Lifting device for auxiliary chamber of single crystal furnace

Abstract

The invention relates to the technical field of single crystal furnace lifting, in particular to a single crystal furnace auxiliary chamber lifting device which comprises a hanging clamping block installed in an auxiliary chamber and an adjusting device used for driving the auxiliary chamber to be lifted and rotated, a clamping part is fixedly installed at the telescopic end of the adjusting device, the clamping part and the hanging clamping block form clamping connection, a slot is formed in the hanging clamping block, and the hanging clamping block is inserted into the slot. The clamping part comprises a clamping shell, and a transmission part and an inserting part are installed on the inner side of the clamping shell. The clamping parts are driven by the adjusting devices, the auxiliary cavities in the two adjacent main furnace chambers are clamped in different time periods, the multiple main furnace chambers are served through a single set of device, the situation that equipment is idle is avoided, the initial investment cost of the equipment is remarkably reduced, the locking clamping blocks and the double-end clamping blocks are arranged in the clamping parts, and through the arrangement of the locking clamping blocks, the clamping parts are clamped in the double-end clamping blocks; the plug is inserted into the slot, the lifting of the auxiliary chamber is facilitated, and the problem that the auxiliary chamber deviates, inclines or shakes in the lifting process of the auxiliary chamber is avoided through the arrangement of the double-end clamping blocks.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal furnace lifting, in particular to a single crystal furnace auxiliary chamber lifting device. BACKGROUND

[0002] The single crystal furnace is a device specially used for growing large-size and high-purity single crystals, and the single crystal furnace comprises a main furnace chamber, an auxiliary chamber located at the top end of the main furnace chamber, and a lifting device used for lifting the auxiliary chamber, the auxiliary chamber is lifted by the lifting device and rotates as a whole, which facilitates subsequent transfer of the grown crystal rod to a designated position by a transport tool The existing single crystal furnace is usually provided with one lifting device for working on the single crystal furnace, and in the process of single crystal silicon production, the enterprise needs to match multiple single crystal furnaces for batch production, and multiple lifting devices are needed for multiple single crystal furnaces, which consumes a large cost in the process of purchase, and if the lifting device can be used to lift the auxiliary chambers of two or more single crystal furnaces, the purchase cost of the equipment can be effectively reduced, and the existing lifting device may not be able to quickly switch the connected single crystal furnaces, resulting in the inability to work on multiple single crystal furnaces.

[0003] Therefore, it is necessary to invent a single crystal furnace auxiliary chamber lifting device to solve the above problems. SUMMARY

[0004] The purpose of the present application is to provide a single crystal furnace auxiliary chamber lifting device, which solves the problem that the lifting device may not be able to quickly switch the connected single crystal furnaces and work on multiple single crystal furnaces.

[0005] To achieve this purpose, the present application adopts the following technical solutions: The single crystal furnace auxiliary chamber lifting device comprises a hanging and clamping block mounted on the auxiliary chamber and an adjusting device used for lifting and rotating the auxiliary chamber, the adjusting device is fixedly installed with a clamping part at the telescopic end, the clamping part and the hanging and clamping block constitute a clamping connection, the hanging and clamping block is provided with a slot, the clamping part comprises a clamping shell, a transmission part and a plug-in part are installed on the inner side of the clamping shell, the plug-in part comprises a double-headed threaded rod and a locking clamping block, the transmission part comprises a second transmission bevel gear used for driving the double-headed threaded rod to rotate, the locking clamping block is slidingly arranged at both ends of the double-headed threaded rod, and a plug is arranged at the end of the locking clamping block and is used for plugging into the slot.

[0006] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the inner side of the clamping shell is further provided with an adjusting part, the adjusting part comprises a synchronous slider, the transmission part is fixedly installed at the top end of the synchronous slider, the top end of the synchronous slider is fixedly installed with an adjusting push block, and the end surface of the locking clamping block is provided with an extrusion inclined surface for pushing the adjusting push block; when the locking clamping block moves to both ends, the two side extrusion inclined surfaces push the synchronous slider to slide outward, and the transmission bevel gear two is separated from the double-headed threaded rod.

[0007] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the inner side of the clamping shell is further provided with a limiting part, the limiting part is located on both sides of the transmission part, the limiting part comprises a driven transmission shaft and a transmission threaded rod, the outer side of the transmission threaded rod is threadedly connected with a double-end clamping block, the two ends of the double-end clamping block extend to the outer side of the clamping part, the transmission threaded rod cooperates with the driven transmission shaft, and the transmission part further comprises a transmission bevel gear one; after the transmission bevel gear two is separated from the double-headed threaded rod, the transmission bevel gear one cooperates with the driven transmission shaft to drive the transmission threaded rod to push out the double-end clamping block.

[0008] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the two sides of the synchronous slider are provided with guide blocks, the top end of the guide block is rotatably installed with a swing rod for pushing the adjusting push block to reset, the two ends of the swing rod extend to both sides of the guide block, and one side of the adjusting push block is provided with a reset push block; when the double-end clamping block is recycled to the end, the two-end reset push block pushes the swing rod to swing, synchronously extrudes the adjusting push block, the transmission bevel gear one is separated from the driven transmission shaft, the transmission bevel gear two cooperates with the double-headed threaded rod, and the two locking clamping blocks synchronously slide inward and are separated from the insertion slot.

[0009] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the transmission part further comprises a main transmission shaft and a servo motor, the main transmission shaft and the servo motor are fixedly installed at the top end of the synchronous slider through the rotating shaft mounting seat, and the transmission bevel gear one and the transmission bevel gear two are located at the two ends of the main transmission shaft.

[0010] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the insertion part further comprises a transmission bevel gear three, the transmission bevel gear three is located at the middle part of the double-headed threaded rod, the transmission bevel gear three can mesh with the transmission bevel gear two, the double-headed threaded rod is fixedly connected with the clamping shell through the two-end bearing seat, and one end of the plug is provided with an end surface capable of abutting with the inner side plane of the insertion slot.

[0011] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the limiting part further comprises a driven bevel gear one, a driven bevel gear two and a driven bevel gear three, the driven bevel gear one is fixedly installed at the end of the transmission threaded rod, the driven bevel gear two and the driven bevel gear three are respectively installed at the two ends of the driven transmission shaft, and the driven bevel gear three is engaged with the driven bevel gear one.

[0012] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the clamping part further comprises a sealing cover, the sealing cover is detachably connected with the clamping shell, the driven transmission shaft and the transmission threaded rod are fixedly connected with the sealing cover through the bearing seat, and the clamping shell and the sealing cover are both provided with rectangular sliding grooves for sliding of the double-end clamping blocks.

[0013] As a preferred scheme of the single crystal furnace auxiliary chamber lifting device, the adjusting device is located at the top end of the working platform, the two ends of the adjusting device are both provided with main furnace chambers, and the side walls of the auxiliary chambers provided at the top ends of the main furnace chambers are fixedly connected with the hanging clamping blocks; when the clamping part is driven to rotate by the adjusting device, the clamping part can be moved from one side of the main furnace chamber to the other side of the main furnace chamber.

[0014] The single crystal furnace auxiliary chamber lifting device has the following beneficial effects: the clamping part is driven by the adjusting device to clamp the auxiliary chambers in the adjacent two main furnace chambers in different time periods, one set of device serves multiple main furnace chambers, idle equipment is effectively avoided, and one complete driving adjusting device and clamping part, such as a motor, a transmission mechanism, a control system and the like, are saved, so that the initial investment cost of the equipment is significantly reduced; the locking clamping block and the double-end clamping block are arranged in the clamping part, the plug is inserted into the slot by the arrangement of the locking clamping block, the lifting of the auxiliary chamber is facilitated, the double-end clamping block is arranged to extend outward from the two ends of the clamping part to clamp and support the auxiliary chamber, so that the problems of deviation, inclination or shaking of the auxiliary chamber during lifting of the auxiliary chamber are avoided, the transmission part is separated from the double-end threaded rod after the locking clamping block is inserted, the double-end clamping block is pushed out, the transmission part is reversely rotated after the auxiliary chamber is lifted and reset, the double-end clamping block is recycled, the reset push block drives the swing lever, the transmission part is engaged with the double-end threaded rod, and the locking clamping block is separated from the slot by the double-end threaded rod after the double-end clamping block is reset, so that the subsequent switching between the adjusting device and the main furnace chamber is facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly introduced. Obviously, the drawings described below are only some of the embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0016] Figure 1 is a schematic diagram of the overall structure of the present application.

[0017] Figure 2 is a schematic diagram of the clamping part structure of the present application.

[0018] Figure 3 is a schematic diagram of the transmission part position structure in the double-end clamping block pushing-out state of the present application.

[0019] Figure 4 is a schematic diagram of the transmission part reset structure in the double-end clamping block retraction state of the present application.

[0020] Figure 5 is a schematic diagram of the transmission part structure side view of the present application.

[0021] Figure 6 is a schematic diagram of the enlarged structure at A in the present application. Figure 5

[0022] Figure 7 is a schematic diagram of the double-end clamping block and the auxiliary chamber fitting structure of the present application.

[0023] Figure 8 is a schematic diagram of the hanging clamping block structure of the present application.

[0024] In the drawings: 1, main furnace chamber; 2, auxiliary chamber; 3, hanging clamping block; 301, insertion slot; 4, adjusting device; 5, clamping part; 501, clamping shell; 502, rectangular sliding groove; 503, guide block; 504, sealing cover; 6, transmission part; 601, servo motor; 602, transmission bevel gear one; 603, transmission bevel gear two; 604, main transmission shaft; 7, insertion part; 701, double-headed threaded rod; 702, locking clamping block; 703, plug; 704, transmission bevel gear three; 705, extrusion inclined surface; 8, limiting part; 801, transmission threaded rod; 802, bearing seat; 803, driven bevel gear one; 804, double-end clamping block; 805, reset push block; 806, driven transmission shaft; 807, driven bevel gear two; 808, driven bevel gear three; 9, adjusting part; 901, adjusting push block; 902, synchronous sliding block; 903, swing lever; 904, rotating shaft mounting seat. DETAILED DESCRIPTION

[0025] The technical solutions of the present application will be further described below by combining the drawings and through specific embodiments. ​

[0026] The drawings are only used for illustrative description, and the representation is only a schematic diagram, not a physical diagram, and cannot be understood as a limitation of the patent; in order to better illustrate the embodiments of the present application, some components in the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product; for those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0027] The same or similar reference numerals in the drawings of the embodiments of the present application correspond to the same or similar components; in the description of the present application, it should be understood that if the terms "upper", "lower", "left", "right", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore the terms describing the positional relationship in the drawings are only used for illustrative description, and cannot be understood as a limitation of the patent, for those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0028] In the description of the present application, unless otherwise explicitly specified and limited, if the term "connection" and the like appear to indicate the connection relationship between components, the term should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two components. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0029] Reference Figures 1 to 8 The present application provides a single crystal furnace auxiliary chamber lifting device, comprising a hanging clamping block 3 installed in the auxiliary chamber 2, and an adjusting device 4 for driving the auxiliary chamber 2 to lift and rotate, a clamping portion 5 is fixedly installed at the telescopic end of the adjusting device 4, the clamping portion 5 and the hanging clamping block 3 form a clamping connection, the hanging clamping block 3 is provided with a slot 301, the clamping portion 5 comprises a clamping shell 501, a transmission portion 6 and a plug-in portion 7 are installed on the inner side of the clamping shell 501, the plug-in portion 7 comprises a double-headed threaded rod 701 and a locking clamping block 702, the transmission portion 6 comprises a transmission bevel gear two 603 for driving the double-headed threaded rod 701 to rotate, the locking clamping block 702 is slidingly arranged at both ends of the double-headed threaded rod 701, and a plug 703 for being inserted into the slot 301 is arranged at the end of the locking clamping block 702. A guide block 503 for limiting the locking clamping block 702 is further arranged on the inner side of the clamping shell 501, so as to avoid the swinging of the locking clamping block 702 during the rotation of the double-headed threaded rod 701.

[0030] The inner side of the clamping shell 501 is further provided with an adjusting part 9, the adjusting part 9 comprises a synchronous slider 902, the transmission part 6 is fixedly installed at the top end of the synchronous slider 902, the top end of the synchronous slider 902 is fixedly installed with an adjusting push block 901, and the end surface of the locking clamping block 702 is provided with an extrusion inclined surface 705 for pushing the adjusting push block 901; when the locking clamping block 702 moves to both ends, the two side extrusion inclined surfaces 705 push the synchronous slider 902 to slide outward, and the transmission bevel gear two 603 is separated from the double-headed threaded rod 701. Through the setting of the adjusting part 9, after the plug 703 is inserted into the slot 301, the rotation of the servo motor 601 can continue to drive the ejection of the limiting part 8; after the limiting part 8 is recovered, the plug 703 is driven away from the slot 301.

[0031] The inner side of the clamping shell 501 is further provided with a limiting part 8, the limiting part 8 is located on both sides of the transmission part 6, the limiting part 8 comprises a driven transmission shaft 806 and a transmission threaded rod 801, the outer side of the transmission threaded rod 801 is threadedly connected with a double-end clamping block 804, both ends of the double-end clamping block 804 extend to the outer side of the clamping part 5, the transmission threaded rod 801 cooperates with the driven transmission shaft 806, and the transmission part 6 further comprises a transmission bevel gear one 602; after the transmission bevel gear two 603 is separated from the double-headed threaded rod 701, the transmission bevel gear one 602 cooperates with the driven transmission shaft 806 to drive the transmission threaded rod 801 to push out the double-end clamping block 804. Through the synchronous ejection of the double-end clamping block 804, the two ends of the auxiliary chamber 2 are limited respectively, so that the supporting force during lifting is guaranteed, and the stability during lifting and transfer is improved.

[0032] Both sides of the synchronous slider 902 are provided with guide blocks 503, the top end of the guide block 503 is rotatably installed with a swing rod 903 for pushing the adjusting push block 901 back to position, both ends of the swing rod 903 extend to both sides of the guide block 503 respectively, and one side of the adjusting push block 901 is provided with a reset push block 805; when the double-end clamping block 804 is recovered to the end, the two reset push blocks 805 push the swing rod 903 to swing, the synchronous extrusion adjusting push block 901, the transmission bevel gear one 602 is separated from the driven transmission shaft 806, the transmission bevel gear two 603 cooperates with the double-headed threaded rod 701, and the two locking clamping blocks 702 synchronously slide inward and are separated from the slot 301. The top end of the guide block 503 can also be installed with a stop block for limiting the swing rod 903, so as to avoid the case that the swing rod 903 swings too much and the reset push block 805 cannot push the swing rod 903.

[0033] The transmission part 6 further comprises a main transmission shaft 604 and a servo motor 601, both of which are fixedly installed on the top end of the synchronous sliding block 902 through the rotating shaft mounting seat 904, and the transmission bevel gear one 602 and the transmission bevel gear two 603 are respectively located at both ends of the main transmission shaft 604. The transmission bevel gear one 602 can be engaged with the two side driven bevel gears two 807 at the same time, so as to realize the synchronous pushing out of the two side double-end clamping blocks 804.

[0034] The plug-in part 7 further comprises a transmission bevel gear three 704, which is located at the middle part of the double-headed threaded rod 701, and can be engaged with the transmission bevel gear two 603. The double-headed threaded rod 701 is fixedly connected with the clamping shell 501 through the two end bearing seats 802, and one end of the plug 703 is provided with an end face which can be attached to the inner side plane of the plug groove 301. The setting of the plug 703 end face attachment can avoid the left and right shaking of the auxiliary chamber 2 after plugging.

[0035] The limiting part 8 further comprises a driven bevel gear one 803, a driven bevel gear two 807 and a driven bevel gear three 808, the driven bevel gear one 803 is fixedly installed at the end of the transmission threaded rod 801, the driven bevel gear two 807 and the driven bevel gear three 808 are respectively installed at both ends of the driven transmission shaft 806, the driven bevel gear three 808 is engaged with the driven bevel gear one 803; when the transmission bevel gear one 602 cooperates with the driven transmission shaft 806, the transmission bevel gear one 602 is engaged with the two side driven bevel gears two 807, and the setting of multiple bevel gears facilitates the switching of the connection state of the transmission part 6, the plug-in part 7 and the limiting part 8 during transmission.

[0036] The clamping part 5 further comprises a sealing cover 504, which is detachably connected with the clamping shell 501, and the driven transmission shaft 806 and the transmission threaded rod 801 are fixedly connected with the sealing cover 504 through the bearing seat 802. The clamping shell 501 and the sealing cover 504 are both provided with a rectangular sliding groove 502 for the sliding of the double-end clamping block 804. The driven transmission shaft 806 and the transmission threaded rod 801 are installed on one side of the sealing cover 504, which is used to ensure that the driven transmission shaft 806 does not interfere with the bearing seat 802 during the sliding of the synchronous sliding block 902. The driven transmission shaft 806 and the transmission threaded rod 801 are located on the same side, which ensures the reliability of subsequent transmission.

[0037] The adjusting device 4 is located at the top of the working platform, both ends of the adjusting device 4 are provided with main furnace chambers 1, the side walls of the auxiliary chambers 2 provided at the top of the main furnace chambers 1 are fixedly connected with the hanging clamping blocks 3; when the adjusting device 4 drives the clamping part 5 to rotate, the clamping part 5 can be moved from one side of the main furnace chamber 1 to the other side of the main furnace chamber 1. The hanging clamping block 3 is located within the rotating radius of the adjusting device 4 and the clamping part 5, and is tangent to them, and in the process of rotating the adjusting device 4, the clamping part 5 can be clamped in the two auxiliary chambers 2 respectively, the auxiliary chamber 2 is lifted by the adjusting device 4, and the clamping part 5 is driven to rotate, so that the silicon rod is taken out; when the process of the adjacent main furnace chamber 1 is completed, the adjusting device 4 rotates the clamping part 5, so that the clamping part 5 is clamped with the hanging clamping block 3 of the main furnace chamber 1, and the subsequent lifting process is carried out.

[0038] The adjusting device 4 drives the clamping part 5 to clamp the auxiliary chamber 2 in the adjacent two main furnace chambers 1 at different time periods, a single set of device serves multiple main furnace chambers 1, effectively avoids the idle of equipment, and a complete driving adjusting device 4 and clamping part 5 such as a motor, a transmission mechanism, a control system and the like structure are saved, so that the initial investment cost of the equipment is significantly reduced. The locking clamping block 702 and the double-end clamping block 804 are arranged in the clamping part 5, the plug 703 is inserted into the slot 301 by the arrangement of the locking clamping block 702, the lifting of the auxiliary chamber 2 is facilitated, the double-end clamping block 804 is arranged to extend outward from both ends of the clamping part 5 to clamp and support the auxiliary chamber 2, so that the problems of deviation, inclination or shaking of the auxiliary chamber 2 in the lifting process of the auxiliary chamber 2 are avoided, the transmission part 6 is separated from the double-end threaded rod 701 by the arrangement of the adjusting part 9 after the locking clamping block 702 is inserted, the double-end clamping block 804 is pushed out, the transmission part 6 is reversely rotated after the auxiliary chamber 2 is lifted and reset, the double-end clamping block 804 is recovered, the reset push block 805 pushes the swing lever 903, the transmission part 6 is engaged with the double-end threaded rod 701, the locking clamping block 702 on both sides is slid inward after the double-end clamping block 804 is reset, the plug 703 is separated from the slot 301, and the subsequent switching between the adjusting device 4 and the main furnace chamber 1 is facilitated.

[0039] It should be noted that the above specific embodiments are only the preferred embodiments of the present application and the technical principles applied. Those skilled in the art should understand that various modifications, equivalent replacements, changes and the like can be made to the present application. However, as long as these changes do not deviate from the spirit of the present application, they should be within the protection scope of the present application. In addition, some terms used in the specification and claims of the present application are not limited, but are only for the convenience of description.

Claims

1. A single crystal reactor sub-chamber lift apparatus, characterized by: The utility model provides a kind of lifting and rotating device of sub-chamber, including installation in sub-chamber (2) hanging block (3), and for driving sub-chamber (2) lifting and rotating adjusting device (4), the telescopic end of the adjusting device (4) is fixedly installed with clamping part (5), the clamping part (5) forms clamping with hanging block (3), the hanging block (3) is provided with slot (301), the clamping part (5) includes clamping shell (501), the inside of the clamping shell (501) is installed with transmission part (6) and plug-in part (7), the plug-in part (7) includes stud bolt (701) and locking block (702), the transmission part (6) includes transmission bevel gear two (603) for driving stud bolt (701) rotation, the locking block (702) is slidably arranged at both ends of stud bolt (701), the end of the locking block (702) is provided with plug (703) for inserting into slot (301).

2. A single crystal furnace sub-chamber lifting device according to claim 1, wherein: The inside of the clamping shell (501) is also installed with adjusting part (9), the adjusting part (9) includes synchronous slider (902), the transmission part (6) is fixedly installed at the top of synchronous slider (902), the top of the synchronous slider (902) is fixedly installed with adjusting push block (901), the end surface of the locking block (702) is provided with extrusion inclined plane (705) for pushing adjusting push block (901);When locking block (702) moves to both ends, both sides extrusion inclined plane (705) pushes synchronous slider (902) to slide outward, transmission bevel gear two (603) is separated from stud bolt (701).

3. A single crystal reactor subchamber lift assembly as defined in claim 2, wherein: The inside of the clamping shell (501) is also installed with limiting part (8), the limiting part (8) is located at both sides of transmission part (6) respectively, the limiting part (8) includes driven transmission shaft (806) and transmission threaded rod (801), the outside of the transmission threaded rod (801) is threadedly connected with double-end block (804), both ends of the double-end block (804) extend to the outside of clamping part (5), the transmission threaded rod (801) cooperates with driven transmission shaft (806), the transmission part (6) also includes transmission bevel gear one (602);When transmission bevel gear two (603) is separated from stud bolt (701), the transmission bevel gear one (602) cooperates with driven transmission shaft (806), drives transmission threaded rod (801) to push out double-end block (804).

4. A single crystal reactor sub-chamber lifting device as defined in claim 3, wherein: Both sides of the synchronous slider (902) are provided with guide blocks (503), the top end of the guide block (503) is rotatably installed with a swing lever (903) for pushing the reset of the adjusting push block (901), both ends of the swing lever (903) extend to both sides of the guide block (503), one side of the adjusting push block (901) is provided with a reset push block (805); when the double-end clamping block (804) is recycled to the end, the two-end reset push block (805) pushes the swing lever (903) to swing, synchronously extrudes the adjusting push block (901), the driving bevel gear one (602) is separated from the driven transmission shaft (806), the driving bevel gear two (603) cooperates with the double-headed threaded rod (701), and the two-side locking clamping block (702) is synchronously slid inward and separated from the slot (301).

5. A single crystal reactor sub-chamber lift assembly as defined in claim 4, wherein: The transmission part (6) further comprises a main transmission shaft (604) and a servo motor (601), both the main transmission shaft (604) and the servo motor (601) are fixedly installed on the top end of the synchronous slider (902) through the rotating shaft mounting seat (904), and the driving bevel gear one (602) and the driving bevel gear two (603) are located at both ends of the main transmission shaft (604) respectively.

6. A single crystal reactor sub-chamber lift assembly as defined in claim 5, wherein: The plug-in part (7) further comprises a driving bevel gear three (704), the driving bevel gear three (704) is located at the middle part of the double-headed threaded rod (701), the driving bevel gear three (704) can mesh with the driving bevel gear two (603), the double-headed threaded rod (701) is fixedly connected with the clamping shell (501) through the two-end bearing seat (802), and one end of the plug (703) is provided with an end face capable of being attached to the inner side plane of the slot (301).

7. A single crystal furnace sub-chamber lifting device as defined in claim 3, wherein: The limiting part (8) further comprises a driven bevel gear one (803), a driven bevel gear two (807) and a driven bevel gear three (808), the driven bevel gear one (803) is fixedly installed at the end of the transmission threaded rod (801), the driven bevel gear two (807) and the driven bevel gear three (808) are installed at both ends of the driven transmission shaft (806) respectively, and the driven bevel gear three (808) meshes with the driven bevel gear one (803); when the driving bevel gear one (602) cooperates with the driven transmission shaft (806), the driving bevel gear one (602) meshes with the driven bevel gear two (807) on both sides.

8. A single crystal furnace sub-chamber lifting device as defined in claim 7, wherein: The clamping part (5) further comprises a sealing cover (504), the sealing cover (504) is detachably connected with the clamping shell (501), the driven transmission shaft (806) and the transmission threaded rod (801) are fixedly connected with the sealing cover (504) through the bearing seat (802), and both ends of the clamping shell (501) and the sealing cover (504) are provided with a rectangular sliding groove (502) for sliding of the double-end clamping block (804).

9. A single crystal reactor sub-chamber lift assembly as defined in claim 8, wherein: The adjusting device (4) is located at the top of the working platform, both ends of the adjusting device (4) are provided with main furnace chambers (1), the side walls of the auxiliary chambers (2) provided at the top of the main furnace chambers (1) are fixedly connected with the hung clamping blocks (3); when the adjusting device (4) drives the clamping part (5) to rotate, the clamping part (5) can be moved from one main furnace chamber (1) to the other main furnace chamber (1).

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