Gallium reactor for horizontal HVPE furnace tube

Abstract

The invention belongs to the field of gallium reactors for horizontal HVPE furnace tubes, and particularly relates to a gallium reactor for a horizontal HVPE furnace tube. A device bottom plate is arranged below the device body, and a stable production lifting mechanism is arranged between the device body and the device bottom plate. The stable production lifting mechanism comprises an air inlet flange, the air inlet flange is arranged at the left side end of the device main body, and the air inlet flange is connected with a flange at the left side end of the device main body; through the design of a stable production lifting mechanism, the function of improving stability is achieved, and the problems that an existing device is not provided with an assembly capable of being used for stable generation, a boat box is provided with a rectangular section, it is ensured that the contact area of the HCL atmosphere and a liquid gallium source is constant in the reaction process, and the section does not change along with reduction of the gallium amount; the problems that the generation amount of GaCL3 is more stable, the change along with time is small, the stability of a crystal growth process is facilitated, but the stability of an existing device is poor are solved, and the stability is improved.

Description

Technical Field

[0001] This invention relates to the field of gallium reactors for horizontal HVPE furnace tubes, specifically a gallium reactor for horizontal HVPE furnace tubes. Background Technology

[0002] Hydride vapor phase epitaxy (HVPE) equipment is currently a key piece of equipment used in the market for growing third-generation semiconductor materials (such as gallium nitride, gallium oxide, and aluminum nitride crystals). The gallium reactor used in this equipment is directly related to the control of the reaction rate of the raw materials, the flow field structure, and the mass transfer efficiency. It is the core component of the equipment, and it can be said that the quality of the gallium reactor design directly determines whether the equipment can grow crystals, the crystal growth rate, and the crystal quality.

[0003] A specific example of a horizontal HVPE furnace tube gallium reactor can be found in application number CN202220043335.1, which relates to a tubular furnace reactor. This reactor involves discharging material into a quartz tube, and then discharging a purification liquid into the purification chamber through its exhaust port. The heating element of the tubular furnace heats the material inside the quartz tube, while a drive unit rotates the quartz tube. Simultaneously, an exhaust valve is opened to release harmful gases generated during the reaction into a filter chamber. After filtration through multiple filters, the harmful gases are then discharged into the purification liquid within the purification chamber via a gas delivery pipe. The purification liquid then purifies the harmful substances in the gas before the gas is discharged through the exhaust port of the purification chamber. This improves equipment safety and the uniformity of material heating. The reactor includes a reaction unit, a drive unit, and a tubular furnace. A heating element is located at the front end of the tubular furnace, and the reaction unit is installed within this element. The drive unit is located at the right end of the tubular furnace. The reaction unit stores the material. The aforementioned device does not have components for stable production. By using a rectangular cross-section boat, the contact area between the HCl atmosphere and the liquid gallium source is kept constant during the reaction process, and the cross-section does not change as the amount of gallium decreases. This makes the GaCl3 generation more stable and less variable over time, which is beneficial to the stability of the crystal growth process. However, the existing device has poor stability. Therefore, a horizontal HVPE furnace tube gallium reactor is proposed to address the above problems. Summary of the Invention

[0004] To address the issue that existing devices lack components for stable production, this invention proposes a horizontal HVPE furnace tube gallium reactor. By using a rectangular cross-section boat, the contact area between the HCl atmosphere and the liquid gallium source is kept constant during the reaction process, and the cross-section does not change as the amount of gallium decreases. This makes the GaCl3 production more stable and less variable over time, which is beneficial to the stability of the crystal growth process. However, this invention also addresses the problem of poor stability in existing devices.

[0005] The technical solution adopted by the present invention to solve its technical problem is: a horizontal HVPE furnace tube gallium reactor of the present invention includes a device body; a device base plate is provided below the device body, and a stable production lifting mechanism is provided between the device body and the device base plate; The stable production lifting mechanism includes an air inlet flange, which is located on the left side of the main body of the device and connected to the flange on the left side of the main body of the device. The air inlet flange is fixedly connected to the outside of the air inlet pipe inside. The right side of the air inlet pipe is fixedly connected to the left side of the boat box main body. A gallium injection port plug is sleeved on the outside of the top of the boat box main body, and the boat box main body is threadedly connected to the gallium injection port plug. Multiple sets of fixed baffles are fixedly connected inside the boat box main body. The jet pipe on the right side of the boat box main body is fixedly connected to the left side.

[0006] Preferably, the right end of the inlet flange is fixedly connected to the left end of the first sealing block, and the right end of the first sealing block is inserted inside the left end of the device body. The first sealing block is slidably connected to the device body. The right end flange of the device body is connected to the left end of the outlet flange. The right end of the device body is fixedly connected to the left end of the second sealing block, and the right end of the second sealing block is inserted inside the outlet flange. The second sealing block is slidably connected to the outlet flange.

[0007] Preferably, the device body is provided with first fixed seats at the front and rear ends of the left and right sides of the bottom end, and the bottom end of the device body is fixedly connected to the top end of the first fixed seat. The top end of the first rotating push rod is sleeved on the outer side of the bottom end of the first fixed seat, and the first fixed seat is rotatably connected to the first rotating push rod. The bottom end of the first rotating push rod is sleeved on the outer side of the top end of the second fixed seat, and the first rotating push rod is rotatably connected to the second fixed seat. The bottom end of the second fixed seat is fixedly connected to the top end of the first support fixed platform.

[0008] Preferably, the bottom end of the first support fixing platform is fixedly connected to the top end of the first guide moving plate, the top end of the main body of the device is fixedly connected to the bottom end of the fixing block, the left end of the inside of the fixing block is fixedly connected to the left end of the motor, the right end of the motor is fixedly connected to the left end of the bidirectional threaded rod, the right end of the bidirectional threaded rod is inserted into the right end of the fixing block, and the bidirectional threaded rod is rotatably connected to the fixing block. The left and right ends of the outside of the bidirectional threaded rod are also fitted with the first guide moving plate, and the bidirectional threaded rod is threadedly connected to the first guide moving plate. The top end of the first guide moving plate is fixedly connected to the bottom end of the first support fixing platform.

[0009] Preferably, the front and rear ends of the fixed block are also provided with first fixed guide rods. The left ends of the first fixed guide rods are fixedly connected to the left and right sides of the fixed block, respectively. A first guide moving plate is sleeved on the outside of the first fixed guide rod, and the first fixed guide rod is slidably connected to the first guide moving plate.

[0010] Preferably, a fixed support rod is fixedly connected to one end of the top of the first support fixing platform near the middle position, and the other end of the fixed support rod is fixedly connected to the side end of the second support fixing platform. The top of the second support fixing platform is fixedly connected to the bottom end of the third fixing seat. The bottom end of the second fixing seat is sleeved on the outer side of the top of the third fixing seat, and the third fixing seat is rotatably connected to a second rotating push rod.

[0011] Preferably, the top end of the second rotating push rod is sleeved on the outer side of the bottom end of the fourth fixed seat, and the second rotating push rod is rotatably connected to the fourth fixed seat, the top end of the fourth fixed seat being fixedly connected to the bottom end of the second guide moving plate.

[0012] Preferably, the top end of the second guide moving plate is fixedly connected to the bottom end of the fixed plate, the top end of the fixed plate is fixedly connected to the bottom end of the fixed support plate, and the top end of the fixed support plate abuts against the outer side of the bottom end of the device body.

[0013] Preferably, the front and rear ends of the left and right sides of the top of the device body are also provided with second fixed guide rods, and the top of the device body is fixedly connected to the bottom of the second fixed guide rod. The second guide moving plate is sleeved on the outside of the second fixed guide rod, and the second guide moving plate is slidably connected to the second fixed guide rod.

[0014] Preferably, fixed limiting blocks are also provided on the left and right sides at the front and rear ends of the device body. The bottom end of the fixed limiting block is fixedly connected to the top end of the second fixed guide rod. Four sets of universal wheels are also fixedly connected to the bottom end of the device body.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention achieves the function of increasing stability through the structural design of the stable production lifting mechanism, which solves the problem that the existing device does not have a component for stable generation. By using a rectangular cross-section for the boat box, the contact area between the HCl atmosphere and the liquid gallium source is kept constant during the reaction process and does not change with the reduction of gallium content. This makes the GaCl3 generation more stable and less variable over time, which is beneficial to the stability of the crystal growth process. However, the existing device has poor stability, so the present invention improves the stability. 2. This invention achieves improved efficiency through the structural design of the stable production lifting mechanism, solving the problem that existing devices do not have components that can improve efficiency. Through the special internal flow channel design of the boat box, it can fully contact the liquid gallium source with a longer reaction time, a lower flow rate, and a longer contact path length, thereby improving the reaction rate of HCl and gallium, providing high-purity HCl and high-purity gallium source utilization, and improving efficiency. 3. Through the structural design of the stable production lifting mechanism, this invention realizes the function of automatically adjusting the height of the device according to the site conditions. This solves the problem that existing devices do not have components for adjusting the height of the main body of the device, and therefore cannot adapt to different heights according to different site conditions, resulting in limitations in use. This invention improves applicability. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a partial cross-sectional structural diagram of the present invention; Figure 3 This is a schematic diagram of the first stable production lifting component structure of the present invention; Figure 4 This is a schematic diagram of the second stable production lifting component structure of the present invention; Figure 5 For the present invention Figure 2 Enlarged structural diagram at point A in the middle; Figure 6 For the present invention Figure 2 Enlarged structural diagram at point B; Figure 7 For the present invention Figure 2 Enlarged structural diagram at point C; Figure 8 For the present invention Figure 4 Enlarged structural diagram at point D; Figure 9 For the present invention Figure 4 Enlarged structural diagram at point E; Figure 10 For the present invention Figure 4 Enlarged structural diagram at point F. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] Example 1 Please see Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 6As shown, a horizontal HVPE furnace tube gallium reactor includes a device body 1; a device base plate 2 is provided below the device body 1, and a stable production lifting mechanism is provided between the device body 1 and the device base plate 2. The stable production lifting mechanism includes an air inlet flange 10, which is located on the left side of the main body 1 and connected to the flange on the left side of the main body 1. The air inlet flange 10 is fixedly connected to the outside of the air inlet pipe 14. The right side of the air inlet pipe 14 is fixedly connected to the left side of the boat box body 15. A gallium injection port plug 16 is fitted on the outer side of the top of the boat box body 15, and the boat box body 15 is threadedly connected to the gallium injection port plug 16. Multiple sets of fixed baffles 17 are fixedly connected inside the boat box body 15. The fixed baffles 17 are S-shaped. The jet pipe 18 on the right side of the boat box body 15 is fixed on the left side. The connection is as follows: the main body 15 of the boat box is square; the right end of the air inlet flange 10 is fixedly connected to the left end of the first sealing block 11, and the right end of the first sealing block 11 is inserted into the left end of the device body 1, and the first sealing block 11 is slidably connected to the device body 1; the right end flange of the device body 1 is connected to the left end of the air outlet flange 12; the right end of the device body 1 is fixedly connected to the left end of the second sealing block 13, and the right end of the second sealing block 13 is inserted into the air outlet flange 12, and the second sealing block 13 is slidably connected to the air outlet flange 12; both the first sealing block 11 and the second sealing block 13 are circular. During operation, when injecting gallium, it is first injected through the injection head above the boat body 15. Then, the gallium injection port plug 16 is tightened along the injection head knob of the boat body 15. When the gallium is inside the boat body 15, the fixed baffles 17 inside the boat body 15 are S-shaped. After the gas is input into the boat body 15 through the air inlet pipe 14, it will increase the reaction time, flow rate, and contact path length of the liquid gallium source, thereby improving the reaction rate of HCl and gallium. Then, it is discharged through the jet pipe 18. When the air inlet flange 10 and the air outlet flange 12 are assembled together with the air inlet flange 10, the first sealing block 11 will be inserted into the air inlet flange 10, and the second sealing block 13 will be inserted into the air outlet flange 12. The first sealing block 11 and the second sealing block 13 can activate a high-strength sealing effect.

[0019] Example 2 Please see Figure 1 , Figure 2 , Figure 4 , Figure 7 , Figure 8 , Figure 9As shown in Figure 10, in contrast to Embodiment 1 as another implementation of the present invention, the front and rear ends of the left and right sides of the bottom of the device body 1 are also provided with first fixed seats 19, and the bottom of the device body 1 is fixedly connected to the top of the first fixed seat 19. The top of the first rotating push rod 20 is sleeved on the outer side of the bottom of the first fixed seat 19, and the first fixed seat 19 is rotatably connected to the first rotating push rod 20. The bottom of the first rotating push rod 20 is sleeved on the outer side of the top of the second fixed seat 21, and the first rotating push rod 20 is rotatably connected to the second fixed seat 21. The bottom of the second fixed seat 21 is fixedly connected to the top of the first support fixed platform 22. The inner wall of the first rotating push rod 20 is circular.The bottom end of the first support fixing platform 22 is fixedly connected to the top end of the first guide moving plate 23. The top end of the device body 1 is fixedly connected to the bottom end of the fixing block 25. The left end of the inside of the fixing block 25 is fixedly connected to the left end of the motor 26. The right end of the motor 26 is fixedly connected to the left end of the bidirectional threaded rod 24. The right end of the bidirectional threaded rod 24 is inserted into the right end of the fixing block 25, and the bidirectional threaded rod 24 is rotatably connected to the fixing block 25. The inner wall of the fixing block 25 is circular. The left and right ends of the outside of the bidirectional threaded rod 24 are also fitted with the first guide moving plate 23, and the bidirectional threaded rod 24 is threadedly connected to the first guide moving plate 23. The top end of the first guide moving plate 23 is connected to the first support fixing platform. 22 is fixedly connected to the bottom end; the front and rear ends of the fixed block 25 are also provided with first fixed guide rods 27. The left ends of the first fixed guide rods 27 are fixedly connected to the left and right sides of the fixed block 25 respectively. The first fixed guide rods 27 are fitted with first guide moving plates 23 on the outside, and the first fixed guide rods 27 are slidably connected to the first guide moving plates 23. The first fixed guide rods 27 are designed as round rods; one end of a fixed support rod 28 is fixedly connected to the top of the first support fixed platform 22 near the middle position. The other end of the fixed support rod 28 is fixedly connected to the side end of the second support fixed platform 29. The top end of the second support fixed platform 29 is fixedly connected to the bottom end of the third fixed seat 30. The top outer side of the fixed base 30 is fitted with the bottom end of the second fixed base 21, and the third fixed base 30 is rotatably connected to the second rotating push rod 31, the inner wall of the second rotating push rod 31 being circular; the top end of the second rotating push rod 31 is fitted with the outer side of the bottom end of the fourth fixed base 32, and the second rotating push rod 31 is rotatably connected to the fourth fixed base 32, the top end of the fourth fixed base 32 being fixedly connected to the bottom end of the second guide moving plate 33, the second guide moving plate 33 being square; the top end of the second guide moving plate 33 being fixedly connected to the bottom end of the fixed plate 34, the top end of the fixed plate 34 being fixedly connected to the bottom end of the fixed support plate 35, the top end of the fixed support plate 35 abutting against the outer side of the bottom end of the device body 1, the fixed support plate 3... 5 is an arc-shaped design; the front and rear ends of the left and right sides of the top of the main body 1 are also provided with second fixed guide rods 36, and the top of the main body 1 is fixedly connected to the bottom of the second fixed guide rods 36. The second guide moving plate 33 is sleeved on the outside of the second fixed guide rod 36, and the second guide moving plate 33 is slidably connected to the second fixed guide rod 36. The second fixed guide rod 36 is a circular rod design; the left and right sides of the front and rear ends of the bottom of the main body 1 are also provided with fixed limiting blocks 37, and the bottom of the fixed limiting blocks 37 is fixedly connected to the top of the second fixed guide rod 36. The bottom of the main body 1 is also fixedly connected with four sets of universal wheels 38. The fixed limiting blocks 37 are circular designs. During operation, the motor 26 inside the fixed block 25 is started first. When the motor 26 starts, it drives the bidirectional threaded rod 24 to rotate. As the bidirectional threaded rod 24 rotates, its right end will rotate along the inside of the fixed block 25. Simultaneously, the rotation of the bidirectional threaded rod 24 will drive the first guide moving plates 23 at both ends of its outer side to move outward along the outer side of the bidirectional threaded rod 24. As the first guide moving plates 23 move outward, they will simultaneously move along the outer side of the first fixed guide rod 27. Simultaneously, the movement of the first guide moving plates 23 will drive the first support fixed platform 22 to move. When the first support fixed platform 22 moves, it will drive the first support fixed platform 2... The second fixed seats 21 at both ends of the top move outwards synchronously. During this outward movement, the bottom end of the first rotating push rod 20 moves outwards, and simultaneously rotates along the outer side of the second fixed seat 21. At the same time, the bottom end of the first rotating push rod 20 also rotates along the outer side of the first fixed seat 19. During this rotation, the first rotating push rod 20 applies a pushing force to the first fixed seat 19, which is then transmitted to the device body 1, causing the device body 1 to move upwards. Once the device body 1 reaches the appropriate height, the motor 26 is stopped. And when the first support fixed platform 22 moves outwards… During the movement, as the first support fixing platform 22 moves outward, it simultaneously drives the fixing support rod 28 to move outward. When the fixing support rod 28 moves outward, it applies a pushing force to the second support fixing platform 29, causing the second support fixing platform 29 to move outward. As the second support fixing platform 29 moves outward, it simultaneously drives the third fixing seat 30 to move. During this movement, the third fixing seat 30 pushes the bottom end of the second rotating push rod 31 to move, causing the second rotating push rod 31 to rotate along the outer side of the third fixing seat 30. Simultaneously, as the second rotating push rod 31 rotates, its top end rotates along the outer side of the fourth fixing seat 32, and... The fourth fixed seat 32 applies an upward thrust, which is transmitted to the second guide moving plate 33, causing the second guide moving plate 33 to move upward. When the second guide moving plate 33 moves upward, it will drive the fixed plate 34 and the fixed support plate 35 to move upward synchronously. The fixed support plate 35 always remains below the device body 1 and is in contact with the outer side of the bottom end of the device body 1, thereby applying a supporting force to the device body 1 and ensuring the stability of the device body 1. At the same time, when the second guide moving plate 33 moves, it will move along the outer side of the second fixed guide rod 36. The fixed limiting block 37 can effectively prevent the second guide moving plate 33 from disengaging from the outer side of the second fixed guide rod 36.

[0020] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A gallium reactor for a horizontal HVPE furnace tube, comprising a main body (1); characterized in that: A device base plate (2) is provided below the main body (1) of the device, and a stable production lifting mechanism is provided between the main body (1) of the device and the device base plate (2); The stable production lifting mechanism includes an air inlet flange (10), which is located on the left side of the main body (1) of the device and is connected to the flange on the left side of the main body (1). The air inlet flange (10) is fixedly connected to the outside of the air inlet pipe (14) inside. The right side of the air inlet pipe (14) is fixedly connected to the left side of the boat box body (15). A gallium injection port plug (16) is sleeved on the outside of the top of the boat box body (15), and the gallium injection port plug (16) is threadedly connected to the boat box body (15). Multiple sets of fixed baffles (17) are fixedly connected inside the boat box body (15), and the left side of the jet pipe (18) on the right side of the boat box body (15) is fixedly connected.

2. A gallium reactor for a horizontal HVPE furnace tube according to claim 1, characterized in that: The right end of the inlet flange (10) is fixedly connected to the left end of the first sealing block (11), and the right end of the first sealing block (11) is inserted inside the left end of the device body (1), and the first sealing block (11) is slidably connected to the device body (1). The right end flange of the device body (1) is connected to the left end of the outlet flange (12). The right end of the device body (1) is fixedly connected to the left end of the second sealing block (13), and the right end of the second sealing block (13) is inserted inside the outlet flange (12), and the second sealing block (13) is slidably connected to the outlet flange (12).

3. A gallium reactor for a horizontal HVPE furnace tube according to claim 2, characterized in that: The device body (1) has a first fixed seat (19) at both the front and rear ends of the bottom left and right sides. The bottom end of the device body (1) is fixedly connected to the top end of the first fixed seat (19). The top end of the first rotating push rod (20) is sleeved on the outer side of the bottom end of the first fixed seat (19). The first fixed seat (19) is rotatably connected to the first rotating push rod (20). The bottom end of the first rotating push rod (20) is sleeved on the outer side of the top end of the second fixed seat (21). The first rotating push rod (20) is rotatably connected to the second fixed seat (21). The bottom end of the second fixed seat (21) is fixedly connected to the top end of the first support fixed platform (22).

4. A gallium reactor for a horizontal HVPE furnace tube according to claim 3, characterized in that: The bottom end of the first support fixed platform (22) is fixedly connected to the top end of the first guide moving plate (23). The top end of the main body (1) of the device is fixedly connected to the bottom end of the fixed block (25). The left end of the inside of the fixed block (25) is fixedly connected to the left end of the motor (26). The right end of the motor (26) is fixedly connected to the left end of the bidirectional threaded rod (24). The right end of the bidirectional threaded rod (24) is inserted into the right end of the fixed block (25), and the bidirectional threaded rod (24) is rotatably connected to the fixed block (25). The left and right ends of the outside of the bidirectional threaded rod (24) are also fitted with the first guide moving plate (23), and the bidirectional threaded rod (24) is threadedly connected to the first guide moving plate (23). The top end of the first guide moving plate (23) is fixedly connected to the bottom end of the first support fixed platform (22).

5. A gallium reactor for a horizontal HVPE furnace tube according to claim 4, characterized in that: The front and rear ends of the fixed block (25) are also provided with a first fixed guide rod (27). The left ends of the first fixed guide rod (27) are fixedly connected to the left and right sides of the fixed block (25) respectively. The first fixed guide rod (27) is sleeved with a first guide moving plate (23) on the outside, and the first fixed guide rod (27) is slidably connected to the first guide moving plate (23).

6. A gallium reactor for a horizontal HVPE furnace tube according to claim 5, characterized in that: One end of a fixed support rod (28) is fixedly connected to the top of the first support fixing platform (22) near the middle position. The other end of the fixed support rod (28) is fixedly connected to the side end of the second support fixing platform (29). The top end of the second support fixing platform (29) is fixedly connected to the bottom end of the third fixing seat (30). The bottom end of the second fixing seat (21) is sleeved on the outer side of the top end of the third fixing seat (30), and the third fixing seat (30) is rotatably connected to the second rotating push rod (31).

7. A gallium reactor for a horizontal HVPE furnace tube according to claim 6, characterized in that: The top end of the second rotating push rod (31) is sleeved on the outer side of the bottom end of the fourth fixed seat (32), and the second rotating push rod (31) is rotatably connected to the fourth fixed seat (32). The top end of the fourth fixed seat (32) is fixedly connected to the bottom end of the second guide moving plate (33).

8. A gallium reactor for a horizontal HVPE furnace tube according to claim 7, characterized in that: The top end of the second guide moving plate (33) is fixedly connected to the bottom end of the fixed plate (34), the top end of the fixed plate (34) is fixedly connected to the bottom end of the fixed support plate (35), and the top end of the fixed support plate (35) abuts against the outer side of the bottom end of the device body (1).

9. A gallium reactor for a horizontal HVPE furnace tube according to claim 8, characterized in that: The device body (1) is also provided with a second fixed guide rod (36) at the front and rear ends of the left and right sides of the top. The top of the device body (1) is fixedly connected to the bottom of the second fixed guide rod (36). The second guide moving plate (33) is sleeved on the outside of the second fixed guide rod (36) and the second guide moving plate (33) is slidably connected to the second fixed guide rod (36).

10. A gallium reactor for a horizontal HVPE furnace tube according to claim 9, characterized in that: Fixed limiting blocks (37) are also provided on the left and right sides at the front and rear ends of the device body (1). The bottom end of the fixed limiting block (37) is fixedly connected to the top end of the second fixed guide rod (36). The bottom end of the device body (1) is also fixedly connected to four sets of universal wheels (38).

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