Screen printing plate and manufacturing method thereof

By setting filamentous structures in local areas of the printing tank to enhance the structural strength of the screen body, the problems of poor morphology and insufficient strength of the printing screen when printing solar cell grid lines are solved, realizing efficient printing of continuous grid lines and improving the current collection effect and conversion efficiency of the cell.

CN120902419APending Publication Date: 2025-11-07TONGWEI SOLAR ENERGY (MEISHAN) CO LTD
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Patent Information

Application Number
CN202510716047.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-05-30
Publication Date
2025-11-07

AI Technical Summary

Technical Problem

Existing printing screens are prone to producing poor grid line morphology when printing solar cell grid lines, making it difficult to print grid lines with narrow line widths, and also have poor structural strength and short service life.

Method used

By setting filamentous structures in local areas of the printing tank, the structural strength of the screen body is enhanced, and the continuity of the printing tank is maintained without affecting the ink flow.

Benefits of technology

It improves the structural strength and service life of the printing screen, enables the printing of continuous grid lines, enhances current collection and conversion efficiency, and produces better printing morphology.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention relates to the technical field of printing screens, in particular to a printing screen and a manufacturing method thereof. The printing screen comprises a screen body and a filiform structure. A printing groove is formed in the screen printing plate body and penetrates through the screen printing plate body in the thickness direction of the screen printing plate body, and the length direction of the printing groove is the first direction. The filamentous structure is arranged at the position of the printing groove on the screen printing plate main body; in the first direction, the filiform structure corresponds to a local area of the printing groove; the filiform structure extends along a second direction, and the second direction intersects with the first direction. According to the screen printing plate, the silk-shaped structure is locally arranged, so that the screen printing plate body has high structural strength and long service life, the rest area, not provided with the silk-shaped structure, of the printing groove has good slurry passing ability, and the printing appearance of grid lines is good.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of printing screens, in particular to a printing screen and a manufacturing method thereof. BACKGROUND

[0002] A printing screen for printing a grid line of a solar cell is prone to poor grid line appearance and difficult to print a grid line with a narrow line width. Even if the structure of the printing screen is improved, the improved printing screen is prone to problems of discontinuous printing of the grid line, poor structural strength and short service life. SUMMARY

[0003] Embodiments of the present application disclose a printing screen and a manufacturing method thereof, which can make the screen body have high structural strength and long service life, and the printed grid line has good appearance.

[0004] To achieve the above object, in a first aspect, embodiments of the present application disclose a printing screen, comprising:

[0005] a screen body, wherein a printing groove is arranged on the screen body, the printing groove penetrates the screen body along a thickness direction of the screen body, and a length direction of the printing groove is a first direction; and

[0006] a filament structure, wherein the filament structure is arranged on a position of the screen body where the printing groove is arranged; in the first direction, the filament structure is arranged corresponding to a local area of the printing groove; the filament structure extends along a second direction, and the second direction intersects the first direction.

[0007] In a possible implementation manner of the first aspect, at least one of the filament structures has an arc-shaped edge on at least one side in the first direction, and the arc-shaped edge at least partially approaches an end of the filament structure connected to the screen body, so that at least one end of the filament structure has an arc-shaped chamfered portion.

[0008] In a possible implementation manner of the first aspect, both sides of at least one of the filament structures in the first direction have the arc-shaped edge, and the arc-shaped edge extends to both ends of the filament structure along the second direction, so that both ends of the filament structure have the arc-shaped chamfered portion.

[0009] The size of the filament structure in the first direction is a width, and in the second direction, the width of the filament structure widens from the middle to both ends.

[0010] In a possible implementation manner of the first aspect, the curvature of the arc-shaped edge is 0.01 rad to 1 rad; and / or,

[0011] A width W1 of the filamentous structure along the first direction is 3 μm to 18 μm; and / or,

[0012] A thickness T1 of the filamentous structure along a thickness direction of the screen body is 3 μm to 20 μm.

[0013] In a possible implementation manner of the first aspect, along the thickness direction of the screen body, the printing slot includes a slurry buffering section and a slurry printing section in communication;

[0014] A width of the slurry buffering section is W2;

[0015] Along the first direction, widths of the slurry printing section are the same, or the slurry printing section is configured as a width-variable structure;

[0016] When the slurry printing section is configured as the width-variable structure, a width of the widest part of the slurry printing section is W3, and the following relationship is satisfied: W2≥W3;

[0017] When the widths of the slurry printing section are the same, a width of the slurry printing section is W4, and the following relationship is satisfied: W2>W4;

[0018] The second direction is perpendicular to the first direction.

[0019] In a possible implementation manner of the first aspect, when the slurry printing section is configured as the width-variable structure, along the first direction, the slurry printing section has a first printing area and a second printing area in communication, a width of the first printing area is W5, a width of the widest part of the second printing area is W3, and the following relationship is satisfied: W5<W3;

[0020] The filamentous structure is arranged in the slurry buffering section and corresponds to the second printing area.

[0021] In a possible implementation manner of the first aspect, a plurality of the filamentous structures are arranged in the first direction to form a comb-shaped assembly, and the comb-shaped assembly is arranged only in the second printing area.

[0022] In a possible implementation manner of the first aspect, an opening rate of the first printing area is greater than or equal to 80% and less than or equal to 100%, and an opening rate of the second printing area is greater than or equal to 30% and less than or equal to 70%; and / or,

[0023] The width W2 of the slurry buffering section is 50 μm to 200 μm; and / or,

[0024] The width W3 of the widest part of the slurry printing section is 10 μm to 100 μm; and / or,

[0025] The width W5 of the first printing area is 3μm to 15μm.

[0026] In one possible implementation of the first aspect, the filament structure is disposed at one end of the slurry buffer section near the slurry printing section.

[0027] In one possible implementation of the first aspect, the screen printing body includes a first metal layer and a second metal layer stacked together;

[0028] Along the thickness direction of the screen printing body, the paste printing section penetrates the first metal layer, and the paste buffer section penetrates the second metal layer;

[0029] The filamentous structure is a metal wire, which is connected to the second metal layer.

[0030] In a possible implementation of the first aspect, the first metal layer is made of a nickel-steel alloy; and / or,

[0031] The second metal layer is made of a nickel-steel alloy; and / or,

[0032] The thickness T2 of the first metal layer is 5 μm to 20 μm; and / or,

[0033] The thickness T3 of the second metal layer is 5μm to 20μm.

[0034] Secondly, embodiments of this application disclose a method for manufacturing a printing screen, comprising the following steps:

[0035] Fabrication of filamentous structures: Fabrication of the filamentous structures on a substrate;

[0036] Fabrication of the screen printing plate body: The screen printing plate body with printing grooves is fabricated on the substrate on which the filamentous structure is fabricated; wherein, the printing grooves penetrate the screen printing plate body along the thickness direction, and the length direction of the printing grooves is a first direction; the filamentous structure is disposed at the position on the screen printing plate body where the printing grooves are provided; along the first direction, the filamentous structure is disposed in a local area corresponding to the printing grooves; the filamentous structure extends along a second direction, and the second direction intersects with the first direction.

[0037] In a possible implementation of the second aspect, the step of fabricating the filamentary structure includes the following sub-steps:

[0038] Fabrication of the first adhesive layer: The first adhesive layer is fabricated on a localized area of ​​the non-conductive substrate;

[0039] Depositing the first conductive layer: Depositing the first conductive layer on the side of the first adhesive layer opposite to the substrate;

[0040] making a patterned second glue layer: making the patterned second glue layer on the side of the first conductive layer away from the first glue layer, so that the local area of the first conductive layer is exposed to the second glue layer, and the exposed area of the first conductive layer corresponds to the pattern of the filament structure;

[0041] electrodepositing the filament structure: electrodepositing the filament structure on the exposed area of the first conductive layer.

[0042] In a possible implementation manner of the second aspect, before the step of making the screen body, the method further includes the following steps:

[0043] making a third glue layer: covering the third glue layer on the filament structure;

[0044] The step of making the screen body includes the following sub-steps:

[0045] making a fourth glue layer: making the fourth glue layer on the local area of the substrate; wherein the fourth glue layer and the third glue layer are connected, and the pattern after being connected corresponds to the pattern of the slurry printing section of the printing slot;

[0046] depositing a second conductive layer: depositing the second conductive layer on the area of the substrate except the third glue layer and the fourth glue layer;

[0047] electrodepositing a first metal layer: electrodepositing the first metal layer on the side of the second conductive layer away from the substrate; wherein, along the thickness direction of the substrate, the side of the first metal layer away from the substrate is below the bottom surface of the filament structure;

[0048] making a fifth glue layer: making the fifth glue layer on the local area of the first metal layer, and the pattern of the fifth glue layer corresponds to the pattern of the slurry buffer section of the printing slot;

[0049] making a second metal layer: making the second metal layer on the exposed area of the first metal layer, so that the filament structure is connected to the second metal layer, and the screen body is obtained; wherein the second metal layer is formed with the slurry buffer section;

[0050] After the step of making the screen body, the method further includes the following steps:

[0051] separating the screen body: separating the screen body from the substrate;

[0052] degluing: removing the first glue layer, the second glue layer, the third glue layer, the fourth glue layer and the fifth glue layer on the screen body;

[0053] removing the first conductive layer.

[0054] Compared with the prior art, the application has the following beneficial effects:

[0055] The printing screen plate of the application sets a filamentous structure in the local area of the printing groove, and the local area of the printing groove is structurally reinforced, so that the screen plate body has high structural strength and long service life. Moreover, the printing groove can maintain a continuous state to print a continuous grid line. In the remaining area where no filamentous structure is set, the printing groove is not blocked by the filamentous structure, so that these areas of the printing groove have good paste passing property, and the printed appearance of the grid line is good, as follows:

[0056] The screen plate body is provided with a printing groove which penetrates the screen plate body along the thickness direction of the screen plate body. It can be understood that the printing groove is equivalent to an opening on the screen plate body, i.e., a weak area on the screen plate body. In order to structurally reinforce the screen plate body, the screen plate body sets a filamentous structure at the position where the screen plate body is provided with the printing groove. Along the first direction, the filamentous structure is set corresponding to the local area of the printing groove. The filamentous structure extends along the second direction. In this way, along the second direction, the filamentous structure spans the printing groove and plays a pulling role on both sides of the printing groove to enhance the structural strength of the printing screen plate and improve the service life of the printing screen plate. The printing groove is structurally reinforced by increasing the filamentous structure in the local area, and along the first direction, the printing groove can maintain a continuous state to print a continuous current collecting grid line. The current collecting effect of the continuous current collecting grid line is better, which is conducive to improving the current collecting effect and conversion efficiency of the solar cell using the current collecting grid line. Moreover, in the remaining area where no filamentous structure is set, the printing groove is not blocked by the filamentous structure, so that these areas of the printing groove have good paste passing property, and the printed appearance of the grid line is good.

[0057] In summary, the printing screen plate sets a filamentous structure in the local area, so that the screen plate body has high structural strength and long service life, the printing groove can maintain a continuous state to print a continuous grid line, and the remaining area of the printing groove where no filamentous structure is set has good paste passing property, and the printed appearance of the grid line is good. BRIEF DESCRIPTION OF DRAWINGS

[0058] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0059] Figure 1 A perspective view of a printing screen plate (the paste printing section is structured as a width varying structure) disclosed in the embodiments of the application;

[0060] Figure 2 A top view of a printing screen (the paste printing section is configured as a width-variable structure) disclosed by an embodiment of the present application;

[0061] Figure 3 A cross-sectional view along A-A shown in FIG. 1; Figure 2

[0062] A cross-sectional view along A-A shown in FIG. 1; Figure 4

[0063] A top view of a printing screen (the paste printing section is configured as a width-variable structure) disclosed by an embodiment of the present application; Figure 5

[0064] A cross-sectional view along A-A shown in FIG. 1; Figure 6

[0065] A cross-sectional view along A-A shown in FIG. 1; Figure 7

[0066] A cross-sectional view along A-A shown in FIG. 1; Figure 8

[0067] A cross-sectional view along A-A shown in FIG. 1; Figure 9

[0068] A cross-sectional view along A-A shown in FIG. 1; Figure 10

[0069] A cross-sectional view along A-A shown in FIG. 1; Figure 11

[0070] A perspective view of a printing screen prepared by the preparation method disclosed by an embodiment of the present application.

[0071] Explanation of reference numerals:

[0072] ​2, base; 21, first adhesive layer; 22, first conductive layer; 23, second adhesive layer; 24, third adhesive layer; 25, fourth adhesive layer; 26, second conductive layer; 27, fifth adhesive layer. DETAILED DESCRIPTION

[0073] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work belong to the scope of protection of the present application.

[0074] In the present application, the positions or location relationships indicated by the terms "upper", "inner", "outer", "front", "lateral", "longitudinal" and the like are based on the positions or location relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific position, or to be constructed and operated in a specific position.

[0075] In addition, in addition to being used to indicate the positions or location relationships, the above-mentioned partial terms can also be used to indicate other meanings, for example, the term "upper" can also be used to indicate a certain dependent relationship or connection relationship in some cases. Those of ordinary skill in the art can understand the specific meanings of these terms in the present application according to the specific circumstances.

[0076] In addition, the terms "provided with", "provided with", "connected", "connected" should be understood broadly. For example, it can be fixedly connected, detachably connected, or integrally constructed; it can be mechanically connected, or electrically connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal communication between two devices, elements or components. Those of ordinary skill in the art can understand the specific meanings of the above-mentioned terms in the present application according to the specific circumstances.

[0077] In addition, the terms "first", "second" and the like are mainly used to distinguish different devices, elements or components (the specific types and structures can be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise stated, the meaning of "multiple" is two or more.

[0078] One of the promotion directions of reducing the cost and improving the efficiency of the solar cell is to narrow the line width of the current collecting grid line, so as to reduce the shading area of the current collecting grid line as a whole, and to reduce the wet weight of the paste during printing. Reducing the shading area enables the solar cell to absorb more light, thereby improving the conversion efficiency of the solar cell; reducing the wet weight of the paste is conducive to reducing the amount of paste used, thereby reducing the production cost of the solar cell.

[0079] Narrow-line-width collector grids are difficult to print using wire mesh printing because: wire mesh printing is made of woven steel wire. Therefore, steel wires are present at every point in the printing grooves of the wire mesh, and these wires affect the transmission of the ink. When wire mesh printing is used to print narrow collector grids, poor ink transmission leads to printing abnormalities and poor grid morphology. In other words, wire mesh printing is not suitable for printing narrow-line-width collector grids, which hinders the improvement of conversion efficiency in solar cells by narrowing the collector grid linewidth.

[0080] It should be noted that the current standard for defining the linewidth of collector grids in the photovoltaic industry is that when the sintered linewidth is less than 30 micrometers, especially less than 20 micrometers, it falls within the narrower linewidth range in this application.

[0081] Fully open printing screens are more suitable for printing narrower linewidth collector lines, such as fully open steel screens. This is because when making the printing grooves on a fully open printing screen, almost no material obstructs the ink flow within the open area, while steel wire screens only remove some material during groove making, retaining the steel wire within the groove area. In other words, fully open printing screens have a higher aperture ratio than steel wire screens. The printing grooves on fully open printing screens have very little or no obstruction. The ink experiences less obstruction as it passes through the printing grooves, resulting in better ink permeability and smoother, narrower linewidths. However, fully open printing screens are prone to structural strength issues.

[0082] Based on the above analysis, such as Figure 1 As shown, this application provides a printing screen. This printing screen enhances the structural strength of the screen body 10 by providing filamentous structures 11 in localized areas of the printing tank 12. Therefore, the service life of the printing screen 1 can be improved. Furthermore, since the printing screen 1 with filamentous structures 11 can print continuous current collector lines in one pass, it eliminates the need for other printing screens to print overlapping current collector lines. This avoids printing alignment problems when printing overlapping current collector lines, thereby improving the printing yield of the current collector lines. Moreover, in the remaining areas of the printing tank 12 without filamentous structures 11, there are no filamentous structures 11 obstructing ink flow, resulting in better ink throughput in these areas and thus printing current collector lines with a smoother morphology.

[0083] The technical solution of the present invention will now be described in conjunction with the embodiments and accompanying drawings.

[0084] Firstly, please refer to the following: Figure 1 This application discloses a printing screen 1, which includes a screen body 10 and a filament structure 11.

[0085] The screen body 10 is provided with a printing groove 12, the printing groove 12 penetrates the screen body 10 along the thickness direction Z of the screen body, and the length direction of the printing groove 12 is the first direction X.

[0086] The filamentous structure 11 is arranged on the screen body 10 at the position provided with the printing groove 12. Along the first direction X, the filamentous structure 11 is arranged corresponding to the local area of the printing groove 12. The filamentous structure 11 extends along the second direction Y, and the second direction Y intersects the first direction X.

[0087] The beneficial effects of the printing screen 1 of the present application will be described in detail below.

[0088] The printing screen 1 of the present application enhances the structural strength of the screen body 10 through the filamentous structure 11 arranged on the local area of the printing groove 12, so that the screen body has higher structural strength and longer service life. Moreover, the printing groove 12 can maintain a continuous state to print continuous grid lines. The printing groove 12 has good paste passability in the areas without the filamentous structure 11, so that the grid lines printed have a more flat topography.

[0089] The screen body 10 is provided with a printing groove 12, the printing groove 12 penetrates the screen body 10 along the thickness direction Z of the screen body. It can be understood that the printing groove 12 is equivalent to an opening on the screen body 10, i.e. a mechanically weak area on the screen body 10. In order to enhance the structural strength of the screen body 10, the screen body 10 arranges the filamentous structure 11 at the position provided with the printing groove 12 on the screen body 10.

[0090] Moreover, along the first direction X, the filamentous structure 11 is arranged corresponding to the local area of the printing groove 12. The filamentous structure 11 extends along the second direction Y. In this way, along the second direction Y, the filamentous structure 11 spans the printing groove 12 and plays a pulling and mechanical support role on both sides of the printing groove 12 to enhance the structural strength of the printing screen 1 and improve the service life of the printing screen 1. The printing screen 1 provided with the filamentous structure 11 can print continuous grid lines at one time, and can no longer need to print the lap grid lines of the grid lines through other printing screens, so there is no printing alignment problem when printing the lap grid lines, thereby improving the printing yield of the grid lines. Moreover, the printing groove 12 has good paste passability in the areas without the filamentous structure 11, so that the grid lines printed have a more flat topography.

[0091] In the present application, the term "paste" is a carrier for transferring active materials to the surface of a silicon wafer, and is a key material for forming gate lines. Exemplarily, the paste is, for example, a silver paste, a silver-aluminum paste, an aluminum paste, or a silver-coated copper paste.

[0092] In summary, the printing screen 1 is provided with the filamentous structure 11, so that the screen body 10 has high structural strength and long service life, and the printing groove 12 can maintain a continuous state to print continuous gate lines. In the remaining areas where the filamentous structure 11 is not provided, the filamentous structure 11 does not block the paste from being inked, so that these areas of the printing groove 12 have good paste passability, and thus the printed current collecting gate lines have a more flat topography.

[0093] It should be noted that the current collecting gate line of the present application is also called a sub-grid or a fine grid. In other words, the printing screen 1 of the present application is a current collecting gate line printing screen, and the pattern of the printing groove 12 corresponds to the pattern of the current collecting gate line.

[0094] The filamentous structure and the screen body of the present application will be described in detail below.

[0095] In some embodiments, referring to Figure 2 At least one side of the filamentous structure 11 in the first direction X has an arc-shaped edge 111. The arc-shaped edge 111 allows the screen body 10 to disperse the stress of the screen during printing through the filamentous structure 11, thereby making the screen body have high structural strength and long service life. When the filamentous structure 11 is subjected to multiple deformations due to printing, the arc-shaped edge 111 can reduce the damage stress on the filamentous structure 11, thereby avoiding the propagation of micro-cracks in the screen body 10, thereby enhancing the fatigue resistance of the screen body 10 and prolonging the service life of the printing screen 1.

[0096] Considering that the deformation stress caused by printing of the printing screen 1 is mainly concentrated at the connection between the filamentous structure 11 and the screen body 10, based on this, further, the arc-shaped edge 111 is at least partially close to the end of the connection between the filamentous structure 11 and the screen body 10, so that at least one end of the filamentous structure 11 has an arc-shaped chamfer 1111. In this way, the deformation stress caused by printing at the connection between the filamentous structure 11 and the screen body 10 is gradually dispersed along the arc-shaped chamfer 1111. In other words, the arc-shaped chamfer 1111 can effectively disperse the printing deformation stress at the connection between the filamentous structure 11 and the screen body 10, thereby reducing stress concentration and enhancing the connection strength and fatigue resistance of the screen body 10 to printing deformation, so that the structural strength and service life of the printing screen 1 using the filamentous structure 11 are improved.

[0097] Further, referring to Figure 2, the filiform structure 11 has an arc-shaped edge 111 on both sides in the first direction X, the arc-shaped edge 111 extends to both ends of the filiform structure 11 along the second direction Y, so that both ends of the filiform structure 11 have an arc-shaped chamfer 1111. And the size of the filiform structure 11 along the first direction X is the width; along the second direction Y, the width of the filiform structure 11 widens from the middle to both ends.

[0098] In short, along the second direction Y, the filiform structure 11 presents a narrow middle and wide ends. In this way, the narrower middle of the filiform structure 11 has less shielding of the slurry, which is conducive to improving the slurry passability at this position. And the filiform structure 11 connects with the screen body 10 by using the wider ends to enhance the connection strength between the two, thereby improving the structural strength and service life of the printing screen 1.

[0099] Of course, as shown in (A) of Figure 4 , the arc-shaped edge 111 can be arranged only at the end of the filiform structure 11 close to the side wall of the printing groove along the second direction Y. In addition, as shown in (B) of Figure 4 , the arc-shaped edge 111 can also be arranged on one side of the filiform structure 11 along the first direction X. On the other hand, as shown in (C) of Figure 4 , along the second direction Y, the width of the filiform structure 11 can also narrow from the middle to both ends.

[0100] Optionally, the curvature of the arc-shaped edge 111 is 0.01 rad-1 rad, for example, 0.01 rad, 0.2 rad, 0.4 rad, 0.6 rad, 0.8 rad or 1 rad. When the curvature of the arc-shaped edge 111 meets the above curvature range, the arc-shaped edge 111 can better disperse the stress received by the filiform structure 11 during printing, avoiding stress concentration.

[0101] Optionally, referring back to Figure 2 , the width of the filiform structure 11 along the first direction X is in the range of 3-18 μm, for example, 3 μm, 9 μm, 15 μm or 18 μm. When the width of the filiform structure 11 meets the above width range, the filiform structure 11 has moderate structural strength, which can effectively enhance the structural strength and service life of the printing screen 1. And the influence of the filiform structure 11 with this width range on the slurry passability is also relatively small, and the slurry passability of the local area of the printing groove 12 provided with the filiform structure 11 is still good, so that the printing quality of this local area is still good.

[0102] Optionally, referring to Figure 3The thickness T1 of the filament structure 11 along the thickness direction Z of the screen body is 3μm to 20μm, for example, 3μm, 9μm, 15μm or 20μm. When the thickness of the filament structure 11 meets the above thickness range, the filament structure 11 has high structural strength, which can effectively enhance the structural strength and service life of the printing screen 1; at the same time, the filament structure 11 is not too thick, which is conducive to the filament structure 11 being contained in the printing groove 12 as a whole, avoiding the filament structure 11 protruding from the surface of the screen body 10, thereby making the surface of the screen body 10 have better flatness, which is conducive to the contact and relative displacement between the squeegee and the surface of the screen body 10; moreover, the filament structure 11 is not too thin, which would weaken the mechanical strength provided by the filament structure 11 to the screen body 10.

[0103] The printing groove and filament structure of this application are described in detail below.

[0104] In some embodiments, please refer to the following: Figures 1 to 3 , Figure 5 Along the thickness direction Z of the screen body, the printing groove 12 includes a connected paste buffer section 121 and a paste printing section 122. The width of the paste buffer section 121 is W2.

[0105] Along the first direction X, the width of the printing segment 122 is the same at all points, or the printing segment 122 is constructed as a structure with varying width. The term "variable width structure" refers to a structure in which the width varies, that is, the printing segment 122 has wider and narrower positions along the first direction X.

[0106] like Figure 2 As shown, when the slurry printing segment 122 is constructed as a structure with varying width, the width of the widest part of the slurry printing segment 122 is W3, which satisfies the following relationship: W2≥W3.

[0107] like Figure 5 As shown, when the width of the slurry printing section 122 is the same at all points, the width of the slurry printing section 122 is W4, which satisfies the following relationship: W2 > W4.

[0108] The width of the slurry printing section 122 refers to the dimension of the slurry printing section 122 along the second direction Y, that is, the second direction Y is perpendicular to the first direction X.

[0109] In more detail, along the direction of the slurry flow in the printing slot 12, the slurry buffer section 121 is located in front of the slurry printing section 122. When the printing screen 1 is printing, the slurry buffer section 121 is located on the side of the printing screen 1 close to the squeegee, and the slurry printing section 122 is located on the side of the printing screen 1 close to the silicon wafer. The slurry is added to the surface of the printing screen 1 close to the squeegee, and when the squeegee exerts pressure on the surface of the printing screen 1, the slurry flows from the slurry buffer section 121, then flows to the slurry printing section 122, and finally is pressed out from the slurry printing section 122 to achieve printing.

[0110] It can be understood that the wider slurry buffer section 121 makes it easier for the slurry to flow into the printing slot 12, and also can be used to store the slurry to be printed. When the squeegee is displaced relative to the screen body 10, the slurry stored in the slurry buffer section 121 is pressed into the slurry printing section 122 by the squeegee, so as to improve the continuity of the slurry printing, make the printed gate lines more coherent and flat, and reduce the printing defects such as broken gate lines.

[0111] Specifically, referring back to Figure 2 , the pattern of the slurry buffer section 121 can be rectangular when viewed along the thickness direction Z of the screen body, that is, the width of the slurry buffer section 121 is W2. Of course, the slurry buffer section can also be configured as a width-varying structure.

[0112] Further, referring back to Figure 1 and Figure 2 , when the slurry printing section 122 is configured as a width-varying structure, along the first direction X, the slurry printing section 122 has a first printing area 1221 and a second printing area 1222 connected in series, the width of the first printing area 1221 is W5, and the width of the widest part of the second printing area 1222 is W3, satisfying the following relationship: W5 < W3.

[0113] Among them, the filament structure 11 is arranged in the slurry buffer section 121 and corresponds to the second printing area 1222.

[0114] Considering that the filament structure 11 has a certain shielding effect on the slurry, arranging the filament structure 11 in the slurry buffer section 121 is beneficial to filling the slurry in the slurry printing section 122 of the printing screen 1, and further beneficial to improving the printing quality of the printing screen 1.

[0115] In more detail, arranging the filament structure 11 in the slurry buffer section 121 can mean that the filament structure 11 is arranged entirely in the slurry buffer section 121, so as to avoid the filament structure 11 protruding from the surface of the screen body 10, so that the surface of the screen body 10 has better flatness, which is beneficial to the contact and relative displacement between the squeegee and the surface of the screen body 10.

[0116] On this basis, since the second printing area 1222 is widened relative to the first printing area 1221, the filamentary structure 11 is arranged corresponding to the widened second printing area 1222, although the filamentary structure 11 still causes a certain shielding to the paste, the flowability of the paste in the widened second printing area 1222 is still good, thus, it is beneficial to the ink transfer of the paste corresponding to the second printing area 1222 of the printing screen 1.

[0117] Further, referring to Figure 1 , a plurality of filamentary structures 11 are arranged along the first direction X to form a comb-shaped assembly M11, the comb-shaped assembly M11 is arranged corresponding to the second printing area 1222 only, the comb-shaped assembly M11 can further improve the structural strength and service life of the printing screen 1. And since the first printing area 1221 is arranged staggered with the comb-shaped assembly M11, in this way, the comb-shaped assembly M11 will not cause shielding to the first printing area 1221, the paste passability of the first printing area 1221 is good, the first printing area 1221 with a narrower width can not only print a narrower current collecting grid line to reduce the paste consumption, but also has a better printing quality, and thus a grid line with a more flat appearance is printed.

[0118] Further, the filamentary structure 11 is arranged at one end of the paste storage section 121 close to the paste printing section 122. Specifically, the two ends of the filamentary structure 11 along the second direction Y are connected with the second metal layer 15.

[0119] In the present application, the doctor blade can extend into the wider paste storage section 121 to scrape off the paste stored in the paste storage section 121. Since the first printing area 1221 is narrower, the doctor blade will not extend into the first printing area 1221. Then, the height of the grid line printed by the first printing area 1221 corresponds to the depth of the paste printing section 122.

[0120] And in the second printing area 1222, the filamentary structure 11 blocks the doctor blade from further extending into the second printing area 1222. The doctor blade is also difficult to scrape off the paste filled between the adjacent filamentary structures 11, and this part of the paste between the filamentary structures 11 is superimposed on the paste of the second printing area 1222.

[0121] In this way, the part of the grid line printed by the first printing area 1221 is narrower and shorter, which is beneficial to reduce the paste wet weight when the grid line is printed. While the part of the grid line printed by the second printing area 1222 is wider and higher, this part of the grid line contains more electrode material, which can be used for welding with the solder tape to better block the silver etching reaction of the solder tape and reduce the grid breakage phenomenon caused by welding.

[0122] In more detail, referring to Figure 2When the printing screen 1 is viewed from above along the thickness direction Z of the printing screen body, the pattern of the first printing area 1221 can be rectangular. The pattern of the second printing area can be rectangular, rhombic or a combined pattern. For example, when the pattern of the second printing area 1222 is a combined pattern, the combined pattern is square in the middle along the first direction X, and the two ends of the square along the first direction X extend out trapezoidal shapes.

[0123] In the present application, reference is made to Figure 2 When the first printing area 1221 and the second printing area 1222 are both multiple, the first printing area 1221 and the second printing area 1222 are arranged alternately along the first direction X. The opening rate of the first printing area 1221 is greater than the opening rate of the second printing area 1222. That is, along the first direction X, the opening rate of the partial area corresponding to the filament structure 11 in the printing slot is lower than the opening rate of the remaining area where the filament structure 11 is staggered.

[0124] Optionally, the opening rate of the first printing area 1221 is greater than or equal to 80% and less than or equal to 100%, for example, 80%, 85%, 90%, 95% or 100%. When the opening rate of the first printing area 1221 meets the above opening rate range, it indicates that there is little shielding in the first printing area 1221, and the paste passability is good, thereby having good printing quality.

[0125] Optionally, the opening rate of the second printing area 1222 is greater than or equal to 30% and less than or equal to 70%, for example, 30%, 50% or 70%. It can be understood that since the filament structure 11 is arranged corresponding to the second printing area 1222, the more the filament structure 11, the lower the opening rate measured by the second printing area 1222. When the opening rate of the second printing area 1222 meets the above opening rate range, it indicates that there are enough filament structures 11 arranged corresponding to the second printing area 1222 to better enhance the structural strength of the printing screen 1. And the opening rate of the second printing area 1222 is not too low to avoid poor paste passability due to too low opening rate, which cannot prepare continuous current collecting grid lines, thereby causing the current collected by the current collecting grid lines to be effectively converged to the bus bar.

[0126] It should be noted that the above opening rate can be detected by a screen detector.

[0127] Optionally, as Figure 2As shown, the width W2 of the slurry buffer section 121 is 50 μm to 200 μm, for example, 50 μm, 100 μm, 150 μm or 200 μm. When the width of the slurry buffer section 121 satisfies the above range, the slurry can flow smoothly into the slurry buffer section 121 and be stored in the slurry buffer section 121. When the squeegee presses on the surface of the screen body 10, the squeegee extends into the slurry buffer section 121 with the width range, and then the slurry in the slurry buffer section 121 is pressed out.

[0128] It is considered that if the widest part of the slurry printing section 122 is too wide, the area of the substrate formed on the screen body 10 is small, which reduces the mechanical strength of the screen body 10, is not conducive to improving the overall mechanical strength and service life of the printing screen 1, and the too wide W3 also means that more slurry needs to be consumed; if the widest part of the slurry printing section 122 is too narrow, it means that the slurry cannot be smoothly inked, and it is extremely easy to cause the second printing area 1222 to be blocked during printing and cannot prepare continuous current collecting grid lines.

[0129] Therefore, optionally, the width W3 of the widest part of the slurry printing section 122 is 10 μm to 100 μm, for example, 10 μm, 50 μm or 100 μm. When the width of the widest part of the slurry printing section 122 satisfies the above range, the widest part of the slurry printing section 122 has good slurry passability to improve the printing quality of the area, and also avoids affecting the mechanical strength of the screen body 10 and consuming more slurry due to being too wide.

[0130] It can be understood that if the width W5 of the first printing area 1221 is less than 3 μm, the particles, for example, silver particles, contained in the slurry will be difficult to pass through the first printing area 1221 and cannot prepare continuous current collecting grid lines. If the width W5 of the first printing area 1221 is greater than 15 μm, the wet weight of the slurry during printing is large, the width of the grid line obtained by printing will be large, and then the light shielding area is large, which is not conducive to the cost reduction and efficiency improvement of the solar cell.

[0131] Therefore, preferably, the width W5 of the first printing area 1221 is 3 μm to 15 μm, for example, 3 μm, 5 μm, 6 μm, 7 μm, 8 μm, 9 μm, 10 μm, 12 μm or 15 μm. When the width of the first printing area 1221 satisfies the above range, the first printing area 1221 is wide enough, which is conducive to the slurry passing through the first printing area 1221, so that the first printing area 1221 has good printing quality. Moreover, the first printing area 1221 is not too wide, which avoids the problems of large wet weight of the slurry and large light shielding area of the grid line due to being too wide, and is conducive to the cost reduction and efficiency improvement of the solar cell; and the first printing area 1221 is not too narrow, which cannot effectively print the slurry, especially when the particle size of the metal particles in the slurry is large, the too narrow first printing area 1221 is not conducive to the inking of the slurry.

[0132] The screen body and the filament structure of the present application are described in detail below.

[0133] In some embodiments, referring to Figure 3 The screen body 10 comprises a first metal layer 14 and a second metal layer 15 stacked along the thickness direction Z of the screen body. The slurry printing section 122 penetrates the first metal layer 14, and the slurry storage section 121 penetrates the second metal layer 15 along the thickness direction Z of the screen body.

[0134] The present application divides the screen body 10 into the first metal layer 14 and the second metal layer 15, which can be manufactured separately, so that the slurry storage section 121 and the slurry printing section 122 can be configured as different patterns.

[0135] Optionally, the filament structure 11 is a metal wire connected to the second metal layer 15. The connection relationship between the metal wire and the second metal layer 15 is preferably fixed connection. Further, the metal wire is integrally formed with the second metal layer 15. In this way, the metal wire and the second metal layer 15 are both made of metal materials, and they can be manufactured by a unified processing method. For example, the metal wire and the second metal layer 15 can be manufactured together by an electrodeposition process, so as to simplify the manufacturing process and improve the bonding strength between them.

[0136] Optionally, the material of the first metal layer 14 and / or the second metal layer 15 is nickel steel alloy. Nickel steel alloy is a kind of alloy steel containing nickel element. The addition of nickel can effectively improve the strength of steel, so that it can withstand greater external force and load, and nickel can improve the corrosion resistance of steel in many media. The printing screen 1 made of nickel steel alloy has strong structural strength and toughness, as well as good fatigue resistance and corrosion resistance.

[0137] Optionally, the thickness T2 of the first metal layer 14 is 5 μm-20 μm, for example, 5 μm, 10 μm, 15 μm or 20 μm. When the thickness of the first metal layer 14 meets the above thickness range, the first metal layer 14 is thick enough, and thus has high structural strength. Moreover, since the depth of the slurry printing section 122 is consistent with the thickness T2 of the first metal layer 14, that is, the slurry printing section 122 also has sufficient depth, the slurry fills the slurry printing section 122 and is printed on the silicon wafer, and the height of the gate line obtained by printing is high enough, so that the gate line has a moderate cross-sectional area to ensure that the carrier resistance transmission loss on the gate line is not too large, and the small light shielding area can increase the photoelectric conversion efficiency of the solar cell. Moreover, the first metal layer 14 is not too thick to avoid high slurry wet weight caused by the first metal layer 14 being too thick, and the thick first metal layer 14 will reduce the flowability of the slurry in the narrow printing groove 12.

[0138] Optionally, the thickness T3 of the second metal layer 15 is 5-20 μm, for example, 5 μm, 10 μm, 15 μm or 20 μm. When the thickness of the second metal layer 15 satisfies the above thickness range, the second metal layer 15 is thick enough, and thus has high structural strength. Moreover, the second metal layer 15 is not too thick, so as to avoid reducing the flowability of the paste in the narrow printing groove 12 due to the over-thickness of the second metal layer 15.

[0139] In a second aspect, referring to Figures 6 to 11 The embodiment of the present application discloses a manufacturing method of a printing screen 1, comprising the following steps:

[0140] Manufacturing the silk-like structure 11: manufacturing the silk-like structure 11 on the substrate;

[0141] Manufacturing the screen body 10: manufacturing the screen body 10 with the printing groove 12 on the substrate with the silk-like structure 11; wherein the printing groove 12 penetrates the screen body 10 along the thickness direction Z of the screen body, and the length direction of the printing groove 12 is the first direction X; the silk-like structure 11 is arranged at the corresponding position of the printing groove 12 on the screen body 10; along the first direction X, the silk-like structure 11 is arranged at the local area corresponding to the printing groove 12; the silk-like structure 11 extends along the second direction Y, and the second direction Y intersects the first direction X.

[0142] The beneficial effects of the manufacturing method of the present application are described below.

[0143] The manufacturing method manufactures the printing screen 1 in a step-by-step manner, specifically, manufacturing the silk-like structure 11 first, and then manufacturing the screen body 10. The silk-like structure 11 is manufactured separately, so that the characteristics of the silk-like structure 11 can be customized and adjusted, such as the material strength and size of the silk-like structure 11. For example, the silk-like structure 11 can be made of high-strength metal, and the screen body 10 can be made of low-cost metal. In this way, the printing screen 1 manufactured by the manufacturing method can have high strength and low cost.

[0144] Moreover, the manufacturing method can be used to manufacture the printing screen 1 as described in the first aspect. The printing screen 1 is manufactured by arranging the silk-like structure 11 at the local area of the printing groove 12, and the structure of the screen body 10 is reinforced at the local area of the printing groove 12. The printing groove 12 can maintain a continuous shape to print continuous grid lines. Moreover, the printing groove 12 has good paste passing property in the remaining areas without the silk-like structure 11, so that the grid lines have a more flat topography.

[0145] The step of manufacturing the silk-like structure of the present application is described in detail below.

[0146] In some embodiments, the step of fabricating the filamentary structure comprises the following sub-steps:

[0147] fabricating a first glue layer: referring to (A) of FIG. 1, a first glue layer 21 is fabricated on a partial area of the non-conductive substrate 2; Figure 6

[0148] depositing a first conductive layer: referring to (B) of FIG. 1, a first conductive layer 22 is deposited on the side of the first glue layer 21 facing away from the substrate 2; Figure 6

[0149] fabricating a patterned second glue layer: referring to (C) of FIG. 1, a patterned second glue layer 23 is fabricated on the side of the first conductive layer 22 facing away from the first glue layer 21, so that a partial area of the first conductive layer 22 is exposed to the second glue layer 23, and the exposed area of the first conductive layer 22 corresponds to the pattern of the filamentary structure 11; Figure 6

[0150] electrodepositing the filamentary structure: referring to (D) of FIG. 1, the filamentary structure 11 is electrodeposited on the exposed area of the first conductive layer 22. Figure 6

[0151] In some embodiments, the substrate 2 is made of glass, non-conductive resin or polymer.

[0152] The first glue layer 21 is made of ultraviolet light curing glue (UV glue) or other types of non-conductive glue. The thickness of the first glue layer 21 is, for example, 2 μm to 15 μm. The first glue layer 21 can be fabricated by coating or printing. The first glue layer 21 serves as a spacer, so that the filamentary structure 11 is spaced apart from the substrate 2, and the filamentary structure 11 can be combined with the second metal layer 15 to be fabricated later.

[0153] The first conductive layer 22 is made of nickel-based alloy or copper alloy. The thickness of the first conductive layer 22 is, for example, 10 nm to 15 nm. The first conductive layer 22 can be deposited by PVD (Physical Vapor Deposition). The first conductive layer 22 serves as a conductive base for the electrodeposition of the filamentary structure 11.

[0154] The second glue layer 23 is made of ultraviolet light curing glue (UV glue) or other types of non-conductive glue. The second glue layer 23 can be fabricated by coating or printing. It can be understood that, due to the arc-shaped edge of the filamentary structure, the edge of the second glue layer 23 also has an arc-shaped edge. After the first conductive layer 22 is printed with the second glue layer 23, the pattern of the exposed area of the first conductive layer 22 is the same as the pattern of the filamentary structure 11. In this way, the exposed area of the first conductive layer 22 can be electrodeposited with the filamentary structure 11. The electrodeposition can be electroforming.

[0155] ​​​​The steps of manufacturing the screen body in the present application are described in detail as follows.

[0156] In some embodiments, referring to Figure 7 , before the steps of manufacturing the screen body, the manufacturing method further comprises the following steps:

[0157] Manufacturing the third adhesive layer 24: covering the third adhesive layer 24 on the filament structure 11.

[0158] The third adhesive layer 24 can be ultraviolet curing adhesive (UV adhesive) or other types of non-conductive glue. The third adhesive layer 24 can be made by coating or printing. The third adhesive layer 24 serves to shield the filament structure 11 to avoid the filament structure 11 from continuing to deposit upward during the manufacturing of the screen body 10. Specifically, the third adhesive layer 24 also covers the side of the second adhesive layer 23 away from the substrate 2.

[0159] Further, referring to Figure 8 and Figure 9 , the steps of manufacturing the screen body comprise the following sub-steps:

[0160] Manufacturing the fourth adhesive layer: referring to (A) of Figure 8 , manufacturing the fourth adhesive layer 25 on the local area of the substrate 2; wherein the fourth adhesive layer 25 is connected with the third adhesive layer 24, and the pattern after connection corresponds to the pattern of the slurry printing section of the printing slot;

[0161] Depositing the second conductive layer: referring to (B) of Figure 8 , depositing the second conductive layer 26 on the area of the substrate 2 except the third adhesive layer 24 and the fourth adhesive layer 25;

[0162] Electrodepositing the first metal layer: referring to (C) of Figure 8 , electrodepositing the first metal layer 14 on the side of the second conductive layer 26 away from the substrate 2; wherein along the thickness direction of the substrate 2, the side of the first metal layer 14 away from the substrate 2 is located below the bottom surface of the filament structure 11;

[0163] Manufacturing the fifth adhesive layer: referring to (A) of Figure 9 , manufacturing the fifth adhesive layer 27 on the local area of the first metal layer 14, and the pattern of the fifth adhesive layer 27 corresponds to the pattern of the printing slot;

[0164] Manufacturing the second metal layer: referring to (B) of Figure 9 , manufacturing the second metal layer 15 on the exposed area of the first metal layer 14 to connect the filament structure 11 with the second metal layer 15 to obtain the screen body 10; wherein the second metal layer 15 is formed with the slurry buffer section 121.

[0165] The fourth adhesive layer 25 can be ultraviolet light curing adhesive (UV adhesive) or other types of non-conductive glue. The fourth adhesive layer 25 can be made by coating or printing. The thickness of the fourth adhesive layer 25 is, for example, 3-15 μm. The fourth adhesive layer 25 is used to connect the third adhesive layer 24 into one piece, and the connected pattern corresponds to the pattern of the paste printing section 122 of the printing slot 12. In this way, when the metal is deposited subsequently, the fourth adhesive layer 25 and the third adhesive layer 24 will not deposit metal on the surface, thereby forming the paste printing section 122.

[0166] The material of the second conductive layer 26 is, for example, nickel-based alloy or copper alloy, and the thickness of the second conductive layer 26 is, for example, 10-15 nm. The first conductive layer 22 is deposited by, for example, PVD (Physical Vapor Deposition). The second conductive layer 26 is used to provide a conductive basis for the electrodeposition of the first metal layer 14.

[0167] The electrodeposition of the first metal layer 14 is, for example, electroplating.

[0168] The fifth adhesive layer 27 can be ultraviolet light curing adhesive (UV adhesive) or other types of non-conductive glue. The fifth adhesive layer 27 can be made by coating or printing. When the metal is deposited subsequently, the fifth adhesive layer 27 will not deposit metal on the surface, thereby forming the paste buffer section 121.

[0169] The electrodeposition of the second metal layer 15 is, for example, electroplating. It can be understood that, in the process of electrodeposition of the second metal layer 15, when the metal is deposited to the same height of the filament structure 11, the filament structure 11 can be combined with the deposited metal, and the prepared second metal layer 15 is combined with the filament structure 11.

[0170] Further, referring to Figure 10 After the step of making the screen body, the method further comprises the following steps:

[0171] Separating the screen body: separating the screen body 10 from the substrate 2;

[0172] Removing the adhesive: removing the first adhesive layer 21, the second adhesive layer 23, the third adhesive layer 24, the fourth adhesive layer 25 and the fifth adhesive layer 27 on the screen body;

[0173] Removing the first conductive layer 22.

[0174] The screen body 10 can be separated from the substrate 2 by peeling.

[0175] The way of removing the glue is, for example, using a glue remover to dissolve and remove the first glue layer 21, the second glue layer 23, the third glue layer 24, the fourth glue layer 25 and the fifth glue layer 27. The glue remover can be selected according to the material of the glue layer, and details are not described herein.

[0176] The way of removing the first conductive layer is, for example, heat treatment and ultrasonic cleaning. Since the first conductive layer 22 is thin, the thickness is only 10-15 nm, while the thickness of the first metal layer and the second metal layer is 5-20 μm, which is much larger than the thickness of the first conductive layer. Therefore, removing the thin first conductive layer 22 will not have a great impact on the thick first metal layer 14 and the second metal layer 15. In addition, the second conductive layer 26 can be removed together in the process of removing the first conductive layer 22.

[0177] After removing the first conductive layer 22, referring to Figure 11 The printing screen 1 manufactured by the manufacturing method includes a screen body 10 and a filament structure 11. The screen body 10 is provided with a printing groove 12, the printing groove 12 penetrates the screen body 10 along the thickness direction Z of the screen body, and the length direction of the printing groove 12 is the first direction X. The filament structure 11 is arranged at the position of the screen body 10 provided with the printing groove 12. Along the first direction X, the filament structure 11 is arranged corresponding to the local area of the printing groove 12. The filament structure 11 extends along the second direction Y, and the second direction Y intersects the first direction X. The beneficial effects of the printing screen 1 have been described in detail in the first aspect above, and details are not described herein.

[0178] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A printing screen, characterized in that The screen printing plate comprises: a screen body, which is provided with a printing groove penetrating through the screen body along the thickness direction of the screen body, and the length direction of the printing groove is a first direction; and a filament structure, which is arranged on the screen body at the position provided with the printing groove, and is arranged corresponding to the local area of the printing groove along the first direction, and extends along a second direction intersecting the first direction. At least one of the filament structures has an arc-shaped edge on at least one side in the first direction, which is at least partially close to the end of the filament structure connected with the screen body, so that at least one end of the filament structure has an arc-shaped chamfered portion.

2. The printing screen according to claim 1, characterized in that Both sides of at least one of the filament structures in the first direction have the arc-shaped edge, which extends to both ends of the filament structure along the second direction, so that both ends of the filament structure have the arc-shaped chamfered portion.

3. The printing screen according to claim 2, characterized in that The size of the filament structure along the first direction is a width, and the width of the filament structure widens from the middle to both ends along the second direction. The curvature of the arc-shaped edge is 0.01 rad to 1 rad; and / or 4. The printing screen according to claim 2, characterized in that The width W1 of the filament structure along the first direction is 3 μm to 18 μm; and / or The thickness T1 of the filament structure along the thickness direction of the screen body is 3 μm to 20 μm. The printing groove comprises a slurry buffer segment and a slurry printing segment connected in communication along the thickness direction of the screen body.

5. The printing screen according to claim 1, characterized in that The width of the slurry buffer segment is W2. The width of the slurry printing segment is the same at different positions along the first direction, or the slurry printing segment is configured as a width varying structure. When the slurry printing segment is configured as the width varying structure, the width of the widest part of the slurry printing segment is W3, and the following relationship is satisfied: W2≥W3. When the width of the slurry printing segment is the same at different positions, the width of the slurry printing segment is W4, and the following relationship is satisfied: W2>W4. The second direction is perpendicular to the first direction. When the slurry printing segment is configured as the width varying structure, the slurry printing segment has a first printing area and a second printing area connected in communication along the first direction, the width of the first printing area is W5, the width of the widest part of the second printing area is W3, and the following relationship is satisfied: W5<W3.

6. The printing screen according to claim 5, characterized in that The filament structure is arranged in the slurry buffer segment and corresponding to the second printing area. A plurality of filament structures are arranged in the first direction to form a comb-shaped assembly, and the comb-shaped assembly is arranged corresponding to the second printing area.

7. The printing screen according to claim 6, characterized in that The opening rate of the first printing area is greater than or equal to 80% and less than or equal to 100%, and the opening rate of the second printing area is greater than or equal to 30% and less than or equal to 70%; and / or 8. The printing screen according to claim 6, characterized in that The width W2 of the slurry buffer segment is 50 μm to 200 μm; and / or The width W3 of the widest part of the slurry printing segment is 10 μm to 100 μm; and / or The width W5 of the first printing area is 3 μm to 15 μm. ​ 9. The printing screen according to claim 5, characterized in that The filamentous structure is arranged at one end of the slurry buffer section close to the slurry printing section.

10. The printing screen according to claim 5, characterized in that The screen body comprises a first metal layer and a second metal layer arranged in layers; In the thickness direction of the screen body, the slurry printing section penetrates through the first metal layer, and the slurry buffer section penetrates through the second metal layer; The filamentous structure is a metal wire connected to the second metal layer.

11. The printing screen according to claim 10, characterized in that The first metal layer is made of nickel steel alloy; and / or, The second metal layer is made of nickel steel alloy; and / or, The thickness T2 of the first metal layer is 5-20 μm; and / or, The thickness T3 of the second metal layer is 5-20 μm.

12. A method of making a printing screen, characterized in that The method comprises the following steps: manufacturing a filamentous structure on a substrate; manufacturing a screen body with printing grooves on the substrate with the filamentous structure; wherein the printing grooves penetrate through the screen body in the thickness direction of the screen body, and the length direction of the printing grooves is the first direction; the filamentous structure is arranged at the position of the screen body provided with the printing grooves; in the first direction, the filamentous structure is arranged corresponding to the local area of the printing grooves; the filamentous structure extends in the second direction intersecting the first direction.

13. The method of manufacturing according to claim 12, wherein, The step of manufacturing the filamentous structure comprises the following sub-steps: manufacturing a first adhesive layer on the local area of the substrate not conducting electricity; depositing a first conductive layer on the side of the first adhesive layer away from the substrate; manufacturing a patterned second adhesive layer on the side of the first conductive layer away from the first adhesive layer, so that the local area of the first conductive layer is exposed to the second adhesive layer, and the exposed area of the first conductive layer corresponds to the pattern of the filamentous structure; electrodepositing the filamentous structure on the exposed area of the first conductive layer.

14. The method of manufacturing according to claim 13, wherein, Before the step of manufacturing the screen body, the manufacturing method further comprises the following steps: manufacturing a third adhesive layer covering the filamentous structure; The step of manufacturing the screen body comprises the following sub-steps: manufacturing a fourth adhesive layer on the local area of the substrate; wherein the fourth adhesive layer is connected with the third adhesive layer, and the pattern after connection corresponds to the pattern of the slurry printing section of the printing groove; depositing a second conductive layer on the area of the substrate except the third adhesive layer and the fourth adhesive layer; electrodepositing a first metal layer on the side of the second conductive layer away from the substrate; wherein in the thickness direction of the substrate, the side of the first metal layer away from the substrate is below the bottom surface of the filamentous structure; manufacturing a fifth adhesive layer on the local area of the first metal layer, and the pattern of the fifth adhesive layer corresponds to the pattern of the slurry buffer section of the printing groove; manufacturing a second metal layer on the exposed area of the first metal layer, so that the filamentary structure is connected to the second metal layer, to obtain the screen body; wherein the second metal layer is formed with the slurry buffer section; After the step of manufacturing the screen body, the manufacturing method further comprises the following steps: separating the screen body from the substrate; removing the first, second, third, fourth and fifth adhesive layers on the screen body; removing the first conductive layer.

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