact pad (9) and the second electrode contact pad (10). The alternating power supply is turned on and off by pulse control. When the alternating power supply is turned on, the electrolyte rapidly electrolyzes inside the reaction chamber (5) to generate nanobubbles. The nanobubbles include hydrogen, oxygen and a mixture of hydrogen and oxygen. The nanobubbles and the corresponding dissolved gases cause the pressure inside the reaction chamber (5) to rise in a short time, pushing the film (6) to deform upward and output mechanical work. When the alternating power supply is turned off, the surface of hydrogen and oxygen in the nanobubbles spontaneously combusts to generate water and releases energy, causing the pressure to drop rapidly back to normal pressure. The film (6) returns to its downward position, and the electrolyte after electrolysis flows out through the electrolyte outflow channel.

10. The micro-dynamic method based on hydrogen nanobubbles according to claim 9, characterized in that, The alternating power supply has a driving frequency of 30-70kHz, a voltage of ±10V, and an average current density of 200 A / cm². 2 .

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