A bearing basket for cleaning silicon wafers

Abstract

The application provides a bearing basket for silicon wafer cleaning, and belongs to the technical field of silicon wafer processing. The bearing basket comprises a support, a pair of horizontal plates between which a pair of supporting rods are arranged on the support, a silicon wafer positioning rod between each pair of vertical plates on the support, a handle fixedly connected to the upper end of the vertical plate on the support, two pairs of hooks fixedly connected to the left and right sides of the support, four pairs of connection interfaces I reserved on the vertical plate on the support, four pairs of connection interfaces II reserved on the horizontal plate on the support, each silicon wafer positioning rod being located between a pair of connection interfaces I, an angle adjusting piece being arranged on the left and right sides of each silicon wafer positioning rod, each supporting rod being located between a pair of connection interfaces II, and the angle adjusting piece, the end of the supporting rod and the connection interfaces I and II being connected to each other via a connecting piece. The application solves the problem that the silicon wafer positioning rods and the supporting rods on the existing bearing basket for silicon wafer cleaning are connected in a threaded manner, and the parts need to be repeatedly rotated to perform fastening or disassembly during assembly and adjustment, which is inconvenient to use.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of silicon wafer processing, and particularly relates to a bearing basket for cleaning silicon wafers. BACKGROUND

[0002] In the manufacturing process of silicon wafers, there are multiple steps including cutting, cleaning, nickel plating, and photolithography. After the cutting of silicon wafers is completed, a special bearing tool is needed to place the silicon wafers and transfer them to the next processing link. In particular, in the solar photovoltaic industry, in order to accelerate the cooling and transportation of single crystal silicon rods, a basket-shaped bearing tool is usually used. However, the opening design of this bearing tool is at the top, which makes the loading and unloading of silicon rods quite inconvenient. In addition, in order to facilitate the loading and unloading of silicon rods and to maintain the stability of the bearing tool, the bottom is directly in contact with the ground, which makes it very laborious to move the entire bearing device.

[0003] Prior art CN223092834U discloses a bearing basket for cleaning silicon wafers, which is used to bear the silicon wafers after cutting and hang on the cleaning line to clean the silicon wafers. It comprises a support, a supporting rod, a hook, a silicon wafer positioning rod, and a fixing member. The silicon wafer positioning rod is rotatably installed on the inner side of the vertical rod of the support, and when it is rotated into position, it is fixed on the support through the fixing member. The supporting rod is installed at the bottom of the support, and the hook is installed at the top of the support. In this device, the silicon wafer positioning rod and the supporting rod are connected by threads. During assembly and adjustment, the parts need to be repeatedly rotated to perform fastening or disassembly, which is inconvenient to use. SUMMARY

[0004] The present application provides a bearing basket for cleaning silicon wafers, which aims to solve the problem that the silicon wafer positioning rod and the supporting rod of the existing bearing basket for cleaning silicon wafers are connected by threads, which is inconvenient to use during assembly and adjustment.

[0005] The present application provides a bearing basket for cleaning silicon wafers, which aims to solve the problem that the silicon wafer positioning rod and the supporting rod of the existing bearing basket for cleaning silicon wafers are connected by threads, which is inconvenient to use during assembly and adjustment.

[0006] The adapter comprises a first spacer block, a second spacer block and a positioning block, the positioning block is between the first spacer block and the second spacer block, a locking member is arranged in the positioning block, and a rotating member is arranged on the second spacer block;

[0007] The locking member is fixed to the center of the positioning block, the locking member comprises a stop column, a spiral beryllium copper wire, a constraint tube and a rotating table, and stop ports for cooperating with the stop column are reserved on the inner walls of the first adapter port and the second adapter port;

[0008] The rotating member is fixed to the center of the second spacer block, the rotating member comprises a rotating disc, a handle and a pressing table;

[0009] The center of the second spacer block is provided with a through port, the rotating disc is assembled in the through port and is rotatably connected with the second spacer block, the rotating disc is provided with a containing port for containing the handle, the lower end of the containing port is provided with a constraint groove one, the bottom wall of the handle is fixedly connected with a constraint column, and the handle is movably connected with the rotating disc through the constraint column embedded in the constraint groove one;

[0010] The rotating table is provided with a constraint groove two for cooperating with the constraint column, the first spacer block is provided with a constraint port three for cooperating with the constraint column, when the rotating table and the first protruding block are in contact, the constraint column and the constraint port three are opposite, and the constraint column sequentially penetrates the constraint groove two and the constraint port three, so that the rotating table and the first spacer block are movably connected;

[0011] The upper end of the rotating table is provided with a circular tube one, the center of the bottom wall of the handle is provided with a circular tube two, the circular tube two is movably and closely connected with the circular tube one, the pressing table is movably and closely connected with the circular tube two, and the circular tube one and the circular tube two are provided with hydraulic transmission oil;

[0012] Further, the angle adjusting member comprises a positioning ring and a fixing cylinder, a plurality of limiting holes are equidistantly reserved on the positioning ring, a limiting rod is slidably buckled in the fixing cylinder, one side of the limiting rod is clamped in the limiting hole, the other side of the limiting rod and the bottom wall of the fixing cylinder are fixedly connected with a positioning spring, a lever is fixedly connected to the outer circumferential wall of the top of the limiting rod, one side of the lever extends out of the strip-shaped port on the fixing cylinder and is movably connected with each other, the fixing cylinder is fixedly connected with a silicon wafer positioning rod, the silicon wafer positioning rod is rotatably connected with the adapter, and the positioning ring is fixedly connected with the adapter.

[0013] Further, the constraint tube is provided with a guide port, the stop column is embedded in the guide port and movably connected with the constraint tube, the rotating table is assembled at the center of the constraint tube, the center of the lower end of the rotating table is provided with a circular hole, the first spacer block is fixedly connected with a rotating rod at the center close to the one side of the positioning block, the rotating rod is embedded in the circular hole and rotatably connected with the first spacer block, the stop column is rotatably connected with a rotating disc in contact with the rotating table close to one side of the rotating table, the spiral beryllium copper wire is buckled on the stop column, a groove is reserved in the positioning block, and the stop column is embedded in the groove and movably connected with the positioning block through the spiral beryllium copper wire.

[0014] Further, the rotating table is provided with protruding ends in contact with the rotating disc, the protruding ends are provided in two pairs and are arranged uniformly in a ring shape, and the stop posts are provided in two pairs and are provided in one-to-one correspondence with the stop ports.

[0015] Further, the inner wall surface of the constraint tube is provided with protruding block one, the constraint wall one and the constraint wall two are arranged on the protruding block one, when the protruding end is in contact with the constraint wall one, the head end of the stop post is coplanar with the edge wall of the positioning block, and when the protruding end is in contact with the constraint wall two, the tail end of the stop post is completely moved into the guide port.

[0016] Further, the constraint tube is provided with protruding block two, and the protruding block two and the protruding block one are provided with constraint port two matched with the structure of the protruding end.

[0017] Further, the upper end of the circular tube one is provided with protruding platform one inward, and the lower end of the circular tube two is provided with protruding platform two outward.

[0018] The beneficial effects of the present application are:

[0019] 1. The present application can realize angle adjustment without disassembling the connecting piece through the arrangement of the angle adjusting piece, and the operation is very convenient. Meanwhile, the traditional threaded connection mode is replaced by the arrangement of the connecting piece, which not only improves the convenience of operation, but also avoids the occurrence of thread slipping during repeated use, thereby prolonging the service life of the device.

[0020] 2. The handle can be moved outward by pressing the pressing block through the cooperation of the locking piece and the rotating unit, and then the rotating table can be controlled to rotate by rotating the handle, thereby controlling the stop post to move together. The cooperation of the rotating table and the plurality of stop posts ensures that the stop posts can move together, thereby greatly improving the convenience of disassembly and assembly.

[0021] The handle can be retracted into the containing port when not needed, which can ensure the external aesthetic degree and avoid disintegration caused by accidental touch, thereby ensuring the fastening stability. The structure is concentrated, and the cooperation of the constraint tube and the rotating table and the arrangement of the protruding block two ensure the stable fastening of the stop post during use, and the stability of the connection can also be ensured when in a shaking working environment.

[0022] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present application. The objects and other advantages of the present application can be achieved and obtained by the structures specifically pointed out in the description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0023] The accompanying drawings are used to provide a further understanding of the present application, and constitute a part of the specification, and are used to explain the present application together with embodiments of the present application, and do not constitute a limitation to the present application. In the drawings:

[0024] Figure 1 is a schematic view of the three-dimensional structure of an embodiment of the application;

[0025] Figure 2 is a schematic view of the three-dimensional structure of an embodiment of the application Figure 1 is a schematic view of the enlarged structure at A of an embodiment of the application;

[0026] Figure 3 is a schematic view of the disassembled structure of the adapter of an embodiment of the application;

[0027] Figure 4 is a schematic view of the sectional structure of the positioning block of an embodiment of the application;

[0028] Figure 5 is a schematic view of the top structure of an embodiment of the application Figure 4 is a schematic view of the top structure of an embodiment of the application

[0029] Figure 6 is a schematic view of the enlarged structure at B of an embodiment of the application Figure 5 is a schematic view of the enlarged structure at B of an embodiment of the application

[0030] Figure 7 is a schematic view of the internal structure of the constraint tube of an embodiment of the application;

[0031] Figure 8 is a schematic view of the sectional structure of the adapter of an embodiment of the application;

[0032] Figure 9 is a schematic view of the enlarged structure at C of an embodiment of the application Figure 8 is a schematic view of the enlarged structure at C of an embodiment of the application

[0033] Figure 10 is a schematic view of the enlarged structure at D of an embodiment of the application Figure 9 is a schematic view of the enlarged structure at D of an embodiment of the application

[0034] Label: 1, support; 2, support rod; 3, silicon wafer positioning rod; 4, handle; 5, hook; 6, interface one; 7, interface two; 8, angle adjusting piece; 9, connecting piece; 81, positioning ring; 82, limiting hole; 83, fixed cylinder; 84, positioning spring; 85, limiting rod; 86, push rod; 91, blocking block one; 911, constraint port three; 92, positioning block; 921, groove; 922, stop port; 93, blocking block two; 94, locking piece; 941, rotating table; 9411, protruding end; 9412, round pipe one; 9413, protruding table one; 942, stop column; 9421, rotating disc; 943, spiral beryllium copper wire; 944, constraint tube; 9441, protruding block one; 94411, constraint wall one; 94412, constraint wall two; 9442, protruding block two; 9443, guide port; 945, constraint groove two; 95, rotating piece; 951, rotating disc; 9511, containing port; 9512, constraint groove one; 952, handle; 9521, constraint column; 9522, round pipe two; 9523, protruding table two; 953, pressing table. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the technical scheme of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings of the embodiments of the present application. The same reference signs in the drawings represent the same parts. It should be noted that the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0036] REFERENCE Figures 1-10 The present application provides a kind of bearing flower basket for silicon wafer cleaning, support 1, a pair of cross plates on support 1 are equipped with a pair of support rod 2, silicon wafer positioning rod 3 is equipped between each pair of vertical plate on support 1, handle 4 is fixedly connected on the upper end of vertical plate on support 1, two pairs of hooks 5 are fixedly connected on the left and right sides of support 1, four pairs of interface one 6 are reserved on the vertical plate of support 1, four pairs of interface two 7 are reserved on the cross plate of support 1, each silicon wafer positioning rod 3 is between a pair of interface one 6, angle adjusting piece 8 is equipped on the two sides of each silicon wafer positioning rod 3, each support rod 2 is between a pair of interface two 7, angle adjusting piece 8 and interface one 6 and the end of support rod 2 and interface two 7 are connected with each other via connecting piece 9.

[0037] Through the installation of angle adjusting piece 8, angle adjustment can be realized without disassembling connecting piece 9, which is very convenient to operate. Meanwhile, through the installation of connecting piece 9, the traditional threaded connection mode is replaced, which not only improves the convenience of operation, but also avoids the situation of thread slipping caused by repeated use, thereby prolonging the service life of the device.

[0038] Referring to Figure 1 With Figure 2 , the angle adjusting piece 8 contains a positioning ring 81 and a fixing cylinder 83, the positioning ring 81 is reserved with several limiting holes 82 at equal intervals, the fixing cylinder 83 is slidably buckled with a limiting rod 85, one side of the limiting rod 85 is clamped in the limiting hole 82, the other side of the limiting rod 85 is fixedly connected with a positioning spring 84 between the bottom wall of the fixing cylinder 83, the outer circumferential wall on the top of the limiting rod 85 is fixedly connected with a push rod 86, one side of the push rod 86 extends out of the strip-shaped opening on the fixing cylinder 83 and is slidably connected with each other, the fixing cylinder 83 is fixedly connected with the wafer positioning rod 3, the wafer positioning rod 3 is screwed with the adapter 9, and the positioning ring 81 is fixedly connected with the adapter 9.

[0039] When the angle needs to be adjusted, the push rod 86 is pushed, the limiting rod 85 is received in the fixing cylinder 83, the positioning spring 84 is shortened, the limiting rod 85 is moved away from the limiting hole 82, the wafer positioning rod 3 is rotated, when the wafer positioning rod 3 is rotated to the appropriate angle, the push rod 86 is loosened, and the limiting rod 85 is clamped into the corresponding limiting hole 82 under the cooperation of the positioning spring 84, so that the adjusted wafer positioning rod 3 is positioned.

[0040] Referring to Figure 1 With Figures 3-10 , the adapter 9 contains a sealing block one 91, a sealing block two 93 and a positioning block 92, the positioning block 92 is between the sealing block one 91 and the sealing block two 93, the positioning block 92 is provided with a locking piece 94, the sealing block two 93 is provided with a rotating piece 95, the sealing block one 91 on the adapter 9 at the end of the wafer positioning rod 3 is screwed with the wafer positioning rod 3, the sealing block one 91 on the adapter 9 at the end of the wafer positioning rod 3 is fixedly connected with the positioning ring 81, and the sealing block one 91 on the adapter 9 at the end of the supporting rod 2 is fixedly connected with the supporting rod 2.

[0041] The locking piece 94 is fixedly connected to the middle of the positioning block 92, the locking piece 94 contains a stop column 942, a spiral beryllium copper wire 943, a constraint tube 944 and a rotating table 941, the inner walls of the adapter one 6 and the adapter two 7 are reserved with stop openings 922 cooperating with the stop column 942;

[0042] The rotating piece 95 is fixedly connected to the middle of the sealing block two 93, and the rotating piece 95 contains a rotating disc 951, a handle 952 and a pressing table 953.

[0043] The constraint tube 944 is provided with a guide hole 9443, the stop post 942 is embedded into the guide hole 9443 and movably connected with the constraint tube 944, the rotating table 941 is arranged at the middle of the constraint tube 944, the lower end of the middle of the rotating table 941 is provided with a circular hole, the rotating rod is fixedly connected with the middle of the side of the spacer block one 91, the rotating rod is embedded into the circular hole and screwed with the spacer block one 91, the stop post 942 is screwed with the rotating disc 9421 which is in contact with the side of the rotating table 941, the stop post 942 is buckled with the helical beryllium copper wire 943, the guide groove 921 is provided in the positioning block 92, and the stop post 942 is embedded into the guide groove 921 and movably connected with the positioning block 92 through the helical beryllium copper wire 943.

[0044] When the rotating table 941 rotates, the rotating table 941 presses the rotating disc 9421 on the stop post 942, and then the stop post 942 extends outwardly and is embedded into the corresponding stop hole 922, when the rotating table 941 rotates reversely, the lower end of the stop post 942 is released, and then the stop post 942 can recover under the cooperation of the helical beryllium copper wire 943, and then the stop post 942 moves out of the stop hole 922, and then the silicon wafer positioning rod 3 or the supporting rod 2 can be quickly disassembled.

[0045] The rotating table 941 is provided with protruding ends 9411 which are in contact with the rotating disc 9421, the protruding ends 9411 are provided in two pairs, the two pairs of protruding ends 9411 are arranged uniformly in a ring shape, the stop post 942 is provided in two pairs, and the stop post 942 and the stop hole 922 are one-to-one corresponding.

[0046] When the rotating table 941 rotates forwardly, the two pairs of protruding ends 9411 press the two pairs of stop posts 942 together, and then the two pairs of stop posts 942 on the periphery extend outwardly together, and then the silicon wafer positioning rod 3 or the supporting rod 2 is stably connected.

[0047] The inner wall surface of the constraint tube 944 is provided with a protruding block one 9441, the protruding block one 9441 is provided with a constraint wall one 94411 and a constraint wall two 94412, when the protruding end 9411 is in contact with the constraint wall one 94411, the head end of the stop post 942 is coplanar with the side wall of the positioning block 92, and when the protruding end 9411 is in contact with the constraint wall two 94412, the tail end of the stop post 942 is completely moved into the guide hole 9443.

[0048] The rotating range of the rotating table 941 is constrained through the protruding block one 9441, and then the rotating table 941 is divided into two levels, when the protruding end 9411 is in contact with the constraint wall one 94411, the stop post 942 is in the storage state, and then the silicon wafer positioning rod 3 or the supporting rod 2 can be quickly disassembled or assembled, and when the protruding end 9411 is in contact with the constraint wall two 94412, the stop post 942 is in the extension state, and then the silicon wafer positioning rod 3 or the supporting rod 2 is tightened to prevent the silicon wafer positioning rod 3 or the supporting rod 2 from moving.

[0049] The protruding block two 9442 is arranged in the constraint tube 944, and a constraint opening two matching the structure of the protruding end 9411 is reserved between the protruding block two 9442 and the protruding block one 9441.

[0050] The reverse rotation of the rotating table 941 via the protruding block two 9442 is hindered, and then the rotating table 941 is prevented from returning by itself without external action. When the handle 952 starts to rise, the rotating table 941 returns by itself, and then the constraint is quickly disassembled.

[0051] The through opening is reserved in the middle of the sealing block two 93, the rotating disc 951 is screwed with the sealing block two 93, the accommodating opening 9511 for accommodating the handle 952 is arranged on the rotating disc 951, the lower end of the accommodating opening 9511 is reserved with the constraint slot one 9512, the bottom wall of the handle 952 is fixedly connected with the constraint column 9521, and the handle 952 is movably connected with the rotating disc 951 via the constraint column 9521 embedded in the constraint slot one 9512.

[0052] The handle 952 can be moved in and out, when the silicon wafer positioning rod 3 or the supporting rod 2 is disassembled or assembled, the handle 952 is pulled outwards, the handle 952 is rotated, the handle 952 can pull the rotating table 941 to rotate, the stop column 942 is moved out of the stop opening 922, after assembly is completed, the handle 952 can be recovered into the accommodating opening 9511, the external appearance is ensured, and the handle 952 can be rotated around the middle of the rotating disc 951, and then the stop column 942 is pulled.

[0053] The constraint slot two 945 cooperating with the constraint column 9521 is arranged on the rotating table 941, the constraint opening three 911 cooperating with the constraint column 9521 is arranged on the sealing block one 91, when the rotating table 941 and the protruding block one 9441 are in contact, the constraint column 9521 and the constraint opening three 911 are opposite, the constraint column 9521 sequentially penetrates through the constraint slot two 945, and the rotating table 941 and the sealing block one 91 are movably connected.

[0054] When the constraint column 9521 is embedded in the constraint opening three 911, the rotating table 941 and the sealing block one 91 are fastened, and then the rotating table 941 cannot be rotated, the stop column 942 is fastened to prevent the stop column 942 from moving during work, and the handle 952 can pull the rotating table 941 to rotate via the cooperation of the constraint column 9521 and the constraint slot two 945.

[0055] The upper end of the rotating table 941 is provided with a circular tube 9412, and the bottom wall of the handle 952 is provided with a circular tube 9522 which is embedded in the circular tube 9412 and is movably connected therewith. The pressing table 953 is embedded in the circular tube 9522 and is movably connected therewith. The circular tube 9412 and the circular tube 9522 are provided with hydraulic transmission oil.

[0056] When the pressing table 953 is pressed downward, the pressing table 953 presses the hydraulic transmission oil downward, the pressing force in the circular tube 9412 is increased, the circular tube 9522 is then moved upward, the handle 952 is then moved upward by the circular tube 9522, and the handle 952 is then moved out of the accommodating opening 9511, after which the handle 952 is separated from the rotating disc 951, and the arm can then rotate the rotating disc 951 by holding the handle 952.

[0057] The upper end of the circular tube 9412 is provided with a protruding table 9413, and the lower end of the circular tube 9522 is provided with a protruding table 9523.

[0058] The protruding table 9413 and the protruding table 9523 cooperate to restrict the upward movement of the handle 952, so that the handle 952 does not fall during use, ensuring normal use of the handle 952.

[0059] During assembly, the pressing table 953 is pressed, the circular tube 9522 is moved upward by hydraulic transmission, the handle 952 is moved in and out of the accommodating opening 9511, the lower end of the restricting column 9521 is then moved from the restricting opening three 911 to the restricting groove two 945, the restriction on the rotating table 941 is cancelled, the handle 952 is moved out, the silicon wafer positioning rod 3 or the supporting rod 2 is placed in the assembly position, ensuring that rapid assembly can be performed, the handle 952 is turned in the positive direction, the handle 952 drives the rotating disc 951 to rotate with the rotating table 941, the protruding end 9411 of the rotating table 941 presses the rotating disc 9421 at the lower end of the stop column 942, when the rotating table 941 rotates to the position where the restricting wall one 94411 and the protruding end 9411 are in contact, the two pairs of stop columns 942 are moved out with the help of the spiral beryllium copper wire 943 and are embedded in the corresponding stop openings 922, achieving fastening, the handle 952 is pressed into the accommodating opening 9511, the restricting column 9521 is embedded in the restricting opening three 911, ensuring that the rotating table 941 is restricted from rotating, and ensuring that the stop column 942 is in a fastened state;

[0060] When the disassembling is performed, the pressing table 953 is pressed to move the round tube 9522 upward by hydraulic transmission, the round tube 9522 pulls the handle 952 out of the containing hole 9511, then the lower end of the constraint column 9521 is moved from the constraint hole 911 to the constraint groove 945, the constraint to the rotating table 941 is cancelled, the handle 952 is taken out, the handle 952 is reversely rotated, the rotating table 941 is rotated to make the protruding end 9411 contact with the constraint wall 94412, the lower end of the stop column 942 is cancelled, and under the cooperation of the spiral beryllium copper wire 943, it is automatically moved back to the positioning block 92, so that the silicon wafer positioning rod 3 or the supporting rod 2 can be taken off, and the use is very convenient.

[0061] The basic principles and main features of the present application and the advantages of the present application are shown and described above. It should be understood by those skilled in the art that the present application is not limited by the above-mentioned embodiments, and the above-mentioned embodiments and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A silicon wafer cleaning support basket, comprising a support frame, a pair of support rods installed between a pair of horizontal plates on the support frame, a silicon wafer positioning rod installed between each pair of vertical plates on the support frame, a handle fixedly connected to the upper end of the vertical plates on the support frame, and two pairs of hooks fixedly connected to the left and right sides of the support frame, characterized in that, The vertical plate on the support has four pairs of connection ports 1, and the horizontal plate on the support has four pairs of connection ports 2. Each silicon wafer positioning rod is located between a pair of connection ports. Angle adjustment components are installed on both sides of each silicon wafer positioning rod. Each support rod is located between a pair of connection ports 2. The angle adjustment components and connection ports 1, as well as the end of the support rod and connection ports 2, are all connected to each other via connection components. The connecting component includes a first sealing block, a second sealing block, and a positioning block. The positioning block is located between the first sealing block and the second sealing block. A locking component is installed in the positioning block, and a rotating component is installed on the second sealing block. The locking component is fixed to the center of the positioning block. The locking component includes a stop post, a spiral beryllium copper wire, a constraint tube and a rotating platform. The inner walls of the first and second connection ports have stop openings that cooperate with the stop post. The rotating component is fixed to the center of the second sealing block. The rotating component includes a rotating disc, a handle, and a pressing platform. A through opening is reserved in the center of the second sealing block. The rotating disc is assembled in the through opening and screwed into the second sealing block. A receiving opening for accommodating the handle is installed on the rotating disc. A constraint groove is reserved at the lower end of the receiving opening. A constraint post is fixed to the bottom wall of the handle. The handle is embedded in the constraint groove through the constraint post and is movably connected to the rotating disc. The rotating platform is equipped with a second constraint groove that works in conjunction with the constraint column, and the sealing block is equipped with a third constraint opening that works in conjunction with the constraint column. When the rotating platform and the protrusion 1 come into contact, the constraint column and the constraint opening 3 face each other, and the constraint column passes through the constraint groove 2 and the constraint opening 3 in sequence, and the rotating platform and the sealing block 1 are movably connected. A circular tube is installed at the top of the rotary table, and a circular tube is installed in the center of the bottom wall of the handle. The circular tube is embedded in the circular tube and is movably and tightly connected to it. The pressing table is assembled in the circular tube and is movably and tightly connected to it. Hydraulic transmission oil is installed in the circular tube and the circular tube. The angle adjustment component includes a positioning ring and a fixed cylinder. The positioning ring has several pre-drilled limiting holes at equal intervals. A limiting rod is slidably connected to the fixed cylinder. One side of the limiting rod is engaged in the limiting hole, and the other side of the limiting rod is fixedly connected to the bottom wall of the fixed cylinder by a positioning spring. A lever is fixedly connected to the outer peripheral wall of the top of the limiting rod. One side of the lever extends out of the strip-shaped opening on the fixed cylinder and is slidably connected to each other. The fixed cylinder is fixedly connected to the silicon wafer positioning rod, the silicon wafer positioning rod is screwed to the connector, and the positioning ring is fixedly connected to the connector.

2. The silicon wafer cleaning support basket according to claim 1, characterized in that: The constraint tube has a pre-drilled guide port. The stop post is embedded in the guide port and is movably connected to the constraint tube. The rotating platform is assembled in the center of the constraint tube. A round hole is pre-drilled at the lower end of the center of the rotating platform. A rotating rod is fixed to the center of the side of the sealing block near the positioning block. The rotating rod is embedded in the round hole and screwed to the sealing block. The side of the stop post near the rotating platform is screwed to the rotating disk that contacts the rotating platform. A spiral beryllium copper wire is clamped on the stop post. A groove is pre-drilled in the positioning block. The stop post is embedded in the groove and is movably connected to the positioning block via the spiral beryllium copper wire.

3. The silicon wafer cleaning support basket according to claim 2, characterized in that: The rotating platform is equipped with two pairs of protruding ends that contact the rotating disk. The two pairs of protruding ends are evenly arranged in a circumferential direction. There are also two pairs of stop posts, with each stop post corresponding to a stop opening.

4. The silicon wafer cleaning support basket according to claim 3, characterized in that: A protrusion is installed on the inner wall of the constraint tube. A constraint wall is installed on the protrusion. When the protrusion contacts the constraint wall, the head end of the stop post and the side wall of the positioning block are coplanar. When the protrusion contacts the constraint wall, the tail end of the stop post moves into the guide port.

5. The silicon wafer cleaning support basket according to claim 4, characterized in that: A second protrusion is installed in the constraint tube, and a second constraint opening matching the protruding end structure is reserved between the second protrusion and the first protrusion.

6. The silicon wafer cleaning support basket according to claim 5, characterized in that: The upper end of the first round tube is fitted with a protrusion facing inward, and the lower end of the second round tube is fitted with a protrusion facing outward.

Images