Single crystal furnace and automatic single crystal furnace cleaning method

Abstract

The invention provides a single crystal furnace and an automatic cleaning method, and the single crystal furnace comprises a furnace body with an opening at the top; the furnace cover covers and seals the opening, an observation window is formed in the furnace cover, and the observation window comprises an observation hole formed in the furnace cover and a transparent baffle installed in the observation hole and used for sealing the observation hole; the scraper is slidably attached to the first side of the transparent baffle; the driving assembly is located on the second side of the transparent baffle, coupled with the scraper and used for driving the scraper to move along the preset path under the preset condition so as to scrape the transparent baffle. The driving assembly drives the scraper to move, under the condition that the preset conditions are met, the scraper is automatically driven to move along the surface of the transparent baffle, shielding objects attached to the scraper are removed, it is ensured that the observation window is kept clean, and the misjudgment risk is reduced. The growth state of the silicon single crystal rod in the furnace can be observed more accurately and clearly through the cleaned observation window, so that the judgment precision of the crystal quality is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of single crystal furnaces, and particularly relates to a single crystal furnace and an automatic cleaning method of a single crystal furnace. BACKGROUND

[0002] In the production process of a single crystal silicon rod for solar photovoltaics, a single crystal furnace is a key device for growing a single crystal silicon rod. The single crystal furnace uses a graphite heater and other heaters to heat and melt a solid polycrystalline silicon raw material, and then forms a single crystal silicon rod through recrystallization. This process usually needs to observe and monitor the inside of the single crystal furnace, so an observation window is arranged on the single crystal furnace. However, silicon vapor, oxides or impurities (such as SiO2 particles) volatilized in the furnace will adhere to the inner surface of the observation window, and long-term accumulation will form a fogging or deposition layer, causing the observation window to be blurred, leading to misjudgment of the melt liquid level, the crystal diameter or defects, and thus affecting the adjustment of process parameters (such as pulling speed and temperature), and even causing crystal breakage or reducing the yield of finished products.

[0003] It should be noted that the above content is not necessarily prior art, and is not used to limit the patent protection scope of the present application. SUMMARY

[0004] The embodiments of the present application provide a single crystal furnace and an automatic cleaning method of a single crystal furnace to solve or alleviate one or more technical problems in the prior art.

[0005] The first aspect of the embodiments of the present application provides a single crystal furnace, comprising: a furnace body having an opening at the top; a furnace cover arranged to cover and seal the opening, wherein an observation window is arranged on the furnace cover, and the observation window comprises an observation hole arranged on the furnace cover and a transparent baffle plate installed in the observation hole and used to seal the observation hole; a scraper slidably arranged on a first side of the transparent baffle plate; a driving assembly located on a second side of the transparent baffle plate and coupled with the scraper, and used to drive the scraper to move along a predetermined path to scrape the transparent baffle plate under a predetermined condition.

[0006] Optionally, the driving assembly comprises a first magnetic coupling part and a driving motor, the first magnetic coupling part is magnetically coupled with the scraper, and the driving motor is used to drive the first magnetic coupling part to move.

[0007] Optionally, the scraper further comprises a second magnetic coupling part, the second magnetic coupling part is arranged at an end of the scraper body away from the transparent baffle plate, and is used to be magnetically coupled with the first magnetic coupling part.

[0008] Optionally, the observation hole comprises a first opening and a second opening in communication, the first opening is located at a first side of the transparent baffle, and the second opening is located at a second side of the transparent baffle. An inner wall of the observation hole is provided with a guide groove, the guide groove is located between the second opening and the transparent baffle, and the guide groove is used for accommodating part of the driving assembly and for allowing the driving assembly to slide along the guide groove.

[0009] Optionally, the driving assembly further comprises: A light transmittance detection assembly is electrically connected with the driving assembly and is arranged at an outer edge of the transparent baffle, and is used for detecting the light transmittance of the transparent baffle. In a case where a preset condition is met, the light transmittance detection assembly controls the driving assembly to drive the scraper to move.

[0010] Optionally, the scraper comprises a blade body and a wear-resistant layer, the wear-resistant layer is wrapped around the blade body, and a material of the wear-resistant layer comprises Si3N4.

[0011] Optionally, the scraper is provided with a scraping edge face, one end of the scraping edge face is adjacent to the transparent baffle, and an included angle formed by the scraping edge face and the transparent baffle is an obtuse angle.

[0012] A second aspect of the embodiment of the application provides a single crystal furnace automatic cleaning method, an observation window is arranged on a furnace cover of a single crystal furnace, the observation window comprises an observation hole and a transparent baffle for closing the observation hole, and a scraper and a driving assembly that are coupled to each other are arranged at two sides of the transparent baffle. The method comprises: In a case where a preset condition is met, the driving assembly drives the scraper to scrape the transparent baffle along a predetermined path from an initial position. In a case where the scraper reaches an end point of the predetermined path, the driving assembly drives the scraper to return to the initial position.

[0013] Optionally, in the case where the preset condition is met, the driving assembly drives the scraper to scrape the transparent baffle along the predetermined path from the initial position, which comprises: The light transmittance of the transparent baffle is detected by a light transmittance detection assembly. In a case where the light transmittance of the transparent baffle is lower than a preset threshold value, the driving assembly drives the scraper to move; or In a case where a fluctuation value of the light transmittance of the transparent baffle within a preset time exceeds a preset range, the driving assembly drives the scraper to move.

[0014] Optionally, in the case where the preset condition is met, the driving assembly drives the scraper to scrape the transparent baffle along the predetermined path from the initial position, which comprises: record the last running stop time of the scraper by a timer; In the case that the interval between the current time and the last running stop time of the scraper exceeds a preset time length, the driving assembly drives the scraper to move.

[0015] The technical solution of the present application can have the following advantages: The single crystal furnace of the present application drives the scraper to move through the driving assembly, and can automatically drive the scraper to move along the surface of the transparent baffle to effectively remove the oxides, impurities or other shielding objects attached thereto, so as to ensure that the observation window is kept clean and reduce the risk of misjudgment. Moreover, manual wiping by the operator is not needed, thereby avoiding the inconvenience and safety risk of manual intervention in the high-temperature environment. Meanwhile, the growth state of the single crystal silicon rod in the furnace can be more accurately and clearly observed through the cleaned observation window, thereby improving the judgment accuracy of the crystal quality.

[0016] The above summary is intended to illustrate the present application and is not intended to be limiting thereof. Further aspects, implementations and features of the present application will be apparent from the detailed description and the accompanying drawings, which are intended to be illustrative only, and are not intended to limit the present application in any way. BRIEF DESCRIPTION OF DRAWINGS

[0017] In the drawings, like reference numerals refer to same or similar components throughout the several views. These drawings are not necessarily to scale. It should be understood that these drawings have been simplified for the purpose of clarity only.

[0018] Figure 1 A structural schematic diagram of a furnace cover of a single crystal furnace provided by the present application; Figure 2 A top view of the furnace cover of the single crystal furnace provided by the present application; Figure 3 A schematic diagram of a cross section along Figure 2 the A-A direction; Figure 4 A partial B enlarged schematic diagram in Figure 3 ; Figure 5 A schematic diagram of a scraper position of the single crystal furnace provided by the present application; Figure 6 A flow chart of an automatic cleaning method of the single crystal furnace of the present application is schematically shown; Figure 7 A specific flow chart of step S100 in Figure 6 is schematically shown; Figure 8 Another specific flowchart of step S100 in Figure 6 Another specific flowchart of step S100 in Figure 9 Another specific flowchart of step S100 in Figure 6 Another specific flowchart of step S100 in

[0019] Reference Signs List: Furnace cover 11; Scraper 13; Observation hole 111; Guide groove 112; Transparent baffle 113; First magnetic coupling part 151; Light transmittance detection assembly 155. DETAILED DESCRIPTION

[0020] Embodiments of the present application are described in detail below with reference to the attached drawing figures, wherein the embodiments of the application are shown by way of examples. In the drawings, the size of layers, regions, elements and the relative sizes of the layers, regions, elements, and the like can be exaggerated for clarity. The same or similar components are denoted by the same reference numerals throughout the drawings. The embodiments described below are examples for explaining the present application and should not be considered limiting.

[0021] It should be understood that when an element or layer is referred to as being "on", "adjacent", "connected to" or "coupled to" another element or layer, it can be directly on, adjacent, connected or coupled to the other element or layer, or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on", "directly adjacent", "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. can be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present application and, similarly, a second element, component, region, layer or section discussed below could be termed a first element, component, region, layer or section without departing from the teachings of the present application. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting.

[0022] In this application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixing" and the like should be understood in a broad sense, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0023] It should be noted that the terms "first", "second", and the like in the description and claims of this application and the above drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the terms thus used can be interchanged under appropriate circumstances, so that the embodiments of the application described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not have to be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0024] In this application, when referring to a numerical interval (i.e. a numerical range), unless otherwise specified, the distribution of the selected values in the numerical interval is considered to be continuous and includes both numerical endpoints (i.e. the minimum and maximum values) of the numerical interval and every value between the two numerical endpoints. Unless otherwise specified, when a numerical interval refers only to integers within the numerical interval, including both endpoint integers of the numerical range and every integer between the two endpoints, it is equivalent to directly listing each integer. When multiple numerical ranges are provided to describe a feature or characteristic, these numerical ranges can be combined. In other words, unless otherwise indicated, the numerical ranges disclosed in this application should be understood to include any and all sub-ranges encompassed therein. The "numerical" in the numerical interval can be any quantitative value, such as a number, a percentage, a ratio, etc. The "numerical interval" is intended to broadly include quantitative intervals such as percentage intervals, ratio intervals, and value intervals.

[0025] The embodiment of the present application provides a single crystal furnace and a single crystal furnace automatic cleaning method. Based on this, to alleviate the problem that the observation window on the single crystal furnace is blocked, resulting in unsatisfactory observation effect. See the following.

[0026] In the following, exemplary embodiments according to the present application will be described in more detail with reference to the accompanying drawings. It should be understood that these exemplary embodiments can be implemented in many different forms and should not be interpreted as being limited to the embodiments set forth herein.

[0027] Referring to Figures 1 to 5 The single crystal furnace provided by the embodiment of the present application comprises a furnace body, a furnace cover 11, a scraper 13 and a driving assembly. The following will be described in detail. The furnace body is used for containing molten silicon material and performing single crystal pulling, and has an opening at the top to install the furnace cover 11 and provide an observation and operation passage.

[0028] The furnace cover 11 covers and seals the opening, and has an observation window comprising an observation hole 111 formed on the furnace cover 11 and a transparent baffle 113 installed in the observation hole 111 and used for sealing the observation hole 111. The furnace cover 11 is used for sealing the furnace body and forming a sealed cavity to ensure the stability of the atmosphere and thermal field in the furnace. Specifically, the transparent baffle 113 can be made of high-temperature heat-resistant glass or quartz glass to ensure good optical transmittance and thermal stability.

[0029] The scraper 13 is slidably attached to a first side of the transparent baffle 113, i.e. a side facing the inside of the furnace body. The scraper 13 is used to remove dust, powder or condensed particles attached to the surface of the transparent baffle 113, to maintain the cleanliness of the transparent baffle 113 and thus ensure the visibility of the observation window.

[0030] The driving assembly is located at a second side of the transparent baffle 113 and coupled with the scraper 13, and is used for driving the scraper 13 to move along a predetermined path to scrape the transparent baffle 113 under a predetermined condition.

[0031] The single crystal furnace of the embodiment of the present application can automatically drive the scraper 13 to move along the surface of the transparent baffle 113 to effectively remove oxides, impurities or other shielding objects attached thereto under the condition of meeting the predetermined condition, so as to ensure the cleanliness of the observation window and reduce the risk of misjudgment. Moreover, manual wiping by the operator is not required, which avoids the inconvenience and safety risk of manual intervention in the high-temperature environment. Meanwhile, the growth state of the single crystal silicon rod in the furnace can be more accurately and clearly observed through the cleaned observation window, so as to improve the judgment accuracy of the crystal quality.

[0032] Further, in the embodiment, the driving assembly comprises a first magnetic coupling part 151 and a driving motor, the first magnetic coupling part 151 is magnetically coupled with the scraper 13, and the driving motor is used for driving the first magnetic coupling part 151 to move.

[0033] In the embodiment, the driving assembly and the scraper 13 are magnetically coupled, which can avoid the complex sealing problem caused by mechanical connection. In actual production, the single crystal furnace usually works in the working conditions of high temperature, vacuum or filled with inert gas. If the scraper 13 is driven by mechanical structure connection, it is difficult to seal the mechanical structure, and the maintenance cost is high. The first magnetic coupling part 151 can be connected with the scraper 13 without direct contact, avoiding the transmission structure penetrating through the furnace cover 11, and avoiding the sealing problem of the mechanical structure, and reducing the failure risk of the mechanical structure in high temperature, corrosive or easily contaminated environment.

[0034] Further, in the embodiment, the scraper 13 further comprises a second magnetic coupling part, which is arranged at one end of the scraper body away from the transparent baffle 113 and is used for magnetic coupling with the first magnetic coupling part 151. Specifically, the first magnetic coupling part 151 is located outside the transparent baffle 113 and is connected with the driving motor, for moving along the surface of the transparent baffle 113 under the action of the driving motor. The second magnetic coupling part is located on the side of the scraper 13 away from the transparent baffle 113, i.e. in the sealing space between the furnace cover 11 and the transparent baffle 113. By arranging the second magnetic coupling part in the same direction as the magnetic field of the first magnetic coupling part 151, the two can be attracted and moved synchronously by magnetic force.

[0035] The scraper 13 and the driving part are magnetically coupled, without mechanical connection penetrating through the furnace cover 11. In the internal environment of the single crystal furnace with high temperature, high cleanliness or high sealing requirement, reliable scraping action can be realized without damaging the sealing structure.

[0036] In other embodiments, the second magnetic coupling part can also be located on the side of the scraper 13, as long as the second magnetic coupling part is connected with the scraper 13 and magnetically coupled with the first magnetic coupling part 151.

[0037] Specifically, based on the consideration of the high temperature resistance, corrosion resistance and mechanical strength of the single crystal furnace, the materials of the first magnetic coupling part 151 and the second magnetic coupling part can include neodymium iron boron (NdFeB) magnetic steel, samarium cobalt (SmCo) magnetic steel, etc. For example, neodymium iron boron magnet can be used as the main driving magnet outside the furnace cover 11 (normal temperature area), and samarium cobalt magnet or packaged NdFeB magnet can be used inside the furnace cover 11 (high temperature area).

[0038] In an optional embodiment, the observation hole 111 comprises a first opening and a second opening in communication, the first opening is located at a first side of the transparent baffle 113, and the second opening is located at a second side of the transparent baffle 113. An inner wall of the observation hole 111 is provided with a guide groove 112, the guide groove 112 is located between the second opening and the transparent baffle 113, and the guide groove 112 is used for accommodating part of the driving assembly and for sliding the driving assembly along the guide groove 112.

[0039] The driving assembly can be partially embedded in the guide groove 112 and slide along a predetermined path in the guide groove 112, so as to drive the scraper 13 magnetically coupled thereto to slide synchronously on the inner side of the transparent baffle 113, complete the scraping action, and the guide groove 112 can effectively guide the movement path of the driving assembly and prevent movement deviation. In addition, the driving assembly is hiddenly arranged in the guide groove 112, which can reduce the occupation of the external space of the furnace cover 11, and can also reduce pollution, damage or operation interference caused by exposure.

[0040] In an optional embodiment, the driving assembly further comprises a light transmittance detection assembly 155, the light transmittance detection assembly 155 is electrically connected with the driving assembly and is arranged at an outer edge of the transparent baffle 113, and is used for detecting the light transmittance of the transparent baffle 113. In the case that a preset condition is met, the light transmittance detection assembly 155 controls the driving assembly to drive the scraper 13 to move.

[0041] In some embodiments, the light transmittance detection assembly 155 can comprise a light emitting source and a receiving sensor, for example, a combination of an infrared light source and a photosensitive receiver, the emitted light penetrates the transparent baffle 113 and is received by the receiver, and the light transmittance is calculated by comparing the incident light intensity and the received light intensity. The light transmittance detection assembly 155 can be fixedly installed on the furnace cover 11 and arranged at the edge of the transparent baffle 113, so as to ensure that the transparency of the main viewing area of the observation window is not affected.

[0042] In some embodiments, the light transmittance detection assembly 155 can be integrated in the PLC controller and control the driving assembly through the PLC controller.

[0043] Specifically, in the embodiment, the preset condition can be that the light transmittance of the observation window is lower than a preset threshold value, or a light transmittance fluctuation value exceeds a preset range. For example, when the light transmittance detection assembly 155 detects that the light transmittance of the transparent baffle 113 is lower than the preset threshold value, the light transmittance detection assembly 155 controls the driving assembly to start and drive the scraper 13 to move and scrape, so as to remove the shielding object on the transparent baffle 113. Alternatively, when the light transmittance detection assembly 155 detects that the light transmittance fluctuation value at two times exceeds the preset range, the light transmittance detection assembly 155 controls the driving assembly to start and drive the scraper 13 to move and scrape.

[0044] By the light transmittance detection assembly 155 described above, intelligent identification and automatic response to the cleaning needs of the observation window can be achieved, without the need for frequent manual inspection or manual triggering, greatly improving the convenience and automation level of the single crystal furnace. At the same time, it also helps to maintain the continuity of observation and the accuracy of judgment during the crystal pulling process, avoids misjudgment or operation delay due to blocked view, and ensures the timeliness and reliability of single crystal silicon rod quality control.

[0045] In other embodiments, the light transmittance detection assembly 155 can also be used with a timer, a remote control system, or a fault alarm assembly to achieve more rich control strategies and information linkage.

[0046] In an optional embodiment, the scraper 13 is driven by the driving assembly to move back and forth on the transparent baffle 113 multiple times to scrape back and forth on the transparent baffle 113, or the scraper 13 can scrape on the transparent baffle 113 in a wavy path to improve cleaning efficiency.

[0047] In an optional embodiment, the scraper 13 can include a blade body and a wear-resistant layer wrapped around the blade body, and the material of the wear-resistant layer includes Si3N4 (silicon nitride).

[0048] Specifically, to ensure that the scraper 13 does not react with the silicon vapor in the furnace and does not deform at high temperature, and to be able to withstand the internal temperature of the single crystal furnace during operation (> 1500℃), the hardness of the scraper 13 needs to be lower than that of the observation window material. The blade body material is preferably molybdenum (Mo) or tungsten (W) alloy, and the blade body is wrapped with Si3N4. Silicon nitride can improve the scraping efficiency and service life of the scraper 13 on the surface of the transparent baffle 113, avoid scratches or pollution to the observation window caused by wear of the scraper 13 material, and thus ensure the clarity of observation.

[0049] In an optional embodiment, the scraper 13 is provided with a scraping edge surface, one end of the scraping edge surface is adjacent to the transparent baffle 113, and the included angle between the scraping edge surface and the transparent baffle 113 is obtuse. Thus, the scraper 13 forms a more stable and gentle contact state with the surface of the transparent baffle 113 during sliding, reducing the contact pressure.

[0050] In addition, the obtuse angle between the scraping edge surface and the transparent baffle 113 can also improve the smoothness of the scraping action and the coverage of the contact surface, forming a wider contact belt area during the movement of the scraper 13, thereby enhancing the removal efficiency of fine particles, oil film and other low-attached contaminants, and avoiding the phenomenon of jumping or uneven scraping of the scraper 13 caused by too small angle. Specifically, the angle between the scraping edge surface and the transparent baffle 113 can be 100°~150° (such as 100°, 110°, 120°, 130°, 140°, 150°) In some embodiments, the scraping surface can also be arc-shaped, and the arc-shaped scraping surface is in smooth contact with the transparent baffle 113 as much as possible, thereby improving the resistance of the scraper 13 to scrape the obscuration on the transparent baffle 113.

[0051] The application also provides an automatic cleaning method of a single crystal furnace, wherein an observation window is arranged on a furnace cover of the single crystal furnace, the observation window comprises an observation hole and a transparent baffle closing the observation hole, and a scraper and a driving assembly coupled to each other are arranged on two sides of the transparent baffle, that is, the single crystal furnace in the embodiment has the structure of the single crystal furnace in the above embodiment.

[0052] Specifically, referring to Figure 6 , the automatic cleaning method of the single crystal furnace comprises the following steps. Step S100: In the case where a preset condition is met, the driving assembly drives the scraper to scrape the transparent baffle along a predetermined path from an initial position.

[0053] Step S102: In the case where the scraper reaches an end point of the predetermined path, the driving assembly drives the scraper to return to the initial position.

[0054] The predetermined path can be a straight line, an arc or other trajectories adapted to the shape of the observation window. In some embodiments, the predetermined path can also be a path connected multiple times between an initial point and a turning point, for example, the moving path is: D point-F point-D point-F point-D point, so as to realize the back-and-forth scraping of the scraper on the transparent baffle.

[0055] If the scraper fails to return to the initial position, it can be blocked by the dirt on the transparent baffle, thereby preventing the movement of the scraper. At this time, an alarm signal is sent to prompt the operator to check the obstacle.

[0056] In an optional embodiment, the preset condition can be determined according to the light transmittance of the transparent baffle.

[0057] Specifically, referring to Figure 7 , the step of driving the scraper to scrape the transparent baffle along a predetermined path from an initial position in the case where a preset condition is met (step S100) can comprise the following steps. Step S200: Detecting the light transmittance of the transparent baffle by a light transmittance detection assembly. In the case where the light transmittance of the transparent baffle is lower than a preset threshold, the driving assembly drives the scraper to move.

[0058] In the embodiment, the light transmittance detection assembly is used to determine whether the light transmittance of the transparent baffle is lower than a preset threshold. If the detection value is lower than the preset threshold (for example, 70% or 80%), it is considered that the transparent baffle has been contaminated and cannot meet the observation or monitoring requirements. At this time, the automatic cleaning of the transparent baffle is triggered, and the driving assembly drives the scraper to move, thereby cleaning the transparent baffle.

[0059] Alternatively, please refer to Figure 8 , the driving assembly drives the scraper to scrape the transparent baffle along a predetermined path from an initial position (step S100) under the condition that a preset condition is met, which can include: Step S300, detecting the light transmittance of the transparent baffle by a light transmittance detection assembly.

[0060] Step S302, the driving assembly drives the scraper to move when the fluctuation value of the light transmittance of the transparent baffle within a preset time exceeds a preset range.

[0061] When the light transmittance of the transparent baffle exceeds the set fluctuation range (for example, the fluctuation exceeds ±10%) within the set time window (such as 5 minutes, 10 minutes) although it is not lower than the threshold value, it can be determined that there is unstable shielding or interference on the surface of the transparent baffle, at which time the automatic cleaning of the transparent baffle is triggered, and the driving assembly drives the scraper to move, thereby cleaning the transparent baffle.

[0062] In the embodiment, through the intelligent judgment of the above-mentioned preset condition, the automatic and refined cleaning trigger logic can be realized, the scraper cleaning process is more targeted and adaptive, and the stability and accuracy of the single crystal pulling state monitoring in the single crystal furnace are improved.

[0063] In an optional embodiment, please refer to Figure 9 , the driving assembly drives the scraper to scrape the transparent baffle along a predetermined path from an initial position (step S100) under the condition that a preset condition is met, which can also include: Step S400, recording the last running stop time of the scraper by a timer.

[0064] The last stop time of the scraper when completing the cleaning task and returning to the initial position is recorded by the timer, and the time information can be used as a reference basis for periodic cleaning.

[0065] Step S402, the driving assembly drives the scraper to move when the interval between the current time and the last running stop time of the scraper exceeds a preset time length.

[0066] In the case that the time interval between the current time of the timer and the last running stop time of the scraper exceeds a preset time length (for example, 10 minutes, 30 minutes or a configurable time length), the driving assembly is controlled to start and drive the scraper to perform the cleaning operation.

[0067] Even if the light transmittance is not lower than the threshold value or the light transmittance fluctuation does not occur, the cleaning action can be periodically performed to preventively remove the shielding objects that have not yet affected the monitoring but have begun to accumulate, thereby ensuring the cleanliness of the observation window and the stability of the monitoring data.

[0068] It can be understood that the timing cleaning strategy and the transmittance detection triggering strategy of the embodiment can be used in combination, so that the wiper control logic is more flexible, can respond to real-time changes in the degree of contamination, has periodic maintenance capability, and is beneficial to adaptive optimization in different use environments.

[0069] In other embodiments, other strategies for triggering wiper cleaning can also be used. Specifically, the step of driving the wiper to scrape the transparent baffle along the predetermined path from the initial position (step S100) when the preset condition is met can further include: Step S500, capturing an image observed through the transparent baffle by an imaging device.

[0070] Step S502, when the triggering condition is met, the driving assembly drives the wiper to move.

[0071] The triggering condition can include image sharpness, image contrast, and image blur degree, and the image sharpness, blur degree, etc. can be identified by machine vision or an AI model. For example, when the image sharpness decreases, the contrast decreases, or the image edge blurs, it is judged that the observation window is contaminated, at which time the triggering condition is met, the automatic cleaning of the transparent baffle is triggered, and the driving assembly drives the wiper to move, thereby cleaning the transparent baffle.

[0072] It should be noted that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. The orientation terms "inner" and "outer" refer to the inner and outer of the profile of each component itself. For example, if the devices in the drawings are inverted, the devices described as "above" or "above" other devices or structures will be positioned "below" or "below" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0073] It is also need to be explained that, in the present application, "one embodiment", "another embodiment", "embodiment" and the like refer to the specific features, structures or characteristics described in connection with the embodiment, which are included in at least one embodiment described generally in the present application. The same expression appearing in several places in the specification does not necessarily refer to the same embodiment. Further, when a specific feature, structure or characteristic is described in connection with any embodiment, it is claimed that the implementation of such feature, structure or characteristic in connection with other embodiments also falls within the scope of the present application.

[0074] In the above embodiments, the description of each embodiment has its own focus, and the parts not described in detail in a certain embodiment can be referred to the relevant description of other embodiments.

[0075] It is also need to be explained that, the above is only the preferred embodiment of the present application, and does not limit the patent protection scope of the present application, and any equivalent structure or equivalent process transformation using the content of the present application specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A single crystal furnace characterized by comprising: The utility model relates to a single crystal furnace cover observation window and a single crystal furnace cover observation window cleaning method, and the single crystal furnace cover observation window comprises a furnace body, an opening is formed in the top of the furnace body, a furnace cover is arranged on the furnace body and covers the opening, an observation window is formed in the furnace cover, the observation window comprises an observation hole formed in the furnace cover and a transparent baffle installed in the observation hole and used for closing the observation hole, a scraper is slidably arranged on a first side of the transparent baffle, a driving assembly is arranged on a second side of the transparent baffle and is coupled with the scraper, and the driving assembly is used for driving the scraper to move along a predetermined path to scrape the transparent baffle under a predetermined condition. The driving assembly comprises a first magnetic coupling part and a driving motor, the first magnetic coupling part is magnetically coupled with the scraper, and the driving motor is used for driving the first magnetic coupling part to move. The scraper further comprises a second magnetic coupling part arranged at an end of the scraper body away from the transparent baffle and used for magnetically coupling with the first magnetic coupling part. The observation hole comprises a first opening and a second opening in communication, the first opening is located on the first side of the transparent baffle, and the second opening is located on the second side of the transparent baffle. An inner wall of the observation hole is provided with a guide groove between the second opening and the transparent baffle, the guide groove is used for accommodating part of the driving assembly and for allowing the driving assembly to slide along the guide groove.

2. The single crystal furnace of claim 1, wherein The driving assembly further comprises a light transmittance detection assembly electrically connected with the driving assembly and arranged on an outer edge of the transparent baffle, and the light transmittance detection assembly is used for detecting the light transmittance of the transparent baffle.

3. The single crystal furnace of claim 2, wherein The light transmittance detection assembly controls the driving assembly to drive the scraper to move when a preset condition is met.

4. The single crystal furnace of claim 2, wherein The scraper comprises a scraper body and a wear-resistant layer, the wear-resistant layer is wrapped on the scraper body, and the material of the wear-resistant layer comprises Si3N4. The scraper is provided with a scraping edge surface, one end of the scraping edge surface is adjacent to the transparent baffle, and the included angle between the scraping edge surface and the transparent baffle is an obtuse angle.

5. The single crystal furnace of claim 2, wherein A single crystal furnace cover is provided with an observation window, the observation window comprises an observation hole and a transparent baffle closing the observation hole, and two sides of the transparent baffle are respectively provided with a scraper and a driving assembly magnetically coupled with each other. The method comprises the following steps. The driving assembly drives the scraper to scrape the transparent baffle from an initial position along a predetermined path when a preset condition is met.

6. The single crystal furnace of any one of claims 1 to 5, wherein The driving assembly drives the scraper to return to the initial position when the scraper reaches the end point of the predetermined path.

7. The single crystal furnace as claimed in any one of claims 1 to 5, wherein The driving assembly drives the scraper to scrape the transparent baffle from an initial position along a predetermined path when a preset condition is met, which comprises the following steps.

8. A method of automatically cleaning a single crystal furnace, characterized by, The light transmittance of the transparent baffle is detected by a light transmittance detection assembly. The driving assembly drives the scraper to move when the light transmittance of the transparent baffle is lower than a preset threshold value. The driving assembly drives the scraper to move when the fluctuation value of the light transmittance of the transparent baffle within a preset time exceeds a preset range. The driving assembly drives the scraper to scrape the transparent baffle from an initial position along a predetermined path when a preset condition is met, which comprises the following steps.

9. The method of claim 8, wherein the cleaning is performed by a robot. A last running stop time of the scraper is recorded by a timer. ​ ​ ​ 10. The method of claim 8, wherein the cleaning is performed by a robot. ​ ​ In the case that the interval between the current time and the last running stop time of the doctor exceeds a preset time length, the driving assembly drives the doctor to move.

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